JP2007175690A - Fluid mixing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid mixing apparatus with easy piping and wiring connection at installation capable of mixing the fluid at an arbitrary ratio by controlling flow rates of the fluids in respective lines, controlling the flow rate without problem even in the pulsed fluid and being installed at a narrow space by a compact constitution. <P>SOLUTION: The respective feed lines 1, 2 are provided with fluid control valves 4, 10 for controlling the flow rate of the fluid by varying an opening area of a flow passage, flow rate measurement units 3, 9 for measuring the actual flow rate of the fluid, converting a measurement value of the actual flow rate to an electric signal and outputting it, and control parts 5, 11 for outputting an instruction signal for controlling the opening area of the fluid control valve to the fluid control valve or an instrument for operating the fluid control valve based on deviation of the measurement value of the actual flow rate and a set flow rate value, respectively. For example, pure water is mixed to 1 of hydrofluoric acid or hydrochloric acid at a ratio of 10-200 in order to obtain a washing liquid for manufacturing a semiconductor. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a fluid mixing device used in a fluid transport pipe for mixing two or more lines of fluid at an arbitrary ratio. More specifically, the flow rate of the fluid in each line is controlled to mix the fluid at an arbitrary ratio, and even if the pulsating fluid flows, the flow rate can be controlled without any problem, and it can be installed in a narrow space with a compact configuration. In addition, the present invention relates to a fluid mixing apparatus that facilitates piping and wiring connection in installation.

  Conventionally, wet etching, in which a wafer surface is etched using cleaning water obtained by diluting a chemical solution such as hydrofluoric acid with pure water, is used as one step of a semiconductor manufacturing process. It is said that the concentration of cleaning water for these wet etching needs to be managed with high accuracy. In recent years, the method of managing the concentration of cleaning water by the flow rate ratio of pure water and chemical liquid has become the mainstream, and for this reason, fluid mixing devices that manage the flow volume of pure water and chemical liquid with high accuracy have been applied. Yes.

  Although various proposals have been made as fluid mixing devices, there has been a multi-system flow rate control device and a control method thereof shown in FIG. 25 (see, for example, Patent Document 1). The configuration is a flow rate control device that controls the combined fluid flow rate to be the target flow rate by controlling each of the plurality of actuators 602 that respectively adjust the flow rate of the multiple fluid inflow systems 601 by outputting an operation signal. The flow control device outputs an operation signal to the other actuators 602b to 602n excluding one of the plurality of actuators 602 so that the flow rate becomes substantially constant, One is configured to output an operation signal so that the combined fluid flow rate becomes a target value. At this time, in the flow rate control device that controls the flow rate of the combined fluid that flows from the plurality of independent fluid inflow systems 601, feedback calculation is performed from the deviation between the sum of the detected flow rates of the fluid inflow systems 601 and the target value. Calculating means 603 for outputting the adjustment signal, and when the adjustment signal of the calculating means 603 reaches the upper and lower limit values, one fluid inflow system 601 is selected and the other actuators 602b to 602n are selected. Control system determination means 604 that switches to one system of actuators 602a and outputs the adjustment signal as an operation signal is provided.

JP 2004-133642 A

  However, the conventional multi-system flow rate control device and its control method are intended to set the total flow rate of each fluid inflow system 601 to the target flow rate, and each fluid inflow system 601 is not controlled independently, so at least two There is no control to mix the fluid in any ratio. In addition, when a pulsating fluid flows in each fluid inflow system 601, there is a problem that stable fluid control cannot be performed, and a problem that it is difficult to use for controlling the flow rate in a wide flow rate range because the flow rate range cannot be widened. there were. In addition, there are many components of the control device, so the control device itself becomes large and takes up space for installation, and each component is divided by member, and piping connection work, electrical wiring and air piping work are each There is a problem that the work is complicated and time-consuming, and the piping and wiring are troublesome and a mistake may occur.

  The present invention has been made in view of the above-described problems of the prior art, and mainly controls the flow rate of fluid in each line to mix the fluid at an arbitrary ratio, and even if pulsating fluid flows. An object of the present invention is to provide a fluid mixing apparatus that can control the flow rate without any problem, can be installed in a narrow space with a compact configuration, and can be easily connected to piping and wiring in the installation.

  The configuration of the fluid mixing apparatus of the present invention for solving the above problems will be described with reference to the drawings. The fluid mixing apparatus mixes each fluid flowing in at least two supply lines 1 and 2 at an arbitrary ratio. Each of the supply lines 1 and 2 measures the actual flow rate of the fluid by controlling the flow rate of the fluid by changing the opening area of the flow path, and the measured value of the actual flow rate as an electric signal. The flow rate measuring devices 3 and 9 that convert and output the flow rate, and a command signal for controlling the opening area of the fluid control valves 4 and 10 based on the deviation between the measured value of the actual flow rate and the set flow rate value, The first feature is that each of the control units 5 and 11 outputs the valves 4 and 10 or the fluid control valves 4 and 10 to a device that operates the fluid control valves 4 and 10.

  Each of the supply lines 1 and 2 further includes on-off valves 18 and 22 for opening or shutting off the fluid flow.

  A third feature is that each of the supply lines 1 and 2 further includes pressure regulating valves 30 and 35 for attenuating fluid pressure fluctuations.

  Further, a fourth feature is that a joining portion 15 of the supply lines 1 and 2 is provided on the most downstream side of the supply lines 1 and 2.

  A fifth feature is that on-off valves 40 and 41 are respectively arranged in the supply lines 1 and 2 immediately before the junction 15.

  Further, a sixth feature is that the merging portion 15 is a manifold valve 42 that merges the supply lines 1 and 2 into one flow path.

  Further, the main line provided with the on-off valve 535a connected to the uppermost stream side of any one of the supply lines 1 and 2, and the uppermost stream side of the other supply lines. At least one other line provided with an on-off valve 536a, and the upstream side of the on-off valve 535a of the main line and the downstream side of the on-off valve 536a of the other line are communicated via the on-off valve 537a. The seventh feature is that the flushing device 43 is provided.

  Further, an eighth feature is that the various valves and the flow rate measuring device are directly connected without using independent connecting means.

  The ninth feature is that the various valves and the flow rate measuring device are arranged in one base block.

  The tenth feature is that the various valves and the flow rate measuring device are accommodated in one casing.

  The fluid control valves 4, 10 have a valve chamber 310 at the top, an inlet channel 311 and an outlet channel 312 each communicating with the valve chamber 310, and an inlet flow at the bottom center of the valve chamber 310. A main body 301 provided with an opening 313 through which a passage 311 communicates, a cylinder 302 provided with a through hole 315 at the center of the bottom, and a breathing port 316 provided on a side surface, and sandwiching and fixing the main body 301 and the first diaphragm 304. Further, a working fluid communication port 317 is provided at the upper portion, and a bonnet 303 that clamps and fixes the peripheral portion of the cylinder 302 and the second diaphragm 306 is integrally fixed. The first diaphragm 304 includes a shoulder portion 319, A mounting portion 320 that is located above the portion 319 and is fitted and fixed to the lower portion of the rod 307, and a joint portion 332 that is located below the shoulder portion 319 and to which the valve body 305 is fixed. A thin film portion 321 extending in the radial direction from the portion 319, a thick portion 322 following the thin film portion 321, and a seal portion 323 provided at a peripheral portion of the thick portion 322 are integrally formed. A valve body 305 that enters and exits as the rod 307 moves up and down is fixed to the opening 313 of the chamber 310, while the second diaphragm 306 has a central hole 324, The thin film portion 326 extending in the radial direction from the thick wall portion 325 and the seal portion 327 provided at the peripheral edge of the thin film portion 326 are integrally formed, and the attachment portion 320 of the first diaphragm 304 is fixed to the bottom portion. The shoulder 329 located at the upper part of the rod 307 is clamped and fixed through the center hole 324 by the diaphragm presser 308, and the lower part of the rod 307 is a cylinder. 02 is placed in a loosely fitted state in the through-hole 315 at the bottom, and is fitted between the stepped portion 335 of the cylinder 302 and the lower surface of the shoulder 329 of the rod 307 in a state where movement in the radial direction is prevented. The eleventh feature is that it is supported by a spring 309.

  The fluid control valves 4 and 10 are moved up and down by an electric drive unit 344 having a motor part 359 included in an upper bonnet 358 and a lower bonnet 357, and a stem 365 connected to the shaft of the motor part 359. A flow rate control unit including a diaphragm 342 having a valve body 343 and a main body 341 having an inlet channel 346 and an outlet channel 347 respectively communicating with a valve chamber 345 isolated from the electric drive unit 344 by the diaphragm 342. This is the twelfth feature.

  In addition, the fluid control valves 4 and 10 include a tube 401 made of an elastic body, a cylinder body 402 having an internal cylinder portion 408 and a cylinder lid 409 integrally provided on the upper portion, and an inner peripheral surface of the cylinder portion 408. A piston 403 having a connecting portion 416 provided so as to be vertically movable and slidably contacted in a sealed state and penetrating from the center so as to pass through a through hole 410 provided in the center of the lower surface of the cylinder body 402 in a sealed state; A clamper 404 that is fixed to the lower end of the connecting portion 416 of 403 and is accommodated in an elliptical slit 411 provided on the bottom surface of the cylinder body 402 at right angles to the flow path axis, and joined to the lower end surface of the cylinder body 402 A first groove 418 that is fixed and receives the tube 401 on the flow path axis, and a second groove 418 that receives a connector receiver 406 at both ends of the first groove 418. 419 has a main body 405 provided deeper than the first groove 418, a fitting portion 421 that fits into the second groove 419 of the main body 405 at one end, and a connecting body 407 receiving port 423 inside the other end. In addition, a pair of connecting body receivers 406 having a through hole 426 for receiving the tube body 401, and provided on the peripheral side surface of the cylinder body 402, are formed by being surrounded by the bottom surface and inner peripheral surface of the cylinder portion 408 and the lower end surface of the piston 403. And a pair of air ports 414 and 415 communicated with the second space portion 413 surrounded by the lower end surface of the cylinder lid 409, the inner peripheral surface of the cylinder portion 408, and the upper surface of the piston 403, respectively. This is the thirteenth feature.

  The fluid control valves 4 and 10 are moved up and down by an electric drive unit 441 having an upper bonnet 451 and a motor unit 452 included in the lower bonnet 450 and a stem 460 connected to the shaft of the motor unit 452. A fourteenth feature of the present invention is that it comprises a pincer 449, a tube body 443 made of an elastic body, and a groove 445 that is joined and fixed to the lower end surface of the lower bonnet 450 and receives the tube body 443 on the flow path axis. To do.

  Further, the pressure regulating valves 30 and 35 are provided with a second gap 209 provided at the bottom center and opened to the bottom, an inlet channel 211 communicating with the second gap 209 and an upper face opened at the top. The first gap 210 having a diameter larger than the diameter of the second gap 209, the outlet channel 212 communicating with the first gap 210, the first gap 210, and the second gap 209 are communicated with each other. A main body 201 having a communication hole 213 having a diameter smaller than the diameter of the gap 210, the upper surface of the second gap 209 being the valve seat 214, and an air supply hole 217 and a discharge hole 218 provided on the side surface or the upper face. A bonnet 202 having a cylindrical gap 215 communicated with the inside, a stepped portion 216 provided on the inner peripheral surface of the lower end, and a spring having a through-hole 219 inserted into the stepped portion 216 of the bonnet 202. Receiver 203 and lower end The piston 204 has a first joint portion 224 having a smaller diameter than the through hole 219 of the spring receiver 203, and a flange portion 222 is provided on the upper portion thereof, and is fitted in the gap 215 of the bonnet 202 so as to be movable up and down. A spring 205 that is clamped and supported by the lower end surface of the portion 222 and the upper end surface of the spring receiver 203, and a peripheral portion that is clamped and fixed between the main body 201 and the spring receiver 203 and covers the first gap 210 of the main body 201. The first diaphragm 227 having a thick central portion forming the first valve chamber 231 and the first joint portion 224 of the piston 204 through the through hole 219 of the spring receiver 203 are joined and fixed at the center of the upper surface. A first valve mechanism 206 having a second joint portion 229, a third joint portion 230 provided through the communication hole 213 of the main body 201 in the center of the lower surface, and the second gap 209 in the main body. A valve body 232 that is positioned and has a larger diameter than the communication hole 213 of the main body, and a fourth joint that projects from the upper end surface of the valve body 232 and is joined and fixed to the third joint 230 of the first valve mechanism 206 234, a second valve mechanism 207 having a rod 235 that protrudes from the lower end surface of the valve body 232, and a second diaphragm 237 that extends in the radial direction from the lower end surface of the rod 235; A projecting portion 239 located at the lower center and sandwiching and fixing the periphery of the second diaphragm 237 of the second valve mechanism 207 with the main body 201 is provided at the upper center, and a notch recess 240 is provided at the upper end of the projecting portion 239. And a base plate 208 provided with a breathing hole 241 communicating with the notch recess 240, and the valve body 232 of the second valve mechanism body 207 and the body 201 of the main body 201 as the piston 204 moves up and down. A fifteenth feature is that the opening area of the fluid control unit 242 formed by the valve seat 214 is changed.

  Further, the pressure regulating valves 30 and 35 have a main body 473 having a first valve chamber 479 inside, a step portion 482 provided at an upper portion of the first valve chamber 479 and an inlet channel 472 communicating with the first valve chamber 479. A lid body 474 having a second valve chamber 483 and an outlet channel 471 communicating with the second valve chamber 483 and joined to the upper portion of the main body 473; and a first diaphragm having a peripheral portion joined to an upper peripheral portion of the first valve chamber 479 475, a second diaphragm 476 having a peripheral edge sandwiched between the main body 473 and the lid body 474, and both annular joints 485 and 488 provided at the center of the first and second diaphragms 475 and 476 are axially connected. And a plug 477 which is fixed to the bottom of the first valve chamber 479 and forms a fluid control unit 490 between the lower end of the sleeve 487 and the main body 47. An air chamber 478 surrounded by the inner peripheral surface of the step portion 482 and the first and second diaphragms 475, 476, the pressure receiving area of the second diaphragm 476 is configured to be larger than the pressure receiving area of the first diaphragm 475, A sixteenth feature is that an air supply port 480 communicating with the air chamber 478 is provided in the main body.

  Further, the flow meter is an ultrasonic flow meter, Karman vortex flow meter, ultrasonic vortex flow meter, impeller flow meter, electromagnetic flow meter, differential pressure flow meter, positive displacement flow meter, hot wire flow meter or The seventeenth feature is that it is a mass flow meter.

  In addition, at least two kinds of fluids of hydrofluoric acid or hydrochloric acid and pure water are mixed with hydrofluoric acid or hydrochloric acid at 1 to a ratio of 10 to 200 with pure water. It is characterized by.

  In addition, at least three types of fluids of ammonia water or hydrochloric acid, hydrogen peroxide water, and pure water are ammonia water or hydrochloric acid 1 to 3, and hydrogen peroxide water 1 to 5, pure water. Is mixed at a ratio of 10 to 200.

  In addition, at least three types of fluids, hydrofluoric acid, ammonium fluoride, and pure water, hydrofluoric acid is 1, ammonium fluoride is 7-10, and pure water is 50-100. The twentieth feature is that they are mixed at a ratio of

  In the present invention, the fluid control valves 4 and 10 are not particularly limited as long as the flow rate can be controlled by changing the opening area of the flow path, but the fluid flow rate control as shown in FIG. 3 is performed. A fluid control valve 4a according to the present invention which is a pneumatic needle valve having the configuration of the fluid control valves 4 and 10 according to the present invention or an electric needle valve for controlling the flow rate of fluid as shown in FIG. 21 or the configuration of the fluid control valve 4b of the present invention which is a pneumatic pinch valve for controlling the flow rate of fluid as shown in FIG. 20, or as shown in FIG. What has the structure of the fluid control valve 4c of this invention which is an electric pinch valve which performs the flow control of a simple fluid is preferable. This is preferable because stable fluid control can be performed, the flow path can be blocked only by the fluid control valves 4, 4a, 4b, and 4c, and a compact configuration and a small fluid mixing device can be provided. It is.

  In the present invention, as shown in FIG. 4, on-off valves 18 and 22 may be provided in the supply lines 16 and 17 of the fluid mixing apparatus. This is preferable because the on / off valves 18 and 22 are provided so that the on / off valves 18 and 22 can be shut off to easily perform maintenance and the like (repair and replacement of parts) of the fluid mixing device. In addition, if the fluid mixing device is provided with the on-off valves 18 and 22, when the fluid mixing device is disassembled for maintenance or the like by shutting off the flow channel, the fluid remaining in the flow channel leaks from the decomposed portion. It is preferable that the on-off valves 18 and 22 can perform an emergency shutoff of the fluid when any trouble occurs in the flow path.

  Further, the configuration of the on-off valves 18 and 22 is not particularly limited as long as it has a function of opening or shutting off the flow of fluid, and may be manually operated, such as air drive, electric drive, magnetic drive, etc. It may be automatic. In the case of automatic, a control circuit may be provided and linked to the flow rate measuring devices 19 and 23 to drive the on-off valves 18 and 22 according to the measured values, or may be driven independently from the fluid mixing device. When driven by being linked to the fluid mixing device, it is preferable because collective control can be performed in the fluid mixing device. When driving independently from the fluid mixing device, when trouble occurs in the fluid mixing device, driving is performed without affecting the trouble of the fluid mixing device when the flow path is urgently shut off by the on-off valves 18 and 22. Is preferable.

  Moreover, it is desirable to install the on-off valves 18 and 22 upstream from other valves and flow rate measuring devices in order to perform maintenance or the like. Moreover, the on-off valves 18 and 22 may be provided only on arbitrary lines of the supply lines 16 and 17 or on all lines.

  In the present invention, as shown in FIG. 6, pressure regulating valves 30 and 35 may be provided in the supply lines 27 and 28 of the fluid mixing device. The pressure regulating valves 30 and 35 are not particularly limited as long as the pressure of the fluid flowing in is adjusted to a constant pressure and is allowed to flow out. However, the pressure regulating valves 30 and 35 of the present invention as shown in FIG. What has a structure is preferable. This is a compact structure, and even if the inflowing fluid is a pulsating flow with a fast pressure fluctuation cycle, the pressure can be stabilized at a constant pressure by the pressure regulating valves 30 and 35. This is preferable because it is possible to prevent the measurement value of the fluid from becoming difficult to read. In particular, when the fluid is a fluid that is easily fixed, such as a slurry, it is preferable to have the configuration of the pressure regulating valve 30a of the present invention as shown in FIG. This is preferable because the structure of the flow path is simple and the fluid is less likely to stay, so that the slurry is difficult to adhere even if the slurry is flowed to the fluid.

  In the present invention, the flow rate measuring devices 3 and 9 are not particularly limited as long as the measured flow rate is converted into an electrical signal and output to the control units 5 and 11, and the flow rate measuring device is an ultrasonic flow meter, Karman vortex flow rate. A meter, an ultrasonic vortex flow meter, an impeller flow meter, an electromagnetic flow meter, a differential pressure flow meter, a positive displacement flow meter, a hot wire flow meter, a mass flow meter and the like are preferable. In particular, in the case of an ultrasonic flow meter as shown in FIG. 2 or FIG. In the case of an ultrasonic vortex flow meter as shown in FIG. 24, the flow rate can be measured accurately with respect to a large flow rate, which is suitable for controlling a large flow rate fluid. Thus, accurate fluid control can be performed by properly using the ultrasonic flowmeter and the ultrasonic vortex flowmeter according to the flow rate of the fluid. In the present embodiment, the control units 5 and 11 are individually provided in each supply line, but may be provided in a concentrated manner.

  By having the merging portion 15 of each of the supply lines 1 and 2 on the most downstream side of each of the supply lines 1 and 2, the fluid flowing through each of the supply lines 1 and 2 is mixed. Moreover, as shown in FIG. 8, it is preferable that the on-off valves 40 and 41 are respectively arranged in the supply lines 27a and 28a immediately before the junction 39a. This is because each of the supply lines 27a and 28a can be supplied by a single supply line, or fluid can be selected and mixed from each of the supply lines 27a and 28a. When the maintenance of the supply lines 27a and 28a is performed, the on-off valves 40 and 41 are closed to prevent the backflow of the fluid and the like, and the leakage of the fluid is reliably prevented when performing the maintenance and the like. Is preferred. In addition, as shown in FIG. 9, the joining portion is preferably a manifold valve 42. This is preferable because the same effect can be obtained as when the on-off valves 40 and 41 are arranged in the supply lines 27a and 28a immediately before the junction 39a, and the fluid mixing device can be made compact. In addition, by providing a plurality of supply lines and opening and closing the on-off valves 40 and 41 and the manifold valve 42, it is possible to select and mix some of the fluids in each supply line, and to set the flow rate of each supply line It is preferable that the fluid and its mixing ratio can be freely set by changing The supply lines 27b and 28b and the manifold valve 42 may be directly connected without using independent connection means, or may be arranged in one base block, thereby making the fluid mixing device more compact. It is preferable because it can be formed. Further, a valve, a measuring instrument, or the like may be provided downstream from the merging portion 15 and is not particularly limited.

  Further, as shown in FIG. 11, it is preferable to provide the flushing device 43 of the present invention on the most upstream side of each supply line. Thereby, the fluid flowing into any one supply line 27c can be used for cleaning. For example, in FIG. 11, by closing the on-off valves 535a and 536a of the flushing device 43 and opening the on-off valve 537a, pure water flowing to any one supply line 27c can be flowed to the other supply line 28c. This is preferable because the supply line 28c can be cleaned by flushing with pure water. Further, the configuration of the flushing device 43 of the present invention is not particularly limited as long as the flushing device 43 is provided using a valve, but it is preferable that the valve is provided in one base block in which a flow path is formed. In particular, as shown in FIGS. 12 and 13, a drive unit 532, 533, and 534 that opens and closes the valve bodies 550, 551, and 552 is attached to the main body 531 that is one base block formed with a flow path. It is more preferable that the configuration is provided at the bottom and the bottom. This is preferable because the flushing device 43 can be provided in a compact manner by integrating the on-off valves and the fluid mixing device can be provided in a compact manner.

  In the embodiment of the present invention, there are two supply lines. However, two or more supply lines may be provided, and two or more supply lines may be merged and then merged with other supply lines. Well, two or more fluids can be mixed in any ratio depending on the number of supply lines. In addition, by providing multiple supply lines and opening / closing the on-off valve and manifold valve provided on the most downstream side of each supply line, the fluid to be mixed can be selected and the setting of the flow rate of each supply line can be changed. This is preferable because the mixing ratio can be freely set.

  In the fluid mixing apparatus of the present invention, as shown in FIGS. 14 and 15, it is preferable that adjacent valves and flow rate measuring devices are directly connected without using independent connecting means. Here, being directly connected without using an independent connection means has two concepts, and one concept means that a separate tube or tube is not used. This is a method in which separate members are directly connected via the connection members 46, 47, 48, and 49 for sealing the flow path and changing the direction of the flow path without providing tubes or tubes as shown in FIG. It is. The other concept refers to not using a separate joint. This is a method of directly connecting the end face of the member to be connected or the end face of the connecting portion of the member by interposing a seal member. As a result, the fluid mixing device can be made compact, the installation space can be reduced, the installation work can be facilitated and the working time can be shortened, and the flow path in the fluid mixing device can be shortened to the minimum necessary. Therefore, it is preferable because the fluid resistance can be suppressed.

  In the fluid mixing apparatus of the present invention, as shown in FIGS. 16 and 17, it is preferable that the valve and the flow rate measuring device are arranged in one base block 51 in which a flow path is formed. This is because each component is arranged in one base block 51, the fluid mixing device can be made compact and the installation space can be reduced, the installation work becomes easy and the work time can be shortened, Since the flow path in the fluid mixing device can be shortened to the minimum necessary, the fluid resistance can be suppressed, and the number of parts can be reduced, so that the assembly of the fluid mixing device can be facilitated. It is.

  As shown in FIG. 18, the fluid mixing device of the present invention is preferably configured to be installed in one casing 53. This is preferable because the fluid mixing device is formed as one module by being installed in one casing 53, so that the installation becomes easy and the working time of the installation work can be shortened. Further, the valve 53 and the flow rate measuring device are protected by the casing 53, and the fluid mixing device is made into a black box so that the fluid mixing device adjusted for performing feedback control as in the present invention can be used as a semiconductor manufacturing device or the like. When installed, it is preferable because a user of the semiconductor manufacturing apparatus can prevent the occurrence of problems by easily disassembling the fluid mixing apparatus. Moreover, you may make it the structure which exposed the flow measuring devices 3 and 9 from the casing 53 from the casing as needed.

  The order of installation of the flow rate measuring devices 3, 9, fluid control valves 4, 10, on-off valves 18, 22, and pressure regulating valves 30, 35 of the present invention may be provided in any order, but is not particularly limited. It is preferable that the regulating valves 30 and 35 are positioned upstream of the fluid control valves 4 and 10 and the flow rate measuring devices 3 and 9 in order to attenuate the pulsation at an initial stage when the fluid has a pressure pulsation.

  In addition, the fluid mixing device of the present invention can be used in various factories such as chemistry, semiconductor manufacturing field, medical field, food, etc., as long as the flow rate of fluids in at least two supply lines needs to be controlled at an arbitrary value. Although it may be used in various industries such as fields, it is preferable to be placed in a semiconductor manufacturing apparatus. The pre-process of the semiconductor manufacturing process includes a photoresist process, a pattern exposure process, an etching process, a flattening process, etc., and the concentration of these cleaning waters is controlled by the flow rate ratio of pure water and chemicals. It is preferred to use a fluid mixing device.

In addition, the fluid mixed in the fluid mixing apparatus of the present invention and the ratio of the fluids in the fluid mixing apparatus having at least two or more supply lines include two types of fluids, hydrofluoric acid or hydrochloric acid, and pure water. It is preferable that pure water is mixed at a ratio of 10 to 200 with respect to 1 of hydrofluoric acid or hydrochloric acid.
Further, in the fluid mixing device having at least three supply lines, three types of fluids, that is, ammonia water or hydrochloric acid, hydrogen peroxide water, and pure water, in which ammonia water or hydrochloric acid is 1 to 3 In addition, it is preferable that hydrogen peroxide water is mixed at a ratio of 1 to 5 and pure water at a ratio of 10 to 200, and three types of fluids of hydrofluoric acid, ammonium fluoride, and pure water are fluorinated. It is preferable that 1 to 10 of hydrofluoric acid is mixed with 7 to 10 of ammonium fluoride and 50 to 100 of pure water. The mixed fluid in which these fluids are mixed in the above ratio is suitably used as a chemical solution when performing substrate surface treatment or the like in the pre-process of the semiconductor manufacturing process.

  A mixed fluid that is a mixture of hydrofluoric acid and pure water, or a mixed fluid that is a mixture of hydrochloric acid and pure water is used to remove natural oxide film, normal oxide film, or metal (metal ion) in substrate surface treatment. It is suitable as a chemical solution to be used. The ratio of pure water to hydrofluoric acid or hydrochloric acid 1 is desirably 10 or more in order to suppress the occurrence of unevenness in the substrate due to an increase in the concentration of the chemical solution, and oxidation is caused by the decrease in the concentration of the chemical solution. In order to prevent a reduction in the treatment effect of film removal or metal removal, it is desirable that it is 200 or less. In addition, this mixed fluid can be effectively used at a liquid temperature of 20 ° C to 25 ° C.

  A mixed fluid in which ammonia water, hydrogen peroxide water, and pure water are mixed is used as a chemical solution for removing foreign matters (particles) in the surface treatment of the substrate. A mixed fluid in which hydrochloric acid, hydrogen peroxide water, and pure water is mixed is a metal solution. It is suitable as a chemical solution used for removal and the like. The ratio of aqueous hydrogen peroxide to ammonia water or hydrochloric acid 1 to 3 is preferably in the range of 1 to 5 in order to effectively remove foreign substances and metals. The ratio of pure water to ammonia water or hydrochloric acid 1 to 3 is desirably 10 or more in order to suppress the occurrence of unevenness or surface roughness on the substrate due to an increase in the concentration of the chemical solution, and the concentration of the chemical solution is decreased. In order to prevent the processing effect of removing foreign matters and metals from decreasing, it is desirable that the number is 200 or less. In addition, this mixed fluid can be effectively used at a liquid temperature of 25 ° C. to 80 ° C., and can be used more effectively at a liquid temperature of 60 ° C. to 70 ° C.

  A mixed fluid obtained by mixing hydrofluoric acid, ammonium fluoride, and pure water is suitable for oxide film etching in substrate surface treatment. The ratio of ammonium fluoride to hydrofluoric acid is preferably within a range of 7 to 10 in order to effectively perform oxide film etching. The ratio of pure water to hydrofluoric acid 1 is desirably 50 or more in order to suppress the occurrence of unevenness and surface roughness on the substrate due to an increase in the concentration of the chemical solution, and the concentration of the chemical solution is decreased. In order to prevent a reduction in the processing effect of the oxide film etching, it is desirable that it is 100 or less. In addition, this mixed fluid can be effectively used at a liquid temperature of 20 ° C to 25 ° C.

  The fluid mixing device of the present invention may have a configuration in which a plurality of supply lines through which the same fluid flows are provided. This is, for example, a fluid mixing device composed of one supply line for flowing pure water and two supply lines for flowing hydrochloric acid, and the case of flowing hydrochloric acid to one supply line and the case of flowing to two supply lines. By selecting and allowing the flow rate of hydrochloric acid to be set in a wide range, the mixing ratio of pure water and hydrochloric acid mixed by the fluid mixing device can be set in a wide range.

  Further, the materials of the flow rate measuring devices 3 and 9, the fluid control valves 4 and 10, the on-off valves 18 and 22, and the pressure regulating valves 30 and 35 of the present invention are components that form a flow path in contact with the fluid. Is a fluororesin such as polytetrafluoroethylene (hereinafter referred to as PTFE), polyvinylidene fluoride (hereinafter referred to as PVDF), tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer resin (hereinafter referred to as PFA). It is sufficient if hydrofluoric acid, hydrochloric acid, hydrogen peroxide water, ammonia water, and ammonium fluoride can be flowed in a liquid temperature range of 20 ° C to 80 ° C, and no corrosive fluid can flow. Even if the corrosive gas permeates, it can be used without worrying about corrosion of the valve and the flow meter. Other materials include polypropylene (hereinafter referred to as PP), polyethylene (hereinafter referred to as PE), vinyl chloride resin (hereinafter referred to as PVC), etc. PP is hydrofluoric acid, hydrochloric acid, aqueous ammonia, fluorine. Ammonium fluoride can be used without any problem even if the liquid temperature is in the range of 20 ° C to 80 ° C. It can be used without any problem even if it is flowed in the range of ℃, PVC is hydrochloric acid or ammonia water in the liquid temperature range of 20 ℃ ~ 60 ℃, liquid temperature of hydrofluoric acid, hydrogen peroxide solution, ammonium fluoride is 20 ℃ It can be used without problems even if it is flowed in the range of ˜25 ° C. The material of each component that does not come into contact with the liquid is not particularly limited as long as it has a required strength. Further, the spring 205 used for the fluid control valves 4 and 10 does not come into contact with the liquid, but when a corrosive fluid is allowed to flow, coating with a fluororesin prevents corrosion when the corrosive gas permeates.

The present invention has the structure as described above, and the following excellent effects can be obtained.
(1) By performing feedback control for each supply line of the fluid mixing device, it is possible to stabilize the actual flow rate of the fluid in each supply line so that it becomes a set flow rate with good responsiveness, and mixing at a set ratio In addition, the fluid can be automatically mixed at an arbitrary ratio by changing the set flow rate value.
(2) When the fluid control valve of the present invention is used in the supply line, the fluid can be adjusted to a desired flow rate over a wide flow rate range, and since the structure is compact, the fluid mixing device can be provided small.
(3) When an on-off valve is provided in the supply line, maintenance of the fluid mixing device can be easily performed without causing the fluid to leak by closing the on-off valve, and there is some trouble in the flow path. When this occurs, an emergency shutoff of the fluid can be performed with an on-off valve.
(4) By providing a pressure adjustment valve in the fluid mixing device, even if pulsating fluid flows, the pressure adjustment valve can attenuate the pulsation and stabilize the pressure at a constant pressure, so that the structure is compact. A fluid mixing device can be provided small.
(5) If an on-off valve is arranged in the supply line immediately before the merging portion, fluid can be supplied from a single supply line or fluid can be selected and mixed from each supply line. If a manifold valve is provided at the junction, the fluid mixing device can be made more compact.
(6) When the flushing device is arranged on the most upstream side of each supply line, the other supply lines can be flushed with the fluid flowing through the first supply line by the operation of the flushing device, and cleaning can be easily performed.
(7) By directly connecting the various valves and flow rate measuring instrument of the fluid mixing device, the fluid mixing device can be made compact and the installation space can be reduced, the installation work can be facilitated and the work time can be shortened. The flow path in the apparatus is shortened to the minimum necessary, and the fluid resistance can be suppressed.
(8) If the fluid mixing device is provided in one base block with a flow path, the fluid mixing device can be made compact, and the installation space can be reduced, making the installation work easier and reducing the work time. Since the number of parts is small, the assembly of the fluid mixing device can be facilitated, and the flow path in the fluid mixing device can be shortened to the minimum necessary and the fluid resistance can be suppressed.
(9) When the fluid mixing device is installed in one casing, the installation work time can be shortened, each valve and the flow rate measuring device are protected by the casing, and the fluid mixing device is made into a black box. Therefore, it is possible to prevent a trouble caused by the decomposition from occurring.

  Hereinafter, embodiments of the present invention will be described with reference to examples shown in the drawings. However, it is needless to say that the present invention is not limited to the examples. FIG. 1 is a block diagram schematically showing a first embodiment of the fluid mixing apparatus of the present invention. FIG. 2 is a longitudinal sectional view of the flow rate measuring device. FIG. 3 is a longitudinal sectional view of the fluid control valve. FIG. 4 is a block diagram schematically showing a second embodiment of the fluid mixing apparatus of the present invention. FIG. 5 is a longitudinal sectional view of the on-off valve. FIG. 6 is a block diagram schematically showing a third embodiment of the fluid mixing apparatus of the present invention. FIG. 7 is a longitudinal sectional view of the pressure regulating valve. FIG. 8 is a block diagram schematically showing a fourth embodiment of the fluid mixing apparatus of the present invention. FIG. 9 is a block diagram schematically showing a fifth embodiment of the fluid mixing apparatus of the present invention. FIG. 10 is a sectional view of the manifold valve. FIG. 11 is a block diagram schematically showing a sixth embodiment of the fluid mixing apparatus of the present invention. FIG. 12 is a perspective view schematically showing a flow path of the flushing device of the present invention. FIG. 13 is a longitudinal sectional view taken along line AA in FIG. FIG. 14 is a plan view schematically showing a seventh embodiment of the fluid mixing apparatus of the present invention. FIG. 15 is a sectional view taken along line BB in FIG. FIG. 16 is a plan view schematically showing an eighth embodiment of the fluid mixing apparatus of the present invention. 17 is a cross-sectional view taken along the line CC of FIG. FIG. 18 is a sectional view schematically showing a ninth embodiment of the fluid mixing apparatus of the present invention. FIG. 19 is a longitudinal sectional view of another fluid control valve of the tenth embodiment of the fluid mixing apparatus of the present invention. FIG. 20 is a longitudinal sectional view of another fluid control valve of the eleventh embodiment of the fluid mixing apparatus of the present invention. FIG. 21 is a longitudinal sectional view of another fluid control valve of the twelfth embodiment of the fluid mixing apparatus of the present invention. FIG. 22 is a longitudinal sectional view of another pressure regulating valve of the thirteenth embodiment of the fluid mixing apparatus of the present invention. FIG. 23 is a longitudinal sectional view of another flow rate measuring device of the fourteenth embodiment of the fluid mixing apparatus of the present invention. FIG. 24 is a longitudinal sectional view of another flow rate measuring device according to the fifteenth embodiment of the fluid mixing apparatus of the present invention.

  Hereinafter, a fluid mixing apparatus according to a first embodiment of the present invention will be described with reference to FIGS.

  The fluid mixing device is formed from two supply lines, a first supply line 1 and a second supply line 2. The first supply line 1 is connected in the order of the flow rate measuring device 3 and the fluid control valve 4, and a control unit 5 is provided. The second supply line 2 is connected in the order of the flow rate measuring device 9 and the fluid control valve 10, and is connected to the control unit 11. Is provided. A merging portion 15 of the supply lines 1 and 2 is provided on the most downstream side of the first and second supply lines 1 and 2. Each configuration is as follows.

  Reference numerals 3 and 9 denote flow rate measuring devices which are ultrasonic flow meters for measuring the flow rate of the fluid. The flow rate measuring devices 3 and 9 are provided in parallel with the inlet channel 371, the straight channel 372 suspended from the inlet channel 371, and the inlet channel 371 suspended from the straight channel 372. The ultrasonic transducers 374 and 375 are arranged opposite to each other at positions where the side walls of the inlet and outlet channels 371 and 373 intersect with the axis of the straight channel 372. The ultrasonic vibrators 374 and 375 are covered with a fluororesin, and wirings extending from the vibrators 374 and 375 are connected to calculation units 6 and 12 of the control units 5 and 11 described later. The ultrasonic transducers 374 and 375 of the flow rate measuring devices 3 and 9 are made of PFA.

  4 and 10 are fluid control valves (pneumatic needle valves) that control the flow rate of the fluid by changing the opening area of the flow path according to the operating pressure. The fluid control valves 4 and 10 include a main body 301, a cylinder 302, a bonnet 303, a first diaphragm 304, a valve body 305, a second diaphragm 306, a rod 307, a diaphragm presser 308, and a spring 309.

  A main body 301 made of PTFE is provided with a cylindrical valve chamber 310 in the upper part, and an inlet channel 311 and an outlet channel 312 are provided in the lower part in communication with the valve chamber 310. An opening 313 connected to the outlet channel 312 is provided at the center of the bottom of the valve chamber, and an opening 314 connected to the inlet channel 311 is provided around the opening 313. The cross-sectional shape of the opening 314 is circular, but when the opening 313 is enlarged in order to control the flow rate over a wide range, the opening 314 is formed in the peripheral part centered on the opening 313 provided at the center of the bottom of the valve chamber. It is desirable to form a substantially crescent shape. An annular groove 330 into which the seal portion of the first diaphragm 304 is fitted is provided on the upper surface of the main body 301.

  Reference numeral 302 denotes a PVC cylinder, which has a through hole 315 at the center of the bottom, a step 335 on the inner surface of the bottom, and a breathing port 316 on the side. The cylinder 302 sandwiches and fixes the peripheral portions of the main body 1 and the first diaphragm 304 and sandwiches and fixes the peripheral portions of the bonnet 303 and the second diaphragm 306. The breathing port 316 provided on the side surface of the cylinder 302 is provided for discharging the gas when the fluid passes through the first diaphragm 304 as a gas.

  303 is a bonnet made of PVC, and is provided with a working fluid communication port 317 and an exhaust port 318 for introducing compressed air at the top. In this embodiment, the working fluid communication port 317 is provided in the upper part of the bonnet 303, but may be provided in the side surface. Note that the exhaust port 318 may be omitted if it is not necessary for supplying compressed air. Further, an annular groove 331 into which the seal portion 327 of the second diaphragm 306 is fitted is provided at the lower portion of the peripheral side portion. The main body 301, cylinder 302, and bonnet 303 described above are integrally fixed by bolts and nuts (not shown).

  Reference numeral 304 denotes a PTFE first diaphragm, which has a mounting portion 320 fitted and fixed to the rod 307 at a position above the shoulder 319 with the shoulder 319 as the center, and a valve body 305 at the lower position. The joint portion 332 is provided integrally and projecting, and a thin film portion 321 and a thick portion 322 and a thick portion 322 following the thin film portion 321 are provided in a portion extending in the radial direction from the shoulder portion 319. A seal portion 323 is provided at the peripheral edge of the two, and these are integrally formed. The thickness of the thin film portion 321 is set to about 1/10 of the thickness of the thick portion 322. The method of fixing the rod 307 and the attachment portion 320 may be not only fitting but also screwing or bonding. The joint 332 and the valve body 305 are preferably screwed together. The seal portion 323 located at the outer peripheral edge of the first diaphragm 304 is formed in an L-shaped cross section in the axial direction, and is fitted into the annular groove 330 of the main body 301 via the O-ring 336, and the bottom of the cylinder 302 Is pressed and fixed by an annular protrusion 328 provided on the surface.

  Reference numeral 305 denotes a PTFE valve body, which is screwed and fixed to a joint portion 332 provided at a lower portion of the first diaphragm 306. The valve body 305 is not limited to the shape as in the present embodiment, but may be a spherical valve body or a conical valve body in accordance with a desired flow rate characteristic. Further, a valve body with an outer peripheral rib is preferably used in order to perform full closure with the sliding resistance as low as possible.

  306 is a second diaphragm made of an ethylene propylene diene copolymer (hereinafter referred to as EPDM), has a central hole 324, a thick portion 325 in the periphery thereof, an annular protrusion 328 on the upper portion of the thick portion, The thin film portion 326 extending in the radial direction from the thick wall portion 325 and the seal portion 327 provided at the peripheral edge of the thin film portion 326 are integrally formed, and the attachment portion 320 of the first diaphragm 304 is fixed to the bottom portion. The shoulder 329 located at the upper part of the rod 307 is sandwiched and fixed through the center hole 324 by the diaphragm presser 308. In this embodiment, the material used is EPDM, but fluorine-based rubber or PTFE may be used.

  Reference numeral 307 denotes a PVC rod, and a shoulder 329 having an enlarged diameter is provided at the top. A joint portion 334 of a diaphragm presser 308 is screwed into the center of the shoulder portion 329, and the second diaphragm 306 is clamped and fixed. The lower part is arranged in a loosely fitted state in the through hole 315 at the bottom of the cylinder 302, and the attachment part 320 of the first diaphragm 304 is fixed to the lower end part. A spring 309 is fitted between the lower surface of the shoulder portion 329 of the rod 307 and the step portion 335 of the cylinder 302.

  Reference numeral 308 denotes a PVC diaphragm presser, and a joint portion 334 connected to the rod 307 by screwing is provided at the center of the lower surface. Further, an annular groove 333 is provided on the lower surface to be fitted with the annular protrusion 328 of the second diaphragm 306.

  Reference numeral 309 denotes a SUS spring, which is fitted and supported between the lower surface of the shoulder portion 329 of the rod 307 and the stepped portion 335 of the cylinder 302 in a state where movement in the radial direction is prevented. Further, the lower surface of the shoulder portion 329 is always urged upward. The entire surface of the spring 309 is covered with a fluorine resin. The spring 309 can be used as appropriate by changing the spring constant depending on the aperture of the fluid control valve and the operating pressure range, and a plurality of springs may be used.

  Reference numerals 5 and 11 denote control units. The control units 5 and 11 have calculation units 6 and 12 for calculating a flow rate from signals output from the flow rate measuring devices 3 and 9, and control units 7 and 13 for performing feedback control. The calculation units 6 and 12 include a transmission circuit that outputs ultrasonic vibration of a fixed period to the ultrasonic transducer 374 on the transmission side, a reception circuit that receives ultrasonic vibration from the ultrasonic transducer 375 on the reception side, A comparison circuit that compares the propagation times of the ultrasonic vibrations and an arithmetic circuit that calculates a flow rate from the propagation time difference output from the comparison circuit are provided. The control units 7 and 13 have a control circuit that controls the operation pressure of the electropneumatic converters 8 and 14 to be described later so that the flow rate is set to the flow rate output from the calculation units 6 and 12. . In this embodiment, the control units 5 and 11 are provided separately from the fluid mixing device in order to perform centralized control in another place, but may be provided integrally with the fluid mixing device.

  8 and 14 are electropneumatic converters that adjust the operating pressure of the compressed air disposed in the control units 5 and 11. The electropneumatic converters 8 and 14 are composed of electromagnetic valves that are electrically driven to adjust the operation pressure proportionally, and the operation of the fluid control valves 4 and 10 according to the control signals from the control units 5 and 11. Adjust pressure. Note that the electropneumatic converters 8 and 14 may be disposed separately from the control units 5 and 11 without being disposed therein.

  Next, the operation of the fluid mixing apparatus according to the first embodiment of the present invention will be described.

  Here, pure water is introduced into the first supply line 1, and hydrofluoric acid is introduced into the second supply line 2, and mixing is performed so that pure water: hydrofluoric acid = 10: 1. First, the flow rate of pure water flowing into the first supply line 1 is measured by the flow rate measuring device 3, and the operation pressure of the fluid control valve 4 is controlled by the control unit 5 in accordance with the measured flow rate. The most downstream flow rate of the first supply line 1 is set to a set flow rate (the flow rate at which the ratio of the flow rates of the first supply line 1 and the second supply line 2 is 10: 1 and the mixed fluid becomes a set flow rate). It is controlled to become. Further, the flow rate of the hydrofluoric acid flowing into the second supply line 2 is measured by the flow rate measuring device 9, and the operation pressure of the fluid control valve 10 is controlled by the control unit 11 in accordance with the measured flow rate. The flow rate at the most downstream of the second supply line 2 is the set flow rate (the flow rate at which the ratio of the flow rates of the first supply line 1 and the second supply line 2 is 10: 1 and the mixed fluid becomes the set flow rate) It is controlled to become. Pure water and hydrofluoric acid, the flow rates of which are controlled by the first and second supply lines 1 and 2, are merged and mixed in the merge section 15. The mixed fluid (dilute hydrofluoric acid) mixed is used in the processing step of the substrate cleaning apparatus, and the oxide film of the substrate is removed by the mixed fluid in the cleaning apparatus.

  Next, each operation | movement of the flow measuring devices 3 and 9, the fluid control valves 4 and 10, and the control parts 5 and 11 is demonstrated, referring FIG. 1 thru | or FIG.

  The flow rate of pure water or hydrofluoric acid that has flowed into the flow rate measuring instruments 3 and 9 is measured in the straight flow path 372. The ultrasonic vibration is propagated from the ultrasonic vibrator 374 located on the upstream side to the ultrasonic vibrator 375 located on the downstream side with respect to the flow of pure water or hydrofluoric acid. The ultrasonic vibration received by the ultrasonic transducer 375 is converted into an electric signal and output to the calculation units 6 and 12 of the control units 5 and 11. When the ultrasonic vibration propagates from the upstream ultrasonic transducer 374 to the downstream ultrasonic transducer 375 and is received, transmission / reception is instantaneously switched in the arithmetic units 6 and 12 and positioned downstream. Ultrasonic vibration is propagated from the ultrasonic transducer 375 toward the ultrasonic transducer 374 located upstream. The ultrasonic vibration received by the ultrasonic transducer 374 is converted into an electric signal and output to the calculation units 6 and 12 in the control units 5 and 11. At this time, since the ultrasonic vibration propagates against the flow of the fluid in the straight flow path 372, the propagation of the ultrasonic vibration in the fluid is greater than when the ultrasonic vibration is propagated from the upstream side to the downstream side. The speed is delayed and the propagation time is increased. The output electrical signals are measured for propagation times in the calculation units 6 and 12, and the flow rate is calculated from the difference in propagation times. The flow rates calculated by the calculation units 6 and 12 are converted into electrical signals and output to the control units 7 and 13.

  Next, the pure water or hydrofluoric acid that has passed through the flow rate measuring devices 3 and 9 flows into the fluid control valves 4 and 10. The control units 7 and 13 of the control units 5 and 11 output a signal to the electropneumatic converters 8 and 14 so that the deviation is zero from the deviation from the flow rate measured in real time with respect to any set flow rate. Then, the electropneumatic converters 8 and 14 supply the operation pressure corresponding thereto to the fluid control valves 4 and 10 to drive them. The flow rate of pure water or hydrofluoric acid flowing out from the fluid control valves 4 and 10 is determined by the relationship between the pressure adjusted by the fluid control valves 4 and 10 and the pressure loss after the fluid control valves 4 and 10. The higher the regulated pressure, the larger the flow rate. Conversely, the lower the pressure, the smaller the flow rate. Therefore, pure water or hydrofluoric acid is controlled by the fluid control valves 4 and 10 so that the flow rate becomes a constant value at the set flow rate, that is, the deviation between the set flow rate and the measured flow rate is converged to zero. The

  Here, the action | operation with respect to the fluid (pure water or hydrofluoric acid) of the fluid control valves 4 and 10 with respect to the operation pressure supplied from the electropneumatic converters 8 and 14 is demonstrated.

  The fluid control valves 4 and 10 have a maximum fluid flow rate when the compressed air supplied from the working fluid communication port 317 provided in the upper portion of the bonnet 303 is zero, that is, in the open state. At this time, the valve body 305 has a diaphragm retainer 308 joined to the upper portion of the rod 307 by the urging force of the spring 309 fitted between the step portion 335 of the cylinder 302 and the lower surface of the shoulder portion 329 of the rod 307. The upper part is stationary at a position in contact with the bottom surface of the bonnet 302.

  In this state, when the pressure of the compressed air supplied from the working fluid communication port 317 is increased, the bonnet 303 is formed by the thin film portion 326 and the bonnet 303 of the second diaphragm 306 in which the seal portion 327 is fitted to the bonnet 303. Therefore, the compressed air pushes down the diaphragm retainer 308 and the second diaphragm 306 downward, and the valve body 305 is inserted between the opening 313 via the rod 307 and the first diaphragm 304. Here, when the pressure of the compressed air supplied from the working fluid communication port 317 is kept constant, the valve body 305 has the urging force of the spring 309, the lower surface of the thin film portion 321 of the first diaphragm 304, and the lower surface of the valve body 305 from the fluid. It stops at a position that balances the pressure it receives. Accordingly, since the opening area of the opening 313 is reduced by the inserted valve body 305, the flow rate of the fluid is also reduced.

  When the pressure of the compressed air supplied from the working fluid communication port 317 is further increased, the valve body 305 is further pushed down and finally comes into contact with the opening 313 to be fully closed (state shown in FIG. 3).

  Further, when the compressed air is discharged, the pressure in the thin film portion 326 of the second diaphragm 306 in which the seal portion 327 is fitted to the bonnet 303 and the inside of the bonnet 303 sealed by the bonnet 303 decreases, and the spring 309 The urging force becomes larger and pushes up the rod 307. When the rod is raised, the valve body 305 fixed via the first diaphragm 304 is also raised, and the fluid control valve is opened.

  Thereby, the fluid (pure water or hydrofluoric acid) which flows through the supply line of the fluid mixing device by using the fluid control valves 4 and 10 is controlled to be constant at the set flow rate. In addition, the fluid control valves 4 and 10 can perform a compact and stable flow rate adjustment by the above configuration.

  By the above operation, the pure water and hydrofluoric acid flowing into the first and second supply lines of the fluid mixing device are flown by the flow rate measuring devices 3 and 9, the fluid control valves 4 and 10, and the control units 5 and 11, respectively. Then, the flow rate of pure water or hydrofluoric acid is stabilized in the respective supply lines by feedback control so as to become the set flow rate with good responsiveness, merged at the merging unit 15, mixed at a set ratio, and discharged. Moreover, the flow volume which flows into the 1st, 2nd supply lines 1 and 2 is changed into a desired actual flow value by changing the setting flow volume value of the control parts 5 and 11, and pure water and hydrofluoric acid are automatically changed to arbitrary Can be mixed in proportions.

  Next, a fluid mixing apparatus according to a second embodiment of the present invention will be described with reference to FIGS.

  The fluid mixing device is formed by two supply lines, a first supply line 16 and a second supply line 17. The first supply line 16 is connected in the order of an on-off valve 18, a flow rate measuring device 19, and a fluid control valve 20, and a control unit 21 is provided. The second supply line 17 is an on-off valve 22, a flow rate measuring device 23, and a fluid control valve 24. Are connected in this order, and a control unit 25 is provided. At the most downstream side of the first and second supply lines 16 and 17, a junction 26 of the supply lines 16 and 17 is provided. Each configuration is as follows.

  18 and 22 are on-off valves. The on-off valves 18 and 22 are formed by a main body 101, a drive unit 102, a piston 103, a diaphragm presser 104, and a valve body 105.

  A PTFE main body 101 has a valve chamber 106 at the center of the upper end in the axial direction, and an inlet channel 107 and an outlet channel 108 communicating with the valve chamber 106. The inlet channel 107 is connected to each supply line. The outlet channels 108 communicate with the flow rate measuring devices 19, 23. An annular groove 109 is provided outside the valve chamber 106 on the upper surface of the main body 101.

  Reference numeral 102 denotes a PVDF drive unit, which is provided with a cylindrical cylinder part 110 inside, and is fixed to the upper part of the main body 101 with bolts and nuts (not shown). A pair of working fluid supply ports 111 and 112 communicated with the upper side and the lower side of the cylinder unit 110 are provided on the side surface of the drive unit 102.

  Reference numeral 103 denotes a PVDF piston, which is fitted into the cylinder portion 110 of the driving portion 102 so as to be sealed and movable up and down in the axial direction, and a rod portion 113 is provided at the center of the bottom surface.

  A PVDF diaphragm retainer 104 has a through-hole 114 through which the rod portion 113 of the piston 103 penetrates at the center, and is sandwiched between the main body 101 and the drive portion 102.

  Reference numeral 105 denotes a PTFE valve element housed in the valve chamber 106, which is screwed to the tip of the rod portion 113 of the piston 103 that passes through the through hole 114 of the diaphragm retainer 104 and protrudes from the lower surface of the diaphragm retainer 104. In accordance with the vertical movement of the piston 103, it moves up and down in the axial direction. The valve body 105 has a diaphragm 115 on the outer periphery, and the outer peripheral edge of the diaphragm 115 is fitted into the annular groove 109 of the main body 101 and is sandwiched between the diaphragm presser 104 and the main body 101. Since the other structure of the second embodiment is the same as that of the first embodiment, the description thereof is omitted.

  Next, the operation of the fluid mixing apparatus according to the second embodiment of the present invention will be described.

  The operation of the on-off valves 18 and 22 is such that when compressed air is injected from the outside as the working fluid from the working fluid supply port 112, the piston 103 is pushed up by the pressure of the compressed air, so the rod portion 113 joined thereto is moved upward. The valve body 105 joined to the lower end of the rod portion 113 is also lifted upward and the valve is opened.

  On the other hand, when compressed air is injected from the working fluid supply port 111, as the piston 103 is pushed down, the rod portion 113 and the valve body 105 joined to the lower end thereof are also pushed down, and the valve is closed. It becomes. Since other operations of the second embodiment are the same as those of the first embodiment, description thereof is omitted.

  Next, a fluid mixing apparatus according to a third embodiment of the present invention will be described with reference to FIGS.

  The fluid mixing device is formed by two supply lines, a first supply line 27 and a second supply line 28. The first supply line 27 is connected in the order of an on-off valve 29, a pressure adjustment valve 30, a flow rate measuring device 31, and a fluid control valve 32, and a control unit 33 is provided. The second supply line 28 is an on-off valve 34 and a pressure adjustment valve 35. A flow rate measuring device 36 and a fluid control valve 37 are connected in this order, and a control unit 38 is provided. A junction 39 of the supply lines 27 and 28 is provided on the most downstream side of the first and second supply lines 27 and 28. Each configuration is as follows.

  30 and 35 are pressure regulating valves that control the fluid pressure in accordance with the operating pressure. The pressure regulating valves 30 and 35 are formed by a main body 201, a bonnet 202, a spring receiver 203, a piston 204, a spring 205, a first valve mechanism 206, a second valve mechanism 207, and a base plate 208.

  Reference numeral 201 denotes a PTFE main body having a diameter larger than the diameter of the second gap 209 provided open to the bottom at the center of the lower part and the second gap 209 provided open at the top at the upper part. The inlet channel 211 having one gap 210 and communicating with the second gap 209 on the side surface, and the outlet channel 212 communicating with the first gap 210 on the surface facing the inlet channel 211. In addition, a communication hole 213 that communicates the first gap 210 and the second gap 209 and has a diameter smaller than the diameter of the first gap 210 is provided. The upper surface portion of the second gap 209 is a valve seat 214.

  202 is a PVDF bonnet, in which a cylindrical gap 215 and a stepped portion 216 having a diameter larger than that of the gap 215 are provided on the inner peripheral surface of the lower end, and in order to supply compressed air to the inside of the gap 215 on the side surface. An air supply hole 217 that communicates between the air gap 215 and the outside, and a microhole discharge hole 218 for discharging a small amount of compressed air introduced from the air supply hole 217 are provided. Note that the discharge hole 218 may be omitted if it is not necessary for supplying compressed air.

  203 is a flat circular spring receiver made of PVDF, has a through hole 219 in the center, and is fitted into the stepped portion 216 of the bonnet 202 at substantially the upper half. An annular groove 220 is provided on the side surface of the spring receiver 203, and an O-ring 221 is attached to prevent the compressed air from flowing out from the bonnet 202 to the outside.

  Reference numeral 204 denotes a PVDF piston, which has a disk-shaped flange 222 at the top, a piston shaft 223 that protrudes in a cylindrical shape from the center lower portion of the flange 222, and a female screw that is provided at the lower end of the piston shaft 223 The first joint 224 is formed of a portion. The piston shaft 223 is provided with a smaller diameter than the through hole 219 of the spring receiver 203, and the first joint portion 224 is joined to the second joint portion 229 of the first valve mechanism 206 described later by screwing.

  Reference numeral 205 denotes a SUS spring, which is sandwiched between the lower end surface of the flange portion 222 of the piston 204 and the upper end surface of the spring receiver 203. The spring 205 also expands and contracts as the piston 204 moves up and down, but a long free length is preferably used so that the change in load at that time is small.

  Reference numeral 206 denotes a PTFE first valve mechanism, which includes a membrane portion 226 having a cylindrical portion 225 provided so as to protrude upward from the outer peripheral edge portion, a first diaphragm 227 having a thick portion at the center portion, A second joint portion 229 made of a small-diameter male screw provided at the upper end portion of the shaft portion 228 provided to protrude from the center upper surface of the diaphragm 227, and a female formed at the lower end portion protruding from the center lower surface. It has the 3rd junction part 230 screwed together with the 4th junction part 234 of the postscript 2nd valve mechanism body 207 which consists of a thread part. The cylindrical portion 225 of the first diaphragm 227 is sandwiched and fixed between the main body 201 and the spring receiver 203 so that the first valve chamber 231 formed from the lower surface of the first diaphragm 227 is hermetically formed. Yes. The upper surface of the first diaphragm 227 and the gap 215 of the bonnet 202 are sealed through an O-ring 221 to form an air chamber filled with compressed air supplied from the air supply hole 217 of the bonnet 202. .

  Reference numeral 207 denotes a PTFE second valve mechanism body, which is provided inside the second gap 209 of the main body 201 and provided with a larger diameter than the communication hole 213, and protrudes from the upper end surface of the valve body 232. A shaft portion 233, a fourth joint portion 234 comprising a male screw portion that is joined and fixed to the third joint portion 230 provided at the upper end thereof, and a rod provided so as to protrude from the lower end surface of the valve body 232 235, and a second diaphragm 237 having a cylindrical protrusion 236 that extends in the radial direction from the lower end surface of the rod 235 and protrudes downward from the peripheral edge. The cylindrical protrusion 236 of the second diaphragm 237 is sandwiched between a protrusion 239 of the base plate 208 and the main body 201, which will be described later, so that a second gap 209 of the main body 201 and the second diaphragm 237 are formed. The second valve chamber 238 is sealed.

  Reference numeral 208 denotes a PVDF base plate having a protruding portion 239 for holding and fixing the cylindrical protruding portion 236 of the second diaphragm 237 of the second valve mechanism 207 between the main body 201 at the upper center. A notch recess 240 is provided at the upper end, and a breathing hole 241 communicating with the notch recess 240 is provided on the side surface. The main body 201 is passed between the bonnet 202 and fixed with bolts and nuts (not shown). is doing. In this embodiment, the spring 205 is provided in the gap 215 of the bonnet 202 to urge the piston 204, the first valve mechanism 206, and the second valve mechanism 207 upward. A configuration may be adopted in which the piston 204, the first valve mechanism 206, and the second valve mechanism 207 are urged upward by being provided in the notch recess 240 of the base plate 208. Since the other structure of the third embodiment is the same as that of the second embodiment, the description thereof is omitted.

  Next, the operation of the fluid mixing apparatus according to the third embodiment of the present invention will be described.

  The operation of the pressure regulating valves 30 and 35 with respect to the operating pressure supplied from the electropneumatic converter is as follows. The valve body 232 of the second valve mechanism 207 includes the repulsive force of the spring 205 sandwiched between the flange 222 of the piston 204 and the spring receiver 203, and the fluid pressure on the lower surface of the first diaphragm 227 of the first valve mechanism 206. Due to this, a force for urging upward acts, and a force for urging downward by the operating pressure on the upper surface of the first diaphragm 227 is exerted. More precisely, although the lower surface of the valve body 232 and the upper surface of the second diaphragm 237 of the second valve mechanism 207 are subjected to fluid pressure, their pressure receiving areas are substantially equal, so the force is almost offset. . Therefore, the valve body 232 of the second valve mechanism 207 is stationary at a position where the above-described three forces are balanced.

  When the operating pressure supplied from the electropneumatic converter is increased, the force that pushes down the first diaphragm 227 increases, so that the fluid control formed between the valve body 232 of the second valve mechanism 207 and the valve seat 214 is increased. Since the opening area of the part 242 increases, the pressure of the first valve chamber 231 can be increased. Conversely, when the operating pressure is decreased, the opening area of the fluid control unit 242 is decreased and the pressure is also decreased. Therefore, an arbitrary pressure can be set by adjusting the operation pressure.

  In this state, when the upstream fluid pressure increases, the pressure in the first valve chamber 231 increases instantaneously. Then, the force that the lower surface of the first diaphragm 227 receives from the fluid is greater than the force that the upper surface of the first diaphragm 227 receives from the compressed air due to the operating pressure, and the first diaphragm 227 moves upward. Accordingly, the position of the valve body 232 also moves upward, so that the opening area of the fluid control unit 242 formed between the valve seat 214 and the pressure in the first valve chamber 231 is reduced. Eventually, the position of the valve body 232 moves to a position where the three forces are balanced and stops. At this time, if the load of the spring 205 does not change significantly, the pressure inside the gap 215, that is, the force received by the upper surface of the first diaphragm 227 is constant, so that the pressure received by the lower surface of the first diaphragm 227 is substantially constant. Therefore, the fluid pressure on the lower surface of the first diaphragm 227, that is, the pressure in the first valve chamber 231 is almost the same as the original pressure before the upstream pressure increases.

  When the upstream fluid pressure decreases, the pressure in the first valve chamber 231 also decreases instantaneously. Then, the force that the lower surface of the first diaphragm 227 receives from the fluid is smaller than the force that the upper surface of the first diaphragm 227 receives from the compressed air due to the operating pressure, and the first diaphragm 227 moves downward. Accordingly, the position of the valve body 232 also moves downward, so that the opening area of the fluid control unit 242 formed between the valve seat 214 and the fluid pressure in the first valve chamber 231 is increased. Eventually, the position of the valve body 232 moves to a position where the three forces are balanced and stops. Accordingly, the fluid pressure in the first valve chamber 231 is substantially the same as the original pressure, as in the case where the upstream pressure has increased.

  As a result, a constant fluid pressure is applied by the pressure adjusting valves 30 and 35, so that the flow rate is self-sustained by the operation of the pressure adjusting valves 30 and 35 even if the upstream pressure of the fluid flowing into the supply line of the fluid mixing device fluctuates. Therefore, even if instantaneous pressure fluctuations such as pulsation of the pump occur, it is possible to prevent the measurement value from being difficult to read due to the pulsation and to perform stable fluid control. Since other operations of the third embodiment are the same as those of the second embodiment, description thereof is omitted.

  Next, a fluid mixing apparatus according to a fourth embodiment of the present invention will be described with reference to FIG.

  In the fluid mixing device of this embodiment, in the third embodiment, an opening / closing valve 40 is provided immediately before the merging portion 39a of the first supply line 27a, and an opening / closing valve 41 is provided immediately before the merging portion 39a of the second supply line 28a. Is provided. The on-off valves 40 and 41 have the configuration shown in FIG. 5, and the configuration of each supply line is the same as that of the third embodiment, so the description thereof is omitted.

  Next, the operation of the fluid mixing apparatus according to the fourth embodiment of the present invention will be described.

  Here, pure water is allowed to flow into the first supply line 27a, and hydrofluoric acid is allowed to flow into the second supply line 28a, and mixing is performed so that pure water: hydrofluoric acid = 10: 1. When the on-off valves 40 and 41 are in the open state, the pure water and hydrofluoric acid whose flow rates are controlled by the first and second supply lines 27a and 28a are merged at the merge section 39a, and the set ratio (first supply) The ratio of the flow rates of the line 27a and the second supply line 28a is mixed at 10: 1), and the mixture is discharged at the set flow rate. The mixed fluid mixed is introduced into the cleaning tank of the substrate cleaning device from the fluid mixing device, and the oxide film on the substrate is removed. When the on-off valve 40 is open and the on-off valve 41 is closed, only pure water controlled by the first supply line 27a flows out. When the on-off valve 40 is closed and the on-off valve 41 is in an open state, only the hydrofluoric acid controlled by the second supply line 28a flows out. Since the operation of each supply line is the same as in the third embodiment, the description thereof is omitted.

  With the above operation, the opening / closing valves 40 and 41 are provided immediately before the junction 39a, so that the pure water of the first supply line 27a, the hydrofluoric acid of the second supply line 28a, and the mixed fluid of each fluid are selected and supplied. Each can be drained at any flow rate.

  Next, based on FIG. 9, FIG. 10, the fluid mixing apparatus which is the 5th Example of this invention is demonstrated.

  In the third embodiment, the fluid mixing apparatus of the present embodiment has a configuration in which a manifold valve 42 is provided at the junction of the first and second supply lines 27b and 28b. Each configuration is as follows.

  Reference numeral 42 denotes a manifold valve. The manifold valve 42 is formed by a main body 501, a first valve body 510, a second valve body 511, and drive units 512 and 513.

  Reference numeral 501 denotes a main body, and a cylindrical first valve chamber 503 and a second valve chamber 504 communicated by a connection flow path 502 are provided on the upper portion of the main body 501. A first series opening 505 is provided in the center of the bottom of the first valve chamber 503, and a first flow path 507 communicating with the first supply line 27 b is provided in the first series opening 505. A second communication port 506 is provided at the bottom center of the second valve chamber 504, and a second flow path 508 communicating with the second supply line 28 b is provided at the second communication port 506. The first valve chamber 503 is provided with a branch channel 509 through which fluid mixed in the manifold valve flows out. The first flow path 507 and the second flow path 508 are provided in parallel on the same side surface of the main body 501, and the branch flow path 509 is provided in a direction orthogonal to the flow paths 507 and 508.

  Reference numeral 510 denotes a first valve body that opens and closes the first series opening 505, and is accommodated in the first valve chamber 503. Reference numeral 511 denotes a second valve body that opens and closes the second communication port 506 and is accommodated in the second valve chamber 504. Reference numeral 512 denotes a drive unit that opens and closes the first valve body 510, and reference numeral 513 denotes a drive unit that opens and closes the second valve body 511. The configuration of the drive units 512 and 513 is the same as that of the drive unit 102 of the on-off valve in FIG. Since the configuration of each supply line is the same as that of the third embodiment, the description thereof is omitted.

  Next, the operation of the fluid mixing apparatus according to the fifth embodiment of the present invention will be described.

  Here, pure water is allowed to flow into the first supply line 27b, and hydrofluoric acid is allowed to flow into the second supply line 28b, and mixing is performed so that pure water: hydrofluoric acid = 10: 1. The first valve body 510 is raised by the drive unit 512 of the manifold valve 42 to open the first communication port 505, and the second valve body 511 is raised by the drive unit 513 to open the second communication port 506. In this case (state of FIG. 13), the pure water controlled by the first supply line 27b flows into the first valve chamber 503 through the first flow path 507, and hydrofluoric acid controlled by the second supply line 28b. Flows into the second valve chamber 504 through the second flow path 508, and the pure water and hydrofluoric acid merge in the second valve chamber 504, and set ratio (the first supply line 27b and the second supply line). The ratio of the flow rate of 28b is mixed at 10: 1), and flows out from the branch channel 509 at the set flow rate. The mixed fluid mixed is introduced into the cleaning tank of the substrate cleaning device from the fluid mixing device, and the oxide film on the substrate is removed.

  Similarly, when the drive units 512 and 513 are driven to open the first series port 505 and the second communication port 506 to be closed, the second supply line 28b is closed and does not flow, but the first supply The pure water controlled by the line 27 b flows out from the branch flow path 509 through the first flow path 507, the first valve chamber 503, and the second valve chamber 504.

  Similarly, when the drive units 512 and 513 are driven to close the first communication port 505 and the second communication port 506 to the open state, the first supply line 27b is closed and does not flow, and the second supply The hydrofluoric acid controlled by the line 28 b flows out from the branch channel 509 through the second channel 508 and the second valve chamber 504. Since the operation of each supply line is the same as in the third embodiment, the description thereof is omitted.

  With the above operation, by providing the manifold valve 42, it is possible to selectively supply pure water of the first supply line 27b, hydrofluoric acid of the second supply line 28b, and mixed fluids of the respective fluids. Can be discharged at a flow rate of In addition, with the above configuration, the fluid mixing device can be switched in a compact manner at the junction.

  Next, a fluid mixing apparatus according to a sixth embodiment of the present invention will be described with reference to FIGS.

  In the third embodiment, the fluid mixing apparatus of the present embodiment has a configuration in which a flushing device 43 is provided on the most upstream side of the first and second supply lines. The configuration of the flushing device 43 is as follows.

  43 is a flushing device installed on the most upstream side of the device having two supply lines. The flushing device 43 is formed by a main body 531 in which a flow path is formed, and a drive unit A532, a drive unit B533, and a drive unit C534 that open and close the flow path. Each configuration is as follows.

  Reference numeral 531 denotes a PTFE main body. A substantially mortar-shaped valve chamber A535 and a valve chamber B536 are provided on the upper portion of the main body 531, and a valve chamber C537 is provided on the lower portion of the main body 531. The valve chamber B536 and the valve chamber C537 are provided on the upper and lower portions of the main body 531. Are arranged on substantially the same axis. A valve seat is formed on the bottom surface of the valve chamber A535 to fully seal the flow path by pressure contact with a valve body A550 described later. The valve passage A538 and the valve chamber A535 communicate with a communication port provided at the center of the valve seat. It has an outlet channel A539 that communicates. Similarly to the valve chamber A535, the valve chamber B536 and the valve chamber C537 are formed with valve seats on the bottom surface, and the inlet channel B540 and the outlet channel B541 that communicate with the valve chamber B536, respectively, and the inlet channel that communicates with the valve chamber C537, respectively. A C542 and an outlet channel C543 are provided.

  Further, a first inlet 544 and a second inlet 545 are provided on one side surface of the main body 531, and a first outlet 546 and a second outlet 547 are provided on the other side surface. The flow path communicating with the first inflow port 544 is divided into two flow paths at the first branch portion 548, and the flow paths communicating with the inlet flow path A538 and the inlet flow path C542 are formed. The channel communicating with the first outlet 546 communicates with the outlet channel A539. The channel communicating with the second inlet 545 communicates with the inlet channel B540. The flow path communicating with the second outlet 547 is divided into two flow paths at the second branch portion 549, and the flow paths communicating with the outlet flow path B541 and the outlet flow path C543 are formed. The first outlet 546 communicates with the first supply line 27c, and the second outlet 547 communicates with the second supply line 28c.

  At this time, the flow path formed in communication from the first inlet 544 to the first outlet 546 through the inlet flow path A538, the valve chamber A535, and the outlet flow path A539 is referred to as a first line that is a main line. The flow path formed from the inlet 545 to the second outlet 547 through the inlet channel B540, the valve chamber B536, the outlet channel B541, and the second outlet 547 is referred to as a second line. A flow path formed in communication with the second branch portion 549 through C542, the valve chamber C537, and the outlet flow path C543 is referred to as a connection line.

  Reference numerals 532, 533, and 534 denote PVDF driving units A, B, and C. The drive unit A532, the drive unit B533, and the drive unit C534 include a valve body A550, a valve body B551, and a valve body C552 that open and close the valve by pressing and separating from the valve seats of the valve chamber A535, the valve chamber B536, and the valve chamber C537. Is provided. The configuration of the drive units 532, 533, and 534 is the same as that of the drive unit 102 of the on-off valve in FIG.

  Here, the on-off valve 535a in FIG. 14 corresponds to a portion formed by the valve chamber A535 in FIG. 15 and FIG. 16 and the valve body A550 of the drive unit A532, and the on-off valve 536a is formed by the valve body B536 and the valve body B551 of the drive unit B533. In the formed portion, the on-off valve 537a corresponds to a portion formed by the valve chamber C537 and the valve body C552 of the drive unit C534. Since the configuration of each supply line is the same as that of the third embodiment, the description thereof is omitted.

  Next, the operation of the fluid mixing apparatus according to the sixth embodiment of the present invention will be described.

  Here, pure water is introduced into the first supply line 27c, hydrochloric acid is introduced into the second supply line 28c, and mixing is performed so that pure water: hydrochloric acid = 20: 1. In the normal mode, the valve body A550 and the valve body B551 are pulled up to open the valve chamber A535 and the valve chamber B536, and the valve body C552 is pushed down (upward in the drawing) to close the valve chamber C537. (State of FIG. 13). At this time, pure water and hydrochloric acid flow independently through the first line and the second line. When pure water is introduced into the first inlet 544 and hydrochloric acid is introduced into the second inlet 545, the pure water that has entered the first inlet 544 passes through the inlet channel A538, the valve chamber A535, and the outlet channel A539. Then, the hydrochloric acid flowing into the first supply line 27c from the first outlet 546 and flowing into the second inlet 545 passes through the inlet channel B540, the valve chamber B536, and the outlet channel B541 and passes through the second outlet 547. It will flow into the two supply lines 28c. Since the operation of each supply line is the same as that of the third embodiment, description thereof is omitted. At this time, the first supply line 27c and the second supply line 28c are mixed at a flow rate ratio of 20: 1 and flow out at a set flow rate. The mixed fluid that has flowed out is introduced into the cleaning tank of the substrate cleaning apparatus from the fluid mixing apparatus, and the oxide film on the substrate is removed.

  In the flushing mode, the valve body A550 and the valve body B551 are pushed downward to close the valve chamber A535 and the valve chamber B536, and the valve body C552 is lifted upward to open the valve chamber C537. At this time, the first line and the second line are connected by the connecting line, and a flow path that flows from the first inlet 544 to the second outlet 547 is formed. Here, the pure water flowing through the first supply line 27c passes through the first inlet 544 through the first branch 548, the inlet channel C542, the valve chamber C537, the outlet channel C543, and the second branch 549, and then passes through the second branch 549. The pure water can flow from the outlet 547 to the second supply line 28c, whereby the second supply line 28c can be flushed with pure water to clean the second supply line 28c.

  By providing the flushing device 43 of the present embodiment by the above operation, the normal mode and the flushing mode can be easily selected, and cleaning can be performed by flushing each supply line in the flushing mode. Further, the flushing device 43 of the present embodiment can be provided as a single member by forming a flow path in one base block which is the main body 531, and the flow path of the flushing apparatus 43 is connected to a pipe or the like. Therefore, the number of parts can be reduced, the flushing device 43 can be formed more compactly, and the flow path can be shortened, so that the fluid resistance can be suppressed.

  Next, a fluid mixing apparatus according to a seventh embodiment of the present invention will be described with reference to FIGS.

  In the fluid mixing device of the present embodiment, in the third embodiment, the open / close valves 29d and 34d and the pressure regulating valves 30d and 35d of the first and second supply lines 27d and 28d are arranged in one base block 44, The fluid control valves 32d and 37d of the first and second supply lines 27d and 28d are disposed in one base block 45, and the flow rate measuring devices 30d and 35d are connected to the base blocks 44 and 45, respectively, by connecting members 46, 47 and 48, respectively. , 49 are connected. This is a direct connection method when a separate tube or tube is not used. Each configuration is as follows.

  44 is a base block in which the on-off valves 29d and 34d and the pressure regulating valves 30d and 35d of the first and second supply lines 27d and 28d are arranged. On the base block 45, the on / off valve 29d and the pressure regulating valve 30d of the first supply line 27d and the on / off valve 34d and the pressure regulating valve 35d of the second supply line 28d communicate in this order. Is formed.

  45 is a base block in which the fluid control valves 32d and 37d of the first and second supply lines 27d and 28d are disposed. In the base block 45, a flow path of the fluid control valve 32d of the first supply line 27d and a flow path of the fluid control valve 36d of the second supply line 28d are formed. Further, the outlet flow path of the fluid control valve 32d of the first supply line 27d communicates with the outlet flow path of the fluid control valve 37d of the second supply line 28d to form a joining portion 39d, and the outlet 50 from the joining portion 39d. Communicating with Note that the merging portion 39d may not be provided in the base block 45 but may merge the flow paths that have flowed out from the supply lines of the base block 45.

  46, 47, 48, and 49 are connecting members that change the direction of the flow path. The direction of the flow path is changed from the outlet flow path of the pressure regulating valves 30d and 35d via the connecting members 46 and 48, and directly connected to the inlet flow path of the flow rate measuring devices 31d and 36d, respectively. The direction of the flow path is changed from the outlet flow path via the connection members 47 and 49, and each is directly connected to and communicated with the inlet flow path of the fluid control valves 32d and 37d. The configuration and operation of the valves and flow rate measuring instruments of each supply line are the same as those in the third embodiment, and the description thereof is omitted.

  Thereby, since the adjacent valve and the flow rate measuring device are directly connected without using a tube or pipe which is an independent connecting means, the fluid mixing device can be made compact and the space of the installation place can be reduced. Moreover, installation work becomes easy and working time can be shortened, and fluid resistance can be suppressed by shortening the flow path in the fluid mixing apparatus.

  Next, based on FIG. 16, FIG. 17, the fluid mixing apparatus of the 8th Example of this invention is demonstrated.

  In the third embodiment, the fluid mixing device of the present embodiment is the same as that of the first and second supply lines 27e and 28e, the on-off valves 29e and 34e, the pressure regulating valves 30e and 35e, the flow rate measuring devices 31e and 36e, and the fluid control valve. 32e and 37e are arranged in one base block 51. Each configuration is as follows.

  Reference numeral 51 denotes a base block in which on-off valves 29e and 34e, pressure regulating valves 30e and 35e, flow rate measuring devices 31e and 36e, and fluid control valves 32e and 37e of the first and second supply lines 27e and 28e are arranged. In the base block 51, the opening / closing valve 29e of the first supply line 27e, the pressure adjustment valve 30e, the flow rate measuring device 31e, and the flow path of the fluid control valve 32e are connected to the opening / closing valve 34e of the second supply line 28e, the pressure adjustment valve 35e, The flow paths of the flow rate measuring device 36e and the fluid control valve 37e are formed to communicate with each other in this order. Further, the outlet flow path of the fluid control valve 32e of the first supply line 27e communicates with the outlet flow path of the fluid control valve 37e of the second supply line 28e to form a joining portion 39e, and the outlet 52 from the joining portion 39e. Communicate with. In addition, you may make it join the flow path which flowed out from each supply line of the base block 51, without providing the junction part 39e in the base block 51. FIG. The configuration and operation of the valves and flow rate measuring instruments of each supply line are the same as those in the third embodiment, and the description thereof is omitted.

  Thereby, since the fluid mixing apparatus is disposed in one base block 51 in which the flow path is formed, it is possible to make the fluid mixing apparatus compact and to reduce the installation space. In addition, the installation work becomes easy, the work time can be shortened, the fluid resistance can be suppressed by shortening the flow path in the fluid mixing device, and the number of parts can be reduced, so that the fluid mixing device can be assembled. Can be easily.

  Next, a fluid mixing apparatus according to a ninth embodiment of the present invention will be described with reference to FIG. In the present embodiment, only the longitudinal sectional view on the second supply line side shown in FIG. 19 will be described.

  In the fluid mixing apparatus of the present embodiment, in the third embodiment, the on-off valve 34f, the flow rate measuring device 35f, the fluid control valve 36f, and the throttle valve 37f of the first and second supply lines 28f are accommodated in one casing 53. It is arranged. Each configuration is as follows.

  53 is a PVDF casing. In the casing 53, an open / close valve 34f, a pressure adjusting valve 35f, a flow rate measuring device 36f, and fluid control valves 37f and 32f are fixed to the bottom surface of the casing 53 in this order by bolts and nuts (not shown). The control unit is fixedly installed above the casing 53 above the flow rate measuring device 35f. The connection structure of the valve and the flow rate measuring instrument of the present embodiment is the same as that of the seventh embodiment, and the configuration and operation of the valve and the flow rate measuring instrument of each supply line are the same as those of the third embodiment, so the description thereof is omitted.

  Thereby, since the fluid mixing apparatus is installed in one casing 53 and the fluid mixing apparatus becomes one module, the installation becomes easy, the work time of the installation work can be shortened, and each component is protected by the casing. In addition, it is possible to prevent the fluid mixing device from being easily disassembled by making the fluid mixing device into a black box, and it is possible to prevent troubles caused by disassembling the fluid mixing device by an unfamiliar user.

  Next, a tenth embodiment of the present invention will be described with reference to FIG. Here, the case where the fluid control valves 4 and 10 of the first embodiment are the fluid control valves 4a of this embodiment which are other fluid control valves will be described. In addition, the control unit (not shown) of the present embodiment uses the signal output from the control unit 7 of the fluid control valve 4a without providing the electropneumatic converter 8 in the control unit 5 of the first embodiment. This configuration is transmitted to the electric drive unit 344 and operates the motor unit 359 of the electric drive unit 344.

  4a is a fluid control valve (electric needle valve) that controls the flow rate of the fluid by changing the opening area of the flow path by the electric drive unit 344 described later. The fluid control valve 4 a is formed by a main body 341, a diaphragm 342, a valve body 343, and an electric drive unit 344.

  Reference numeral 341 denotes a PTFE main body, which is provided with a substantially mortar-shaped valve chamber 345 at the top, and an inlet channel 346 and an outlet channel 347 are provided to communicate with the valve chamber 345, respectively. A valve seat 348 that shuts off the flow path by pressure contact with a later-described valve body 343 is formed on the bottom surface, and an opening 349 that controls the flow rate is formed at the center of the bottom portion by moving the later-described valve body 343 up and down. Further, an annular recess 350 in which an annular seal portion 353 of a diaphragm 342 described later is fitted is provided on the upper surface of the main body 341.

  Reference numeral 342 denotes a PTFE diaphragm, which includes a thick portion 351 provided in a bowl shape at the center, and a circular thin film portion 352 and a thin film portion 352 provided in a radial direction extending from the outer peripheral surface of the thick portion 351. An annular seal portion 353 having an L-shaped cross section in the axial direction is provided on the outer peripheral edge portion, and the annular seal portion 353 is fitted into the annular recess 350 of the main body 341. Below the thick portion 351, a joint portion 354 is provided that is screwed to the valve body 343, and above the thick portion 351 is screwed to a stem 365 that is connected to the shaft of the motor portion 359. A mounting portion 355 is provided.

  Reference numeral 343 denotes a PTFE valve element, which is screwed to the joint portion 354 of the diaphragm 342. Further, the valve body 343 is provided with a tapered portion 356 whose diameter is reduced downward.

  Reference numeral 344 denotes an electric drive unit that moves the valve body 343 up and down. The electric drive unit 344 is formed of a lower bonnet 357 and an upper bonnet 358, and is provided with a motor unit 359, a gear, and the like.

  A PVDF lower bonnet 357 is provided with a recess 360 opened upward, and a through hole 361 is provided at the center of the bottom of the recess 360. A fitting portion 362 to which an annular seal portion 353 of a diaphragm 342 is fitted is provided on the lower surface of the lower bonnet 357, and the diaphragm 342 is sandwiched and fixed by the main body 341 and the lower bonnet 357.

  358 is an upper bonnet made of PVDF, which is provided with a recessed portion 363 that opens downward, a lower bonnet 357 and an upper bonnet 358 are joined together to form a storage portion 364 by both recessed portions 360 and 363, and a motor portion 359 described later is installed Has been.

  Reference numeral 359 denotes a motor unit installed in the storage unit 364. The motor unit 359 has a stepping motor, and a stem 365 connected to the motor shaft is provided below the motor unit 359. The stem 365 is positioned in the through hole 361 of the lower bonnet 357, and a connection portion 366 that is screwed with the attachment portion 355 of the diaphragm 342 is provided at the lower portion of the stem 365.

  The main body 341 of the fluid control valve 4a, the lower bonnet 357 and the upper bonnet 358 of the electric drive unit 344 are joined together by bolts and nuts (not shown).

  Next, the operation of the tenth embodiment of the present invention will be described.

  The operation of the fluid control valve 4a by transmission from the electric drive unit 344 is as follows. In the fluid control valve 4a, when the motor unit 359 of the electric drive unit 344 moves the stem 365 up and down, the valve body 343 is moved up and down via the stem 365 and the diaphragm 342, and inserted into the opening 349 and the opening 349. The flow rate of the fluid flowing through the fluid control valve 4a can be adjusted by changing the opening area with the tapered portion 356 of the valve body 343. Further, by operating the electric drive unit 344 to drive the valve body 343 downward and seating the valve body 343 on the valve seat 348, the valve body 343 can close the opening 349 and shut off the fluid. .

  Thus, the fluid flowing through the supply line of the fluid mixing device is controlled to be constant at the set flow rate by using the fluid control valve 4a. Further, the fluid control valve 4a can perform a compact and stable flow rate adjustment by the above-described configuration. The electric drive unit 344 includes a motor unit 359 that is electrically driven. Since the motor unit 359 can easily perform fine drive control, the response is stable and stable according to the signal from the control unit. Flow rate control can be performed, and an excellent effect is demonstrated for fluid control at a minute flow rate.

  Next, an eleventh embodiment of the present invention will be described with reference to FIG. Here, the case where the fluid control valves 4 and 10 of the first embodiment are the fluid control valves 4b of the present embodiment, which are other fluid control valves, will be described.

  4b is a fluid control valve (pneumatic pinch valve) that controls the flow rate of the fluid by changing the opening area of the flow path according to the operating pressure. The fluid control valve 4 b is formed by a tube body 401, a cylinder body 402, a piston 403, a pinch element 404, a body 405, a connection body receiver 406, and a connection body 407.

  Reference numeral 401 denotes a tube made of a composite of fluoro rubber and silicon rubber through which fluid flows. The tubular body 401 is formed to have a desired thickness by laminating several layers of PTFE sheets impregnated with, for example, silicon rubber. In this embodiment, the material of the tube 401 is a composite of fluororubber and silicon rubber, but it may be an elastic body such as EPDM, silicon rubber, fluororubber, or a composite thereof, and is not particularly limited. .

  Reference numeral 402 denotes a PVDF cylinder body. The cylinder body 402 has a cylinder part 408 having a cylindrical space, and a disk-like cylinder lid 409 is screwed to the upper end part via an O-ring. A through hole 410 through which a connecting portion 416 of a piston 403, which will be described later, and an elliptical slit 411 for storing a pressing element 404, which is described later, are provided continuously at the center of the lower surface of the cylinder body 402. Further, on the peripheral side surface of the cylinder body 402, a first space portion 412 formed by an inner peripheral surface and a bottom surface of the cylinder portion 408 and a lower end surface of the piston 403, an inner peripheral surface of the cylinder portion 408, and a cylinder lid 409 are formed. Air ports 414 and 415 for introducing compressed air are provided in a second space 413 formed by the lower end surface of the piston 403 and the upper end surface of the piston 403, which will be described later.

  Reference numeral 403 denotes a PVDF piston. The piston 403 has a disk shape, and an O-ring is mounted on the peripheral side surface thereof. The piston 403 is fitted on the inner peripheral surface of the cylinder portion 408 so as to be vertically movable and sealed. A coupling portion 416 is provided to hang from the center of the piston 403 and penetrates a through-hole 410 provided in the central portion of the lower surface of the cylinder body 402 in a sealed state. Has been. In this embodiment, a post-pressing element 404, which will be described later, is fixed to the front end of a fixing bolt 417 provided through the connecting part 416 by screwing. A method for fixing the pinch element 404 is not particularly limited, and the connecting portion 416 may be formed in a rod shape and screwed, bonded, or welded to the tip portion.

  404 is a pinch made of PVDF, and the cross section of the portion that presses the tube body 401 is formed in a semi-cylindrical shape. The sandwiching element 404 is fixed to the connecting portion 416 of the piston 403 so as to be orthogonal to the flow path axis, and is accommodated in an oval slit 411 of the cylinder body 402 when the valve is opened.

  Reference numeral 405 denotes a PVDF main body joined and fixed to the lower end surface of the cylinder main body 402 with bolts and nuts (not shown). On the channel axis of the main body 405, a groove 418 having a rectangular cross section for receiving the tube 401 is provided. A groove 419 for receiving the fitting portion 421 of the post-connector receiver 406 is provided at both ends of the groove 418 deeper than the groove 418, and further, the groove 419 is provided at the tip of the fitting portion 421 of the post-connector receiver 406. A concave groove 420 is provided to receive the provided slip prevention protrusion 422.

  Reference numeral 406 denotes a PVDF connector receiver installed at both ends of the main body 405. A fitting portion 421 having a rectangular cross section to be fitted into grooves 419 provided at both ends of the main body 405 is formed at one end portion of the coupling body receiver 406, and a groove 419 of the main body 405 is formed at the bottom of the tip of the fitting portion 421. A protrusion 422 for preventing slipping is provided to be fitted into a concave groove 420 provided in the groove. On the other hand, a receiving port 423 having the same cross-section for receiving a hexagonal flange portion 430 of a connection body 407 to be described later is provided at the other end portion, and a male screw portion 424 is provided on the outer peripheral surface thereof. An annular flange 425 having a diameter substantially the same as the diagonal length of the fitting portion 421 is provided on the outer peripheral surface located between the male screw portion 424 and the fitting portion 421. The flange part 425 is in contact with the cylinder main body 402 and the main body 405 and prevents the connecting body receiver 406 from moving into the inside of both main bodies. Inside the connecting body receiver 406, a through hole 426 having substantially the same diameter as the outer diameter of the tube body 401 is provided in the fitting part 421, and the insertion part of the connecting body 407 to be described later that leads to the receiving port 423. A through-hole 427 having a diameter substantially the same as the outer diameter of the tube 401 fitted and expanded to 429 is provided. Therefore, a step portion 428 is formed on the inner peripheral surface of the coupling body receiver 406. The tubular body 401 is sandwiched and fixed in the connecting body receiver 406 by the step portion 428.

  Reference numeral 407 denotes a PTFE connector. One end portion of the connecting body 407 is provided with an insertion portion 429 that is formed with an outer diameter larger than the inner diameter of the tube body 401 and into which the tube body 401 is expanded. A flange 430 having a hexagonal cross section is provided at the center of the outer periphery of the coupling body 407 so as to have a larger diameter than both ends. The coupling body 407 has the collar portion 430 fitted into the receiving port 423 of the coupling body receiver 406, and the cap nut 431 engaged with the collar portion 430 is screwed into the male screw portion 424 provided on the outer periphery of the coupling body receiver 406. As a result, the coupling body 406 is fitted and fixed so as not to rotate. Here, an inlet channel 432 is formed inside one of the connecting bodies 407 installed at both ends of the main body 405, and an outlet channel 433 is formed inside the other connecting body 407.

  Next, the operation of the eleventh embodiment of the present invention will be described.

  The operation of the fluid control valve 4b with respect to the operating pressure supplied from the electropneumatic converter is as follows. When compressed air is supplied from the air port 415 to the second space portion 413, the compressed air in the first space portion 412 is discharged from the air port 414, and the piston 403 starts to descend due to the air pressure. Along with this, the pinching element 404 also descends via a connecting portion 416 provided below the piston 403. When compressed air is supplied from the air port 414 to the first space portion 412, the compressed air in the second space portion 413 is discharged from the air port 415, and the piston 403 starts to rise due to the air pressure. Thus, the sandwiching element 404 rises through a connecting portion 416 provided below the piston 403. As the piston 403 moves up and down, the pinch 404 is also moved up and down, so that the pinch 404 changes the opening area of the tube 401, and the flow rate of the fluid flowing through the fluid control valve 4b can be adjusted. Further, when compressed air is supplied from the air port 415 to the second space portion 413, the lower end surface of the piston 403 reaches the bottom surface of the cylinder portion 408, and the lowering of the piston 403 and the sandwiching element 404 stops, thereby closing the tube body 401. , The fluid can be shut off.

  Thus, the fluid flowing through the supply line of the fluid mixing device is controlled to be constant at the set flow rate by using the fluid control valve 4b. In addition, the fluid control valve 4b can perform a compact and stable flow rate adjustment with the above-described configuration, and the sliding portion of the valve is configured separately from the flow path, so that contamination and particles are generated in the flow path. Since the flow path is straight and there is no portion to stay, even if the slurry is used in a line for transporting the slurry, the slurry is difficult to adhere to the location where the flow rate is controlled, so that stable fluid control can be maintained.

  Next, a twelfth embodiment of the present invention will be described with reference to FIG. Here, the case where the fluid control valves 4 and 10 of the first embodiment are the fluid control valves 4c of the present embodiment which are other fluid control valves will be described. In addition, the control unit (not shown) of the present embodiment uses the signal output from the control unit 7 of the fluid control valve 4c without providing the electropneumatic converter 8 in the control unit 5 of the first embodiment. This configuration is transmitted to the electric drive unit 441 to operate the motor unit 452 of the electric drive unit 441.

  4c is a fluid control valve that controls the flow rate of the fluid by changing the opening area of the flow path by an electric drive unit 441 described later. The fluid control valve 4 c is formed by an electric drive unit 441, a main body 442, a pipe body 443, and a connection unit 444.

  Reference numeral 442 denotes a PTFE main body, and a groove 445 having a rectangular cross section for receiving a post-described tube body 443 is provided on the flow path axis of the main body 442.

  Reference numeral 443 denotes a tube body made of a composite of a PTFE sheet and silicon rubber, and a flow path is formed in the main body 442.

  Reference numeral 444 denotes a PTFE connecting portion, which is engaged with a groove 445 of the main body 442 and a bottom portion of the lower bonnet 450 of the electric drive unit 441 described later, and is connected to both side surfaces of the lower bonnet 450 and the main body 442. A coupling body 447 engaged with the coupling body receiver 446 and connected to the tube body 443; and a cap nut fixed to the coupling body receiver 446 by screwing the coupling body 447 to the outer peripheral surface of the coupling body receiver 446. 448. Here, an inlet channel 456 is formed inside one of the connecting bodies 447 installed at both ends of the main body 442, and an outlet channel 457 is formed inside the other connecting body 447.

  Reference numeral 441 denotes an electric drive unit that moves the pincer 449 up and down. The electric drive unit 441 is formed of a lower bonnet 450 and an upper bonnet 451, and is provided with a motor unit 452, a gear, and the like.

  Reference numeral 450 denotes a PVDF lower bonnet having a recess 453 that is open on the upper surface, and a through hole 454 in the center of the bottom of the recess 453. An elliptical slit 455 is provided at the center of the lower end surface of the lower bonnet 450 with the through hole 454 as the center.

  Reference numeral 451 denotes an upper bonnet made of PVDF, which is provided with a recess 458 opened on the lower surface. The lower bonnet 450 and the upper bonnet 451 are joined together to form a storage portion 459 by the both recesses 453 and 458. Has been.

  Reference numeral 452 denotes a motor unit installed in the storage unit 459. The motor unit 452 has a stepping motor, and a stem 460 connected to the motor shaft is provided below the motor unit 452. The stem 460 is located in the through hole 454 of the lower bonnet 450, and a pinching element 449 is connected to the lower part of the stem 460, and the stem 460 is moved up and down by driving the motor unit 452. Is pressed or separated from the tube 443.

  Reference numeral 449 denotes a pincer whose portion for pressing the tube body 443 is formed in a semi-cylindrical cross section, and is fixed to the stem 460 so as to be orthogonal to the tube body 443, and is provided on the lower end surface of the lower bonnet 450 when the valve is fully opened. It is accommodated in an elliptical slit 455.

  The main body 442 of the fluid control valve 4c, the lower bonnet 450 and the upper bonnet 451 of the electric drive unit 441 are joined by bolts and nuts (not shown).

  Next, the operation of the twelfth embodiment of the present invention will be described.

  The operation of the fluid control valve 4c by transmission from the electric drive unit 441 is as follows. When the motor unit 452 of the electric drive unit 441 moves the stem 460 up and down, the pinching element 449 provided at the lower portion of the stem 460 is moved up and down, and the pinching element 449 deforms the tube body 443 so that the flow path of the tube body 443 is obtained. By changing the opening area, the flow rate of the fluid flowing through the flow control valve 4c can be adjusted. Further, when the stem 460 is driven upward, the pinch 449 provided at the lower portion of the stem 460 is raised, and the upper end of the oval slit provided at the lower end of the lower bonnet 450 is the upper end of the pinch 449. , The stem 460 and the pinch 449 stop rising and are fully opened. Further, when the stem 460 is driven downward, the pincer 449 descends and presses the tube body 443 to close the flow path and enter a fully closed state.

  Thus, the fluid flowing through the supply line of the fluid mixing device is controlled to be constant at the set flow rate by using the fluid control valve 4c. In addition, the fluid control valve 4c can perform a compact and stable flow rate adjustment with the above-described configuration, and the sliding portion of the valve is configured separately from the flow path, so that contamination and particles are generated in the flow path. Since the flow path is straight and there is no portion to stay, even if the slurry is used in a line for transporting the slurry, the slurry is difficult to adhere to the location where the flow rate is controlled, so that stable fluid control can be maintained. The electric drive unit 441 includes a motor unit 452 that is electrically driven. Since the motor unit 452 can easily perform fine drive control, the response is stable in response to a signal from the control unit. Flow rate control can be performed, and an excellent effect is demonstrated for fluid control at a minute flow rate.

  Next, a thirteenth embodiment of the present invention will be described with reference to FIG. Here, the case where the pressure regulating valves 30 and 35 of the third embodiment are the pressure regulating valves 30a of the present embodiment which are other pressure regulating valves will be described.

  Reference numeral 30a denotes a pressure adjusting valve that adjusts the inflowing fluid pressure to a constant pressure and causes it to flow out. The pressure regulating valve 30 a is formed by a main body 473, a lid body 474, a first diaphragm 475, a second diaphragm 476, and a plug 477.

  473 is a main body made of PVDF and has a substantially cylindrical shape, and its side surface communicates with an inlet channel 472 communicating with a first valve chamber 479 provided inside the main body 473 and an air chamber 478 described later. An air supply port 480 is provided, and an upper peripheral edge of the first valve chamber 479 has a joint portion 481 to which an annular projection 486 of a first diaphragm 475 described later is joined. In addition, a step portion 482 that forms a post-described air chamber 478 together with first and second diaphragms 475 and 476, which will be described later, is provided on the upper portion of the first valve chamber 479.

  Reference numeral 474 denotes a PVDF lid, which has a second valve chamber 483 inside, an outlet channel 471 communicating with the second valve chamber 483 on the outer peripheral side surface, and is joined to the upper end of the main body 473. . An annular groove 484 into which an annular protrusion 489 of a second diaphragm 476 described later is fitted is provided at the peripheral edge of the second valve chamber 483 at the lower end.

  475 is a first diaphragm made of PTFE, which is formed in a donut shape, and an annular joint 485 formed to protrude toward the second diaphragm 476 described later is provided at the center, and the annular joint 485 A sleeve 487 is screwed on the inner peripheral surface. An annular protrusion 486 is provided on the outer peripheral edge, and the annular protrusion 486 is joined to a joint 481 provided inside the main body 473.

  A second diaphragm 476 is made of PTFE, and has an annular joint 488 at the center and an annular protrusion 489 at the outer peripheral edge. The annular protrusion 489 is fitted in the annular groove 484 of the lid body 474 and is sandwiched between the main body 473 and the lid body 474. The pressure receiving area of the second diaphragm 476 is formed to be sufficiently larger than that of the first diaphragm 475. The first and second diaphragms 475 and 476 are integrated by being screwed to the sleeve 487.

  The plug 477 is fixed to the bottom of the first valve chamber 479 of the main body 473 by screwing or the like. The tip of the plug 477 forms a fluid control part 490 with the lower end surface of the sleeve 487, and the opening area of the fluid control part 490 changes with the vertical movement of the sleeve 487, and the inside of the second valve chamber 483 The pressure of the secondary fluid, that is, the fluid pressure on the secondary side is kept constant.

  Reference numeral 478 denotes an air chamber formed by being surrounded by the stepped portion 482 of the main body 473 and the first and second diaphragms 475 and 476. Compressed air is injected into the air chamber 478 from the air supply port 480 and is always maintained at a constant pressure.

  Next, the operation of the thirteenth embodiment of the present invention will be described.

  The pressure regulating valve 30a is supplied with compressed air to the air chamber 478 and is applied with a constant internal pressure, and the first diaphragm 475 is directed upward by the pressure inside the first valve chamber 479, that is, the primary fluid pressure. Force and downward force due to the pressure inside the air chamber 478 are received. On the other hand, the second diaphragm 476 receives a downward force due to the pressure inside the second valve chamber 483, that is, the fluid pressure on the secondary side, and an upward force due to the pressure inside the air chamber 478. The position of the sleeve 487 joined to the first and second diaphragms 475, 476 is determined. The sleeve 487 forms a fluid control portion 490 between the sleeve 487 and the plug 477, and the secondary side fluid pressure is controlled by its area.

  When the primary fluid pressure rises in this state, the secondary fluid pressure and flow rate also temporarily increase. At this time, an upward force is applied to the first diaphragm 475 and a downward force is applied to the second diaphragm 476 by the fluid pressure, but the pressure receiving area of the second diaphragm 476 is designed to be sufficiently larger than that of the first diaphragm 475. Therefore, the downward force becomes larger, and as a result, the sleeve 487 is pushed downward. As a result, the opening area of the fluid control unit 490 decreases, the fluid pressure on the secondary side instantaneously decreases to the original pressure, and the balance between the internal pressure of the air chamber 478 and the fluid pressure is maintained again.

  On the other hand, when the primary side fluid pressure decreases, the secondary side fluid pressure and flow rate also temporarily decrease. At this time, downward force and upward force are applied to the first and second diaphragms 475 and 476, respectively, due to the internal pressure of the air chamber 478. Even in this case, the pressure receiving area is larger in the second diaphragm 476. This becomes more dominant, and the position of the sleeve 487 is pushed upward. As a result, the opening area of the fluid control unit 490 increases, the fluid pressure on the secondary side instantaneously rises to the original pressure, the balance between the internal pressure of the air chamber 478 and the force due to the fluid pressure is maintained again, and the original flow rate is maintained. Is also preserved.

  As a result, even if the upstream pressure of the fluid flowing into the supply line of the fluid mixing device fluctuates by using the pressure regulating valve 30a, the flow rate is independently maintained constant by the operation of the pressure regulating valve 30a. Even if instantaneous pressure fluctuations such as pulsation occur, it is possible to prevent the measurement value from being difficult to read due to the influence of pulsation, and to perform stable fluid control. In addition, since the structure of the flow path is simple and the fluid does not easily stay in the slurry, the slurry is difficult to adhere even if the slurry is flowed to the fluid, and the pressure of the fluid flowing in stably can be kept constant. In combination with the pinch valve of the eleventh embodiment or the twelfth embodiment, the supply line can be used without clogging due to the sticking of the slurry, and the slurry slightly adheres to the inner wall of the line. However, the slurry is cleaned cleanly by performing an operation of periodically flowing pure water and cleaning the inside of the flow path. Further, the pressure regulating valve 30a has a small number of parts and can be easily disassembled and assembled.

  Next, a fourteenth embodiment of the present invention will be described with reference to FIG. Here, the case where the flow rate measuring devices 3 and 9 of the first embodiment are the flow rate measuring device 3a of the present embodiment, which is another ultrasonic flow meter, will be described.

  3a is a flow rate measuring device for measuring the flow rate of the fluid. The flow rate measuring device 3a is provided substantially parallel to the axis of the inlet channel 381, the first rising channel 382 extending from the inlet channel 381, the first rising channel 382 extending from the inlet channel 381, and the first rising channel 382. A straight channel 383, a second rising channel 384 extending from the straight channel 383, and an outlet channel 385 communicating with the second rising channel 384 and provided substantially parallel to the axis of the inlet channel 381. The ultrasonic transducers 386 and 387 are arranged so as to face each other at positions intersecting with the axis of the straight flow path 383 on the side walls of the first and second rising flow paths 382 and 384. The ultrasonic transducers 386 and 387 are covered with a fluororesin, and wirings extending from the transducers 386 and 387 are connected to a calculation unit (not shown) of a control unit (not shown). Note that parts other than the ultrasonic transducers 386 and 387 of the flow rate measuring device 3a are made of PFA.

  Next, the operation of the fourteenth embodiment of the present invention will be described.

  The flow rate of the fluid that has flowed into the fluid measuring instrument 3a is measured in the straight flow path 383. The ultrasonic vibration is propagated from the ultrasonic transducer 386 positioned on the upstream side to the ultrasonic transducer 387 positioned on the downstream side with respect to the fluid flow. The ultrasonic vibration received by the ultrasonic transducer 387 is converted into an electrical signal and output to a calculation unit (not shown) of a control unit (not shown). When the ultrasonic vibration propagates from the upstream ultrasonic transducer 386 to the downstream ultrasonic transducer 387 and is received, transmission / reception is instantaneously switched in the calculation unit, and the ultrasonic transducer located on the downstream side Ultrasonic vibration is propagated from 387 toward the ultrasonic transducer 386 located on the upstream side. The ultrasonic vibration received by the ultrasonic transducer 386 is converted into an electric signal and output to the calculation unit in the control unit. At this time, since the ultrasonic vibration propagates against the flow of the fluid in the straight flow path 383, the propagation of the ultrasonic vibration in the fluid is greater than when the ultrasonic vibration is propagated from the upstream side to the downstream side. The speed is delayed and the propagation time is increased. The output electrical signals are measured for propagation time in the calculation unit, and the flow rate is calculated from the difference in propagation time. The flow rate calculated by the calculation unit is converted into an electric signal and output to a control unit (not shown).

  Thereby, since the flow rate measuring device 3a which is an ultrasonic flowmeter measures a flow rate from the propagation time difference with respect to the flow direction of the fluid, the flow rate can be accurately measured even with a minute flow rate.

  Next, a fifteenth embodiment of the present invention will be described with reference to FIG. Here, a case will be described where the flow rate measuring devices 3 and 9 of the first embodiment are the flow rate measuring device 3b of the present embodiment which is an ultrasonic vortex flowmeter.

  3b is a flow rate measuring device for measuring the flow rate of the fluid. The flow rate measuring device 3b includes a linear flow path 394 including an inlet flow path 391, a vortex generator 392 that generates Karman vortex suspended in the inlet flow path 391, and an outlet flow path 393. On the downstream side wall of the vortex generator 392 in the path 394, ultrasonic transducers 395 and 396 are disposed opposite to each other at positions orthogonal to the flow path axis direction. The ultrasonic vibrators 395 and 396 are covered with a fluororesin, and wiring extending from the vibrators 395 and 396 is connected to a calculation unit (not shown) of a control unit (not shown). Except for the ultrasonic transducers 395 and 396 of the flow rate measuring device 3b, they are made of PTFE.

  Next, the operation of the fifteenth embodiment of the present invention will be described.

  The flow rate of the fluid flowing into the fluid measuring instrument 3b is measured by the straight flow path 394. The ultrasonic vibration is propagated from the ultrasonic vibrator 395 toward the ultrasonic vibrator 396 with respect to the fluid flowing in the straight flow path 394. Karman vortices generated downstream of the vortex generator 392 are generated at a period proportional to the flow velocity of the fluid, and Karman vortices with different vortex directions are alternately generated. When passing, it is accelerated or decelerated in the direction of travel. Therefore, the frequency (period) of the ultrasonic vibration received by the ultrasonic vibrator 396 varies due to the Karman vortex. The ultrasonic vibrations transmitted and received by the ultrasonic transducers 395 and 396 are converted into electric signals and output to a calculation unit (not shown) of a control unit (not shown). In the calculation unit, based on the Karman vortex frequency obtained from the phase difference between the ultrasonic vibration output from the ultrasonic transducer 395 on the transmission side and the ultrasonic vibration output from the ultrasonic transducer 396 on the reception side. The flow rate of the fluid flowing through the straight flow path 394 is calculated. The flow rate calculated by the calculation unit is converted into an electric signal and output to a control unit (not shown).

  As a result, the ultrasonic vortex flowmeter produces more Karman vortices as the flow rate increases, and therefore can accurately measure the flow rate even at a large flow rate, and exhibits an excellent effect in controlling a large flow rate fluid.

  By operating the fourteenth and fifteenth embodiments, the ultrasonic vortex flowmeter generates Karman vortices as the flow rate increases, so it can accurately measure the flow rate even at large flow rates, and is excellent in controlling fluid at large flow rates. Demonstrate.

  Next, a sixteenth embodiment of the present invention having three supply lines will be described.

  In the third embodiment, the fluid mixing apparatus of the present embodiment is provided with a third supply line having the same configuration as the first and second supply lines, and the supply lines merge at the most downstream side of each supply line. It is the structure which has a part (not shown). Since the configuration of each supply line is the same as that of the third embodiment, the description thereof is omitted.

  Next, the operation of the sixteenth embodiment of the present invention will be described.

  Here, pure water is introduced into the first supply line, hydrogen peroxide solution is introduced into the second supply line, ammonia water is introduced into the third supply line, and pure water: hydrogen peroxide solution: ammonia solution = 50: Mix to 2: 1. The flow rate of pure water flowing into the first supply line is controlled by the first supply line, and the flow rate of hydrogen peroxide water flowing into the second supply line is controlled by the second supply line, and ammonia flowing into the third supply line The flow rate of water is controlled by the third supply line and mixed at the ratio set by merging at the junction (the ratio of the flow rate of the first supply line, the second supply line, and the third supply line is 50: 2: 1). Then, the mixed fluid (ammonia hydrogen peroxide) flows out at a set flow rate.

  Similarly, in the present embodiment, the ratio is also set in the case where hydrochloric acid is introduced into the third supply line instead of ammonia water and mixing is performed so that pure water: hydrogen peroxide solution: hydrochloric acid = 20: 1: 1. And the mixed fluid (hydrochloric acid overwater) flows out at a set flow rate.

  Each of the mixed fluids (ammonia overwater, hydrochloric acid overwater) that has flowed out is used in the processing step of the substrate cleaning apparatus. In the cleaning apparatus, first, the substrate is treated for removing foreign substances with ammonia overwater, then rinsed with pure water, and then the substrate is treated for removal of metal with hydrochloric acid overwater, followed by rinsing with pure water, After the substrate is treated for removing the oxide film with dilute hydrofluoric acid (mixed fluid described in Example 1), the substrate is rinsed with pure water and finally the substrate is dried. At this time, by introducing the mixed fluid mixed by the fluid mixing apparatus of the present invention into the cleaning tank as a chemical solution in each step, the chemical solution can be always supplied at a constant mixing ratio, and the substrate cleaning process is stable. It is done.

  Next, a seventeenth embodiment of the present invention having three supply lines will be described.

  Since the structure of the fluid mixing apparatus of the present embodiment is the same as that of the sixteenth embodiment, description thereof is omitted. Next, the operation of the seventeenth embodiment of the present invention will be described.

  Here, pure water is introduced into the first supply line, ammonium fluoride is introduced into the second supply line, hydrofluoric acid is introduced into the third supply line, and pure water: ammonium fluoride: hydrofluoric acid = Mix to 50: 2: 1. The flow rate of pure water that flows into the first supply line is controlled by the first supply line, and the flow rate of ammonium fluoride that flows into the second supply line is controlled by the second supply line, and the fluoride water that flows into the third supply line. The flow rate of hydrogen acid is controlled by the third supply line, and the ratio is set by merging at the junction (the ratio of the flow rates of the first supply line, the second supply line, and the third supply line is 50: 2: 1). Mixed and discharged at a set flow rate. The mixed fluid that has flowed out is used in a processing step of the substrate etching apparatus, and the oxide film is etched on the substrate by the mixed fluid in the etching apparatus.

  The mixed fluid in which the respective fluids are mixed at the ratios of the first, fourth, fifth, sixth, sixteenth, and seventeenth embodiments of the present invention is the surface treatment of the substrate in the previous process of the semiconductor manufacturing process, etc. As long as each of the fluids and their mixing ratio are within the scope of the present invention, mixed fluids suitable for various processes in the pre-process of the semiconductor manufacturing process can be obtained.

It is a block diagram which shows typically the 1st Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of a flow measuring device. It is a longitudinal cross-sectional view of a fluid control valve. It is a block diagram which shows typically the 2nd Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of an on-off valve. It is a block diagram which shows typically the 3rd Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of a pressure control valve. It is a block diagram which shows typically the 4th Example of the fluid mixing apparatus of this invention. It is a block diagram which shows typically the 5th Example of the fluid mixing apparatus of this invention. It is sectional drawing of a manifold valve. It is a block diagram which shows typically the 6th Example of the fluid mixing apparatus of this invention. It is a perspective view which shows typically the flow path of the flushing apparatus of this invention. It is a longitudinal cross-sectional view which follows the AA line of FIG. It is a top view which shows typically the 7th Example of the fluid mixing apparatus of this invention. It is sectional drawing which follows the BB line of FIG. It is a top view which shows typically the 8th Example of the fluid mixing apparatus of this invention. It is sectional drawing which follows the CC line of FIG. It is sectional drawing which shows typically the 9th Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of the other fluid control valve of the 10th Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of the other fluid control valve of the 11th Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of the other fluid control valve of the 12th Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of the other pressure regulation valve of the 13th Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of the other flow measuring device of the 14th Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of the other flow measuring device of the 15th Example of the fluid mixing apparatus of this invention. It is a block diagram of the conventional flow control apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 1st supply line 2 2nd supply line 3 Flow rate measuring device 4 Fluid control valve 5 Control part 9 Flow rate measuring instrument 10 Fluid control valve 11 Control part 15 Merge part 16 1st supply line 17 2nd supply line 18 On-off valve 19 Flow rate Measuring instrument 20 Fluid control valve 21 Control section 22 On-off valve 23 Flow rate measuring instrument 24 Fluid control valve 25 Control section 26 Junction section 27 First supply line 28 Second supply line 29 On-off valve 30 Pressure regulating valve 31 Flow measuring instrument 32 Fluid control Valve 33 Control unit 34 On-off valve 35 Pressure regulating valve 36 Flow rate measuring device 37 Fluid control valve 38 Control unit 39 Junction unit 40 On-off valve 41 On-off valve 42 Manifold valve 43 Flushing device 44 Base block 45 Base block 46 Connection member 47 Connection member 48 Connection member 49 Connection member 51 Base block 53 Casing

Claims (20)

A fluid mixing device for mixing each fluid flowing in at least two supply lines (1, 2) in an arbitrary ratio,
Each of the supply lines (1, 2)
Fluid control valves (4, 10) for controlling the flow rate of the fluid by changing the opening area of the flow path;
A flow rate measuring device (3, 9) that measures the actual flow rate of the fluid, converts the measured value of the actual flow rate into an electrical signal, and outputs it;
Based on the deviation between the measured value of the actual flow rate and the set flow rate value, a command signal for controlling the opening area of the fluid control valve (4, 10) is sent to the fluid control valve (4, 10) or the fluid control valve ( 4 and 10), and a controller (5, 11) for outputting to a device for operating the fluid mixer.   2. The fluid mixing device according to claim 1, wherein each of the supply lines (1, 2) further comprises an on-off valve (18, 22) for opening or shutting off a fluid flow.   The fluid mixing device according to claim 1 or 2, wherein each of the supply lines (1, 2) further comprises a pressure regulating valve (30, 35) for attenuating pressure fluctuations of the fluid.   The merging portion (15) of the supply lines (1, 2) is provided on the most downstream side of each of the supply lines (1, 2), according to any one of claims 1 to 3. The fluid mixing device as described.   5. The fluid mixing device according to claim 4, wherein on-off valves (40, 41) are respectively arranged in the supply lines (1, 2) immediately before the junction (15).   The fluid mixing device according to claim 4, wherein the merging portion (15) is a manifold valve (42) for merging the supply lines (1, 2) into one flow path. A main line provided with an on-off valve (535a) connected to the most upstream side of any one of the supply lines (1, 2);
And at least one other line provided with an on-off valve (536a) connected to the most upstream side of the other supply line,
A flushing device (43) in which the upstream side of the on-off valve (535a) of the main line and the downstream side of the on-off valve (536a) of another line are communicated via the on-off valve (537a). The fluid mixing device according to any one of claims 1 to 6, wherein the fluid mixing device is characterized in that:   The fluid mixing device according to any one of claims 1 to 7, wherein the various valves and the flow rate measuring device are directly connected without using independent connecting means.   The fluid mixing device according to any one of claims 1 to 7, wherein the various valves and the flow rate measuring device are arranged in one base block.   The fluid mixing device according to any one of claims 1 to 7, wherein the various valves and the flow rate measuring device are accommodated in a single casing. The fluid control valves (4, 10) are
The upper part has a valve chamber (310), an inlet channel (311) and an outlet channel (312) each communicating with the valve chamber (310), and the inlet channel at the center of the bottom of the valve chamber (310). A main body (301) provided with an opening (313) through which (311) communicates, a through hole (315) in the center of the bottom, and a breathing port (316) on a side surface. A cylinder (302) that clamps and fixes one diaphragm (304) and a bonnet that is provided with a working fluid communication port (317) in the upper portion and clamps and fixes the peripheral portions of the cylinder (302) and the second diaphragm (306) (303) is fixed integrally, and the first diaphragm (315) is mounted on the shoulder (319) and the lower portion of the rod (307), which is positioned on the shoulder (319) and is described below. Part (320), shoulder ( 19) a joint portion (332) to which the post valve body (305) is fixed below, a thin film portion (321) extending radially from the shoulder portion (319), and a thick wall following the thin film portion (321) The seal portion (323) provided at the peripheral portion of the portion (322) and the thick wall portion (322) is integrally formed, and the joint portion (332) is described later in the opening portion (313) of the valve chamber (310). The valve body (305) that enters and exits as the rod (307) moves up and down is fixed. On the other hand, the second diaphragm (306) has a central hole (324), and a thick part (325) around the center hole (324). And a thin film portion (326) extending in the radial direction from the thick wall portion (325) and a seal portion (327) provided at the peripheral edge of the thin film portion (326) are integrally formed, and the first diaphragm is formed at the bottom portion. The rod to which the attachment part (320) of (304) is fixed 307) is fixed to the shoulder (329) located at the top of the center through the central hole (324) by the diaphragm presser (308). The rod (307) has a cylinder (302) below the cylinder (302). There is a loose fit in the bottom through hole (315), and there is radial movement between the step (335) of the cylinder (302) and the lower surface of the shoulder (329) of the rod (307). The fluid mixing device according to any one of claims 1 to 10, wherein the fluid mixing device is supported by a spring (309) fitted in a prevented state. The fluid control valves (4, 10) are
An electric drive part (344) having a motor part (359) contained in an upper bonnet (358) and a lower bonnet (357), and a stem (365) connected to the shaft of the motor part (359) move up and down. Diaphragm (342) having a valve body (343), and an inlet channel (346) and an outlet channel communicating with the valve chamber (345) isolated from the electric drive unit (344) by the diaphragm (342), respectively. The fluid mixing device according to any one of claims 1 to 10, further comprising a flow rate control unit including a main body (341) having (347). The fluid control valves (4, 10) are
A tube body (401) made of an elastic body, a cylinder body (402) having an internal cylinder portion (408) and a cylinder lid (409) integrally provided on the upper portion, and an inner peripheral surface of the cylinder portion (408) It has a connecting portion (416) that is vertically movable and is slidably contacted in a sealed state and is suspended from the center so as to pass through a through hole (410) provided in the center of the bottom surface of the cylinder body (402) in a sealed state. The piston (403) is stored in an elliptical slit (411) which is fixed to the lower end of the coupling portion (416) of the piston (403) and which is provided on the bottom surface of the cylinder body (408) perpendicular to the flow path axis. A first groove (418) and a first groove (418) that are joined and fixed to the lower end surface of the sandwiched indenter (404) and the cylinder main body (402) and receive the tube body (401) on the flow path axis. Both ends of Further, the main body (405) in which the second groove (419) for receiving the connector receiver (406) is provided deeper than the first groove (418), and the second groove (419) of the main body (405) at one end. A pair of couplings having a fitting part (421) to be fitted to the other end, a coupling body (407) receiving port (423) inside the other end, and a through hole (426) for receiving the pipe body (401). A first space portion (412) provided on the peripheral side surface of the body receiver (406) and the cylinder body (402) and surrounded by the bottom surface and inner peripheral surface of the cylinder portion (408) and the lower end surface of the piston (403). And a pair of air ports (414, 415) communicating with the second space (413) surrounded by the lower end surface of the cylinder lid (409), the inner peripheral surface of the cylinder portion (408), and the upper surface of the piston (403), respectively. ) Or fluid mixing device according to any one of claims 10. The fluid control valves (4, 10) are
An electric drive part (441) having a motor part (452) enclosed in an upper bonnet (451) and a lower bonnet (450), and a stem (460) connected to the shaft of the motor part (452) move up and down. The sandwiched indenter (449), the tubular body (443) made of an elastic body, and the groove (445) which is bonded and fixed to the lower end surface of the lower bonnet (450) and receives the tubular body (443) on the flow path axis. The fluid mixing device according to any one of claims 1 to 10, wherein the fluid mixing device is provided. The pressure regulating valve (30, 35),
A second gap (209) provided open to the bottom at the center of the lower part, an inlet channel (211) communicating with the second gap (209), and a second gap ( 209) having a larger diameter than the first gap (210), the outlet channel (212) communicating with the first gap (210), the first gap (210), and the second gap (209). And a communication hole (213) having a diameter smaller than the diameter of the first gap (210), and the upper surface of the second gap (209) is a valve seat (214). )When,
A bonnet having a cylindrical gap (215) communicating with an air supply hole (217) and a discharge hole (218) provided on a side surface or an upper surface, and having a step portion (216) on the inner peripheral surface of the lower end (202)
A spring receiver (203) fitted into the step (216) of the bonnet (202) and having a through hole (219) at the center, and a first smaller diameter than the through hole (219) of the spring receiver (203) at the lower end. A piston (204) having a joint portion (224) and having a flange portion (222) provided in the upper portion and fitted into the gap (215) of the bonnet (202) so as to be movable up and down;
A spring (205) clamped and supported by the lower end surface of the flange (222) of the piston (204) and the upper end surface of the spring receiver (203);
The center where the peripheral portion is sandwiched and fixed between the main body (201) and the spring receiver (203) and covers the first gap (210) of the main body (201) to form the first valve chamber (231). The first diaphragm (227) having a thickened portion and the first joint (224) of the piston (204) through the through hole (219) of the spring receiver (203) are joined and fixed at the center of the upper surface. A first valve mechanism (206) having a second joint (229) and a third joint (230) provided through the communication hole (213) of the main body (201) in the center of the lower surface;
A valve body (232) positioned inside the second gap (209) of the main body and having a larger diameter than the communication hole (213) of the main body, and a first valve mechanism protruding from the upper end surface of the valve body (232) A fourth joint (234) to be joined and fixed to the third joint (230) of the body (206), a rod (235) provided protruding from the lower end surface of the valve body (232), and a lower part of the rod (235) A second valve mechanism (207) having a second diaphragm (237) provided extending in the radial direction from the end surface;
A protrusion (239) located below the main body (201) and sandwiching and fixing the peripheral edge of the second diaphragm (237) of the second valve mechanism (207) with the main body (201) at the upper center; A base plate (208) provided with a notch recess (240) at the upper end of the protrusion (239) and a breathing hole (241) communicating with the notch recess (240);
As the piston (204) moves up and down, the opening area of the fluid control unit (242) formed by the valve body (232) of the second valve mechanism (207) and the valve seat (214) of the main body (201) is increased. The fluid mixing device according to any one of claims 3 to 14, wherein the fluid mixing device is configured to change. The pressure regulating valve (30, 35),
A main body (473) having a first valve chamber (479), a stepped portion (482) provided at an upper portion of the first valve chamber (479), and an inlet channel (472) communicating with the first valve chamber (479). ), A second valve chamber (483) and an outlet channel (471) communicating therewith, a lid body (474) joined to the upper portion of the main body (473), and a peripheral portion of the first valve chamber (479) A first diaphragm (475) joined to the upper peripheral edge of the first diaphragm, a second diaphragm (476) having a peripheral edge sandwiched between the main body (473) and the lid (474), and first and second diaphragms (475). 476) and a sleeve (487) joined to both annular joints (485, 488) provided in the center of the shaft 476 and movable in the axial direction, and a sleeve fixed to the bottom of the first valve chamber (479) ( 487) and the lower end of the fluid control unit (490) An air chamber (478) comprising a plug (477) formed and surrounded by the inner peripheral surface of the step portion (482) of the main body (473) and the first and second diaphragms (475, 476). A pressure receiving area of the second diaphragm (476) is larger than a pressure receiving area of the first diaphragm (475), and an air supply port (480) communicating with the air chamber (478) is provided in the main body. The fluid mixing apparatus according to claim 3, wherein the fluid mixing apparatus is characterized in that:   The flow meter is an ultrasonic flow meter, Karman vortex flow meter, ultrasonic vortex flow meter, impeller flow meter, electromagnetic flow meter, differential pressure flow meter, positive displacement flow meter, hot wire flow meter or mass flow rate. The fluid mixing device according to any one of claims 1 to 16, wherein the fluid mixing device is a meter.   At least two kinds of fluids of hydrofluoric acid or hydrochloric acid and pure water are mixed at a ratio of 10 to 200 of pure water with respect to 1 of hydrofluoric acid or hydrochloric acid. The fluid mixing device according to any one of claims 1 to 17.   At least three kinds of fluids of ammonia water or hydrochloric acid, hydrogen peroxide water, and pure water are ammonia water or hydrochloric acid 1-3, hydrogen peroxide water 1-5, and pure water 10 The fluid mixing apparatus according to any one of claims 1 to 17, wherein the fluid mixing apparatus is mixed at a ratio of ~ 200.   At least three kinds of fluids of hydrofluoric acid, ammonium fluoride, and pure water have a ratio of 7 to 10 for ammonium fluoride and 50 to 100 for pure water with respect to 1 for hydrofluoric acid. The fluid mixing device according to any one of claims 1 to 17, wherein the fluid mixing device is mixed with the fluid mixing device.

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