JP5276820B2 - Exhaust gas treatment device and exhaust gas treatment method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an exhaust gas treatment apparatus and a treating method efficiently decomposing volatile organic compounds in exhaust gas with a little energy consumption, and reducing initial cost and running cost. <P>SOLUTION: In this exhaust gas treatment apparatus, cleaning water is sprayed by a first scrubber type gas treatment part comprising an upper water spray pipe 7, upper water spray nozzles 8, an upper packing material 9, and a perforated plate 10, and the volatile organic compounds in exhaust gas are transferred into the cleaning water by the contact of the volatile organic compounds in exhaust gas with the cleaning water. Then, sludge water containing nanobubble applied with magnetism is sprayed in a second scrubber type gas treatment part comprising a lower water spray pipe 11, lower water spray nozzles 12, a lower packing material 13 and a perforated plate 14, to efficiently oxidize and decompose the volatile organic compounds contained in the cleaning water, by the oxidization action by free radicals in nanobubbles contained in the sludge water applied with magnetism. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to an exhaust gas processing apparatus and an exhaust gas processing method for exhaust gas containing an organic compound such as a volatile organic compound in a semiconductor factory or a liquid crystal factory as an example. In a more specific example, nanobubbles are efficiently generated in washing water that has been subjected to magnetic active water treatment by applying magnetic force, and microorganisms are activated and propagated by the nanobubbles contained in the washing water, and contain microorganisms and nanobubbles. The present invention relates to an exhaust gas processing apparatus and an exhaust gas processing method capable of efficiently cleaning organic compounds in exhaust gas with cleaning water. Furthermore, using a rapid filter or activated carbon adsorption tower, the activated microorganisms contained in the generated sludge deposited on the upper part of this rapid filter and the washing water rationalized by the activated carbon adsorption treatment of the activated carbon adsorption tower in the next step The present invention relates to an exhaust gas treatment apparatus and an exhaust gas treatment method that can be treated in an automatic manner and can use cleaning water in a circulating manner.

  Conventionally, in exhaust gas treatment methods and exhaust gas treatment apparatuses in semiconductor factories and liquid crystal factories, in particular, (i) an adsorption method using activated carbon, (ii) a direct combustion method in which exhaust gas is mixed with air and directly burned, ( iii) A method of absorbing a target gas in a liquid such as water, an acid, or an alkali solution has been adopted.

  In particular, when processing organic exhaust gas, in terms of processing efficiency, either (i) an adsorption method using activated carbon or zeolite, or (ii) a direct combustion method in which the exhaust gas is mixed directly with air and burned directly. Had to choose.

  However, (i) in the adsorption method using activated carbon, dust and mist removal devices (such as bag filters and mist separators) are required as pretreatment to treat organic exhaust gas containing dust and mist. There was a drawback that the running cost was high including the regeneration cost of activated carbon.

  In addition, (ii) the direct combustion method in which the exhaust gas is mixed with air and burned directly has the disadvantage that fuel is required and the running cost is high. Therefore, in the era when energy conservation promotion is required, this method has many problems.

  On the other hand, a nanobubble utilization method and apparatus as a prior art is disclosed in Patent Document 1 (Japanese Patent Laid-Open No. 2004-121962). In this Patent Document 1, it is disclosed to utilize characteristics such as a decrease in buoyancy of nanobubbles, an increase in surface area, an increase in surface activity, generation of a local high-pressure field, and an interfacial activity and bactericidal action by realizing electrostatic polarization. ing. More specifically, by interlinking them, various objects can be washed with high functionality and low environmental load by the adsorption function of dirt components, the high-speed washing function of the object surface, and the sterilization function. Patent Document 1 discloses that purification can be performed.

  Further, a nanobubble generation method as a conventional technique is disclosed in Patent Document 2 (Japanese Patent Laid-Open No. 2003-334548). In Patent Document 2, in a liquid, a part of the liquid is decomposed and gasified, a step of applying ultrasonic waves in the liquid, a part of the liquid is decomposed and gasified, and a process of applying ultrasonic waves Is disclosed.

  Further, a waste liquid treatment apparatus using ozone microbubbles as a prior art is disclosed in Patent Document 3 (Japanese Patent Laid-Open No. 2004-321959). In Patent Document 3, the ozone gas generated from the ozone generator is supplied to the microbubble generator, and the waste liquid extracted from the lower part of the treatment tank is supplied to the microbubble generator via a pressure pump. Is disclosed. Patent Document 3 discloses that the generated ozone microbubbles are vented into the waste liquid in the treatment tank through the opening of the gas blowing pipe.

However, even if the above-described method using nanobubbles or ozone microbubbles is used, volatile organic compounds in exhaust gas cannot be efficiently decomposed with little energy. Further, with respect to organic compounds in exhaust gas, particularly volatile organic compounds, the above-described conventional adsorption method or combustion method has a problem in that the initial cost and running cost are high. If the concentration of organic compounds in the exhaust gas is high, a sufficient removal rate cannot be secured and volatile organic compounds in the wash water cannot be treated. Therefore, it is necessary to plan a new large-scale wastewater treatment facility. It was.
JP 2004-121962 A JP 2003-334548 A JP 2004-321959 A

  Accordingly, an object of the present invention is to provide an exhaust gas processing apparatus and an exhaust gas processing method capable of efficiently decomposing volatile organic compounds in exhaust gas with less energy and reducing initial cost and running cost.

In order to solve the above problems, an exhaust gas treatment apparatus of the present invention is
A first scrubber-type gas processing unit that has an upper sprinkler pipe and dissolves volatile organic compounds in the exhaust gas in the wash water sprinkled from the upper sprinkler pipe to treat the exhaust gas;
Volatile organic compound the nanobubble-containing sludge water nanobubbles containing sludge water magnetism separately acted upon and nano bubble generation in the event of nanobubbles sprinkling from the lower water spray pipe goes to the wash water which has a lower sprinkling pipe A second scrubber system gas processing unit for processing,
Exhaust gas is introduced from below the lower sprinkler pipe and exhaust gas is discharged from the duct above the upper sprinkler pipe,
Furthermore, the lower sedimentation part from which the washing water in which the volatile organic compound has been transferred from the second scrubber system gas treatment part and the nanobubble-containing sludge water to which the magnetism is applied falls,
A rapid filter for depositing sludge contained in the mixture while introducing a mixture of the washing water and the nanobubble-containing sludge water on which the magnetism is applied from the lower sedimentation portion;
An activated carbon adsorption treatment unit that introduces washing water treated with the rapid filter and performs adsorption treatment with activated carbon on the washing water;
A return part for returning the washing water after the adsorption treatment from the activated carbon adsorption treatment part to the upper watering pipe of the first scrubber type gas treatment part;
And a return part that returns the nanobubble-containing sludge water containing the nanobubbles to which the magnetism is applied from the rapid filter to the lower sprinkler pipe of the second scrubber type gas treatment part.

According to the exhaust gas processing apparatus of the present invention, the first scrubber system gas processing unit converts the volatile organic compound into the cleaning water by the gas-liquid contact between the volatile organic compound in the exhaust gas and the cleaning water. Transition. Next, in the second scrubber system gas processing unit, the free radicals contained in the nanobubbles contained in the sludge water that is magnetized separately from the generation of nanobubbles when the nanobubbles are generated in the volatile organic compound contained in the washing water. Oxidation action can efficiently oxidize and decompose. Further, since the wash water is circulated and used, the wash water can be saved. Therefore, according to the exhaust gas treatment apparatus of the present invention, the volatile organic compound in the exhaust gas can be efficiently decomposed with less energy and the initial cost and running cost can be reduced.

Further, in the exhaust gas treatment device of one embodiment, an activated carbon adsorption treatment unit that introduces washing water from the second scrubber type gas treatment unit and performs adsorption treatment with activated carbon on the washing water;
A return unit that returns the washing water after the adsorption treatment from the activated carbon adsorption treatment unit to the first scrubber type gas treatment unit.

  According to the exhaust gas treatment apparatus of this embodiment, in the second scrubber type gas treatment unit, the volatile organic compound contained in the washing water is efficiently oxidized with the nanobubbles contained in the sludge water subjected to magnetism. After decomposing, the volatile organic compound contained in the washing water can be reliably treated by activated carbon adsorption by the activated carbon adsorption treatment unit. In addition, since the wash water is circulated, the amount of wash water used can be greatly saved.

Further, in the exhaust gas treatment device of one embodiment, the rapid filter for depositing the sludge contained in the washing water while introducing the washing water from the second scrubber type gas treatment unit,
A return unit that returns the washing water from the rapid filter to the first scrubber type gas processing unit.

  According to this embodiment, washing water is introduced from the second scrubber type gas treatment unit to the rapid filter, and the washing water is deposited with sludge contained in the washing water inside the rapid filter. Therefore, the volatile organic compound in the washing water can be treated with microorganisms in the generated sludge deposited on the rapid filter. Further, since the cleaning water is circulated, the cleaning water can be saved greatly.

  For example, when exhaust gas containing isopropyl alcohol is washed with washing water containing nanobubbles and microorganisms, acetone as a volatile organic compound, which is a reactant that was not originally present in the exhaust gas, is generated. As a result of examining the treatment of acetone, it was found that acetone can be treated by a rapid filter in which generated sludge is deposited. That is, according to the rapid filter in which the sludge generated from the scrubber type exhaust gas processing unit is deposited, the reaction product (acetone as the volatile organic compound) generated after the decomposition of the volatile organic compound is also obtained. We found that it can be processed effectively.

Further, in the exhaust gas processing apparatus of one embodiment, the first scrubber type gas treatment unit has an upper sprinkler pipe for sprinkling the cleaning water, the second scrubber type gas treatment unit, the magnetism having a lower sprinkler pipe for sprinkling nanobubbles containing sludge water which is acting.

According to this embodiment, the upper and lower sprinkler pipes of the first and second scrubber system gas treatment sections are used, and the washing water is sprinkled from the upper sprinkler pipe, The nanobubble containing sludge water which made magnetism act from a watering pipe is sprinkled. As a result, the volatile organic compound can be oxidatively decomposed with a strong oxidizing action by the nanobubbles contained in the magnetized liquid (washing water, sludge water). Moreover, the microorganisms in the nanobubble containing sludge water which acted by the magnetism sprinkled from the lower sprinkling pipe are activated by the nanobubbles, and the volatile organic compounds in the washing water can be microbially decomposed by the activated microorganisms. Moreover, a volatile organic compound can be reliably processed by watering by a two-stage system of an upper watering pipe and a lower watering pipe.

  Further, in the exhaust gas treatment device of one embodiment, the watering by the upper watering pipe is continuously performed and the watering by the lower watering pipe is caused when the concentration of volatile organic compounds in the inflowing exhaust gas is increased or when the effluent discharge It has a watering control part which controls so that it may be performed when the volatile organic compound concentration in gas rises.

  According to this embodiment, since watering from the lower sprinkling pipe is intermittently performed, the system becomes a simple system in consideration of economic efficiency, expenses such as power costs can be reduced, and running costs can be reduced.

Further, in the exhaust gas treatment device of one embodiment, an upper watering portion constituted by the first scrubber type gas treatment unit and the second scrubber type gas treatment unit,
The nanobubble-containing sludge water that has acted the magnetism from the upper watering part and the lower sedimentation part where the washing water falls,
A TOC meter for measuring the TOC concentration in the lower sedimentation part;
A water spray control unit that controls the amount of the nanobubble-containing sludge water sprayed by the second scrubber type gas processing unit according to the TOC concentration measured by the TOC meter.

  According to this embodiment, the watering control unit is watered by the second scrubber system gas processing unit according to the TOC (total organic carbon) concentration in the lower sedimentation unit measured by the TOC meter. Control the amount of sludge water containing nanobubbles. Here, the TOC concentration and the volatile organic compound concentration have a correlation. Therefore, by controlling the sprinkling amount based on the TOC concentration, the volatile organic compound is rationally controlled by controlling the amount of sprinkling of the nanobubble-containing sludge water that is magnetized in proportion to the volatile organic compound concentration in the wash water. It can be processed. That is, when the concentration of the volatile organic compound in the washing water is low, the amount of sprinkling of the activated water nanobubble-containing sludge water that is magnetized can be reduced, and energy saving operation can be performed.

Further, in the exhaust gas treatment device of one embodiment, the rapid filter for depositing the sludge contained in the washing water while introducing the washing water from the second scrubber type gas treatment unit,
Activated carbon adsorption treatment unit that performs adsorption treatment with activated carbon on the washing water as the washing water from the rapid filter is introduced,
A return unit that returns the washing water after the adsorption treatment from the activated carbon adsorption treatment unit to the first scrubber type gas treatment unit.

  According to this embodiment, the washing water from the second scrubber system gas treatment unit is first treated with the sludge accumulated in the rapid filter, and subsequently subjected to the activated carbon adsorption treatment, and the activated carbon adsorption. Since the treatment is performed last, the volatile organic compound in the washing water can be reliably treated. In addition, since the wash water is circulated, the amount of wash water used can be greatly saved.

Further, in the exhaust gas treatment apparatus of an embodiment generates a nanobubble-containing wash water separately reacted with magnetic and nano bubble generation in the event of nanobubbles, the rapid filter and the magnetism acting on the active carbon adsorption treatment unit equipped with a magnetic nano bubble-containing wash water generating facility for introducing nanobubbles containing washing water.

According to this embodiment, the nanofiltration liquid containing nanobubbles generated by the magnetic nanobubble-containing washing water generating facility is subjected to magnetism separately from the generation of nanobubbles (magnetic active water nanobubble-containing washing water), the rapid filtration tower Since it is introduced into the activated carbon adsorption processing section, the inside of the rapid filter and the activated carbon adsorption processing section can be effectively cleaned. In addition, the volatile organic compound in the wash water can be oxidatively decomposed by the oxidizing action of the free radicals of the nanobubbles in the wash water subjected to magnetism. Moreover, the microorganisms propagated in the inside of the rapid filter and the activated carbon adsorption treatment unit can be activated by the nanobubbles in the wash water with magnetism applied, and the volatile organic compounds in the wash water can be microbially decomposed. Moreover, the activated carbon can be regenerated by microbial decomposition of the volatile organic compound adsorbed by the activated carbon with activated microorganisms.

In one embodiment, the activated carbon adsorption processing unit has two activated carbon adsorption towers, and one of the two activated carbon adsorption towers is washed from the rapid filter. while the operating state of the water is introduced, the 2 other of the activated carbon adsorption tower tower, the rapid filtration device the magnetic action from the magnetic nano bubble-containing wash water generating facility wash water without being introduced from been nanobubble-containing wash water has an activated carbon adsorption tower controller for dormant introduced.

  According to this embodiment, the activated carbon adsorption tower control unit brings one of the two activated carbon adsorption towers of the activated carbon adsorption processing unit into an operating state (water flow state), while another tower is The nanobubble-containing cleaning water in which the magnetism is applied is introduced from the magnetic nanobubble-containing cleaning water generating facility in a resting state. That is, it is a microorganism activated by nanobubbles containing nanobubbles containing the above-mentioned magnetism in which one of the two activated carbon adsorption towers is made to pass water (operating state) and the other one is in a dormant state. Reliable regeneration of activated carbon can be achieved. Therefore, the regeneration rate of activated carbon can be improved.

  Moreover, in the exhaust gas processing apparatus of one Embodiment, the said magnetic nanobubble containing washing water generation equipment has a magnetic field generation part which makes a magnetic field act on washing water, and a nanobubble generator which generates a nanobubble in the said washing water.

  According to this embodiment, the magnetic nanobubble-containing cleaning water generation facility causes a magnetic field to act on the cleaning water in the magnetic field generation unit, and the nanobubble generator generates nanobubbles in the cleaning water. Therefore, the advantages of the magnetic water heater and the advantages of the nanobubbles can be combined synergistically, and magnetic nanobubble-containing cleaning water having a marked cleaning action can be produced.

Moreover, in the exhaust gas treatment apparatus of one embodiment, the nanobubble generator is
A first gas shearing section for generating microbubbles in the washing water;
A second gas shearing part that generates nanobubbles by shearing the microbubbles and introducing cleaning water containing the microbubbles from the first gas shearing part;
Washing water containing micro-nano bubbles is introduced from the second gas shearing section, and a third gas shearing section that shears the microbubbles to generate nanobubbles.

  According to this embodiment, the nanobubble generator shears the gas in the three stages of the gas shearing section, that is, the first gas shearing section, the second gas shearing section, and the third gas shearing section. Nanobubbles can be produced.

Moreover, in the exhaust gas processing apparatus of one embodiment, an inlet duct for introducing exhaust gas into the first and second scrubber type gas processing units,
An outlet duct for discharging the processed gas from the first and second scrubber type gas processing units;
A volatile organic compound measuring instrument that is installed in the inlet duct or the outlet duct and samples the volatile organic compound in the gas to measure the concentration of the volatile organic compound in the gas;
The quick filter is backwashed, and a backwash pump whose operation is controlled according to the concentration of the volatile organic compound measured by the volatile organic compound measuring device.

  According to the exhaust gas treatment apparatus of this embodiment, according to the VOC concentration measured by the volatile organic compound measuring device (VOC measuring device), for example, when the VOC concentration exceeds a set value, the backwash pump is Volatile organic compounds can be microbially decomposed with microorganisms that are operated and are derived from sludge deposited inside the rapid filter. That is, the rapid filter can be backwashed by operating a backwash pump according to the VOC concentration measured by the VOC meter.

Also, exhaust gas treatment how the invention,
A first process in which cleaning water is sprinkled from the upper sprinkler pipe of the first scrubber system gas processing unit, and volatile organic compounds in the exhaust gas are dissolved in the cleaning water to process the exhaust gas in a scrubber system;
When nanobubbles are generated from the lower sprinkler pipe of the second scrubber system gas treatment unit, the nanobubble-containing sludge water , which is magnetized separately from the generation of nanobubbles, is sprinkled to process the volatile organic compounds that have migrated into the washing water using the scrubber system And the second process
further,
The washing water to which the volatile organic compound treated by the second treatment is transferred and the nanobubble-containing sludge water to which the magnetism is applied are introduced into the rapid filter from the lower sedimentation portion, and the sludge is deposited inside the rapid filter. Let
The washing water treated with the rapid filter is introduced into the activated carbon adsorption treatment unit and the washing water is adsorbed with activated carbon,
The washing water after the adsorption treatment is returned from the activated carbon adsorption treatment unit to the upper watering pipe of the first scrubber type gas treatment unit,
Returning the nanobubble-containing sludge water containing the nanobubbles from which the magnetism was applied from the rapid filter to the lower sprinkling pipe of the second scrubber type gas treatment unit,
Exhaust gas is introduced from below the lower sprinkler pipe, and exhaust gas is discharged from the duct above the upper sprinkler pipe.
It is characterized by that.

  According to the exhaust gas treatment method of this embodiment, the volatile organic compound is transferred to the wash water by the gas-liquid contact between the volatile organic compound in the exhaust gas and the wash water in the first treatment. Next, in the second treatment, the volatile organic compound contained in the washing water can be efficiently oxidized and decomposed by the oxidizing action of free radicals contained in the nanobubbles contained in the sludge water that has been magnetized. Further, since the wash water is circulated and used, the wash water can be saved. Therefore, according to this exhaust gas treatment method, the volatile organic compound in the exhaust gas can be efficiently decomposed with less energy, and the initial cost and running cost can be reduced.

  In the exhaust gas treatment method of one embodiment, the washing water after the second treatment is subjected to an adsorption treatment with activated carbon, and the washing water after the adsorption treatment with the activated carbon is used in the first treatment.

  According to the exhaust gas treatment method of this embodiment, the volatile organic compound contained in the wash water after the second treatment can be reliably treated by the activated carbon adsorption by the activated carbon, and the wash water is circulated and used. The amount of washing water to be saved can be greatly saved.

  Further, in the exhaust gas treatment method of one embodiment, the wash water after the second treatment is introduced into a rapid filter and the sludge contained in the wash water after the second treatment is accumulated in the rapid filter, Wash water that has passed through the rapid filter is used in the first treatment.

  According to the exhaust gas treatment method of this embodiment, the volatile organic compound in the washing water can be treated with microorganisms in the generated sludge accumulated in the rapid filter, and the washing water is circulated and used for washing. You can save a lot of water.

  In the exhaust gas treatment method of one embodiment, the wash water that has passed through the rapid filter is used in the first treatment via an activated carbon adsorption tower that performs adsorption treatment with the activated carbon.

  According to the exhaust gas treatment method of this embodiment, since the washing water is treated with the sludge accumulated in the rapid filter and subsequently the activated carbon adsorption treatment is performed, the volatile organic compound in the washing water can be reliably treated, Since the wash water is circulated, the amount of wash water used can be saved significantly.

According to the exhaust gas processing apparatus of the present invention, the first scrubber type gas processing unit transfers the volatile organic compound to the cleaning water by the gas-liquid contact between the volatile organic compound in the exhaust gas and the cleaning water. Let Next, in the second scrubber system gas processing unit, the volatile organic compound contained in the washing water is caused by free radicals contained in the nanobubbles contained in the sludge water that is magnetized separately from the generation of nanobubbles when the nanobubbles are generated. Oxidation enables efficient oxidative decomposition. Further, since the wash water is circulated and used, the wash water can be saved. Therefore, according to the exhaust gas treatment apparatus of the present invention, the volatile organic compound in the exhaust gas can be efficiently decomposed with less energy and the initial cost and running cost can be reduced.

  Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

(First embodiment)
FIG. 1 is a view schematically showing a volatile organic compound-containing exhaust gas processing device 67 as a first embodiment of the exhaust gas processing device of the present invention.

  This volatile organic compound-containing exhaust gas treatment device 67 includes the exhaust gas treatment unit 4, the rapid filter 24, the first activated carbon adsorption tower 45, the second activated carbon adsorption tower 51, and the activated carbon regeneration water facility 59. .

  When the outline is roughly classified, the exhaust gas processing unit 4 has a function of transferring volatile organic compounds in the introduced exhaust gas to the washing water, and the rapid filter 24 and the first activated carbon adsorption tower 45 and The 2nd activated carbon adsorption tower 51 has a role which processes a volatile organic compound.

  The rapid filter 24 also performs microbial decomposition, oxidation treatment, and removal of suspended solids. The first activated carbon adsorption tower 45 and the second activated carbon adsorption tower 51 adsorb volatile organic compounds remaining in the washing water by activated carbon. The activated carbon regeneration water facility 59 provides activated carbon regeneration water and cleaning water for the rapid filter 24.

  The volatile organic compound-containing exhaust gas treatment device 67 includes a large number of electric valves 17, 22, 23, 27, 44, 46, 47, 49, 50, 52, 53, 54, 64, 75 and a pump 21. 29, 30, 34 are installed. A signal line 56 is connected from the sequencer 55 to each electric valve, and a signal line 57 is connected from the sequencer 55 to each pump. The electric valves and the pumps are operated as planned by a program incorporated in the sequencer 55 in advance.

  In FIG. 1, reference numeral 1 denotes an exhaust inlet duct, and an exhaust fan 5 introduces exhaust gas containing a volatile organic compound from a semiconductor factory or a liquid crystal factory into the exhaust gas processing unit 4. Examples of the volatile organic compound include isopropyl alcohol, acetone, and butyl acetate.

  The exhaust gas processing unit 4 includes an upper watering unit 2 and a lower sedimentation unit 3. The exhaust gas processed by the exhaust gas processing unit 4 is exhausted from the uppermost exhaust outlet duct 6 of the exhaust gas processing unit 4.

  In the exhaust gas processing unit 4, the washing water of the lower sedimentation unit 3 is introduced from the suction pipe 20 into the rapid filter 24 by the pump 21 to treat volatile organic compounds and suspended substances in the washing water. Then, the washing water treated by the rapid filter 24 is introduced into the first activated carbon adsorption tower 45 or the second activated carbon adsorption tower 51. In the first and second activated carbon adsorption towers 45 and 51, volatile organic compounds remaining in the washing water are treated. Then, the washed water after the treatment is sprayed again from the upper watering nozzle 8 of the upper watering pipe 7 of the exhaust gas processing unit 4.

  Next, the exhaust gas processing unit 4 will be described in detail. As described above, the exhaust gas processing unit 4 includes the scrubber 58 with a sedimentation portion constituted by the upper watering portion 2 and the lower sedimentation portion 3. A necessary amount of the upper filler 9 is filled at a predetermined distance below the upper water spray pipe 7. As the upper filler 9, an irregular filler made of synthetic resin can be adopted, and as an example, a filler such as Terraret (trade name) can be adopted. A perforated plate 10 for holding the upper filler 9 is installed below the upper filler 9 to hold a plurality of upper fillers 9. As the porous plate 10, a material having strength and resistant to corrosion should be selected. In this embodiment, the stainless porous plate 10 is used. The perforated plate 10 is not limited to stainless steel, and may be made of synthetic resin as long as it has strength. The upper watering pipe 7, the upper watering nozzle 8, the upper filler 9, and the perforated plate 10 constitute a first scrubber type gas processing unit.

  At the lower part of the porous plate 10, a lower watering nozzle 12 attached to the lower watering pipe 11 and a plurality of lower watering pipes 11 is installed at a predetermined distance. The mouth of the lower watering nozzle 12 is larger than the mouth of the upper watering nozzle 8. The reason is that the washing water sprayed from the upper watering nozzle 8 is the washing water treated by the first activated carbon adsorption tower 45 or the second activated carbon adsorption tower 51, whereas the washing water sprayed from the lower watering nozzle 12 is used. This is because the water is sludge water containing sludge.

  Further, the lower filler 13 is filled with a necessary amount at a predetermined distance below the lower sprinkler pipe 11. As the lower filler 13, an irregular filler made of synthetic resin can be employed similarly to the upper filler 9, and as an example, a filler such as terralet (trade name) can be employed. A porous plate 14 for holding the lower filler 13 is installed below the lower filler 13, and the porous plate 14 holds a plurality of lower fillers 13. As the porous plate 14, a material having strength and resisting corrosion should be selected. In this embodiment, the stainless steel porous plate 14 is used, but the porous plate 14 is not limited to stainless steel. If it has strength, it may be made of synthetic resin. The lower sprinkling pipe 11, the lower sprinkling nozzle 12, the lower filler 13 and the porous plate 14 constitute a second scrubber type gas processing section.

  In the exhaust gas processing unit 4, the volatile organic compound-containing exhaust gas introduced from the exhaust inlet duct 1 by the exhaust fan 5 passes through the small holes of the perforated plate 14 and passes through the lower filler 13 and the upper filler 9. When passing, contact the cleaning water and gas-liquid. Here, when the volatile organic compound in the exhaust gas is transferred to the cleaning water (sludge water), the volatile organic compound in the exhaust gas is removed and discharged from the exhaust outlet duct 6. Wash water introduced from the first activated carbon adsorption tower 45 or the second activated carbon adsorption tower 51 through the pipe 18 is sprinkled from a large number of upper water spray nozzles 8 installed in the upper water spray pipe 7. From the upper watering nozzle 8, washing water is constantly sprinkled.

  On the other hand, the watering from the lower watering nozzle 12 attached to the lower watering pipe 11 is not always constant. That is, when the volatile organic compound concentration in the exhaust gas at the exhaust inlet duct 1 is higher than a normal predetermined value or when the volatile organic compound concentration at the exhaust outlet duct 6 is higher than a normal predetermined value. The washing water from the rapid filter 24 is sprayed from the lower watering nozzle 12 through the electric valve 75 and the pipe 19. And the washing water (sludge water) from this lower watering nozzle 12 is the nanobubble containing sludge water which made magnetism act, and contains the magnetic activated water nanobubble containing sludge. Therefore, according to the watering from the lower watering nozzle 12, the cleaning effect can be exhibited when the volatile organic compound concentration in the exhaust inlet duct 1 or the exhaust outlet duct 6 is higher than a normal predetermined value for some reason.

  As described above, when the volatile organic compound concentration in the exhaust gas is higher than a normal predetermined value for some reason, the total organic carbon (TOC) concentration of the wash water primarily stored in the precipitation unit 3 Also rises. This increase in TOC concentration is detected by a TOC detector 71 as a TOC meter installed in the sedimentation section 3 and a TOC controller 72 connected to the TOC detector 71. The TOC controller 72 constitutes a watering control unit, and is connected to the first backwash pump 29 and the second backwash pump 30 by a signal line 77. The TOC controller 72 as the watering control unit operates the first backwash pump 29 and the second backwash pump 30 simultaneously when the TOC concentration in the sedimentation unit 3 is higher than the set value. As a result, the quick filter 24, the first activated carbon adsorption tower 45, the second activated carbon adsorption tower 51 and the electric valves related thereto are opened and closed corresponding to the target operation pattern described later, and backwashing is executed. Then, the TOC concentration in the precipitation tank 3 is lowered to the set concentration.

  By performing the backwashing, not only water spraying from the upper watering nozzle 8 in normal operation, but also water sprinkling of magnetically active water-containing nanobubbles generated from the lower watering nozzle 12 (nanobubble-containing sludge water with magnetism applied) is sprayed. By adding, the TOC density | concentration of the precipitation tank 3 can be reduced.

  In the case of normal operation, while the pump 21 is operated, the washing water from one of the first and second activated carbon adsorption towers 45 and 51 is sprinkled from the upper water spray nozzle 8, In the case of the backwash operation, both the first backwash pump 29 and the second backwash pump 30 are operated, and the exhaust gas can be treated with a large amount of wash water sprayed from the upper water spray nozzle 8. Note that when both the first backwash pump 29 and the second backwash pump 30 are operated, the electric valve 54 is open.

  In this way, when the volatile organic compound-containing exhaust gas is treated by using the cleaning water in a circulating manner, the generated sludge 25 is generated in the upper portion 65 of the rapid filter 24 with the passage of time. When the generated sludge 25 is stored in a large amount in the settling portion 3 of the scrubber 58 with a settling portion, the settling portion 3 has the hopper portion 15. By opening, unnecessary generated sludge 25 is discharged out of the system from the sludge extraction pipe 16.

  The electric valve 22 and the electric valve 47 are opened, the electric valve 75 and the electric valve 27 are closed, and the electric valve 46 of the first activated carbon adsorption tower 45 is opened or the second activated carbon adsorption tower 51 is electrically operated. Under the condition that the valve 52 is opened, the washing water of the precipitation unit 3 is introduced from the suction pipe 20 into the rapid filter 24 and the first activated carbon adsorption tower 45 or the second activated carbon adsorption tower 51 by the operation of the pump 21. The volatile organic compounds in the wash water are treated reasonably.

  Next, opening / closing control of each electric valve related to organic substance removal and activated carbon regeneration equipment will be described in relation to each operation pattern. Three types of operation patterns are prepared. The opening / closing control of each electric valve is performed by a sequencer 55 that constitutes an activated carbon adsorption tower control unit.

(Pattern 1): Normal operation In this pattern 1, the electric valves 22 and 47 related to the rapid filter 24 are opened, and the electric valves 27 and 75 are closed. On the other hand, the electric valves 46 or 52 related to the first and second activated carbon adsorption towers 45 and 51 are opened, and the electric valves 44, 50, 54, 49, and 53 are closed. In this normal operation, the washing water from the suction pipe 20 is supplied to the pump 21, the electric valve 22, the rapid filter 24, the electric valve 47, the pipe 48, the electric valve 46, the first activated carbon adsorption tower 45 (or the electric valve 52, the second Water is sprayed from the upper watering nozzle 8 of the upper watering pipe 7 through the pipe 18 via the activated carbon adsorption tower 51). On the other hand, water is not sprayed from the lower water spray nozzle 12.

(Pattern 2): Backwash operation 1
In this pattern 2, the backwashing operation of the rapid filter 24 and the backwashing operation (activated carbon regeneration operation) of the first and second activated carbon adsorption towers 45 and 51 are performed. In this pattern 2, the electric valves 22 and 47 related to the rapid filter 24 are closed, and the electric valves 27 and 75 are opened. On the other hand, the electric valves 46 and 52 related to the first and second activated carbon adsorption towers 45 and 51 are closed, and the electric valves 44, 50, 49, 53, and 54 are opened. In this backwash operation 1, the rapid filter 24 is backwashed with the magnetic active water nanobubble-containing wash water from the first backwash pump 29, and the magnetically active water nanobubble-containing wash water that backwashes this rapid filter 24 passes through the pipe 19. Water is sprinkled from the lower sprinkling nozzle 12. On the other hand, the magnetically active water nanobubble-containing wash water backwashed from the first and second activated carbon adsorption towers 45 and 51 is returned to the filter medium regeneration tank 28 via the pipe 61. Also, the magnetically active water nanobubble-containing washing water is sprinkled from the upper electric nozzle 54 through the pipe 18 from the upper watering nozzle 8.

(Pattern 3): Backwash operation 2
In this pattern 3, one of the first and second activated carbon adsorption towers 45 and 51 is backwashed (activated carbon regeneration operation). In this pattern 3, the electric valves 22 and 47 related to the quick filter 24 are opened, and the electric valves 27 and 75 are closed. When the first activated carbon adsorption tower 45 is operated to backwash the second activated carbon adsorption tower 51, the electric valves 46, 50, 53 are opened and the electric valves 44, 49, 52, 54 are closed. On the other hand, when the first activated carbon adsorption tower 45 is backwashed and the second activated carbon adsorption tower 51 is operated, the electric valves 46, 50, 53, 54 are closed and the electric valves 44, 49, 52 are opened.

  In the backwash operation 1 of the pattern 2, the point is that the electric valve 54 is opened and that both the first backwash pump 29 and the second backwash pump 30 are operated.

  The rapid filter 24 includes an upper part 65 where generated sludge 25 is deposited and a rapid filter lower part 66 filled with a filter medium 26.

  Since the generated sludge 25 is accumulated in the rapid filter 24, microorganisms are propagated, and washing water containing magnetically active water nanobubbles is discharged from the first backwash pump 29 during backwashing. Thereby, it is considered that the inside of the rapid filter 24 is reliably washed and the pressure loss inside the rapid filter 24 does not increase. And the phenomenon that the magnetic activated water nanobubble by the washing water containing magnetic active water nanobubble mixed in the generated sludge 25 is mixed and the magnetic activated water nanobubble continues in the generated sludge 25 for four weeks or more occurs.

  Then, the generated sludge 25 containing the magnetically active water nanobubbles is stored in the sedimentation part 3 and is then deposited again on the upper portion 65 of the rapid filter 24 with the passage of time. Microorganisms are activated. Then, by passing the wash water through the rapid filter 24, the volatile organic compounds in the wash water are microbially decomposed.

  Further, the volatile organic compound in the wash water is oxidized by the strong oxidizing action of free radicals of the magnetically active nanobubbles. In this embodiment, anthracite made from coal is selected as the filter medium 26 filled in the lower portion 66 of the rapid filter 24. This filter medium 26 physically removes suspended substances in the washing water and reliably removes the suspended substances in the washing water.

  Then, the washing water exiting the rapid filter 24 has the first activated carbon under the condition that the electric valve 47 is opened, the electric valve 46 is opened, and the other electric valves 49 and 44 around the first activated carbon adsorption tower 45 are closed. Introduced into the adsorption tower 45, the volatile organic compounds in the wash water are highly treated, and the total organic carbon (TOC) concentration of the wash water is lowered. According to the cleaning water having a reduced total organic carbon (TOC) concentration, volatile organic compounds in the exhaust gas in the exhaust gas processing unit 4 can be efficiently transferred to the cleaning water with a high removal rate.

  On the other hand, when the first activated carbon adsorption tower 45 is at rest, the second backwash pump 30 is operated to open the electric valve 44 so that the magnetic activated water nanobubbles generated in the activated carbon regeneration water facility 59 are contained. Washing water (washing water containing nanobubbles with magnetism applied) is introduced into the first activated carbon adsorption tower 45. In this way, the magnetically active water nanobubbles in the washing water enter from the pores of the activated carbon, activate the microorganisms propagating inside the activated carbon, decompose the volatile organic compounds adsorbed by the activated carbon, and regenerate the activated carbon. become.

  The phenomenon in which the activated carbon is regenerated in the first activated carbon adsorption tower 45 is the same as the activated carbon regeneration phenomenon by backwashing when the second activated carbon adsorption tower 51 is at rest. In addition, when the second backwash pump 30 is in operation, by opening the electric valve 54, the magnetically active water nanobubble-containing water can be sprinkled from the upper watering nozzle 8 of the exhaust gas processing unit 4. That is, by opening the electric valve 54, magnetically active nanobubbles can be supplied to the cleaning water sprayed from the upper water spray nozzle 8. In addition, since it was found by recent research that the magnetically active nanobubbles last for 10 days or longer, the magnetically active nanobubbles may be supplied by opening the electric valve 54 when necessary. When the electric valve 23 is opened, the washing water can be returned to the filter medium regeneration tank 28 through the pipe 62.

  Next, the activated carbon regeneration water facility 59 will be described in detail. The activated carbon regeneration water facility 59 has a filter medium regeneration tank 28. A first backwash pump 29 and a second backwash pump 30 are installed in the upper part of the filter medium regeneration tank 28, and a gas-liquid mixing circulation is provided near the side of the water tank. A magnetically active water nanobubble generator 76 including a pump 34 and the like is installed. The magnetic active water nanobubble generator 76 includes a gas-liquid mixing / circulation pump 34, a first gas shearing unit 35, an electric needle valve 64, a second gas shearing unit 36, a magnetic active water device 40 as a magnetic field generating unit, and a third gas shearing unit. It is composed of 32 combinations. The magnetically active water nanobubble generator 76 can produce cleaning water containing magnetically active water nanobubbles.

  Here, the magnetic active water nanobubble generator 76 will be described in more detail.

  The magnetic active water nanobubble generator 76 installed outside the filter medium regeneration tank 28 includes a gas-liquid mixing / circulation pump 34 having a first gas shearing part 35, a second gas shearing part 36, a magnetic active water device 40, 3 gas shear portion 32 and electric needle valve 64 for introducing air. Moreover, the magnetic water heater 40 is installed between the flange 37 and the flange 43, and the liquid passage part 41 is formed in the inside of this magnetic water heater 40 in the flat form of thickness 30mm or less. In addition, three S-pole magnets 39 and three N-pole magnets 38 are installed across the flat liquid passage portion 41, and a magnetic force line 42 is provided between the S-pole magnet 39 and the N-pole magnet 38. The strength of the lines of magnetic force is 1000 gauss at the center of the liquid passage portion 41.

  Then, by operating the gas-liquid mixing and circulation pump 34 having the first gas shearing part 35, the cleaning water is introduced from the first gas shearing part 35 to the second gas shearing part 36, and the gas is sheared, That is, the microbubbles are sheared to produce some nanobubbles. In addition, 60 seconds or more after the operation of the gas-liquid mixing / circulation pump 34 is performed, air is introduced into the first gas shearing portion 35 under the condition that the electric needle valve 64 is opened. The reason for this is that if air is introduced from the beginning of the operation of the gas-liquid mixing circulation pump 34 under the condition that the electric needle valve 64 is open, the gas-liquid mixing circulation pump 34 causes a cavitation phenomenon, and the gas-liquid mixing circulation pump 34. It is because it is damaged. The liquid exiting from the gas-liquid mixing circulation pump 34 is introduced into the second gas shearing section 36, where the gas is sheared, that is, the microbubbles are sheared to produce some nanobubbles.

  Next, the mechanism of the magnetic active water nanobubble generator 76 will be described in detail. As described above, the magnetically active water nanobubble generator 76 includes the gas-liquid mixing / circulation pump 34, the first gas shearing part 35, the second gas shearing part 36, the magnetic activator 40, the third gas shearing part 32, and the electric needle valve 64. And piping connecting them. In the magnetically active water nanobubble generator 76, the nanobubbles are mainly manufactured through the first stage and the second stage.

  First, the first stage will be briefly described. In the first gas shearing part 35, the pressure is controlled hydrodynamically, gas is sucked from the negative pressure forming part, and high speed fluid motion is performed to form the negative pressure part, and microbubbles are generated. In a simple and easy-to-understand manner, the first step is to produce microbubble cloudy water containing useful substances by effectively self-sufficiency, mixing, dissolving and pumping water and air.

  Next, the second stage will be briefly described. The useful substance-containing microbubbles are introduced into the second gas shearing part 36 and the third gas shearing part 32 through a water pipe, and are caused to move at high speed in the second gas shearing part 36 and the third gas shearing part 32 to thereby generate a negative pressure part. Are formed and sheared as fluid motion to generate nanobubbles from microbubbles.

  Next, the first stage and the second stage in the magnetic active water nanobubble generator 76 will be described in more detail.

(First stage)
The gas-liquid mixing / circulation pump 34 used in the magnetic active water nanobubble generator 76 is a high-lift pump having a lift of 40 m or higher (that is, a high pressure of 4 kg / cm ² ). That is, it is preferable to select a gas / liquid mixing / circulation pump 34 having the first gas shearing portion 35 that is a high-lift pump and has a stable 2-pole torque. There are two-pole and four-pole pumps, and the torque of the 2-pole pump is more stable than the 4-pole pump.

  Further, the gas-liquid mixing circulation pump 34 needs to control the pressure, and the rotational speed of this high-lift pump is generally controlled by a rotational speed controller called an inverter to a desired pressure. Yes. With the pressure suitable for this purpose, it is possible to manufacture microbubbles with a bubble size. Here, the mechanism of microbubble generation in the gas-liquid mixing circulation pump 34 having the first gas shearing portion 35 will be described. In the first gas shearing part 35, in order to generate microbubbles, a mixed-phase swirling flow of liquid and gas is generated, and a gas cavity that swirls at a high speed is formed at the center of the first gas shearing part 35. Next, this gas cavity is thinned into a tornado shape by pressure to generate a rotating shear flow that swirls at a higher speed. Air as a gas is automatically supplied to the cavity using a negative pressure (negative pressure), and the mixed phase flow is rotated while being cut and pulverized. This cutting and crushing occurs due to the difference in the swirling speed of the gas-liquid two-phase fluid inside and outside in the vicinity of the apparatus outlet. The rotation speed at that time is 500 to 600 rotations / second. In addition, although the said gas was just air in this embodiment, the carbon dioxide gas, nitrogen gas, oxygen gas, ozone gas can also be selected according to the objective, and other gas can also be selected.

  In this way, in the first gas shearing portion 35, by controlling the pressure hydrodynamically, the gas is sucked from the negative pressure forming portion, and the high pressure pump moves the fluid at high speed to form the negative pressure portion, Generate microbubbles. To explain more easily and simply, the first step is to produce micro-bubble cloudy water by effectively self-suppliing, mixing, dissolving and pumping water and air with a high head pump.

  The operation of the gas-liquid mixing circulation pump 34 is controlled by a control signal input from the sequencer 55. Moreover, although the internal shape of the 1st gas shearing part 35 is an ellipse as an example, it is a perfect circle as a shape which can exhibit the maximum effect. Further, the first gas shearing portion 35 has a mirror finish to reduce the internal friction. Further, a groove having a groove depth of 0.3 mm to 0.6 mm and a groove width of 0.8 mm or less is provided in the first gas shearing portion 35 in order to control the swirling turbulence of the fluid.

(Second stage with magnetic active water nanobubble generator)
The microbubbles generated by the gas-liquid mixing and circulation pump 34 having the first gas shearing part 35 are pumped to the second gas shearing part 36 through a water pipe. In the second gas shearing portion 36 and the third gas shearing portion 32 after the first stage described above, the pipe size is further reduced and the fluid is moved at high speed to make the gas cavity portion narrower in a tornado shape. Generate a rotating shear flow that swirls at a higher speed. As a result, nanobubbles are generated from the microbubbles, and at the same time, an extremely high temperature limit reaction field is formed. The reason why the second gas shearing part 36 and the third gas shearing part 32 are constructed is that the construction of the gas shearing part in two stages is larger than the construction of the gas shearing part in one stage. This is because it can occur. That is, when an extremely high temperature extreme reaction field is formed, a high temperature and high pressure state is locally generated, unstable free radicals are generated, and heat is simultaneously generated.

  The second gas shearing part 36 and the third gas shearing part 32 are generally made of stainless steel, and the shape thereof is an ellipse, preferably a perfect circle. Moreover, although the small hole is opened in the 2nd gas shearing part 36 and the 3rd gas shearing part 32, 4 mm-9 mm are optimal for the discharge port diameter.

  Next, the high speed fluid motion in the first stage described above will be described. In order to generate microbubbles in the first gas shearing part 35, first, as a “high-speed fluid motion”, a wing called a pump impeller is rotated at a very high speed to generate a mixed phase swirl of liquid and gas. And a gas cavity that swirls at a high speed is formed at the center of the first gas shearing portion 35. Next, this gas cavity is thinned into a tornado shape by pressure to generate a rotating shear flow that swirls at a higher speed. This gas cavity is self-supplied with air as a gas. The gas may be carbon dioxide gas, nitrogen gas, oxygen gas, or ozone gas. Further, the multiphase flow is rotated while cutting and pulverizing the gas cavity. This cutting and crushing occurs due to the difference in the swirling speed of the gas-liquid two-phase fluid inside and outside in the vicinity of the apparatus outlet. The rotation speed has been found to be 500-600 rotations / second. When the thickness of the metal constituting the first gas shearing portion 35 is thin, the gas-liquid mixing / circulation pump 34 is operated to generate vibration, and the fluid kinetic energy propagates outside as vibration and escapes. This reduces the required high velocity flow motion, i.e., high speed swirl and shear energy. Therefore, the thickness of the metal constituting the first gas shearing portion 35 is preferably in the range of 6 mm to 12 mm.

  Next, “shearing as a fluid motion” will be described. The microbubbles generated by the gas-liquid mixing circulation pump 34 having the first gas shearing part 35 are pumped to the second gas shearing part 36 and the third gas shearing part 32 through a water pipe. In the second gas shearing portion 36 and the third gas shearing portion 32 after the first stage, the pipe size is narrowed and the fluid is moved at a high speed to make the gas cavity narrower in a tornado shape, thereby increasing the speed. Rotating shear flow that swirls at is generated.

  Next, the “negative pressure forming portion” will be described. The “negative pressure forming portion” is generated due to the difference in the swirling speed of the gas-liquid two-phase fluid inside and outside near the outlet of the apparatus. As described above, the rotation speed is 500 to 600 rotations / second. Next, the “negative pressure part” will be described. This “negative pressure part” means a region in the gas-liquid mixture where the pressure is lower than the surroundings. The above is the mechanism of the magnetically active water nanobubble generator 76.

  As the magnetic active water nanobubble generator 76, a commercially available one can be adopted, but the manufacturer is not limited. As a specific example, the magnetic water heater 40 is a BK type BK manufactured by BCE, Inc. -50 can be adopted. In addition, as a nanobubble generator, Babytas HYK-32, a product of Kyowa Kikai Co., Ltd., can be used.

  Here, three types of bubbles will be described.

  (1) A normal bubble (bubble) rises in the water and finally disappears by popping on the surface.

  (2) When microbubbles are generated, they are fine bubbles having a bubble diameter of 10 to several tens of μm, shrink in water, and eventually disappear (completely dissolve). Microbubbles change to “micronanobubbles” by contraction movement after generation.

  (3) Nanobubbles are said to be bubbles that are smaller than microbubbles (having a diameter of several hundred nm or less) and can exist in water forever.

  A micro-nano bubble can be described as a bubble in which micro-bubbles and nano-bubbles are mixed, and is a bubble having a diameter of about 10 μm to several hundreds of nm.

(Second embodiment)
Next, FIG. 2 shows a second embodiment of the present invention. The second embodiment is different from the first embodiment of FIG. 1 in that the TOC detector 71 and the TOC controller 72 in the first embodiment are replaced with a COD detector 73 and a COD controller 74. Therefore, in the second embodiment, the same parts as those of the first embodiment described above are denoted by the same reference numerals and detailed description thereof is omitted, and parts different from the first embodiment will be described.

  COD means a chemical oxygen demand, and is a measurement method that expresses the degree of contamination of cleaning water, and the measurement method is defined by JIS. Although TOC and COD have different measurement methods, both can be used as a guide for the concentration of volatile organic compounds in the wash water, and the degree of contamination and the degree of contamination of the wash water can be measured.

  The COD detector 73 measures the COD concentration in the sedimentation section 3 and outputs a signal representing this measured value to the COD controller 73. The COD controller 73 controls the operation of the first backwash pump 29 connected by the signal line 77 according to the COD concentration measured by the OD detector 73, and performs backwash of the quick filter 24. Whether or not the cleaning water containing the generated sludge containing the magnetic active water nanobubbles is sprinkled from the lower watering nozzle 12 of the exhaust gas treatment device 4 is controlled. That is, when the COD concentration is higher than the set value, the first backwash pump 29 is operated to spray the wash water by the backwashing of the quick filter 24 from the lower watering nozzle 12.

  Since the first backwash pump 29 and the second backwash pump 30 are connected by a signal line 77, when the first backwash pump 29 for backwashing the rapid filter 24 is operated, the first backwash pump 29 and the second backwash pump 30 are automatically operated. The second backwash pump 30 is also operated. And the process by the washing water in the exhaust gas processing part 4 by a backwash operation will be performed.

(Third embodiment)
Next, FIG. 3 shows a third embodiment of the present invention. The third embodiment is different from the first embodiment in the following points (i) and (ii).

  (i) A sampling pipe 68, connected to the sampling pipe 68 and installed outside the exhaust gas processing section 4 above the sprinkling section 2 of the exhaust gas processing section 4 in the first embodiment of FIG. The point which has arrange | positioned the sampling pump 69 and the VOC measuring device 70 which is a volatile organic compound measuring device.

  (ii) The VOC measuring device 70 is connected to the TOC controller 72, the first backwash pump 29, and the second backwash pump 30 through a signal line 77.

  Therefore, in the third embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted, and parts different from those in the first embodiment will be described.

  In the third embodiment, the VOC (volatile courageous compound) concentration in the upper part of the sprinkling unit 2 of the exhaust gas processing unit 4 is measured by the VOC measuring device 70. The operation of the first and second backwash pumps 29 and 30 is controlled based on both the VOC concentration measured by the VOC measuring device 70 and the TOC concentration detected by the TOC detector 71. For example, when both the VOC concentration in the upper part of the sprinkler 2 and the TOC concentration in the sedimentation tank 3 exceed the set values, the backwash operation by the first and second backwash pumps 29 and 30 is performed. On the other hand, when at least one of the VOC concentration and the TOC concentration does not exceed the set value, an operation method in which the backwash operation is not performed is selected.

(Fourth embodiment)
Next, FIG. 4 shows a fourth embodiment of the present invention. The fourth embodiment is different from the first embodiment in the following points (i) and (ii).

  (i) A sampling pipe 68 and sampling connected to the sampling pipe 68 and installed outside the exhaust gas processing section 4 in the exhaust inlet duct 1 of the exhaust gas processing section 4 in the first embodiment of FIG. The point which has arrange | positioned the pump 69 and the VOC measuring device 70 which is a volatile organic compound measuring device.

  (ii) The VOC measuring device 70 is connected to the TOC controller 72, the first backwash pump 29, and the second backwash pump 30 through a signal line 77.

  Therefore, in the fourth embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted, and parts different from those in the first embodiment are described.

  In the fourth embodiment, the VOC concentration of the exhaust inlet duct 1 of the exhaust gas processing unit 4 is measured by the VOC measuring device 70. The operation of the first and second backwash pumps 29 and 30 is controlled based on both the VOC concentration measured by the VOC measuring device 70 and the TOC concentration detected by the TOC detector 71. For example, when both the VOC concentration in the exhaust inlet duct 1 of the exhaust gas processing unit 4 and the TOC concentration in the sedimentation tank 3 exceed the set values, the backwash operation by the first and second backwash pumps 29 and 30 is performed. Is done. On the other hand, when at least one of the VOC concentration and the TOC concentration does not exceed the set value, an operation method in which the backwash operation is not performed is selected.

(Experimental example)
An exhaust gas treatment experimental device corresponding to the exhaust gas treatment device of the first embodiment of FIG. 1 was manufactured. In this exhaust gas treatment experimental apparatus, the capacity of the sprinkling section 2 is about 4 m ³ , the capacity of the precipitation section 3 is about 0.5 m ³ , the capacity of the rapid filtration tower 24 is 1 m ³ , and the two activated carbon adsorption towers 45, The capacity of 51 was 3 m ^3, and the capacity of the activated carbon regeneration water facility 59 was 2 m ³ . In the experimental apparatus relating to the volatile organic compound-containing exhaust gas treatment apparatus manufactured as described above, an irregular filling made of synthetic resin was installed in the upper sprinkling section 2 and a trial operation was performed for one month. After this one month test run, 7 days after introducing the exhaust gas containing isopropyl alcohol from the semiconductor factory, the concentration of isopropyl alcohol before treatment in the exhaust inlet duct 1 and after treatment in the exhaust outlet duct 6 Concentration was measured. As a result of this measurement, the removal rate of isopropyl alcohol was approximately 90%. Moreover, it was 80% when the removal rate of acetone as a reaction product produced | generated when isopropyl alcohol decomposes | disassembles was measured.

  More specifically, in the above-described operation pattern 1 (normal operation), the VOC concentration in the exhaust inlet duct 1 was 86 ppm, but the VOC concentration in the exhaust outlet duct 6 was 13 ppm (removal rate 85%). . In the operation pattern 2 (backwash operation 1) described above, the VOC concentration in the exhaust inlet duct 1 was 132 ppm, but the VOC concentration in the exhaust outlet duct 6 was 12 ppm (removal rate 91%).

It is a figure which shows typically 1st Embodiment of the volatile organic compound containing exhaust gas processing apparatus of this invention. It is a figure which shows typically 2nd Embodiment of the volatile organic compound containing exhaust gas processing apparatus of this invention. It is a figure which shows typically 3rd Embodiment of the volatile organic compound containing exhaust gas processing apparatus of this invention. It is a figure which shows typically 4th Embodiment of the volatile organic compound containing exhaust gas processing apparatus of this invention.

DESCRIPTION OF SYMBOLS 1 Exhaust inlet duct 2 Upper sprinkling part 3 Lower sedimentation part 4 Exhaust gas processing part 5 Exhaust fan 6 Exhaust outlet duct 7 Upper sprinkling pipe 8 Upper sprinkling nozzle 9 Upper filler 10, 14 Perforated plate 11 Lower sprinkling pipe 12 Lower sprinkling nozzle 13 Lower filler 15 Hopper part 16 Sludge extraction pipes 17, 22, 23, 27 Electric valves 18, 19 Pipe 20 Suction pipe 21 Pump 24 Rapid filter 25 Generated sludge 26 Filter medium 28 Filter medium regeneration tank 29 First backwash pump 30 Second Backwash pump 31 Water flow 32 Third gas shearing portion 33 Suction pipe 34 Gas-liquid mixing and circulation pump 35 First gas shearing portion 36 Second gas shearing portion 37 Flange 38 N pole magnet 39 S pole magnet 40 Magnetic water heater 41 Liquid passage portion 42 Magnetic lines 43 Flange 44, 46, 47, 49 Electric valve 45 First activated carbon adsorption tower 48 Piping 50, 52, 5 , 54 Electric valve 51 Second activated carbon adsorption tower 55 Sequencer 56, 57 Signal line 58 Scrubber with settling part 59 Water equipment for activated carbon regeneration 60 Water equipment for volatile organic substance removal and activated carbon regeneration 61, 62 Pipe 63 Air pipe 64 Electric needle valve 65 Rapid Filter upper part 66 Rapid filter lower part 67 Volatile organic compound containing exhaust gas processing device 68 Sampling pipe 69 Sampling pump 70 VOC measuring instrument 71 TOC detector 72 TOC controller 73 COD detector 74 COD controller 75 Electric valve 76 Magnetic active water Nano bubble generator 77 signal line

Claims (10)

A first scrubber-type gas processing unit that has an upper sprinkler pipe and dissolves volatile organic compounds in the exhaust gas in the wash water sprinkled from the upper sprinkler pipe to treat the exhaust gas;
Volatile organic compound the nanobubble-containing sludge water nanobubbles containing sludge water magnetism separately acted upon and nano bubble generation in the event of nanobubbles sprinkling from the lower water spray pipe goes to the wash water which has a lower sprinkling pipe A second scrubber system gas processing unit for processing,
Exhaust gas is introduced from below the lower sprinkler pipe and exhaust gas is discharged from the duct above the upper sprinkler pipe,
Furthermore, the lower sedimentation part from which the washing water in which the volatile organic compound has been transferred from the second scrubber system gas treatment part and the nanobubble-containing sludge water to which the magnetism is applied falls,
A rapid filter for depositing sludge contained in the mixture while introducing a mixture of the washing water and the nanobubble-containing sludge water on which the magnetism is applied from the lower sedimentation portion;
An activated carbon adsorption treatment unit that introduces washing water treated with the rapid filter and performs adsorption treatment with activated carbon on the washing water;
A return part for returning the washing water after the adsorption treatment from the activated carbon adsorption treatment part to the upper watering pipe of the first scrubber type gas treatment part;
An exhaust gas comprising: a return unit that returns the nanobubble-containing sludge water containing the nanobubbles subjected to the magnetism from the rapid filter to the lower sprinkler pipe of the second scrubber type gas processing unit. Processing equipment. The exhaust gas treatment device according to claim 1,
The first scrubber type gas treatment unit has an upper watering pipe for spraying the washing water,
The second scrubber system gas processing unit has a lower sprinkling pipe for spraying the nanobubble-containing sludge water to which the magnetism is applied . The exhaust gas treatment device according to claim 2,
Sprinkling with the upper sprinkling pipe is continuously performed, and sprinkling with the lower sprinkling pipe is performed when the concentration of volatile organic compounds in the inflowing exhaust gas is increased or when the concentration of volatile organic compounds in the outflowing exhaust gas is increased. An exhaust gas treatment apparatus comprising a watering control unit that performs control in such a manner. In the exhaust gas processing apparatus according to any one of claims 1 to 3,
A TOC meter for measuring the TOC concentration in the lower sedimentation part;
An exhaust gas treatment comprising: a watering control unit for controlling the amount of the nanobubble-containing sludge water sprayed by the second scrubber type gas processing unit according to the TOC concentration measured by the TOC meter. apparatus. In the exhaust gas treatment device according to any one of claims 1 to 4,
Magnetic nano bubbles to generate nano bubble-containing wash water separately reacted with magnetic and nano bubble generation in the event of nanobubbles, introducing the rapid filter and nano bubble-containing wash water in which the magnetism is applied to the activated carbon adsorption treatment unit An exhaust gas treatment apparatus comprising a cleaning water generation facility. The exhaust gas treatment device according to claim 5,
The activated carbon adsorption processing section has two activated carbon adsorption towers,
Furthermore, one of the two activated carbon adsorption towers is brought into an operating state in which washing water from the rapid filter is introduced, and the other of the two towers of activated carbon adsorption tower is changed to the rapid filter. discharge, characterized in that it comprises an activated carbon adsorption tower controller for hibernation nanobubbles containing wash water the magnetic is action is introduced from the magnetic nano bubble-containing wash water generating facility wash water without being introduced from Gas processing device. The exhaust gas treatment device according to claim 5,
The facility for generating cleaning water containing magnetic nanobubbles includes a magnetic field generator for applying a magnetic field to cleaning water and a nanobubble generator for generating nanobubbles in the cleaning water. The exhaust gas treatment device according to claim 7,
The nano bubble generator is
A first gas shearing section for generating microbubbles in the washing water;
A second gas shearing part that generates nanobubbles by shearing the microbubbles and introducing cleaning water containing the microbubbles from the first gas shearing part;
An exhaust gas processing apparatus comprising: a third gas shearing unit that generates microbubbles by shearing the microbubbles while introducing cleaning water containing micronanobubbles from the second gas shearing unit. In the exhaust gas treatment device according to any one of claims 5 to 8,
An inlet duct for introducing exhaust gas into the first and second scrubber type gas processing sections;
An outlet duct for discharging the processed gas from the first and second scrubber type gas processing units;
A volatile organic compound measuring instrument that is installed in the inlet duct or the outlet duct and samples the volatile organic compound in the gas to measure the concentration of the volatile organic compound in the gas;
An exhaust gas treatment apparatus comprising: a backwash pump that backwashes the rapid filter and whose operation is controlled according to the concentration of the volatile organic compound measured by the volatile organic compound measuring device. A first process in which cleaning water is sprinkled from the upper sprinkler pipe of the first scrubber system gas processing unit, and volatile organic compounds in the exhaust gas are dissolved in the cleaning water to process the exhaust gas in a scrubber system;
When nanobubbles are generated from the lower sprinkler pipe of the second scrubber system gas treatment unit, the nanobubble-containing sludge water, which is magnetized separately from the generation of nanobubbles, is sprinkled to process the volatile organic compounds that have migrated into the washing water using the scrubber system And the second process
further,
The washing water to which the volatile organic compound treated by the second treatment is transferred and the nanobubble-containing sludge water to which the magnetism is applied are introduced into the rapid filter from the lower sedimentation portion, and the sludge is deposited inside the rapid filter. Let
The washing water treated with the rapid filter is introduced into the activated carbon adsorption treatment unit and the washing water is adsorbed with activated carbon,
The washing water after the adsorption treatment is returned from the activated carbon adsorption treatment unit to the upper watering pipe of the first scrubber type gas treatment unit,
Returning the nanobubble-containing sludge water containing the nanobubbles from which the magnetism was applied from the rapid filter to the lower sprinkling pipe of the second scrubber type gas treatment unit,
An exhaust gas treatment method, wherein exhaust gas is introduced from below the lower sprinkler pipe, and exhaust gas is discharged from a duct above the upper sprinkler pipe.

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