JP2007138301A - Thin film forming apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin film forming apparatus usable for producing a TFT (Thin Film Transistor) having a gate insulating film which has a high dielectric withstand voltage and can ensure a desired carrier mobility in an adjacent semiconductor active film. <P>SOLUTION: The thin film forming apparatus comprises: a film forming chamber 35 capable of maintaining a vacuum atmosphere in its inner space; a radio-frequency (RF) electrode 32 and a susceptor electrode 34 for generating an RF electric field to produce plasma; a bias power supply 33 for supplying respective RF powers of predetermined frequencies; a heating means (not shown); a gas supply means 37 for supplying a desired gas to the inner space of the film forming chamber 35 through a gas introducing pipe 36; a gas discharge means 38 for discharging the gas to maintain a desired pressure within the film forming chamber 35; and a control unit 39 for controlling various components. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

The present invention relates to a thin film transistor, a method for manufacturing the same, a liquid crystal display device, and a thin film deposition apparatus, and more particularly to a structure of a gate insulating film in an inverted staggered thin film transistor.

FIG. 14 shows an example of the structure of a TFT array substrate provided with an inverted stagger type TFT, a gate wiring, a source wiring, etc. in a conventional thin film transistor (hereinafter referred to as TFT) type liquid crystal display device. It is. In this TFT array substrate, as shown in FIG. 14, gate wirings 50 and source wirings 51 are arranged in a matrix on a transparent substrate. A region surrounded by the gate wiring 50 and the source wiring 51 becomes one pixel 52, and a TFT 53 is provided for each pixel 52. FIG. 15 is a sectional view showing the structure of the TFT.

As shown in FIG. 15, the TFT 53 is provided with a gate electrode 55 led out from the gate wiring 50 on the transparent substrate 54, and a gate insulating film 56 so as to cover the gate electrode 55. A semiconductor active film 57 made of amorphous silicon (a-Si) is provided on the gate insulating film 56 above the gate electrode 55, and an ohmic contact made of amorphous silicon (a-Si: n ⁺ ) containing n-type impurities such as phosphorus. A source electrode 59 and a drain electrode 60 drawn from the source wiring 51 are provided from the semiconductor active film 57 to the gate insulating film 56 via the layer 58. A passivation film 61 that covers the TFT 53 including the source electrode 59, the drain electrode 60, the gate electrode 55, and the like is provided, and a contact hole 62 is formed in the passivation film 61 on the drain electrode 60. Further, a pixel electrode 63 made of a transparent conductive film such as indium tin oxide (hereinafter referred to as ITO) that is electrically connected to the drain electrode 60 through the contact hole 62 is provided.

By the way, among the constituent elements of the TFT, the gate insulating film sandwiched between the gate electrode and the semiconductor active film is the most important element that governs the electrical characteristics and reliability of the TFT. It also becomes a factor that determines the presence or absence of display defects. In the case of an amorphous silicon TFT using amorphous silicon as a semiconductor active film material, adopt a two-layer gate insulating film structure in which two layers of gate insulating films are stacked with different materials and different methods to make a redundant structure resistant to defects. There is also. For example, a case in which dense Ta ₂ O ₅ formed by anodizing tantalum (Ta) of a gate electrode and Si ₃ N ₄ deposited by plasma CVD are stacked.

Regarding the electrical characteristics of TFTs, generally required gate insulating film performance includes withstand voltage and carrier mobility in a semiconductor active film. The breakdown voltage is originally a problem of the gate insulating film itself, but the interface characteristics between the gate insulating film and the semiconductor active film also affect the carrier mobility in the semiconductor active film. Withstand voltage is the maximum voltage that the gate insulating film can withstand dielectric breakdown when the applied voltage between the gate electrode and the semiconductor active film is increased, and the withstand voltage is lower than the desired design value. In such a case, the gate insulating film is likely to be destroyed, causing a malfunction of the TFT, and thus a display defect.

The mobility is an index indicating the ease of movement of carriers in the TFT, and the larger the value, the higher the driving capability of the TFT and the faster the operation. The mobility is lowered when the carrier travel is hindered by the disorder of the semiconductor crystal or the presence of impurities. For example, in the case of electrons in silicon, the mobility is about 1000 cm ² / V · sec in a single crystal, but in polycrystalline silicon, it is lowered to about 10 to 100 cm ² / V · sec due to crystal disturbance, and in amorphous silicon, it is further reduced. It decreases to about 0.3 to ¹ cm ² / V · sec. As described above, when amorphous silicon is used, the mobility is lowered, and there is a demand for obtaining a high mobility even a little.

As described above, the dielectric breakdown voltage and the carrier mobility are important factors in obtaining a TFT having good electrical characteristics and reliability. Among the materials of the gate insulating film that have been generally used in the related art, None of the pressure resistance and carrier mobility were satisfactory. In addition, as in the example of the stacked structure of Ta ₂ O ₅ and Si ₃ N ₄ described above, it has been conventionally considered to combine two different types of films in order to give a desired performance to the gate insulating film. In this case, the gate insulating film forming process is complicated, and the productivity of the TFT array substrate is deteriorated.

The present invention has been made to solve the above-described problems, and has a TFT having a gate insulating film that has a good withstand voltage and at the same time can secure a desired carrier mobility of an adjacent semiconductor active film. It is an object of the present invention to provide a manufacturing method, a liquid crystal display device excellent in terms of electrical characteristics and yield, and a thin film forming apparatus that can be used in the manufacturing method of the TFT.

In order to achieve the above object, a TFT of the present invention includes a gate electrode and a semiconductor active film provided on a substrate with a gate insulating film formed of two layers of insulating films interposed therebetween. A first gate insulating film provided on the gate electrode side for improving the breakdown voltage between the gate electrode and the semiconductor active film; and a second gate insulating film provided on the semiconductor active film side for improving interface characteristics. And a gate insulating film. That is, in the TFT of the present invention, a two-layer insulating film made of a material having a function of improving the breakdown voltage between the gate electrode and the semiconductor active film and a function of improving the interface characteristics between the semiconductor active film. The gate insulating film is formed by laminating the layers so as to realize a gate insulating film having a desired withstand voltage and a semiconductor active film having a desired carrier mobility. In the present invention, “improve the interface characteristics with the semiconductor active film” means that as a result, the mobility of carriers in the semiconductor active film is improved.

As one specific example of the material of the first gate insulating film and the second gate insulating film, both the first gate insulating film and the second gate insulating film are silicon nitride films, The gate insulating film has an optical band gap in the range of 3.0 to 4.5 eV, and the second gate insulating film has an optical band gap in the range of 5.0 to 5.3 eV. Can be used. Conventionally, when speaking of an insulating film having two different functions, it has been usual to form a two-layer film with two different types of materials. It was found that the characteristics of the film differed when the optical band gap value of the film was different, and was applied to the present invention. The relationship between the specific value of the optical band gap and the characteristics of the gate insulating film will be described later in the section of the embodiment.

The TFT manufacturing method of the present invention including the step of forming the gate insulating film having the above-described characteristics uses a plasma CVD apparatus including a high-frequency electrode installed in a film-forming chamber and a susceptor electrode facing the high-frequency electrode. Forming a first gate insulating film on the gate electrode on the substrate by converting the mixed gas of silane gas and ammonia gas into a plasma by a desired high frequency electric field formed between the high frequency electrode and the susceptor electrode. Then, the mixed gas having the same composition as the mixed gas is turned into plasma by a high frequency electric field larger than the high frequency electric field to form a second gate insulating film on the first gate insulating film, and then on the second gate insulating film A semiconductor active film is formed on the substrate.

When this method is used, the following combinations can be adopted as the sequence of the high frequency power applied to each of the high frequency electrode and the susceptor electrode in the plasma CVD apparatus. The power applied to the high frequency electrode is referred to as excitation power, and the power applied to the susceptor electrode is referred to as substrate bias power.
(1) The substrate bias power is not applied both when the first gate insulating film is formed and when the second gate insulating film is formed, and the second gate insulating film is formed when the excitation power is higher than when the first gate insulating film is formed. Sometimes bigger,
(2) The substrate bias power is the same when the first gate insulating film is formed and the second gate insulating film is formed, and the excitation power is larger when the second gate insulating film is formed than when the first gate insulating film is formed. To
(3) The substrate bias power is made larger when the second gate insulating film is formed than when the first gate insulating film is formed, and the excitation power is the same when the first gate insulating film is formed and when the second gate insulating film is formed. And
(4) The substrate bias power is made larger when the second gate insulating film is formed than when the first gate insulating film is formed, and the excitation power is made larger when the second gate insulating film is formed than when the first gate insulating film is formed. To do.
Among the above, when both the substrate bias power and the excitation power are applied, it is necessary to use a two-frequency excitation plasma CVD apparatus.

Alternatively, instead of the method using a mixed gas having the same composition as that of the first gate insulating film and a high-frequency electric field larger than the high-frequency electric field when forming the first gate insulating film when forming the second gate insulating film, After the first gate insulating film is formed by the same method as that described above, a mixed gas having a larger mixing ratio of ammonia gas to silane gas than the mixed gas at the time of forming the first gate insulating film is formed. The second high-frequency electric field is converted into plasma by the same high-frequency electric field to form a second gate insulating film on the first gate insulating film, and then a semiconductor active film is formed on the second gate insulating film. Also good. As described above, when the method of switching the composition of the mixed gas is adopted, the sequence of the high frequency power applied to each of the high frequency electrode and the susceptor electrode in the plasma CVD apparatus is similar to the above case (1) to (4). ) Can be employed.

In any of the above methods, both the first gate insulating film and the second gate insulating film are formed of a silicon nitride film, and the process proceeds from the first gate insulating film forming process to the second gate insulating film forming process. At this time, it is possible to continuously and easily form a two-layer gate insulating film having different characteristics only by switching the high frequency power or the composition of the mixed gas. Therefore, unlike the example of the stacked structure of Ta ₂ O ₅ and Si ₃ N ₄ described in the section of the prior art, the gate insulating film forming process is not complicated, and a single gate insulating film is formed. It becomes possible to manufacture a TFT array substrate without significantly reducing productivity compared to the case.

The liquid crystal display device of the present invention is characterized in that a liquid crystal is sandwiched between a pair of substrates arranged opposite to each other, and one of the pair of substrates has the TFT. In the liquid crystal display device of the present invention, since a TFT array substrate having a TFT having a high withstand voltage between the gate electrode and the semiconductor active film and having a large carrier mobility in the semiconductor active film is used, it has a high response speed, A liquid crystal display device which is excellent in terms of yield and reliability can be realized.

The thin film deposition apparatus of the present invention includes a susceptor electrode that is provided opposite to a high-frequency electrode installed in a deposition chamber and on which a substrate is placed, and the above-described composition while evacuating the deposition chamber to a desired pressure. Supplying a reactive gas into the film chamber, and forming the first coating on the substrate by converting the reactive gas into a plasma by a first high-frequency electric field formed between the high-frequency electrode and the susceptor electrode; And, while maintaining the plasma between the high-frequency electrode and the susceptor electrode, the reaction gas is converted into plasma by a second high-frequency electric field larger than the first high-frequency electric field, and the second coating is formed on the surface of the first film. And a control unit that sequentially performs the step of forming a film.

Means for making the second high-frequency electric field larger than the first high-frequency electric field is to apply a desired plasma excitation power to the high-frequency electrode and to the susceptor electrode when forming the first film. The second substrate bias power applied to the susceptor electrode when forming the second film may be larger than the first substrate bias power. Alternatively, the second plasma excitation power applied to the high-frequency electrode when forming the second coating is higher than the first plasma excitation power applied to the high-frequency electrode when forming the first coating. May be increased.

Another thin film deposition apparatus of the present invention is provided with a susceptor electrode that is provided opposite to a high-frequency electrode installed in a deposition chamber and on which a substrate is placed, while evacuating the deposition chamber to a desired pressure. Supplying a first mixed gas in which a silane gas and an ammonia gas are mixed in a first mixing ratio into the film forming chamber; and passing the first mixed gas between the high-frequency electrode and the susceptor electrode. A step of forming a first silicon nitride film on the substrate by converting into a plasma by a high-frequency electric field to be formed; and ammonia gas from the first mixing ratio while maintaining plasma between the high-frequency electrode and the susceptor electrode A second mixed gas in which silane gas and ammonia gas are mixed at a second mixing ratio with a large ratio is supplied into the film forming chamber, and the second mixed gas is supplied. It is characterized in that it has sequential control unit to perform the steps of into plasma to form a second silicon nitride film on the surface of the first silicon nitride film.

According to the thin film deposition apparatus of the present invention, it is possible to continuously form two layers of coatings having different characteristics as described above in one apparatus.

According to the present invention, the first gate insulating film has a function of improving the breakdown voltage between the gate electrode and the semiconductor active film, and the second gate insulating film improves the interface characteristics between the semiconductor active film and the second gate insulating film. Therefore, as the whole gate insulating film, it is possible to realize a gate insulating film having a desired withstand voltage and a semiconductor active film having a desired carrier mobility. As a result, a TFT capable of operating at high speed with few malfunctions can be obtained. Also, as a method for forming a gate insulating film, when shifting from the formation of the first gate insulating film to the formation of the second gate insulating film, only by switching the excitation power or the substrate bias power, or by switching the mixture ratio of the mixed gas, Two layers of gate insulating films having different characteristics can be continuously formed. Therefore, it is possible to manufacture a TFT array substrate without significantly reducing the productivity as compared with the case where a single-layer gate insulating film is formed. Furthermore, according to the thin film deposition apparatus of the present invention, switching of excitation power or substrate bias power or switching of the mixture ratio of the mixed gas when shifting from the formation of the first gate insulating film to the formation of the second gate insulating film. Can be sequentially performed, and two layers of gate insulating films having different characteristics can be continuously formed. Therefore, it is possible to manufacture a TFT array substrate without significantly reducing the productivity as compared with the case where a single-layer gate insulating film is formed. Furthermore, according to the present invention, it is possible to realize a liquid crystal display device that has a high response speed and is excellent in terms of yield and reliability.

An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a cross-sectional view showing the structure of the TFT of this embodiment and shows an example of an inverted staggered TFT structure.

As shown in FIG. 1, the TFT 1 is provided with a gate electrode 3 made of a metal such as aluminum on a transparent substrate 2 and a gate insulating film 4 made of a two-layer insulating film so as to cover the gate electrode 3. ing. Both the first gate insulating film 5 and the second gate insulating film 6 constituting the gate insulating film 4 are silicon nitride (SiN _x ) films, and the optical band gap value of the first gate insulating film 5 is 3. The optical band gap of the second gate insulating film 6 is in the range of 5.0 to 5.3 eV.

A semiconductor active film 7 made of amorphous silicon (a-Si) is provided on the gate insulating film 4 above the gate electrode 3, and an ohmic contact made of amorphous silicon (a-Si: n ⁺ ) containing n-type impurities such as phosphorus. A source electrode 9 and a drain electrode 10 made of a metal such as aluminum are provided from the semiconductor active film 7 to the gate insulating film 4 via the layer 8. A passivation film 11 covering the TFT 1 composed of the source electrode 9, the drain electrode 10, the gate electrode 3, and the like is provided, and a contact hole 12 is formed in the passivation film 11 on the drain electrode 10. Further, a pixel electrode 13 made of a transparent conductive film such as ITO that is electrically connected to the drain electrode 10 through the contact hole 12 is provided.

Next, a procedure for manufacturing a TFT array substrate having the TFT 1 will be described with reference to FIG. First, as shown in FIG. 2A, a conductive film is formed on the transparent substrate 2 and patterned to form a gate electrode 3 and a gate wiring (not shown). Next, as shown in FIG. 2B, after forming a gate insulating film 4 made of a two-layer SiN _x film covering the gate electrode 3, an a-Si film 14 and an a-Si: n ⁺ film 15 are formed. The a-Si film 14 and the a-Si: n ⁺ film 15 are collectively patterned using a single photomask, whereby the island portion 16 is formed on the gate electrode 3 via the gate insulating film 4. Form.

Here, a thin film forming apparatus used when forming the gate insulating film 4 made of two layers of SiN _x film will be described. FIG. 3 is a schematic diagram showing a two-frequency excitation plasma CVD apparatus which is a thin film deposition apparatus of the present embodiment. In the figure, reference numeral 31 is a plasma excitation power source, reference numeral 32 is a high-frequency electrode, reference numeral 33 is a bias power source, Reference numeral 34 denotes a susceptor electrode, and 35 denotes a film forming chamber.

As shown in FIG. 3, the two-frequency excitation plasma CVD apparatus 30 generates a high-frequency electric field for generating plasma in the film-forming chamber 35 that can maintain the inside in a vacuum atmosphere. The high frequency electrode 32 and the susceptor electrode 34, the plasma excitation power source 31 and the bias power source 33 that supply high frequency power of a predetermined frequency to the electrodes 32 and 34, and the substrate 29 placed on the susceptor electrode 34 are heated. A heating means (not shown), a gas supply means 37 for supplying a desired gas to the inside of the film forming chamber 35 via a gas introduction pipe 36, and correspondingly, the film forming chamber 35 is evacuated to a desired pressure. Gas exhaust means 38 to perform, heating means, plasma excitation power supply 31, bias power supply 33, gas supply means 37, gas exhaust means 38, etc. It has a control unit 39 for controlling each part of the two-frequency excitation plasma CVD apparatus 30 of the structure with.

The dual-frequency excitation plasma CVD apparatus 30 configured as described above operates in the following two types of sequences according to a program stored in the control unit 39. These two types of sequences can be appropriately selected by the operator.

In the first sequence, as shown in FIG. 4, after the substrate 29 is placed on the susceptor electrode 34 provided facing the high-frequency electrode 32 installed in the film forming chamber 35 (step S0 in FIG. 4). ) While supplying the mixed gas of monosilane gas and ammonia gas into the film forming chamber 35 while evacuating the film forming chamber 35 to a desired pressure, the mixed gas is supplied between the high frequency electrode 32 and the susceptor electrode 34. A step of forming a first gate insulating film 5 made of a SiN _x film on the substrate 29 by forming a plasma by the first high frequency electric field to be formed (step S1 in FIG. 4), the high frequency electrode 32 and the susceptor electrode 34 The mixed gas is turned into plasma by a second high-frequency electric field larger than the first high-frequency electric field while maintaining the plasma between them, and is formed on the surface of the first gate insulating film 5. Forming a gate insulating film 6 (step S2 in FIG. 4) are sequentially performed, the first gate insulating film 5, in which the second gate insulating film 6 is continuously formed.

In the first sequence described above, as a means for increasing the second high-frequency electric field from the first high-frequency electric field, the first substrate applied to the susceptor electrode 34 when forming the first gate insulating film 5 is used. A method of increasing the second substrate bias power applied to the susceptor electrode 34 when forming the second gate insulating film 6 than the bias power, and the high-frequency electrode 32 when forming the first gate insulating film 5. Either of the methods of increasing the second plasma excitation power applied to the high-frequency electrode 32 when forming the second gate insulating film 6 than the first plasma excitation power applied to the first gate excitation film may be employed.

As shown in FIG. 5, in the second sequence, after the substrate 29 is placed on the susceptor electrode 34 provided opposite to the high-frequency electrode 32 installed in the film forming chamber 35 (step S0 in FIG. 5). ) Supplying a first mixed gas in which monosilane gas and ammonia gas are mixed in a first mixing ratio into the film forming chamber 35 while evacuating the film forming chamber 35 to a desired pressure (FIG. 5). Step S1 ′), the first mixed gas is turned into plasma by a high-frequency electric field formed between the high-frequency electrode 32 and the susceptor electrode 34, and the first gate insulating film 5 made of a SiN _x film is formed on the substrate 29. 5 (step S1 in FIG. 5), while maintaining the plasma between the high-frequency electrode 32 and the susceptor electrode 34, a second ammonia gas ratio is larger than the first mixing ratio. Second mixed gas by mixing ratio monosilane and ammonia gas are mixed is supplied to the deposition chamber 35, SiN _x the second mixed gas on the surface of the first gate insulating film 5 by plasma A step of sequentially forming the first gate insulating film 5 and the second gate insulating film 6 by sequentially performing the step of forming the second gate insulating film 6 made of a film (step S2 in FIG. 5). It is.

Next, three specific examples when forming the gate insulating film 4 made of two layers of SiN _x films will be described. As described above, both the first gate insulating film 5 and the second gate insulating film 6 are SiN _x films, which can be continuously formed using a two-frequency excitation plasma CVD apparatus. Since these optical band gaps are different, it is necessary to make these two layers separately.

The first example is an example using the first sequence, and is a method of changing the substrate bias power applied to the susceptor electrode holding the substrate to be processed, as shown in FIG. The specific film formation conditions are that the high frequency excitation power of 40.68 MHz applied to the high frequency electrode is constant at 600 W, and the substrate bias power of 13.56 MHz is 0 W (no application state) when the first gate insulating film 5 is formed. And 400 W when the second gate insulating film 6 is formed. At this time, the flow rate ratio of the monosilane gas and the ammonia gas, which are the raw material gas for the SiN _x film, is constant at NH ₃ / SiH ₄ : 160 sccm / 40 sccm. The substrate temperature is 250 to 300 ° C., and the pressure in the chamber is 150 Pa.

The second example is also an example using the first sequence, and is a method of changing the high frequency excitation power as shown in FIG. Specific film forming conditions are such that the substrate bias power is constant at 0 W (no application state), the high frequency excitation power is 200 W when the first gate insulating film 5 is formed, and 800 W when the second gate insulating film 6 is formed. And At this time, the flow rate ratio of the monosilane gas and the ammonia gas is constant at NH ₃ / SiH ₄ : 160 sccm / 40 sccm. The substrate temperature is 250 to 300 ° C., and the pressure in the chamber is 150 Pa.

A third example is an example using the second sequence, and is a method of changing the flow ratio of monosilane gas and ammonia gas as shown in FIG. Specific film forming conditions, NH a flow ratio of monosilane and ammonia gas during the first gate insulating film 5 deposited ₃ / SiH _4: and 80 sccm / 40 sccm, NH when the second gate insulating film 6 deposited ₃ / SiH ₄ : 240 sccm / 40 sccm. At this time, the high frequency excitation power is constant at 800 W, and the substrate bias power is constant at 100 W. The substrate temperature is 250 to 300 ° C., and the pressure in the chamber is 150 Pa.

Even if any of the above three method examples is used, the optical band gap value of the first gate insulating film 5 is set in the range of 3.0 to 4.5 eV, and the optical property of the second gate insulating film 6 is set. The value of the target band gap can be adjusted in the range of 5.0 to 5.3 eV.

Next, as shown in FIG. 2C, after forming a conductive film on the entire surface, this is patterned to form a drain electrode 10, a source electrode 9 and a source wiring (not shown) made of the conductive film. Further, the a-Si: n ⁺ film 15 on the channel portion of the a-Si film 14 is removed to form an ohmic contact layer 8 made of the a-Si: n ⁺ film 15.

Next, as shown in FIG. 2D, a passivation film 11 is formed on the entire surface, and the passivation film 11 on the drain electrode 10 is opened by patterning this, so that the drain electrode 10 and the pixel electrode 13 are electrically connected. Contact hole 12 is formed for connection. Finally, as shown in FIG. 2E, an ITO film is formed on the entire surface, and the pixel electrode 13 is formed by patterning the ITO film. Through such steps, the TFT array substrate of the present embodiment is completed.

In the case of the TFT 1 of the present embodiment, the gate insulating film 4 is composed of two layers of SiN _x films having different optical band gaps as described above, and the first gate insulating film 5 is formed of the gate electrode 3 and the semiconductor active film. The second gate insulating film 6 has a function of improving the interface characteristics with the semiconductor active film 7. Therefore, the gate insulating film 4 as a whole can realize a gate insulating film which has a desired withstand voltage and at the same time the semiconductor active film 7 has a desired carrier mobility. As a result, a TFT capable of operating at high speed with few malfunctions can be obtained.

In addition, when any of the above three examples is used as the method for forming the gate insulating film 4, the excitation power or the substrate bias is applied when the process proceeds from the first gate insulating film forming step to the second gate insulating film forming step. The two-layer gate insulating films 5 and 6 having different characteristics can be formed continuously only by switching the power or the mixture ratio of the mixed gas. Therefore, it is possible to manufacture a TFT array substrate without significantly reducing the productivity as compared with the case where a single-layer gate insulating film is formed.

Hereinafter, an example of a TFT type liquid crystal display device using the TFT array substrate of the present embodiment will be described. In the liquid crystal display device of the present embodiment, as shown in FIG. 9, a pair of transparent substrates 2 and 17 are arranged to face each other, and one of these transparent substrates 2 is a TFT array substrate provided with the TFT 1. The other substrate 17 is a counter substrate. A pixel electrode 13 is provided on the opposing surface side of the TFT array substrate 2, and a common electrode 18 is provided on the opposing surface side of the opposing substrate 17. Further, alignment films 19 and 20 are provided on each of the pixel electrode 13 and the common electrode 18, and a liquid crystal layer 21 is disposed between the alignment films 19 and 20. The first and second polarizing plates 22 and 23 are provided outside the transparent substrates 2 and 17, respectively, and a backlight 24 is attached to the outside of the first polarizing plate 22.

In the TFT type liquid crystal display device of the present embodiment, the TFT type liquid crystal display device has a high breakdown voltage between the gate electrode 3 and the semiconductor active film 7 and has a high carrier mobility in the semiconductor active film 7. A liquid crystal display device which has a response speed and is excellent in terms of yield and reliability can be realized. In addition, since the first gate insulating film 5 of the TFT array substrate located on the backlight 24 side has a high withstand voltage and also serves to absorb ultraviolet light, the TFT characteristics due to the light from the backlight 24 can be improved. Adverse effects can be minimized.

The technical scope of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention. For example, in the above embodiment, a two-frequency excitation plasma CVD apparatus is used to form a two-layer gate insulating film. However, the first gate insulating film and the second gate insulating film are not applied without applying a substrate bias power. In the case of adopting the method of making these separately, it is not necessary to use a two-frequency excitation plasma CVD apparatus, and an ordinary plasma CVD apparatus having only a high-frequency electrode can also be used. Further, although only three examples are shown as the method for forming the gate insulating film, various methods described in the section “Means for Solving the Problems” may be used.

Hereinafter, the relationship between the optical band gap and the characteristics of the gate insulating film in the TFT of the present invention was investigated. Report the results. First, it was investigated how the optical band gap changes depending on the value of the high-frequency applied power when forming the gate insulating film. Using a two-frequency excitation plasma CVD apparatus, the high frequency excitation power (Rf ₁ ) of 40.68 MHz is changed to four types of 200, 400, 600, and 800 arb., And in each case, the substrate bias power (Rf ₂ ) of 13.56 MHz is changed. A SiN _x film was formed by changing from 0 arb. To 400 arb. (Arb. Represents a relative unit), and the optical band gap of each formed SiN _x film was measured. As other film forming conditions, the flow rate ratio of the source gas was SiH ₄ / NH ₃ / N ₂ : 40 sccm / 160 sccm / 600 sccm, the substrate temperature was 300 ° C., and the chamber internal pressure was 250 Pa. The measurement results are shown in FIG.

In FIG. 10, the horizontal axis represents the substrate bias power (arb.) When each film is formed, and the vertical axis represents the optical band gap (eV) of each film. In the figure, data indicated by “◯” indicates that the high frequency excitation power (Rf ₁ ) is 200 arb., Data indicated by “■” indicates that Rf ₁ is 400 arb., Data indicated by “▲” indicates that Rf ₁ is 600 arb. In the case of., The data indicated by “「 ”is for Rf ₁ of 800 arb. From the results shown in FIG. 10, when the high-frequency excitation power (Rf ₁₎ 200arb. And, if from 0 to the substrate bias power (Rf ₂₎ is deposited is set to 200Arb. About value, optical of the SiN _x film It was found that the target band gap takes a value of about 3.5 to 4.5 eV.

Next, the changing RF excitation power (Rf ₁₎ 0,100,200,300arb. And, respectively deposited the SiN _x film by the substrate bias power (Rf ₂₎ is changed from 0Arb. To 500Arb., Formed The dielectric strength voltage was measured using each of the formed SiN _x films. At this time, as a measurement pattern of the withstand voltage, a cross-sectional structure in which a first conductive film having a thickness of 1300 、, a SiN _x film having a thickness of 1300 、, and a second conductive film having an arbitrary thickness are sequentially laminated on a substrate, A “flat portion withstand voltage measurement pattern” for measuring a withstand voltage at a flat portion of the SiN _x film between the first conductive film and the second conductive film having a rectangular shape in plan view, and the first conductive film Both of the “step difference withstand voltage measurement pattern” for measuring the dielectric strength at the step portion of the SiN _x film corresponding to the intersection are formed using the two and the second conductive film in a line. FIG. 11 shows the measurement result of the flat part dielectric breakdown voltage, and FIG. 12 shows the measurement result of the step part dielectric breakdown voltage.

11 and 12, the horizontal axis represents the applied high-frequency power (arb .: where “applied high-frequency power” is the high-frequency excitation power (Rf ₁ ) and the substrate bias power (Rf ₂ ) when each film is formed. The vertical axis represents the withstand voltage (MV / cm). Measurement was performed by changing the high-frequency excitation power (Rf ₁ ) to 0, 100, 200, and 300 arb. 11, if 12 both data indicated by "●" high-frequency excitation power (Rf ₁₎ is 0Arb., If the "△" data shown in Rf ₁ is 100 arb., Data indicated by "□" is Rf ₁ Is 200 arb., The data indicated by “◯” is the case where Rf ₁ is 300 arb. In the measurement of the withstand voltage of the flat portion shown in FIG. 11, when the applied high frequency power is 0 arb., The withstand voltage is about 2 MV / cm, and as the applied high frequency power is increased to 500 arb. To do. On the other hand, in the measurement of the stepped portion withstand voltage shown in FIG. 12, which is a stricter evaluation of the withstand voltage, the withstand voltage is about 6 to 8 MV / cm when the applied high frequency power is in the range of 0 to 200 arb. Although the value was obtained, it was found that the withstand voltage decreased to 1 MV / cm or less as the applied high frequency power was increased to 500 arb., And the desired withstand voltage could not be obtained.

Especially regarding the breakdown voltage of the gate insulating film in an inverted stagger type TFT, a step of the gate insulating film is always formed at the end of the gate electrode, and electric field concentration occurs in the stepped portion, so that the gate insulating film is easily broken. In order to ensure the normal operation of the TFT, it is important that the dielectric strength voltage is particularly high at the stepped portion. Therefore, it is preferable that the applied high-frequency power during film formation is in the range of 0 to 200 arb., And comprehensively judging from the results of FIGS. 10 to 12, the optical band gap of the SiN _x film is 3.5 to 4 When a value of about .5 eV was taken, it was demonstrated that the withstand voltage of the SiN _x film, particularly the withstand voltage at the step portion of the gate electrode, was good, and a highly reliable TFT was obtained.

In addition, several types of SiN _x films having different optical band gaps were formed, and field effect mobility was measured using each of the formed SiN _x films. Two types of samples were prepared by changing the pressure in the chamber at the time of forming the SiN _x film (the sample indicated by “●” in FIG. 13 is the _one indicated by the pressure P ₁ Pa and the sample indicated by “□” in FIG. 13). There are those of the pressure P ₂ Pa), respectively to measure the field-effect mobility. The result is shown in FIG.

In FIG. 13, the horizontal axis represents the optical band gap (eV) of each film, and the vertical axis represents the field effect mobility (cm ² / V · sec). From the results shown in FIG. 13, it can be seen that when the optical band gap is in the range of 3.5 to 5.0 eV, the field-effect mobility tends to increase gradually as the optical band gap increases. However, when the optical band gap exceeds 5.0 eV, the field effect mobility starts to increase rapidly, and when the optical band gap reaches 5.3 eV, the field effect mobility around 1.0 cm ² / V · sec. As a result, a value about twice that obtained when the optical band gap was 3.5 eV was obtained. Therefore, it was demonstrated that it is preferable to use a SiN _x film having an optical band gap in the range of 5.0 to 5.3 eV from the viewpoint of improving carrier mobility.

As described above in detail, according to the present invention, the first gate insulating film has a function of improving the breakdown voltage between the gate electrode and the semiconductor active film, and the second gate insulating film is semiconductor active. Since it has the function of improving the interface characteristics with the film, the gate insulation film as a whole has a desired dielectric breakdown voltage and at the same time a gate insulation film that makes the semiconductor active film have the desired carrier mobility. can do. As a result, a TFT capable of operating at high speed with few malfunctions can be obtained. Also, as a method for forming a gate insulating film, when shifting from the formation of the first gate insulating film to the formation of the second gate insulating film, only by switching the excitation power or the substrate bias power, or by switching the mixture ratio of the mixed gas, Two layers of gate insulating films having different characteristics can be continuously formed. Therefore, it is possible to manufacture a TFT array substrate without significantly reducing the productivity as compared with the case where a single-layer gate insulating film is formed. Further, according to the thin film deposition apparatus of the present invention, switching of excitation power or substrate bias power or switching of the mixture ratio of the mixed gas when shifting from the formation of the first gate insulating film to the formation of the second gate insulating film. Can be sequentially performed, and two layers of gate insulating films having different characteristics can be continuously formed. Therefore, it is possible to manufacture a TFT array substrate without significantly reducing the productivity as compared with the case where a single-layer gate insulating film is formed. Furthermore, according to the present invention, a liquid crystal display device having a high response speed and excellent in yield and reliability can be realized.

It is sectional drawing which shows the structure of TFT which is one embodiment of this invention. It is a process flow figure showing the manufacturing process of TFT similarly. It is the schematic which shows the 2 frequency excitation plasma CVD apparatus used by this Embodiment. It is a flowchart which shows the 1st sequence of the process of the apparatus. It is a flowchart which shows a 2nd sequence similarly. FIG. 4 is a diagram showing a sequence when forming a gate insulating film of a TFT, and showing an example of a method for changing a substrate bias power. FIG. 4 is a diagram showing a sequence when forming a gate insulating film of a TFT, and showing an example of a method for changing high-frequency excitation power. FIG. 4 is a diagram showing a sequence when forming a gate insulating film of a TFT, and showing an example of a method for changing a flow rate ratio of a mixed gas. It is sectional drawing which shows schematic structure of the liquid crystal display device using the TFT array substrate provided with TFT similarly. It is an experimental data which shows the correlation with the substrate bias electric power at the time of the film-forming which is an Example of this invention, and an optical band gap. It is an experimental data which shows the correlation with the applied high frequency electric power at the time of the film-forming which is an Example of this invention, and a flat part dielectric strength voltage. It is experimental data which shows the correlation with the applied high frequency electric power at the time of the film-forming which is an Example of this invention, and a level | step difference dielectric strength. It is an experimental data which shows the correlation with the optical band gap which is an Example of this invention, and field effect mobility. It is a top view which shows schematic structure of a general liquid crystal display device. It is sectional drawing which shows the structure of the conventional TFT.

Explanation of symbols

1 TFT
2 transparent electrode 3 gate electrode 4 gate insulating film 5 first gate insulating film 6 second gate insulating film 7 semiconductor active film 8 ohmic contact layer 9 source electrode 10 drain electrode 13 pixel electrode 29 substrate 30 two-frequency excitation plasma CVD apparatus (Thin film deposition system)
32 High frequency electrode 34 Susceptor electrode 35 Deposition chamber

Claims (4)

A susceptor electrode that is placed opposite to the high-frequency electrode installed in the film forming chamber and on which the substrate is placed, and a reactive gas is supplied into the film forming chamber while evacuating the film forming chamber to a desired pressure. And forming a first film on the substrate by converting the reaction gas into plasma by a first high-frequency electric field formed between the high-frequency electrode and the susceptor electrode, and the high-frequency electrode and the susceptor electrode. A step of forming a second film on the surface of the first film by sequentially converting the reaction gas into a plasma with a second high-frequency electric field larger than the first high-frequency electric field while maintaining a plasma between the first and the second high-frequency electric fields. A thin film deposition apparatus, comprising: A desired plasma excitation power is applied to the high-frequency electrode, and the susceptor is formed when the second film is formed by a first substrate bias power applied to the susceptor electrode when the first film is formed. 2. The thin film deposition apparatus according to claim 1, wherein the second high frequency electric field is made larger than the first high frequency electric field by increasing a second substrate bias power applied to the electrode. The second plasma excitation power applied to the high-frequency electrode when forming the second film is larger than the first plasma excitation power applied to the high-frequency electrode when forming the first film. The thin film deposition apparatus according to claim 1, wherein the second high-frequency electric field is made larger than the first high-frequency electric field. A susceptor electrode provided opposite to the high-frequency electrode installed in the film forming chamber, and a substrate, and a silane gas and an ammonia gas in the film forming chamber while evacuating the film forming chamber to a desired pressure. Supplying a first mixed gas mixed at a first mixing ratio, and converting the first mixed gas into a plasma by a high-frequency electric field formed between the high-frequency electrode and the susceptor electrode. Forming a first silicon nitride film thereon, and maintaining a plasma between the high-frequency electrode and the susceptor electrode, and maintaining the plasma between the high-frequency electrode and the susceptor electrode at a second mixing ratio that is larger than the first mixing ratio. A second mixed gas in which ammonia gas and ammonia gas are mixed is supplied into the film forming chamber, and the second mixed gas is converted into plasma to produce the first nitrogen. Thin film deposition apparatus characterized by having a sequentially performed to the control unit and forming a second silicon nitride film on the surface of the silicon film.

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