JP2007171191A - 光子エネルギレンジ内サブレンジ毎光子検知 - Google Patents
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- 238000001514 detection method Methods 0.000 title claims abstract description 100
- 230000005540 biological transmission Effects 0.000 claims description 53
- 230000002093 peripheral effect Effects 0.000 abstract description 6
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 49
- 230000003287 optical effect Effects 0.000 description 38
- 238000000576 coating method Methods 0.000 description 32
- 239000011248 coating agent Substances 0.000 description 28
- 230000005284 excitation Effects 0.000 description 28
- 230000006870 function Effects 0.000 description 24
- 239000010410 layer Substances 0.000 description 24
- 238000001228 spectrum Methods 0.000 description 22
- 238000000151 deposition Methods 0.000 description 16
- 230000008859 change Effects 0.000 description 15
- 239000010408 film Substances 0.000 description 15
- 239000012530 fluid Substances 0.000 description 15
- 230000008021 deposition Effects 0.000 description 14
- 239000000463 material Substances 0.000 description 14
- 230000003993 interaction Effects 0.000 description 13
- 238000001069 Raman spectroscopy Methods 0.000 description 10
- 238000009826 distribution Methods 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- 238000010606 normalization Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 238000011282 treatment Methods 0.000 description 6
- 239000004205 dimethyl polysiloxane Substances 0.000 description 5
- 238000001917 fluorescence detection Methods 0.000 description 5
- 230000031700 light absorption Effects 0.000 description 5
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000002708 enhancing effect Effects 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000004611 spectroscopical analysis Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 238000003491 array Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- ZUHZGEOKBKGPSW-UHFFFAOYSA-N tetraglyme Chemical compound COCCOCCOCCOCCOC ZUHZGEOKBKGPSW-UHFFFAOYSA-N 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 238000001237 Raman spectrum Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000157 electrochemical-induced impedance spectroscopy Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 description 1
- 241000894006 Bacteria Species 0.000 description 1
- 241000270295 Serpentes Species 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 230000000181 anti-adherent effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 231100000704 bioconcentration Toxicity 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000012631 diagnostic technique Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007170 pathology Effects 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- -1 polydimethylsiloxane Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
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- G—PHYSICS
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- G01J3/12—Generating the spectrum; Monochromators
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- G—PHYSICS
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- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
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- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
- G01N2021/4709—Backscatter
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Abstract
【解決手段】その部位毎に光子放出量が異なる経路からの光子検知を、行102内にある基準セル及び行104内にあるサブレンジセル106からなりそれら基準セル及びその近傍のサブレンジセル106との対を1個又は複数個含むフォトセンサアレイ100を備える集積回路(IC)68により、経路を構成する複数個のセグメントにて個別に行う。基準セルは適用対象光子エネルギレンジのほぼ全体(λmin〜λmax)を通し入射光子を受け取り、サブレンジセル106は当該適用対象光子エネルギレンジのサブレンジのうち対応するサブレンジ(λp)内の入射光子をその上方の透過構造を介して受け取る。周辺回路110にて前者に基づき後者を調整して出力する。
【選択図】図3
Description
[数1]
I(r,c)/I(r−1,c)
[数2]
I(r,c)/I(r+1,c)
[数3]
2・I(r,c)/{I(r−1,c)+I(r+1,c)}
[数4]
6・I(r,c)/Σ{I(r−1,j)+I(r+1,j)}
(但しΣはj=c−1からj=c+1までの総和)
なお、これらの式は一例に過ぎず、基準セルによる光子量検知結果に基づく正規化その他の調整は、他の式乃至手法によっても好適に実施することができる。
[数5]
I(r,c)/I(r−1,c)
[数6]
I(r,c)/I(r+1,c)
[数7]
3・I(2,c)/{2・I(1,c)+I(3,c)}
[数8]
3・I(4,c)/{2・I(5,c)+I(3,c)}
この式中、数5及び数6は行412及び416の何れに属するサブレンジセルに対しても好適に適用できるが、数7は行412に属するサブレンジセルのみ、数8は行416に属するサブレンジセルのみに対して好適に適用できる。
Claims (3)
- その部位毎に光子放出量が異なる経路からの光子検知を、1個又は複数個の第1及び第2セルを有するフォトセンサアレイ付の集積回路により、当該経路を構成する複数個のセグメントにて個別に行うステップを有し、
上記個別セグメント内光子検知を、適用対象光子エネルギレンジのほぼ全体を通じた入射光子量を1個又は複数個の第1セルで、また当該適用対象光子エネルギのサブレンジのうちそのセグメントに対応するサブレンジ内での入射光子量をそのセグメントに対応する1個又は複数個の第2セルで、それぞれ検知することにより行い、
そして上記複数個のセグメントのうち少なくとも2個が、対応するサブレンジが互いに異なるセグメントである適用対象光子エネルギレンジ内光子エネルギ検知方法。 - その部位毎に光子放出量が異なる経路沿いに配置されたフォトセンサアレイを有する集積回路と、上記フォトセンサアレイを構成するセルに応答する調整回路と、を備え、
上記フォトセンサアレイが、適用対象光子エネルギレンジのほぼ全体を通じた入射光子量を検知する1個又は複数個の第1セルと、当該適用対象光子エネルギのサブレンジのうちそのセグメントに対応するサブレンジ内での入射光子量を検知する1個又は複数個の第2セルとを、上記経路を構成するセグメント毎に且つ複数個のセグメントそれぞれに沿って備え、
上記調整回路が、上記経路を構成するセグメントのうち少なくとも1個について、そのセグメントに対応するサブレンジにおける入射光子量を上記適用対象光子エネルギレンジ全体を通じた入射光子量に基づき調整した値を示す信号を、そのセグメントに対応する1個又は複数個の第1及び第2セルによる入射光子量検知結果を双方とも用いて発生させる回路であり、
上記複数個のセグメントのうち少なくとも2個のセグメントが、対応するサブレンジが互いに異なるセグメントである適用対象光子エネルギレンジ内光子エネルギ検知システム。 - 少なくとも1本の第1ラインに沿って並んだ第1セル及び少なくとも1本の第2ラインに沿って並んだ第2セルを含むフォトセンサアレイであって第1セルとその近傍の第2セルとの対である第1第2セル対を1個又は複数個含むフォトセンサアレイを有する集積回路と、
第2ライン上方にあり第2セルに対する光子入射に介在する第2ライン向け透過構造と、
を備え、
第1第2セル対のうち少なくとも1個にて、第1セルが適用対象光子エネルギレンジのほぼ全体を通し入射光子を受け取り、第2セルが当該適用対象光子エネルギレンジのサブレンジのうち対応するサブレンジ内の入射光子を第2ライン透過構造を介して受け取る適用対象光子エネルギレンジ内光子エネルギセンサ。
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US7554673B2 (en) * | 2007-02-05 | 2009-06-30 | Palo Alto Research Center Incorporated | Obtaining information about analytes using optical cavity output light |
US7936463B2 (en) | 2007-02-05 | 2011-05-03 | Palo Alto Research Center Incorporated | Containing analyte in optical cavity structures |
US7502123B2 (en) * | 2007-02-05 | 2009-03-10 | Palo Alto Research Center Incorporated | Obtaining information from optical cavity output light |
US7852490B2 (en) * | 2007-02-05 | 2010-12-14 | Palo Alto Research Center Incorporated | Implanting optical cavity structures |
US7633629B2 (en) | 2007-02-05 | 2009-12-15 | Palo Alto Research Center Incorporated | Tuning optical cavities |
US7817281B2 (en) * | 2007-02-05 | 2010-10-19 | Palo Alto Research Center Incorporated | Tuning optical cavities |
TW200915551A (en) * | 2007-05-10 | 2009-04-01 | Koninkl Philips Electronics Nv | Spectrum detector and manufacturing method therefore |
US7529438B2 (en) * | 2007-07-13 | 2009-05-05 | Palo Alto Research Center Incorporated | Producing fluidic waveguides |
US7522811B2 (en) * | 2007-07-13 | 2009-04-21 | Palo Alto Research Center Incorporated | Producing sandwich waveguides |
US8320983B2 (en) | 2007-12-17 | 2012-11-27 | Palo Alto Research Center Incorporated | Controlling transfer of objects affecting optical characteristics |
US7701580B2 (en) * | 2008-02-01 | 2010-04-20 | Palo Alto Research Center Incorporated | Transmitting/reflecting emanating light with time variation |
US7817254B2 (en) * | 2008-01-30 | 2010-10-19 | Palo Alto Research Center Incorporated | Obtaining information from time variation of sensing results |
US8153950B2 (en) * | 2008-12-18 | 2012-04-10 | Palo Alto Research Center Incorporated | Obtaining sensing results and/or data in response to object detection |
US8153949B2 (en) * | 2008-12-18 | 2012-04-10 | Palo Alto Research Center Incorporated | Obtaining sensing results indicating time variation |
US7894068B2 (en) * | 2008-02-04 | 2011-02-22 | Palo Alto Research Center Incorporated | Producing filters with combined transmission and/or reflection functions |
US7763856B2 (en) * | 2008-01-31 | 2010-07-27 | Palo Alto Research Center Incorporated | Producing time variation in emanating light |
US8629981B2 (en) | 2008-02-01 | 2014-01-14 | Palo Alto Research Center Incorporated | Analyzers with time variation based on color-coded spatial modulation |
US8373860B2 (en) * | 2008-02-01 | 2013-02-12 | Palo Alto Research Center Incorporated | Transmitting/reflecting emanating light with time variation |
US7961326B2 (en) * | 2008-08-21 | 2011-06-14 | Palo Alto Research Center Incorporated | Method of detecting the concentration of an analyte |
US9161714B2 (en) | 2008-08-21 | 2015-10-20 | Palo Alto Research Center Incorporated | Specificity of analyte detection in etalons |
US8203769B2 (en) | 2008-10-10 | 2012-06-19 | Xerox Corporation | In-line linear variable filter based spectrophotometer |
US8653830B2 (en) * | 2008-12-02 | 2014-02-18 | Ut-Battelle, Llc | Optically stimulated differential impedance spectroscopy |
WO2010104993A2 (en) * | 2009-03-10 | 2010-09-16 | The Regents Of The University Of California | Fluidic flow cytometry devices and particle sensing based on signal-encoding |
WO2010108086A2 (en) * | 2009-03-20 | 2010-09-23 | Nanolambda, Inc. | Nano-optic filter array based sensor |
FR2944103B1 (fr) * | 2009-04-01 | 2011-06-10 | Centre Nat Rech Scient | Imagerie tera-hertz a convertisseur infrarouge perfectionne. |
ES2375386B1 (es) * | 2010-07-21 | 2012-09-27 | Abengoa Solar New Technologies, S.A. | Reflectómetro portátil y método de caracterización de espejos de centrales termosolares. |
JP5765081B2 (ja) * | 2011-06-22 | 2015-08-19 | ソニー株式会社 | 撮像素子、電子機器、製造方法、および検査装置 |
US9029800B2 (en) | 2011-08-09 | 2015-05-12 | Palo Alto Research Center Incorporated | Compact analyzer with spatial modulation and multiple intensity modulated excitation sources |
US8723140B2 (en) | 2011-08-09 | 2014-05-13 | Palo Alto Research Center Incorporated | Particle analyzer with spatial modulation and long lifetime bioprobes |
US10451482B2 (en) | 2014-02-14 | 2019-10-22 | Palo Alto Research Center Incorporated | Determination of color characteristics of objects using spatially modulated light |
US9528925B2 (en) * | 2014-02-14 | 2016-12-27 | Palo Alto Research Center Incorporated | Spatial modulation of light to determine object position |
US9952033B2 (en) | 2014-02-14 | 2018-04-24 | Palo Alto Research Center Incorporated | Spatial modulation of light to determine object length |
US9400174B2 (en) | 2014-04-07 | 2016-07-26 | Palo Alto Research Center Incorporated | Monitor for particle injector |
US9362186B2 (en) | 2014-07-18 | 2016-06-07 | Applied Materials, Inc. | Polishing with eddy current feed meaurement prior to deposition of conductive layer |
US9811077B2 (en) * | 2014-07-16 | 2017-11-07 | Applied Materials, Inc. | Polishing with pre deposition spectrum |
JP2019537021A (ja) * | 2016-11-30 | 2019-12-19 | コーニング インコーポレイテッド | スペクトル撮像システムおよびそれを用いてスペクトル画像データを生成する方法 |
CN111033327B (zh) * | 2017-05-17 | 2022-08-23 | 埃弗里克斯股份有限公司 | 具有随空间或时间变化的光学性质的超薄、柔性薄膜滤波器及其制造方法 |
JP7098146B2 (ja) * | 2018-07-05 | 2022-07-11 | 株式会社Iddk | 顕微観察装置、蛍光検出器及び顕微観察方法 |
CN113994192B (zh) * | 2019-05-17 | 2023-12-05 | 上海芯像生物科技有限公司 | 用于分子检测和感测的分析系统 |
US11346773B2 (en) * | 2020-04-22 | 2022-05-31 | Kidde Technologies, Inc. | Fabry-Perot spectrometer-based smoke detector |
CN114414515B (zh) * | 2022-01-26 | 2024-01-30 | 南京大学 | 基于电场调控的红外片上光谱分析系统、制备方法、用途及其光谱重构方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5812831U (ja) * | 1981-07-17 | 1983-01-27 | ユニバ−サルパイオニア株式会社 | 波長測定装置 |
JPH05149793A (ja) * | 1991-11-29 | 1993-06-15 | Sanyo Electric Co Ltd | 波長検出装置 |
JPH0550330U (ja) * | 1991-12-11 | 1993-07-02 | 横河電機株式会社 | 光検出器 |
JPH05322653A (ja) * | 1992-05-26 | 1993-12-07 | Hamamatsu Photonics Kk | 半導体光検出装置 |
JP2005043079A (ja) * | 2003-07-23 | 2005-02-17 | Hitachi Ltd | マイクロ分光計測装置及びマイクロ化学システム |
Family Cites Families (65)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2708389A (en) | 1951-01-09 | 1955-05-17 | Frederick W Kavanagh | Spectral wedge interference filter combined with purifying filters |
US3973118A (en) | 1975-03-25 | 1976-08-03 | Lamontagne Joseph Alfred | Electro-optical detector array and spectrum analyzer system |
US4081277A (en) | 1976-10-08 | 1978-03-28 | Eastman Kodak Company | Method for making a solid-state color imaging device having an integral color filter and the device |
SE450528B (sv) * | 1981-03-19 | 1987-06-29 | Svenska Traeforskningsinst | Forfarande for metning av innehallet av kryll i pappersmassa |
US4573796A (en) * | 1984-01-06 | 1986-03-04 | The United States Of America As Represented By The United States Department Of Energy | Apparatus for eliminating background interference in fluorescence measurements |
CA1293879C (en) | 1986-06-20 | 1992-01-07 | Laurel Jean Pace | Color filter arrays |
US4957371A (en) | 1987-12-11 | 1990-09-18 | Santa Barbara Research Center | Wedge-filter spectrometer |
US4976542A (en) | 1988-07-25 | 1990-12-11 | Washington University | Digital array scanned interferometer |
US5144498A (en) | 1990-02-14 | 1992-09-01 | Hewlett-Packard Company | Variable wavelength light filter and sensor system |
US5166755A (en) | 1990-05-23 | 1992-11-24 | Nahum Gat | Spectrometer apparatus |
US5784507A (en) | 1991-04-05 | 1998-07-21 | Holm-Kennedy; James W. | Integrated optical wavelength discrimination devices and methods for fabricating same |
US5370842A (en) * | 1991-11-29 | 1994-12-06 | Canon Kabushiki Kaisha | Sample measuring device and sample measuring system |
US5305082A (en) | 1992-01-08 | 1994-04-19 | Chromax, Inc. | High spatial resolution imaging spectrograph |
WO1995020144A1 (en) | 1994-01-20 | 1995-07-27 | British Telecommunications Public Limited Company | Optical wavelength sensor |
EP0679881B1 (en) | 1994-04-27 | 1997-08-20 | Hewlett-Packard GmbH | An optical detector device |
US5682038A (en) * | 1995-04-06 | 1997-10-28 | Becton Dickinson And Company | Fluorescent-particle analyzer with timing alignment for analog pulse subtraction of fluorescent pulses arising from different excitation locations |
US5777329A (en) | 1995-07-21 | 1998-07-07 | Texas Instruments Incorporated | Bolometer array spectrometer |
WO1997035176A1 (en) | 1996-03-19 | 1997-09-25 | University Of Utah Research Foundation | Lens and associatable flow cell |
US5770156A (en) * | 1996-06-04 | 1998-06-23 | In Usa, Inc. | Gas detection and measurement system |
US5801831A (en) | 1996-09-20 | 1998-09-01 | Institute For Space And Terrestrial Science | Fabry-Perot spectrometer for detecting a spatially varying spectral signature of an extended source |
US5792663A (en) | 1996-09-27 | 1998-08-11 | Transgenomic Incorporated | High efficiency continuous flow through fractional-volatilization separator system, and method of use |
WO1998022803A1 (de) | 1996-11-18 | 1998-05-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanische transmissionsmesszelle |
US5864641A (en) | 1997-04-11 | 1999-01-26 | F&S, Inc. | Optical fiber long period sensor having a reactive coating |
US6238348B1 (en) | 1997-07-22 | 2001-05-29 | Scimed Life Systems, Inc. | Miniature spectrometer system and method |
US5880474A (en) * | 1997-08-29 | 1999-03-09 | Becton Dickinson And Company | Multi-illumination-source flow particle analyzer with inter-location emissions crosstalk cancelation |
DE19754910C2 (de) | 1997-12-10 | 1999-12-02 | Geoforschungszentrum Potsdam | Wellenlängendetektion an Faser-Bragg-Gitter-Sensoren |
GB9803704D0 (en) | 1998-02-24 | 1998-04-15 | Univ Manchester | Waveguide structure |
US6459080B1 (en) | 1998-06-12 | 2002-10-01 | Agilent Technologies, Inc. | Miniaturized device for separating the constituents of a sample and delivering the constituents of the separated sample to a mass spectrometer |
EP1117478B1 (de) | 1998-08-28 | 2005-06-01 | Febit AG | Träger für analytbestimmungsverfahren und verfahren zur herstellung des trägers |
US6275628B1 (en) | 1998-12-10 | 2001-08-14 | Luna Innovations, Inc. | Single-ended long period grating optical device |
US6249346B1 (en) | 1998-12-21 | 2001-06-19 | Xerox Corporation | Monolithic spectrophotometer |
US6608679B1 (en) | 1998-12-21 | 2003-08-19 | Xerox Corporation | Spectrophotometric analysis of input light |
US6399405B1 (en) | 1998-12-21 | 2002-06-04 | Xerox Corporation | Process for constructing a spectrophotometer |
US6455833B1 (en) | 1999-03-09 | 2002-09-24 | Micron Technology, Inc. | Superposed multi-junction color APS |
AU4128500A (en) | 1999-04-09 | 2000-11-14 | University Of Manchester Institute Of Science & Technology, The | Electrophoresis method and apparatus with time- or space-modulated sample injection |
US6192168B1 (en) | 1999-04-09 | 2001-02-20 | The United States Of America As Represented By The Secretary Of The Navy | Reflectively coated optical waveguide and fluidics cell integration |
US6137117A (en) | 1999-06-21 | 2000-10-24 | The United States Of America As Represented By The Secretary Of The Navy | Integrating multi-waveguide sensor |
US6353475B1 (en) | 1999-07-12 | 2002-03-05 | Caliper Technologies Corp. | Light source power modulation for use with chemical and biochemical analysis |
US6495104B1 (en) | 1999-08-19 | 2002-12-17 | Caliper Technologies Corp. | Indicator components for microfluidic systems |
US6603548B2 (en) | 1999-12-03 | 2003-08-05 | Sciperio, Inc. | Biosensor |
US6295130B1 (en) | 1999-12-22 | 2001-09-25 | Xerox Corporation | Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer |
US6519037B2 (en) | 1999-12-23 | 2003-02-11 | Lj Laboratories, Llc | Spectrometer having optical unit including a randomized fiber optic implement |
US6580507B2 (en) | 2000-03-02 | 2003-06-17 | Sd Acquisition Inc. | Single source, single detector chip, multiple-longitudinal channel electromagnetic radiation absorbance and fluorescence monitoring system |
US6569383B1 (en) | 2000-03-11 | 2003-05-27 | Intrinsic Bioprobes, Inc. | Bioactive chip mass spectrometry |
US6505775B1 (en) | 2000-04-25 | 2003-01-14 | Ncr Corporation | Produce data collector with enhanced LVF spectrometer |
US7217574B2 (en) | 2000-10-30 | 2007-05-15 | Sru Biosystems, Inc. | Method and apparatus for biosensor spectral shift detection |
US7264973B2 (en) | 2000-10-30 | 2007-09-04 | Sru Biosystems, Inc. | Label-free methods for performing assays using a colorimetric resonant optical biosensor |
US6577780B2 (en) | 2001-03-08 | 2003-06-10 | Veridian Systems | Cell designs for optical biosensors |
US6785002B2 (en) | 2001-03-16 | 2004-08-31 | Optical Coating Laboratory, Inc. | Variable filter-based optical spectrometer |
US6630999B2 (en) | 2001-05-01 | 2003-10-07 | Optical Coating Laboratory, Inc. | Color measuring sensor assembly for spectrometer devices |
EP1493487A1 (de) | 2001-06-28 | 2005-01-05 | Agilent Technologies, Inc. | Mikrofluid-System mit ESI-Reststromregelung |
US6934435B2 (en) | 2001-10-05 | 2005-08-23 | ARETé ASSOCIATES | Microfluidic pump system for chemical or biological agents |
US20050042615A1 (en) | 2001-11-02 | 2005-02-24 | Smith William Ewen | Microfluidic ser(r)s detection |
US6800849B2 (en) | 2001-12-19 | 2004-10-05 | Sau Lan Tang Staats | Microfluidic array devices and methods of manufacture and uses thereof |
US7524459B2 (en) | 2002-01-24 | 2009-04-28 | California Institute Of Technology In Pasadena | Optoelectronic and microfluidic integration for miniaturized spectroscopic devices |
US6700664B1 (en) | 2002-08-15 | 2004-03-02 | Jds Uniphase Corporation | Optical channel monitoring device |
EP1391723B1 (en) | 2002-08-16 | 2006-06-21 | Agilent Technologies Inc. a Delaware Corporation | Method and apparatus for analyzing a mixture of sample substances |
US6937718B2 (en) * | 2002-09-04 | 2005-08-30 | Avaya Technology Corp. | Method and apparatus for personalized conference and hands-free telephony using audio beaming |
US7106441B2 (en) | 2002-10-28 | 2006-09-12 | Xerox Corporation | Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer |
US7497992B2 (en) | 2003-05-08 | 2009-03-03 | Sru Biosystems, Inc. | Detection of biochemical interactions on a biosensor using tunable filters and tunable lasers |
US7262845B2 (en) | 2003-05-27 | 2007-08-28 | Wayne State University | Diffractive imaging spectrometer |
US7310153B2 (en) | 2004-08-23 | 2007-12-18 | Palo Alto Research Center, Incorporated | Using position-sensitive detectors for wavelength determination |
US7387892B2 (en) | 2004-09-01 | 2008-06-17 | Palo Alto Research Center Incorporated | Biosensor using microdisk laser |
US7268868B2 (en) | 2004-10-29 | 2007-09-11 | Palo Alto Research Center Incorporated | Anti-resonant waveguide sensors |
US7811438B2 (en) | 2004-12-08 | 2010-10-12 | Palo Alto Research Center Incorporated | Bio-enrichment device to enhance sample collection and detection |
-
2005
- 2005-12-22 US US11/316,438 patent/US7291824B2/en active Active
-
2006
- 2006-12-20 JP JP2006342377A patent/JP5495474B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5812831U (ja) * | 1981-07-17 | 1983-01-27 | ユニバ−サルパイオニア株式会社 | 波長測定装置 |
JPH05149793A (ja) * | 1991-11-29 | 1993-06-15 | Sanyo Electric Co Ltd | 波長検出装置 |
JPH0550330U (ja) * | 1991-12-11 | 1993-07-02 | 横河電機株式会社 | 光検出器 |
JPH05322653A (ja) * | 1992-05-26 | 1993-12-07 | Hamamatsu Photonics Kk | 半導体光検出装置 |
JP2005043079A (ja) * | 2003-07-23 | 2005-02-17 | Hitachi Ltd | マイクロ分光計測装置及びマイクロ化学システム |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007171182A (ja) * | 2005-12-22 | 2007-07-05 | Palo Alto Research Center Inc | チャネル又はその構成部分への光の供給 |
JP2009180723A (ja) * | 2008-01-30 | 2009-08-13 | Palo Alto Research Center Inc | 物体検出に応答した検知結果および/またはデータの取得 |
JP2009180724A (ja) * | 2008-01-30 | 2009-08-13 | Palo Alto Research Center Inc | 時間変化を示す検知結果の取得 |
JP2014178325A (ja) * | 2008-01-30 | 2014-09-25 | Palo Alto Research Center Inc | 物体検出に応答して情報を取得する装置 |
JP2013504051A (ja) * | 2009-09-04 | 2013-02-04 | ラディセンズ ダイアグノスティクス リミテッド | 集積型サイトメトリーセンサシステム及び方法 |
JP2018501462A (ja) * | 2014-11-03 | 2018-01-18 | トルタグ・テクノロジーズ・インコーポレーテッドTrutag Technologies Incorporated | ファブリ・ペロースペクトル画像測定 |
JP2018165708A (ja) * | 2017-03-28 | 2018-10-25 | シチズン時計株式会社 | 分光装置 |
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