JP2007171929A - 揺動体装置、光偏向器、及びそれを用いた光学機器 - Google Patents

揺動体装置、光偏向器、及びそれを用いた光学機器 Download PDF

Info

Publication number
JP2007171929A
JP2007171929A JP2006287054A JP2006287054A JP2007171929A JP 2007171929 A JP2007171929 A JP 2007171929A JP 2006287054 A JP2006287054 A JP 2006287054A JP 2006287054 A JP2006287054 A JP 2006287054A JP 2007171929 A JP2007171929 A JP 2007171929A
Authority
JP
Japan
Prior art keywords
vibration
elastic support
temperature
frequency
vibration system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2006287054A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007171929A5 (enrdf_load_stackoverflow
Inventor
Takahisa Kato
貴久 加藤
Yukio Furukawa
幸生 古川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2006287054A priority Critical patent/JP2007171929A/ja
Publication of JP2007171929A publication Critical patent/JP2007171929A/ja
Publication of JP2007171929A5 publication Critical patent/JP2007171929A5/ja
Withdrawn legal-status Critical Current

Links

Images

Landscapes

  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP2006287054A 2005-11-22 2006-10-23 揺動体装置、光偏向器、及びそれを用いた光学機器 Withdrawn JP2007171929A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006287054A JP2007171929A (ja) 2005-11-22 2006-10-23 揺動体装置、光偏向器、及びそれを用いた光学機器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005337074 2005-11-22
JP2006287054A JP2007171929A (ja) 2005-11-22 2006-10-23 揺動体装置、光偏向器、及びそれを用いた光学機器

Publications (2)

Publication Number Publication Date
JP2007171929A true JP2007171929A (ja) 2007-07-05
JP2007171929A5 JP2007171929A5 (enrdf_load_stackoverflow) 2009-12-17

Family

ID=38298506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006287054A Withdrawn JP2007171929A (ja) 2005-11-22 2006-10-23 揺動体装置、光偏向器、及びそれを用いた光学機器

Country Status (1)

Country Link
JP (1) JP2007171929A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053633A (ja) * 2007-08-29 2009-03-12 Canon Inc 光偏向装置及び光学走査装置
JP2009169401A (ja) * 2007-12-21 2009-07-30 Canon Inc 光学走査装置
JP2011043554A (ja) * 2009-08-19 2011-03-03 Nippon Signal Co Ltd:The プレーナ型アクチュエータ
WO2012147167A1 (ja) * 2011-04-26 2012-11-01 トヨタ自動車株式会社 ミラー装置
US8520282B2 (en) 2007-12-21 2013-08-27 Canon Kabushiki Kaisha Optical scanning apparatus configured to deflect and scan laser beam by using MEMS mirror
JP2015099271A (ja) * 2013-11-19 2015-05-28 キヤノン電子株式会社 振動装置、光走査装置、それを用いた画像形成装置および映像投射装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053633A (ja) * 2007-08-29 2009-03-12 Canon Inc 光偏向装置及び光学走査装置
JP2009169401A (ja) * 2007-12-21 2009-07-30 Canon Inc 光学走査装置
US8520282B2 (en) 2007-12-21 2013-08-27 Canon Kabushiki Kaisha Optical scanning apparatus configured to deflect and scan laser beam by using MEMS mirror
JP2011043554A (ja) * 2009-08-19 2011-03-03 Nippon Signal Co Ltd:The プレーナ型アクチュエータ
WO2012147167A1 (ja) * 2011-04-26 2012-11-01 トヨタ自動車株式会社 ミラー装置
JP2015099271A (ja) * 2013-11-19 2015-05-28 キヤノン電子株式会社 振動装置、光走査装置、それを用いた画像形成装置および映像投射装置

Similar Documents

Publication Publication Date Title
KR100901237B1 (ko) 광 편향기 및 이를 이용하는 광학 기구
US7474165B2 (en) Oscillating device, optical deflector and optical instrument using the same
JP4881073B2 (ja) 光偏向器、及びそれを用いた光学機器
JP4574396B2 (ja) 光偏向器
JP5170983B2 (ja) 光偏向器、及びそれを用いた光学機器
US7684102B2 (en) Oscillator device and image forming apparatus using the same
JP5400925B2 (ja) 揺動体装置、光偏向器、及びそれを用いた光学機器
JP5614167B2 (ja) 光偏向器、光走査装置、画像形成装置及び画像投影装置
JP5500016B2 (ja) 光偏向器、光走査装置、画像形成装置及び画像投影装置
US20100150612A1 (en) Oscillator device and method of manufacturing the same
JP2007316443A (ja) 光偏向器、及びそれを用いた光学機器
US7436566B2 (en) Oscillating device, optical deflector and method of controlling the same
KR20070117487A (ko) 진동자 장치, 광 편향기 및 그를 이용한 광학기기
JP2007171929A (ja) 揺動体装置、光偏向器、及びそれを用いた光学機器
US8254006B2 (en) Oscillator device and optical deflector using the same
JP2004069731A (ja) 振動ミラー、振動ミラーの振れ角制御方法、光書込装置及び画像形成装置
JP5554895B2 (ja) 揺動構造体、及び揺動構造体を用いた揺動体装置
JP2007171930A (ja) 揺動体装置、光偏向器、及びその制御方法
JP2009031643A (ja) 揺動体装置、光偏向器およびそれを用いた画像形成装置
JP5341372B2 (ja) 揺動体装置、揺動体装置を用いた画像形成装置
JP2006195290A (ja) 画像読取装置及び画像形成装置
JP2009258468A (ja) 揺動体装置、光偏向装置、及びそれを用いた光学機器
JP5408887B2 (ja) 揺動体装置、揺動体装置を用いた画像形成装置
JP2015210453A (ja) 振動素子、光走査装置、画像形成装置、画像投影装置および光学パターン読み取り装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091023

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20091023

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110427

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20110621