WO2008125078A3 - Verfahren und vorrichtung zur kühlung eines gases - Google Patents

Verfahren und vorrichtung zur kühlung eines gases Download PDF

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Publication number
WO2008125078A3
WO2008125078A3 PCT/DE2008/000557 DE2008000557W WO2008125078A3 WO 2008125078 A3 WO2008125078 A3 WO 2008125078A3 DE 2008000557 W DE2008000557 W DE 2008000557W WO 2008125078 A3 WO2008125078 A3 WO 2008125078A3
Authority
WO
WIPO (PCT)
Prior art keywords
cooling
gas
liquefier
thermal contact
pellets
Prior art date
Application number
PCT/DE2008/000557
Other languages
English (en)
French (fr)
Other versions
WO2008125078A2 (de
Inventor
Markus BÜSCHER
Alexander BOUKHAROV
Original Assignee
Forschungszentrum Jülich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Jülich GmbH filed Critical Forschungszentrum Jülich GmbH
Priority to DE112008000917T priority Critical patent/DE112008000917A5/de
Priority to CN2008800111030A priority patent/CN102066860A/zh
Priority to EP08734447A priority patent/EP2132507A2/de
Priority to US12/450,219 priority patent/US20100140510A1/en
Priority to JP2010502411A priority patent/JP2010533964A/ja
Publication of WO2008125078A2 publication Critical patent/WO2008125078A2/de
Publication of WO2008125078A3 publication Critical patent/WO2008125078A3/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
    • F25J1/0002—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the fluid to be liquefied
    • F25J1/0005—Light or noble gases
    • F25J1/001—Hydrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
    • F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
    • F25J1/0221—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process using the cold stored in an external cryogenic component in an open refrigeration loop
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
    • F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
    • F25J1/0243—Start-up or control of the process; Details of the apparatus used; Details of the refrigerant compression system used
    • F25J1/0257—Construction and layout of liquefaction equipments, e.g. valves, machines
    • F25J1/0275—Construction and layout of liquefaction equipments, e.g. valves, machines adapted for special use of the liquefaction unit, e.g. portable or transportable devices
    • F25J1/0276—Laboratory or other miniature devices
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21B—FUSION REACTORS
    • G21B1/00—Thermonuclear fusion reactors
    • G21B1/11—Details
    • G21B1/19—Targets for producing thermonuclear fusion reactions, e.g. pellets for irradiation by laser or charged particle beams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/17—Re-condensers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/20—Processes or apparatus using other separation and/or other processing means using solidification of components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2210/00—Processes characterised by the type or other details of the feed stream
    • F25J2210/42—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2240/00—Processes or apparatus involving steps for expanding of process streams
    • F25J2240/40—Expansion without extracting work, i.e. isenthalpic throttling, e.g. JT valve, regulating valve or venturi, or isentropic nozzle, e.g. Laval
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2290/00—Other details not covered by groups F25J2200/00 - F25J2280/00
    • F25J2290/12—Particular process parameters like pressure, temperature, ratios
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Particle Accelerators (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Die Erfindung stellt ein Verfahren und eine Vorrichtung zur vibrationsfreien Kühlung eines Gases zur Verfügung. Das Gas wird in einem ersten Kühlschritt mit einem ersten Kühlmedium in thermischen Kontakt gebracht. Anschließend durchströmt es in einem zweiten Kühlschritt einen Verflüssiger, der in thermischem Kontakt mit einem zweiten Kühlmedium steht, und wird dabei um nicht mehr als 10 K abgekühlt. Dieser geringe Temperaturgradient ist maßgeblich dafür verantwortlich, dass der den Verflüssiger verlassende gasförmige oder flüssige Gasstrom sehr homogen und laminar ist. Er eignet sich daher für die Weiterverarbeitung zu einem Strom aus festen Pellets gleich bleibender Größe. Diese Pellets lassen sich über mehrere Meter im Vakuum transportieren und eignen sich somit als Targetmaterial für die Erzeugung eines Plasmas durch intensive Laserbestrahlung.
PCT/DE2008/000557 2007-04-12 2008-04-02 Verfahren und vorrichtung zur kühlung eines gases WO2008125078A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE112008000917T DE112008000917A5 (de) 2007-04-12 2008-04-02 Verfahren und Vorrichtung zur Kühlung eines Gases
CN2008800111030A CN102066860A (zh) 2007-04-12 2008-04-02 冷却气体的方法和设备
EP08734447A EP2132507A2 (de) 2007-04-12 2008-04-02 Verfahren und vorrichtung zur kühlung eines gases
US12/450,219 US20100140510A1 (en) 2007-04-12 2008-04-02 Method and device for cooling a gas
JP2010502411A JP2010533964A (ja) 2007-04-12 2008-04-02 ガスの冷却のための方法および装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007017212.7 2007-04-12
DE102007017212A DE102007017212A1 (de) 2007-04-12 2007-04-12 Verfahren und Vorrichtung zur Kühlung eines Gases

Publications (2)

Publication Number Publication Date
WO2008125078A2 WO2008125078A2 (de) 2008-10-23
WO2008125078A3 true WO2008125078A3 (de) 2012-01-26

Family

ID=39744194

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2008/000557 WO2008125078A2 (de) 2007-04-12 2008-04-02 Verfahren und vorrichtung zur kühlung eines gases

Country Status (6)

Country Link
US (1) US20100140510A1 (de)
EP (1) EP2132507A2 (de)
JP (1) JP2010533964A (de)
CN (1) CN102066860A (de)
DE (2) DE102007017212A1 (de)
WO (1) WO2008125078A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9336915B2 (en) * 2011-06-17 2016-05-10 General Electric Company Target apparatus and isotope production systems and methods using the same
JP5864165B2 (ja) * 2011-08-31 2016-02-17 ギガフォトン株式会社 ターゲット供給装置
WO2015086258A1 (en) 2013-12-13 2015-06-18 Asml Netherlands B.V. Radiation source, metrology apparatus, lithographic system and device manufacturing method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3237416A (en) * 1962-12-04 1966-03-01 Petrocarbon Dev Ltd Liquefaction of gases
US3473342A (en) * 1966-04-01 1969-10-21 Nautchno Izsledovatelski Sekto Method and apparatus for liquefaction of neon
US4765813A (en) * 1987-01-07 1988-08-23 Air Products And Chemicals, Inc. Hydrogen liquefaction using a dense fluid expander and neon as a precoolant refrigerant
EP1580506A1 (de) * 2004-03-24 2005-09-28 Air Products And Chemicals, Inc. Verfahren und Vorrichtung zur Wasserstoffverflüssigung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5105305A (en) * 1991-01-10 1992-04-14 At&T Bell Laboratories Near-field scanning optical microscope using a fluorescent probe
US5249424A (en) * 1992-06-05 1993-10-05 Astronautics Corporation Of America Active magnetic regenerator method and apparatus
US5512106A (en) * 1993-01-27 1996-04-30 Sumitomo Heavy Industries, Ltd. Surface cleaning with argon
JPH0882413A (ja) * 1994-09-13 1996-03-26 Toshiba Corp 凝縮装置
US6835944B2 (en) * 2002-10-11 2004-12-28 University Of Central Florida Research Foundation Low vapor pressure, low debris solid target for EUV production
JP5100990B2 (ja) * 2004-10-07 2012-12-19 ギガフォトン株式会社 極端紫外光源装置用ドライバーレーザ及びｌｐｐ型極端紫外光源装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3237416A (en) * 1962-12-04 1966-03-01 Petrocarbon Dev Ltd Liquefaction of gases
US3473342A (en) * 1966-04-01 1969-10-21 Nautchno Izsledovatelski Sekto Method and apparatus for liquefaction of neon
US4765813A (en) * 1987-01-07 1988-08-23 Air Products And Chemicals, Inc. Hydrogen liquefaction using a dense fluid expander and neon as a precoolant refrigerant
EP1580506A1 (de) * 2004-03-24 2005-09-28 Air Products And Chemicals, Inc. Verfahren und Vorrichtung zur Wasserstoffverflüssigung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"On a Hydrogen Pellet Target for Antiproton Physics with Panda", 1 January 2006, ISBN: 978-9-15-546649-7, article ÖRJAN NORDHAGE: "On a Hydrogen Pellet Target for Antiproton Physics with Panda", pages: 1 - 106, XP055012127 *

Also Published As

Publication number Publication date
DE102007017212A1 (de) 2008-10-16
CN102066860A (zh) 2011-05-18
DE112008000917A5 (de) 2010-01-07
WO2008125078A2 (de) 2008-10-23
EP2132507A2 (de) 2009-12-16
JP2010533964A (ja) 2010-10-28
US20100140510A1 (en) 2010-06-10

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