JP2007127181A - Magnetic bearing device and vacuum pump device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic bearing device and a vacuum pump device capable of performing a rotation test of the magnetic bearing device at low cost. <P>SOLUTION: The magnetic bearing device is provided with a magnetic bearing spindle 1 for rotating a rotary impeller 15; and a controller 16 for controlling the magnetic bearing spindle 1. The controller 16 performs control of the magnetic bearing spindle 1 based on a first action mode in which the rotary impeller 15 is mounted on the magnetic bearing spindle 1 or a second action mode in which the rotary impeller 15 is not mounted on the magnetic bearing spindle 1. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a magnetic bearing device and a vacuum pump device, and more particularly to a magnetic bearing device and a vacuum pump device having a plurality of operation modes.

  In general, when a magnetic bearing device is used as a spindle for a turbo molecular pump, a rotating blade having a large inertia is attached to the rotating body of the magnetic bearing spindle. Therefore, the control parameter of the magnetic bearing spindle is assumed to be attached in advance. Designed. These control parameters are specific to each type of magnetic bearing spindle.

As a magnetic bearing device in which such model-specific control parameters are stored in a memory in advance and the control parameters are selectively used according to the model, for example, Patent Document 1 discloses the following magnetic bearing device. That is, a table memory for storing a plurality of types of control parameters for controlling a plurality of types of pump units, a model determination circuit for determining the model of the pump unit based on the detection signal of the position sensor, and control according to the determined model A table selection circuit for selecting parameters is provided. The model discriminating circuit discriminates the model based on the offset signal and gain of the position sensor.
JP 2003-148383 A

  By the way, in the rotation test performed at the time of shipment and overhaul of the magnetic bearing device, it is necessary to rotate the magnetic bearing spindle to the rated rotational speed. However, the control system of the magnetic bearing spindle for the turbo molecular pump, that is, the control parameter of the magnetic bearing and the control parameter of the motor are designed on the assumption that the rotor is attached to the rotor, so the rotor is not attached. In this state, the magnetic bearing cannot be stably operated. In addition, the magnetic bearing spindle with the rotor blades cannot be rotated to the rated rotational speed in the atmosphere because the air resistance of the rotor blades is large.

  Therefore, in the rotation test at the time of shipment and overhaul of the conventional magnetic bearing device such as the magnetic bearing device described in Patent Document 1, the rotation test is performed with the rotor blade attached to the rotating body and the magnetic bearing spindle installed in a vacuum environment. Although it is carried out, it takes a lot of man-hours to install the rotor blades and install them in a vacuum environment, and special equipment is required. Furthermore, since it takes several minutes to several tens of minutes to start and stop the rotation of the magnetic bearing spindle due to the inertia of the rotor blades, a very large number of man-hours are required for the rotation test. Therefore, the conventional magnetic bearing device such as the magnetic bearing device described in Patent Document 1 has a problem in that the rotation test of the magnetic bearing device is costly.

  SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a magnetic bearing device and a vacuum pump device that can perform a rotation test of the magnetic bearing device at a low cost.

  In order to solve the above problems, a magnetic bearing device according to an aspect of the present invention includes a magnetic bearing spindle that rotates a rotor blade and a controller that controls the magnetic bearing spindle. The magnetic bearing spindle is controlled based on whether it is in the first operation mode attached to the rotor or in the second operation mode in which the rotor blade is not attached to the magnetic bearing spindle.

  Preferably, the controller is in the first operation mode, the storage unit storing the first control parameter corresponding to the first operation mode and the second control parameter corresponding to the second operation mode, Alternatively, a parameter selection unit that selects the first control parameter or the second control parameter based on whether the operation mode is the second operation mode, and a spindle that controls the magnetic bearing spindle based on the control parameter selected by the parameter selection unit And a control unit.

  More preferably, the magnetic bearing spindle includes a rotating body that rotates the rotating blade, a motor that rotationally drives the rotating body, and a magnetic bearing that magnetically supports the rotating body in a non-contact manner, and each storage unit stores. The control parameter is at least one of a parameter for a motor and a parameter for a magnetic bearing.

  Preferably, the controller further detects abnormality of the magnetic bearing spindle based on whether the operation mode is the first operation mode or the second operation mode.

  In order to solve the above-described problems, a vacuum pump apparatus according to an aspect of the present invention includes a rotor blade, a magnetic bearing spindle that rotates the rotor blade, and a controller that controls the magnetic bearing spindle. The magnetic bearing spindle is controlled based on whether the rotor is in the first operation mode attached to the magnetic bearing spindle or in the second operation mode in which the rotor blade is not attached to the magnetic bearing spindle.

  According to the present invention, the rotation test of the magnetic bearing device can be performed at low cost.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference numerals and description thereof will not be repeated.

[Configuration and basic operation]
FIG. 1 is a functional block diagram showing a configuration of a magnetic bearing device according to an embodiment of the present invention.

  Referring to FIG. 1, the magnetic bearing device includes a magnetic bearing spindle 1 and a controller 16. The magnetic bearing spindle 1 includes a housing 2, a rotating shaft (rotating body) 3, a thrust magnetic bearing 4, radial magnetic bearings 5 to 6, a drive motor 7, radial position sensors 8 to 9, and a thrust position sensor. 10, protective bearings 11 to 12, and an exhaust port 14. The controller 16 includes a memory (storage unit) 17, an abnormality detection unit 22, a spindle control unit 31, and a parameter selection unit 32.

  The spindle control unit 31 includes a magnetic bearing control unit 20 and a motor driver 21. The parameter selection unit 32 includes a mode switch 18 and a CPU (Central Processing Unit) 19.

  FIG. 2 is a functional block diagram showing the configuration of the vacuum pump device according to the embodiment of the present invention.

  With reference to the figure, the vacuum pump device is, for example, a turbo molecular pump, and includes a magnetic bearing device according to an embodiment of the present invention, a case 13, and a rotor blade 15.

  Referring to FIGS. 1 and 2, the magnetic bearing spindle 1 and the controller 16 are connected by a cable 23.

The rotary shaft 3 is provided in the housing 2 and rotates the rotary blade 15.
The thrust magnetic bearing 4 includes an electromagnet, and supports the rotating shaft 3 in the thrust direction in a non-contact manner based on an electric current supplied to the electromagnet.

  The radial magnetic bearings 5 to 6 include electromagnets, and support the rotary shaft 3 in the radial direction in a non-contact manner based on the current supplied to the electromagnets.

The drive motor 7 rotationally drives the rotary shaft 3 based on the supplied drive current.
The radial position sensors 8 to 9 detect the radial position of the rotary shaft 3 and output a detection signal to the controller 16 via the cable 23.

  The thrust position sensor 10 detects the position in the thrust direction of the rotary shaft 3 and outputs a detection signal to the controller 16 via the cable 23.

  The magnetic bearing control unit 20 supplies current to the thrust magnetic bearing 4 and the radial magnetic bearings 5 to 6 based on the detection signals received from the radial position sensors 8 to 9 and the thrust position sensor 10 and the set control parameters. Thereby, the control which supports the rotating shaft 3 magnetically without contact is performed.

  The motor driver 21 rotates by supplying a drive current to the drive motor 7 based on a detection signal received from a rotation detection sensor (not shown) built in the drive motor 7 and a set control parameter. Control to rotate the shaft 3 is performed.

  The abnormality detection unit 22 detects, for example, an abnormality of the magnetic bearing spindle 1 based on detection signals received from the radial position sensors 8 to 9 and the thrust position sensor 10, and performs control such as stopping the operation of the magnetic bearing spindle 1. Do.

  The protective bearings 11 to 12 are arranged above and below the rotating body 3 and support the rotating shaft 3 when, for example, the thrust magnetic bearing 4 or the radial magnetic bearings 5 to 6 fail to support the rotating shaft 3. Provided for.

  The storage unit 17 includes control parameters (hereinafter also referred to as “rotary blade mounting parameters”) corresponding to the case where the rotary blades 15 are attached to the magnetic bearing spindle 1 (hereinafter also referred to as first operation mode), and the rotary blades. Control parameters (hereinafter also referred to as “rotary blade non-mounting parameters”) corresponding to the case where 15 is not attached to the magnetic bearing spindle 1 (hereinafter also referred to as the second operation mode) are stored. The storage unit 17 may be configured to store only one type of rotor blade non-installation parameter, or may store a plurality of types of rotor blade non-installation parameters according to the installation direction of the magnetic bearing spindle 1. The parameter selection unit 32 may be configured to select any one of a plurality of types of parameters for not mounting the rotor blades.

  Here, the control parameters stored in the storage unit 17 are constants for calculating, for example, a current value supplied to the thrust magnetic bearing 4 and the radial magnetic bearings 5 to 6 and a current value supplied to the drive motor 7. More specifically, when the rotor blade 15 is not attached to the magnetic bearing spindle 1, the inertia of the rotor blade 15 is not affected and the rotating shaft 3 becomes lighter. Therefore, the thrust magnetic bearing 4 and the radial magnetic bearings 5 to 6 The control parameter is set so that the current value to be supplied is smaller than when the rotor blade 15 is attached to the magnetic bearing spindle 1.

  The control parameters stored in the storage unit 17 include, for example, the magnetic bearing control unit 20 and the motor driver 21 that perform PID (Proportional Integral Derivative) control and the like on the thrust magnetic bearing 4, the radial magnetic bearings 5 to 6, and the drive motor 7. It is a control constant (gain, time constant, etc.) used when performing with respect to it.

  Further, the storage unit 17 may be configured to store the abnormality detection parameters used by the abnormality detection unit 22 as the rotor blade mounting parameters and the rotor blade non-mounting parameters. For example, the storage unit 17 detects an abnormality such as a reference value when the abnormality detection unit 22 detects an abnormality such as a current value of the thrust magnetic bearing 4 and the radial magnetic bearings 5 to 6 and an acceleration time of the drive motor 7. Save the reference value when performing. More specifically, when the rotor blade 15 is not attached to the magnetic bearing spindle 1, the influence of the inertia by the rotor blade 15 is eliminated and the rotating shaft 3 becomes light, so that the drive motor 7 rotates the rotating shaft 3 to a predetermined degree. The abnormality detection parameter is set so that the upper limit of the normal value of the time required to reach the speed is shorter than when the rotor blade 15 is attached to the magnetic bearing spindle 1. With such a configuration, the rotation test of the magnetic bearing device when the rotor blade 15 is not attached to the magnetic bearing spindle 1 can be performed more appropriately.

[Operation]
Next, the operation of the magnetic bearing device according to the embodiment of the present invention when performing a rotation test will be described. The description will be made on the assumption that the rotor blade 15 is detached from the magnetic bearing device.

  First, the mode switch 18 is turned on corresponding to the first operation mode. The mode change switch 18 may be a mechanical switch that allows a person to switch between an on state and an off state. Further, it may be a software type that is switched from the outside of the magnetic bearing device using a communication line such as RS232C or that is switched by a person operating a touch panel provided in the controller 16. When the switching method is software, it is possible to adopt a configuration in which the CPU 19 realizes the function of the mode switch 18.

  When the mode changeover switch 18 is on, the CPU 19 sets the parameters of the magnetic bearing control unit 20, the motor driver 21, and the abnormality detection unit 22 as parameters for not installing the rotor blades. More specifically, the CPU 19 transfers the rotor blade non-mounting parameters from the storage unit 17 to the magnetic bearing control unit 20, the motor driver 21, and the abnormality detection unit 22 via a bus or the like.

  Then, the magnetic bearing control unit 20 and the motor driver 21 control the rotating shaft 3 and the driving motor 7 based on the parameters for not mounting the rotor blades to rotate the magnetic bearing spindle 1 to the rated rotational speed in the atmosphere. Thus, a rotation test of the magnetic bearing device is performed. Further, the abnormality detection unit 22 detects an abnormality of the magnetic bearing spindle 1 based on a different standard from the case where the rotary blade 15 is attached to the magnetic bearing spindle 1 based on the parameters for not mounting the rotary blade.

  And when the rotation test of a magnetic bearing apparatus is complete | finished, the mode changeover switch 18 will be made into the OFF state corresponding to a 2nd operation mode.

  When the mode changeover switch 18 is released, that is, in the off state, the CPU 19 sets the parameters of the magnetic bearing control unit 20, the motor driver 21, and the abnormality detection unit 22 to parameters for mounting the rotor blades, for example, parameters at the time of shipment. Set.

  By the way, in the rotation test at the time of shipment and overhaul of the conventional magnetic bearing device such as the magnetic bearing device described in Patent Document 1, it is necessary to perform the rotation test with the rotor blade attached to the rotating body and the magnetic bearing spindle installed in a vacuum environment. There was a problem that it cost a lot. However, in the magnetic bearing device according to the embodiment of the present invention, when the rotation test of the magnetic bearing device is performed, the magnetic bearing spindle is rotated to the rated rotational speed in the atmosphere without attaching the rotor blade to the magnetic bearing spindle. Therefore, the rotation test of the magnetic bearing device can be performed in a short time with simple equipment, and the rotation test of the magnetic bearing device can be performed at low cost.

  Further, when a manufacturer A ships a magnetic bearing device, and another manufacturer B who purchases the magnetic bearing device sells it as a turbo molecular pump by attaching a rotor blade or the like to the magnetic bearing device, the magnetic material described in Patent Document 1 is used. In a conventional magnetic bearing device such as a bearing device, it is necessary for the manufacturer A to perform a rotation test by attaching a test rotor blade at the time of shipment of the magnetic bearing device, and to remove the rotor blade before shipping. In the magnetic bearing device according to the embodiment, it is not necessary to attach and remove the test rotor blade, the rotation test of the magnetic bearing device can be performed efficiently, and the cost of the rotation test can be reduced. .

  In the magnetic bearing device according to the embodiment of the present invention, the storage unit 17 includes the rotor blade mounting parameters and the rotor blade non-mounting parameters used by the magnetic bearing control unit 20, the motor driver 21, and the abnormality detection unit 22. However, the present invention is not limited to this. When the rotor blade 15 is not attached to the magnetic bearing spindle 1, only the control parameter used by either the magnetic bearing control unit 20 or the motor driver 21 is changed to the parameter for not installing the rotor blade to stabilize the magnetic bearing device. As long as it can be operated, the storage unit 17 may be configured to store any one of the rotor blade non-mounting parameters used by the magnetic bearing control unit 20 and the motor driver 21.

  In addition, the vacuum pump device provided with the magnetic bearing device according to the embodiment of the present invention is a turbo molecular pump. However, the present invention is not limited to this, and the present invention can be applied to any vacuum pump device including rotating blades. Is possible.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is a functional block diagram which shows the structure of the magnetic bearing apparatus which concerns on embodiment of this invention. It is a functional block diagram which shows the structure of the vacuum pump apparatus which concerns on embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Magnetic bearing spindle, 2 Housing, 3 Rotating shaft (Rotating body), 4 Thrust magnetic bearing, 5-6 Radial magnetic bearing, 7 Driving motor, 8-9 Radial position sensor, 10 Thrust position sensor, 11-12 Protection Bearing, 13 Case, 14 Exhaust port, 15 Rotor blade, 16 Controller, 17 Memory (memory unit), 18 Mode change switch, 19 CPU, 20 Magnetic bearing control unit, 21 Motor driver, 22 Abnormality detection unit, 23 Cable, 31 Spindle control unit, 32 parameter selection unit.

Claims (5)

A magnetic bearing spindle for rotating the rotor blades;
A controller for controlling the magnetic bearing spindle,
The controller is based on whether the rotor is in a first operating mode attached to the magnetic bearing spindle or a second operating mode in which the rotor is not attached to the magnetic bearing spindle. A magnetic bearing device for controlling the magnetic bearing spindle. The controller is
A storage unit for storing a first control parameter corresponding to the first operation mode and a second control parameter corresponding to the second operation mode;
A parameter selection unit that selects the first control parameter or the second control parameter based on whether the operation mode is the first operation mode or the second operation mode;
The magnetic bearing device according to claim 1, further comprising: a spindle control unit that controls the magnetic bearing spindle based on the control parameter selected by the parameter selection unit. The magnetic bearing spindle is
A rotating body that rotates the rotor blade;
A motor for rotationally driving the rotating body;
A magnetic bearing that magnetically supports the rotating body in a non-contact manner,
The magnetic bearing device according to claim 2, wherein each control parameter stored in the storage unit is at least one of a parameter for the motor and a parameter for the magnetic bearing.   2. The magnetic bearing device according to claim 1, wherein the controller further detects abnormality of the magnetic bearing spindle based on whether the operation mode is the first operation mode or the second operation mode. With rotating wings,
A magnetic bearing spindle for rotating the rotor blade;
A controller for controlling the magnetic bearing spindle,
The controller is based on whether the rotor is in a first operating mode attached to the magnetic bearing spindle or a second operating mode in which the rotor is not attached to the magnetic bearing spindle. A vacuum pump device for controlling the magnetic bearing spindle.

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