JP2007192076A5 - - Google Patents

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Publication number
JP2007192076A5
JP2007192076A5 JP2006009650A JP2006009650A JP2007192076A5 JP 2007192076 A5 JP2007192076 A5 JP 2007192076A5 JP 2006009650 A JP2006009650 A JP 2006009650A JP 2006009650 A JP2006009650 A JP 2006009650A JP 2007192076 A5 JP2007192076 A5 JP 2007192076A5
Authority
JP
Japan
Prior art keywords
blades
centrifugal
blade
rotating shaft
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006009650A
Other languages
English (en)
Japanese (ja)
Other versions
JP4920975B2 (ja
JP2007192076A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006009650A priority Critical patent/JP4920975B2/ja
Priority claimed from JP2006009650A external-priority patent/JP4920975B2/ja
Priority to US11/411,896 priority patent/US7645116B2/en
Publication of JP2007192076A publication Critical patent/JP2007192076A/ja
Publication of JP2007192076A5 publication Critical patent/JP2007192076A5/ja
Priority to US12/320,356 priority patent/US7938619B2/en
Application granted granted Critical
Publication of JP4920975B2 publication Critical patent/JP4920975B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006009650A 2005-04-28 2006-01-18 ターボ型真空ポンプ Active JP4920975B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006009650A JP4920975B2 (ja) 2006-01-18 2006-01-18 ターボ型真空ポンプ
US11/411,896 US7645116B2 (en) 2005-04-28 2006-04-27 Turbo vacuum pump
US12/320,356 US7938619B2 (en) 2005-04-28 2009-01-23 Turbo vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006009650A JP4920975B2 (ja) 2006-01-18 2006-01-18 ターボ型真空ポンプ

Publications (3)

Publication Number Publication Date
JP2007192076A JP2007192076A (ja) 2007-08-02
JP2007192076A5 true JP2007192076A5 (OSRAM) 2008-12-25
JP4920975B2 JP4920975B2 (ja) 2012-04-18

Family

ID=38447981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006009650A Active JP4920975B2 (ja) 2005-04-28 2006-01-18 ターボ型真空ポンプ

Country Status (1)

Country Link
JP (1) JP4920975B2 (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5087418B2 (ja) 2008-02-05 2012-12-05 株式会社荏原製作所 ターボ真空ポンプ
JP4934089B2 (ja) * 2008-04-09 2012-05-16 株式会社荏原製作所 ターボ分子ポンプ
DE102013213815A1 (de) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (OSRAM) * 1973-03-30 1974-10-25 Cit Alcatel
JPS60125795A (ja) * 1983-12-09 1985-07-05 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JP2741863B2 (ja) * 1988-04-15 1998-04-22 株式会社日立製作所 ターボ真空ポンプ
JPH0866803A (ja) * 1994-08-25 1996-03-12 Toshiba Mach Co Ltd 工作機械の主軸
JPH08232956A (ja) * 1995-03-01 1996-09-10 Daikin Ind Ltd 回転軸の支持構造

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