JPH1122729A - Magnetic bearing device - Google Patents

Magnetic bearing device

Info

Publication number
JPH1122729A
JPH1122729A JP9175415A JP17541597A JPH1122729A JP H1122729 A JPH1122729 A JP H1122729A JP 9175415 A JP9175415 A JP 9175415A JP 17541597 A JP17541597 A JP 17541597A JP H1122729 A JPH1122729 A JP H1122729A
Authority
JP
Japan
Prior art keywords
inverter
abnormality
magnetic bearing
detection device
rotating body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9175415A
Other languages
Japanese (ja)
Inventor
Atsushi Kubo
厚 久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP9175415A priority Critical patent/JPH1122729A/en
Publication of JPH1122729A publication Critical patent/JPH1122729A/en
Pending legal-status Critical Current

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  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic bearing device to simplify a circuit for an inverter and reduce size, and improve reliability and flexibility of abnormality processing. SOLUTION: A magnetic bearing device comprises a control type magnetic bearing having a plurality of electromagnets 11 to support a rotor 10 in a non- contact state; a position detecting device 13 for a rotor 10; an electric motor 14 to rotationally drive the rotor 10; an inverter 15 to drive the motor 14; the number of revolutions detecting device 16 for a rotor 10; and a control part 18 to control the electromagnets 11 based on an output signal from the position detecting device 13 and control the inverter 15 based on an output signal from the number of revolutions detecting device 16. An abnormality detecting device 17 is arranged. The control part 18 is provided with a digital signal processing processor to control the electromagnet 11 and the inverter 15. When abnormality is detected, abnormality is processed by controlling the inverter 15 by a digital signal processing processor.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、回転体を磁気軸
受で非接触支持する磁気軸受装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic bearing device for supporting a rotating body in a non-contact manner with a magnetic bearing.

【0002】[0002]

【従来の技術】磁気軸受装置として、回転体を非接触支
持する複数の電磁石を有する制御型磁気軸受と、回転体
の位置を検出する位置検出装置と、回転体を回転駆動す
る電動モータと、モータを駆動するインバータと、回転
体の回転数を検出する回転数検出装置と、位置検出装置
の出力信号に基づいて電磁石を制御するとともに回転数
検出装置の出力信号に基づいてインバータを制御する制
御部とを備えているものが知られている。
2. Description of the Related Art As a magnetic bearing device, a control type magnetic bearing having a plurality of electromagnets for supporting a rotating body in a non-contact manner, a position detecting device for detecting a position of the rotating body, an electric motor for rotatingly driving the rotating body, An inverter that drives the motor, a rotation speed detection device that detects the rotation speed of the rotating body, and control that controls the electromagnet based on the output signal of the position detection device and controls the inverter based on the output signal of the rotation speed detection device There is known one that includes a part.

【0003】このような従来の磁気軸受装置において、
モータ駆動用のインバータには、停電、インバータの異
常温度上昇、モータの過電流などの異常が発生したとき
に、異常処理を行わせるための保護回路が設けられてい
る。
In such a conventional magnetic bearing device,
The inverter for driving the motor is provided with a protection circuit for performing an abnormality process when an abnormality such as a power failure, an abnormal temperature rise of the inverter, or an overcurrent of the motor occurs.

【0004】ところが、保護回路があるために、インバ
ータの回路が複雑になり、インバータの外形が大きくな
る。また、保護回路のためにインバータの部品点数が多
くなるため、信頼性も高くない。
However, the presence of the protection circuit complicates the inverter circuit and increases the outer shape of the inverter. Further, since the number of parts of the inverter increases due to the protection circuit, the reliability is not high.

【0005】[0005]

【発明が解決しようとする課題】この発明の目的は、上
記の問題を解決し、インバータの回路の簡素化および小
形化が可能で、異常処理の信頼性および融通性の高い磁
気軸受装置を提供することにある。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a magnetic bearing device which solves the above-mentioned problems, simplifies and downsizes an inverter circuit, and has high reliability and flexibility in abnormality processing. Is to do.

【0006】[0006]

【課題を解決するための手段および発明の効果】この発
明による磁気軸受装置は、回転体を非接触支持する複数
の電磁石を有する制御型磁気軸受と、前記回転体の位置
を検出する位置検出装置と、前記回転体を回転駆動する
電動モータと、前記電動モータを駆動するインバータ
と、前記回転体の回転数を検出する回転数検出装置と、
前記位置検出装置の出力信号に基づいて前記電磁石を制
御するとともに前記回転数検出装置の出力信号に基づい
て前記インバータを制御する制御部とを備えている磁気
軸受装置において、所要部分の異常を検出する異常検出
装置が設けられ、前記制御部が、前記電磁石および前記
インバータを制御するディジタル信号処理プロセッサを
備えており、前記異常検出装置により異常が検出された
ときに、前記ディジタル信号処理プロセッサが前記イン
バータを制御して異常処理を行わせるようになっている
ことを特徴とするものである。
A magnetic bearing device according to the present invention has a control type magnetic bearing having a plurality of electromagnets for supporting a rotating body in a non-contact manner, and a position detecting device for detecting a position of the rotating body. An electric motor that rotationally drives the rotating body, an inverter that drives the electric motor, and a rotational speed detecting device that detects the rotational speed of the rotating body,
A control unit that controls the electromagnet based on the output signal of the position detection device and controls the inverter based on the output signal of the rotation speed detection device, and detects an abnormality in a required portion. An abnormality detection device is provided, the control unit includes a digital signal processor that controls the electromagnet and the inverter, and when an abnormality is detected by the abnormality detection device, the digital signal processing processor It is characterized in that the inverter is controlled to perform an abnormality process.

【0007】この明細書において、ディジタル信号処理
プロセッサ(Digital Signal Processor)とは、ディジ
タル信号を入力してディジタル信号を出力し、ソフトウ
ェアプログラムが可能で、高速実時間処理が可能な専用
ハードウェアを指す。なお、以下、これをDSPと略す
ことにする。
[0007] In this specification, a digital signal processor (Digital Signal Processor) refers to dedicated hardware that inputs a digital signal, outputs a digital signal, is software-programmable, and is capable of high-speed real-time processing. . Hereinafter, this is abbreviated as DSP.

【0008】異常発生時に制御部のDSPがインバータ
を制御して異常処理を行わせるので、インバータに従来
のような保護回路を設ける必要がない。このため、イン
バータの回路の簡素化および部品点数の削減が可能で、
信頼性が高くなり、インバータの小形化ができる。ま
た、DSPのソフトウェアプログラムによって異常処理
制御を自由に設計することができ、きわめて融通性が高
い。
When an abnormality occurs, the DSP of the control unit controls the inverter to perform the abnormality processing, so that it is not necessary to provide the inverter with a conventional protection circuit. For this reason, the circuit of the inverter can be simplified and the number of parts can be reduced.
The reliability is improved, and the inverter can be downsized. Further, the abnormal processing control can be freely designed by the software program of the DSP, which is extremely flexible.

【0009】[0009]

【発明の実施の形態】以下、図面を参照して、この発明
の実施形態について説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0010】図1は、磁気軸受装置の構成を概略的示し
ている。
FIG. 1 schematically shows the configuration of a magnetic bearing device.

【0011】磁気軸受装置は、回転体(10)を非接触支持
する複数の電磁石(11)を有するディジタル制御型磁気軸
受と、電磁石(11)を駆動する電磁石駆動回路(12)と、回
転体(10)の位置を検出する位置検出装置(13)と、回転体
(10)を回転駆動する電動モータ(14)と、モータ(14)を駆
動するインバータ(15)と、回転体(10)の回転数を検出す
る回転数検出装置(16)と、磁気軸受装置の所要部分の異
常を検出する異常検出装置(17)と、位置検出装置(13)の
出力信号に基づいて駆動回路(12)を介して電磁石(11)を
制御するとともに回転数検出装置(16)の出力信号および
異常検出装置(17)の出力信号に基づいてインバータ(15)
を制御する制御部(18)とを備えている。
The magnetic bearing device includes a digital control type magnetic bearing having a plurality of electromagnets (11) for supporting the rotating body (10) in a non-contact manner, an electromagnet driving circuit (12) for driving the electromagnet (11), and a rotating body. A position detecting device (13) for detecting the position of (10), and a rotating body;
An electric motor (14) for rotationally driving the motor (10), an inverter (15) for driving the motor (14), a rotational speed detector (16) for detecting the rotational speed of the rotating body (10), and a magnetic bearing device An abnormality detection device (17) for detecting an abnormality of a required portion of the motor, and an electromagnet (11) is controlled via a drive circuit (12) based on an output signal of the position detection device (13), and a rotation speed detection device (16 ) And the output signal of the abnormality detection device (17).
And a control unit (18) for controlling the control.

【0012】磁気軸受は、複数の電磁石(11)の磁気吸引
力により、回転体(10)の軸方向(アキシアル方向)の1
箇所において回転体(10)を軸方向の制御軸方向に非接触
支持するとともに、軸方向の2箇所において、それぞ
れ、回転体(10)を互いに直交する2つの径方向(ラジア
ル方向)の制御軸方向に非接触支持するものである。電
磁石駆動回路(12)は、各電磁石(11)に対して1つずつ設
けられている。各駆動回路(12)は、電力増幅器などを備
えており、後述するように制御部(18)から出力される電
磁石制御信号に基づいて対応する電磁石(11)に励磁電流
を供給する。なお、図1には、対応する電磁石(11)と駆
動回路(12)を1組だけを示している。
The magnetic bearing is driven by a magnetic attraction force of a plurality of electromagnets (11) to move the rotating body (10) in the axial direction (axial direction).
The rotary body (10) is supported in a non-contact manner in the axial control axis direction at two locations, and at two axial locations, the rotary body (10) is provided with two radial (radial) control axes orthogonal to each other. Non-contact support in the direction. One electromagnet drive circuit (12) is provided for each electromagnet (11). Each drive circuit (12) includes a power amplifier and the like, and supplies an exciting current to the corresponding electromagnet (11) based on an electromagnet control signal output from the control unit (18) as described later. FIG. 1 shows only one set of the corresponding electromagnet (11) and drive circuit (12).

【0013】位置検出装置(13)は、複数の位置センサに
より、回転体(10)の前記軸方向の制御軸方向の位置を検
出するとともに、回転体(10)の軸方向の2箇所における
互いに直交する前記2つの径方向の制御軸方向の位置を
検出するものである。
The position detecting device (13) detects the position of the rotating body (10) in the axial control axis direction by a plurality of position sensors, and detects the position of the rotating body (10) at two locations in the axial direction. It detects a position in the control axis direction in the two radial directions orthogonal to each other.

【0014】磁気軸受の電磁石(11)、電磁石駆動回路(1
2)、位置検出装置(13)、モータ(14)、インバータ(15)お
よび回転数検出装置(16)については、公知の任意の構成
を採用しうるので、詳細な説明は省略する。
The electromagnet (11) of the magnetic bearing, the electromagnet drive circuit (1
2), the position detection device (13), the motor (14), the inverter (15), and the rotation speed detection device (16) can employ any known configurations, and thus detailed description is omitted.

【0015】制御部(18)は、DSPを備えている。DS
Pは、位置検出装置(13)の出力信号に基づいて、各駆動
回路(12)に電磁石制御信号を出力する。そして、前述の
ように、各駆動回路(12)から電磁石制御信号に基づく励
磁電流が対応する電磁石(11)に供給され、これにより、
回転体(10)が所定の目標位置に非接触支持される。ま
た、DSPは、回転数検出装置(16)の出力信号に基づい
て、インバータ(15)に回転数指令信号を出力する。そし
て、インバータ(15)はDSPからの回転数指令信号に基
づく駆動電流をモータ(14)に供給し、これにより、回転
体(10)が所定の回転数で回転させられる。
The control section (18) includes a DSP. DS
P outputs an electromagnet control signal to each drive circuit (12) based on the output signal of the position detection device (13). Then, as described above, the excitation current based on the electromagnet control signal is supplied from each drive circuit (12) to the corresponding electromagnet (11), whereby
The rotating body (10) is supported at a predetermined target position in a non-contact manner. The DSP outputs a rotation speed command signal to the inverter (15) based on the output signal of the rotation speed detection device (16). Then, the inverter (15) supplies a drive current based on the rotation speed command signal from the DSP to the motor (14), whereby the rotating body (10) is rotated at a predetermined rotation speed.

【0016】異常検出装置(17)は、たとえば、インバー
タ(15)の異常温度上昇、モータ(14)の過電流、磁気軸受
の異常動作、停電などの異常を検出するものであり、そ
れぞれの異常を検出するためのセンサが異常検出部位に
設けられている。そして、異常検出装置(17)は、いずれ
かの異常が検出されると、制御部(18)のDSPに異常内
容に対応する割り込み信号を送る。DSPは、異常検出
装置(17)から割り込み信号が送られてくると、その異常
内容に対応する異常処理を行うようにインバータ(15)を
制御する。
The abnormality detection device (17) detects abnormalities such as abnormal temperature rise of the inverter (15), overcurrent of the motor (14), abnormal operation of the magnetic bearing, and power failure. Is provided at the abnormality detection site. When any abnormality is detected, the abnormality detection device (17) sends an interrupt signal corresponding to the content of the abnormality to the DSP of the control unit (18). Upon receiving an interrupt signal from the abnormality detection device (17), the DSP controls the inverter (15) so as to perform abnormality processing corresponding to the content of the abnormality.

【0017】次に、図2のフローチャートを参照して、
上記の制御部(18)におけるDSPの処理の1例について
説明する。
Next, referring to the flowchart of FIG.
An example of the DSP processing in the control unit (18) will be described.

【0018】図2において、DSPは、まず、各制御軸
について、位置検出装置(13)の出力信号である位置検出
信号を入力し(ステップ1)、これに基づいてPID演
算を行い(ステップ2)、対応する駆動回路(12)に電磁
石制御信号を出力する(ステップ3)。次に、異常検出
装置(17)からの割り込み信号があったかどうか、すなわ
ち、異常が検出されたかどうかを調べ(ステップ4)、
異常が検出されていなければ、ステップ1に戻る。そし
て、異常が検出されていない間は、ステップ1〜4の動
作を繰り返す。ステップ4において異常が検出されてい
たときは、ステップ5に進み、インバータ(15)に異常の
内容に応じた異常処理を行わせるための異常処理制御を
行い、ステップ1に戻る。たとえば、インバータ(15)の
異常温度上昇やモータ(14)の過電流などの異常が検出さ
れたときは、インバータ(15)からモータ(14)への出力を
0とするいわゆるフリーラン制御を行い、インバータ(1
5)およびモータ(14)を保護する。また、磁気軸受の異常
動作や停電などの異常が検出されたときは、モータ(14)
を制動してすぐに停止させるようにインバータ(15)を制
御する。
In FIG. 2, the DSP first inputs a position detection signal, which is an output signal of the position detection device (13), for each control axis (step 1), and performs a PID calculation based on the signal (step 2). ), And outputs an electromagnet control signal to the corresponding drive circuit (12) (step 3). Next, it is checked whether or not there has been an interrupt signal from the abnormality detection device (17), that is, whether or not an abnormality has been detected (step 4).
If no abnormality is detected, the process returns to step 1. Then, the operations of steps 1 to 4 are repeated while no abnormality is detected. If an abnormality has been detected in step 4, the process proceeds to step 5, where an abnormality process control for causing the inverter (15) to perform an abnormality process according to the content of the abnormality is performed, and the process returns to step 1. For example, when an abnormality such as an abnormal temperature rise of the inverter (15) or an overcurrent of the motor (14) is detected, so-called free-run control is performed in which the output from the inverter (15) to the motor (14) is set to 0. , Inverter (1
5) and protect the motor (14). If abnormal operation such as abnormal operation of the magnetic bearing or power failure is detected, the motor (14)
The inverter (15) is controlled so as to brake and stop immediately.

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1は、この発明の実施形態を示す磁気軸受装
置の概略構成図である。
FIG. 1 is a schematic configuration diagram of a magnetic bearing device according to an embodiment of the present invention.

【図2】図2は、制御部のディジタル信号処理プロセッ
サの処理の1例を示すフローチャートである。
FIG. 2 is a flowchart illustrating an example of processing of a digital signal processor of a control unit.

【符号の説明】[Explanation of symbols]

(10) 回転体 (11) 電磁石 (13) 位置検出装置 (14) 電動モータ (15) インバータ (16) 回転数検出装置 (17) 異常検出装置 (18) 制御部 (10) Rotating body (11) Electromagnet (13) Position detection device (14) Electric motor (15) Inverter (16) Rotation speed detection device (17) Abnormality detection device (18) Control unit

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】回転体を非接触支持する複数の電磁石を有
する制御型磁気軸受と、前記回転体の位置を検出する位
置検出装置と、前記回転体を回転駆動する電動モータ
と、前記電動モータを駆動するインバータと、前記回転
体の回転数を検出する回転数検出装置と、前記位置検出
装置の出力信号に基づいて前記電磁石を制御するととも
に前記回転数検出装置の出力信号に基づいて前記インバ
ータを制御する制御部とを備えている磁気軸受装置にお
いて、 所要部分の異常を検出する異常検出装置が設けられ、前
記制御部が、前記電磁石および前記インバータを制御す
るディジタル信号処理プロセッサを備えており、前記異
常検出装置により異常が検出されたときに、前記ディジ
タル信号処理プロセッサが前記インバータを制御して異
常処理を行わせるようになっていることを特徴とする磁
気軸受装置。
A control type magnetic bearing having a plurality of electromagnets for supporting a rotating body in a non-contact manner; a position detecting device for detecting a position of the rotating body; an electric motor for rotatingly driving the rotating body; and the electric motor. An inverter for driving the rotor, a rotation speed detection device for detecting the rotation speed of the rotating body, and the inverter based on an output signal of the rotation speed detection device while controlling the electromagnet based on an output signal of the position detection device. A magnetic bearing device comprising: a control unit that controls an electromagnet; and a control unit that controls the electromagnet and the inverter. When an abnormality is detected by the abnormality detection device, the digital signal processor controls the inverter to perform abnormality processing. A magnetic bearing device characterized in that the magnetic bearing device is adapted to be driven.
JP9175415A 1997-07-01 1997-07-01 Magnetic bearing device Pending JPH1122729A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9175415A JPH1122729A (en) 1997-07-01 1997-07-01 Magnetic bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9175415A JPH1122729A (en) 1997-07-01 1997-07-01 Magnetic bearing device

Publications (1)

Publication Number Publication Date
JPH1122729A true JPH1122729A (en) 1999-01-26

Family

ID=15995705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9175415A Pending JPH1122729A (en) 1997-07-01 1997-07-01 Magnetic bearing device

Country Status (1)

Country Link
JP (1) JPH1122729A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6617734B2 (en) 2000-06-28 2003-09-09 Koyo Seiko Co., Ltd. Magnetic bearing control device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04160223A (en) * 1990-10-25 1992-06-03 Mitsubishi Heavy Ind Ltd Magnetic bearing control device
JPH0518417A (en) * 1991-07-12 1993-01-26 Seiko Seiki Co Ltd Controller for magnetic bearing
JPH05180224A (en) * 1991-12-27 1993-07-20 Ntn Corp Magnetic bearing controlling device
JPH06261585A (en) * 1993-03-09 1994-09-16 Toyo Electric Mfg Co Ltd Inverter device
JPH09112482A (en) * 1995-10-20 1997-05-02 Koyo Seiko Co Ltd Turbo-molecular pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04160223A (en) * 1990-10-25 1992-06-03 Mitsubishi Heavy Ind Ltd Magnetic bearing control device
JPH0518417A (en) * 1991-07-12 1993-01-26 Seiko Seiki Co Ltd Controller for magnetic bearing
JPH05180224A (en) * 1991-12-27 1993-07-20 Ntn Corp Magnetic bearing controlling device
JPH06261585A (en) * 1993-03-09 1994-09-16 Toyo Electric Mfg Co Ltd Inverter device
JPH09112482A (en) * 1995-10-20 1997-05-02 Koyo Seiko Co Ltd Turbo-molecular pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6617734B2 (en) 2000-06-28 2003-09-09 Koyo Seiko Co., Ltd. Magnetic bearing control device

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