JP2007165897A - 電子デバイス冷却システムを製造する方法 - Google Patents
電子デバイス冷却システムを製造する方法 Download PDFInfo
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- JP2007165897A JP2007165897A JP2006333403A JP2006333403A JP2007165897A JP 2007165897 A JP2007165897 A JP 2007165897A JP 2006333403 A JP2006333403 A JP 2006333403A JP 2006333403 A JP2006333403 A JP 2006333403A JP 2007165897 A JP2007165897 A JP 2007165897A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 39
- 238000001816 cooling Methods 0.000 title claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 238000000608 laser ablation Methods 0.000 claims description 24
- 239000002826 coolant Substances 0.000 claims description 12
- 238000004140 cleaning Methods 0.000 claims description 8
- 239000012530 fluid Substances 0.000 claims description 8
- 239000003795 chemical substances by application Substances 0.000 claims description 7
- 229920001296 polysiloxane Polymers 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000012459 cleaning agent Substances 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 abstract description 2
- 238000003754 machining Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 138
- 238000007747 plating Methods 0.000 description 28
- 239000000463 material Substances 0.000 description 26
- 229910052802 copper Inorganic materials 0.000 description 22
- 239000010949 copper Substances 0.000 description 22
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 21
- 230000015572 biosynthetic process Effects 0.000 description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000012790 adhesive layer Substances 0.000 description 16
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 14
- 238000005530 etching Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 238000000151 deposition Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000009713 electroplating Methods 0.000 description 5
- 238000000227 grinding Methods 0.000 description 5
- 238000002679 ablation Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- XMGQYMWWDOXHJM-UHFFFAOYSA-N limonene Chemical compound CC(=C)C1CCC(C)=CC1 XMGQYMWWDOXHJM-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000002529 flux (metallurgy) Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 229940087305 limonene Drugs 0.000 description 1
- 235000001510 limonene Nutrition 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thermal Sciences (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
【解決手段】本方法は、基板(12)の内面上に熱伝導層(88)を形成する段階と、熱伝導層(88)をレーザ切除加工してマイクロチャネルを形成する段階とを含む。
【選択図】 図23
Description
12 基板
14 デバイス
16 伝導層
18 熱交換層
20 マニホルド
22 マイクロチャネル
24 入口プレナム
26 出口プレナム
28 基板の外面
30 基板の内面
32 入口マニホルド
34 出口マニホルド
36 犠牲層
38 溝
40 リブ
44 伝導性リブ
46 上部層
48 第2の伝導層
50 プロセスフロー図
52 基板上に伝導層を堆積させる
54 第1の伝導層を覆う
56 犠牲層を堆積させる
58 犠牲層を伝導層までエッチングする
60 エッチングした犠牲層をめっきする
62 表面を取除いて犠牲層を露出させる
64 残存犠牲層をエッチングする
66 マニホルド及びデバイスを付加する
68 接着剤層
70 プロセスフロー図
72 基板上に伝導層を堆積させる
74 伝導層に犠牲層を接着する
76 犠牲層及び接着剤層を貫通してのこ引き加工する
78 伝導層までめっきする
80 表面を取除いて犠牲層を露出させる
82 残存犠牲層をエッチングする
84 残存接着剤層をエッチングする
86 マニホルド及びデバイスを付加する
88 銅層
90 部分的に切除加工したチャネル
92 プロセスフロー図
94 基板に伝導層をダイレクトボンディングする
96 チャネルをレーザ切除加工する
98 洗浄及び拭き取りを施す
100 終了したか
102 マニホルド及びデバイスを付加する
Claims (10)
- 基板(12)の内面上に熱伝導層(88)を形成する段階と、
前記熱伝導層(88)をレーザ切除加工してマイクロチャネルを形成する段階と、
を含む、電子デバイス冷却システムを製造する方法 - 前記レーザ切除加工する段階が、マルチプルパスの形態で前記熱伝導層(88)を切除加工することを含み、各パスは前記マイクロチャネルの深さを最終所望深さに向かって増大させる、請求項1記載の方法。
- 前記熱伝導層(88)を形成する段階が、スパッタリングを含む、請求項1記載の方法。
- 各レーザ切除加工パス間に前記マイクロチャネルからデブリを清浄化する段階を含む、請求項1記載の方法。
- 各連続的レーザ切除加工パス間に、デブリを除去するための清浄化剤を塗布する段階と、前記マイクロチャネルからデブリを拭き取る段階とを含み、前記清浄化剤が、シリコーン離型剤を含む、請求項1記載の方法。
- 前記マイクロチャネルが、1:2〜1:3の幅対高さのアスペクト比を有する、請求項1記載の方法。
- 前記マイクロチャネルが、V字形チャネルを形成する、請求項1記載の方法。
- 前記基板(12)の表面に近接させてパワーエレクトロニクスデバイスを装着する段階を含む、請求項1記載の方法。
- 前記マイクロチャネル内に冷却媒体を導入するように該マイクロチャネルと流体連通した入口マニホルド(32)を設ける段階と、前記マイクロチャネルから冷却媒体を排出するように該マイクロチャネルと流体連通した出口マニホルド(34)を設ける段階とをさらに含む、請求項1記載の方法。
- 前記入口マニホルドに冷却媒体を導入するための入口プレナム(24)を設ける段階と、前記出口マニホルドから冷却媒体を排出するための出口プレナム(26)を設ける段階とをさらに含む、請求項9記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/297,869 US20070131659A1 (en) | 2005-12-09 | 2005-12-09 | Method of making an electronic device cooling system |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2007165897A true JP2007165897A (ja) | 2007-06-28 |
Family
ID=37808343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006333403A Ceased JP2007165897A (ja) | 2005-12-09 | 2006-12-11 | 電子デバイス冷却システムを製造する方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070131659A1 (ja) |
EP (1) | EP1796165A3 (ja) |
JP (1) | JP2007165897A (ja) |
KR (1) | KR20070061471A (ja) |
CN (1) | CN1988763A (ja) |
CA (1) | CA2570880A1 (ja) |
IL (1) | IL179939A0 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013016794A (ja) * | 2011-06-24 | 2013-01-24 | General Electric Co <Ge> | 電源モジュール用冷却装置及びそれに関連する方法 |
JP2013534053A (ja) * | 2010-07-07 | 2013-08-29 | ハルク クラー | 電子冷却用のcmos互換性マイクロチャネルヒートシンク及びその製造 |
WO2014013764A1 (ja) * | 2012-07-20 | 2014-01-23 | 株式会社新川 | ボンディング装置用ヒータ及びその冷却方法 |
JP2018502460A (ja) * | 2015-01-15 | 2018-01-25 | ラッペーンランナン・テクニッリネン・ユリオピストLappeenrannan Teknillinen Yliopisto | 半導体モジュール |
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TW200726566A (en) * | 2006-01-10 | 2007-07-16 | Li Bing Huan | Laser processing machine |
DE112015006958T5 (de) * | 2015-09-25 | 2018-07-19 | Intel Corporation | Gehäuseintegrierte Mikrokanäle |
CN106571307A (zh) * | 2016-10-08 | 2017-04-19 | 中国电子科技集团公司第五十五研究所 | 高热流密度散热用微流道热沉制备方法 |
US11295963B2 (en) | 2016-11-14 | 2022-04-05 | King Abdullah University Of Science And Technology | Microfabrication techniques and devices for thermal management of electronic devices |
CN109411427B (zh) * | 2018-09-06 | 2020-06-09 | 中国电子科技集团公司第二十九研究所 | 一种微流道散热器及其制造方法 |
CN116487765B (zh) * | 2023-06-20 | 2023-09-26 | 宁波齐云新材料技术有限公司 | 一种高集成度的多层锂电池pack水冷封装板及其加工方法 |
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- 2006-12-09 CN CNA2006100641171A patent/CN1988763A/zh active Pending
- 2006-12-10 IL IL179939A patent/IL179939A0/en unknown
- 2006-12-11 KR KR1020060125813A patent/KR20070061471A/ko not_active Application Discontinuation
- 2006-12-11 EP EP06125834A patent/EP1796165A3/en not_active Withdrawn
- 2006-12-11 JP JP2006333403A patent/JP2007165897A/ja not_active Ceased
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WO2014013764A1 (ja) * | 2012-07-20 | 2014-01-23 | 株式会社新川 | ボンディング装置用ヒータ及びその冷却方法 |
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KR101559741B1 (ko) | 2012-07-20 | 2015-10-13 | 가부시키가이샤 신가와 | 본딩 장치용 히터 및 그 냉각 방법 |
US10350692B2 (en) | 2012-07-20 | 2019-07-16 | Shinkawa Ltd. | Heater for bonding apparatus and method of cooling the same |
JP2018502460A (ja) * | 2015-01-15 | 2018-01-25 | ラッペーンランナン・テクニッリネン・ユリオピストLappeenrannan Teknillinen Yliopisto | 半導体モジュール |
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US20070131659A1 (en) | 2007-06-14 |
CN1988763A (zh) | 2007-06-27 |
EP1796165A2 (en) | 2007-06-13 |
IL179939A0 (en) | 2007-05-15 |
CA2570880A1 (en) | 2007-06-09 |
KR20070061471A (ko) | 2007-06-13 |
EP1796165A3 (en) | 2010-03-24 |
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