JP2007200932A5 - - Google Patents

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Publication number
JP2007200932A5
JP2007200932A5 JP2006014216A JP2006014216A JP2007200932A5 JP 2007200932 A5 JP2007200932 A5 JP 2007200932A5 JP 2006014216 A JP2006014216 A JP 2006014216A JP 2006014216 A JP2006014216 A JP 2006014216A JP 2007200932 A5 JP2007200932 A5 JP 2007200932A5
Authority
JP
Japan
Prior art keywords
layer
nitride semiconductor
ingan
semiconductor device
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006014216A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007200932A (ja
JP4804930B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2006014216A priority Critical patent/JP4804930B2/ja
Priority claimed from JP2006014216A external-priority patent/JP4804930B2/ja
Publication of JP2007200932A publication Critical patent/JP2007200932A/ja
Publication of JP2007200932A5 publication Critical patent/JP2007200932A5/ja
Application granted granted Critical
Publication of JP4804930B2 publication Critical patent/JP4804930B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006014216A 2006-01-23 2006-01-23 窒化物半導体素子の製造方法 Expired - Fee Related JP4804930B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006014216A JP4804930B2 (ja) 2006-01-23 2006-01-23 窒化物半導体素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006014216A JP4804930B2 (ja) 2006-01-23 2006-01-23 窒化物半導体素子の製造方法

Publications (3)

Publication Number Publication Date
JP2007200932A JP2007200932A (ja) 2007-08-09
JP2007200932A5 true JP2007200932A5 (ko) 2009-03-05
JP4804930B2 JP4804930B2 (ja) 2011-11-02

Family

ID=38455260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006014216A Expired - Fee Related JP4804930B2 (ja) 2006-01-23 2006-01-23 窒化物半導体素子の製造方法

Country Status (1)

Country Link
JP (1) JP4804930B2 (ko)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009017229A1 (ja) 2007-08-01 2009-02-05 Nec Corporation 動画像データ配信システム、その方法及びそのプログラム
JP5182189B2 (ja) * 2009-03-27 2013-04-10 富士通株式会社 半導体装置の製造方法
EP2416387A4 (en) 2009-04-02 2012-12-12 Panasonic Corp NITRIDE SEMICONDUCTOR ELEMENT AND PRODUCTION METHOD THEREOF
JP5397042B2 (ja) * 2009-06-26 2014-01-22 富士通株式会社 半導体装置の製造方法
JP4909448B2 (ja) * 2010-04-01 2012-04-04 パナソニック株式会社 窒化物系半導体素子およびその製造方法
US9379525B2 (en) 2014-02-10 2016-06-28 Soraa Laser Diode, Inc. Manufacturable laser diode
US9368939B2 (en) 2013-10-18 2016-06-14 Soraa Laser Diode, Inc. Manufacturable laser diode formed on C-plane gallium and nitrogen material
US9362715B2 (en) 2014-02-10 2016-06-07 Soraa Laser Diode, Inc Method for manufacturing gallium and nitrogen bearing laser devices with improved usage of substrate material
US9520697B2 (en) 2014-02-10 2016-12-13 Soraa Laser Diode, Inc. Manufacturable multi-emitter laser diode
US9871350B2 (en) 2014-02-10 2018-01-16 Soraa Laser Diode, Inc. Manufacturable RGB laser diode source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3498577B2 (ja) * 1998-07-07 2004-02-16 日亜化学工業株式会社 窒化物半導体レーザ素子
US6455340B1 (en) * 2001-12-21 2002-09-24 Xerox Corporation Method of fabricating GaN semiconductor structures using laser-assisted epitaxial liftoff

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