JP2007203681A - Method for treating surface of copper layer, laminate including treated copper layer, and wiring board - Google Patents

Method for treating surface of copper layer, laminate including treated copper layer, and wiring board Download PDF

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JP2007203681A
JP2007203681A JP2006027836A JP2006027836A JP2007203681A JP 2007203681 A JP2007203681 A JP 2007203681A JP 2006027836 A JP2006027836 A JP 2006027836A JP 2006027836 A JP2006027836 A JP 2006027836A JP 2007203681 A JP2007203681 A JP 2007203681A
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treatment
copper layer
layer
copper
copper foil
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Yoshito Takahashi
義人 高橋
Atsushi Kanai
淳 金井
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Resonac Corp
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Shin Kobe Electric Machinery Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for treating the surface of a copper layer which can ensure a sufficient grab in combining the copper layer and a resin insulating layer in one piece. <P>SOLUTION: The surface of the copper layer is given a blackening treatment, and further, the treated surface is given a coupling agent treatment. In this respect, a reduction treatment is preferably performed following the blackening treatment, and further, the coupling agent treatment is applied to the surface to be treated. This treatment method is, for example, applied to a rolled copper foil with not less than 100 μm thickness, then the treated surface of the copper foil is superposed on a prepreg layer, and both copper foil and prepreg layer are thermally pressurized in one piece into a laminate. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、銅層の表面処理法に関する。また、当該処理をした銅層を含む積層板ならびに配線板に関する。前記配線板は、大電流を通電する用途に好適なものである。   The present invention relates to a surface treatment method for a copper layer. Moreover, it is related with the laminated board and wiring board containing the copper layer which performed the said process. The wiring board is suitable for applications in which a large current is passed.

電子機器に搭載する配線板は、電子機器の軽薄短小化に伴う微細配線・高密度実装の技術が求められる一方で、発熱に対応する高放熱の技術も求められている。特に、各種制御・操作に大電流を使用する自動車などにおける電子回路では、導電回路の抵抗に起因する発熱やパワー素子からの発熱が非常に多く、配線板の放熱特性は高レベルであることが必須となってきている。その対策として、配線板の導電回路を構成する銅層を厚くして熱伝導性を高め、放熱を促進することが提案されている。   A wiring board mounted on an electronic device is required to have a technology for fine wiring and high-density mounting in accordance with a reduction in the thickness and size of the electronic device, and a technology for high heat dissipation corresponding to heat generation is also required. In particular, in electronic circuits such as automobiles that use a large current for various controls and operations, heat generation due to the resistance of the conductive circuit and heat generation from the power element are very large, and the heat dissipation characteristics of the wiring board may be high. It has become essential. As a countermeasure, it has been proposed to increase the thermal conductivity by increasing the copper layer constituting the conductive circuit of the wiring board and to promote heat dissipation.

上記配線板の製造においては、銅層を樹脂絶縁層に加熱加圧成形により一体化した積層板を用いており、その積層板の銅層を導電回路に加工し配線板としている。通常、銅層は、電解銅箔や圧延銅箔から選択するが、厚みの薄い銅層でよい場合は電着による電解銅箔を選択し、電着では製造が難しい厚みの厚い銅層を必要とする場合には圧延銅箔を選択している。
電解銅箔は、その片面が電着の結果生じる粗面となっているので、当該粗面を樹脂絶縁層に当接して上記の加熱加圧成形を行ない、粗面を構成する凸部を樹脂絶縁層に食い込ませ、その投錨効果により樹脂絶縁層と銅層の密着性を高めている。一方、圧延銅箔は、その製造工程上、両面とも滑らかな面になるので、当該銅層を樹脂絶縁層に一体化するに当っては、銅層の樹脂絶縁層への当接面に、別途粗化処理をする必要がある。
In the production of the wiring board, a laminated board in which a copper layer is integrated with a resin insulating layer by heating and pressing is used, and the copper layer of the laminated board is processed into a conductive circuit to form a wiring board. Usually, the copper layer is selected from electrolytic copper foil or rolled copper foil, but if a thin copper layer is acceptable, electrolytic copper foil by electrodeposition is selected, and a thick copper layer that is difficult to manufacture by electrodeposition is required. In this case, a rolled copper foil is selected.
Since one surface of the electrolytic copper foil is a rough surface generated as a result of electrodeposition, the heat treatment is performed by contacting the rough surface with the resin insulating layer, and the convex portions constituting the rough surface are made of resin. The insulating layer is bitten and the anchoring effect increases the adhesion between the resin insulating layer and the copper layer. On the other hand, since the rolled copper foil is a smooth surface on both sides in the manufacturing process, in integrating the copper layer into the resin insulation layer, the contact surface of the copper layer to the resin insulation layer is A separate roughening treatment is required.

銅層の一般的な粗化処理法として、黒化処理や黒化還元処理があるが、銅層と樹脂絶縁層の一体化において十分な耐熱性(加熱処理後においても、銅層と樹脂絶縁層の密着力を低下させない特性)を確保することができないことが知られている。また、圧延銅箔の粗化処理法として、銅層の表面に微粒子を高速衝突させ、表面に微小な凹凸を付与する方法(例えば、特許文献1)がある。しかし、このような処理をした銅層にあっても、樹脂絶縁層との十分な密着力、耐熱性を確保するには至っていない。   Common roughening treatment methods for copper layers include blackening treatment and blackening reduction treatment, but sufficient heat resistance in the integration of copper layer and resin insulation layer (copper layer and resin insulation even after heat treatment) It is known that it is not possible to ensure properties that do not reduce the adhesion of the layers. Moreover, as a roughening method of the rolled copper foil, there is a method (for example, Patent Document 1) in which fine particles collide with the surface of the copper layer at high speed to give fine irregularities on the surface. However, even with such a treated copper layer, sufficient adhesion and heat resistance with the resin insulating layer have not been secured.

特開2002−79466号公報JP 2002-79466 A

本発明が解決しようとする課題は、銅層と樹脂絶縁層を一体化するに当り十分な密着力を確保できる銅層の表面処理法を提供することである。また、当該処理をした銅層と樹脂絶縁層を一体化した積層板ならびに配線板を提供することである。   The problem to be solved by the present invention is to provide a surface treatment method of a copper layer that can secure a sufficient adhesion force when the copper layer and the resin insulating layer are integrated. Moreover, it is providing the laminated board and wiring board which integrated the copper layer and resin insulating layer which processed the said process.

上記銅層の表面処理法は、好ましくは、表面が滑らかな圧延銅箔に適用して、銅層と絶縁樹脂層との密着力を確保することを目指すものである。   The surface treatment method for the copper layer is preferably applied to a rolled copper foil having a smooth surface, and aims to ensure adhesion between the copper layer and the insulating resin layer.

上記課題を達成するために、本発明に係る銅層の表面処理法は、銅層の表面に黒化処理を施し、さらに前記処理面にカップリング剤処理を行なうことを特徴とする(請求項1)。前記において、好ましくは、黒化処理後に、還元処理を施し、さらに前記処理面にカップリング剤処理を行なう(請求項2)。
銅層は、例えば、厚さ100μm以上の圧延銅箔である(請求項3)。
In order to achieve the above object, a surface treatment method for a copper layer according to the present invention is characterized in that the surface of the copper layer is subjected to blackening treatment, and further, the treatment surface is subjected to coupling agent treatment (claim) 1). In the above, preferably, after the blackening treatment, reduction treatment is performed, and further, the treatment surface is subjected to a coupling agent treatment (claim 2).
The copper layer is, for example, a rolled copper foil having a thickness of 100 μm or more (Claim 3).

ここで、黒化処理とは、銅層表面に微細な針状の酸化第一銅または酸化第二銅を生成する操作である。また、還元処理とは、前記の黒化処理後にこれを還元処理する操作である。   Here, the blackening treatment is an operation of generating fine acicular cuprous oxide or cupric oxide on the surface of the copper layer. The reduction process is an operation for reducing the blackening process.

本発明に係る方法により表面処理した銅層の表面には、黒化処理、好ましくは黒化処理と還元処理によるサブミクロンオーダの微細な凹凸が付与され、その上にカップリング剤処理が施された形態となる。その結果、銅層は微細な表面性状を呈し、表面は化学的な結合力をもったものとなる。   The surface of the copper layer surface-treated by the method according to the present invention is provided with blackening treatment, preferably fine unevenness of submicron order by blackening treatment and reduction treatment, and a coupling agent treatment is performed thereon. It becomes a form. As a result, the copper layer exhibits fine surface properties, and the surface has a chemical bonding force.

上記のような表面性状の銅層を、その処理面を樹脂絶縁層に当接して加熱加圧成形により一体化した積層板は、上記の銅層の微細な表面性状による樹脂絶縁層への投錨効果に加え、化学的な結合力も付加されたものとなる。
なお、銅層のめっき液等に対する耐薬品性が向上することから、黒化処理だけよりも黒化処理と還元処理を施したほうが好ましい。
A laminated board in which a copper layer having the above surface property is integrated by heat and pressure molding with its treated surface in contact with the resin insulating layer is cast on the resin insulating layer due to the fine surface property of the copper layer. In addition to the effect, chemical bond strength is also added.
In addition, since the chemical resistance with respect to the plating solution etc. of a copper layer improves, it is more preferable to perform a blackening process and a reduction process rather than only a blackening process.

本発明に係る銅層の表面処理法(請求項1〜2)によれば、銅層に形成される微細な凹凸に加えて化学的な結合力を付与することができ、この銅層を樹脂絶縁層に加熱加圧成形により一体化した積層板(請求項4)やこれを加工した配線板(請求項5)においては、銅層の樹脂絶縁層への投錨効果と化学的な結合力により、銅層と樹脂絶縁層の密着力を優れたものにすることができる。その結果、積層板や配線板は、加熱処理後においても銅層と樹脂絶縁層の密着力を低下させない特性(以下、「耐熱性」という)も向上させることができる。   According to the surface treatment method for a copper layer according to the present invention (Claims 1 and 2), in addition to the fine irregularities formed on the copper layer, a chemical bonding force can be imparted. In the laminated board (Claim 4) integrated with the insulating layer by heating and pressing (Claim 4) and the wiring board (Claim 5) processed from this, due to the anchoring effect of the copper layer on the resin insulating layer and the chemical bond The adhesion between the copper layer and the resin insulating layer can be made excellent. As a result, the laminated board and the wiring board can also improve the characteristic (hereinafter referred to as “heat resistance”) that does not reduce the adhesion between the copper layer and the resin insulating layer even after the heat treatment.

厚さ100μm以上の銅層は、電着による方法では製造が次第に難しくなり、圧延により製造することになる。この場合、銅層の表面は滑らかで凹凸がないので、請求項3に係る方法により表面処理をして積層板の製造に供すれば、銅層と樹脂絶縁層の高い密着力を確保するのに都合がよい。導電回路の厚い配線板の提供に寄与でき、大電流を流す自動車機器や大型機械用の配線板に適用して信頼性が高まる。導電回路が厚いため、放熱性も良好である。   A copper layer having a thickness of 100 μm or more becomes increasingly difficult to produce by the electrodeposition method, and is produced by rolling. In this case, since the surface of the copper layer is smooth and has no irregularities, a high adhesion between the copper layer and the resin insulating layer is ensured if the surface treatment is performed by the method according to claim 3 and the laminate is manufactured. Convenient to. This contributes to the provision of a wiring board having a thick conductive circuit, and the reliability is improved by applying it to a wiring board for automobile equipment and large machines through which a large current flows. Since the conductive circuit is thick, heat dissipation is good.

銅層として圧延銅箔を使用する場合について、発明の実施の形態を説明する。圧延銅箔は、通常、厚み100μm以上のものである。   An embodiment of the invention will be described for the case of using a rolled copper foil as the copper layer. The rolled copper foil usually has a thickness of 100 μm or more.

まず、圧延銅箔に黒化処理、好ましくは黒化処理と還元処理を行ない、銅箔表面にサブミクロンオーダの凹凸を形成する。これにより、微細な表面性状を呈することになる。前記黒化処理には、亜塩素酸ナトリウム水溶液を主成分とする粗化液を用いることができ、この処理により、銅箔表面に微細な針状の酸化第一銅又は酸化第二銅を生成させる。これに続く還元処理には、有機系と無機系の還元剤をいずれも用いることができ、この処理により、前記酸化第一銅又は酸化第二銅を銅に還元する。これら黒化処理と還元処理は、多層プリント配線板の製造工程において一般的に用いられている処理を適用することができる。   First, blackening treatment, preferably blackening treatment and reduction treatment, is performed on the rolled copper foil to form submicron irregularities on the surface of the copper foil. Thereby, a fine surface texture is exhibited. For the blackening treatment, a roughening solution mainly composed of an aqueous sodium chlorite solution can be used, and this treatment produces fine acicular cuprous oxide or cupric oxide on the copper foil surface. Let In the subsequent reduction treatment, both organic and inorganic reducing agents can be used. By this treatment, the cuprous oxide or cupric oxide is reduced to copper. For the blackening treatment and the reduction treatment, treatments generally used in the manufacturing process of the multilayer printed wiring board can be applied.

上記の黒化処理後、好ましくは黒化処理と還元処理の後に、カップリング剤処理を行なう。カップリング剤は、シラン系カップリング剤やチタネート系カップリング剤である。   After the blackening treatment, preferably after the blackening treatment and the reduction treatment, the coupling agent treatment is performed. The coupling agent is a silane coupling agent or a titanate coupling agent.

上記の処理を行なった圧延銅箔の処理面を樹脂絶縁層に当接して加熱加圧成形により一体化し、積層板とする。樹脂絶縁層は、シート状の繊維基材(無機又は有機繊維の織布や不織布)にエポキシ樹脂等の熱硬化性樹脂を含浸し半硬化状態としたプリプレグやシート状の繊維基材を含まない樹脂絶縁層(BTレジン等)である。前記プリプレグは、加熱加圧成形により樹脂が硬化して樹脂絶縁層となる。前記樹脂絶縁層には、金属酸化物又は水酸化物、無機セラミックス、その他の充填材を配合することができる。このような充填材を配合した場合にも、銅層と樹脂絶縁層の良好な密着性を確保することができる。   The treated surface of the rolled copper foil subjected to the above treatment is brought into contact with the resin insulating layer and integrated by heating and pressing to obtain a laminated plate. The resin insulation layer does not include a prepreg or a sheet-like fiber base material that is semi-cured by impregnating a sheet-like fiber base material (a woven or non-woven fabric of inorganic or organic fibers) with a thermosetting resin such as an epoxy resin. It is a resin insulating layer (BT resin or the like). In the prepreg, the resin is cured by heating and pressing to form a resin insulating layer. A metal oxide or hydroxide, inorganic ceramics, and other fillers can be blended in the resin insulating layer. Even when such a filler is blended, good adhesion between the copper layer and the resin insulating layer can be secured.

上記積層板は、樹脂絶縁層を介してセラミック基板と一体になった構成でもよい。上記積層板は、銅層を導体回路に加工することにより配線板となるが、その導体回路の表面に本発明に係る処理法を適用し、その上に樹脂絶縁層を介して銅層を一体化し、多層の配線板構成とすることができる。   The laminated plate may be integrated with the ceramic substrate via a resin insulating layer. The laminated board becomes a wiring board by processing the copper layer into a conductor circuit, and the treatment method according to the present invention is applied to the surface of the conductor circuit, and the copper layer is integrated on the resin insulating layer thereon. And a multilayer wiring board configuration can be obtained.

以下、本発明に係る実施例を、比較例とともに詳細に説明する。尚、本発明は、その要旨を逸脱しない限り、本実施例に限定されるものではない。   Hereinafter, examples according to the present invention will be described in detail together with comparative examples. In addition, this invention is not limited to a present Example, unless it deviates from the summary.

実施例1
厚み100μmの圧延銅箔(JIS C1201P)を、脱脂処理、酸処理、酸化処理の順で黒化処理を実施した。この際、酸処理には硫酸を、酸化処理には亜塩素酸ナトリウムとリン酸ナトリウムと水酸化ナトリウムの混合水溶液を、それぞれ用いた。黒化処理を経て乾燥後に、さらにシラン系カップリング剤の水溶液に浸漬する処理を行なった。
以上の表面処理を実施した圧延銅箔の処理面に、高耐熱FR−4グレードのプリプレグ5枚からなる層を重ね、温度175℃、圧力4MPaの条件で90分間加熱加圧形成して一体化し、厚さ1.2mmの積層板を得た。
Example 1
Blackening treatment was performed on a rolled copper foil (JIS C1201P) having a thickness of 100 μm in the order of degreasing treatment, acid treatment, and oxidation treatment. At this time, sulfuric acid was used for the acid treatment, and a mixed aqueous solution of sodium chlorite, sodium phosphate, and sodium hydroxide was used for the oxidation treatment. After drying through a blackening treatment, a treatment of immersing in an aqueous solution of a silane coupling agent was performed.
On the treated surface of the rolled copper foil subjected to the above surface treatment, a layer composed of five high heat-resistant FR-4 grade prepregs is layered and formed by heating and pressing for 90 minutes at a temperature of 175 ° C. and a pressure of 4 MPa. A laminated plate having a thickness of 1.2 mm was obtained.

実施例2
実施例1において、脱脂処理、酸処理、酸化処理の後に還元処理を実施した。還元処理にはジメチルアミノボランと水酸化ナトリウムの混合水溶液を用いた。黒化還元処理を経て乾燥後に、さらにシラン系カップリング剤の水溶液に浸漬する処理を行なった。
その後は、実施例1と同様に、厚さ1.2mmの積層板を得た。
Example 2
In Example 1, reduction treatment was performed after degreasing treatment, acid treatment, and oxidation treatment. For the reduction treatment, a mixed aqueous solution of dimethylaminoborane and sodium hydroxide was used. After drying through a blackening reduction treatment, a treatment of immersing in an aqueous solution of a silane coupling agent was further performed.
Thereafter, similarly to Example 1, a laminated plate having a thickness of 1.2 mm was obtained.

比較例1
実施例1において、黒化処理およびカップリング剤処理を行なわずに、圧延銅箔を未処理で使用し、その後は、実施例1と同様に、厚さ1.2mmの積層板を得た。
Comparative Example 1
In Example 1, the rolled copper foil was used untreated without performing the blackening treatment and the coupling agent treatment, and thereafter, a laminated plate having a thickness of 1.2 mm was obtained in the same manner as in Example 1.

比較例2
実施例1において、黒化処理を行なわずに、カップリング剤処理のみ実施した。その後は、実施例1と同様に、厚さ1.2mmの積層板を得た。
Comparative Example 2
In Example 1, only the coupling agent treatment was performed without performing the blackening treatment. Thereafter, similarly to Example 1, a laminated plate having a thickness of 1.2 mm was obtained.

比較例3
実施例2において、カップリング剤処理を行なわずに、黒化処理と還元処理のみ実施した。その後は、 実施例1と同様に、厚さ1.2mmの積層板を得た。
Comparative Example 3
In Example 2, only the blackening treatment and the reduction treatment were performed without performing the coupling agent treatment. Thereafter, similarly to Example 1, a laminated plate having a thickness of 1.2 mm was obtained.

比較例4
厚み100μmの圧延銅箔(JIS C1201P)の表面に、空気圧を利用した吸引式エアブラスト装置を用いブラスト処理を行なった。これは、平均粒子径70μmのアルミナを主成分とする粒子を、吐出圧力0.4MPaで銅箔表面に40秒間吹き付ける処理である。
上記の粗化処理を実施した圧延銅箔を使用し、その後は、実施例1と同様に、厚さ1.2mmの積層板を得た。
Comparative Example 4
A surface of a rolled copper foil (JIS C1201P) having a thickness of 100 μm was subjected to blasting using a suction type air blasting device using air pressure. This is a process of spraying particles mainly composed of alumina having an average particle diameter of 70 μm on the surface of the copper foil at a discharge pressure of 0.4 MPa for 40 seconds.
The rolled copper foil which performed said roughening process was used, and the laminated board of thickness 1.2mm was obtained similarly to Example 1 after that.

比較例5
比較例4の粗化処理を実施した圧延銅箔を使用し、さらにシラン系カップリング剤の水溶液に浸漬する処理を行なった。その後は、実施例1と同様に、厚さ1.2mmの積層板を得た。
Comparative Example 5
The rolled copper foil which performed the roughening process of the comparative example 4 was used, and also the process immersed in the aqueous solution of a silane coupling agent was performed. Thereafter, similarly to Example 1, a laminated plate having a thickness of 1.2 mm was obtained.

上記各例で作製した積層板について、銅箔引き剥がし強度および耐めっき液性について評価を行なった。その結果を表1に示す。測定方法は、以下に示すとおりである。
銅箔引き剥がし強度:積層板から、25mm×100mmの試験片を切り出し、常態および177℃で240時間エージング後の銅箔引き剥がし強度を、ショッパーを用い室温で測定した。常態における銅箔引き剥がし強度は、実施例1を基準として、相対的な指標で示した。また、エージング後の引き剥がし強度は、常態における引き剥がし強度に対する保持率が、20%以上50%未満を○、20%未満を×として表示した。
耐めっき液性:実施例1、2および比較例3の積層板にφ0.6mmの穴をあけ、18%HCl水溶液に3時間浸漬した後、変色(ハローイング)の有無を確認することにより耐めっき液性を評価した。変色なしのものを○、変色ありのものを×として表示した。
About the laminated board produced in each said example, copper foil peeling strength and plating solution resistance were evaluated. The results are shown in Table 1. The measuring method is as follows.
Copper foil peel strength: A 25 mm × 100 mm test piece was cut out from the laminate, and the copper foil peel strength after aging at 177 ° C. for 240 hours was measured at room temperature using a shopper. The copper foil peel strength in the normal state was shown as a relative index with reference to Example 1. Moreover, the peeling strength after aging was indicated as ◯ when the retention ratio with respect to the peeling strength in a normal state was 20% or more and less than 50%, and × when less than 20%.
Resistance to plating solution: A 0.6 mm hole was made in the laminated plates of Examples 1 and 2 and Comparative Example 3, and after immersion in an 18% HCl aqueous solution for 3 hours, the presence or absence of discoloration (haloing) was confirmed. The plating solution properties were evaluated. Those without discoloration were indicated as ◯, and those with discoloration as ×.

Figure 2007203681
Figure 2007203681

上記表から明らかなように、本発明に係る方法により処理した銅層を樹脂絶縁層に加熱加圧成形により一体化した積層板は、常態における引き剥がし強度が良好で、耐熱性もよいことが理解できる(実施例と比較例の対比)。上記比較例より、カップリング剤、黒化還元処理、ブラスト処理では、引き剥がし強度も耐熱性も低いことが理解できる。また、黒化処理に還元処理を付加すると、銅層の耐めっき液性が向上することが理解できる(実施例2と実施例1の対比)。   As is clear from the above table, the laminated board in which the copper layer treated by the method according to the present invention is integrated with the resin insulating layer by heat and pressure molding has good peel strength in a normal state and good heat resistance. Can be understood (contrast of Example and Comparative Example). From the above comparative example, it can be understood that the peeling strength and heat resistance are low in the coupling agent, blackening reduction treatment, and blast treatment. Further, it can be understood that when the reduction treatment is added to the blackening treatment, the plating solution resistance of the copper layer is improved (contrast between Example 2 and Example 1).

Claims (5)

銅層の表面に黒化処理を施し、さらに前記処理面にカップリング剤処理を行なうことを特徴とする銅層の表面処理法。   A surface treatment method for a copper layer, wherein the surface of the copper layer is subjected to blackening treatment, and the treatment surface is further treated with a coupling agent. 黒化処理とカップリング剤処理の間に、処理面の還元処理を行なうことを特徴とする請求項1記載の銅層の表面処理法。   2. The surface treatment method for a copper layer according to claim 1, wherein a reduction treatment of the treated surface is performed between the blackening treatment and the coupling agent treatment. 銅層が厚さ100μm以上の圧延銅箔である請求項1又は2に記載の銅層の表面処理法。   The copper layer surface treatment method according to claim 1, wherein the copper layer is a rolled copper foil having a thickness of 100 μm or more. 請求項1〜3のいずれかの方法により処理された銅層を用い、その処理面を樹脂絶縁層に加熱加圧成形により一体化した積層板。   The laminated board which integrated the process surface into the resin insulating layer by heat-press molding using the copper layer processed by the method in any one of Claims 1-3. 請求項4記載の積層板の銅層が導電回路に加工されている配線板。   The wiring board by which the copper layer of the laminated board of Claim 4 was processed into the conductive circuit.
JP2006027836A 2006-02-06 2006-02-06 Method for treating surface of copper layer, laminate including treated copper layer, and wiring board Pending JP2007203681A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104369464A (en) * 2014-11-03 2015-02-25 广东生益科技股份有限公司 Thick copper laminated board and preparing method thereof
CN108754477A (en) * 2018-05-04 2018-11-06 瑞声科技(新加坡)有限公司 Roll copper darkening ring piece preparation method and calendering copper darkening ring piece

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104369464A (en) * 2014-11-03 2015-02-25 广东生益科技股份有限公司 Thick copper laminated board and preparing method thereof
CN108754477A (en) * 2018-05-04 2018-11-06 瑞声科技(新加坡)有限公司 Roll copper darkening ring piece preparation method and calendering copper darkening ring piece
CN108754477B (en) * 2018-05-04 2021-03-02 瑞声光学解决方案私人有限公司 Preparation method of rolled copper shading ring sheet and rolled copper shading ring sheet

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