JP2007127974A - Micromanipulator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micromanipulator capable of easily and appropriately manipulating a minute object without complicating the entire part of the device. <P>SOLUTION: The micromanipulator 1 is equipped with an XY stage 42 for placement of cells, and a first manipulation unit 3 and a second manipulation unit 4 for manipulating the cells. The first manipulation unit 3 has a handling section 34 for manipulating the cells, an XY driving section 31 for moving the handling section 34 in X, Y directions and a Z driving section 33 supported by the XY driving section 31 to move the handling section 34 in a Z direction. The second manipulation unit 4 has the handling section 44 for manipulating the cells, an XY driving section 41 for moving the XY stage 42 in in X, Y directions and a Z driving section 43 for moving the handling section 44 in a Z direction. The manipulation functions are different for the handling sections 34, 44 with the first and second manipulation units. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a micromanipulator, and more particularly to a micromanipulator for operating a minute object on a stage with two operators.

  Conventionally, for example, micromanipulators have been used for assembling micro parts and operating cells. In general, a micromanipulator has a mechanism for moving an operation element in order to operate a minute object (see, for example, Patent Document 1). Since an object to be operated is minute, an operation by the micromanipulator is performed with the naked eye. Is performed with reference to an image output to a monitor such as a display under a microscope field of view or via a camera attached to the microscope (see, for example, Patent Document 2). In addition, in order to improve the operability (handling workability) of a minute object, two micromanipulators having a moving mechanism in three directions of X, Y, and Z are positioned symmetrically about the optical axis of the microscope (both sides). It is common to operate a minute object with two arms (two operating elements).

  In such an operation using a micromanipulator, when a micro object to be operated is moved to a position where it can be easily operated under a microscope, it is moved using an XY stage separately from the two micromanipulators, or the operator himself I move a small object with my hand. In addition, if a minute object adheres to the operation element due to electrostatic force or the like during operation of the micromanipulator, the operation of the minute object may be hindered. Therefore, it is necessary to detach the adhered minute object by vibrating the operation element. It becomes. Furthermore, since the minute object may be damaged or difficult to operate depending on the direction of operation, the direction of the operation element is manually adjusted.

JP-A-8-168979 JP-A-4-303810

  However, when two micromanipulators are used as in the prior art, the operation of the XY stage is required in addition to the operation of each micromanipulator, so that the operation of a minute object becomes complicated and the entire apparatus Becomes complicated. Also, in order to prevent damage to the minute object due to the operation, it is important to adjust the orientation of the minute object, the operation element, and the like. Furthermore, in conventional micromanipulators, glass capillaries and gripping tools are used for the operation of minute objects. However, there is a demand for micromanipulators that can handle a plurality of operation functions because of limited operation functions. .

  An object of the present invention is to provide a micromanipulator that can easily and appropriately operate a minute object without complicating the entire apparatus.

  In order to solve the above-described problems, the present invention provides a moving stage for placing a minute object, and a first operation element arranged in the vicinity of the moving stage for operating the minute object in X and Y directions. A first operating unit having a first moving unit for moving the first operating unit; a second moving unit supported by the first moving unit for moving the first operating element in the Z direction; and A fourth movement that is arranged at a position different from the first operation unit, moves the moving stage in the X and Y directions, and moves a second operation element for operating the minute object in the Z direction. A second operating unit having means.

  In the present invention, the minute object is placed on the moving stage. The moving stage on which the minute object is placed is moved in the X and Y directions by the third moving means of the second operating unit, and then the first operating element of the first operating unit is moved by X and By moving in the Y direction and moving in the Z direction by the second moving means, the tip of the first operating element with respect to the minute object is positioned with three degrees of freedom, and the second operating element of the second operating unit is Moved in the Z direction by the fourth moving means, the tip of the second operating element with respect to the minute object is positioned.

  In the present invention, the third moving means has a pantograph mechanism that synthesizes and enlarges or reduces the input displacements in the X and Y directions, and the moving stage is fixed to the output side of the pantograph mechanism. May be. The first operation unit further includes first posture changing means for changing the posture direction so that the first manipulator rotates on the XY plane around the tip of the first manipulator. It is preferable.

  Further, the first and second operating elements may be pivotally supported by the second and fourth moving means so as to be detachable. At least one of the first and second operating units further changes a posture direction so that the first and second operating elements rotate about an axis on which the first and second operating elements are pivotally supported. It is preferable to have two posture change means. In this case, it is desirable that the first and second operating elements are selected from a plurality of types of operating elements and are detachable. Moreover, it is preferable that the lengths from the base part to the tip part are set to be the same for the plural types of operation elements.

  Moreover, it is preferable that the first and second operation units further include impact applying means for applying an impact to the first and second operation elements, respectively. The impact applying means includes a locking member that locks the first and second operating elements, an urging member that applies an urging force to the first and second operating elements, and an urging force of the urging member. Each actuator for applying a driving force to the first and second operating elements, and a contact member for contacting the first and second operating elements driven by the driving force of the actuator. The first and second operating elements locked to the locking member by the biasing force of the biasing member are separated from the locking member by the driving force of the actuator, and the first and second operating elements collide with the contact member. You may make it give an impact to a 1st and 2nd operation element, respectively.

  According to the present invention, the first operation unit and the second operation unit have different operation functions with respect to the first and second operation elements. Therefore, the operation unit can be operated easily with respect to a minute object placed on the moving stage. Since the first or second operator can be operated, an effect that the minute object can be appropriately operated can be obtained.

  Hereinafter, an embodiment in which a micromanipulator according to the present invention is applied to a minute object handling system for operating a cell as a minute object will be described with reference to the drawings.

(Constitution)
As shown in FIG. 1, a micro object handling system 200 according to the present embodiment includes a micromanipulator 1 that is fixed to a surface plate 2 for manipulating cells, a microscope 5 for visually observing cells, a personal computer (hereinafter referred to as “manipulator”). 6) and a control box 8 with a built-in programmable logic controller (hereinafter abbreviated as PLC) that controls the micromanipulator 1 as a slave computer of the PC 6. Yes.

  An input / output cable to / from the control box 8, an output cable to the monitor 7 such as a liquid crystal display, and an input cable from the CCD camera 55 attached to the microscope 5 are connected to the PC 6. The control box 8 is connected to a connection cable 8a for transmitting an operation signal to the micromanipulator 1, and has a joystick, a cross button, etc., and a controller (input device) for giving a command to the PLC of the control box 8. ) 9 is connected. Therefore, the operator of the minute object handling system 200 can visually observe the cell 10 placed on the XY stage 42 as a moving stage via the monitor 7.

  As shown in FIG. 2, the PLC built in the control box 8 includes a D / A converter, an A / D converter, and the like in addition to the CPU, ROM, and RAM. The PLC receives basic operation commands from the PC 6 according to the program and program data stored in the ROM, and transmits data detected by an encoder and the like and various actuator statuses to the PC 6 via the registered Ethernet (Ethernet). To do. Further, the PLC has each actuator control unit for converting a command input from the controller 9 into each actuator control signal and transmitting it to the micromanipulator 1 via the connection cable 8a.

  As shown in FIG. 3, the micromanipulator 1 includes an XY stage 42 for placing cells 10 operated by the micromanipulator 1, a microscope 5 equipped with a CCD camera 55, and cells placed on the XY stage 42. A first operation unit 3 and a second operation unit 4 for operating 10 from both sides of the microscope 5 are provided. A connection cable 8 a is connected to the first operation unit 3.

  As shown in FIGS. 3 and 4, the micromanipulator 1 has a base 21 that is fixed to the surface plate 2 described above. The microscope 5 includes an XY stage 42 whose lower side is fixed to the center portion of the base 21, a lens barrel having a zoom lens 52 mounted on the XY stage 42 side, and a CCD camera 55 mounted on the upper portion of the lens barrel. Has been. In order to focus on the cell 10, the lens barrel is in sliding contact with a support fixed to the base 21 so as to be slidable in the vertical direction. As shown in FIG. 5, the XY stage 42 has a base 423 fixed to the base 21. Two Y-direction slide rails parallel to the Y direction are disposed on the upper surface of the base 423, and two sliders disposed on the lower surface of the Y-direction stage 422 are in sliding contact with the Y-direction slide rail. . Two X-direction slide rails parallel to the X direction are disposed on the upper surface of the Y-direction stage 422, and two sliders disposed on the lower surface of the X-direction stage 421 are in sliding contact with the X-direction slide rail. ing.

  The first operation unit 3 is roughly divided into a handling unit 34 as a first operator for operating the cell 10, and the handling unit 34 is moved in the X direction and the Y direction (an X direction actuator 311 and a Y direction actuator 312 described later). ) An XY driving unit 31 as a first moving unit, and a Z driving unit 33 as a second moving unit are configured to move the handling unit 34 in the Z direction (a Z-direction actuator 331 described later). The XY drive unit 31 rotates the handling unit 34 on the XY plane around the distal end (a gripping finger 341 described later) of the handling unit 34 (strictly speaking, this corresponds to the swinging of the rotary swinging mechanism. It has a θz actuator 315 to be described later as first posture changing means for changing the posture direction of the handling unit 34 with respect to the cell 10 placed on the XY stage 42.

  The XY drive unit 31 is disposed on a gantry 24 supported by four columns fixed to the base 21, and the Z drive unit 33 is supported on the output side (the microscope 5 side) of the XY drive unit 31. ing. A control signal transmitted from the PLC built in the control box 8 via the connection cable 8a is received on the back side of the XY drive unit 31 on the gantry 24 (upper side in FIG. 4), and the XY drive unit 31, Z A drive circuit unit 35 for driving the drive unit 33 and the handling unit 34 is arranged. A power supply connector 38 connected to an external power source and a signal connector 37 for connecting the connection cable 8a are arranged on the exterior of the back side.

  A handling unit 34 is arranged on the microscope 5 side of the Z drive unit 33. Between the Z drive unit 33 and the handling unit 34, a second posture changing means for changing the posture direction of the handling unit 34 with respect to the cell 10 by rotating the handling unit 34 about the axis on which the handling unit 34 is pivotally supported. The θk actuator 36 is arranged.

<XY drive unit 31>
As shown in FIGS. 5 and 6, the gantry 24 includes an X-direction actuator 311 and a Y-direction actuator 312 that serve as driving sources for driving the handling unit 34 in the X and Y directions, respectively. It is fixed in the direction.

  The X-direction actuator 311 includes a stepping motor 311a having an encoder that can be rotated forward and backward, an output unit slider 311c that is engaged with a ball screw 311b that is an output shaft of the stepping motor 311a and is formed on the opposite side of the encoder, and a slider 311c is a linear motion actuator having a slidable linear guide rail (not shown). Similarly, the Y-direction actuator 312 has a stepping motor 312a having an encoder and capable of forward and reverse rotation, and an output shaft of the stepping motor 312a. The slider 312c engages with a ball screw formed on the opposite side of the encoder, and a linear guide rail (not shown) on which the slider 312c can slide.

  The slider 311c of the X-direction actuator 311 is fixed with a θz actuator 315 that includes a stepping motor and supplies a driving force for changing the orientation direction of the handling unit 34. The output shaft 315a of the θz actuator 315 is connected to a pulley 315c having a diameter larger than that of the output shaft 315a via a belt 315b. The rotation shaft of the pulley 315c is fixed to the X direction input link 317a of the pantograph mechanism 317. The slider 312c of the Y direction actuator 312 is fixed to the Y direction input link 317b of the pantograph mechanism 317. For this reason, the X direction actuator 311, the Y direction actuator 312, and the θz actuator 315 change the linear motion displacement in the X direction and the Y direction to the pantograph mechanism 317, and change the posture direction of the handling unit 34 as described later (the handling unit 34 Can be given a linear motion displacement (θz displacement).

  In addition to the X direction input link 317a and the Y direction input link 317b, the pantograph mechanism 317 includes a plurality of substantially linear links and a plurality of rotation pairs, for example, seven links and nine rotation treatments, and an output on the handling unit 34 side. The link 317c is combined. For this reason, the X-direction and Y-direction linear motion displacements input from the X-direction actuator 311, Y-direction actuator 312 and θz actuator 315 and the above-described θz displacement are combined, enlarged or reduced, and output to the output link 317c. Is done. The pantograph mechanism 317 is disposed above these actuators so as not to interfere with the X-direction actuator 311, the Y-direction actuator 312, and the θz actuator 315. A Z drive unit 33 is supported on the handling unit 34 side of the output link 317c, and a gear box 332 of the Z drive unit 33 is fixed on the upper side of the output link 317c.

<Z drive unit 33>
As shown in FIGS. 5 and 6, the Z-direction actuator 331 of the Z drive unit 33 includes a stepping motor 331a supported on the lower side of the output link 317c and capable of forward and reverse rotation, and a reduction gear train from the stepping motor 331a. The gear box 332 that decelerates the rotational driving force, and a ball screw 331b that moves the handling unit 34 in the Z direction. That is, the tip end (upper part) of the ball screw 331b extending downward is connected to the output end of the reduction gear train of the gear box 332. A nut is screwed into the ball screw 331b, and a support member 333 for supporting the θk actuator 36 is fixed to the nut. The θk actuator 36 is supported by the support member 333. A handling section 34 is detachably supported by the θk actuator 36 via a shaft 348.

<Handling unit 34>
As shown in FIG. 7, the support member 333 is fixed with a θk actuator 36 that rotates the handling part 34 about the shaft 348, that is, gives a rotational displacement (θk displacement) to the handling part 34. The θk actuator 36 includes a stepping motor that can rotate forward and backward, and a reduction gear train that reduces the rotational driving force from the stepping motor. For this reason, the rotational driving force from the stepping motor of the θk actuator 36 is decelerated by the reduction gear train and transmitted to the handling unit 34 via the shaft 348, so that the handling unit 34 is centered on the shaft 348, for example, ± It rotates in the range of 90 degrees. In the handling part 34, the length from the base part to the tip of the shaft 348 is set to a length L.

  The handling unit 34 has a gripping finger 341 composed of a fixed finger and a movable finger in order to grip the cell 10. The fixed finger supports a fixed end effector 341b, and the movable finger supports a movable end effector 341a.

  As shown in FIG. 8, a gripping actuator 71 such as a meter is fixed to the gripping base 74 of the handling unit 34 with a bracket. The plate to which the rear end portion of the fixed finger is assembled (fixed) is fixed to the grip base 74 while forming a fixed gap with the grip base 74 in a state where the fixed finger is assembled. A long plate-like lever is interposed in this gap. A movable finger is fixed to the tip of the lever (opposite to the Z drive unit 33), and a fulcrum shaft projects in both the vertical direction at the approximate center of the tip. The gap described above is defined by the fulcrum shaft being pivotally supported by the plate bearing and the grip base 74 bearing. A substantially U-shaped slit (notch) is formed at the rear end of the lever, and the output pin of the gripping actuator 71 is engaged with the slit. Therefore, when the gripping actuator 71 is driven, the movable end effector 341a approaches or separates from the fixed end effector 341b by swinging the lever about the fulcrum axis, and the cell 10 is gripped or released. It can be carried out. The fixed end effector 341b and the movable end effector 341a can be adjusted with screws provided on the fixed finger and the movable finger so that the tips come into contact with each other.

  The handling unit 34 includes an impact actuator 75 as an impact applying unit that applies an impact to the gripping finger 341 in order to detach the cells 10 attached to the fixed end effector 341b and the movable end effector 341a. As shown in FIG. 8, the handling unit 34 includes a base 77 for supporting the shaft 348, and the shaft 348 inserted into the base 77 is fixed with a screw 78. The base 77 incorporates an impact actuator 75 constituted by a plunger solenoid having a plunger portion 751 and a coil portion 752. A grip base 74 is pivotally supported by a shaft 79 in a hole 771 formed in an arm extending above the base 77. One side of the plunger part 751 is pivotally supported by an arm part 741 extending below the grip base 74, and the other side of the plunger part 751 is inserted into the coil part 752. A stopper (abutment member) (not shown) that stops the movement of the plunger portion 751 by abutting the end of the coil portion 752 on the screw 78 side is disposed.

  A coil spring 76 is stretched between a pin 742 projecting from the side surface of the grip base 74 and a pin 772 projecting from the side surface of the base 77. 74 is urged clockwise (CW direction in FIG. 8) about the shaft 79 as a rotation fulcrum, and this urging force keeps the stopper (locking member) 743 in contact with the base 77 and stationary. ing.

  On the other hand, as shown in FIGS. 3 and 4, the second operation unit 4 moves the handling unit 44 as a second operator for operating the cell 10 and the XY stage 42 in the X and Y directions (X described later). Direction actuator 411, Y direction actuator 412) The XY drive unit 41 as the third moving means and the four columns fixed to the base 21 are fixed and handled on the pedestal 25 supported above the XY drive unit 41. The unit 44 is configured to move in the Z direction (Z direction actuator 431 described later) and a Z drive unit 43 as fourth moving means. In addition, the control signal transmitted from the PLC built in the control box 8 is received on the back side (upper side in FIG. 4) of the Z drive unit 43 on the gantry 25, and the XY drive unit 41, the Z drive unit 43, A drive circuit unit 45 for driving the handling unit 44 is arranged. The drive circuit unit 45 is supplied with power via the power supply connector 38 described above, and receives a control signal from the PLC via the signal connector 37.

  The XY drive unit 41 is fixed on the base 21, and the handling unit 44 is disposed on the microscope 5 side of the Z drive unit 43. Between the Z drive unit 43 and the handling unit 44, a second posture change is performed in which the handling unit 44 is rotated about the shaft 348 on which the handling unit 44 is pivotally supported to change the posture direction of the handling unit 44 with respect to the cell 10. A θk actuator 46 as a means is arranged. The handling unit 44 is pivotally supported by the θk actuator 46 so as to be detachable. The fixing position of the Z drive unit 43 with respect to the gantry 25 is adjusted so that the tip of the handling unit 44 is positioned on the optical axis of the microscope 5.

<XY drive unit 41>
As shown in FIG. 5, the base 21 has an XY stage 42 in a direction in which an X-direction actuator 411 and a Y-direction actuator 412 that are driving sources for driving the XY stage 42 in the X and Y directions intersect each other. It is fixed.

  The X-direction actuator 411 includes a stepping motor 411a having an encoder and capable of forward and reverse rotation, and an output unit slider (not shown) that engages with a ball screw 411b that is an output shaft of the stepping motor 411a and is formed on the opposite side of the encoder. The Y-direction actuator 412 is also a stepping motor that has an encoder and is capable of forward and reverse rotation, and an output shaft of the stepping motor. The slider engages with a ball screw formed on the opposite side, and a linear guide rail on which the slider can slide.

  The slider of the X direction actuator 411 is fixed to the X direction input link of the pantograph mechanism 417, and the slider of the Y direction actuator 412 is fixed to the Y direction input link of the pantograph mechanism 417. For this reason, the X-direction actuator 411 and the Y-direction actuator 412 can apply a linear displacement in the X and Y directions to the pantograph mechanism 417.

  The pantograph mechanism 417 is configured in the same manner as the pantograph mechanism 317 of the first operation unit 3 described above by combining a plurality of substantially linear links and a plurality of rotary pairs in addition to the X direction input link and the Y direction input link. Has been. For this reason, the linear movement displacements in the X and Y directions input from the X direction actuator 411 and the Y direction actuator 412 are combined, enlarged or reduced, and output to the output link. The pantograph mechanism 417 is arranged above these actuators so as not to interfere with the X direction actuator 411 and the Y direction actuator 412. The output link is fixed to the X direction stage 421 constituting the XY stage 42 with a connecting member.

<Z drive unit 43>
As shown in FIG. 5, the Z direction actuator 431 of the Z drive unit 43 has a Z direction linear motion mechanism 431a having a stepping motor capable of forward and reverse rotation, and a reduction gear train, and decelerates the rotational driving force from the stepping motor. And a gear box 432. The Z direction linear motion mechanism 431a includes a ball screw, a nut, a slider, a guide rail, and a holder. That is, a ball screw extending downward is connected to the output end of the reduction gear train of the gear box 432. The tip end side of the ball screw is rotatably supported by a holder fixed to the gear box 432. A nut is screwed onto the ball screw, and a slider is fixed to the nut. Further, a linear guide rail is provided from the gear box 432 so as to be parallel to the ball screw, and the tip end side of the guide rail is fixed to the holder. The slider is in contact with the guide rail so as to be slidable on the guide rail. A support member 333 for supporting the θk actuator 46 is fixed to the slider. A handling portion 44 is pivotally supported on the θk actuator 46 via a shaft 348.

<Handling unit 44>
Similar to the handling unit 34 described above, a θk actuator 46 that rotates the handling unit 44 about the shaft 348 is fixed to the support member 333. The θk actuator 46 includes a stepping motor that can rotate forward and backward, and a reduction gear train that reduces the rotational driving force from the stepping motor. For this reason, the rotational driving force from the stepping motor of the θk actuator 46 is decelerated by the reduction gear train and transmitted to the handling unit 44, whereby the handling unit 44 rotates about the shaft 348. The handling unit 44 is configured in the same manner as the handling unit 34 described above.

(Operation)
Next, the operation of the minute object handling system 200 of the present embodiment will be described focusing on the operation of the micromanipulator 1.

  First, as shown in FIG. 1, the operator gives commands in the X direction and the Y direction to the second operation unit 4 from the controller 9 via the PLC of the control box 8, and the cells placed on the XY stage 42. 10 is captured in the screen of the monitor 7 via the CCD camera 55 of the microscope 5. In this state, the operator instructs the second operation unit 4 in the Z direction and θk direction (the rotation angle of the handling unit 44 around the shaft 348, that is, the posture direction of the handling unit 44), and the gripping finger 341. And the relative position between the cell 10 and the gripping finger 341 of the handling unit 44 is manipulated. Further, the first operation unit 3 has an X direction, a Y direction, and a θz direction (the swing angle of the handling unit 34 around the tip of the gripping finger 341, that is, the posture direction of the handling unit 34), the Z direction, and θk. A direction command and a handling command for the gripping finger 341 are given, and the relative position between the cell 10 and the gripping finger 341 of the handling unit 34 is manipulated.

<XY stage movement>
As shown in FIGS. 3 to 5, when an operation signal is given to the X direction actuator 411, the stepping motor 411a rotates the ball screw 411b, and the X direction input link of the pantograph mechanism 417 is connected to the X direction input link of FIG. Move in the left-right direction (X direction). When an operation signal is given to the Y direction actuator 412, the stepping motor rotates the ball screw and moves the Y direction input link of the pantograph mechanism 417 in the vertical direction (Y direction) in FIG. 4 via the slider. As described above, the displacement obtained by combining the displacements in the X and Y directions is output to the output link of the pantograph mechanism 417 by the input in the X and Y directions. Therefore, the XY stage 42 connected to the output link is moved in the XY direction.

<Handling unit 44 drive>
(Z direction drive)
As shown in FIG. 5, when an operation signal is given to the stepping motor of the Z-direction linear movement mechanism 431a, the rotational driving force of the stepping motor is transmitted to the ball screw via the reduction gear train disposed in the gear box 432, The slider is moved in the vertical direction (Z direction) in FIG. Thereby, the handling part 44 supported via the support member 333 fixed to the slider is moved in the Z direction.

(Gripping drive)
As shown in FIGS. 6 and 8, when an operation signal is given to the θk actuator 46, the rotational driving force of the stepping motor is transmitted to the handling unit 44 via the reduction gear train and the shaft 348, and the handling unit 44 is coupled to the shaft 348. Rotate around the center. When an operation signal is given to the gripping actuator 71, the output pin swings, and the lever swings about the fulcrum shaft through the slit. As a result, the movable end effector 341a of the handling unit 44 moves toward or away from the fixed end effector 341b. Therefore, the two end effectors 341 can hold the cell 10 in an arbitrary direction such as the vertical direction or the left-right direction, and release the gripped cell 10.

<Handling unit 34 drive>
(XY direction drive)
As shown in FIGS. 5 and 6, when an operation signal is given to the X direction actuator 311, the stepping motor 311 a rotates the ball screw 311 b, and the X direction input link 317 a of the pantograph mechanism 317 is illustrated via the slider 311 c. 5 in the left-right direction (X direction). When an operation signal is given to the Y direction actuator 312, the stepping motor 312 a rotates the ball screw, and the Y direction input link 317 b of the pantograph mechanism 317 is moved in the direction perpendicular to the paper surface of FIG. 5 (Y direction) via the slider 312 c. Move. As described above, the displacement obtained by combining the displacements in the X and Y directions is output to the output link 317c of the pantograph mechanism 317 by the input in the X and Y directions. Accordingly, the handling unit 34 pivotally supported on the output link 317c via the Z drive unit 331 is moved in the XY direction. When an operation signal is given to the θz actuator 315, the rotation shaft of the pulley 315c is rotated via the belt 315b, and a swing displacement (θz displacement) is applied to the X-direction input link 317a of the pantograph mechanism 317. As a result, the swing displacement of the same angle is also output to the output link 317c via the pantograph mechanism 317. Accordingly, the handling unit 34 is moved in the XY directions, and the posture direction with respect to the cell 10 is changed around the tip of the gripping finger 341.

(Z direction drive)
When an operation signal is given to the stepping motor 331a of the Z driving unit 331, the rotational driving force of the stepping motor is transmitted to the ball screw 331b through the reduction gear train disposed in the gear box 332, and the nut screwed to the ball screw 331b. Is moved in the vertical direction (Z direction) in FIG. Thereby, the handling part 34 supported via the support member 333 fixed to the nut is moved in the Z direction.

(Gripping drive)
When an operation signal is given to the θk actuator 36, the rotational driving force of the stepping motor is transmitted to the handling unit 34 via the reduction gear train and the shaft 348, and the handling unit 34 rotates about the shaft 348. As shown in FIG. 8, when an operation signal is given to the gripping actuator 71, the lever swings around the fulcrum shaft via the output pin and the slit. Thereby, the movable end effector 341a of the handling part 34 moves close to or away from the fixed end effector 341b. Accordingly, the grasping finger 341 can grasp the cell 10 from any direction such as the vertical direction and the left-right direction and from any direction due to the θz displacement, and release the grasped cell 10.

<Desorption of cells>
As shown in FIG. 8, when a voltage is applied to the coil portion 752 of the impact actuator (plunger solenoid) 75 by a command from the controller 9, a magnetomotive force is generated, and the plunger portion 751 is attracted into the coil portion 752. As the plunger portion 741 moves, the grip base 74 is rotated counterclockwise (CCW direction) against the biasing force of the coil spring 76 with the shaft 79 as a rotation fulcrum via the arm portion 741. As a result, the stopper 743 that has been in contact with the base 77 is separated from the base 77. The rotation of the grip base 74 is stopped when the plunger portion 751 comes into contact with a stopper in the coil portion 752. When the magnetomotive force of the coil portion 752 is released, the grip base 74 rotates clockwise, and the stopper 743 comes into contact with the base 77, whereby the grip base 74 stops rotating. The operation of the plunger portion 751 is an impact displacement that is performed in a very short time, and the impact at the time of stoppage is also large. Therefore, the cells attached to the tip portion of the end effector 341 due to the impact at the time of stopping clockwise or counterclockwise rotation 10 can be detached using the action of inertial force.

(Action etc.)
Next, the operation and the like of the minute object handling system 200 of the present embodiment will be described focusing on the operation of the micromanipulator 1.

  Conventionally, in order to improve the operability for micro objects such as cells, two micromanipulators with three-direction X, Y, and Z movement mechanisms (degrees of freedom in three directions) are placed on both sides of the microscope. Then, operations on the cells and the like are performed. In this case, an XY stage is used in addition to the two micromanipulators in order to move cells and the like to an easily operable position within the field of view of the microscope. For this reason, the operator first needs to move the cell or the like to a position where it can be easily operated by operating the XY stage. After the cells and the like are moved within the field of view of the microscope, the cells and the like are operated by operating two micromanipulators. Therefore, although the two micromanipulators are used to improve the operability of cells and the like, the entire apparatus becomes complicated by using the XY stage. In addition, since the two micromanipulators are individually operated and the XY stage is also operated, the operation becomes complicated. Further, when the micromanipulator has a mechanism (θz moving mechanism) for changing the direction with respect to the cells or the like in addition to the moving mechanism in three directions, the operation becomes more complicated. In addition, during operation of cells or the like, cells or the like may adhere to the gripping finger or the like due to the action of electrostatic force or the like. A gripping finger or the like is vibrated to detach attached cells or the like, but cannot be detached if the electrostatic force is greater than the vibration force. The present embodiment is a micromanipulator that can solve these problems.

  The micromanipulator 1 according to the present embodiment includes an XY stage 42, a first operation unit 3, and a second operation unit 4, and these are arranged on one base 21. The first operation unit 3 moves the handling unit 34 by the θz displacement and θk displacement in addition to the three directions X, Y, and Z, and the second operation unit 4 moves the XY stage 42 in the two directions X and Y. The handling unit 44 is moved in the Z direction. Therefore, the first operation unit 3 can position the handling unit 34 on the cell 10 with a total of 5 degrees of freedom, and the second operation unit 4 can position the handling unit 44 on the cell 10 with a total of 4 degrees of freedom. . Therefore, as compared with the case where two micromanipulators are used, since the XY stage 42 is moved by the second operation unit 4, the entire apparatus can be simplified. Further, by operating one controller 9, an operation command can be given to the first operation unit 3 and the second operation unit 4, so that the operation of the cell 10 can be easily performed. Further, in the micromanipulator 1, the operation functions for the handling units 34 and 44 are different between the first operation unit 3 and the second operation unit 4. For this reason, the operator can operate the cell 10 appropriately by operating the handling unit of the operation unit that is easy to operate on the cell 10.

  In the micromanipulator 1, the handling unit 44 of the second operation unit 4 is moved only in the Z direction by the Z driving unit 43. Since the distal end of the handling unit 44 is positioned on the optical axis of the microscope 5, the distal end of the handling unit 44 can be easily positioned in the vicinity of the cell 10 positioned in the visual field of the microscope 5 by the XY stage 42. it can. On the other hand, the handling unit 34 of the first operation unit 3 is moved in the X direction, the Y direction, and the Z direction by the XY drive unit 31 and the Z drive unit 33, and the posture with respect to the cell 10 is changed by the θz actuator 315. . For this reason, the front-end | tip part of the operation element of the handling part 34 can be easily located in the vicinity of the cell 10 from arbitrary directions by (theta) z displacement. Accordingly, since the cell 10 is operated by the handling unit 34 and the handling unit 44 each having two end effectors 341a and 341b, the cell 10 can be operated by a total of four end effectors.

  Furthermore, since the driving of the handling unit 34 in the Z direction is a driving against gravity, the driving load applied to the stepping motor 331a increases. In the micromanipulator 1, the Z drive unit 33 of the first operation unit 3 is supported by the output link 317 c of the pantograph mechanism 317 constituting the XY drive unit 31. For this reason, the stepping motors 311a and 312a of the XY drive unit 31 simultaneously drive the Z drive unit 33 and the handling unit 34. Since this drive is performed on a flat surface, the drive load applied to each stepping motor is reduced. No need to increase. Therefore, in the 1st operation unit 3, the increase in the sum total of the drive load concerning each stepping motor driven to three directions of X, Y, and Z can be suppressed, and energy consumption can be suppressed.

  Furthermore, in the micromanipulator 1, the handling portions 34 and 44 are rotated around the shaft 348 on which the handling portions 34 and 44 are pivotally supported by the θk actuators 36 and 46. Therefore, each gripping finger 341 can grip the cell 10 in an arbitrary direction such as a vertical direction or a horizontal direction. Therefore, by controlling the θz displacement and the θk displacement, the operation on the cell 10 can be performed easily and appropriately.

  Furthermore, when the cell 10 is grasped by the grasping finger 341 while adjusting the voltage of each actuator, various inter-surface forces, for example, the cell 10 or fragments of the manipulated cell 10 adhere to the grasping finger 341 by electrostatic force. And will not leave. If the cell 10 or the like is attached to the gripping finger 341, it becomes an obstacle when the cell 10 is subsequently operated. Therefore, an operation for detaching the attached cell 10 or the like is required. In the micromanipulator 1 of the present embodiment, the handling units 34 and 44 each have an impact actuator 75 that detaches the cell 10 or the like. For this reason, the cells 10 and the like attached to the gripping finger 341 can be easily detached.

  In the present embodiment, the gripping fingers 341 that exhibit the gripping function are exemplified in the handling units 34 and 44, but the present invention is not limited to this. An end effector having a shape suitable for an operation function for the cell 10, for example, a function of cutting or scooping up can be used. This can be achieved by using a handling part having a knife-like end effector 342 as shown in FIG. 9 (A) or a handling part having a spoon-like end effector 343 as shown in FIG. 9 (B). Can be realized. In the micromanipulator 1, since the handling units 34 and 44 are pivotally supported by the Z driving units 31 and 41 via the shaft 348, the handling units 34 and 44 can be handled in a variety of ways. It can be easily exchanged by selecting from the parts. In this case, since the length L (see FIG. 7) from the base portion to the distal end portion of the handling portion is set to be the same in each handling portion, the trouble of adjusting the moving distance of the handling portion for each end effector is avoided. be able to.

  Further, in the present embodiment, the handling units 34 and 44 having the gripping fingers 341 having the same gripping function are illustrated in the second operation unit 4 and the first operation unit 3, but the present invention is not limited to this. A handling unit having an end effector having a different function in each operation unit may be used. For example, a handling unit having a gripping finger 341 having a gripping function in the first operation unit 4 and a handling unit having an end effector 342 having a cutting function (see FIG. 9A) can be used in the second operation unit 3, respectively. . If it does in this way, cell 10 can be correctly cut by operation of the 2nd operation unit 3 which grasps cell 10 by operation of the 1st operation unit 4, and moves handling part 44 only in the Z direction.

  Furthermore, in the present embodiment, the example in which the XY stage 42 is moved in the X and Y directions by the second operation unit 4 has been shown, but the present invention is not limited to this, and for example, the XY stage 42 is moved in the Z direction. It may be movable. In this way, the degree of freedom of movement of the XY stage 42 can be increased, and the operation of the relative position between the handling unit 44 and the cell 10 placed on the XY stage 42 can be facilitated.

  Furthermore, in the present embodiment, the pantograph mechanisms 317 and 417 configured by combining a plurality of links and a plurality of rotating pairs are illustrated, but various pantograph mechanisms having different link combinations can be employed. Moreover, you may employ | adopt the linear motion mechanism of a X direction and a Y direction, without employ | adopting a pantograph mechanism for XY drive parts 31 and 41. FIG.

  Furthermore, in this embodiment, although the case where the operation object of the handling parts 34 and 44 was made into the same cell 10 was illustrated, this invention is not limited to this, The cell used as operation object differs. Also good. In this case, each operation target is operated by the first and second operation units. Moreover, although the example which drives the XY stage 42 in the state which mounted the cell 10 on the XY stage 42 was shown, this invention is not limited to this, For example, by driving the 1st operation unit 3 The cell 10 may be placed on the XY stage 42.

  Moreover, although the example which connects the control box 8 and the micromanipulator 1 with the connection cable 8 was shown in this embodiment, this invention is not limited to this. For example, two microcomputers may be mounted on the control box 8 and connected to the first operation unit 3 and the second operation unit 4, respectively. In the present embodiment, the example in which the first operation unit 3 and the second operation unit 4 are arranged on both sides of the microscope 5 is shown. However, the present invention is not limited to this. Two operation units may be arranged side by side, or each handling unit may be arranged in an orthogonal direction.

  An object of the present invention is to provide a micromanipulator capable of easily and appropriately manipulating a minute object without complicating the entire apparatus, and thus contributes to the manufacture and sale of micromanipulators. Have potential.

1 is a schematic configuration diagram of a minute object handling system according to an embodiment to which the present invention is applicable. It is a block diagram which shows the outline of the control part of the micromanipulator of a micro object handling system. It is a perspective view of the micromanipulator of a minute object handling system. It is a top view of a micromanipulator. It is a front view of a micromanipulator. It is a perspective view of the right operation unit of a micromanipulator. It is a front view of the right operation unit of a micromanipulator and a microscope. It is a front view which cuts and shows a handling part partially. It is a perspective view of the handling part which has a different operation function with respect to a cell, (A) is a handling part which has a knife-like end effector, (B) is a handling part which has a spoon-like end effector.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Micromanipulator 3 1st operation unit 4 2nd operation unit 31 XY drive part (1 part of 1st moving means)
33 Z drive part (part of second moving means)
34 Handling part (first operating means)
41 XY drive unit (part of third moving means)
42 XY stage (moving stage)
43 Z drive part (part of fourth moving means)
44 Handling part (second operating means)
311 X direction actuator (part of first moving means)
312 Y-direction actuator (part of the first moving means)
331 Z-direction actuator (part of second moving means)
341 Gripping finger (operator)
411 X direction actuator (part of third moving means)
412 Y direction actuator (part of third moving means)
431 Z-direction actuator (part of fourth moving means)

Claims (9)

A moving stage for placing micro objects;
A first moving means that is disposed in the vicinity of the moving stage and moves a first operating element for operating the minute object in the X and Y directions, and is supported by the first moving means, and the first operating element is A first operating unit having second moving means for moving in the Z direction;
A third moving means arranged near the moving stage and different from the first operating unit, for moving the moving stage in the X and Y directions, and a second operating element for operating a minute object. A second operating unit having fourth moving means for moving in the Z direction;
Micromanipulator equipped with.   The third moving means has a pantograph mechanism that synthesizes and enlarges or reduces the displacement in the input X and Y directions, and the moving stage is fixed to the output side of the pantograph mechanism. The micromanipulator according to claim 1.   The first operation unit further includes first attitude changing means for changing the attitude direction so that the first operator rotates on the XY plane around the tip of the first operator. The micromanipulator according to claim 1, wherein:   The micromanipulator according to claim 1, wherein the first and second operating elements are pivotally supported by the second and fourth moving units, respectively.   At least one of the first and second operation units further changes the posture direction so that the first and second operation elements rotate about an axis on which the first and second operation elements are pivotally supported. The micro manipulator according to claim 4, further comprising second posture changing means.   The micromanipulator according to claim 4 or 5, wherein the first and second operators are selected from a plurality of types of operators and can be attached and detached.   The micromanipulator according to claim 6, wherein the plurality of types of operators are set to have the same length from the base to the tip.   2. The micromanipulator according to claim 1, wherein the first and second operation units further include impact applying means for applying an impact to the first and second operation elements, respectively.   The impact applying means includes a locking member that locks the first and second operating elements, an urging member that applies an urging force to the first and second operating elements, and an urging force applied to the urging member. Each actuator for applying a driving force against the force to the first and second operating elements, and an abutting member for bringing the first and second operating elements driven by the driving force of the actuator into contact with each other The first and second operating elements locked to the locking member by the biasing force of the biasing member are separated from the locking member by the driving force of the actuator, and the contact member is 9. The micromanipulator according to claim 8, wherein an impact is applied to each of the first and second operating elements by causing the first and second operating elements to collide with each other.

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