JP2007196376A5 - - Google Patents
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- Publication number
- JP2007196376A5 JP2007196376A5 JP2007031429A JP2007031429A JP2007196376A5 JP 2007196376 A5 JP2007196376 A5 JP 2007196376A5 JP 2007031429 A JP2007031429 A JP 2007031429A JP 2007031429 A JP2007031429 A JP 2007031429A JP 2007196376 A5 JP2007196376 A5 JP 2007196376A5
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- substrate
- crystal substrate
- torsion spring
- exposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 20
- 239000013078 crystal Substances 0.000 claims 12
- 238000004519 manufacturing process Methods 0.000 claims 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 4
- 238000005530 etching Methods 0.000 claims 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 239000007864 aqueous solution Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007031429A JP4164528B2 (ja) | 2001-02-22 | 2007-02-13 | 揺動体を含む構造体の製造方法 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001047295 | 2001-02-22 | ||
| JP2001047297 | 2001-02-22 | ||
| JP2001047296 | 2001-02-22 | ||
| JP2007031429A JP4164528B2 (ja) | 2001-02-22 | 2007-02-13 | 揺動体を含む構造体の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001279383A Division JP4124986B2 (ja) | 2001-02-22 | 2001-09-14 | マイクロ構造体、マイクロ力学量センサ、マイクロアクチュエータ、マイクロ光偏向器、及び光走査型ディスプレイ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007196376A JP2007196376A (ja) | 2007-08-09 |
| JP2007196376A5 true JP2007196376A5 (enrdf_load_stackoverflow) | 2008-06-26 |
| JP4164528B2 JP4164528B2 (ja) | 2008-10-15 |
Family
ID=38451469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007031429A Expired - Fee Related JP4164528B2 (ja) | 2001-02-22 | 2007-02-13 | 揺動体を含む構造体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4164528B2 (enrdf_load_stackoverflow) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009139546A (ja) * | 2007-12-05 | 2009-06-25 | Anritsu Corp | 可変波長光源 |
| JP2011107675A (ja) * | 2009-10-20 | 2011-06-02 | Seiko Epson Corp | 光偏向素子、光偏向器、及び画像形成装置 |
| JP6648062B2 (ja) * | 2017-03-31 | 2020-02-14 | ミネベアミツミ株式会社 | ポリゴンミラースキャナモーター |
| JP6519033B1 (ja) | 2018-07-03 | 2019-05-29 | Ｄｏｌｐｈｉｎ株式会社 | 物体検出装置、物体検出方法、および物体検出装置の設計方法 |
| JP6518959B1 (ja) * | 2018-07-10 | 2019-05-29 | Ｄｏｌｐｈｉｎ株式会社 | 物体検出装置、制御方法及びプログラム |
| WO2020045152A1 (ja) * | 2018-08-31 | 2020-03-05 | パナソニックＩｐマネジメント株式会社 | 光学反射素子 |
| JP6521551B1 (ja) * | 2018-11-01 | 2019-05-29 | Ｄｏｌｐｈｉｎ株式会社 | 物体検出装置、制御方法及びプログラム |
| JP6521164B1 (ja) * | 2018-11-01 | 2019-05-29 | Ｄｏｌｐｈｉｎ株式会社 | 物体検出装置 |
| JP6541165B1 (ja) * | 2019-01-24 | 2019-07-10 | Ｄｏｌｐｈｉｎ株式会社 | 光走査方法、光走査装置及び物体検出装置 |
| JP6651110B1 (ja) | 2019-05-28 | 2020-02-19 | Ｄｏｌｐｈｉｎ株式会社 | 物体検出装置 |
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2007
- 2007-02-13 JP JP2007031429A patent/JP4164528B2/ja not_active Expired - Fee Related