JP2007206434A - Spatial light modulation apparatus and display using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enhance the utility efficiency of light better, as compored to that of a conventional spatial light modulation apparatus composed of a liquid crystal panel. <P>SOLUTION: The spatial light modulation apparatus 3 has a plurality of elements 10 arranged two dimensionally on a substrate 11. Each element 10 is provided with a rotating plate 12, of which the attitude regarding the angle is variable with respect to the substrate 11, and an optical filter 13 provided on the rotating plate 12. The elements 10, other than the optical filter 13 constitute a microactuator. The optical filter 13 is a transmission type or a reflection-type optical filter having wavelength selectivity characteristic. The wavelength selectivity characteristic of the optical filter 13 varies according to the incident angle of the light incident on the optical filter 13. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a spatial light modulation device and a display device using the same.

Currently, liquid crystal panels are widely used as spatial light modulators. The spatial light modulation device constituted by this liquid crystal panel is used for a projection display device (projector) (see, for example, FIG. 3 of Patent Document 1) or a liquid crystal display device (LCD) as a direct-view display device. Have been.
JP 7-168147 A

  However, the conventional spatial light modulator is composed of a liquid crystal panel and uses liquid crystal, so that the light use efficiency is essentially reduced. That is, the liquid crystal removes one polarized light and uses the other polarized light that is transmitted or reflected, so that half of the light amount of the light source is wasted. For this reason, not only does it become dark light, but wasteful power consumption also occurs.

  The present invention has been made in view of such circumstances, and a spatial light modulation device capable of increasing the light use efficiency as compared with a conventional spatial light modulation device configured with a liquid crystal panel, and uses the same. It is an object to provide a display device.

  In order to solve the above problems, a spatial light modulation device according to a first aspect of the present invention is a spatial light modulation device that receives incident light and modulates the incident light in accordance with an input signal. A micro actuator having a plurality of microactuators having movable parts whose attitudes relating to angles can be changed, and the movable parts of the microactuators are arranged one-dimensionally or two-dimensionally on one surface side of the substrate. An actuator array; and (ii) a transmissive or reflective optical filter provided on the movable portion of each microactuator and having wavelength selection characteristics, wherein the wavelength selection is performed according to an incident angle of incident light with respect to the optical filter. An optical filter whose characteristics change; and (iii) a control unit that controls the posture of the movable part of each microactuator in accordance with the input signal. It is intended.

  In the spatial light modulation device according to the second aspect of the present invention, in the first aspect, each of the optical filters has a bandpass characteristic having one or more pass wavelength bands as the wavelength selection characteristic.

  The spatial light modulation device according to a third aspect of the present invention is the spatial light modulation device according to the first or second aspect, wherein the control unit relates to each of the microactuators according to the input signal. A first state in which light in at least a part of a wavelength band within a predetermined wavelength region of the incident light is allowed to pass and a second state in which light within the predetermined wavelength region of the incident light is not substantially passed. The position of the movable part of the microactuator is controlled so as to be in a selected state.

  A spatial light modulation device according to a fourth aspect of the present invention is the spatial light modulation apparatus according to the third aspect, wherein the predetermined wavelength region is a visible region.

  The spatial light modulation device according to a fifth aspect of the present invention is the spatial light modulation device according to the third or fourth aspect, wherein the control unit, with respect to each microactuator, is an accumulated time of the first state of the microactuator in a predetermined cycle. Of the movable part of each microactuator so that the ratio of the accumulated time of the second state and the accumulated time of the second state is set according to the gradation of light that should pass through the optical filter of the microactuator indicated by the input signal It controls the posture.

  A spatial light modulation device according to a sixth aspect of the present invention is the spatial light modulation device according to any one of the third to fifth aspects, wherein each of the optical filters is in the first state within the predetermined wavelength region of the incident light. The light to be transmitted is light having substantially the same wavelength component.

  The spatial light modulation device according to a seventh aspect of the present invention is the spatial light modulation device according to the sixth aspect, wherein the light that each optical filter passes in the first state within the predetermined wavelength region of the incident light is red. , Light in a wavelength band of any one color of green and blue, light in a wavelength band of any two colors of red, green and blue, or red, green and blue It is the light of the wavelength band of all the colors.

  A spatial light modulation device according to an eighth aspect of the present invention is the spatial light modulation device according to the sixth or seventh aspect, wherein each of the optical filters is substantially identical to each other when the incident angles of the incident light with respect to the optical filter are the same. It has the following wavelength selection characteristics.

  A spatial light modulation device according to a ninth aspect of the present invention is the spatial light modulation device according to any one of the sixth to eighth aspects, wherein (i) the light in the predetermined wavelength region of the incident light has a plurality of discrete wavelength bands. (Ii) each of the optical filters has a bandpass characteristic having a plurality of discrete pass wavelength bands as the wavelength selection characteristic, and (iii) the optical filter in the first state The plurality of pass wavelength bands of the optical filter are set so that light of the plurality of wavelength bands of the incident light overlaps with the plurality of pass wavelength bands of the optical filter, respectively.

  The spatial light modulation device according to a tenth aspect of the present invention is the spatial light modulation device according to the ninth aspect, wherein the light of the plurality of discrete wavelength bands constituting the incident light is light in a red wavelength band, green wavelength band. And light in the blue wavelength band.

  In the spatial light modulation device according to an eleventh aspect of the present invention, in any one of the third to fifth aspects, the optical filters are divided into a plurality of groups, and the optical filters of the same group are Lights that pass in the first state within the predetermined wavelength region are light of substantially the same wavelength component, and different groups of the optical filters are within the predetermined wavelength region of the incident light. The light transmitted in the first state is light having wavelength components that are substantially different from each other.

  A spatial light modulation device according to a twelfth aspect of the present invention is the spatial light modulation device according to the eleventh aspect, wherein the optical filters of the same group are substantially identical to each other when the incident angles of incident light to the optical filters are the same. The optical filters of different groups having wavelength selection characteristics have wavelength selection characteristics that are substantially different from each other when incident angles of incident light to the optical filters are the same.

  In the spatial light modulation device according to a thirteenth aspect of the present invention, in the tenth or eleventh aspect, each of the optical filters is divided into first to third groups, and the optical filters of the first group are The light that passes in the first state within the predetermined wavelength region of the incident light is light in a red wavelength band, and the optical filter of the second group has the predetermined wavelength of the incident light. The light transmitted in the first state in the region is light in a green wavelength band, and the optical filter of the third group is in the first state in the predetermined wavelength region of the incident light. The light to be transmitted is light in the blue wavelength band.

  The spatial light modulation device according to a fourteenth aspect of the present invention is the spatial light modulation device according to any one of the first to thirteenth aspects, wherein the movable part of at least one of the plurality of microactuators is a torsion hinge. An urging force application unit including a rotator supported to be rotatable about a predetermined rotation axis with respect to the substrate, wherein the at least one microactuator can apply an urging force in at least one rotation direction to the rotator. It is what has.

  In the spatial light modulation device according to a fifteenth aspect of the present invention, in any one of the first to thirteenth aspects, the movable portion of at least one microactuator of the plurality of microactuators has a cantilever structure. The movable part is provided so as to generate a return force for returning to a predetermined posture, and the movable part has a drive force generating part capable of generating a drive force against the return force.

  The spatial light modulation device according to a sixteenth aspect of the present invention is the spatial light modulation device according to any one of the first to fifteenth aspects, wherein each of the optical filters is a transmissive optical filter, and the substrate is formed of the incident light. The wavelength component light that is transparent to the wavelength component light that passes through each optical filter in the predetermined wavelength region and that passes through the optical filter in the predetermined wavelength region out of the incident light is the substrate. The light is incident on the optical filter after passing through the optical filter, or light having a wavelength component that passes through the optical filter in the predetermined wavelength region of the incident light passes through the optical filter, and then the substrate is passed through the optical filter. It is transparent.

  A spatial light modulation device according to a seventeenth aspect of the present invention is the spatial light modulation device according to the sixteenth aspect, wherein light of a wavelength component transmitted through the respective optical filters in the predetermined wavelength region of the incident light is transmitted through the substrate. A microlens that subsequently enters each optical filter and collects the incident light on the optical filter is formed on the incident light incident side of the substrate.

  A projection-type or direct-view display device according to an eighteenth aspect of the present invention includes the spatial light modulation device according to any one of the first to seventeenth aspects.

  According to the present invention, it is possible to provide a spatial light modulation device capable of increasing the light use efficiency as compared with a conventional spatial light modulation device configured with a liquid crystal panel, and a display device using the spatial light modulation device.

  Hereinafter, a spatial light modulation device and a display device using the same according to the present invention will be described with reference to the drawings.

  [First Embodiment]

  FIG. 1 is a schematic configuration diagram showing a projection display device (projector) according to a first embodiment of the present invention. For convenience of explanation, as shown in FIG. 1, an X axis, a Y axis, and a Z axis that are orthogonal to each other are defined (the same applies to the drawings described later). The direction of the arrow in the Z-axis direction is called the + Z direction or + Z side, and the opposite direction is called the -Z direction or -Z side, and the same applies to the X-axis direction and the Y-axis direction. The Z axis is parallel to the optical axis of the projection display device.

  The projection display device according to the present embodiment is configured as a black and white display device. As shown in FIG. 1, a light source 1, a lens 2 that converts a light beam from the light source 1 into a parallel light beam, a spatial light modulation device 3, and the like. And a projection lens 4 as a projection optical system for irradiating the screen 5 with a display image. In the present embodiment, a transmissive spatial light modulator is used as the spatial light modulator 3, but a reflective spatial light modulator may be used.

  In the present embodiment, the light source 1 includes light in a red wavelength band (R light), light in a green wavelength band (G light), and light in a blue wavelength band (R light) as light in a plurality of discrete wavelength bands. B light). Specifically, for example, an LED in which three LEDs of R, G, and B are used as a set is used as the light source 1, and the three wavelength bands ΔλR, ΔλG, and ΔλB of the light emitted from the light source 1 are 470 nm. There are relatively narrow wavelength bands near, 550 nm, and 650 nm. Further, as the light source 1, for example, a halogen lamp that emits light having a continuous spectrum in the visible region, and a transmission type or a reflection type that obtains discrete R light, G light, and B light by filtering the light. A combination of a three-band optical filter may be used.

  In the present embodiment, the light from the light source 1 is converted into a parallel light beam by the lens 2 and is incident on the spatial light modulator 3 as a parallel light beam. However, the light incident on the spatial light modulator 3 may not be a parallel light beam, and the lens 2 is not necessarily provided.

  The spatial light modulation device 3 modulates the light from the light source 1 incident through the lens 2 with an image signal input from the outside (in this embodiment, an image signal indicating a black and white image), thereby producing a black and white image. Light (modulated light) is generated. This image light is projected on the screen 5 by the projection lens 4.

  FIG. 2 is a schematic plan view schematically showing the spatial light modulation device 3 in FIG. Note that FIG. 2 is greatly simplified and shows only the substrate 11, the rotating plate 12, and the optical filter 13. FIG. 3 is a schematic plan view schematically showing two adjacent unit elements (pixels; hereinafter simply referred to as “elements”) 10 in FIG. FIG. 4 is a schematic cross-sectional view along the line A-A ′ in FIG. 3. FIG. 5 is a schematic cross-sectional view along the line B-B ′ in FIG. 3. 2 and 3, the optical filter 13 is hatched.

  In the present embodiment, the spatial light modulation device 3 is configured as a transmission type, and the substrate 11 side (that is, the −Z side) is the light incident side. The spatial light modulation device 3 includes a substrate 11 such as a Pyrex (registered trademark) glass substrate or a sapphire substrate that is transparent with respect to light in the visible region including the R light, G light, and B light described above. 4 × 4 elements 10 arranged two-dimensionally, and a drive circuit (not shown) that is mounted on the substrate 11 and forms a control unit that controls these elements 10 according to image signals input from the outside It is equipped with. Of course, the number of elements 10 is not particularly limited. The + Z side surface of the substrate 11 is parallel to the XY plane.

  Each element 10 includes a rotating plate 12 as a movable portion whose attitude with respect to an angle can change with respect to the substrate 11, and a transmission type optical filter 13 provided on the rotating plate 12 and having wavelength selection characteristics. And an optical filter 13 in which the wavelength selection characteristic changes according to the incident angle of the incident light with respect to. The optical filter 13 of each element 10 receives a partial light flux of incident light from the light source 1.

  The rotating plate 12 is formed in a rectangular flat plate shape by a SiN (SiNx) film 21, and a step 12 a for increasing rigidity is formed around the rotating plate 12. Note that the SiN film is transparent to light in the visible region. The central part of the + Y side of the rotating plate 12 and the central part of the −Y side of the rotating plate 12 are supported by a post 14 rising from the substrate 11 via a torsion hinge 15, and the rotating plate 12 is connected to the Y axis by the torsion hinge 15. It is supported so as to be rotatable around parallel rotation axes. When the rotating plate 12 rotates, the inclination angle θ of the rotating plate 12 with respect to the XY plane (that is, the inclination angle with respect to the + Z side surface of the substrate 11) changes. When the later-described electrostatic force is not applied to the rotating plate 12, the rotating plate 12 is returned to a posture parallel to the XY plane by the restoring force of the torsion hinge 15. The SiN film 21 constituting the rotating plate 12 extends to the torsion hinge 15 and the post 14 as it is.

  A movable electrode 16 made of an ITO film 22 is formed on the rotating plate 12, and an optical filter 13 is further formed on the movable electrode 16. The ITO film 22 is transparent to light in the visible region. As shown in FIG. 3, the optical filter 13 is formed in a large area of the flat portion of the rotating plate 12 except for the vicinity of the step 12 a around the rotating plate 12. The movable electrode 16 is also formed in the same region of the rotating plate 12. As shown in FIG. 5, the ITO film 22 constituting the movable electrode 16 extends to the torsion hinge and the post 14 as a part of the wiring of the movable electrode 16, and is formed on the SiN film 21 at the post 14. It is connected to a wiring 17 on the substrate 11 made of an ITO film through a contact hole. The movable electrodes 16 of all the elements 10 are electrically connected in common by the wiring 17. In the present embodiment, each of the two posts 14 is connected to the two wirings 17, but the movable electrode 16 may be connected to only one wiring 17. The torsion hinge 15 and the post 14 are constituted by a SiN film 21 extending from the rotating plate 12 and an ITO film 22 extending from the movable electrode 16.

In this embodiment, the optical filter 13 has a wavelength selection characteristic described later by a dielectric multilayer film (for example, a dielectric multilayer film having a structure in which a large number of alternating layers of SiO ₂ layers and Nb ₂ O ₅ layers are stacked). It is configured to have. When the incident angle of the incident light with respect to the dielectric multilayer film changes, the effective thickness of each layer changes according to the incident angle, so that the wavelength selection characteristics change according to the incident angle. For example, when the dielectric multilayer film has a bandpass characteristic as a wavelength selection characteristic regarding the transmission characteristic, the transmission wavelength band shifts to the short wavelength side as the inclination of incident light with respect to the normal direction of the dielectric multilayer film increases. I will do it. The wavelength selection characteristics of the optical filter 13 will be described in detail later. The optical filter 13 is not limited to a dielectric multilayer film, and may be composed of, for example, a photonic crystal.

  On the substrate 11, a first fixed electrode 18 a made of an ITO film facing the −X side region of the movable electrode 16 and a second fixed electrode made of an ITO film facing the + X side region of the movable electrode 16. 18b is formed. The first fixed electrode 18a is connected to the wiring 19a formed by extending the ITO film constituting the first fixed electrode 18a, and the second fixed electrode 18b is connected to the wiring 19b formed by extending the ITO film constituting the first fixed electrode 18a. It is connected to the. The fixed electrodes 18a and 18b of each element 10 are wired independently for each of the electrodes 18a and 18b and for each element 10 by wirings 19a and 19b.

The wirings 17, 19a, 19b, the fixed electrodes 18a, 18b, and the drive circuit are covered with an insulating film 20 made of a SiN film or SiO ₂ film that is transparent to light in the visible region.

  Since the element 10 has the movable electrode 16 and the first and second fixed electrodes 18a and 18b as described above, when a voltage is applied between the movable electrode 16 and the first fixed electrode 18a, An electrostatic force as a driving force acts between the rotating plate 12 and the -X side region of the movable electrode 16 approaches the substrate 11 side around the rotation axis parallel to the Y axis connecting the two torsion hinges 15. Rotate in the direction of rotation. The rotating plate 12 is in contact with the insulating film 20 on the substrate 11 and is held in that state. In this state, the height of the post 14 is set so that the inclination angle (inclination angle with respect to the XY plane) θ of the rotating plate 12 becomes a predetermined inclination angle θ1. The tilt angle θ1 will be described in detail later. For example, the tilt angle at which the optical filter 13 does not transmit any of R light, G light, and B light from the light source 1 is used.

  Similarly, when a voltage is applied between the movable electrode 16 and the second fixed electrode 18b, an electrostatic force as a driving force acts between the two, and the rotating plate 12 has two torsion hinges. 15, the region on the + X side of the movable electrode 16 rotates in a rotation direction approaching the substrate 11 side around a rotation axis parallel to the Y axis connecting 15. The rotating plate 12 is in contact with the insulating film 20 on the substrate 11 and is held in that state. In this state, the inclination angle θ of the rotating plate 12 is set to the inclination angle θ1 as in the case where a voltage is applied between the movable electrode 16 and the first fixed electrode 18a.

  When no voltage is applied between the movable electrode 16 and the first fixed electrode 18a or between the movable electrode 16 and the second fixed electrode 18b, the restoring force of the torsion hinge 15 The posture in which the rotating plate 12 is parallel to the XY plane, that is, the inclination angle θ of the rotating plate 12 is returned to 0 degrees, and this state is maintained. As will be described in detail later, when the inclination angle θ is 0 degree, for example, the optical filter 13 is set so as to transmit any of R light, G light, and B light from the light source 1.

  In the present embodiment, the optical filters 13 of all the elements 10 are configured identically, so that the optical filters 13 of all the elements 10 have the same tilt angle of the rotating plate 12 (that is, In the case where the incident angles of incident light to the optical filter 13 are the same), they have substantially the same wavelength selectivity. Also, the other configurations of all the elements 10 are configured identically.

  The drive circuit can apply a predetermined voltage between the movable electrode 16 of each element 10 and the fixed electrodes 18a, 18b independently for each element 10 via the wirings 17, 19a, 19b. It has become. The drive circuit controls the posture of the rotating plate 12 by controlling the timing and period of the voltage applied between the movable electrode 16 and the fixed electrodes 18a and 18b in accordance with an image signal input from the outside. . In the present embodiment, for each element 10, the drive circuit causes the optical filter 13 to emit R light and G light from the light source 1 when the inclination angle θ of the rotating plate 12 of the element 10 in a predetermined cycle is around 0 degrees. The accumulated time in the first state in which both of the B light and the B light are transmitted, and the tilt angle θ of the rotating plate 12 of the element 10 in the predetermined period become near the tilt angle θ1 so that the optical filter 13 receives the R from the light source 1. The rotating plate is set such that the ratio of the accumulated time in the second state in which none of light, G light, and B light is transmitted is set according to the gradation of light that the optical filter 13 of the element 10 should pass. 12 postures are controlled.

  For example, when the gradation is zero, the driving circuit rotates by applying a predetermined voltage between one of the fixed electrodes 18a and 18b and the movable electrode 16 over the entire predetermined period. The inclination angle θ of the plate 12 is kept at the inclination angle θ1. When the gradation is the maximum value, the drive circuit does not apply a voltage between both the fixed electrodes 18a and 18b and the movable electrode 16 over the entire predetermined period, and the rotating plate 12 Is kept at 0 degree. In addition, when the gradation is an intermediate value, the driving circuit alternately applies a voltage between the fixed electrode 18a and the movable electrode 16 and between the fixed electrode 18b and the movable electrode 16 during the predetermined period. Is applied to the rotary plate 12 so that the rotary plate 12 is reciprocated between a state where the rotary plate 12 is rotated substantially at an inclination angle θ1 toward one side and a state where the rotary plate 12 is rotated approximately at an inclination angle θ1 around 0 degree. The timing and period of the applied voltage are set so that the ratio of the accumulated time at which the inclination angle θ of 12 becomes 0 degree becomes a value corresponding to the intermediate value. In this way, the drive circuit realizes gradation control by time division.

  The drive circuit does not always apply a voltage to one of the fixed electrodes 18a and 18b, but controls the timing and period of only the voltage to be applied to the other of the fixed electrodes 18a and 18b, whereby the drive circuit in a predetermined cycle. A ratio between the first integration time and the integration time in the second state may be set. In this case, one of the fixed electrodes 18a and 18b is unnecessary and may be removed.

  Although the drive circuit is not shown in the drawing, for example, according to a drive circuit used in an LCD, a DMD (Digital Micro-mirror Device) or the like, a transistor provided corresponding to a scanning circuit or each element It can be configured by using a switching element or the like. If the drive circuit is configured using the technology adopted in the transmissive LCD, it is possible to prevent the light from the light source 1 from being blocked by the drive circuit (especially switching elements and address lines). It is.

  As described above, since the substrate 11, the insulating film 20, the fixed electrodes 18a and 18b, the rotating plate 12, the movable electrode 16, and the like are transparent to light in the visible region, R light, G light, and B from the light source 1 are used. The light is not blocked.

  In the present embodiment, on the light incident side of the substrate 11, a microlens 11 a that condenses incident light on the optical filter 13 is formed on-chip corresponding to the optical filter 13 of each element 10. Has been. In the present embodiment, the microlens 11 a is formed of the same material as the substrate 11 by processing the substrate 11, but may be formed of a material different from that of the substrate 11. In the present embodiment, by using the microlens 11a, it is possible to effectively use light that enters the optical filter 13 and cannot enter the optical filter 13 without the microlens 11a. Thus, the light utilization efficiency can be further increased. Note that if a lens having a high light collection rate is used as the microlens 11a, it is possible to avoid a portion where wiring, electrodes, and the like are disposed from the optical path. In such a case, it is not always necessary to configure wiring, electrodes, etc. using a transparent electrode material.

  However, it is not always necessary to form the microlens 11a. In this case, light that does not enter the optical filter 13 may be shielded by a light shielding unit (not shown) as necessary. When the microlens 11a is not formed in this way, the optical filter 13 side (that is, the + Z side) may be the light incident side, contrary to the present embodiment. However, when the optical filter 13 side is the light incident side, a microlens array configured separately from the spatial light modulator 3 may be arranged on the + Z side of the optical filter 13 to increase the light use efficiency. .

  In the present embodiment, the part other than the optical filter 13 in the element 10 constitutes one microactuator. And the part except each optical filter 13 among the several elements 10 which comprise the spatial light modulation apparatus 3 comprises the microactuator array provided with the several microactuator.

  Next, an example of a method for manufacturing the spatial light modulation device 3 will be described with reference to FIGS. 6 to 8 are schematic cross-sectional views schematically showing the state of each step in this manufacturing method, and a cross section taken along the line AA ′ in FIG. 3 (however, only a cross section of one element 10). It corresponds to. In addition, the material and dimension in the following description are illustrations, and are not limited to them.

First, the drive circuit (not shown) is formed on a substrate 11 such as a Pyrex glass substrate or a sapphire substrate by a method according to a method for forming a drive circuit such as an LCD. At this time, an ITO film having a thickness of 0.3 μm is formed on the substrate 11, and this ITO film is patterned into shapes of the fixed electrodes 18a and 18b and the wirings 17, 19a and 19b. Then, an insulating film 20 having a thickness of 0.5 μm made of a SiN film or a SiO ₂ film is formed over the entire surface of the substrate 11 on these and the drive circuit (FIG. 6A).

  Next, a resist 42 having a thickness of 12 μm as a sacrificial layer is applied to the entire surface of the substrate in the state shown in FIG. 6A (FIG. 6B). Further, a resist 43 having a thickness of 3 μm is formed in an island shape on the resist 42 as a sacrificial layer in accordance with the rotating plate 12 (FIG. 7A). Next, an opening corresponding to the contact hole in the post 14 (a square opening with a side of 5 μm) is formed in the resist 42 and the insulating film 20.

  Thereafter, a SiN film 21 is formed, and this SiN film 21 is patterned into the shape of the rotating plate 12, the post 14 and the torsion hinge 15 (FIG. 7B). At this time, an opening corresponding to the contact hole in the post 14 is formed in the SiN film 21.

Next, an ITO film 22 having a thickness of 0.3 μm is formed, and this ITO film 22 is patterned into a shape of a part of the movable electrode 16 and its wiring. Further, a dielectric multilayer film having a total thickness of about 4 μm is formed by laminating a number of alternating layers of SiO ₂ layers and Nb ₂ O ₂ layers, and this dielectric multilayer film is patterned into the shape of the optical filter 13. (FIG. 7C).

  Next, a resist 44 as a protective layer is formed on the substrate in the state of FIG. Further, a resist 45 exposed and developed with a gray-tone mask or the like is formed on the lower surface of the substrate 11 so as to have a curved surface matching the shape of the microlens 11a (FIG. 8A).

  Thereafter, the lower surface side of the substrate 11 is dry-etched using the resist 45 as a mask so that the lower surface side of the substrate 11 becomes the microlens 11a (FIG. 8B).

  Finally, the resists 42 to 44 are removed by a plasma ashing method or the like. Thereby, the spatial light modulation device 3 is completed.

  Here, the wavelength selection characteristic of the optical filter 13 will be described with reference to FIG. FIG. 9 schematically shows the relationship between the wavelength bands ΔλR, ΔλG, ΔλB of the discrete R light, G light, and B light from the light source 1 and the discrete transmission wavelength bands Δλ1, Δλ2, Δλ3 of the optical filter 13. FIG. FIG. 9A shows the case where the tilt angle θ of the rotating plate 12 is 0 °, and FIG. 9B shows the case where the tilt angle θ of the rotating plate 12 is the tilt angle θ1 described above.

  As described above, in the present embodiment, the wavelength component of the light from the light source 1 has only discrete wavelength bands ΔλR, ΔλG, ΔλB of the discrete R light, G light, and B light in the visible region. .

  In the present embodiment, the optical filter 13 of each element 10 of the spatial light modulator 3 is a band having three discrete transmission wavelength bands Δλ1, Δλ2, Δλ3 in the visible region as shown in FIG. It has pass characteristics (so-called 3-band pass characteristics). As the rotating plate 12 is tilted (that is, as the tilt angle θ is increased), the effective thickness of each layer of the dielectric multilayer film constituting the optical filter 13 is increased. Therefore, as shown in FIG. Δλ1, Δλ2, and Δλ3 shift to the short wavelength side. In the present embodiment, the incident angle of the incident light with respect to the substrate 11 is unchanged.

  In this embodiment, when θ = 0 °, as shown in FIG. 9A, the three transmission wavelength bands Δλ1, Δλ2, and Δλ3 overlap with the three wavelength bands ΔλR, ΔλG, and ΔλB, respectively. . On the other hand, when θ = θ1, the three transmission wavelength bands Δλ1, Δλ2, and Δλ3 do not overlap any of the wavelength bands ΔλR, ΔλG, and ΔλB. In the present embodiment, the optical filter 13 of each element 10 of the spatial light modulator 3 is set with an inclination angle θ1 and transmission wavelength bands Δλ1, Δλ2, and Δλ3 so as to satisfy such a relationship. For example, by appropriately setting the number of layers constituting the optical filter 13, the layer thickness, and the like, the transmission wavelength bands Δλ 1, Δλ 2, and Δλ 3 can be appropriately set by providing the optical filter 13 with three band pass characteristics. Is well known.

  Therefore, in this embodiment, when the tilt angle θ of the rotating plate 12 is set to 0 °, the optical filter 13 transmits all of the R light, G light, and B light, and the light after transmission is substantially the same as the light before transmission. It becomes white light. On the other hand, when the tilt angle θ of the rotating plate 12 is set to the tilt angle θ1, light in any wavelength band of R light, G light, and B light is not transmitted, and light from the light source 1 is completely shielded.

  Here, FIG. 11 and FIG. 12 show examples of simulation results when the relationship shown in FIG. 9 is set. In this simulation, it is assumed that the light transmitted through the light from the halogen lamp through the optical filter having the three-band characteristics shown in FIG. 10 (the optical filter for producing incident light) is incident light on the optical filter 13. FIG. 11 shows the simulation result of the spectrum of the light after passing through the optical filter 13 when this incident light is incident on the optical filter 13 in the normal direction (corresponding to θ = 0 °). Show. In addition, when this incident light is incident on the optical filter 13 with an inclination of 30 ° with respect to the normal direction of the optical filter 13 (corresponding to θ = θ1 = 30 °), the light is transmitted through the optical filter 13. The simulation result of the spectrum of light is shown in FIG. In this simulation, the optical filter 13 is assumed to be a laminated film of 30 layers, and the material and film thickness of each layer are as shown in Table 1 below. In Table 1, layer numbers are given to each layer in the order of lamination. The layer side of layer number 1 is the substrate side, and the layer side of layer number 30 is the light incident side.

  From FIGS. 11 and 12, if the configuration of the optical filter 13 is adopted as in the simulation, and the inclination angle θ1 is set to 30 °, the optical filter 13 will have R light when θ = 0 °, It can be seen that white light composed of G light and B light is transmitted and light in any wavelength band is shielded when θ = θ1.

  In the present embodiment, the spatial light modulation device 3 described above is used, and the spatial light modulation is performed using the wavelength selection characteristic of the optical filter 13, so that a liquid crystal using polarized light instead of the spatial light modulation device 3 is used. Compared with the case of using a conventional spatial light modulation device constituted by a panel, the light utilization efficiency is greatly increased.

  In the present invention, the wavelength selection characteristic of the optical filter 13 of each element 10 is not limited to the example described above. For example, when θ = 0 °, the optical filter 13 of each element 10 transmits only light in a wavelength band of any one color of R light, G light, and B light, or R light , G light and B light in any two color wavelength bands may be selectively transmitted and light in any wavelength band may be shielded when θ = θ1.

  For example, the optical filter 13 of each element 10 may be configured to transmit only the G light when θ = 0 ° and to block any light when θ = θ1. In this case, the projection display device shown in FIG. 1 performs a green monochromatic display as a kind of monochrome display. In this case, a light source 1 that emits only light in the G light wavelength band ΔλG may be used. At this time, as shown in FIG. 13, the optical filter 13 of each element 10 may be configured to have a short path characteristic that transmits a wavelength band ΔλS equal to or less than the cutoff wavelength. The spatial light modulation device 3 that can transmit only such G light can be used as a G light spatial light modulation device in a so-called three-plate projection display device, for example.

  In the present invention, the optical filter 13 of each element 10 shields light in any wavelength band when θ = 0 ° so that the relationship between transmission and light shielding is opposite to that of the present embodiment. , Θ = θ1, and may have a wavelength selection characteristic that transmits light in one or more wavelength bands of R light, G light, and B light.

  In the present embodiment, as described above, the optical filters 13 of all the elements 10 have the same wavelength selection characteristics, but the present invention is not necessarily limited to this. For example, the optical filter 13 of one element 10 has the wavelength selection characteristic shown in FIG. 9, while the optical filter 13 of another element 10 blocks light in any wavelength band when θ = 0 °, In the case of θ = θ1, a wavelength selection characteristic that transmits light in the wavelength bands of R light, G light, and B light may be provided.

  [Second Embodiment]

  FIG. 14 is a schematic plan view schematically showing two adjacent unit elements 60 of the spatial light modulation device 52 used in the projection display device according to the second embodiment of the present invention, and corresponds to FIG. ing. FIG. 15 is a schematic sectional view taken along line C-C ′ in FIG. 14. 14 and 15, the same or corresponding elements as those in FIGS. 3 and 4 are denoted by the same reference numerals, and redundant description thereof is omitted.

  The projection display device according to the present embodiment is different from the projection display device according to the first embodiment in that a spatial light modulation device 52 is used instead of the spatial light modulation device 3, and accordingly, a drive circuit is used. 3 is not a voltage signal but a current signal described later. Although not shown in the drawing, in the spatial light modulator 52, a plurality of unit elements 60 that replace the unit elements 10 are arranged on the substrate 11 two-dimensionally.

  The spatial light modulation device 52 basically differs from the spatial light modulation device 3 in that the spatial light modulation device 3 rotatably supports the rotating plate 12 as a movable part, whereas the spatial light modulation device 52 As will be described below, a cantilever structure is employed.

  Each element 60 includes a movable plate 62 as a movable portion that can change its attitude with respect to the substrate 11, and an optical filter 13 provided on the movable 62 (this optical filter 13 is an optical filter of the spatial light modulator 3. 13). However, the configuration of the optical filter 13 may be modified as in the case of the first embodiment.

  The movable plate 62 is formed in a rectangular flat plate shape by a lower SiN film 71 and an upper SiN film 72, and a step 62a for increasing rigidity is formed around the movable plate 62. The optical filter 13 is formed on the SiN film 72.

  Both side portions on one side of the −X side of the movable plate 62 are supported via posts 65 rising from the substrate 11 via hinges 65 that form leaf springs, and the movable plates 62 are supported by the hinges 65 so as to be tiltable. In this embodiment, a cantilever structure in which one end side is supported by the hinge 65 is employed. When the Lorentz force described later is not applied to the movable plate 62, the movable plate 62 is returned to a posture parallel to the XY plane by the restoring force of the hinge 65 (in this embodiment, the spring force). It has become. The SiN films 71 and 72 constituting the movable plate 62 extend to the hinge 65 and the post 64 as they are.

  As shown in FIG. 14, between the SiN films 71 and 72, from the + Y side post 64, the + Y side hinge 65, the vicinity of the + Y side of the movable plate 62, the vicinity of the + X side of the movable plate 62, and the movable A wiring 63 made of an Al film is formed in the vicinity of the −Y side edge of the plate 62, passing through the −Y side hinge 65, and reaching the −Y side post 64. In the present embodiment, the wiring 63 is arranged so as not to overlap the optical filter 13. However, in the case where the wiring 63 is arranged so as to overlap, the wiring 63 may be formed of an ITO film or the like. A non-illustrated permanent magnet (may be an electromagnet or the like) generates a substantially uniform magnetic field toward one side along the X-axis direction.

  Of the wiring 63, a linear path 63a extending in the Y-axis direction along one side of the + X side of the movable plate 62 is disposed in the magnetic field of the magnet, and generates a Lorentz force as a driving force when energized. (Current path for Lorentz force). The other part of the wiring 63 is a supply path for supplying current to the Lorentz force current path 63a. Since the magnetic field is generated by the magnet, the Lorentz force in the −Z direction or + Z direction acts on the Lorentz force current path 63a (and hence the movable plate 62) according to the direction of the current flowing through the Lorentz force current path 63a. To do. In the present embodiment, the Lorentz force current path 63a serves as a driving force generator, but the driving force is not necessarily limited to the Lorentz force.

  The hinge 65 and the post 64 are composed of SiN films 71 and 72 and wirings 63 extending from the movable plate 62.

One end of the wiring 63 is connected to a wiring 66 a made of an Al film formed on the substrate 11 through a contact hole formed in the SiN film 71 at a post 64 on the + Y side. Similarly, the other end of the wiring 63 is connected to a wiring 66 b made of an Al film formed on the substrate 11 through a contact hole formed in the SiN film 71 in the post 64 on the −Y side. The wirings 66a and 66b are covered with an insulating film 80 made of a SiN film or a SiO ₂ film.

  In the present embodiment, the drive circuit can cause a predetermined current to flow through the Lorentz force current path 63a of each element 60 independently through each of the elements 60 via the wirings 66a and 66b.

  In the spatial light modulator 52, when a Lorentz force current is passed through the Lorentz force current path 63a, the movable plate 62 is tilted to an inclination angle where the Lorentz force generated in the Lorentz force current path 63a and the spring force of the hinge 65 are balanced. Hold that state. Therefore, the inclination of the movable plate 62 to be held can be set by setting the magnitude of the current flowing through the Lorentz force current path 63a. The direction of the Lorentz force may be the + Z direction or the −Z direction.

  The drive circuit controls the posture of the movable plate 62 by controlling the timing and the period for supplying the Lorentz force current path 63a to the Lorentz force current path 63a in accordance with an image signal input from the outside.

  Also in the present embodiment, the optical filter 13 is the same as in the first embodiment. Therefore, in the present embodiment, the drive circuit moves the element 60 in a predetermined cycle with respect to each element 60. The integrated time of the first state in which the optical filter 13 transmits all of the R light, G light, and B light from the light source 1 when the inclination angle θ of the plate 62 is near 0 degrees, and the element 60 in the predetermined cycle. The tilt angle θ of the movable plate 62 is in the vicinity of the tilt angle θ1, and the ratio with the accumulated time in the second state in which the optical filter 13 does not transmit any of R light, G light, and B light from the light source 1 is The posture of the movable plate 62 is controlled so that the optical filter 13 of the element 60 is set according to the gradation of light that should pass.

  For example, when the gradation is zero, the driving circuit causes the current of a predetermined magnitude to flow through the Lorentz force current path 63a over the entire predetermined period to set the inclination angle θ of the movable plate 62. Continue to hold at the tilt angle θ1. When the gray level is the maximum value, the drive circuit maintains the inclination angle θ of the movable plate 62 at 0 degrees without passing a current through the Lorentz force current path 63a over the entire predetermined period. to continue. Further, when the gradation is an intermediate value, the drive circuit repeats on / off of the current to the Lorentz force current path 63a during the predetermined period, so that the inclination angle θ of the movable plate 62 is almost equal. The state of the inclination angle θ1 and the state of almost 0 degrees are repeated, and the Lorentz so that the ratio of the accumulated time at which the inclination angle θ of the rotating plate 12 in the predetermined period becomes 0 degrees becomes a value according to the intermediate value. The timing and period of the current flowing through the force / current path 63a are set. In this way, the drive circuit realizes gradation control by time division.

  In the present embodiment, the part of the element 60 other than the optical filter 13 constitutes one microactuator. And the part except each optical filter 13 among the several elements 60 which comprise the spatial light modulation apparatus 52 comprises the microactuator array provided with the several microactuator.

  Next, an example of a method for manufacturing the spatial light modulation device 52 will be described with reference to FIGS. 16 to 18 are schematic cross-sectional views schematically showing the state of each step in this manufacturing method, and correspond to the cross-sectional view shown in FIG. However, in FIGS. 16 to 18, only the cross section of one element 60 is shown. In addition, the material and dimension in the following description are illustrations, and are not limited to them.

First, the drive circuit (not shown) is formed on a substrate 11 such as a Pyrex glass substrate or a sapphire substrate by a method according to a method for forming a drive circuit such as an LCD. At this time, an Al film having a thickness of 0.3 μm is formed on the substrate 11, and this Al film is patterned in the shape of the wirings 66a, 66b and the like. Then, an insulating film 80 having a thickness of 0.5 μm made of a SiN film or a SiO ₂ film is formed over the entire surface of the substrate 11 on these and the drive circuit (FIG. 16A).

  Next, a resist 91 having a thickness of 3 μm is formed as a sacrificial layer on the entire insulating film 20 (FIG. 16B). Further, a resist 92 having a thickness of 3 μm as a sacrificial layer matched with the movable plate 62 is formed in an island shape on the resist 91 (FIG. 16C).

  Subsequently, an opening (a square opening with a side of 5 μm) corresponding to the contact hole in the post 64 is formed in the resist 91 and the insulating film 80 (FIG. 16D).

  Thereafter, a SiN film 71 is formed, and this SiN film 71 is patterned into the shape of the movable plate 62, the post 64, and the hinge 65 (FIG. 17A). At this time, an opening corresponding to the contact hole in the post 64 is formed in the SiN film 71.

  Next, an Al film having a thickness of 0.3 μm is formed, and this Al film is patterned into the shape of the wiring 63 (FIG. 17B). Further, a 0.3 μm thick SiN film 72 is formed thereon, and the SiN film 72 is patterned into the shape of the movable plate 62, the post 64, and the hinge 65 (FIG. 17C).

Next, a dielectric multilayer film having a structure in which a large number of alternating layers of SiO ₂ layers and Nb ₂ O ₂ layers are laminated and having an overall layer thickness of about 4 μm is formed, and this dielectric multilayer film is formed into the shape of the optical filter 13. Then, patterning is performed (FIG. 17D).

  Next, a resist 93 as a protective layer is formed on the substrate in the state of FIG. Further, a resist 94 exposed and developed with a gray-tone mask or the like is formed on the lower surface of the substrate 11 so as to have a curved surface matching the shape of the microlens 11a (FIG. 18A).

  Thereafter, the lower surface side of the substrate 11 is dry-etched using the resist 94 as a mask so that the lower surface side of the substrate 11 becomes the microlens 11a (FIG. 18B).

  Finally, the resists 91 to 93 are removed by a plasma ashing method or the like. Thereby, the spatial light modulator 52 is completed.

  Also according to the present embodiment, the light use efficiency is significantly increased as in the first embodiment.

  [Third Embodiment]

  FIG. 19 is a diagram schematically showing the characteristics of the optical filter 13 of the B light element 10 of the spatial light modulation device used in the projection display device according to the third embodiment of the present invention. FIG. 20 is a diagram schematically showing the characteristics of the optical filter 13 of the G light element 10 of the spatial light modulation device used in the projection display device according to the third embodiment of the present invention. FIG. 21 is a diagram schematically showing the characteristics of the optical filter 13 of the R light element 10 of the spatial light modulation device used in the projection display device according to the third embodiment of the present invention.

  The projection display apparatus according to this embodiment is different from the projection display apparatus according to the first embodiment only in the points described below.

  That is, in the first embodiment, the optical filters 13 of all the elements 10 have the characteristics shown in FIG. 9, whereas in this embodiment, the optical filters 13 of all the elements 10 are It is divided into three groups for R light, G light, and B light, and each group has different wavelength selection characteristics.

  In the present embodiment, the optical filter 13 of the B light element 10 has a single bandpass characteristic having only one transmission wavelength band Δλ21 as shown in FIG. When θ = 0 °, the transmission wavelength band Δλ21 overlaps with the wavelength band ΔλB (FIG. 19A), whereas when θ = θ1, they do not overlap (FIG. 19B).

  Further, as shown in FIG. 20, the optical filter 13 of the G light element 10 has a single bandpass characteristic having only one transmission wavelength band Δλ22. When θ = 0 °, the transmission wavelength band Δλ22 overlaps with the wavelength band ΔλG (FIG. 20 (a)), whereas when θ = θ1, they do not overlap (FIG. 20 (b)).

  Furthermore, as shown in FIG. 21, the optical filter 13 of the R light element 10 has a single bandpass characteristic having only one transmission wavelength band Δλ23. When θ = 0 °, the transmission wavelength band Δλ23 overlaps the wavelength band ΔλR (FIG. 21A), whereas when θ = θ1, they do not overlap (FIG. 21B).

  The elements 10 for R light, G light, and B light correspond to a red pixel, a green pixel, and a blue pixel, respectively. As their arrangement, for example, a conventional full-color element constituted by a liquid crystal panel is used. An arrangement known in the spatial light modulation device may be adopted.

  As can be seen from the above description, the projection display device according to the first embodiment is a monochrome display device, whereas the projection display device according to the present embodiment is a full-color display that performs full-color display. A projection display device is obtained.

  Also according to the present embodiment, the light use efficiency is significantly increased as in the first embodiment.

  Note that the characteristics of the optical filter 13 of the element 10 for R light, G light, and B light are not limited to the examples shown in FIGS. For example, as shown in FIG. 22, the optical filter 13 of the element for B light may be configured to have a short path characteristic that transmits a wavelength band Δλ31 that is equal to or less than the cutoff wavelength.

  Note that a full-color projection type that performs full-color display can be obtained by applying the same modification as the one obtained by modifying the first embodiment to the second embodiment. A display device can be obtained.

  [Fourth Embodiment]

  FIG. 23 is a partially cutaway schematic side view schematically showing a direct-view display device according to the fourth embodiment of the present invention.

  The direct-view display device according to this embodiment includes a spatial light modulation device 3 having the same configuration as that used in the projection display device according to the first embodiment, and the spatial light modulation device 3 from the rear side. A backlight unit 101 that irradiates illumination light, and a transparent protective plate 103 provided via a spacer 102 so as to protect the rotating plate 12 and the optical filter 13 of the spatial light modulator 3 are provided.

  The backlight unit 101 can be configured similarly to the backlight unit of the LCD, and can be configured using, for example, an LED array. In the present embodiment, the backlight unit 101 emits light in the three wavelength bands ΔλR, ΔλG, and ΔλB described above.

  According to the present embodiment, since the spatial light modulation device 3 using the optical filter 13 is used, it is possible to obtain a direct view display device in which the light use efficiency is significantly improved as compared with the LCD.

  In this embodiment, instead of the spatial light modulator 3, the spatial light modulator 52 employed in the second embodiment or the spatial light employed in the third embodiment. A modulation device may be used.

  Although the present embodiment is configured as a transmissive display device, if the spatial light modulation device 3 is configured as a reflective type, it can also be configured as a reflective direct-view type display device. In this case, the backlight unit 101 is not necessary.

  Although the embodiments of the present invention have been described above, the present invention is not limited to these embodiments.

  For example, the spatial light modulation device according to the present invention may be used for applications other than projection display devices and direct view display devices.

  In the spatial light modulation device employed in each of the above embodiments, each unit element is arranged two-dimensionally, but may be arranged one-dimensionally depending on the application.

  The spatial light modulation device employed in each of the above embodiments is configured as a transmissive type, but may be configured as a reflective type. When a reflection type configuration is employed, a reflection type optical filter may be employed instead of the transmission type optical filter 13 in each element. At this time, if incident light is incident not from the substrate 11 side but from the optical filter side, the substrate 11 and the like need not be made of a transparent material. In this case, if a silicon substrate or the like is used as the substrate 11, a drive circuit can be easily formed. In this case, since no light enters the microlens 11a, it is not necessary to form the microlens 11a.

1 is a schematic configuration diagram illustrating a projection display device according to a first embodiment of the present invention. FIG. 2 is a schematic plan view schematically showing the spatial light modulation device in FIG. 1. FIG. 3 is a schematic plan view schematically showing two adjacent unit elements in FIG. 2. FIG. 4 is a schematic cross-sectional view along the line A-A ′ in FIG. 3. FIG. 4 is a schematic sectional view taken along line B-B ′ in FIG. 3. It is a schematic sectional drawing which shows each process of the manufacturing method of the spatial light modulation device in FIG. 1 typically, respectively. It is a schematic sectional drawing which shows each process following the process shown in FIG. It is a schematic sectional drawing which shows each process following the process shown in FIG. It is a figure which shows typically the characteristic of the spatial light modulation apparatus in FIG. It is a figure which shows the characteristic of the optical filter for incident light creation used for simulation. It is a figure which shows an example of a simulation result. It is another figure which shows an example of a simulation result. It is a figure which shows typically the characteristic of the optical filter in a modification. It is a schematic plan view which shows typically two adjacent unit elements of the spatial light modulation apparatus used with the projection type display apparatus by the 2nd Embodiment of this invention. FIG. 15 is a schematic cross-sectional view taken along line C-C ′ in FIG. 14. It is a schematic sectional drawing which shows typically each process of the manufacturing method of the spatial light modulation device used with the projection type display apparatus by the 2nd Embodiment of this invention. It is a schematic sectional drawing which shows each process following the process shown in FIG. It is a schematic sectional drawing which shows each process following the process shown in FIG. It is a figure which shows typically the characteristic of the optical filter of the element for B light of the spatial light modulation apparatus used with the projection type display apparatus by the 3rd Embodiment of this invention. It is a figure which shows typically the characteristic of the optical filter of the element for G lights of the spatial light modulation apparatus used with the projection type display apparatus by the 3rd Embodiment of this invention. It is a figure which shows typically the characteristic of the optical filter of the element for R light of the spatial light modulation apparatus used with the projection type display apparatus by the 3rd Embodiment of this invention. It is a figure which shows typically the characteristic of the optical filter of the element for G lights in a modification. It is a partially cutaway schematic side view schematically showing a direct-view display device according to a fourth embodiment of the invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light source 3,52 Spatial light modulator 4 Projection lens 10,60 Element 11 Substrate 11a Micro lens 12 Rotating plate 13 Optical filter 15 Torsion hinge 62 Movable plate

Claims (18)

A spatial light modulator that receives incident light and modulates the incident light according to an input signal,
There are a plurality of microactuators having movable parts that can change the posture with respect to the angle with respect to the substrate, and the movable parts of the plurality of microactuators are arranged one-dimensionally or two-dimensionally on one surface side of the substrate. Microactuator array
A transmission type or reflection type optical filter provided in the movable part of each microactuator and having a wavelength selection characteristic, wherein the wavelength selection characteristic changes according to an incident angle of incident light with respect to the optical filter; ,
A control unit for controlling the attitude of the movable part of each microactuator in response to the input signal;
A spatial light modulation device comprising:   2. The spatial light modulation device according to claim 1, wherein each of the optical filters has a bandpass characteristic having one or more passing wavelength bands as the wavelength selection characteristic.   The control unit is configured to cause the optical filter of the microactuator to pass light of at least a part of a predetermined wavelength region in the incident light in accordance with the input signal with respect to each microactuator. And the posture of the movable portion of the microactuator is controlled so as to be selected from the second state in which the light in the predetermined wavelength region of the incident light is not substantially passed. The spatial light modulation device according to claim 1, wherein   The spatial light modulator according to claim 3, wherein the predetermined wavelength region is a visible region.   For each of the microactuators, the control unit may include the optical of the microactuator indicated by the input signal that indicates a ratio between the integration time of the first state and the integration time of the second state of the microactuator in a predetermined cycle. 5. The spatial light modulation device according to claim 3, wherein the attitude of the movable portion of each microactuator is controlled so as to be set according to a gradation of light to pass through the filter.   6. The light that each optical filter transmits in the first state within the predetermined wavelength region of the incident light is light having substantially the same wavelength component. The spatial light modulation device according to any one of the above.   The light that each optical filter passes in the first state within the predetermined wavelength region of the incident light is light in a wavelength band of any one color of red, green, and blue, 7. The light of any two of the red, green, and blue color bands, or light of all the red, green, and blue wavelength bands. Spatial light modulator.   8. The spatial light modulator according to claim 6, wherein the optical filters have substantially the same wavelength selection characteristics when the incident angles of incident light to the optical filters are the same. The light in the predetermined wavelength region of the incident light consists of light of a plurality of discrete wavelength bands,
Each of the optical filters has a bandpass characteristic having a plurality of discrete pass wavelength bands as the wavelength selection characteristic,
With respect to each of the optical filters, the plurality of pass wavelength bands of the optical filter so that the light of the plurality of wavelength bands of the incident light overlaps with the plurality of pass wavelength bands of the optical filter in the first state, respectively. The spatial light modulation device according to claim 6, wherein: is set.   The light of the plurality of discrete wavelength bands constituting the incident light is light of a red wavelength band, light of a green wavelength band, and light of a blue wavelength band. Spatial light modulator. Each optical filter is divided into a plurality of groups,
Lights that the optical filters of the same group pass in the first state within the predetermined wavelength region of the incident light are light having substantially the same wavelength components,
4. The light that the optical filters of different groups pass in the first state within the predetermined wavelength region of the incident light are light having substantially different wavelength components. The spatial light modulation device according to any one of 5. The optical filters of the same group have substantially the same wavelength selection characteristics as each other when the incident angles of incident light to the optical filters are the same,
12. The spatial light modulator according to claim 11, wherein the optical filters of different groups have wavelength selection characteristics that are substantially different from each other when the incident angles of incident light with respect to the optical filters are the same. The optical filters are divided into first to third groups,
The light that the optical filter of the first group passes in the first state within the predetermined wavelength region of the incident light is light in a red wavelength band,
The light that the optical filter of the second group passes in the first state within the predetermined wavelength region of the incident light is light in a green wavelength band,
The light that the optical filter of the third group passes in the first state within the predetermined wavelength region of the incident light is light in a blue wavelength band. The spatial light modulation device described. The movable portion of at least one microactuator of the plurality of microactuators includes a rotating portion that is supported by a torsion hinge so as to be rotatable about a predetermined rotation axis with respect to the substrate,
The spatial light modulation according to any one of claims 1 to 13, wherein the at least one microactuator has a biasing force applying unit that can apply a biasing force in at least one rotation direction to the rotating unit. apparatus.   The movable part of at least one microactuator of the plurality of microactuators has a cantilever structure, and the movable part is provided so as to generate a return force for returning to a predetermined posture. The spatial light modulation device according to claim 1, further comprising a driving force generator that can generate a driving force against the restoring force. Each optical filter is a transmissive optical filter,
The substrate is transparent to light of a wavelength component that the optical filters in the predetermined wavelength region of the incident light pass through,
Light of a wavelength component that passes through each optical filter in the predetermined wavelength region of the incident light passes through the substrate and then enters the optical filter, or the predetermined wavelength of the incident light 16. The spatial light modulation device according to claim 1, wherein light having a wavelength component that is transmitted by each optical filter in a region is transmitted through the substrate after being transmitted through the optical filter. After the light of the wavelength component that the optical filters in the predetermined wavelength region of the incident light pass through the substrate, the light enters the optical filters,
17. The spatial light modulation device according to claim 16, wherein a microlens for condensing the incident light on the optical filter is formed on the incident side of the incident light on the substrate.   A projection-type or direct-view type display device comprising the spatial light modulation device according to claim 1.

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