JP2007209922A - Exhaust gas treatment method and apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an exhaust gas treatment method and apparatus which reduce an initial cost and running cost, and enable a complete removal of exhaust gas ingredients such as organic compounds in an exhaust gas. <P>SOLUTION: In the exhaust gas treatment apparatus, a micronanobubble generator 9 generates micronanobubbles, and allows washing water to contain micronanobubbles in a lower treatment part 3. The exhaust gas sucked in by a blower 19 discharges from an aeration tube 23 into the washing water containing micronanobubbles. Charcoal 15 is contained in an accommodating basket 12, and the exhaust gas discharged from the aeration tube 23 contacts to the charcoal 15. The exhaust gas components are treated by an organic compound adsorbability which the charcoal 15 has, a microorganism treatment by microorganisms 28 propagated on the surface of the charcoal 15, and an adsorption capability by micronanobubbles. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an exhaust gas treatment method and an exhaust gas treatment device, and as an example, relates to an exhaust gas treatment method and an exhaust gas treatment device for exhaust gas containing an organic compound such as a volatile organic compound in a semiconductor factory or a liquid crystal factory.

  Conventionally, as an exhaust gas treatment method and an exhaust gas treatment device in a semiconductor factory or a liquid crystal factory, for example, (1) an adsorption method using activated carbon, (2) a direct combustion method in which exhaust gas is mixed with air and directly burned, (3) There has been a method of absorbing a target gas in a liquid such as water, acid, or alkali solution.

  When treating organic exhaust gas, either the (1) adsorption method using activated carbon or zeolite, or (2) the direct combustion method in which the exhaust gas is mixed directly with air and directly burned is used in terms of treatment efficiency. It was.

  However, (1) the adsorption method using activated carbon requires such removal equipment (bag filter, mist separator, etc.) as a pre-treatment in the treatment of organic exhaust gas containing dust and mist. There was a drawback of high cost. In addition, (2) the direct combustion method in which the exhaust gas is directly mixed with the air and combusted directly has a drawback that a fuel is required and the running cost is high.

  Therefore, the above-described exhaust gas treatment methods (1) and (2) have been problematic in the era of promoting energy saving.

  Moreover, in patent document 1 (Unexamined-Japanese-Patent No. 2005-152701), the processing method of volatile organic compound waste gas is described. In this technique, a flow path for flowing a gas to be processed, a first catalyst layer for flowing a gas to be processed disposed on the upstream side of the flow path, and a downstream side of the first catalyst layer. A second catalyst layer that is spaced apart and flows through the gas that has passed through the first catalyst layer; and heating means for preheating the first catalyst layer at least above the catalyst activation temperature during startup The structure provided with this is disclosed.

  However, even in this exhaust gas treatment method, when the concentration of the volatile organic compound in the exhaust gas is high, there is a problem that a sufficient removal rate cannot be secured and the treatment of the volatile organic compound in the washing water becomes insufficient.

Therefore, it is required to find a rational method for treating volatile organic compounds in exhaust gas.
JP 2005-152701 A

  Therefore, an object of the present invention is to provide an exhaust gas treatment method and an exhaust gas treatment apparatus that can sufficiently remove exhaust gas components such as organic substances in the exhaust gas with low initial cost and running cost.

  In order to solve the above problems, the exhaust gas treatment method of the present invention is characterized by comprising a step of discharging exhaust gas into a liquid containing micro-nano bubbles.

  According to the exhaust gas treatment method of the present invention, by discharging exhaust gas into a liquid containing micro-nano bubbles, the contact efficiency between the micro-nano bubbles as the gas in the liquid and the exhaust gas as the gas is improved, and the adsorption by the micro-nano bubbles Under the function, exhaust gas can be treated efficiently.

  Moreover, the exhaust gas treatment method of one embodiment includes a step of sprinkling cleaning water containing micro-nano bubbles in the exhaust gas.

  According to the exhaust gas treatment method of this embodiment, in addition to the step of discharging the exhaust gas into the liquid containing micro-nano bubbles, the exhaust gas is discharged in a two-stage process of sprinkling cleaning water containing micro-nano bubbles into the exhaust gas. Since it processes, the removal rate with respect to the removal component in waste gas can be improved. In addition, it has been experimentally found that washing water containing micro / nano bubbles has a more washing effect than washing water not containing micro / nano bubbles.

  Moreover, in the exhaust gas treatment method of one embodiment, microorganisms are propagated in the liquid.

  According to the exhaust gas treatment method of this embodiment, the components in the exhaust gas can be decomposed and removed by the microorganisms propagated in the liquid.

  Moreover, in the exhaust gas treatment method of one embodiment, charcoal is immersed in the liquid to form biological charcoal, and microorganisms are activated by micro-nano bubbles to treat the exhaust gas.

  According to the exhaust gas treatment method of this embodiment, since charcoal is immersed in a liquid to form biological charcoal and microorganisms are activated by micro-nano bubbles, exhaust gas components can be adsorbed by biological charcoal. However, even if many exhaust gas components are adsorbed, charcoal can be automatically regenerated by activated microorganisms and maintenance-free can be achieved. Biochar is charcoal on which microorganisms have propagated.

  In the exhaust gas treatment apparatus of one embodiment, exhaust gas is discharged into a liquid containing micro / nano bubbles.

  According to the exhaust gas treatment apparatus of this embodiment, by discharging the exhaust gas into the liquid containing micro-nano bubbles, the contact efficiency between the micro-nano bubbles as the gas in the liquid and the exhaust gas as the gas is improved. The exhaust gas can be treated efficiently under the action of the adsorption function.

Further, in the exhaust gas treatment apparatus of one embodiment, a liquid containing micro-nano bubbles is stored and a lower part that discharges exhaust gas into the liquid containing micro-nano bubbles;
The exhaust gas is introduced from the lower part, and the upper part is sprinkled with washing water containing micro-nano bubbles in the exhaust gas from the lower part.

  According to the exhaust gas treatment apparatus of this embodiment, the first treatment by discharging the exhaust gas into the liquid containing the lower micro-nano bubbles, and the first treatment for spraying the cleaning water containing the micro-nano bubbles into the exhaust gas from the lower part. In step 2, the exhaust gas is processed in two stages. Therefore, the removal rate with respect to the removal component in exhaust gas can be improved compared with the conventional one-step process.

  Moreover, in the exhaust gas processing apparatus of one Embodiment, it has the biochar immersed in the said lower liquid.

  According to the exhaust gas treatment apparatus of this embodiment, in the case of biological charcoal immersed in the lower liquid, charcoal can be automatically regenerated by decomposing adsorbed components with microorganisms, and maintenance-free can be achieved.

  In addition, the exhaust gas treatment apparatus of one embodiment includes an exhaust gas suction unit that sucks exhaust gas and sends it to the lower part.

  According to the exhaust gas treatment apparatus of this embodiment, the exhaust gas can be forcibly sent to the lower part by the exhaust gas suction part, so that the exhaust gas treatment efficiency can be improved.

Further, in the exhaust gas treatment apparatus of one embodiment, the lower part is an air diffuser that discharges exhaust gas into the liquid, charcoal as a filler,
A micro / nano bubble generator for containing micro / nano bubbles in the liquid.

  According to the exhaust gas treatment apparatus of this embodiment, exhaust gas is discharged from the air diffuser into the lower liquid, and the microorganisms that propagate on the charcoal are activated by the micro / nano bubbles generated from the micro / nano bubble generator. As a result, the exhaust gas component is adsorbed on the charcoal, and the exhaust gas component can be efficiently treated with the activated microorganisms propagated on the charcoal.

  Further, in the exhaust gas treatment apparatus of an embodiment, the exhaust gas treatment apparatus has a water feeding unit that feeds the liquid containing the lower micro-nano bubbles to the upper part as the washing water containing the micro-nano bubbles, and the washing water that has passed through the upper part Return to the bottom.

  According to the exhaust gas treatment apparatus of this embodiment, the liquid containing the micronano bubbles in the lower part is forcibly sent to the upper part by the water feeding unit to obtain the washing water containing the micronano bubbles. Recycling to the top is possible.

  In one embodiment, the biochar is at least one of activated carbon, charcoal, and synthetic charcoal.

  According to the exhaust gas treatment apparatus of this embodiment, an optimal filler can be selected as the lower biochar from among activated carbon, charcoal, and synthetic charcoal that have an organic compound adsorption action and are easily procured.

Further, in the exhaust gas treatment device of one embodiment, the exhaust gas suction part sucks exhaust gas and sends it to the lower part,
A TOC meter that measures the TOC concentration of the lower liquid;
And a control unit that controls the amount of exhaust gas sent to the lower part by controlling the rotational speed of the blower according to the TOC concentration measured by the TOC meter.

  According to the exhaust gas treatment apparatus of this embodiment, the control unit controls the rotational speed of the blower in accordance with the TOC (total organic carbon) concentration of the lower liquid measured by the TOC meter. The amount of exhaust gas to be sent is set to an optimum amount according to the TOC concentration in the lower part, and energy-saving and high-efficiency operation becomes possible.

  In one embodiment, the exhaust gas contains a volatile organic compound.

  According to the exhaust gas treatment apparatus of this embodiment, the volatile organic compound in the exhaust gas can be efficiently and economically treated as compared with the conventional combustion method of volatile organic compounds.

  In one embodiment, the TOC meter is a VOC meter that measures the VOC concentration of the liquid, and the control unit rotates the blower according to the VOC concentration measured by the VOC meter. Control the number.

  According to the exhaust gas treatment apparatus of this embodiment, when the exhaust gas contains a volatile organic compound (VOC), the VOC concentration contained in the lower liquid can be accurately measured with the VOC meter. Therefore, the control unit controls the number of rotations of the blower according to the VOC concentration, so that the amount of exhaust gas sent to the lower part can be optimized according to the VOC concentration at the lower part, and energy-saving and highly efficient operation can be performed.

  In the exhaust gas treatment apparatus of one embodiment, the exhaust gas suction unit has an underwater blower disposed in the lower part, and the underwater blower sucks exhaust gas from outside the lower part and sends it to the lower part.

  According to the exhaust gas treatment apparatus of this embodiment, since the underwater blower can be installed in the lower water tank or the like, space saving can be achieved.

  According to the exhaust gas treatment method of the present invention, by discharging exhaust gas into a liquid containing micro-nano bubbles, the contact efficiency between the micro-nano bubbles as the gas in the liquid and the exhaust gas as the gas is improved, and the adsorption by the micro-nano bubbles Under the function, exhaust gas can be treated efficiently.

  Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

(First embodiment)
FIG. 1 is a diagram schematically showing an exhaust gas treatment apparatus according to a first embodiment of the present invention.

  Reference numeral 1 denotes an exhaust inlet, and an exhaust fan 20 is installed. As an example, exhaust gas containing an organic compound from a semiconductor factory or a liquid crystal factory is introduced into the exhaust inlet 1. Examples of the organic compound include isopropyl alcohol, acetone, and butyl acetate as volatile organic compounds.

  The exhaust gas treatment apparatus includes an upper watering portion 2, an intermediate portion 27 having an exhaust inlet 1 and an exhaust fan 20, and a lower treatment portion 3. The exhaust gas treated by the exhaust gas treatment device is discharged from an exhaust outlet 18 provided at the uppermost part of the exhaust gas treatment device 4. In this exhaust gas treatment apparatus, water containing micro-nano bubbles stored in the lower treatment unit 3 is transferred to the upper watering unit 2 by the watering pump 11 and sprinkled as cleaning water from the watering nozzle 17. In addition, the lower process part 3 comprises the water tank which stores the water containing a micro nano bubble, and the intermediate part 27 and the upper watering part 2 are connected in series above the lower process part 3 in order. And the lower process part 3, the intermediate part 27, and the upper watering part 2 have comprised the integral container shape. The water containing the micro / nano bubbles may be alkaline water or acid water containing micro / nano bubbles.

  The upper watering part 2 of this exhaust gas treatment apparatus has a perforated plate 13 installed near the bottom and a plastic filler 14 installed on the perforated plate 13. In this embodiment, as an example of the plastic filler 14, a filler called terralet (trade name) is employed. A watering nozzle 17 is installed at a predetermined distance further above the uppermost plastic filler 14, and cleaning water is sprinkled from the watering nozzle 17 into the plastic filler 14. A part of the exhaust gas sucked from the exhaust inlet 1 by the exhaust fan 20 of the intermediate portion 27 is introduced into the sprinkler 2.

  A blower suction portion 5 having a diameter larger than that of the duct is formed between a main body formed by the upper watering portion 2 and the lower treatment portion 3 of the exhaust gas treatment apparatus and a duct forming the exhaust inlet 1 of the intermediate portion 27. A blower suction port 6 is installed in the blower suction portion 5. The blower suction part 5 protrudes in the lateral direction between the upper watering part 2 and the lower treatment part 3. The blower suction portion 5 may have a size that can accommodate the blower suction port 6. However, it is preferable that most of the exhaust gas sucked into the exhaust inlet 1 can be sucked from the blower suction port 6.

  The blower suction port 6 is connected to a blower pipe 16 extending downward from the blower suction part 5, and the blower pipe 16 is connected to a blower 19. By driving the blower 19, the exhaust gas is sucked from the blower suction port 6 in the duct constituting the blower suction unit 5, and the exhaust gas is discharged from the diffuser pipe 23 installed near the bottom of the lower processing unit 3. This air diffuser 23 discharges centrifugal bubbles 22 that are much larger than micro-nano bubbles as exhaust gas. In a preferred example, the suction air volume of the blower 19 is set to be substantially the same as the discharge air volume of the exhaust fan 20, but if the suction air volume of the blower 19 is smaller than the discharge air volume of the exhaust fan, the upper water spray is directly from the exhaust inlet 1. The air volume of the exhaust gas introduced into the part 2 will increase. The exhaust inlet 1, the exhaust fan 20, the blower suction part 5, the blower suction port 6, the blower pipe 16, the blower 19 and the diffuser pipe 23 constitute an exhaust gas suction part.

  A micro-nano bubble generator 9 is installed in the lower processing unit 3. The micro / nano bubble generator 9 is disposed above the center in the vertical direction of the lower processing unit 3. The micro / nano bubble generator 9 is connected to the circulation pump 10 by piping. The circulation pump 10 supplies cleaning water below the center in the vertical direction of the lower processing unit 3 to the micro / nano bubble generator 9 in a necessary pressure state. Further, the micro / nano bubble generator 9 secures an amount of air necessary for generating the micro / nano bubbles from the valve 8 and the air suction pipe 7. The air suction pipe 7 is installed in an intermediate part 27 between the lower processing part 3 and the upper watering part 2 and sucks a part of the exhaust gas that has passed through the blower suction port 6 from the exhaust inlet 1.

  As a result, the micro / nano bubble generator 9 generates micro / nano bubbles in the direction of the water flow 31, and causes the washing water that is liquid in the lower processing unit 3 to contain the micro / nano bubbles. Then, the exhaust gas sucked into the blower 19 is discharged from the diffuser pipe 23 into the washing water containing micro / nano bubbles. A storage rod 12 is disposed between the air diffuser 23 and the micro / nano bubble generator 9, and charcoal 15 is stored in the storage rod 12. Therefore, the exhaust gas discharged from the air diffuser 23 comes into contact with the charcoal 15, and the exhaust gas component is obtained by the organic matter adsorption power of the charcoal 15, the microbial treatment by the microorganisms 28 propagated on the surface of the charcoal 15, and the adsorption function by the micro / nano bubbles Will be processed.

  Here, three types of bubbles will be described.

  (i) Normal bubbles (bubbles) rise in the water and eventually disappear on the surface by popping bread.

  (ii) Microbubbles are fine bubbles having a diameter of 50 microns (μm) or less, shrink in water, and eventually disappear (completely dissolve).

  (iii) Nanobubbles are said to be bubbles that are smaller than microbubbles (diameters of 1 micron or less, typically 100 to 200 nm) and can exist in water indefinitely. And a micro nano bubble can be explained as a bubble in which micro bubbles and nano bubbles are mixed.

  The charcoal 15 adsorbs the organic compound in the wash water of the lower processing unit 3. As this charcoal, activated carbon, charcoal, synthetic charcoal, etc. can be selected as an example, but the type of charcoal described above may be selected according to the properties of the exhaust gas, and charcoal other than activated charcoal, charcoal, synthetic charcoal is selected. May be.

  In addition, the microorganisms 28 propagate on the charcoal 15 over time, but the microorganisms are activated by the micro / nano bubbles generated from the micro / nano bubble generator 9 of the lower processing unit 3. By decomposing the organic compound adsorbed by the charcoal 15 with the activated microorganisms, the charcoal 15 is automatically regenerated. In addition, the washing water of the lower treatment unit 3 contains not only micro / nano bubbles but also microorganisms 28 that have propagated on the charcoal 15, so that microorganisms are contained. The washing water containing micro-nano bubbles and microorganisms is sprinkled from the vicinity of the bottom of the lower processing unit 3 through the watering pump 11 and the watering pipe L1 to the plastic filler 14 from the watering nozzle 17 of the upper watering unit 2. .

  A part of the exhaust gas sucked from the exhaust inlet 1 by the exhaust fan 20 of the intermediate portion 27 and the exhaust gas rising from the surface of the cleaning water of the lower processing unit 3 are introduced into the upper watering portion 2. Therefore, in this upper watering part 2, the washing water containing micro nano bubble and microorganisms can be made to contact exhaust gas in the plastic filler 14, and the component in exhaust gas can be removed. The exhaust gas that has been subjected to the two-stage treatment by the upper watering part 2 and the lower treatment part 3 is discharged from the exhaust outlet 18.

  Moreover, since the washing water sprayed by this upper watering part 2 falls from the upper watering part 2, and returns to the lower process part 3, a washing water can be recycled and a running cost can be reduced.

  The micro / nano bubble generator 9 is not limited to a manufacturer as long as it is commercially available, but in this embodiment, as a specific example, those of Nano Planet Research Laboratories and Auratec Co., Ltd. Adopted. Moreover, in the said embodiment, although isopropyl alcohol, acetone, and butyl acetate were mentioned as an example of a volatile organic compound, this invention is applicable even if it is another volatile organic compound.

(Second embodiment)
Next, FIG. 2 shows an exhaust gas treatment apparatus according to a second embodiment of the present invention. The exhaust gas treatment apparatus of the second embodiment is different from the first embodiment described above only in that an upper watering part 2U is provided instead of the upper watering part 2 of the first embodiment of FIG. Therefore, in the second embodiment, the same parts as those of the first embodiment described above are denoted by the same reference numerals, detailed description thereof will be omitted, and parts different from those of the first embodiment will be described.

  As shown in FIG. 2, the upper watering part 2U with which this 2nd Embodiment is provided has the plastic filler 14 of the lower five steps, and the polyvinylidene chloride filling 21 of the upper three steps.

  In the first embodiment described above, since the filler material of the upper water sprinkling part 2 is only the plastic filler material 14, some microorganisms propagate in the plastic filler material 14, but microorganisms to such an extent that they propagate in the plastic filler material 14. Therefore, the ability to treat microorganisms of volatile organic compounds contained in exhaust gas could not be expected so much.

  On the other hand, in the second embodiment, the upper three stages of the water sprinkling part 2 are filled with the polyvinylidene chloride filler 21 as an alternative to the plastic filler 14. As a result, microorganisms propagate more in the upper three-stage polyvinylidene chloride filler 21 than in the plastic filler 14, so that effective microbial treatment of volatile organic compounds in the exhaust gas becomes possible.

  In the second embodiment, not all of the filler included in the upper watering part 2U but a part of the filler is the polyvinylidene chloride filler 21. The reason for this is that when all of the filler is made of the polyvinylidene chloride filler 21, the air resistance (pressure loss) becomes large when the microorganisms propagate in the entire polyvinylidene chloride filler 21, and the exhaust gas flows into the upper watering part 2U. It may be difficult to pass through.

(Third embodiment)
Next, FIG. 3 shows an exhaust gas treatment apparatus according to a third embodiment of the present invention. The third embodiment is different from the first embodiment only in that a lower processing unit 3W is provided instead of the lower processing unit 3 of the first embodiment. Therefore, in this 3rd Embodiment, the same code | symbol is attached | subjected about the same part as 1st Embodiment, detailed description is abbreviate | omitted, and a different part from 1st Embodiment is demonstrated.

  As shown in FIG. 3, in this 3rd Embodiment, the blower piping 16W and the submerged blower 26 were arrange | positioned in the water tank which the lower process part 3W makes. Therefore, according to the third embodiment, the space of the entire apparatus can be reduced as compared with the first embodiment in which the blower 19 is installed outside the lower processing unit 3. In addition, in this 3rd Embodiment, as shown in FIG. 3, although the underwater blower 26 was arrange | positioned in the bottom part in the water tank of the lower process part 3W, if it is in the water tank of the lower process part 3W, the installation place of the underwater blower 26 Is not limited. The material of the underwater blower 26 is not particularly limited as long as it can withstand the liquidity in the water tank of the lower processing unit 3W. In addition, the liquidity in the water tank of the lower treatment unit 3W varies depending on the components in the exhaust gas, but when the component in the exhaust gas is a volatile organic compound, the liquidity in the water tank of the lower treatment unit 3W is near neutral. Therefore, there is no particular problem regarding the material of the underwater blower 26.

  Even in the case where the underwater blower 26 is employed as in the third embodiment, the exhaust gas from the blower suction portion 5 can be sucked from the blower suction port 6 and discharged from the diffuser tube 23 as in the case of a normal blower.

(Fourth embodiment)
Next, FIG. 4 shows an exhaust gas treatment apparatus according to a fourth embodiment of the present invention. The fourth embodiment is different from the second embodiment only in that the lower processing unit 3 of the third embodiment is provided instead of the lower processing unit 3 of the second embodiment. Therefore, in the fourth embodiment, parts different from the second embodiment will be described.

  As shown in FIG. 4, in the fourth embodiment, the blower pipe 16W and the submerged blower 26 are arranged in the water tank formed by the lower processing unit 3W, as in the third embodiment of FIG. Space saving.

(Fifth embodiment)
Next, FIG. 5 shows an exhaust gas treatment apparatus according to a fifth embodiment of the present invention. In the fifth embodiment, a TOC meter 54 is installed in the water tank of the lower processing unit 3 of the first embodiment of FIG. 1 and a TOC controller 55 as a control unit is installed outside the lower processing unit 3. Different from the first embodiment described above. Therefore, in the fifth embodiment, the same parts as those of the first embodiment described above are denoted by the same reference numerals and detailed description thereof will be omitted, and parts different from those of the first embodiment described above will be described.

  The TOC meter 54 is disposed in the lower processing section 3 in the vicinity of the storage trough 12 that stores the charcoal 15. The TOC meter 54 is connected to a TOC controller 55 installed outside the lower processing unit 3. The TOC controller 55 controls the rotational speed of the blower 19 to be high or low according to the level of the TOC concentration measured by the TOC meter 54.

  When the concentration of the organic compound in the exhaust gas introduced into the exhaust gas treatment device from the exhaust inlet 1 is lowered, the TOC concentration of the cleaning water in the lower treatment unit 3 is also lowered. Then, the TOC meter 54 installed in the lower processing unit 3 senses a decrease in the TOC concentration by measuring the TOC concentration. As a result, the TOC meter 54 outputs an output signal representing the sensed TOC concentration to the TOC controller 55. Then, the TOC controller 55 controls an inverter (not shown) in conjunction with the output signal to control the rotational speed of the blower 19 to reduce the intake air volume. In some cases, the blower 19 may be stopped by a signal from the TOC controller 55 when the concentration of the organic compound in the exhaust gas is considerably low. In this case, the exhaust gas introduced from the exhaust inlet 1 is processed only by the upper watering part 2. Thus, the processing capability may be sufficient only by the exhaust gas treatment by the upper sprinkler 2.

  According to the fifth embodiment, by adjusting the amount of exhaust gas introduced into the lower processing unit 3, energy can be saved as a result, and the concentration of organic compounds in the exhaust gas introduced into the exhaust gas treatment device can be reduced. On the other hand, an exhaust gas treatment apparatus capable of following the exhaust gas treatment capacity can be realized. In addition, you may combine this 5th Embodiment and the above-mentioned 2nd-4th Embodiment.

(Experimental example)
An experimental apparatus corresponding to the exhaust gas treatment apparatus of the first embodiment in FIG. 1 was manufactured. The capacity of the sprinkler 2 in this experimental apparatus for exhaust gas treatment was about 1 m ³ , the capacity of the intermediate part 27 was 0.5 m ^3, and the capacity of the processing part 3 was 1 m ³ . Further, a plastic filler 14 (trade name Teralet) was installed as a filler in the upper watering part 2 of the exhaust gas treatment experimental apparatus. Moreover, the lower processing part 3 was filled with activated carbon as charcoal 15, and a test operation was performed for one month. After a trial run for one month, exhaust gas containing acetone from a semiconductor factory was introduced from the exhaust inlet 1. Seven days after the introduction, the concentration of acetone before treatment at the exhaust inlet 1 and the concentration after treatment at the exhaust outlet 18 were measured, and the removal rate of acetone was measured. The removal rate was 96%.

It is a figure showing typically a 1st embodiment of an exhaust gas treatment device of this invention. It is a figure which shows typically 2nd Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 3rd Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 4th Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 5th Embodiment of the waste gas processing apparatus of this invention.

Explanation of symbols

1 Exhaust inlet 2, 2U sprinkler
3, 3W processing section 5 Blower suction section 6 Blower suction port 7 Air suction pipe 8 Valve 9 Micro-nano bubble generator 10 Circulating pump 11 Sprinkling pump 12 Containment rod 13 Perforated plate 14 Plastic filler 15 Charcoal 16, 16W Blower piping 17 Sprinkling nozzle 18 Exhaust outlet 19 Blower 20 Exhaust fan 21 Polyvinylidene chloride filling 22 Centibubble 23 Aeration pipe 54 TOC meter 55 TOC controller 26 Underwater blower 27 Middle part 28 Microorganism

Claims (15)

  An exhaust gas treatment method comprising a step of discharging exhaust gas into a liquid containing micro-nano bubbles. The exhaust gas treatment method according to claim 1,
An exhaust gas treatment method comprising a step of sprinkling cleaning water containing micro-nano bubbles in the exhaust gas. The exhaust gas treatment method according to claim 1,
An exhaust gas treatment method characterized in that microorganisms are propagated in the liquid. In the exhaust gas treatment method according to claim 3,
An exhaust gas treatment method characterized by immersing charcoal in the liquid to form biological charcoal, activating microorganisms with micro-nano bubbles, and treating exhaust gas.   An exhaust gas treatment apparatus that discharges exhaust gas into a liquid containing micro-nano bubbles. The exhaust gas treatment apparatus according to claim 5,
A lower part in which liquid containing micro-nano bubbles is stored and exhaust gas is discharged into the liquid containing micro-nano bubbles;
An exhaust gas treatment apparatus comprising: the exhaust gas introduced from the lower part; and an upper part for spraying cleaning water containing micro-nano bubbles into the exhaust gas from the lower part. The exhaust gas treatment apparatus according to claim 6,
An exhaust gas treatment apparatus comprising biological charcoal immersed in the lower liquid. The exhaust gas treatment apparatus according to claim 6,
An exhaust gas treatment apparatus comprising an exhaust gas suction part that sucks and sends exhaust gas to the lower part. The exhaust gas treatment apparatus according to claim 6,
The lower part is
An air diffuser for discharging exhaust gas into the liquid;
Charcoal as a filler,
An exhaust gas treatment apparatus comprising a micro / nano bubble generator for containing micro / nano bubbles in the liquid. The exhaust gas treatment apparatus according to claim 6,
A water-feeding unit that feeds the liquid containing the lower micro-nano bubbles to the upper part as washing water containing the micro-nano bubbles;
An exhaust gas treatment apparatus, wherein the cleaning water that has passed through the upper part is returned to the lower part. The exhaust gas treatment apparatus according to claim 7,
The bio-charcoal is at least one of activated carbon, charcoal, and synthetic charcoal. The exhaust gas treatment apparatus according to claim 8,
The exhaust gas suction part is
A blower that sucks exhaust gas and sends it to the lower part,
A TOC meter that measures the TOC concentration of the lower liquid;
An exhaust gas treatment apparatus comprising: a control unit that controls the amount of exhaust gas sent to the lower part by controlling the rotational speed of the blower according to the TOC concentration measured by the TOC meter. The exhaust gas treatment apparatus according to claim 5,
An exhaust gas treatment apparatus, wherein the exhaust gas contains a volatile organic compound. The exhaust gas treatment apparatus according to claim 12,
The TOC meter is
A VOC meter for measuring the VOC concentration of the liquid;
The control unit
An exhaust gas treatment apparatus, wherein the rotational speed of the blower is controlled in accordance with a VOC concentration measured by the VOC meter. The exhaust gas treatment apparatus according to claim 8,
The exhaust gas suction part is
An exhaust gas treatment apparatus comprising an underwater blower disposed in the lower part, wherein the underwater blower sucks exhaust gas from outside the lower part and sends it to the lower part.

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