JP2007153572A - Liquid crystal substrate carrying fork - Google Patents

Liquid crystal substrate carrying fork Download PDF

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Publication number
JP2007153572A
JP2007153572A JP2005353365A JP2005353365A JP2007153572A JP 2007153572 A JP2007153572 A JP 2007153572A JP 2005353365 A JP2005353365 A JP 2005353365A JP 2005353365 A JP2005353365 A JP 2005353365A JP 2007153572 A JP2007153572 A JP 2007153572A
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Prior art keywords
fork
liquid crystal
crystal substrate
hollow
filled
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JP2005353365A
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Japanese (ja)
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Shunji Takaoka
俊志 高岡
Hiroteru Iwasa
浩輝 岩佐
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Shinko Electric Co Ltd
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Shinko Electric Co Ltd
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid crystal substrate carrying fork capable of damping vibration, by reducing a deflection quantity when loading a liquid crystal substrate, without increasing weight. <P>SOLUTION: This fork is composed of a plurality of fork parts for placing the liquid crystal substrate and a bracket part vertically arranged to the fork parts and holding and fixing the respective fork parts at a predetermined interval. The fork parts are composed of a thin carbon fiber reinforced resin having a hollow cross sectional shape. Since a foaming resin is filled inside its hollow part, the deflection quantity can be reduced when loading the liquid crystal substrate without increasing the weight. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、液晶基板等を搬送するために使用される液晶基板搬送用フォークに関するものである。   The present invention relates to a liquid crystal substrate transport fork used for transporting a liquid crystal substrate or the like.

液晶基板等を搬送するために使用される液晶基板搬送用フォークは、液晶基板を載せた際にたわみ量が小さいこと。および、搬送用フォーク自体の重量が軽いことが要請されている。この要請を満足するために従来の液晶基板搬送用フォーク１は、図３に示すように炭素繊維強化樹脂（ＣＦＲＰ）を肉厚ｔの中空角形に形成していた。   The fork for transporting a liquid crystal substrate used for transporting a liquid crystal substrate or the like has a small amount of deflection when the liquid crystal substrate is placed. In addition, the weight of the transport fork itself is required to be light. In order to satisfy this requirement, the conventional fork 1 for transporting a liquid crystal substrate has a carbon fiber reinforced resin (CFRP) formed in a hollow rectangular shape with a thickness t as shown in FIG.

また、本発明とは、全く別の発明であるトラック荷台の床板構造として床板部および根太の中空部に発泡ウレタンを封入したものが特許文献１、２に記載されておりますが、これらは何れも床板材の圧縮強度を向上するためのものです。
特開平１０−１００９４２号公報 特開平１０−２２６３６５号公報 In addition, Patent Documents 1 and 2 describe a floor plate structure of a truck bed, which is completely different from the present invention, in which foamed urethane is enclosed in a floor plate portion and a hollow portion of a joist. Is also for improving the compressive strength of floor boards.
Japanese Patent Laid-Open No. 10-1000094 JP-A-10-226365

しかし従来の液晶基板搬送用フォークでは、以下のような問題が存在した。
１）断面を中空形状とした液晶基板搬送用フォークの各面の肉厚を厚くする程剛性が増して、液晶基板を載せた際のたわみ量を小さくできるが、フォーク全体の重量が増加してしまう。図４に従来の搬送用フォークにおける肉厚とたわみ量との関係を示す。同図に示すように、肉厚（重量）を増せば、フォークの自重たわみは増加するが、基板を載せた時のフォークのたわみ増分は大きく減少し、全体としてたわみは減少する。
２）また、素材となる炭素繊維強化プラスチック（ＣＦＲＰ）自体が高価であり、使用する量を削減したいと云う要請がある。 However, the conventional liquid crystal substrate transport fork has the following problems.
1) Increasing the thickness of each surface of the liquid crystal substrate transport fork having a hollow cross section increases the rigidity and reduces the amount of deflection when the liquid crystal substrate is placed, but increases the overall weight of the fork. End up. FIG. 4 shows the relationship between the wall thickness and the amount of deflection in a conventional conveying fork. As shown in the figure, when the thickness (weight) is increased, the deflection of the fork is increased, but the increment of the deflection of the fork when the substrate is placed is greatly reduced, and the deflection is reduced as a whole.
2) Also, the carbon fiber reinforced plastic (CFRP) itself that is a raw material is expensive, and there is a demand for reducing the amount used.

この発明は上記に鑑み提案されたもので、液晶基板搬送用フォークの断面形状を中空の薄肉炭素繊維強化プラスチックから構成し、中空内部に発泡樹脂を充填したので、重量が増加することなく、載荷時のたわみ量を減少することができ、発泡樹脂がフォークの振動を減衰させる効果も有る。
また、製造コストを低減することができる。 The present invention has been proposed in view of the above, and the cross-sectional shape of the liquid crystal substrate transport fork is made of a hollow thin-walled carbon fiber reinforced plastic, and the hollow interior is filled with foamed resin. The amount of time deflection can be reduced, and the foamed resin also has the effect of damping the vibration of the fork.
In addition, the manufacturing cost can be reduced.

前記目的を達成するために、本発明は液晶基板を載せるための複数のフォーク部と、前記フォーク部と垂直に配設され、各フォーク部を所定間隔で保持固定するブラケット部とから成り、前記フォーク部を断面形状が中空の薄肉炭素繊維強化樹脂から構成し、その中空内部に発泡樹脂を充填したことを特徴としている。   In order to achieve the above object, the present invention comprises a plurality of fork portions on which a liquid crystal substrate is placed, and a bracket portion that is disposed perpendicular to the fork portions and holds and fixes the fork portions at predetermined intervals. The fork portion is composed of a thin carbon fiber reinforced resin having a hollow cross-sectional shape, and the inside of the hollow is filled with a foamed resin.

また、本発明において前記フォーク部は、複雑な断面形状の内部が発泡樹脂で隙間無く充填されていることを特徴とする。
また、本発明において前記フォーク部は、中空の断面を有することを特徴とする。 In the present invention, the fork portion is characterized in that the inside of a complicated cross-sectional shape is filled with a foamed resin without a gap.
In the present invention, the fork has a hollow cross section.

また、本発明において前記フォーク部を構成する薄肉炭素繊維強化樹脂の比重は１．５〜１．８であることを特徴とするものである。   In the present invention, the thin carbon fiber reinforced resin constituting the fork portion has a specific gravity of 1.5 to 1.8.

また、本発明において前記フォーク部の中空内部に充填する発泡樹脂の比重は０．０１〜０．５であることを特徴とするものである。   In the present invention, the specific gravity of the foamed resin filled in the hollow interior of the fork portion is 0.01 to 0.5.

この発明は前記した構成からなるので、以下に説明するような効果を奏することができる。   Since this invention consists of an above-described structure, there can exist an effect which is demonstrated below.

本発明では、液晶基板を載せるための複数のフォーク部と、前記フォーク部と垂直に配設され、各フォーク部を所定間隔で保持固定するブラケット部とから成り、前記フォーク部を断面形状が中空の薄肉炭素繊維強化樹脂から構成し、その中空内部に発泡樹脂を充填したので、断面二次モーメントが増して液晶基板を載せた際のたわみ量を小さくすることができる。また、搬送用フォーク自体の重量を軽くできるとともに、製造コストを低減できる。   The present invention comprises a plurality of fork portions on which a liquid crystal substrate is placed and a bracket portion that is disposed perpendicular to the fork portions and holds and fixes the fork portions at a predetermined interval. The fork portions have a hollow cross-sectional shape. The thin-walled carbon fiber reinforced resin is filled with the foamed resin inside the hollow portion, so that the moment of cross-section is increased and the amount of deflection when the liquid crystal substrate is placed can be reduced. Further, the weight of the transport fork itself can be reduced and the manufacturing cost can be reduced.

また、本発明で使用する発泡樹脂は、フォーク部の複雑形状内部への充填作業が容易であるとともに、断面二次モーメントの増加によりたわみ量を低減することができる。   In addition, the foamed resin used in the present invention can be easily filled into the complex shape of the fork portion, and the amount of deflection can be reduced by increasing the secondary moment of section.

また、本発明では、前記フォーク部を構成する薄肉炭素繊維強化樹脂の比重は１．５〜１．８であり、前記フォーク部の中空内部に充填する発泡樹脂の比重は０．０１〜０．５であるので、搬送用フォーク自体の重量増加を少なくして、たわみ量を大幅に減少させることができる。   In the present invention, the specific gravity of the thin carbon fiber reinforced resin constituting the fork portion is 1.5 to 1.8, and the specific gravity of the foamed resin filling the hollow interior of the fork portion is 0.01 to 0.00. Therefore, the increase in weight of the transport fork itself can be reduced and the amount of deflection can be greatly reduced.

本発明は、フォーク部の断面形状を中空の薄肉炭素繊維強化樹脂（ＣＦＲＰ）で構成し、その中空内部に発泡樹脂を充填したので、重量を大幅に増加することなく、液晶基板積載時のたわみ量を減少することができ、発泡樹脂がフォークの振動を減衰させる効果が有る。   In the present invention, the cross-sectional shape of the fork portion is made of a hollow thin carbon fiber reinforced resin (CFRP), and the inside of the hollow is filled with foamed resin, so that the deflection when loading the liquid crystal substrate without significantly increasing the weight is achieved. The amount can be reduced, and the foamed resin has the effect of damping the vibration of the fork.

以下、一実施の形態を示す図面に基づいて本発明を詳細に説明する。図１は本発明に係る液晶基板搬送用フォークの一例を示す全体斜視図、図２は、本発明の液晶基板搬送用フォークの根元部を示す切断斜視図である。ここで、液晶基板搬送用フォーク１０は、液晶基板を載せるためのほぼ平行に配設された複数のフォーク部１１と、前記フォーク部と垂直に配設され各フォーク部１１を所定間隔で保持固定するブラケット部１２とから構成されている。また、フォーク部１１は、断面形状が中空の薄肉炭素繊維強化樹脂（ＣＦＲＰ）から成り、その中空内部に発泡樹脂１３が充填されている。   Hereinafter, the present invention will be described in detail with reference to the drawings illustrating an embodiment. FIG. 1 is an overall perspective view showing an example of a liquid crystal substrate carrying fork according to the present invention, and FIG. 2 is a cut perspective view showing a root portion of the liquid crystal substrate carrying fork according to the present invention. Here, the liquid crystal substrate transport fork 10 has a plurality of fork portions 11 arranged substantially in parallel to place the liquid crystal substrate, and is disposed perpendicularly to the fork portions to hold and fix the fork portions 11 at predetermined intervals. And a bracket portion 12 to be configured. Further, the fork portion 11 is made of a thin carbon fiber reinforced resin (CFRP) having a hollow cross-sectional shape, and a foamed resin 13 is filled in the hollow interior.

発泡樹脂１３は、例えば発泡ウレタンを使用することができる。また、本実施例において、フォーク部１１は、等しい肉厚の中空の平板状に形成されている。この矩形断面の中空部に発泡ウレタンを充填する。また、フォーク部１１を構成する薄肉炭素繊維強化樹脂の比重は１．５〜１．８であり、フォーク部１１の中空内部に充填する発泡ウレタンの比重は０．０１〜０．５である。   For example, urethane foam can be used as the foamed resin 13. Further, in the present embodiment, the fork portion 11 is formed in a hollow flat plate shape having an equal thickness. The hollow portion of this rectangular cross section is filled with foamed urethane. Moreover, the specific gravity of the thin carbon fiber reinforced resin constituting the fork portion 11 is 1.5 to 1.8, and the specific gravity of the urethane foam filled in the hollow interior of the fork portion 11 is 0.01 to 0.5.

なお、フォーク部１１の上面には、複数の穴１４が形成されているが、この複数の穴１４は、フォーク部１１をブラケット部１２に取り付けるための穴である。   A plurality of holes 14 are formed on the top surface of the fork portion 11. The plurality of holes 14 are holes for attaching the fork portion 11 to the bracket portion 12.

図１は、本発明に係る液晶基板搬送用フォークの一例を示す全体斜視図である。FIG. 1 is an overall perspective view showing an example of a liquid crystal substrate carrying fork according to the present invention. 図２は、同液晶基板搬送用フォークの根元部を示す切断斜視図である。FIG. 2 is a cut perspective view showing the base of the liquid crystal substrate carrying fork. 図３は、従来の液晶基板搬送用フォークの一例を示す切断斜視図である。FIG. 3 is a cut perspective view showing an example of a conventional liquid crystal substrate carrying fork. 図４は、従来の液晶基板搬送用フォークにおける肉厚とたわみ量との関係を示す説明図である。FIG. 4 is an explanatory diagram showing the relationship between the thickness and the amount of deflection in a conventional liquid crystal substrate transport fork.

符号の説明Explanation of symbols

１０…液晶基板搬送用フォーク
１１…フォーク部
１２…ブラケット部
１３…発泡樹脂
１４…穴 DESCRIPTION OF SYMBOLS 10 ... Liquid crystal substrate conveyance fork 11 ... Fork part 12 ... Bracket part 13 ... Foam resin 14 ... Hole

Claims (5)

液晶基板を載せるための複数のフォーク部と、
前記フォーク部と垂直に配設され、各フォーク部を所定間隔で保持固定するブラケット部とから成り、
前記フォーク部を断面形状が中空の薄肉炭素繊維強化樹脂から構成し、その中空内部に発泡樹脂を充填したことを特徴とする液晶基板搬送用フォーク。 A plurality of forks for mounting a liquid crystal substrate;
It is arranged perpendicular to the fork part, and consists of a bracket part for holding and fixing each fork part at a predetermined interval,
A fork for transporting a liquid crystal substrate, wherein the fork portion is made of a thin-walled carbon fiber reinforced resin having a hollow cross-sectional shape, and the inside of the hollow is filled with a foamed resin. 前記フォーク部は、複雑な断面形状の内部が発泡樹脂で隙間無く充填されていることを特徴とする請求項１に記載の液晶基板搬送用フォーク。   2. The fork for transporting a liquid crystal substrate according to claim 1, wherein the fork portion has a complicated cross-sectional shape filled with foamed resin without a gap. 前記フォーク部は、中空の断面を有することを特徴とする請求項１または２に記載の液晶基板搬送用フォーク。   The liquid crystal substrate transport fork according to claim 1, wherein the fork portion has a hollow cross section. 前記フォーク部を構成する薄肉炭素繊維強化樹脂の比重は、１．５〜１．８であることを特徴とする請求項１〜３の何れか１に記載の液晶基板搬送用フォーク。   4. The liquid crystal substrate transport fork according to claim 1, wherein a specific gravity of the thin carbon fiber reinforced resin constituting the fork portion is 1.5 to 1.8. 前記フォーク部の中空内部に充填する発泡樹脂の比重は、０．０１〜０．５であることを特徴とする請求項１〜４の何れか１に記載の液晶基板搬送用フォーク。

5. The liquid crystal substrate carrying fork according to claim 1, wherein the specific gravity of the foamed resin filled in the hollow interior of the fork portion is 0.01 to 0.5.

JP2005353365A 2005-12-07 2005-12-07 Liquid crystal substrate carrying fork Pending JP2007153572A (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009065129A (en) * 2007-08-09 2009-03-26 Jfe Techno Research Corp Frame for wafer
WO2009157193A1 (en) * 2008-06-26 2009-12-30 Ｊｆｅテクノリサーチ株式会社 Wafer frame
WO2010086955A1 (en) * 2009-01-27 2010-08-05 新日本石油株式会社 Conveyance member made of cfrp and robot hand employing the same
JP2011029217A (en) * 2009-07-21 2011-02-10 Okawa Kanagata Sekkei Jimusho:Kk Holder for wafer
KR101081396B1 (en) * 2008-10-27 2011-11-08 (주)케이엠 A support bar for the substrate-loading cassette and the manufacturing method thereof
CN103434842A (en) * 2013-09-04 2013-12-11 深圳市华星光电技术有限公司 Mechanical arm fork and mechanical arm
CN109795883A (en) * 2017-11-17 2019-05-24 沈阳新松机器人自动化股份有限公司 A kind of servo synchronization adjusting carrying mechanism
WO2022137926A1 (en) * 2020-12-25 2022-06-30 川崎重工業株式会社 Robot

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11354608A (en) * 1998-06-10 1999-12-24 Mitsubishi Chemical Corp Hand for transfer apparatus
JP2002292592A (en) * 2001-03-29 2002-10-08 Nippon Oil Corp Production method for robot hand element
JP2005135944A (en) * 2003-10-28 2005-05-26 Okamoto Machine Tool Works Ltd Substrate transfer implement and substrate transfer method using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11354608A (en) * 1998-06-10 1999-12-24 Mitsubishi Chemical Corp Hand for transfer apparatus
JP2002292592A (en) * 2001-03-29 2002-10-08 Nippon Oil Corp Production method for robot hand element
JP2005135944A (en) * 2003-10-28 2005-05-26 Okamoto Machine Tool Works Ltd Substrate transfer implement and substrate transfer method using the same

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009065129A (en) * 2007-08-09 2009-03-26 Jfe Techno Research Corp Frame for wafer
WO2009157193A1 (en) * 2008-06-26 2009-12-30 Ｊｆｅテクノリサーチ株式会社 Wafer frame
JP2010245493A (en) * 2008-06-26 2010-10-28 Jfe Techno Research Corp Wafer frame
KR101081396B1 (en) * 2008-10-27 2011-11-08 (주)케이엠 A support bar for the substrate-loading cassette and the manufacturing method thereof
WO2010086955A1 (en) * 2009-01-27 2010-08-05 新日本石油株式会社 Conveyance member made of cfrp and robot hand employing the same
JP2011029217A (en) * 2009-07-21 2011-02-10 Okawa Kanagata Sekkei Jimusho:Kk Holder for wafer
CN103434842A (en) * 2013-09-04 2013-12-11 深圳市华星光电技术有限公司 Mechanical arm fork and mechanical arm
CN109795883A (en) * 2017-11-17 2019-05-24 沈阳新松机器人自动化股份有限公司 A kind of servo synchronization adjusting carrying mechanism
WO2022137926A1 (en) * 2020-12-25 2022-06-30 川崎重工業株式会社 Robot

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