JP2007165739A - 電子装置および半導体装置 - Google Patents
電子装置および半導体装置 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 225
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 36
- 229910001120 nichrome Inorganic materials 0.000 claims description 36
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 33
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 20
- 229910052594 sapphire Inorganic materials 0.000 claims description 18
- 239000010980 sapphire Substances 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 29
- 238000002955 isolation Methods 0.000 description 28
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 18
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 15
- 229910010271 silicon carbide Inorganic materials 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 230000002238 attenuated effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000007257 malfunction Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
【解決手段】本発明は、回路部(14)が設けられた基板(10)と、基板(10)の回路部(14)が設けられた面と反対の面に設けられた導電膜(12)と、基板(10)の回路部(14)が設けられた面に設けられたフェースダウン実装部(16)と、を有し、導電膜(12)の膜厚が、導電膜(12)のシート抵抗が基板(10)のインピーダンスの抵抗成分の1/4〜4倍となる膜厚であることを特徴とする半導体装置、および該半導体装置を基板搭載部(20)に実装した電子装置である。
【選択図】 図2
Description
12 導電膜
14 回路部
16 金属バンプ
20 パッケージ
22 パッケージ基板
24 筐体
26 空気または不活性ガス
28 高周波半導体装置
Claims (12)
- 60GHz〜80GHzで扱われる回路部が設けられた基板と、
該基板の前記回路部が設けられた面と反対の面に直接設けられた導電膜と、
前記基板の前記回路部が設けられた面がフェースダウンで実装された基板搭載部と、を具備し、
前記基板はGaAs基板、Si基板、SiC基板、サファイア基板およびGaN基板のいずれかであり、
前記導電膜は、前記基板がGaAs基板の場合、4nm〜70nmの膜厚を有するNiCr膜、10nm〜200nmの膜厚を有するTaN膜および10nm〜160nmの膜厚を有するITO膜のいずれかであり、
前記基板がSi基板の場合、3nm〜65nmの膜厚を有するNiCr膜、10nm〜180nmの膜厚を有するTaN膜および5nm〜140nmの膜厚を有するITO膜のいずれかであり、
前記基板がSiC基板の場合、3nm〜63nmの膜厚を有するNiCr膜、7nm〜160nmの膜厚を有するTaN膜および5nm〜140nmの膜厚を有するITO膜のいずれかであり、
前記基板がサファイア基板の場合、3nm〜63nmの膜厚を有するNiCr膜、7nm〜160nmの膜厚を有するTaN膜および5nm〜140nmの膜厚を有するITO膜のいずれかであり、
前記基板がGaN基板の場合、3nm〜68nmの膜厚を有するNiCr膜、10nm〜180nmの膜厚を有するTaN膜および5nm〜140nmの膜厚を有するITO膜のいずれかであることを特徴とする電子装置。 - 60GHz〜80GHzで扱われる回路部が設けられた基板と、
該基板の前記回路部が設けられた面と反対の面に直接設けられた導電膜と、
前記基板の前記回路部が設けられた面がフェースダウンで実装された基板搭載部と、を具備し、
前記導電膜の膜厚が、前記導電膜のシート抵抗が前記基板のインピーダンスの抵抗成分の1/4〜4倍となる膜厚であることを特徴とする電子装置。 - 前記導電膜は抵抗率が1×10−6Ωm〜2.5×10−6Ωmであることを特徴とする請求項1または2記載の電子装置。
- 前記導電膜は前記基板の前記回路部が設けられた面と反対の面の全面に設けられていることを特徴とする請求項1または2記載の電子装置。
- 前記導電膜は前記基板搭載部から電気的に分離されていることを特徴とする請求項1または2記載の電子装置。
- 前記導電膜上は真空または気体であることを特徴とする請求項1または2記載の電子装置。
- 60GHz〜80GHzで扱われる回路部が設けられた基板と、
該基板の前記回路部が設けられた面と反対の面に直接設けられた導電膜と、
前記基板の前記回路部が設けられた面に設けられたフェースダウン実装のためのフェースダウン実装部と、を具備し、
前記基板はGaAs基板、Si基板、SiC基板、サファイア基板およびGaN基板のいずれかであり、
前記導電膜は、前記基板がGaAs基板の場合、4nm〜70nmの膜厚を有するNiCr膜、10nm〜200nmの膜厚を有するTaN膜および10nm〜160nmの膜厚を有するITO膜のいずれかであり、
前記基板がSi基板の場合、3nm〜65nmの膜厚を有するNiCr膜、10nm〜180nmの膜厚を有するTaN膜および5nm〜140nmの膜厚を有するITO膜のいずれかであり、
前記基板がSiC基板の場合、3nm〜63nmの膜厚を有するNiCr膜、7nm〜160nmの膜厚を有するTaN膜および5nm〜140nmの膜厚を有するITO膜のいずれかであり、
前記基板がサファイア基板の場合、3nm〜63nmの膜厚を有するNiCr膜、7nm〜160nmの膜厚を有するTaN膜および5nm〜140nmの膜厚を有するITO膜のいずれかであり、
前記基板がGaN基板の場合、3nm〜68nmの膜厚を有するNiCr膜、10nm〜180nmの膜厚を有するTaN膜および5nm〜140nmの膜厚を有するITO膜のいずれかであることを特徴とする半導体装置。 - 60GHz〜80GHzで扱われる回路部が設けられた基板と、
該基板の前記回路部が設けられた面と反対の面に直接設けられた導電膜と、
前記基板の前記回路部が設けられた面に設けられたフェースダウン実装のためのフェースダウン実装部と、を具備し、
前記導電膜の膜厚が、前記導電膜のシート抵抗が前記基板のインピーダンスの抵抗成分の1/4〜4倍となる膜厚であることを特徴とする半導体装置。 - 前記導電膜は抵抗率が1×10−6Ωm〜2.5×10−6Ωmであることを特徴とする請求項7または8記載の半導体装置。
- 前記導電膜は前記基板の前記回路部が設けられた面と反対の面の全面に設けられていることを特徴とする請求項7または8記載の半導体装置。
- 前記フェースダウン実装部は金属バンプを含むことを特徴とする請求項7または8記載の半導体装置。
- 前記導電膜は前記回路部から電気的に分離されていることを特徴とする請求項7または8記載の半導体装置。
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JP2005362649A JP4680763B2 (ja) | 2005-12-16 | 2005-12-16 | 電子装置および半導体装置 |
EP06125848.9A EP1801874B1 (en) | 2005-12-16 | 2006-12-11 | Packaged electronic device and semiconductor device with a back-side conductive layer |
US11/637,878 US7550831B2 (en) | 2005-12-16 | 2006-12-13 | Electronic device and semiconductor device |
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Cited By (2)
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JP2014030018A (ja) * | 2012-07-30 | 2014-02-13 | General Electric Co <Ge> | 炭化ケイ素デバイスにおけるバイアス温度不安定性(bti)を低減する半導体デバイスおよび方法 |
US9691722B2 (en) | 2014-03-26 | 2017-06-27 | Mitsubishi Electric Corporation | Surface mount high-frequency circuit |
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CN111146094B (zh) * | 2019-12-04 | 2021-08-31 | 中国电子科技集团公司第十三研究所 | 氮化镓功率模块封装方法及加压装置 |
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JPH11195731A (ja) * | 1997-10-30 | 1999-07-21 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP2000174061A (ja) * | 1998-12-01 | 2000-06-23 | Kyocera Corp | 高周波用部品の接続構造 |
JP2005287055A (ja) * | 2002-08-01 | 2005-10-13 | Matsushita Electric Ind Co Ltd | 伝送線路及び半導体集積回路装置 |
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JP3328102B2 (ja) * | 1995-05-08 | 2002-09-24 | 松下電器産業株式会社 | 弾性表面波装置及びその製造方法 |
JPH09102705A (ja) | 1995-10-06 | 1997-04-15 | Toshiba Corp | マイクロ波回路装置 |
EP1855321A3 (en) * | 1996-11-01 | 2008-08-06 | The Regents of the University of California | Back-illuminated fully depleted charge coupled device comprising low-resistivity transparent window layer |
FR2784768A1 (fr) * | 1998-10-16 | 2000-04-21 | Schlumberger Ind Sa | Puce a circuits integres securisee contre l'action de rayonnements electromagnetiques |
JP3462166B2 (ja) * | 2000-09-08 | 2003-11-05 | 富士通カンタムデバイス株式会社 | 化合物半導体装置 |
JP4161911B2 (ja) | 2004-01-30 | 2008-10-08 | ソニー株式会社 | 集積回路装置 |
KR100855819B1 (ko) * | 2004-10-08 | 2008-09-01 | 삼성전기주식회사 | 금속 밀봉부재가 형성된 mems 패키지 |
TWI241696B (en) * | 2004-11-26 | 2005-10-11 | Delta Electronics Inc | Chip package structure |
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2006
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH11195731A (ja) * | 1997-10-30 | 1999-07-21 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP2000174061A (ja) * | 1998-12-01 | 2000-06-23 | Kyocera Corp | 高周波用部品の接続構造 |
JP2005287055A (ja) * | 2002-08-01 | 2005-10-13 | Matsushita Electric Ind Co Ltd | 伝送線路及び半導体集積回路装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2014030018A (ja) * | 2012-07-30 | 2014-02-13 | General Electric Co <Ge> | 炭化ケイ素デバイスにおけるバイアス温度不安定性(bti)を低減する半導体デバイスおよび方法 |
US9691722B2 (en) | 2014-03-26 | 2017-06-27 | Mitsubishi Electric Corporation | Surface mount high-frequency circuit |
Also Published As
Publication number | Publication date |
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EP1801874A2 (en) | 2007-06-27 |
EP1801874A3 (en) | 2013-05-01 |
US7550831B2 (en) | 2009-06-23 |
US20070138622A1 (en) | 2007-06-21 |
JP4680763B2 (ja) | 2011-05-11 |
EP1801874B1 (en) | 2019-03-06 |
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