JP2007126303A5 - - Google Patents

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Publication number
JP2007126303A5
JP2007126303A5 JP2005318172A JP2005318172A JP2007126303A5 JP 2007126303 A5 JP2007126303 A5 JP 2007126303A5 JP 2005318172 A JP2005318172 A JP 2005318172A JP 2005318172 A JP2005318172 A JP 2005318172A JP 2007126303 A5 JP2007126303 A5 JP 2007126303A5
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JP
Japan
Prior art keywords
thin film
film element
element materials
crucibles
heaters
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Application number
JP2005318172A
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English (en)
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JP2007126303A (ja
JP4673190B2 (ja
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Priority claimed from JP2005318172A external-priority patent/JP4673190B2/ja
Priority to JP2005318172A priority Critical patent/JP4673190B2/ja
Priority to US11/401,035 priority patent/US7682670B2/en
Priority to TW095113008A priority patent/TWI398557B/zh
Priority to KR1020060042963A priority patent/KR101284394B1/ko
Priority to CNA2006101593033A priority patent/CN1958838A/zh
Publication of JP2007126303A publication Critical patent/JP2007126303A/ja
Publication of JP2007126303A5 publication Critical patent/JP2007126303A5/ja
Priority to US12/658,024 priority patent/US8025734B2/en
Publication of JP4673190B2 publication Critical patent/JP4673190B2/ja
Application granted granted Critical
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Description

これらの分子線セル１、２は、るつぼ３１、４１の中に薄膜素子材料ａ、ｂを収納し、ヒータ３２、４２でこの薄膜素子材料ａ、ｂを昇華または蒸発させる材料収納部３、４と、この材料収納部３、４から放出される薄膜素子材料ａ、ｂの分子をリークまたは停止するよう開閉されるバルブ３３、４３と、このバルブ３３、４３から送られてきた薄膜素子材料ａ、ｂの分子をヒータ１５、２５で再加熱し、基板３３に向けて放出する分子放射部１１、２１とを有する。この分子放射部１１、２１は液体窒素水等で冷却されるシュラウド４０で囲まれている。なお、図示はしてないが、るつぼ３１、４１の温度は、その底部に測温点を設けた熱電対等の測温手段で測定される。
JP2005318172A 2005-11-01 2005-11-01 薄膜堆積用分子線源とその分子線量制御方法 Active JP4673190B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2005318172A JP4673190B2 (ja) 2005-11-01 2005-11-01 薄膜堆積用分子線源とその分子線量制御方法
US11/401,035 US7682670B2 (en) 2005-11-01 2006-04-10 Method for controlling the volume of a molecular beam
TW095113008A TWI398557B (zh) 2005-11-01 2006-04-12 薄膜堆積用分子線源及其分子線量控制方法
KR1020060042963A KR101284394B1 (ko) 2005-11-01 2006-05-12 박막 퇴적용 분자선원과 그 분자선량 제어방법
CNA2006101593033A CN1958838A (zh) 2005-11-01 2006-09-27 用于薄膜堆积的分子束源及控制分子束的量的方法
US12/658,024 US8025734B2 (en) 2005-11-01 2010-02-01 Method for controlling the volume of a molecular beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005318172A JP4673190B2 (ja) 2005-11-01 2005-11-01 薄膜堆積用分子線源とその分子線量制御方法

Publications (3)

Publication Number Publication Date
JP2007126303A JP2007126303A (ja) 2007-05-24
JP2007126303A5 true JP2007126303A5 (ja) 2008-12-18
JP4673190B2 JP4673190B2 (ja) 2011-04-20

Family

ID=37994635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005318172A Active JP4673190B2 (ja) 2005-11-01 2005-11-01 薄膜堆積用分子線源とその分子線量制御方法

Country Status (5)

Country Link
US (2) US7682670B2 (ja)
JP (1) JP4673190B2 (ja)
KR (1) KR101284394B1 (ja)
CN (1) CN1958838A (ja)
TW (1) TWI398557B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201011114A (en) * 2008-05-19 2010-03-16 Du Pont Apparatus and method of vapor coating in an electronic device
JP5840055B2 (ja) * 2012-03-29 2016-01-06 日立造船株式会社 蒸着装置
FR2998045B1 (fr) * 2012-11-12 2018-08-24 Electricite De France Dispositif pour le traitement thermique d'un materiau et enceinte comprenant un tel dispositif
CN105002465B (zh) * 2015-08-14 2017-12-19 西安工业大学 一种热蒸发镀膜方法及其装置
US20190338412A1 (en) * 2017-01-31 2019-11-07 Applied Materials, Inc. Material deposition arrangement, vacuum deposition system and method therefor
JP6931597B2 (ja) * 2017-11-29 2021-09-08 長州産業株式会社 蒸着装置及び蒸着方法
CN108103453A (zh) * 2017-12-25 2018-06-01 浙江工业大学 一种基于球阀的遮盖式表面梯度薄膜制备装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4518846A (en) * 1984-06-11 1985-05-21 International Business Machines Corporation Heater assembly for molecular beam epitaxy furnace
JPH0653635B2 (ja) * 1985-05-14 1994-07-20 日本電信電話株式会社 分子線エピタキシャル成長法
KR930007853B1 (ko) * 1986-12-10 1993-08-20 후지 세이끼 가부시기 가이샤 진공 증발장치
JP2676270B2 (ja) * 1990-07-10 1997-11-12 三菱電機株式会社 電子ビーム加工機の目合せ検出装置
US5336324A (en) * 1991-12-04 1994-08-09 Emcore Corporation Apparatus for depositing a coating on a substrate
JP2719283B2 (ja) * 1992-08-26 1998-02-25 隆文 八百 低温用クヌ−ドセンセル
US5398641A (en) * 1993-07-27 1995-03-21 Texas Instruments Incorporated Method for p-type doping of semiconductor structures formed of group II and group VI elements
US5616180A (en) * 1994-12-22 1997-04-01 Northrop Grumman Corporation Aparatus for varying the flux of a molecular beam
US5820681A (en) * 1995-05-03 1998-10-13 Chorus Corporation Unibody crucible and effusion cell employing such a crucible
US6030458A (en) * 1997-02-14 2000-02-29 Chorus Corporation Phosphorus effusion source
JP3608976B2 (ja) * 1999-04-26 2005-01-12 シャープ株式会社 半導体素子の製造方法
JP3684343B2 (ja) * 2001-09-25 2005-08-17 株式会社日本ビーテック 薄膜堆積用分子線源セル
JP4013859B2 (ja) * 2003-07-17 2007-11-28 富士電機ホールディングス株式会社 有機薄膜の製造装置
JP4462989B2 (ja) * 2004-04-14 2010-05-12 日立造船株式会社 蒸着装置
DE602006021280D1 (de) * 2005-02-22 2011-05-26 Science Inc E Effusionszellventil

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