JP2007201458A - Anisotropic cooling element and semiconductor element equipped with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an anisotropic cooling element which enables space-saving and improvement of thermal conversion efficiency, and to provide a semiconductor element that is equipped with it. <P>SOLUTION: The anisotropic cooling element 100 comprises an anisotropic thermally conductive member 110 attached to a heating element 10, the cooling/heat-radiating means 120<SB>1</SB>and 120<SB>2</SB>, which adsorb heat transmitted through the anisotropic thermally conductive member 110 to cool or radiate heat, and a contact layer which thermally forms the anisotropic thermally conductive member 110, in contact with each of the cooling/heat-radiating means 120<SB>1</SB>and 120<SB>2</SB>. The anisotropic thermally conductive member 110 is constituted by alternately laminating a plurality of thermally conductive layers, comprising a material having heat conductivity higher than that of the heating element 10 at least within a plane, and thermal resonator layers whose layer thickness is determined, according to the mean free path and the wavelength of the phonons that are to be the object. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an anisotropic cooling element using an anisotropic heat conductive member whose thermal conductivity is higher in an in-plane direction than in a direction perpendicular to the plane, and a semiconductor element including the same.

  Conventionally, cooling of heating elements of semiconductor elements, laser elements, and modules (hereinafter referred to as heating elements) is a method of attaching a heat sink made of a material having high thermal conductivity such as Cu or Al to the heating elements. Has been widely used. In this method, a heat sink is brought into contact with a heating element or the like, and heat is radiated through the heat sink. The heat sink also has a function of increasing the uniformity of the heat distribution in the heating element and the like, and can locally protrude in the heating element and remove a high temperature portion. And when high heat dissipation performance is required, the method of cooling with an air using a fan, the method of cooling by circulating cooling media, such as specific gas and liquid, etc. are taken. Further, there are a method of radiating heat using a heat sink, a method of air cooling using a fan, a method of combining a method of cooling by circulating a cooling medium such as a specific gas / liquid.

  A cooling method is also used in which a Peltier element is brought into contact with a heating element or the like to achieve both space saving and high cooling performance. Furthermore, in recent years, a technique for reducing power consumption as much as possible by converting heat from a built-in heating element into electric power by a thermoelectric element such as a thermocouple and feeding it back to a power source has been studied. Even in the use of thermoelectric elements for such applications, it is necessary to make the heat distribution uniform on the high temperature side and the cold side from the viewpoint of thermoelectric conversion efficiency.

  For mobile terminals such as mobile phones, demands such as expansion of functions and increase of transmission power are increasing. In order to meet such a demand, the problem of an increase in the amount of heat generated from the built-in heating element or the like must be solved. In other words, it is said that the heat dissipation method as it is cannot be held by hand. For this reason, efficient cooling technology for built-in heating elements and the like has become extremely important. Further, due to the increase in the number of parts accompanying the expansion of functions, the cooling means used for the heat generating element or the like must be able to save space.

  Here, when an isotropic heat conducting member is used, heat is diffused in the middle of transportation and cannot be transported effectively, and cooling, thermoelectric conversion, etc. cannot be performed efficiently. there were. Therefore, as a heat conduction member, for example, an α-Si3N4 rich phase and a β-Si3N4 rich phase are alternately laminated to form a multilayer heat conduction member, and the layer is formed by utilizing phonon scattering at the interface between different layers. A method of making phonon scattering in the vertical direction easy to occur and improving thermal insulation in this direction (hereinafter referred to as layer vertical direction thermal insulation) has been studied (for example, see Patent Document 1). However, this thermal insulation material is a laminate of a layer with a solid solution and a layer without a solid solution, and the laminate thickness is about 100 μm, which is significantly larger than the free path distance of phonons. Thus, although it is thermally insulated in the film thickness direction, it does not have high thermal conductivity in the film plane.

JP-A-8-276537

  However, with conventional cooling elements and anisotropic thermoelectric elements using multilayer heat conducting members, high cooling and thermoelectric conversion efficiencies are achieved by keeping the layer vertical heat permeability that is perpendicular to the layers low. There was a problem that it was difficult to do. This is because the thickness of each layer constituting the multilayer heat conducting member is about 100 μm or more, which is significantly larger than the mean free path of phonons, and the multilayer heat conducting member cannot efficiently confine heat in the plane. This was due to the amount of heat diffusing during heat transport.

  The present invention has been made to solve such a problem, and an object thereof is to realize an anisotropic cooling element that can save space and improve cooling efficiency, and a semiconductor element including the same.

  In order to solve the above-described problem, the anisotropic cooling element according to the first aspect of the present invention includes a heat conductive layer made of a material having a higher thermal conductivity than a heating element to be attached and a mean free path of a target phonon. And an anisotropic heat conducting member in which layer thicknesses are determined alternately depending on the wavelength, and heat transferred from the heating element through the anisotropic heat conducting member are absorbed. And one or more cooling / dissipating means for cooling or dissipating heat.

  According to this aspect, the anisotropic heat conducting member in which the heat conducting layers and the thermal resonator layers are alternately stacked can suppress the layer vertical heat permeability, which is the heat permeability perpendicular to the layer, and generate heat. Since heat from the body is transmitted to the cooling and heat radiating means via the anisotropic heat conducting member, an anisotropic cooling element that can save space and improve cooling efficiency and thermoelectric conversion efficiency can be realized. Here, “target phonon” is used to mean a phonon having a frequency that causes resonance, that is, a phonon having a wavelength that satisfies the resonance condition.

  An anisotropic cooling element according to another aspect of the present invention is characterized in that a contact layer is provided between the heating element and the anisotropic heat conducting member. According to this aspect, the thermal contact resistance is reduced, and the heat transfer from the heating element to the anisotropic heat conducting member can be made efficient.

  An anisotropic cooling element according to another aspect of the present invention is characterized in that a contact layer is provided between the anisotropic heat conductive member and the cooling and heat dissipation means. According to this aspect, the thermal contact resistance is reduced, the heat transfer from the anisotropic heat conducting member to the cooling heat radiating means can be made efficient, and the cooling efficiency is improved.

  An anisotropic cooling element according to another aspect of the present invention is provided such that at least one or more anisotropic heat conducting members are in contact with part or all of one surface of the heating element, The anisotropic heat conducting member is connected to the cooling and radiating means through a corresponding contact layer.

  In an anisotropic cooling element according to another aspect of the present invention, at least one or more anisotropic heat conductive members are in contact with a part or all of each surface of a pair of opposing surfaces of the heating element. The anisotropic heat conducting members are connected to the cooling and radiating means via corresponding contact layers.

  The anisotropic cooling element according to another aspect of the present invention is provided such that one or more anisotropic heat conducting members are in contact with the heating elements between the heating elements of the stacked heating elements. The isotropic heat conducting member is connected to the cooling and radiating means via a corresponding contact layer.

  In the anisotropic cooling element according to another aspect of the present invention, the anisotropic heat conducting member has a contact region in which any one or more of the contact layers are formed in a predetermined region near the end surface or the end surface. It is characterized by.

  In the anisotropic cooling element according to another aspect of the present invention, any one or more of the anisotropic heat conductive members may include any one or more of the anisotropic heat conductive members. The contact area is partially or entirely exposed.

  In the anisotropic cooling element according to another aspect of the present invention, the shape of the contact region with the anisotropic heat conductive member of the cooling heat radiating means has a heat conductive layer in the contact region of the corresponding anisotropic heat conductive member. It is characterized in that it is in close contact with the exposed part.

  An anisotropic cooling element according to another aspect of the present invention is a nanoparticle-containing material in which a contact layer formed in a contact region with the anisotropic heat conducting member of the cooling heat radiating means includes a material composed of nanoparticles as a main material. It is formed using. According to this aspect, the contact layer can close the gap between the anisotropic heat conducting member and each cooling and radiating means densely with the nanoparticles, so that the thermal contact resistance can be kept low.

  In the anisotropic cooling element according to another aspect of the present invention, the nanoparticles of the contact layer are made of either silver, copper, or gold, or silver oxide or copper oxide. It is characterized by that. According to this aspect, the use of silver, copper, or gold, or silver oxide or copper oxide as the nanoparticles can further reduce the thermal contact resistance.

  An anisotropic cooling element according to another aspect of the present invention is characterized in that the nanoparticle-containing material includes one or more of a binder resin and a surfactant in addition to the material made of nanoparticles. According to this aspect, the nanoparticles can be satisfactorily fixed to the anisotropic heat conducting member or each cooling and radiating means.

  In the anisotropic cooling element according to another aspect of the present invention, when the nanoparticles are made of any one or more of oxides containing at least silver oxide and copper oxide, further, carbide, transition metal oxidation And an oxide of a typical metal oxide or an alloy of typical metal elements as a sintering aid for reduction. According to this aspect, the reduction reaction for the oxide is promoted, and the metal nanoparticles are easily formed.

  An anisotropic cooling element according to another aspect of the present invention is characterized in that the nanoparticle-containing material is a material made of solder particles or a material containing solder particles. According to this aspect, the adhesiveness between the anisotropic heat conducting member and each cooling and heat dissipating means is improved, and no binder resin and surfactant are required.

An anisotropic cooling element according to another aspect of the present invention is characterized in that an average diameter of the nanoparticles is 1 nm or more and 200 nm or less.
An anisotropic cooling element according to another aspect of the present invention is characterized in that a contact layer formed using the nanoparticle-containing material has a thickness of 200 nm or less.

  An anisotropic cooling element according to another aspect of the present invention is characterized in that the nanoparticle-containing material is fired by laser light irradiation or high-frequency electromagnetic wave application to form a contact layer.

  An anisotropic cooling element according to another aspect of the present invention is characterized in that any one or more of the cooling and radiating means is configured using a heat sink or a Peltier element, respectively. According to this aspect, by using the Peltier element as the cooling and radiating means, it is possible to effectively absorb the heat increased with the realization of the high function.

  An anisotropic cooling element according to another aspect of the present invention is characterized in that any one or more of the cooling and radiating means is replaced with a Seebeck element. According to this aspect, the use of the Seebeck element as the cooling / dissipating means can reduce the energy consumption by returning the converted electric energy to the built-in battery.

  An anisotropic cooling element according to another aspect of the present invention includes a cooling unit in which a plurality of Peltier elements are arranged in the same plane with a heat radiating surface or a cooling surface aligned, and the cooling unit includes the heat radiating surface and the cooling surface. A pair of heat receiving substrates sandwiched from both, a heat conducting layer made of a material having high thermal conductivity, and a thermal resonator layer that adjusts the layer thickness according to the mean free path and wavelength of the target phonon are alternately arranged It is a laminated member, and comprises an anisotropic heat conducting member disposed between the cooling means and the heat receiving substrate.

  An anisotropic cooling element according to another aspect of the present invention includes a cooling unit in which a plurality of Peltier elements are arranged in the same plane with a heat radiating surface or a cooling surface, and the heat radiating surface and the cooling surface of the cooling unit. A holder substrate for holding the cooling means, a heat conductive layer made of a material having high thermal conductivity, and a thermal resonator layer that adjusts the layer thickness according to the mean free path and wavelength of the target phonon And an anisotropic heat conducting member disposed on the opposing surface of the holder substrate.

  A semiconductor element according to a second aspect of the present invention includes an anisotropic heat conducting member of the anisotropic cooling element according to any one of the above aspects, a light emitting diode chip as the light emitter, and a substrate. The anisotropic heat conducting member is formed on the substrate, and the light emitting diode chip is mounted on the surface of the anisotropic heat conducting member.

  According to this aspect, the semiconductor element can be manufactured by forming the anisotropic heat conductive member on the substrate and mounting the light emitting diode chip on the surface of the anisotropic heat conductive member. There are no restrictions on the structure in terms of element design such as technology. Thereby, the structure is simple, high-efficiency film formation on a general-purpose substrate is possible, and the manufacturing cost can be reduced. Further, the temperature of the entire light emitting diode chip, particularly its peak temperature, is lowered by the anisotropic heat conducting member, so that the life of the light emitting diode can be extended.

In the semiconductor element according to another aspect of the present invention, the cooling / dissipating means is provided on at least a side surface of the anisotropic heat conductive member among a side surface of the anisotropic heat conductive member and a side surface of the substrate. It is characterized by. According to this aspect, the anisotropic heat conduction member can suppress the layer vertical heat permeability, which is the heat permeability in the direction perpendicular to the layer, and heat from the light-emitting diode chip can pass through the anisotropic heat conduction member. Since the heat is transmitted to the cooling heat radiating means and radiated, a semiconductor element that can save space and improve cooling efficiency and thermoelectric conversion efficiency can be realized.
A semiconductor device according to a third aspect of the present invention includes the anisotropic cooling element according to any one of the above aspects, a semiconductor laser element having a light emitting layer as the light emitter and a current confinement layer. And the anisotropic heat conductive member of the anisotropic cooling element is formed in any one of the inside, the upper part, and the lower part of the current confinement layer.

  According to this aspect, the temperature distribution in the vicinity of the light emitting layer of the semiconductor laser element is flattened by the anisotropic heat conductive member formed inside, above or below the current confinement layer, and the peak in the vicinity of the light emitting layer is obtained. The temperature is lowered. Thereby, the temperature near the light emitting layer can be lowered, particularly the peak temperature near the light emitting layer can be lowered, so that the life of the semiconductor element can be extended.

  A semiconductor device according to another aspect of the present invention is characterized in that the cooling heat dissipation means is provided on a side surface of the semiconductor laser device. According to this aspect, the anisotropic heat conducting member can suppress the layer vertical heat permeability, which is the heat permeability in the direction perpendicular to the layer, and heat from the semiconductor laser element can be transmitted through the anisotropic heat conducting member. Therefore, a semiconductor device that can save space and improve cooling efficiency and thermoelectric conversion efficiency can be realized.

  According to the present invention, heat from a heating element is used as a cooling and heat dissipating means by using an anisotropic heat conduction member having a laminated structure in which the layer vertical heat permeability, which is the heat permeability in the direction perpendicular to the layer, is kept low. Since it is transported, an anisotropic cooling element capable of saving space and improving cooling efficiency and thermoelectric conversion efficiency can be realized.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(First embodiment)
FIG. 1 is a schematic diagram showing a cross-sectional structure of an anisotropic cooling element according to the first embodiment of the present invention. In FIG. 1, an anisotropic cooling element 100 is anisotropically different from an anisotropic heat conducting member 110 attached to a heating element 10 of a semiconductor element, a laser element, and a module thereof (hereinafter referred to as a heating element). One or more cooling heat dissipation means 120 ₁ , 120 ₂ that absorbs the heat transmitted through the heat conductive member 110 and cools or dissipates it, the anisotropic heat conduction member 110, and each cooling heat dissipation means 120 ₁ , 120 _2. And a contact layer for each of the cooling and radiating means 120 ₁ , 120 ₂ .

FIG. 2 is a diagram schematically showing an example of a cross-sectional structure of the anisotropic heat conducting member of the anisotropic cooling element 100 according to the first embodiment of the present invention. In FIG. 2, the anisotropic heat conducting member 110 includes a plurality of heat conducting layers 111 _{1 to} 111 n made of a material having a thermal conductivity higher than that of the heating element 10 at least in the plane, an average free path of the target phonons, and Thermal resonator layers 112 _{1 to} 112 _{(n + 1)} whose layer thickness is determined according to the wavelength are alternately stacked. Here, the heat conductive layer ₁₁₁ 1 number of layers of ～111N, the thickness of the thermally conductive layer ₁₁₁ 1 ～111N is determined according to the amount of heat transport.

Each of the thermal resonator layers 112 _{1 to} 112 _{(n + 1)} is made of a material having a long phonon mean free path, the layer thickness is shorter than the target phonon mean free path, and satisfies the following conditions: It is thick.
mλ / 2.2 <t <mλ / 1.8 (m is an integer)
Here, m is a natural number, and λ is the target phonon wavelength, that is, the phonon wavelength satisfying the resonance condition.

The heat conductive layers 111 _{1 to} 111 _n are formed using a material having high thermal conductivity such as Au, Ag, and Cu, for example, and the heat conductive layers 112 _{1 to} 112 _{(n + 1)} have an average free path such as Si. It is formed using a material that can be lengthened. The thickness of the thermal resonator layers 112 _{1 to} 112 _{(n + 1)} is, for example, several nanometers to several tens of nanometers when Si is used as a material, and is shorter than the mean free path of phonons at the operating temperature.

As a film formation method of the heat conductive layers 111 _{1 to} 111 _n and the thermal resonator layers 112 _{1 to} 112 _{(n + 1)} , for example, a CVD method, an MBE method, an ion cluster beam method, or the like can be used. Using these film forming methods, the thermal conductive layers 111 _{1 to} 111 _n and the thermal resonator layers 112 _{1 to} 112 _{(n + 1)} are single crystals or crystals are continuous in the film thickness direction, and there are crystal grain boundaries in the film thickness direction. It is preferable to use a crystal film that is not formed because phonon scattering at a grain boundary or the like in the layer can be removed or reduced.

Further, the thermal resonator layers 112 _{1 to} 112 _{(n + 1)} constituted by the crystal films have a size such that the mean free path of the target phonon is equal to or larger than the film thickness of the thermal resonator layers 112 _{1 to} 112 _{(n + 1).} It may have several grain boundaries. By forming the thermal resonator layers 112 _{1 to} 112 _{(n + 1)} with a crystal film having such a crystal grain boundary, the film forming method and conditions can be relaxed. However, the film formation method of the heat conductive layers 111 _{1 to} 111 _n and the thermal resonator layers 112 _{1 to} 112 _{(n + 1)} is not limited to the above method, and other crystal film formation methods are used. However, other suitable film forming methods for forming a continuous film may be used.

It is obtained by alternately stacking 50 thermal conductive layers 111 _{1 to} 111 _n made of Ag and 6 nm thick thermal resonator layers 112 _{1 to} 112 _{(n + 1)} on a Si substrate. The heat permeability was compared for the anisotropic heat conducting member 110 and a single-layer Si sheet having the same shape. As a result of measurement using the thermoreflectance method, the thermal permeabilities of the anisotropic heat conductive member 110 and the Si sheet formed on the Si substrate are 1100 and 35000 Js ^−0.5 m ⁻² K, respectively. ^-1 . That is, the heat permeability of the anisotropic heat conducting member 110 was a value of 1/20 or less of the heat permeability of the Si sheet.
As described above, by using the anisotropic heat conductive member 110, it becomes possible to suppress the diffusion of heat in the direction perpendicular to the layer, and the heat transfer to the heat sink or the like can be made efficient, so that the cooling efficiency is improved. It can improve dramatically by more than 5 times.

Hereinafter, the operation of the anisotropic cooling element 100 according to the first embodiment of the present invention will be described with reference to the drawings. First, the heat generated by the heating element 10 is transferred to the anisotropic heat conducting member 110 and flows in the anisotropic heat conducting member 110 according to the temperature gradient. Heat is transmitted through the anisotropic heat conducting member 110 to the cooling heat dissipating means 120 ₁ , 120 ₂ having a low temperature, and is radiated to the outside by the cooling heat dissipating means 120 ₁ , 120 ₂ . Here, since the anisotropic heat conducting member 110 has a high thermal conductivity anisotropy, the heat is not diffused to the outside and is cooled while being confined in the two-dimensional space in the anisotropic heat conducting member 110. It transmits to the heat radiating means 120 ₁ , 120 ₂ side. As a result, the heating element 10 can be efficiently cooled and downsized. Furthermore, it is possible to reduce the uneven temperature distribution in the heating element 10.

In semiconductor devices for portable devices, semiconductor devices for power devices, and packages used in these modules, lamination processing is applied to prevent deterioration of the semiconductor chip, and heat is released from the semiconductor devices in the package. It is difficult to effectively release heat even if a heat sink is attached. Therefore, as described above, in the first embodiment of the present invention, the anisotropic heat conductive member 110 is brought into direct contact with the heating element 10 such as a semiconductor chip, and a heat sink is further attached to the end of the anisotropic heat conductive member 110. The cooling heat radiation means 120 ₁ , 120 ₂ , etc. are provided to dissipate heat so that heat can be effectively dissipated.

(Second Embodiment)
FIG. 3 is a schematic cross-sectional view for explaining the connection between the anisotropic heat conducting member 110 and the heating element 10 of the anisotropic cooling element 100 according to the second embodiment of the present invention. The anisotropic heat conductive member 110 is provided with a predetermined region (hereinafter referred to as a mount region) for mounting the heating element 10 at the center or the like. 10 through a contact layer 131. Here, as shown in FIG. 3, one of the heat conductive layers 111 _x (x: 1 to n) is exposed in the mounting region of the anisotropic heat conductive member 110. In this example, thermally conductive layer ₁₁₁ 1-111 out thermally conductive layer 111 ₁ of _n and thermally conductive layer 111 ₂ is exposed to the outer surface of the heating element 10.

It is preferable to configure the mount region in this way because the thermal contact resistance can be reduced and the heat transfer from the heating element 10 to the anisotropic heat conducting member 110 can be made efficient.
(Third embodiment)
In the anisotropic cooling element 100 according to the third embodiment of the present invention shown in FIG. 4, more heat conduction is performed in the mount region of the anisotropic heat conducting member 110 than in the second embodiment shown in FIG. The layer 111 _x (x: 1 to n) is configured to be exposed. It is preferable to configure the mount region in this way because the thermal contact resistance can be further reduced and the heat transfer from the heating element 10 to the anisotropic heat conducting member 110 can be made more efficient.
In addition, when the anisotropic heat conductive member 110 has the main heat conductive layers 111 _p (p: 1 to n) that transport heat, the above “p” or the vicinity of “p” It is further preferable from the viewpoint of reducing thermal contact resistance.

(Fourth embodiment)
In anisotropic cooling device 100 according to a fourth embodiment of the present invention shown in FIG. 5, the anisotropic heat conducting member 110, in a predetermined region in the vicinity of the end face or end face, and the cooling heat dissipating means 120 _1, 120 ₂ A step-like contact area for good thermal contact. The anisotropic heat conducting member 110 is configured such that any one or more of the heat conducting layers 111 _{1 to} 111 _n are exposed in a part or all of the contact region, similarly to the mount region. In FIG. 5, reference numeral “141” denotes a contact layer provided between the anisotropic heat conducting member 110 and each cooling and radiating means 120 ₁ , 120 ₂ .

Contact layer 141, as shown in FIG. 5, provided in the cooling heat dissipating means ₁₂₀ 1, 120 every _two, the anisotropic heat conducting member 110 the cooling heat dissipating means ₁₂₀ 1, 120 ₂ and so as to thermally contact the It has become. Forming the contact layer 141 using a nanoparticle-containing material allows the nanoparticle to close the gap between the anisotropic heat conducting member 110 and each of the cooling and heat radiation means 120 ₁ and 120 ₂ , Therefore, it is preferable because the thermal contact resistance can be kept low.

Nanoparticles made of silver, copper, or gold, or silver oxide or copper oxide may be used. It is preferable to use a nano-particle made of a material having a high thermal conductivity such as Au, Ag, or Cu because the thermal contact resistance can be further reduced. In addition, the nanoparticle-containing material includes one or more of a binder resin and a surfactant in addition to the material made of nanoparticles. The nanoparticle is made of the anisotropic heat conducting member 110 or each of the cooling and radiating means 120 ₁ , 120. ₂ is preferable because it can be fixed satisfactorily. As the nanoparticle-containing material containing one or more of a binder resin and a surfactant, for example, a metal nanopaste containing metal nanoparticles having a high thermal conductivity such as Au, Ag, or Cu may be used.

In addition, making the nanoparticle-containing material a material made of solder particles or a material containing solder particles improves the adhesion between the anisotropic heat conducting member 110 and each of the cooling and radiating means 120 ₁ , 120 ₂ , This is preferable from the viewpoint of not requiring a surfactant or the like. Here, when the nanoparticles are made of any one or more substances of oxides such as silver oxide and copper oxide, the nanoparticle-containing material further includes a carbide, a transition metal oxide, a typical metal oxide, or An oxide of a typical metal element alloy may be included as a sintering aid for reduction. By doing so, the reduction reaction for the oxide is promoted, and the metal nanoparticles are easily formed.

 Here, nanoparticles having an average diameter of 1 nm to 200 nm or less can be used. The contact layer is formed by applying the nanoparticle-containing material in the contact region, and then irradiating the laser beam, for example, by applying a high-frequency electromagnetic wave of the MHz range or more, and heating the nanoparticle-containing material to contain the nanoparticle. This is performed using a method of firing the material. The thickness of the contact layer formed using the nanoparticle-containing material is preferably 200 nm or less, which is substantially the same as the upper limit of the diameter of the nanoparticles, but is preferably 100 nm or less from the viewpoint of reducing thermal resistance, Those of several tens of nm or less are preferable. Further, when the size of the nanoparticles is reduced, there is an effect that the melting point of the nanoparticles themselves is lowered. In particular, the size of the nanoparticles is preferably 100 nm or less.

Similarly to the mount region, when the anisotropic heat conducting member 110 has the main heat conducting layer 111 _p (p: 1 to n) that transports heat, the “p” or “p” "In the vicinity of" is preferable from the viewpoint of reducing thermal contact resistance.

Note that the shape of the contact region of the anisotropic heat conductive member 110 where the heat conductive layers 111 _{1 to} 111 _n are exposed is not limited to a step shape, and the thickness of the anisotropic heat conductive member 110 is anisotropic in the contact region. The heat conductive member 110 may be monotonously decreased from the center side toward the end face side.

Specifically, the thickness of the anisotropic heat conducting member 110 gradually or monotonously increases toward the end faces on the cooling and heat dissipating means 1201 and 1202 side, a blade shape, a step shape, or a combination of these, etc. Is preferred. However, the present invention is not limited to the configuration in which the thickness of the anisotropic heat conducting member 110 decreases as described above in the contact region, and other configurations may be used. In addition, when the anisotropic heat conducting member 110 has the main heat conducting layer 111 _p (p: 1 to n) that transports heat as described above, the cross-sectional shape of the contact region is expressed as “p” or “p”. It is preferable to increase the contact area with the heat conductive layer in the vicinity of “from the viewpoint of reducing the thermal contact resistance and efficiently performing cooling, heat dissipation, and the like.

(Fifth embodiment)
In the anisotropic cooling element 100 according to the fifth embodiment of the present invention shown in FIG. 6, the cooling / dissipating means 120 ₁ , 120 ₂ and the predetermined region near the end face of the anisotropic heat conducting member 110 and FIG. The contact area | region for taking a thermal contact with a larger area than 4th Embodiment shown in FIG. In FIG. 6, reference numeral “142” denotes a contact layer provided between the anisotropic heat conducting member 110 and each cooling / radiating means 120 ₁ , 120 ₂ .

(Sixth embodiment)
FIG. 7 shows an anisotropic cooling element 500 according to a sixth embodiment of the present invention.
The cooling / dissipating means 120 ₁ , 120 ₂ includes, for example, a heat sink that dissipates the heat transmitted through the anisotropic heat conducting member 110, a Peltier element that absorbs and cools the transmitted heat, and the like. As a configuration in which the cooling heat dissipation means is a Peltier element, in addition to the cooling heat dissipation means 120 ₁ , 120 ₂ in the above configuration replaced with a Peltier element, a Peltier element such as an anisotropic cooling element 500 shown in FIG. There is a configuration in which the cooling surface C facing the heat radiation surface H of the elements 520 ₁ and 520 ₂ is attached so as to be in contact with the anisotropic heat conducting member 510. In FIG. 7, reference numeral “20” denotes a heating element. An anisotropic heat conducting member 510 is attached to the upper surface of the heating element 20. Moreover, the structure which replaced a part of cooling-heat-dissipating means with the Seebeck element may be sufficient. In this configuration, the Seebeck element converts the heat transmitted through the anisotropic heat conducting member 110 into electric energy, and the obtained electric energy is fed back to the built-in battery.

  It is preferable to use a Peltier element as the cooling and radiating means because it can effectively absorb the heat increased with the realization of a high function. In addition, it is preferable to use a Seebeck element as the cooling and radiating means because the energy consumption can be reduced by returning the electric energy obtained by conversion to the built-in battery. The shape of the contact area of the cooling heat dissipation means with the anisotropic heat conducting member is determined according to the shape of the contact area of the corresponding anisotropic heat conducting member, and the heat conduction in the contact area of the anisotropic heat conducting member. The layer is in close contact with the exposed portion.

(Seventh embodiment)
FIG. 8 shows an anisotropic cooling element 601 according to the seventh embodiment of the present invention.
As shown in FIG. 8, the cooling and radiating means 621 ₁ and 621 ₂ are arranged at positions away from the anisotropic heat conductive member 611, and for example, the anisotropic heat conductive member 611 via the heat leads 631 ₁ and 631 _2. It is configured to be connected to. In FIG. 8, reference numeral “30” denotes a heating element. The cooling and radiating means 621 ₁ and 621 ₂ may be a substrate.

(Eighth embodiment)
FIG. 9 shows an anisotropic cooling element 602 according to the eighth embodiment of the present invention.
The anisotropic heat conductive member 612 is provided so as to be in contact with a part or all of each of a pair of opposed surfaces of the heating element 40, and each anisotropic heat conductive member 612 has a corresponding contact layer. It may be connected to the cooling and radiating means 622 ₁ , 622 ₂ .

Also in this configuration, the cooling / dissipating means 622 ₁ , 622 ₂ is disposed at a position away from the anisotropic heat conducting member 612 as shown in FIG. 9, and is anisotropic via, for example, the heat leads 632 ₁ , 632 _2. It is connected to the heat conducting member 612. Further, a heat sink (not shown) is formed between the heating element 40 and the substrate so as to be sandwiched between the heating element and the substrate, and the anisotropic heat conducting member 612 and the cooling and radiating means 622 ₁ , 6221 ₂ are connected to the heat lead. 632 ₁ , 632 _{2 and the} like.

(Ninth embodiment)
FIG. 10 shows an anisotropic cooling element 700 according to the eighth embodiment of the present invention.
As shown in FIG. 10, the heating elements 50 may be stacked, and the anisotropic heat conductive member 710 may be provided between the heating elements 50 so as to contact the heating elements 50 or sandwich the heating elements 50. And in the example shown in FIG. 10, each anisotropic heat conductive member 710 is connected to the board | substrate 730 as a cooling heat dissipation means via the heat lead 720. As shown in FIG. Here, the heat lead 720 is attached to the contact layer provided in the contact region of the anisotropic heat conducting member 710, and the heating element 50 is attached to the contact layer similarly provided in the mount region. Can be reduced. By providing the anisotropic heat conducting member 710 between the heating elements 50 as in the above configuration, it is very preferable because the heat from the internal heating elements 50 can be effectively radiated. Further, when the heating element 50 is made of a semiconductor circuit or the like, a through electrode 740 may be provided as necessary to connect the heating elements 50.

(10th Embodiment)
FIG. 11 is a schematic diagram showing a cross-sectional structure of an anisotropic cooling element 801 according to the tenth embodiment of the present invention. In FIG. 11, an anisotropic cooling element 801 includes a cooling means 811 in which a plurality of Peltier elements are arranged in the same plane with a heat radiating surface or a cooling surface, and the cooling means 811 sandwiched from both the heat radiating surface and the cooling surface. And a pair of heat receiving substrates 831 ₁ and 831 ₂ and anisotropic heat conducting members 821 ₁ and 821 ₂ disposed between the cooling means 811 and the heat receiving substrates 831 ₁ and 831 ₂ .

  Here, the Peltier element included in the cooling unit 811 has a configuration in which, for example, two types of semiconductors doped with impurities of different conductivity types are connected with a metal such as copper. Here, as the semiconductor, a semiconductor composed of a compound such as Bi, Te, Sb, Se, Si, Ge, Gd, Fe, Pb, Cu, or Ag can be used.

The anisotropic heat conducting members 821 ₁ and 821 ₂ have the same laminated structure as that described in the first embodiment of the present invention. Here, the mount region in which the Peltier element is provided may have, for example, a concave cross-sectional shape that is dug to the heat receiving substrates 831 ₁ and 831 ₂ side in consideration of the thermal conductivity in the vertical direction.

(Eleventh embodiment)
FIG. 12 is a schematic diagram showing a cross-sectional structure of an anisotropic cooling element 810 according to the eleventh embodiment of the present invention.
In the tenth embodiment, the configuration in which the heat receiving substrates 831 ₁ and 831 ₂ sandwich the cooling unit 811 from both the heat radiation surface and the cooling surface has been described. However, the anisotropic cooling element 802 according to the present embodiment. Then, as shown in FIG. 12, instead of the heat receiving substrates 831 ₁ and 831 ₂ , a holder substrate 832 for holding the cooling and radiating means 812 is provided, and the anisotropic heat conducting members 822 ₁ and 822 ₂ face the holder substrate 832. It is set as the structure arrange | positioned on a surface. When the holder substrate adopts the configuration shown in FIG. 12, a flexible Peltier module is obtained.

(Twelfth embodiment)
Next, a semiconductor device according to a twelfth embodiment embodying the present invention will be described with reference to FIG.

The semiconductor element according to the present embodiment is a high power LED (light emitting diode) element that uses the anisotropic heat conducting member of the anisotropic cooling element described in the above embodiments for heat dissipation.
A high power LED element 70 as a semiconductor element includes an anisotropic heat conductive film 71 as an anisotropic heat conductive member, an LED chip 72 as a heating element, and a substrate 73. The substrate 73 is a general-purpose substrate. An anisotropic heat conductive film 71 is formed on the substrate 73. An LED chip 72 is mounted on the surface of the anisotropic heat conductive film 71. The anisotropic heat conductive film 71 has the same configuration as the anisotropic heat conductive member 110 (see FIGS. 1 and 2) described in the first embodiment.

  On both side surfaces of the high-power LED element 70, cooling heat dissipation means 74 are arranged via contact layers 75, and both exposed end faces of the anisotropic heat conductive film 71 are Peltier elements via the contact layers 75. 74 is in good thermal contact. As the cooling and heat dissipation means 74, for example, a Peltier element is used.

  Here, as a comparative example with the semiconductor element 70 according to the present embodiment, two conventional techniques will be described with reference to FIGS. 16 and 17.

  FIG. 16 shows a conventional high-power LED element that dissipates heat from a heating element using a composite structure. This high power LED element includes a metal base 76 that is a metal substrate, a resin layer 77 formed on the surface of the metal base 76 so as to have an opening at the center, and a metal exposed at the opening of the resin layer 77. An AlN package 78 formed to have a V-shaped cross section on the surface of the base 76 and a part of the surface of the resin layer 77, and an LED chip 79 mounted on a flat surface in the center of the AlN package 78 It has. In this prior art, there is a restriction on the structure in terms of element design.

  FIG. 17 shows a conventional high-power LED element that dissipates heat from the heating element with a high-heat-generation package structure. This high power LED element is formed on the surface of the AlN substrate 80 so as to surround the periphery of the LED chip 81, the AlN substrate 80 made of AlN, the LED chip 81 mounted on the center surface of the AlN substrate 80, and the LED chip 81. And an AlN package 82. In this prior art, the substrate itself is made of AlN, which increases the component cost.

According to 12th Embodiment which has the above structure, there exist the following effects.
A high power LED element 70 can be manufactured by forming the anisotropic heat conductive film 71 on the substrate 73 and mounting the LED chip 72 on the surface of the anisotropic heat conductive film 71, as shown in FIG. There are no restrictions on the structure in terms of element design as in the prior art. At the same time, since the substrate 73 may be a general-purpose substrate, the component cost can be reduced. As a result, the structure is simple, high-efficiency film formation on a general-purpose substrate is possible, and the manufacturing cost can be reduced.
The temperature distribution of the entire LED chip 72 is flattened by the anisotropic heat conductive film 71 and the peak temperature of the LED chip 72 is lowered, so that the life of the high power LED element 70 can be extended.
The exposed end faces of the anisotropic heat conductive film 71 are in good thermal contact with the Peltier element 74 through the contact layers 75, respectively. For this reason, the anisotropic heat conductive film 71 can suppress the layer vertical heat permeability, which is the heat permeability in the direction perpendicular to the layer, and heat from the LED chip 72 through the anisotropic heat conductive film 71. Since it is transmitted to the Peltier element 74 and dissipated, it is possible to realize a high-power LED element that can save space and improve cooling efficiency and thermoelectric conversion efficiency.

(13th Embodiment)
Next, a semiconductor device according to a thirteenth embodiment embodying the present invention will be described with reference to FIGS.

  The semiconductor element according to the present embodiment is a semiconductor laser element that utilizes the anisotropic heat conducting member of the anisotropic cooling element described in the above embodiments for heat dissipation. FIG. 14 is a perspective view showing a schematic configuration of the semiconductor laser device, and FIG. 15 is a perspective view showing a part of the detailed structure thereof. 14 and 15 show a semiconductor element having the same configuration, FIG. 14 shows an example in which an anisotropic heat conductive film is formed inside the current confinement layer, and FIG. 15 shows an anisotropic heat conduction film. An example in which a conductive film is formed below the current confinement layer is shown.

  As shown in FIG. 14, a semiconductor laser element 90 as a semiconductor element has an active layer 91 made of a multiple quantum well (MQW) layer and a current confinement layer 92, and is anisotropic as an anisotropic heat conducting member. A heat conductive film 93 is formed inside the current confinement layer 92.

Further, as shown in FIGS. 14 and 15, the semiconductor laser element 90 includes a substrate 103, a lower electrode 94 formed on the back side of the substrate 103, and an n-type lower clad formed on the surface side of the substrate 103 in this order. A layer 95, an active layer 91, a p-type upper cladding layer 96, a p-type contact layer 97, and an upper electrode 98. The current confinement layer 92 has a p-type layer 92 ₁ adjacent the n-type lower cladding layer 95, an n-type layer 92 ₂ adjacent to the p-type upper cladding layer 96. Reference numeral “99” is a tunnel junction.

In this embodiment, the anisotropic heat conduction layer 93 is an internal current confinement layer 92 is formed between the p-type layer 92 ₁ and the n-type layer 92 _2. This anisotropic heat conductive film 93 is formed by the following manufacturing method.

First, after forming the p-type layer 92 ₁ for current confinement, form an anisotropic thermal conductive film 93, then forming the n-type layer 92 _2.
In FIG. 14, reference numeral “150” is an antireflection film (AR film) or non-reflective film formed on the light emitting side end face of the semiconductor laser element 90, and reference numeral “15” is formed on the light reflecting side end face. This is a highly reflective film (HR film). In FIG. 14, the depth of the high reflection film 150 is not originally visible, but the high reflection film 150 is shown in a transparent manner so that the cross-sectional structure of the light emitting side end face of the semiconductor laser element 90 can be seen. Then, on both side surfaces of the semiconductor laser element 90, similarly to the high power LED element 70 shown in FIG. 13, cooling and heat radiation means are arranged through the contact layers, respectively, and the anisotropic heat conductive film 93 is exposed. Both end surfaces are in good thermal contact with the cooling and radiating means such as Peltier elements through the contact layers.

  In the semiconductor laser device 90 having such a configuration, when a current is injected between the lower electrode (cathode) 94 and the upper electrode (anode) 98, the current injected from the upper electrode 98 is made into a current by the current confinement layers 92 on the left and right. After flowing in the lateral direction with the flow path restricted, it flows through the tunnel junction 99 and reaches the active layer 91 as holes. The holes injected into the active layer 91 in this way are recombined with electrons injected from the lower electrode 94 to emit light. The emitted light is amplified by reciprocating between the antireflection film 150 on the light emission side end face and the high reflection film 151 on the light reflection side end face to cause laser oscillation, and passes through the antireflection film 150 to be externally emitted as laser light. Is emitted.

According to 12th Embodiment which has the above structure, there exist the following effects.
The temperature distribution in the vicinity of the light emitting layer 91 of the semiconductor laser element 90 is flattened by the anisotropic thermal conductive film 93 formed in the current confinement layer 92, and the peak temperature in the vicinity of the light emitting layer 91 is lowered. As a result, the temperature near the light emitting layer 91 can be lowered, particularly the peak temperature near the light emitting layer 91 can be lowered, so that the life of the semiconductor laser element 90 can be extended.
A cooling heat dissipation means is disposed on both side surfaces of the semiconductor laser element 90 via contact layers, respectively, and both exposed end faces of the anisotropic heat conductive film 93 are cooled heat dissipation means such as Peltier elements via the contact layers, respectively. And come into good thermal contact. Thereby, the anisotropic thermal conductive film 93 suppresses the layer vertical thermal permeability, which is the thermal permeability in the direction perpendicular to the layer, and heat from the semiconductor laser element 90 passes through the anisotropic thermal conductive film 93. Therefore, the semiconductor laser device 90 can be realized which can save space and improve the cooling efficiency and the thermoelectric conversion efficiency.

In addition, this invention can also be changed and embodied as follows.
In the second embodiment, the anisotropic heat conductive member 110 is in contact with the heating element 10 via the contact layer 131 in the mount region. The present invention can also be applied to a structure that is in direct contact.

· In the first 13 embodiment shown in FIG. 14, the anisotropic thermal conductive film 93, an internal current confinement layer 92, an example was described in which formed between the p-type layer 92 ₁ and the n-type layer 92 ₂ but the inside of the p-type layer 92 ₁ of the current confinement layer 92 an anisotropic thermal conductive film 93, or may be formed in the n-type layer 92 _2.

Further, the anisotropic heat conductive film 93 may be formed below the current confinement layer 92 as shown in FIG. The anisotropic heat conductive film 93 is formed by the following manufacturing method. After forming the mesa strap, forming an anisotropic thermal conductive film 93 in the peripheral portion, and the p-type layer 92 ₁ forming the current confinement layer 92 for current confinement thereon, sequentially forming an n-type layer 92 ₂ To do.

Further, the anisotropic heat conductive film 93 may be formed on the current confinement layer 92. The anisotropic heat conductive film 93 is formed by the following manufacturing method. After forming the p-type layer ₉₂ 1, n-type layer 92 ₂ for current confinement, to form the anisotropic thermal conductive film 93.

  As described above, according to the present invention, the anisotropic heat conductive film 93 is disposed in the vicinity of the active layer 91, that is, the anisotropic heat conductive film as an anisotropic heat conductive member of the anisotropic cooling element. 93 is widely applicable to a semiconductor device formed inside, above or below the current confinement layer 92.

  The anisotropic cooling element of the present invention uses an anisotropic heat conduction member in which heat conduction layers and heat resonance layers having high heat conductivity are alternately laminated, thereby improving cooling efficiency and thermoelectric conversion efficiency and saving space. It is useful as an anisotropic cooling element that cools electronic elements, electronic devices, and other heat generating elements that have the effect of being capable of being effective.

Sectional drawing which shows schematic structure of the anisotropic cooling element which concerns on 1st embodiment of this invention. The expanded sectional view which shows the anisotropic heat conductive member of the same anisotropic cooling element. Sectional drawing which shows the principal part of the anisotropic cooling element which concerns on the 2nd embodiment of this invention. Sectional drawing which shows the principal part of the anisotropic cooling element which concerns on the 3rd embodiment of this invention. Sectional drawing which shows the principal part of the anisotropic cooling element which concerns on the 4th embodiment of this invention. Sectional drawing which shows the principal part of the anisotropic cooling element which concerns on the 5th embodiment of this invention. Sectional drawing which shows the principal part of the anisotropic cooling element which concerns on the 6th embodiment of this invention. Sectional drawing which shows the principal part of the anisotropic cooling element which concerns on the 7th embodiment of this invention. Sectional drawing which shows the principal part of the anisotropic cooling element which concerns on the 8th embodiment of this invention. Sectional drawing which shows the principal part of the anisotropic cooling element which concerns on the 9th embodiment of this invention. Sectional drawing which shows the principal part of the anisotropic cooling element which concerns on the 10th embodiment of this invention. Sectional drawing which shows the principal part of the anisotropic cooling element which concerns on the 11th embodiment of this invention. Sectional drawing which shows schematic structure of the high power LED element which concerns on the 12th embodiment of this invention. A perspective view showing a schematic structure of a semiconductor laser device according to a thirteenth embodiment of the present invention. The perspective view which showed the detailed structure of the semiconductor laser element partially broken. Sectional drawing which shows schematic structure of the conventional high power LED element which thermally radiates a heat generating body. Sectional drawing which shows schematic structure of the conventional high power LED element.

Explanation of symbols

10, 20, 30, 40, 50 Heating element 70 High power LED element 71 Anisotropic heat conductive film 72 LED chip 73 Substrate 90 Semiconductor laser element 91 Active layer 92 Current confinement layer 93 Anisotropic heat conductive film 100, 500, 601, 602, 700, 801, 802 Anisotropic cooling element 110, 510, 611, 612, 710, 821 ₁ , 821 ₂ , 822 ₁ , 822 ₂
Anisotropic heat conducting members 111 _{1 to} 111 _{(n + 1)} Thermal conducting layers 112 _{1 to} 112 _{(n + 1)} Thermal resonator layers 120 ₁ , 120 ₂ , 621 ₁ , 621 ₂ , 622 ₁ , 622 ₂ Cooling heat dissipation means 13 ₁ , 13 ₂ Contact layer 14 ₁ , 14 ₂ Contact layer 520 ₁ , 520 ₂ , 811, 812 Peltier element 631 ₁ , 6312, 632 ₁ , 632 ₂ , 720 Heat lead 730 Substrate 740 Through electrode 831 ₁ , 831 ₂ Heat receiving substrate 832 Holder substrate

Claims (25)

Anisotropy in which a heat conducting layer made of a material having a higher thermal conductivity than the heating element to be attached and a thermal resonator layer whose layer thickness is determined according to the mean free path and wavelength of the target phonon are alternately laminated Heat conductive member,
One or more cooling and radiating means for absorbing or cooling or radiating heat transferred from the heating element via the anisotropic heat conducting member;
An anisotropic cooling element comprising:   The anisotropic cooling element according to claim 1, wherein a contact layer is provided between the heating element and the anisotropic heat conducting member.   The anisotropic cooler according to claim 1, wherein a contact layer is provided between the anisotropic heat conductive member and the cooling and heat radiating means.   At least one or more anisotropic heat conductive members are provided so as to contact a part or all of one surface of the heating element, and each anisotropic heat conductive member is cooled through a corresponding contact layer. The anisotropic cooling element according to claim 1, wherein the anisotropic cooling element is connected to a heat radiating means.   At least one or more anisotropic heat conductive members are provided so as to be in contact with a part or all of the surfaces of the pair of opposing surfaces of the heating element, and each anisotropic heat conductive member corresponds to each other. The anisotropic cooling element according to claim 1, wherein the anisotropic cooling element is connected to the cooling and radiating means via a contact layer.   One or more anisotropic heat conducting members are provided between the heat generating members of the stacked heat generating members so as to contact the heat generating members, and each of the anisotropic heat conducting members is cooled and dissipated through a corresponding contact layer. The anisotropic cooling element according to claim 1, wherein the anisotropic cooling element is connected to the means.   The said anisotropic heat conductive member has a contact area | region which forms any one or more said contact layers in the predetermined area | region of an end surface or end surface vicinity, The any one of Claim 1 thru | or 6 characterized by the above-mentioned. The anisotropic cooling element according to item.   Any one or more of the thermally conductive layers of the anisotropic heat conductive member are exposed in a part or all of the contact region of any one or more of the anisotropic heat conductive members. The anisotropic cooling element according to claim 1, wherein the anisotropic cooling element is characterized.   The shape of the contact area with the anisotropic heat conducting member of the cooling and heat radiating means is such that the heat conduction layer in the contact area of the corresponding anisotropic heat conducting member is in close contact with the exposed portion. The anisotropic cooling element according to any one of claims 1 to 6.   The contact layer formed in the contact region with the anisotropic heat conducting member of the cooling and heat radiating means is formed using a nanoparticle-containing material containing a material composed of nanoparticles as a main material. The anisotropic cooling element of any one of Claim 9.   The anisotropic cooling element according to claim 10, wherein the nanoparticles of the contact layer are made of either silver, copper, or gold, or silver oxide or copper oxide.   The anisotropic cooling element according to claim 10 or 11, wherein the nanoparticle-containing material includes one or more of a binder resin and a surfactant in addition to a material composed of nanoparticles.   In the case where the nanoparticles are made of at least one of oxides containing silver oxide and copper oxide, carbides, transition metal oxides, typical metal oxides, or alloys of typical metal elements The anisotropic cooling element according to claim 11, comprising an oxide as a sintering aid for reduction.   The anisotropic cooling element according to claim 10, wherein the nanoparticle-containing material is a material made of solder particles or a material containing solder particles.   The anisotropic cooling element according to claim 10, wherein an average diameter of the nanoparticles is 1 nm or more and 200 nm or less.   The anisotropic cooling element according to claim 8, wherein the contact layer formed using the nanoparticle-containing material has a thickness of 200 nm or less.   The anisotropic cooling element according to any one of claims 8 to 16, wherein the nanoparticle-containing material is baked by laser light irradiation or high-frequency electromagnetic wave application to form a contact layer.   18. The anisotropic cooling element according to claim 1, wherein any one or more of the cooling and radiating means is configured by using a heat sink or a Peltier element, respectively.   The anisotropic cooling element according to any one of claims 1 to 17, wherein any one or more of the cooling and radiating means is replaced with a Seebeck element.   A cooling means in which a plurality of Peltier elements are arranged in the same plane with a heat radiating surface or a cooling surface, a pair of heat receiving substrates sandwiching the cooling means from both the heat radiating surface and the cooling surface, and thermal conductivity A member in which a heat conducting layer made of a high-temperature material and a thermal resonator layer that adjusts the layer thickness according to the mean free path and wavelength of the target phonon are alternately laminated, the cooling means and the heat receiving substrate An anisotropic cooling element comprising: an anisotropic heat conducting member disposed between the two.   A cooling means in which a plurality of Peltier elements are arranged in the same plane with a heat radiating surface or a cooling surface, a holder substrate provided between the heat radiating surface and the cooling surface of the cooling means, and holding the cooling means; A member in which a heat conductive layer made of a material having high thermal conductivity and a thermal resonator layer that adjusts the layer thickness according to the mean free path and wavelength of the target phonon are alternately laminated, the holder substrate An anisotropic cooling element comprising: an anisotropic heat conducting member disposed on opposite surfaces of the element.   The anisotropic heat conducting member of the anisotropic cooling element according to any one of claims 1 to 21, a light emitting diode chip as the light emitter, and a substrate, wherein the anisotropic material is provided on the substrate. A semiconductor element, wherein a heat conductive member is formed, and the light emitting diode chip is mounted on a surface of the anisotropic heat conductive member.   23. The semiconductor element according to claim 22, wherein the cooling and radiating means is provided on at least a side surface of the anisotropic heat conductive member among a side surface of the anisotropic heat conductive member and a side surface of the substrate. .   The anisotropic cooling element according to any one of claims 1 to 21, a semiconductor laser element having a light emitting layer as the light emitter and a current confinement layer, wherein the anisotropic cooling element includes: A semiconductor element, wherein an anisotropic heat conductive member is formed in any one of an inside, an upper part, and a lower part of the current confinement layer. 25. The semiconductor device according to claim 24, wherein the cooling and radiating means is provided on a side surface of the semiconductor laser device.

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