WO2011080883A1

WO2011080883A1 - Electro-mechanical converter, spatial optical modulator, exposure device, and methods for manufacturing them

Info

Publication number: WO2011080883A1
Application number: PCT/JP2010/007236
Authority: WO
Inventors: 美彦鈴木; 浩小西; 純児鈴木
Original assignee: 株式会社ニコン
Priority date: 2009-12-28
Filing date: 2010-12-13
Publication date: 2011-07-07

Abstract

Disclosed is an electro-mechanical converter provided with a board having an electrode, a board-side torsional shaft part having one end secured to the board and elastically deformed, a movable part supported by the other end of the board-side torsional shaft part and swingable with respect to the board when the movable part is attracted to the electrode by an electrostatic force, and a structure member having a surface crossing a surface of the movable part, so provided as to be integrated with the movable part, and resistant against the flectional stress applied to the movable part. The torsional shaft part of the electro-mechanical converter can be integrated with the movable part. The electro-mechanical converter can be further provided with a frame body supported by the other end of the torsional shaft part and swingable with respect to the board when the frame body is attracted to the electrode on the board by an electrostatic force and a frame-side torsional shaft part having one end secured to the frame body and the other end supporting the movable part. The movable part can be swingable with respect to the frame body.

Description

Electromechanical converter, spatial light modulator, exposure apparatus, and manufacturing method thereof

The present invention relates to an electromechanical converter, a spatial light modulator, an exposure apparatus, and manufacturing methods thereof.

There is a spatial light modulator including an electromechanical transducer that drives a mirror manufactured by lithography technology and supported by a torsion hinge by electrostatic force (see Patent Document 1).
[Prior art documents]
[Patent Literature]
[Patent Document 1] Japanese Patent Application Laid-Open No. 09-101467

The electromechanical transducer and the spatial light modulator formed by the lithography technique are easily affected by residual stress relaxation or the like because the member is formed of a thin thin film. For this reason, it is difficult to stabilize the characteristics over a long period of time.

In order to solve the above problems, as a first aspect of the present invention, a substrate having electrodes, a substrate-side torsion shaft portion that is elastically deformed with one end fixed to the substrate, and a substrate-side torsion shaft portion Bending stress on the movable part, which is supported by the other end and is arranged integrally with the movable part, having a movable part that is attracted to the electrode by electrostatic force and swings relative to the substrate, and a surface that intersects one surface of the movable part. An electromechanical transducer with a structural material that counteracts the above is provided.

Also, as a second aspect of the present invention, there is provided a spatial light modulator including the electromechanical converter and a reflecting mirror supported by the movable part and swinging with respect to the substrate together with the movable part.

Furthermore, as a third aspect of the present invention, a spatial light modulator including a substrate and a reflecting mirror that swings relative to the substrate, the reflecting mirror including a reflecting surface and a surface that intersects the reflecting surface. A spatial light modulator is provided having a structural material disposed on the back surface of the reflecting surface and resisting bending stress on the reflecting surface.

Still further, as a fourth aspect of the present invention, a substrate having electrodes, a substrate-side torsion shaft portion that is elastically deformed with one end fixed to the substrate, and being supported by the other end of the torsion shaft portion A frame body that is attracted to an electrode by an electrostatic force and swings with respect to the substrate, a frame-side torsion shaft portion that is elastically deformed with one end fixed to the frame body, and a frame-side torsion shaft portion Spatial light modulation comprising a movable part that is supported by the end and is attracted to the electrode by an electrostatic force and swings with respect to the frame, and a reflecting mirror that is supported by the movable part and swings with respect to the substrate together with the movable part A vessel is provided.

Still further, as a fifth aspect of the present invention, there is provided an exposure apparatus including any one of the spatial light modulators.

Furthermore, as a sixth aspect of the present invention, a substrate having electrodes, a substrate-side torsion shaft portion that is elastically deformed by fixing one end to the substrate, and supported at the other end of the substrate-side torsion shaft portion A structure that has a movable portion that is attracted to an electrode by an electrostatic force and swings with respect to the substrate, and a surface that intersects one surface of the movable portion, is arranged integrally with the movable portion, and resists bending stress on the movable portion A method of manufacturing an electromechanical transducer comprising a material, the step of forming a patterned sacrificial material layer on a base, and a layer of a material to be a movable part on the sacrificial material layer A manufacturing method is provided that includes depositing and removing a layer of sacrificial material and forming a movable part having a region spaced from the substrate.

Furthermore, as a seventh aspect of the present invention, a substrate and a reflecting mirror that swings relative to the substrate are provided, and the reflecting mirror is disposed on the back surface of the reflecting surface including the reflecting surface and a surface that intersects the reflecting surface. A method of manufacturing a spatial light modulator having a structural material that resists bending stress on a reflective surface, the method comprising: forming a patterned sacrificial material layer on a base; and And a step of depositing a layer of a non-reflective film material to be a structural material and a step of removing a layer of a sacrificial material, the manufacturing method including a step of forming a region in which the layer of the non-reflective film material is separated from the base Provided.

Furthermore, as an eighth aspect of the present invention, a substrate having electrodes, a substrate-side torsion shaft portion that is elastically deformed with one end fixed to the substrate, and being supported by the other end of the torsion shaft portion A frame body that is attracted to an electrode by an electrostatic force and swings with respect to the substrate, a frame-side torsion shaft portion that is elastically deformed with one end fixed to the frame body, and a frame-side torsion shaft portion Spatial light modulation comprising a movable part that is supported by the end and is attracted to the electrode by an electrostatic force and swings with respect to the frame, and a reflecting mirror that is supported by the movable part and swings with respect to the substrate together with the movable part A method of manufacturing a vessel, comprising: forming a patterned sacrificial material layer on a base; depositing a frame material layer on the sacrificial material layer; And a step of forming a frame having a region spaced from the base. Manufacturing method is provided.

The above summary of the invention does not enumerate all the necessary features of the present invention. Further, a sub-combination of these feature groups can be an invention.

1 is a schematic perspective view showing an external appearance of a spatial light modulator 100. FIG. 3 is an exploded perspective view of a unit element 200. FIG. 3 is a cross-sectional view of a unit element 200. FIG. 3 is a cross-sectional view of a unit element 200. FIG. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. FIG. 11 is a cross-sectional view showing the process of manufacturing the spatial light modulator 100. 3 is an exploded perspective view of a unit element 200. FIG. 3 is a cross-sectional view of a unit element 200. FIG. 3 is a cross-sectional view of a unit element 200. FIG. 1 is a perspective view of a spatial light modulator 100. FIG. 2 is a schematic diagram of an exposure apparatus 400. FIG. FIG. 5 is a view showing the operation of the spatial light modulator 100 in the exposure apparatus 400. 3 is a cross-sectional view of a unit element 200. FIG. 3 is a perspective view of a drive unit 220. FIG. 3 is a cross-sectional view of a unit element 200. FIG. 3 is a perspective view of a reflecting mirror 230. FIG. 3 is a perspective view of a reflecting mirror 230. FIG. 4 is a cross-sectional view of a reflecting mirror 230. FIG. 3 is a perspective view of a reflecting mirror 230. FIG. 5 is a cross-sectional view showing a manufacturing process of the reflecting mirror 230. FIG. 5 is a cross-sectional view showing a manufacturing process of the reflecting mirror 230. FIG. 4 is a cross-sectional view of a reflecting mirror 230. FIG. 3 is a perspective view of a reflecting mirror 230. FIG. 5 is a cross-sectional view showing a manufacturing process of the reflecting mirror 230. FIG. 5 is a cross-sectional view showing a manufacturing process of the reflecting mirror 230. FIG. 4 is a cross-sectional view of a reflecting mirror 230. FIG.

Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention.

FIG. 1 is a schematic perspective view showing the appearance of the spatial light modulator 100. FIG. The spatial light modulator 100 includes a substrate 210 and a reflecting mirror 230.

The plurality of reflecting mirrors 230 that are two-dimensionally arranged on the substrate 210 and form a matrix have dimensions of about several μm to several hundreds of μm, and can be individually swung with respect to the substrate 210. . Therefore, if the light is reflected with some of the reflecting mirrors 230 swinging and tilting as shown in the drawing, the illuminance distribution of the reflected light changes. Therefore, an arbitrary illuminance distribution can be formed by controlling the swing of the reflecting mirror 230.

FIG. 2 is a schematic exploded perspective view of the unit element 200. The unit element 200 is a structure related to one reflecting mirror 230. In the spatial light modulator 100, each of the plurality of reflecting mirrors 230 is supported by the same structure.

The unit element 200 includes a driving unit 220 mounted on the substrate 210 and a reflecting mirror 230 mounted on the driving unit 220. Further,

electrodes

212, 214, and 216 are disposed on the surface of the substrate 210.

The driving unit 220 includes a fixed frame 222 and a movable unit 226. The fixed frame 222 is formed of a hollow member having an open upper surface, and forms a rectangular frame that surrounds the outer periphery of the unit element 200. The fixed frame 222 is fixed on the electrode 216 on the substrate 210. As shown in FIG. 1, in the spatial light modulator 100, a large number of unit elements 200 are arranged. However, the electrode 216 is connected to a common potential, for example, a ground potential, and the reference potential of the spatial light modulator 100 as a whole. Make common.

When the fixed frame 222 is fixed to the substrate 210, the pair of

electrodes

212 and 214 on the substrate 210 are positioned in the vicinity of the edge of the movable portion 226, as indicated by a dotted line in the drawing. Therefore, the lower surface of the movable part 226 and the

electrodes

212 and 214 face each other.

The movable portion 226 is supported on the inner side of the fixed frame 222 from the inner surface of the fixed frame 222 via the torsion shaft portion 224. One end of the torsion shaft portion 224 is fixed to the inner surface of the fixed frame 222.

The other end of the torsion shaft portion 224 is fixed to a rib 225 that extends downward from the peripheral edge of the movable portion 226. Since the torsion shaft portion 224 is elastically torsionally deformed, the movable portion 226 swings with respect to the substrate 210 using the torsion shaft portion 224 as the swing shaft. However, since the rib 225 has a high bending rigidity, the movable portion 226 is not easily deformed.

In addition, there is a flange-like portion that spreads outward from the movable portion 226 at the lower end of the rib 225. This is a remaining region when the layer including the rib 225 is patterned, and may not be present. However, the rigidity of the movable part 226 is not lowered, but may be improved, so it may be left. As a result, it is possible to avoid remarkably increasing the patterning accuracy, which contributes to an improvement in productivity.

The reflecting mirror 230 has a reflecting surface 234 having a high reflectance on the upper surface. The reflective surface 234 is formed of a metal deposited as a thin film, such as an aluminum thin film. A post 232 protruding downward is disposed on the lower surface of the reflecting mirror 230.

The post 232 is fixed to the approximate center of the movable part 226 indicated by a dotted line in the drawing. Thereby, when the movable part 226 swings with respect to the substrate 210, the reflecting mirror 230 swings together with the movable part 226.

As described above, since the drive unit 220 and the reflecting mirror 230 can be individually formed, a structure and material suitable for each function can be selected. In addition, since the reflection surface 234 having an area larger than the area of the drive unit 220 can be formed, the unit element 200 having high reflection efficiency can be formed.

FIG. 3 is a schematic cross-sectional view of the unit element 200. The unit element 200 shows the AA cross section shown in FIG. 2 with the fixed frame 222 fixed to the substrate 210 and the reflecting mirror 230 fixed to the movable portion 226. Elements that are the same as those in FIG. 2 are given the same reference numerals, and redundant descriptions are omitted.

As shown in the figure, the movable part 226 has an electrode 228 on the lower surface. The electrode 228 faces the electrode 212 on the substrate 210.

Also, the movable part 226 has a rib 225 extending downward from the edge. Thereby, the movable part 226 has high bending rigidity. On the other hand, the torsion shaft portion 224 does not have an element corresponding to the rib 225. Therefore, when a driving force described later is applied to the movable portion 226, the torsion shaft portion 224 is elastically deformed, and the movable portion 226 is displaced without being deformed.

FIG. 4 is a schematic cross-sectional view of the unit element 200, showing the BB cross section shown in FIG. 2 and 3 are denoted by the same reference numerals, and redundant description is omitted.

As shown in the figure, each of the pair of

electrodes

212 and 214 on the substrate 210 faces the vicinity of the end of the movable portion 226. Therefore, when a driving voltage is applied to either of the

electrodes

212 and 214, an electrostatic force acts on either end of the electrode 228.

Thus, the movable portion 226 is coupled to the fixed frame 222 by the torsion shaft portion 224. Therefore, when an electrostatic force acts on the electrode 228 from either of the

electrodes

212 and 214, the movable portion 226 swings with the torsion shaft portion 224 as the swing shaft. Therefore, the reflecting mirror 230 fixed with respect to the movable part 226 also swings.

In the illustrated example, a driving voltage is applied to the electrode 214, and the right side of the electrode 228 in the drawing is attracted toward the substrate 210. Thereby, the reflecting surface 234 of the reflecting mirror 230 is inclined rightward.

Referring to FIG. 1 again, each of the plurality of reflecting mirrors 230 can be individually controlled by individually supplying or blocking driving power to the above-described structure provided in each of the reflecting mirrors 230. Therefore, an arbitrary irradiation pattern can be formed by once reflecting the light to the spatial light modulator 100, and can be used as a variable light source, an exposure device, an image display device, an optical switch, or the like.

5 to 26 are cross-sectional views showing a manufacturing process of the spatial light modulator 100 shown in FIGS. 5 to 26 show the manufacturing process, the corresponding elements of the spatial light modulator 100 may be included in different shapes or states. Therefore, after assigning unique reference numbers to these drawings to explain the contents of each drawing, FIG. 26 shows the correspondence with the spatial light modulator 100 shown in FIGS.

As shown in FIG. 5, a lower insulating layer 312 is deposited immediately above the surface of the substrate 210 on which the spatial light modulator 100 is formed. As a result, the surface of the substrate 210 is covered with the insulating layer 312.

As the material of the substrate 210, members having a flat surface such as a compound semiconductor substrate and a ceramic substrate can be widely used in addition to a silicon single crystal substrate. As a material of the insulating layer 312, for example, an oxide or a nitride of the material of the substrate 210 can be used. The insulating layer 312 may be a porous body having a high dielectric constant. A method for forming the insulating layer 312 can be appropriately selected from various physical vapor deposition methods and chemical vapor deposition methods depending on the material of the insulating layer 312.

Next, a patterned conductor layer 320 is formed on the insulating layer 312 as shown in FIG. The conductor layer 320 becomes the

electrodes

212, 214, and 216 in the spatial light modulator 100. Examples of the material of the conductor layer 320 include metals such as aluminum and copper. A method for forming the conductor layer 320 can be appropriately selected from various physical vapor deposition methods, chemical vapor deposition methods, plating methods, and the like depending on the material of the conductor layer 320.

Next, as shown in FIG. 7, the surface of the conductor layer 320 and the surface of the lower insulating layer 312 exposed in the gap between the patterns of the conductor layer 320 are covered with the upper insulating layer 314. At this time, the surface of the upper insulating layer 314 is undulated depending on whether or not the conductor layer 320 is present under the upper insulating layer 314.

Next, as shown in FIG. 8, the undulations formed on the surface of the upper insulating layer 314 are planarized by the resist layer 332. Thereby, the process demonstrated below can be performed on a flat base | substrate. The resist layer 332 can be applied by a spin coating method, a spray coating method, or the like as appropriate.

Next, as shown in FIG. 9, a non-reflective film formation base to be described later is formed. The film formation base is composed of two layers, and in the stage shown in FIG. 9, a lower resist layer 334 is formed on the planarized insulating layer 314. The resist layer 334 is patterned by sequentially performing application of a resist material, pre-baking, exposure, development, and post-baking to form two pairs of side walls 335.

Next, as shown in FIG. 10, an upper resist layer 336 is formed on the lower resist layer 334. The resist layer 336 is also patterned to form side walls 337 above the side walls 335 of the lower resist layer 334, and two additional pairs of side walls 339. Thus, when viewed from the surface of the upper resist layer 336, shallow side walls 339 and

deep side walls

337 and 335 are formed.

These lower and upper resist

layers

334 and 336 can be patterned by photolithography. That is, the resist

layers

334 and 336 are formed of a photosensitive material and exposed in a pattern according to the design specifications, so that the resist

layers

334 and 336 can be formed into a shape as required. Further, the resist

layers

334 and 336 may be processed and patterned by a dry etching method such as plasma etching.

However, patterning by photolithography is planar, and it is difficult to form a three-dimensional underlayer for the purpose of forming a three-dimensional structure such as the

side walls

335, 337, and 339. Therefore, as shown in FIGS. 9 and 10, a three-dimensional film formation base can be formed by using a plurality of resist

layers

334 and 336.

Next, as shown in FIG. 11, a non-conductive layer 342 is deposited on the film formation base formed by the insulating layer 314 and the resist

layers

334 and 336. The formed non-conductive layer 342 has a three-dimensional shape following the shape of the resist

layers

334 and 336. Thus, the thin film structure including the formed non-conductive layer 342 has a high moment of inertia in cross section.

As the material for the non-conductor layer 342, various oxides and nitrides can be used. Further, the method for forming the non-conductor layer 342 can be appropriately selected from various physical vapor deposition methods and chemical vapor deposition methods depending on the material of the non-conductor layer 342.

Next, as shown in FIG. 12, the inner bottom portions of the

side walls

335 and 337 of the resist

layers

334 and 336 are removed, and contact holes 315 reaching the conductor layer 320 are formed. The contact hole 315 can be formed by dry etching, for example.

Next, as shown in FIG. 13, a patterned conductor layer 344 is formed on the non-conductor layer 342. Thus, the conductor layer 344 includes a pair of columnar structures that reach the upper ends of the

side walls

335 and 337 from the inside of the contact hole 315 and a flat region formed on the land of the resist layer 336 sandwiched between the side walls 339. Remain as. The structure of the conductor layer 344 formed inside the

side walls

335 and 337 is electrically coupled to any land of the conductor layer 320.

Next, as shown in FIG. 14, a conductor layer 346 covering the entire surfaces of the non-conductor layer 342 and the conductor layer 344 is formed. As a result, the patterned conductor layer 344 is electrically coupled by the current conductor layer 346. The material of the conductor layer 346 may be the same as or different from the material of the conductor layer 344.

Next, as shown in FIG. 15, an upper non-conductive layer 348 covering the entire surface of the conductive layer 346 is formed. The upper non-conductive layer 348 is formed of the same material as the non-conductive layer 342 located below the

conductive layers

344 and 346. The film formation method can also be performed by the same method as that for the lower non-conductor layer 342.

Thereby, a non-reflective film 340 having a three-layer structure is formed by the lower non-conductor layer 342, the conductor layers 344 and 346, and the upper non-conductor layer 348 having the same pattern and shape. In addition, since

non-conductive layers

342 and 348 that are not suitable for the material of the reflective film appear on the surface of the non-reflective film 340, the entire three-layer structure is called the non-reflective film 340. However, it is only described as a non-reflective film 340 for the purpose of distinguishing it from a reflective film described later.

Here, since the non-reflective film 340 has the

non-conductor layers

342 and 348 formed of the same material on the front and back, the bimetal effect generated between the conductor layers 344 and 346 and the

non-conductor layers

342 and 348 is canceled by the temperature change. It is. Thereby, the shape of the non-reflective film 340 is stabilized. Further, since the non-reflective film 340 as a whole is formed using the same material as that of the reflective film described later, there is no difference in thermal expansion coefficient from the reflective film.

Next, as shown in FIG. 16, a part of the non-reflective film 340 is removed, and the outer shape of the driving unit 220 is formed. Thereby, the resist layer 334 located under the non-reflective film 340 is exposed at both ends of the non-reflective film 340. The non-reflective film 340 can be patterned by dry etching.

Next, as shown in FIG. 17, the upper surface of the non-reflective film 340, that is, the surface of the non-conductive layer 348 is planarized with a resist layer 352. Thereby, the process described below can be executed again on the flat base. The resist layer 332 can be applied by a spin coating method, a spray coating method, or the like as appropriate.

Next, a film formation base is generated again using a two-layer resist. That is, first, as shown in FIG. 18, the lower resist layer 354 of the two-layer structure is formed on the surfaces of the flattened resist layer 352 and non-conductive layer 348. Further, the resist layer 354 is patterned to form a side wall 353 at substantially the center.

Next, as shown in FIG. 19, the upper resist layer 356 of the two-layer structure is formed on the lower resist layer 354. The upper resist layer 356 is also patterned, and has a side wall 355 formed above the side wall 353 of the lower resist layer 354 and side walls 357 formed near both side ends. Thus, a three-dimensional film formation base is formed by the resist

layers

354 and 356.

Next, as shown in FIG. 20, a reflection film material layer 362 is formed on the entire surface of the resist

layers

354 and 356. At this time, the reflective film material layer 362 is bonded to the surface of the non-reflective film 340 inside the side wall 353.

Examples of the reflective film material used for forming the reflective film material layer 362 include metal materials such as aluminum. Further, as the reflective film material, the same material as the conductor layers 344 and 346 of the non-reflective film 340 may be used. The method for forming the reflective film material layer 362 can be appropriately selected from various physical vapor deposition methods and chemical vapor deposition methods depending on the material of the reflective film material layer 362.

Next, as shown in FIG. 21, a non-reflective film material layer 364 is deposited on the entire surface of the reflective film material layer 362. As the non-reflective film material for forming the non-reflective film material layer 364, the same material as the

non-conductive layers

342 and 348 of the non-reflective film 340 may be used. The formation method of the non-reflective film material layer 364 can be appropriately selected from various physical vapor deposition methods and chemical vapor deposition methods depending on the material of the non-reflective film material layer 364.

Next, as shown in FIG. 22, a part of the reflective film material layer 362 and the non-reflective film material layer 364 is removed to form an outer shape of the reflective mirror 230. As a result, the resist layer 354 located under the reflective film material layer 362 is exposed at both ends of the reflective film material layer 362 and the non-reflective film material layer 364. The reflective film material layer 362 and the non-reflective film material layer 364 can be patterned by dry etching.

Next, as shown in FIG. 23, a reflective film material layer 366 is deposited on the surface of the non-reflective film material layer 364 and the exposed surface of the resist layer 354. In the three-layer structure formed by the lower reflective film material layer 362, the non-reflective film material layer 364, and the upper reflective film material layer 366 thus formed, as in the case of the non-reflective film 340, the reflective film material The bimetallic effect that occurs between the

layers

362, 366 and the non-reflective film material layer 364 is counteracted. Therefore, the shape is stabilized against the action of internal stress caused by temperature change.

The reflective film material layer 366 finally becomes a surface that reflects incident light in the spatial light modulator 100. Therefore, prior to the formation of the reflective film material layer 366, the surface of the non-reflective film material layer 364 serving as the base may be mirror-polished by chemical mechanical polishing. Further, the surface of the reflective film material layer 366 itself may be mirror-polished by chemical mechanical polishing. Further, both the non-reflective film material layer 364 and the reflective film material layer 366 may be subjected to chemical mechanical polishing.

Next, as shown in FIG. 24, a protective layer 368 is formed on the surface of the reflective film material layer 366. That is, when a metal layer such as Al is formed as the reflective film material layer 366, the surface thereof reacts with oxygen in the atmosphere and changes in diameter. As a result, the characteristics of the spatial light modulator 100 also change. However, the reaction between the reflective film material layer 366 and the atmosphere can be prevented or suppressed by covering the surface of the reflective film material layer 366 with a dense protective film.

Examples of the material of the protective layer 368 include a thin film of an inorganic material such as alumina. Needless to say, the protective layer 368 should be transparent to the light reflected by the reflective film material layer 366, and is formed to a thickness that allows the light to pass therethrough. Thus, the reflective film 360 in which the reflective film material layers 362 and 366, the non-reflective film material layer 364, and the protective layer 368 are stacked is formed.

Next, as shown in FIG. 25, a part of the reflection film 360 is removed, and the outer shape of the reflection mirror 230 is formed. As a result, the resist layer 354 located under the reflective film material layer 362 is exposed at both ends of the reflective film 360. The reflective film material layer 362 and the non-reflective film material layer 364 can be patterned by dry etching.

Next, as shown in FIG. 26, the resist

layers

332, 334, and 336 that are the formation base of the non-reflective film 340 and the resist

layers

352, 354, and 356 that are the formation base of the reflective film 360 are removed. To do. Here, the surface of the resist layer 354 is exposed at both ends of the reflective film 360. Since the resist layer 356 inside the reflective film 360 is laminated on the resist layer 354, both are continuous.

Also, since the resist layer 354 is laminated on the resist layer 352, both are continuous. The resist layer 352 and the resist

layers

334 and 332 are continuous at both ends of the non-reflective film 340. Furthermore, since the resist layer 336 located inside the non-reflective film 340 is laminated on the resist layer 334, both are continuous.

Thus, since all the resist

layers

332, 334, 336, 352, 354, and 356 are continuous, they can be removed from the state shown in FIG. Therefore, it is not necessary to provide an etching hole for removing the resist in the reflective film 360 that forms the reflective surface 234. Thereby, the reflective efficiency of the reflective surface 234 can be improved.

The removal of the resist

layers

332, 334, 336, 352, 354, and 356 may be a wet process using a dissolving material. Further, it may be a dry process by ashing using plasma. Further, the resist

layers

332, 334, 336, 352, 354, and 356 are merely examples of layers of sacrificial materials, and a similar process can be performed using other sacrificial materials.

Thus, the spatial light modulator 100 having the same structure as the spatial light modulator 100 shown in FIGS. 1 to 4 can be manufactured by lithography technology. Since the fine unit element 200 can be formed by the lithography technique, the spatial light modulator 100 with high resolution can be manufactured.

As a combination of materials of each layer, for example, the conductor layers 320, 344, and 346 and the reflective film material layers 362 and 366 are protected by aluminum, and the

non-conductive layers

342 and 348 and the non-reflective film material layer 364 are protected by silicon nitride. Layer 368 can be alumina. However, the material of each part is not limited to the above, and can be appropriately selected from, for example, SiOx, SiNx, Al, Cr, Al alloy.

In the unit element 200 shown in FIG. 26, the conductor layer 320 on the substrate 210 corresponds to one of the

electrodes

212, 214, and 216. The central part of the non-reflective film 340 corresponds to the movable part 226. Further, the conductor layer 344 located on the lower surface of the portion corresponding to the movable portion 226 corresponds to the electrode 228. Furthermore, the portion located on the lateral outer side of the portion corresponding to the movable portion 226 corresponds to the pair of torsion shaft portions 224. Further, the outside of the portion corresponding to the twisted shaft portion 224 corresponds to the fixed frame 222.

Note that both side ends of the non-reflective film 340 extend horizontally further to the outside than the portion to be the fixed frame 222. This portion forms a light blocking portion 341 that blocks light that is inserted toward the substrate 210 from the gap between the adjacent unit elements 200. This prevents the temperature of the substrate 210 in the spatial light modulator 100 from rising due to the irradiation light. In addition, the CMOS element on the substrate 210 is prevented from being deteriorated by the incident light.

Further, in the unit element 200 shown in FIG. 26, the reflection film 360 corresponds to the reflection mirror 230 in the spatial light modulator 100. Here, the lower surface of the depressed portion 361 formed in the central portion of the reflective film 360 corresponds to the post 232 of the reflective mirror 230. Further, the upper surface of the reflective film 360 corresponds to the reflective surface 234.

FIG. 27 is a schematic exploded perspective view of a unit element 200 having another structure. The unit element 200 has the same structure as that of the unit element 200 shown in FIG. 2 except for portions described below. Therefore, the same elements as those in FIG.

The unit element 200 includes a driving unit 220 and a reflecting mirror 230 that are arranged on the substrate 210. The reflecting mirror 230 has the same shape as the unit element 200 shown in FIG. On the other hand, in addition to the

electrodes

212, 214, and 216, another pair of

electrodes

213 and 215 is disposed on the surface of the substrate 210.

The driving unit 220 further includes a movable frame 227 arranged so as to be concentric between the fixed frame 222 and the movable unit 226. The movable frame 227 is supported from the fixed frame 222 via a pair of torsion shaft portions 223. Accordingly, the movable frame 227 swings with respect to the fixed frame 222 using the torsion shaft portion 223 as the swing shaft. The torsion shaft part 223 is orthogonal to the torsion shaft part 224.

One end of the torsion shaft portion 224 that supports the movable portion 226 is coupled to the inside of the movable frame 227. Accordingly, the movable portion 226 swings with respect to the movable frame 227 using the torsion shaft portion 224 as the swing shaft. Therefore, the movable portion 226 swings about two

torsion shaft portions

223 and 224 that are orthogonal to each other with respect to the fixed frame 222.

The movable frame 227 has ribs 229 extending downward from the outer and inner edges. Thereby, the movable frame 227 has high bending rigidity and torsional rigidity. Therefore, even when the movable frame 227 and the movable portion 226 are individually swung and the

torsion shaft portions

223 and 224 are elastically deformed, the movable frame 227 and the movable portion 226 are hardly deformed. Even when internal stress is applied due to relaxation of residual stress or the like, the movable frame 227 and the movable portion 226 are not easily deformed.

FIG. 28 is a schematic cross-sectional view of the unit element 200. The unit element 200 has a CC cross section shown in FIG. 27 in a state where the fixed frame 222 is fixed to the substrate 210 and the reflecting mirror 230 is fixed to the movable portion 226. Elements common to those in FIG. 27 are assigned the same reference numerals, and redundant description is omitted.

As shown in the figure, the movable frame 227 has an electrode 221 on the lower surface. The electrode 221 faces the

electrodes

213 and 215 on the substrate 210. Therefore, when a driving voltage is applied to the

electrodes

213 and 215, the left or right side of the movable frame 227 in the drawing is attracted toward the substrate 210.

Also, the movable frame 227 has a rib 229 extending downward from the edge. Thereby, the movable frame 227 has high bending rigidity. On the other hand, the torsion shaft portion 224 does not have an element corresponding to the rib 225. Therefore, when a driving force is applied to the movable portion 226 by the voltage applied to the

electrodes

212 and 214, the torsion shaft portion 224 is elastically deformed, and the movable portion 226 swings with respect to the movable frame 227.

It should be noted that there is a flange-like portion that spreads outward and inward of the movable frame 227 at the lower end of the rib 229. This is a remaining region when the layer including the rib 229 is patterned, and may be omitted. However, the rigidity of the movable frame 227 is not lowered, but may be improved, so it may be left. As a result, it is possible to avoid remarkably increasing the patterning accuracy, which contributes to an improvement in productivity.

FIG. 29 is a schematic cross-sectional view of the unit element 200, showing the DD cross section shown in FIG. Elements common to FIGS. 27 and 28 are given the same reference numerals, and redundant description is omitted.

As shown in the figure, the torsion shaft portion 223 that couples the fixed frame 222 and the movable frame 227 does not have an element corresponding to the rib 229. Therefore, when a drive voltage is applied to either of the

electrodes

213 and 215, the movable frame 227 swings with respect to the substrate 210 using the torsion shaft portion 223 as the swing axis.

FIG. 30 is a schematic perspective view showing the appearance of the spatial light modulator 100 including the unit element 200 as described above. Each of the plurality of reflecting mirrors 230 can be individually controlled by individually supplying or blocking driving power to the above-described structure provided in each of the reflecting mirrors 230. Each reflecting mirror 230 changes the propagation direction of reflected light to a wider range by a gimbal structure formed by the movable frame 227 and the

torsion shaft portions

223 and 224 of the driving unit 220.

FIG. 31 is a schematic diagram of the exposure apparatus 400. The exposure apparatus 400 includes the spatial light modulator 100 and can make illumination light having an arbitrary illuminance distribution incident on the illumination optical system 600 when executing the light source mask optimization method. That is, the exposure apparatus 400 includes an illumination light generator 500, an illumination optical system 600, and a projection optical system 700.

The illumination light generation unit 500 includes a control unit 510, a light source 520, a spatial light modulator 100, a prism 530, an imaging optical system 540, a beam splitter 550, and a measurement unit 560. The light source 520 generates illumination light L. The illumination light L generated by the light source 520 has an illuminance distribution according to the characteristics of the light emitting mechanism of the light source 520. For this reason, the illumination light L has the original image I ₁ in a cross section orthogonal to the optical path of the illumination light L.

The illumination light L emitted from the light source 520 enters the prism 530. The prism 530 guides the illumination light L to the spatial light modulator 100 and then emits the light again to the outside. The spatial light modulator 100 modulates the illumination light L incident under the control of the control unit 510. The structure and operation of the spatial light modulator 100 are as described above.

The illumination light L emitted from the prism 530 via the spatial light modulator 100 is incident on the illumination optical system 600 at the subsequent stage via the imaging optical system 540. The imaging optical system 540 forms an illumination light image I ₃ on the incident surface 612 of the illumination optical system 600.

The beam splitter 550 is disposed on the optical path of the illumination light L between the imaging optical system 540 and the illumination optical system. The beam splitter 550 separates a part of the illumination light L before entering the illumination optical system 600 and guides it to the measurement unit 560.

The measurement unit 560 measures an image of the illumination light L at a position optically conjugate with the incident surface 612 of the illumination optical system 600. Thereby, the measurement unit 560 measures the same image as the illumination light image I ₃ incident on the illumination optical system 600. Therefore, the control unit 510 refers to the illumination light image I ₃ which is measured by the measuring unit 560 can be feedback controlled spatial light modulator 100.

The illumination optical system 600 includes a fly-eye lens 610, a condenser optical system 620, a field stop 630, and an imaging optical system 640. A mask stage 720 holding a mask 710 is disposed at the exit end of the illumination optical system 600.

The fly-eye lens 610 includes a large number of lens elements arranged densely in parallel, and forms a secondary light source including illumination light images I ₃ as many as the number of lens elements on the rear focal plane. The condenser optical system 620 collects the illumination light L emitted from the fly-eye lens 610 and illuminates the field stop 630 in a superimposed manner.

The illumination light L that has passed through the field stop 630 forms an irradiation light image I ₄ that is an image of the opening of the field stop 630 on the pattern surface of the mask 710 by the imaging optical system 640. Thus, the illumination optical system 600, the pattern surface of the mask 710 disposed at its exit end, Koehler illuminated by illumination light image I _4.

Note that the illuminance distribution formed at the entrance end of the fly-eye lens 610, which is also the entrance surface 612 of the illumination optical system 600, is as high as the overall illuminance distribution of the entire secondary light source formed at the exit end of the fly-eye lens 610. Show correlation. Therefore, the illumination light image I ₃ that the illumination light generation unit 500 enters the illumination optical system 600 is also reflected in the illumination light image I ₄ that is the illuminance distribution of the illumination light L that the illumination optical system 600 irradiates the mask 710. .

Projection optical system 700 is disposed immediately after mask stage 720 and includes an aperture stop 730. The aperture stop 730 is disposed at a position optically conjugate with the exit end of the fly-eye lens 610 of the illumination optical system 600. A substrate stage 820 that holds a substrate 810 coated with a photosensitive material is disposed at the exit end of the projection optical system 700.

The mask 710 held on the mask stage 720 has a mask pattern composed of a region that reflects or transmits the illumination light L irradiated by the illumination optical system 600 and a region that absorbs it. Therefore, by irradiating the illumination light image I ₄ to the mask 710, the projection light image I ₅ is generated by the interaction between the mask pattern of the mask 710 and the illuminance distribution of the illumination light image I ₄ itself. The projected light image I ₅ is projected onto the photosensitive material of the substrate 810 to form a resist layer having the required pattern on the surface of the substrate 810.

In FIG. 31, the optical path of the illumination light L is drawn in a straight line, but the exposure apparatus 400 can be downsized by bending the optical path of the illumination light L. In FIG. 31, the illumination light L is drawn so as to pass through the mask 710, but a reflective mask 710 may be used.

FIG. 32 is a partially enlarged view of the illumination light generation unit 500 and shows the role of the spatial light modulator 100 in the exposure apparatus 400. The prism 530 has a pair of reflecting

surfaces

532 and 534. The illumination light L incident on the prism 530 is irradiated toward the spatial light modulator 100 by the one reflecting surface 532.

As already described, the spatial light modulator 100 has a plurality of reflecting mirrors 230 that can be individually swung. Therefore, the control unit 510 controls the spatial light modulator 100 can be formed of any light source image I ₂ corresponding to the request.

The light source image I ₂ emitted from the spatial light modulator 100 is reflected by the other reflecting surface 534 of the prism 530 and emitted from the right end surface of the prism 530 in the drawing. The light source image I ₂ emitted from the prism 530 forms an illumination light image I ₃ on the incident surface 612 of the illumination optical system 600 by the imaging optical system 540.

FIG. 33 is a schematic cross-sectional view of the unit element 200 and shows a modified example of the drive unit 220. Since it has the same structure as the unit element 200 shown in FIG. 29 except for the part described below, common elements are denoted by the same reference numerals and redundant description is omitted.

29, the torsion shaft portion 223 is coupled to the lower end of the rib 229 of the movable frame 227. In the unit element 200 shown in FIG. In contrast, in the example shown in FIG. 33, the torsion shaft portion 223 is coupled to the upper end of the rib 229. Further, the other end of the torsion shaft portion 223 is coupled to the upper end of the fixed frame 222.

FIG. 34 is a schematic perspective view of the drive unit 220, and shows the drive unit 220 shown in FIG. As shown in the figure, the torsion shaft portion 224 connecting the movable portion 226 and the movable frame 227 is also coupled to the upper ends of the

ribs

225 and 229 in the same manner as the torsion shaft portion 223 connecting the fixed frame 222 and the movable frame 227. Is done.

Thus, the swing axis when the movable frame 227 swings with respect to the fixed frame 222 and the swing axis when the movable portion 226 swings with respect to the movable frame 227 are relative to the reflecting mirror 230. , Both rise relatively. Therefore, the moment of inertia when the reflecting mirror 230 is swung is reduced, and the responsiveness as the spatial light modulator 100 can be improved.

The unit element 200 can be formed even if a reflective film is directly provided on the upper surface of the movable portion 226 indicated by oblique lines in the drawing. Thereby, although the reflection area is reduced as compared with the case where the individual reflecting mirror 230 is provided, the spatial light modulator 100 having a high response speed can be formed with a small number of man-hours.

FIG. 35 is a schematic cross-sectional view of the unit element 200 and shows an example in which the drive unit 220 is further deformed. Since it has the same structure as the unit element 200 shown in FIG. 29 except for the part described below, common elements are denoted by the same reference numerals and redundant description is omitted.

As shown in the figure, in this unit element 200, the connecting portion of the torsion shaft portion 223 is the upper end with respect to the fixed frame 222 and the lower end of the rib 229 with respect to the movable frame 227. Thereby, the movable frame 227 moves upward in the figure with respect to the fixed frame 222.

Further, although the illustration of the torsion shaft portion 224 is omitted, the torsion shaft portion 224 is coupled to the upper end of the rib 229 of the movable frame 227 and the lower end of the rib 225 of the movable portion 226. Thereby, the movable part 226 is located further upward.

With such a structure, the upper surface of the movable portion 226 is positioned relatively above the fixed frame 222 and the movable frame 227. Therefore, even if the reflecting surface 234 is formed directly on the upper surface of the movable portion 226, incident light on the reflecting surface 234 and reflected light emitted from the reflecting surface 234 do not interfere with the fixed frame 222 and the movable frame 227. .

Also, since the process of forming the reflecting mirror 230 can be omitted, productivity is also improved. With such a structure, the responsiveness as the spatial light modulator 100 can be further improved, so that it can be used publicly in applications where it is sufficient to reflect signal light with a limited beam diameter, such as an optical switch. .

FIG. 36 is a schematic perspective view of the reflecting mirror 230, showing a modification of the reflecting mirror 230 alone. Elements that are common to the reflecting mirror 230 shown so far are assigned the same reference numerals, and redundant description is omitted.

The reflecting mirror 230 has a bent portion 237 arranged in the middle between the post 232 and the peripheral portion of the reflecting surface 234 instead of the rib 236 hanging from the peripheral portion of the reflecting surface 234. Even with such a shape, the bending rigidity or torsional rigidity of the reflecting surface 234 can be improved.

FIG. 37 is a schematic perspective view of the reflecting mirror 230, and shows another modification of the reflecting mirror 230. FIG. The reflecting mirror 230 has both a rib 236 disposed on the peripheral edge of the reflecting surface 234 and a curved portion 237 disposed on the inside thereof. Furthermore, it also has a diagonally bent portion 237 extending from the post 232 located at the center and intersecting the bent portion 237 and the rib 236. Thus, the rigidity of the reflecting mirror 230 is further increased by providing the rib 236 and the bent portion 237 together.

FIG. 38 is a schematic diagram showing a cross-sectional shape of the reflecting mirror 230. An EE cross section of the reflecting mirror 230 shown in FIG. 37 is shown.

As shown in the figure, the bent portion 237 is depressed to form a groove when viewed from the reflecting surface 234 side. For this reason, a part of reflective surface 234 stops functioning as a reflective surface. However, as shown in FIG. 10 and the like, by using a resist having a step as a base and depositing a material to be the reflecting mirror 230 thereon, the rib 236 and the bent portion 237 are processed in the same process as the reflecting mirror 230. It can be formed together. Therefore, it is possible to prevent an increase in the number of man-hours for manufacturing the reflecting mirror 230 due to the provision of the rib 236 and the bent portion 237.

In other words, as will be described later, the rib 236 or the bent portion 237 can be formed while keeping the reflecting surface 234 flat, as long as the number of processes for forming the reflecting mirror 230 is not increased. Therefore, when the spatial light modulator 100 is used for applications such as an exposure apparatus and an image display apparatus, the reflection surface can be flattened to improve the quality and utilization efficiency of the reflected light.

Further, a member having at least one of the rib 236 and the bent portion 237 as described above together with the post 232 may be used as a structural material. That is, the unit element 200 with high reflection efficiency can be formed by further forming the flat reflection surface 234 on a member having the rib 236, the bent portion 237, and the like and having high rigidity.

FIG. 39 is a schematic perspective view showing another modification of the reflecting mirror 230. Elements that are common to the reflecting mirror 230 shown so far are assigned the same reference numerals, and redundant description is omitted.

The reflecting mirror 230 has a box-shaped structural member 238 that supports the reflecting surface 234 from the back surface instead of the rib 236 and the bent portion 237. Thereby, the reflecting mirror 230 forms a monocoque shell and has high bending rigidity and torsional rigidity. Therefore, the form of the reflecting mirror 230 can be stabilized over a long period.

Moreover, since the structural material 238 is hollow, the moment of inertia of the assembly including the reflecting mirror 230 and the structural material 238 is not increased. Therefore, the response speed of the spatial light modulator 100 is prevented from being lowered due to the high rigidity of the reflecting mirror 230.

Note that the hole 239 formed in the structural material 238 penetrates the horizontal surface of the structural material 238 and communicates the inside and outside of the structural material 238. The use of the punched hole 239 will be described later.

FIG. 40 is a schematic cross-sectional view showing the manufacturing process of the reflecting mirror 230. The structural material 238 is formed by sequentially depositing the material of the reflecting mirror 230 on the stepped base formed of resist in the same manner as the steps shown in FIGS. In addition, by forming the structural material 238 from the same material as the reflecting mirror 230, it is possible to align changes such as expansion due to temperature changes with the reflecting mirror 230.

FIG. 41 is a schematic cross-sectional view showing the next stage in the manufacturing process of the reflecting mirror 230. A region corresponding to the bottom surface of the formed structural member 238 is etched to form a hole 239. The punched hole 239 passes through the front and back of the structural material 238. Further, the inside of the structural material 238 is filled with a resist in the same manner as in the stage shown in FIG. As a result, a flat base is formed on the structural material 238.

FIG. 42 is a schematic cross-sectional view of the reflecting mirror 230. Subsequently, the material of the reflecting mirror 230 is sequentially deposited on the flat base formed on the upper end of the structural member 238 as described above. Further, the resist remaining inside the structural member 238 is discharged from the punched hole 239, and the reflecting mirror 230 is completed.

By such a procedure, the reflecting surface 234 can be formed flat over the entire surface. Therefore, an effective reflecting surface is widened, and incident light is efficiently reflected. Further, when used in an image display device or the like, the spatial light modulator 100 with few gaps between pixels can be formed.

FIG. 43 is a schematic perspective view showing another modification of the reflecting mirror 230. Elements that are common to the reflecting mirror 230 shown so far are assigned the same reference numerals, and redundant description is omitted.

The reflecting mirror 230 also has a three-dimensional structural material 238 that supports the reflecting surface 234 from the back surface. The reflecting mirror 230 including the structural member 238 has a plurality of surfaces intersecting each other and has high bending rigidity and torsional rigidity. Therefore, the form of the reflecting mirror 230 can be stabilized over a long period.

Note that since the structural material 238 has a shape opened downward, the resist serving as a base can be easily removed in the manufacturing process. However, a closed space is formed inside the post 232. Therefore, for example, it is preferable to provide a hole 239 in the bottom surface of the post 232 and the movable portion 226.

44 is a schematic cross-sectional view showing a manufacturing process of the reflecting mirror 230 shown in FIG. The structural material 238 is formed by sequentially depositing the material of the reflecting mirror 230 on the stepped base formed of resist in the same manner as the steps shown in FIGS. The structural member 238 is formed of the same material as that of the reflecting mirror 230, so that changes such as expansion due to a temperature change can be aligned with the reflecting mirror 230.

45 is a schematic cross-sectional view showing the next stage in the manufacturing process of the reflecting mirror 230. FIG. In the formed structural member 238, a hole 239 is formed on the bottom surface of the post 232. Although not shown, by providing a communication hole at the center of the movable part 226 of the drive unit 220, the inside and outside of the post 232 can be communicated with each other through the hole 239.

Further, the periphery of the structural material 238 is filled with a resist in the same manner as in the stage shown in FIG. Thereby, a flat base continuous with the upper surface of the structural member 238 is formed.

FIG. 46 is a schematic cross-sectional view of the reflecting mirror 230. Subsequently, the material of the reflecting mirror 230 is sequentially deposited on the structural member 238 as described above. Further, the resist remaining inside the post 232 is removed by being discharged from the punched hole 239, whereby the reflecting mirror 230 is completed.

As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

The order of execution of the operations, procedures, steps, and stages of the devices and systems shown in the claims, the description, and the drawings is not clearly indicated as “before”, “prior”, etc. As long as the output of the process is not used in the subsequent process, it can be realized in an arbitrary order. In the claims, the specification, and the drawings, the description using “first”, “next”, and the like for convenience does not imply that it is essential to implement in this order.

100 spatial light modulator, 200 unit element, 210 substrate, 212, 213, 214, 215, 216, 221, 228 electrode, 220 drive unit, 222 fixed frame, 223, 224 torsion shaft, 225, 229, 236 Rib, 226 Movable part, 227 Movable frame, 230 Reflector, 232 Post, 234, 532, 534 Reflective surface, 236 Rib, 237 Curved part, 238 Structural material, 239 Open hole, 312, 314 Insulating layer, 315 Contact hole, 320, 344, 346 Conductor layer, 332, 334, 336, 352, 354, 356 Resist layer, 335, 337, 339, 353, 355, 357 Side wall, 340 Non-reflective film, 341 Light-shielding part, 342, 348 Non-conductive layer 360, reflective film, 361 depression, 362, 366 Reflective film material layer, 364 Non-reflective film material layer, 368 protective layer, 400 exposure device, 500 illumination light generation unit, 510 control unit, 520 light source, 530 prism, 540, 640 imaging optical system, 550 beam splitter, 560 measurement Part, 600 illumination optical system, 612 entrance surface, 610 fly-eye lens, 620 condenser optical system, 630 field stop, 700 projection optical system, 710 mask, 720 mask stage, 730 aperture stop, 810 substrate, 820 substrate stage

Claims

A substrate having electrodes;
A substrate-side torsion shaft that is elastically deformed with one end fixed to the substrate;
The movable portion is supported by the other end of the substrate side torsion shaft portion, and has a movable portion that is attracted to the electrode by an electrostatic force and swings with respect to the substrate, and a surface that intersects one surface of the movable portion. An electromechanical transducer comprising: a structural material that is integrally disposed with the portion and that resists bending stress on the movable portion.
The electromechanical transducer according to claim 1, wherein the substrate-side torsion shaft portion is integrated with the movable portion.
A frame that is supported by the other end of the substrate-side torsion shaft and that is attracted to the electrode by electrostatic force and swings relative to the substrate;
A frame-side torsion shaft that is fixed to the frame at one end and supports the movable part at the other end;
The electromechanical converter according to claim 1, wherein the movable portion swings with respect to the frame.
4. The electromechanical transducer according to claim 3, wherein the substrate side torsion shaft portion and the frame side torsion shaft portion intersect each other.
5. The electromechanical transducer according to claim 3, wherein an area of the movable portion is larger than an area of a gap formed between the movable portion and the substrate around the frame-side torsion shaft portion. .
An electromechanical converter according to any one of claims 1 to 5,
A spatial light modulator comprising: a reflecting mirror supported by the movable part and swinging with respect to the substrate together with the movable part.
A spatial light modulator comprising a substrate and a reflecting mirror that swings relative to the substrate,
The reflective mirror includes a reflective surface and a structural material that includes a surface that intersects the reflective surface and is disposed on a back surface of the reflective surface to resist bending stress on the reflective surface.
The spatial light modulator according to claim 7, wherein the structural material has a bottom surface that further intersects the surface.
The spatial light modulator according to claim 7 or 8, wherein the structural material has a through hole that allows communication between a space enclosed with the reflection surface and the outside of the space.
The spatial light modulator according to any one of claims 7 to 9, wherein the reflective surface includes a thin film of a reflective film material deposited on a surface of the structural material.
The spatial light modulator according to any one of claims 7 to 9, wherein the reflecting mirror has the flat reflecting surface supported by the structural material.
An electrode disposed on the substrate;
A torsion shaft that is elastically deformed with one end fixed to the substrate;
A movable part supported by the other end of the torsion shaft part and attracted to the electrode by an electrostatic force to swing with respect to the substrate;
The spatial light modulator according to claim 7, wherein the reflecting mirror is supported by the movable part and swings with respect to the substrate together with the movable part.
A substrate having electrodes;
A substrate-side torsion shaft that is elastically deformed with one end fixed to the substrate;
A frame body that is supported by the other end of the torsion shaft portion and that is attracted to the electrode by an electrostatic force and swings with respect to the substrate;
A frame-side torsion shaft portion that is elastically deformed by fixing one end to the frame body, and is supported by the other end of the frame-side torsion shaft portion and is attracted to the electrode by an electrostatic force, and the frame body A spatial light modulator comprising: a movable portion that swings relative to the substrate; and a reflecting mirror that is supported by the movable portion and swings with respect to the substrate together with the movable portion.
The spatial light modulator according to claim 13, wherein the substrate-side torsion shaft portion and the frame-side torsion shaft portion are arranged in directions intersecting each other.
15. The spatial light modulator according to claim 13, wherein the reflecting mirror further includes a transparent protective layer that covers a surface airtightly.
An exposure apparatus comprising the spatial light modulator according to any one of claims 6 to 15.
The exposure apparatus according to claim 16, wherein the spatial light modulator reflects illumination light incident from a light source to form an illuminance distribution in the illumination light irradiated on the exposure mask.
A substrate having electrodes;
A substrate-side torsion shaft that is elastically deformed with one end fixed to the substrate;
The movable portion is supported by the other end of the substrate side torsion shaft portion, and has a movable portion that is attracted to the electrode by an electrostatic force and swings with respect to the substrate, and a surface that intersects one surface of the movable portion. A manufacturing method for manufacturing an electromechanical transducer including a structural material arranged integrally with a portion and resisting bending stress to the movable portion,
Forming a patterned layer of sacrificial material on a substrate;
Depositing a layer of material to be the movable part on the sacrificial material layer;
Removing the sacrificial material layer, and forming the movable part having a region spaced from the base.
A substrate and a reflecting mirror that swings relative to the substrate;
The reflecting mirror is a method for manufacturing a spatial light modulator having a reflecting surface and a structural material that includes a surface that intersects the reflecting surface and is disposed on the back surface of the reflecting surface and resists bending stress with respect to the reflecting surface. There,
Forming a patterned layer of sacrificial material on a substrate;
Depositing a layer of non-reflective coating material to be the structural material on the sacrificial material layer;
Removing the sacrificial material layer, and forming a region in which the non-reflective film material layer is separated from the base.
Forming a layer of sacrificial material over the layer of non-reflective coating material;
Depositing a layer of reflective film material to be the reflective surface on the sacrificial material layer;
The method according to claim 19, further comprising: removing the sacrificial material layer, and forming a region in which the reflective film material layer is separated from the non-reflective film material layer.
The manufacturing method according to claim 20, further comprising a step of chemically mechanically polishing a surface of the layer of the reflective film material.
The manufacturing method according to claim 20 or 21, wherein the reflective film material is formed of aluminum.
A substrate having electrodes;
A substrate-side torsion shaft that is elastically deformed with one end fixed to the substrate;
A frame body that is supported by the other end of the torsion shaft portion and that is attracted to the electrode by an electrostatic force and swings with respect to the substrate;
A frame-side torsion shaft portion that is elastically deformed by fixing one end to the frame body, and is supported by the other end of the frame-side torsion shaft portion and is attracted to the electrode by an electrostatic force, and the frame body A spatial light modulator comprising: a movable part that swings relative to the substrate; and a reflecting mirror that is supported by the movable part and swings with respect to the substrate together with the movable part,
Forming a patterned layer of sacrificial material on a substrate;
Depositing a layer of material to form the frame on the sacrificial material layer;
Removing the sacrificial material layer, and forming the frame body having a region spaced from the base.
24. The manufacturing method according to claim 23, wherein at least one of the substrate side torsion shaft portion and the frame side torsion shaft portion is formed as a part of a layer of a material to be the frame body.
The manufacturing method according to claim 23 or 24, further comprising a step of chemically mechanically polishing a base of the layer of the reflective film material before depositing the layer of the reflective film material supported by the movable part.
The manufacturing method according to any one of claims 23 to 25, further comprising a step of chemically mechanically polishing a surface of the layer of the reflective film material supported by the movable part.
27. The manufacturing method according to claim 25 or claim 26, wherein the reflective film material is formed of aluminum.