JP2007123927A - Light emitting device and illuminator using it - Google Patents

Light emitting device and illuminator using it Download PDF

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JP2007123927A
JP2007123927A JP2006340511A JP2006340511A JP2007123927A JP 2007123927 A JP2007123927 A JP 2007123927A JP 2006340511 A JP2006340511 A JP 2006340511A JP 2006340511 A JP2006340511 A JP 2006340511A JP 2007123927 A JP2007123927 A JP 2007123927A
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phosphor
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light emitting
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Kazuyuki Tadatomo
一行 只友
Hiroaki Okagawa
広明 岡川
Yoichiro Ouchi
洋一郎 大内
Takashi Tsunekawa
高志 常川
Yoshiyuki Imada
善之 今田
Masahiko Yoshino
正彦 吉野
Tsunemasa Taguchi
常正 田口
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Kasei Optonix Ltd
Mitsubishi Cable Industries Ltd
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Kasei Optonix Ltd
Mitsubishi Cable Industries Ltd
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<P>PROBLEM TO BE SOLVED: To provide a light emitting device, and an illuminator using it, in which variation of color tone is controlled by improving a light emitting device arranged to emit a visible light through combination of an LED and a phosphor. <P>SOLUTION: A GaN based LED 1 is combined with a phosphor 2 being excited with light L1 emitted from the LED 1 to emit fluorescence (visible light) L2 thus constituting a light emitting device emitting the fluorescence L2. The LED 1 and the phosphor 2 are selected and combined such that variation in the chromaticity of the output light falls within 0.05 on the x-y chromaticity chart when the quantity of driving current being injected into the LED 1 is varied from 0.1(A/cm<SP>2</SP>) to 70.0(A/cm<SP>2</SP>) per unit emission area. A white lighting fixture in which variation of color tone is controlled can be obtained by employing a high efficiency InGaN based ultraviolet LED as the LED 1 and a white phosphor as the phosphor 2. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、発光ダイオード(LED)と、該LEDから発せられる光で励起されて蛍光を発する蛍光体との組合せで構成され、出力光として可視光を発する発光装置に関するものである。   The present invention relates to a light-emitting device that includes a combination of a light-emitting diode (LED) and a phosphor that emits fluorescence when excited by light emitted from the LED, and emits visible light as output light.

種々の波長の光を発する光源を集めて配列し、カラー画像表示装置、電飾、信号灯、照明装置などを構成することが従来行われている。
該光源としては、LEDや半導体レーザ(LD)などの半導体発光素子(以下、単に発光素子ともいう)を単独で用いたものや、発光素子と蛍光体とを組合せたものが用いられている。該蛍光体は、発光素子からの光で励起され、種々の波長の蛍光を発するように選択されている。
Conventionally, a light source that emits light of various wavelengths is collected and arranged to constitute a color image display device, electrical decoration, signal lamp, lighting device, and the like.
As the light source, a semiconductor light emitting element such as an LED or a semiconductor laser (LD) (hereinafter also simply referred to as a light emitting element) or a combination of a light emitting element and a phosphor is used. The phosphor is selected so as to be excited by light from the light emitting element and emit fluorescence of various wavelengths.

上記光源のなかでも、LEDと蛍光体とを組合せたもの、特に白色光を出力するよう構成された所謂白色LEDは、照明器具としては重要である。従来の白色LEDとしては、先ず、青色LEDと黄色蛍光体とを組み合わせたものが挙げられる。この白色LEDの構成は、黄色蛍光体(青色光で励起され黄色光を発する蛍光体)を分散させた第1の樹脂によって青色LEDチップを覆い、さらにそれを第2の透明樹脂で砲弾型などにモールドしたものである。このような構成によって、蛍光体に吸収されず第1および第2の樹脂領域を通過する青色光と、その補色関係にある蛍光体からの黄色光とが混ざり合い、白色光が出力されているように見える。ただし、このような白色光は、光の3原色を完全には含んでいないために色純度も演色性も悪い。   Among the above light sources, a combination of an LED and a phosphor, in particular, a so-called white LED configured to output white light is important as a lighting fixture. As a conventional white LED, first, a combination of a blue LED and a yellow phosphor can be mentioned. This white LED has a structure in which a blue LED chip is covered with a first resin in which a yellow phosphor (a phosphor that is excited by blue light and emits yellow light) is dispersed, and then a second transparent resin is used to form a shell type, etc. Is molded into With such a configuration, blue light that is not absorbed by the phosphor and passes through the first and second resin regions is mixed with yellow light from the phosphor in a complementary color relationship, and white light is output. looks like. However, since such white light does not completely contain the three primary colors of light, color purity and color rendering are poor.

これに対して、紫色から近紫外の発光をするLED光源と、白色蛍光体とを組み合わせ、色純度も演色性も良好な白色光を発生させる試みもなされている。白色蛍光体は、LED光源からの主発光に励起されて3原色(赤色、緑色、青色の3波長)の蛍光を発する蛍光体成分を含むものである。3原色光の混合による白色光は、演色性が高く、好ましい照明用光源となり得る。   On the other hand, an attempt has been made to generate white light with good color purity and color rendering by combining an LED light source that emits light from purple to near-ultraviolet and a white phosphor. The white phosphor includes a phosphor component that emits fluorescence of three primary colors (three wavelengths of red, green, and blue) when excited by main light emission from the LED light source. White light produced by mixing the three primary colors has high color rendering properties and can be a preferable illumination light source.

しかし、上記のように、LEDと蛍光体とを組み合せた従来の発光装置を本発明者等が詳細に検討したところ、いずれの装置も、LEDへの通電量を増大させると色調(色バランス)が大きく変化するものであることが分った。   However, as described above, the present inventors have studied in detail a conventional light emitting device in which an LED and a phosphor are combined. As a result, any device increases the color tone (color balance) when the amount of current supplied to the LED is increased. Was found to change significantly.

例えば、青色LEDと黄色蛍光体とを組み合せた白色発光可能な装置(所謂、白色LED)の場合、白色光に含まれる黄色光(青色光が蛍光体で変換されたもの)と、青色光(蛍光体を透過したもの)との割合が、青色LEDの発光出力に大きく依存して変化する。しかも、その青色LEDの発光出力は、注入電流の増加に伴い外部量子効率が低下するために、注入電流に比例して増加せず、従来の定格電流(例えば、350μm×350μmのLEDチップでは通常20mAとされる)を越えた辺りから飽和傾向を示す。該定格電流近傍の通電でもLEDチップの温度上昇が起こっており、第一には蛍光体の温度上昇により変換効率が低下する、第二には青色発光波長が長波長シフトし、蛍光体の励起効率が変化するといった現象が起こっている。該定格電流を越えた電流を流すと、この傾向は一層強くなり、このような白色LEDでは、青色LEDへの注入電流の増加に伴って、色調が変化する。   For example, in the case of a device capable of emitting white light (a so-called white LED) in which a blue LED and a yellow phosphor are combined, yellow light contained in white light (blue light converted by the phosphor) and blue light ( The ratio with respect to the light transmitted through the phosphor changes greatly depending on the light emission output of the blue LED. In addition, the light emission output of the blue LED does not increase in proportion to the injection current because the external quantum efficiency decreases as the injection current increases, and the conventional rated current (for example, 350 μm × 350 μm LED chip is normal) Saturation tendency is shown from around 20 mA). Even when the current is close to the rated current, the temperature of the LED chip rises. First, the conversion efficiency decreases due to the temperature rise of the phosphor. Second, the blue emission wavelength shifts longer, and the phosphor is excited. There is a phenomenon that efficiency changes. When a current exceeding the rated current is passed, this tendency becomes stronger, and in such a white LED, the color tone changes as the injection current into the blue LED increases.

また、紫色〜近紫外LEDと白色蛍光体とを組合せた白色LEDの場合、赤色光、緑色光、青色光の蛍光だけによって白色を構成しており、LED光源の光を直接には出力させないので、上記白色LEDで述べたようなLED発光と蛍光体発光との色バランスが崩れることによる色調の変化は抑えることができる。しかし、従来の出力の低い近紫外LEDや、変換効率の低い蛍光体を使っている場合には、通電によるLED光源の温度上昇の影響で、下記の現象が生じ、やはり色調が変化する。
第一に、LED光源−の温度上昇のために該光源の発光波長が変化し、これによって各色の蛍光体毎の変換効率も独自に変化し、結果、色調が変化する。
第二に、LED光源の温度上昇のために蛍光体の温度が変化し、これによって各色の蛍光体の変換効率も独自に変化し、結果、色調が変化する。
In addition, in the case of a white LED that combines a purple to near-ultraviolet LED and a white phosphor, white is constituted only by red, green, and blue light fluorescence, and the light from the LED light source is not directly output. The change in color tone due to the loss of the color balance between the LED light emission and the phosphor light emission as described in the white LED can be suppressed. However, when a conventional near-ultraviolet LED with a low output or a phosphor with low conversion efficiency is used, the following phenomenon occurs due to the temperature rise of the LED light source due to energization, and the color tone also changes.
First, the light emission wavelength of the light source changes due to the temperature rise of the LED light source, thereby changing the conversion efficiency for each phosphor of each color, resulting in a change in color tone.
Second, the temperature of the phosphor changes due to the temperature rise of the LED light source, thereby changing the conversion efficiency of the phosphors of the respective colors, resulting in a change in color tone.

上記のような色調変化の問題は、LEDと蛍光体とを組み合わせた発光装置のみならず、LDと蛍光体とを組み合わせた発光装置においても同様に発生する問題である。従って、本発明の課題は、上記問題を改善し、発光素子と蛍光体とを組合わせて可視光を出力するよう構成された発光装置を改善し、色調の変化が抑制された該発光装置、およびそれを用いた照明装置を提供することにある。   The problem of color tone change as described above is a problem that occurs not only in a light emitting device combining an LED and a phosphor, but also in a light emitting device combining an LD and a phosphor. Accordingly, an object of the present invention is to improve the above problem, improve a light emitting device configured to output visible light by combining a light emitting element and a phosphor, and the light emitting device in which a change in color tone is suppressed, And it is providing the illuminating device using the same.

本発明は以下の特徴を有するものである。
(1)GaN系発光素子と、該発光素子から発せられる光で励起され可視光を発する蛍光体とが組み合され、該蛍光を出力光とする発光装置であって、
前記GaN系発光素子はGaN系発光ダイオードであり、該発光ダイオードに注入される駆動電流量を、単位発光面積当たり0.1(A/cm2)から70.0(A/cm2)まで変化させたときに、出力光の色度の変化量が、x−y色度図上において0.05以内であることを特徴とする発光装置。
(2)上記GaN系発光ダイオードが、InGaN系材料からなる発光層を含んで構成された発光部を有するものであって、該発光部の構造は、単一量子井戸構造、多重量子井戸構造、またはダブルヘテロ構造であり、発光ピーク波長は430nm以下であり、ベアチップ状態において単位発光面積当たり30(A/cm2)の駆動電流を注入した時に5%以上の外部量子効率を有するものである、上記(1)記載の発光装置。
(3)上記GaN系発光ダイオードが、主発光と共に、それとは異なる波長のフォトルミネッセンス光を発するように構成されており、該フォトルミネッセンス光が上記蛍光と共に出力されるものである、上記(1)記載の発光装置。
(4)GaN系発光素子と、該発光素子から発せられる光で励起され可視光を発する蛍光体とが組み合され、該蛍光を出力光とする発光装置であって、前記GaN系発光素子は、発光ピーク波長360nm〜430nm、全発光エネルギーの外部量子効率が10%以上のGaN系半導体レーザであり、該半導体レーザのレーザ出力を発振閾値電流通電時のレーザ出力から該レーザ出力の10倍のレーザ出力まで変化させたときに、出力光の色度の変化量が、x−y色度図上において0.05以内であることを特徴とする発光装置。
(5)上記GaN系発光素子の発光部が、InAGa1-AN(0<A≦1)井戸層とGaN系障壁層とからなる多重量子井戸構造であって、発光ピーク波長が360nm〜430nmとなるようにInAGa1-AN井戸層の組成比Aが決定されている、上記(1)〜(4)のいずれかに記載の発光装置。
(6)上記GaN系発光素子の素子構造が、表面に凹凸が加工された結晶基板上に、GaN系半導体からなる低温バッファ層を介してまたは直接的に、GaN系結晶層が該凹凸を覆ってラテラル成長またはファセット成長しており、該GaN系結晶の上に発光部が形成された構造を有するものである、上記(1)〜(5)のいずれかに記載の発光装置。
(7)上記可視光が、上記発光ダイオードから発せられる光の波長から波長800nmまでの波長範囲内に、発光強度のピークを1つ以上有する光である、請求項(1)〜(6)のいずれかに記載の発光装置。
(8)上記可視光が、赤色光、緑色光、青色光からなる3原色光を含んでなる白色光である、上記(7)記載の発光装置。
(9)上記蛍光体が、赤色蛍光体、緑色蛍光体、及び青色蛍光体の混合物からなる白色蛍光体であって、
前記赤色蛍光体が、〔Ln22S:Eu(Ln=Y,La,Gd,Lu,Sc)〕、及び〔(Zna,Cd1-a)S:Ag,Cl、(0.5>a>0.2)〕から選ばれる1種類以上の蛍光体を含むものであり、
前記緑色蛍光体が、〔(Zna,Cd1-a)S:Cu,Al、(1≧a>0.6)〕、〔(Zna,Cd1-a)S:Au,Al、(1≧a>0.6)〕、〔(Zna,Cd1-a)S:Ag,Cl、(1≧a>0.6)〕、及び〔(Ba,Sr)MgAl1017:Eu,Mn〕から選ばれる1種類以上の蛍光体を含むものであり、
前記青色蛍光体が、〔(Sr,Ca,Ba,Mg)10(PO46Cl2:Eu〕と、〔(Ba,Sr)MgAl1017:Eu,Mn〕とを含むものである、上記(1)〜(8)のいずれかに記載の発光装置。
(10)上記(1)〜(9)のいずれかに記載の発光装置が複数集合した構成を有する照明装置。
The present invention has the following features.
(1) A light-emitting device that combines a GaN-based light-emitting element and a phosphor that emits visible light when excited by light emitted from the light-emitting element, and uses the fluorescence as output light,
The GaN-based light emitting device is a GaN-based light emitting diode, and the amount of driving current injected into the light emitting diode is changed from 0.1 (A / cm 2 ) to 70.0 (A / cm 2 ) per unit light emitting area. A light-emitting device characterized in that when it is made, the amount of change in chromaticity of the output light is within 0.05 on the xy chromaticity diagram.
(2) The GaN-based light-emitting diode has a light-emitting portion configured to include a light-emitting layer made of an InGaN-based material, and the light-emitting portion has a single quantum well structure, a multiple quantum well structure, Alternatively, it has a double heterostructure, an emission peak wavelength of 430 nm or less, and an external quantum efficiency of 5% or more when a drive current of 30 (A / cm 2 ) per unit emission area is injected in a bare chip state. The light emitting device according to (1) above.
(3) The GaN-based light emitting diode is configured to emit photoluminescence light having a wavelength different from that of main light emission, and the photoluminescence light is output together with the fluorescence. The light-emitting device of description.
(4) A light-emitting device in which a GaN-based light emitting element and a phosphor that emits visible light when excited by light emitted from the light-emitting element are combined, and uses the fluorescence as output light. A GaN-based semiconductor laser having an emission peak wavelength of 360 nm to 430 nm and an external quantum efficiency of 10% or more of the total emission energy. The laser output of the semiconductor laser is 10 times the laser output from the laser output when the oscillation threshold current is applied. A light emitting device characterized in that when the laser output is changed, the amount of change in chromaticity of the output light is within 0.05 on the xy chromaticity diagram.
(5) light-emitting portion of the GaN-based light emitting device is a multiple quantum well structure composed of In A Ga 1-A N ( 0 <A ≦ 1) well layer and a GaN-based barrier layer, emission peak wavelength 360nm The light emitting device according to any one of the above (1) to (4), wherein the composition ratio A of the In A Ga 1-A N well layer is determined to be ˜430 nm.
(6) The element structure of the GaN-based light-emitting element is such that the GaN-based crystal layer covers the unevenness directly or via a low-temperature buffer layer made of a GaN-based semiconductor on a crystal substrate with unevenness processed on the surface. The light-emitting device according to any one of (1) to (5), wherein the light-emitting device is laterally grown or faceted and has a structure in which a light-emitting portion is formed on the GaN-based crystal.
(7) The visible light according to any one of (1) to (6), wherein the visible light is light having one or more peaks of emission intensity within a wavelength range from a wavelength of light emitted from the light emitting diode to a wavelength of 800 nm. The light-emitting device in any one.
(8) The light emitting device according to (7), wherein the visible light is white light including three primary color lights including red light, green light, and blue light.
(9) The phosphor is a white phosphor composed of a mixture of a red phosphor, a green phosphor, and a blue phosphor,
The red phosphors are [Ln 2 O 2 S: Eu (Ln = Y, La, Gd, Lu, Sc)] and [(Zn a , Cd 1-a ) S: Ag, Cl, (0.5> a > 0.2)] including one or more kinds of phosphors selected from
The green phosphor is [(Zn a , Cd 1-a ) S: Cu, Al, (1 ≧ a> 0.6)], [(Zn a , Cd 1-a ) S: Au, Al, ( 1 ≧ a> 0.6)], [(Zn a , Cd 1−a ) S: Ag, Cl, (1 ≧ a> 0.6)], and [(Ba, Sr) MgAl 10 O 17 : Eu , Mn] containing at least one phosphor selected from
The blue phosphor includes [(Sr, Ca, Ba, Mg) 10 (PO 4 ) 6 Cl 2 : Eu] and [(Ba, Sr) MgAl 10 O 17 : Eu, Mn], (1) The light-emitting device in any one of (8).
(10) A lighting device having a configuration in which a plurality of light emitting devices according to any one of (1) to (9) are gathered.

本発明によって、電流量が変化しても色調は変化し難い発光装置を提供でき、これによって、演色性の良好な白色光を安定して発する好ましい照明装置を提供できるようになった。   According to the present invention, it is possible to provide a light emitting device in which the color tone hardly changes even when the amount of current changes, and thus it is possible to provide a preferable lighting device that stably emits white light with good color rendering properties.

本発明による発光装置は、発光素子と蛍光体とを含んで構成されるが、以下の説明では、GaN系LEDを発光素子の例とし、本発明を具体的に説明する。
図1の構成例では、GaN系LED1と、蛍光体2とを組み合わせて当該発光装置を構成している。蛍光体2は、GaN系LED1から発せられる光L1で励起され、蛍光(可視光)L2を発するように形成されており、該蛍光L2が当該発光装置の出力光となっている。
The light-emitting device according to the present invention includes a light-emitting element and a phosphor. In the following description, the present invention will be specifically described by taking a GaN-based LED as an example of the light-emitting element.
In the configuration example of FIG. 1, the light emitting device is configured by combining a GaN-based LED 1 and a phosphor 2. The phosphor 2 is excited by the light L1 emitted from the GaN-based LED 1 and emits fluorescence (visible light) L2, and the fluorescence L2 is output light of the light emitting device.

本発明でいうGaN系とは、InAGaBAlCN(0≦A≦1、0≦B≦1、0≦C≦1、A+B+C=1)で示される化合物半導体であって、例えば、AlN、GaN、AlGaN、InGaNなどが重要な化合物として挙げられる。 The GaN-based in the present invention, a compound semiconductor represented by In A Ga B Al C N ( 0 ≦ A ≦ 1,0 ≦ B ≦ 1,0 ≦ C ≦ 1, A + B + C = 1), for example, Examples of important compounds include AlN, GaN, AlGaN, and InGaN.

GaN系LEDを用いて構成する場合の当該発光装置の重要な特徴は、図2のx−y色度図に示すように、該GaN系LEDに注入される駆動電流量を、単位発光面積当たり0.1A/cm2から70A/cm2まで変化させたときに、出力光の色度の変化量(該x−y色度図上における点m1から点m2までの変化量Δm)が0.05以内、より好ましくは0.03以内となるように構成されていることである。
この条件を満たすようにGaN系LEDと蛍光体とを選択し組み合わせることによって、駆動電流を増加させても、色調の変化が抑制される。
As shown in the xy chromaticity diagram of FIG. 2, an important feature of the light emitting device when configured using a GaN-based LED is that the amount of drive current injected into the GaN-based LED is determined per unit light emitting area. when changing from 0.1 a / cm 2 up to 70A / cm 2, the amount of change in chromaticity of the output light (the amount of change from point m1 in diagram the x-y chromaticity to the point m @ 2 Delta] m) is 0. It is configured to be within 05, more preferably within 0.03.
By selecting and combining the GaN-based LED and the phosphor so as to satisfy this condition, a change in color tone is suppressed even when the drive current is increased.

ここで、上記変化量Δmは、点m1の座標を(x1,y1)、点m2の座標を(x2,y2)として、(x2−x1)2+(y2−y1)2の平方根によって与えられる。
また、本発明で用いるx−y色度図は、CIE1931xyz表色系(JISZ8701)で規定されるものである。
Here, the amount of change Δm is given by the square root of (x2−x1) 2 + (y2−y1) 2 where the coordinates of the point m1 are (x1, y1) and the coordinates of the point m2 are (x2, y2). .
The xy chromaticity diagram used in the present invention is defined by the CIE 1931 xyz color system (JISZ8701).

従来の発光装置に上記と同じ駆動電流量の変化を与えた場合、出力光の色度の変化量は、本発明が規定する上記値0.05を上回る。例えば、青色LEDと黄色蛍光体とによって構成された発光装置では0.054であり、紫外LEDと白色蛍光体を用いた従来品でも0.052となっており、色度の変化についての規定は考慮されていない。   When the same change in the drive current amount as described above is given to the conventional light emitting device, the change amount of the chromaticity of the output light exceeds the value 0.05 defined by the present invention. For example, it is 0.054 for a light emitting device composed of a blue LED and a yellow phosphor, and 0.052 even for a conventional product using an ultraviolet LED and a white phosphor. Not considered.

上記色度の変化量を評価するためにLEDに注入される駆動電流量は、LEDの形状寸法などに依って異なることのないよう、〔単位発光面積当たりの電流量A/cm2)にて規定する。
発光面積とは、発光層の横方向の実効的な総面積を意味するが、近似的には、p電極がp層のほぼ前面を覆っている場合にはp層の面積で代用しても良い。また、p電極がp層の一部分しか覆ってない場合には、実質的には電極直下しか発光しないために、電極面積を発光面積として代用してもよい。
例えば、図3に示すような、サファイア基板上に形成されたGaN系発光ダイオードの素子構造において、素子外形を(350μm×350μm)〜(5mm×5mm)程度の方形とした場合、発光面積は、n型電極形成のためのエッチングによって減少し7×10-4cm2〜0.24cm2程度となる。この中から、例えば、発光面積7.2×10-4cm2のものを用いた場合、上記色度の変化量を評価するために注入される駆動電流量の変化は、0.072mAから50mAまでとなる。
The amount of drive current injected into the LED to evaluate the amount of change in chromaticity is [current amount per unit light emission area A / cm 2] so that it does not vary depending on the shape of the LED. Stipulate.
The light emitting area means the effective total area in the lateral direction of the light emitting layer, but approximately, if the p electrode covers almost the front surface of the p layer, the area of the p layer may be substituted. good. In addition, when the p-electrode covers only a part of the p-layer, light is emitted substantially directly under the electrode, so that the electrode area may be used as the light-emitting area.
For example, in the device structure of a GaN-based light emitting diode formed on a sapphire substrate as shown in FIG. 3, when the device outer shape is a square of about (350 μm × 350 μm) to (5 mm × 5 mm), the light emitting area is reduced by etching for n-type electrode formed the 7 × 10 -4 cm 2 ~0.24cm 2 about. Among these, for example, when a light emitting area of 7.2 × 10 −4 cm 2 is used, the change in the amount of drive current injected for evaluating the change in chromaticity is 0.072 mA to 50 mA. Up to.

上記色度の変化量を評価するための他の測定条件としては、周囲の温度として〔15〜35℃〕、実装状態として〔発光効率を高めるためにはフリップチップ実装が好ましいが、標準的にはGaN系発光層を上側とする所謂pサイドアップのダイボンディング〕、封止(第二のモールド樹脂)材料として〔エポキシ系樹脂〕、蛍光体の塗布方法として〔適正な配合比率で混合した蛍光体を含んだシリコン樹脂によって、実装した発光素子をコーティング(モールド)する〕、などが挙げられる。   As other measurement conditions for evaluating the amount of change in chromaticity, the ambient temperature is [15 to 35 ° C.], and the mounting state is [flip chip mounting is preferable for increasing luminous efficiency, Is a so-called p-side-up die bonding with the GaN-based light-emitting layer on the upper side, [epoxy-based resin] as a sealing (second mold resin) material, and a phosphor coating method [fluorescence mixed at an appropriate blending ratio] The mounted light-emitting element is coated (molded) with a silicon resin containing a body].

上記色度の変化量条件を達成するためには、用いられるGaN系LED、蛍光体、およびそれらの組み合わせ方が重要である。
先ず、GaN系LEDについては、発光ピーク波長、発光出力、外部量子効率について、それぞれ以下のような制限が必要である。
In order to achieve the above chromaticity change amount condition, the GaN-based LED used, the phosphor, and the combination thereof are important.
First, for a GaN-based LED, the following limitations are necessary for the emission peak wavelength, emission output, and external quantum efficiency.

該GaN系LEDの発光ピーク波長は、蛍光体の励起効率、延いては蛍光体の励起光から蛍光への変換効率と関係する重要な要素であり、450nm以下が好ましく、360nm〜430nmがより好ましい。また、特に好ましい発光ピーク波長の例として、380nmが挙げられる。これは、InGaNを発光層に用いたLEDにおいて、発光効率が高く、かつ一般的に蛍光体の励起効率が高い波長域からである。   The emission peak wavelength of the GaN-based LED is an important factor related to the excitation efficiency of the phosphor, and thus the conversion efficiency of the phosphor from the excitation light to the fluorescence, and is preferably 450 nm or less, and more preferably 360 nm to 430 nm. . Moreover, 380 nm is mentioned as an example of a particularly preferable emission peak wavelength. This is because, in an LED using InGaN as the light emitting layer, the light emission efficiency is high and the excitation efficiency of the phosphor is generally high.

該GaN系LEDの発光出力(ピーク波長について測定される値)、外部量子効率は、通電に伴うLEDの温度上昇を抑制する上で重要な要素である。通電によって注入された電力は、最終的に光に変換されるか、熱に変換される。従って、外部量子効率が低い素子ほど熱に変換される割合が大きく、素子の温度上昇が大きくなり、蛍光体の変換効率を低下させたり、発光素子および蛍光体の劣化の原因となる。   The light emission output (value measured for the peak wavelength) of the GaN-based LED and the external quantum efficiency are important factors for suppressing the temperature rise of the LED accompanying energization. The electric power injected by energization is finally converted into light or heat. Therefore, an element with lower external quantum efficiency has a higher ratio of being converted into heat, and the temperature of the element increases, resulting in a decrease in the conversion efficiency of the phosphor and a deterioration of the light emitting element and the phosphor.

該GaN系LEDの発光出力は、ベアチップ状態において単位発光面積当たり30(A/cm2)の駆動電流を注入した時に、5%以上の外部量子効率を有するものが好ましく、7%以上がより好ましい。
色度の変化量の評価で述べたと同様に、該発光出力は、周囲温度15℃から35℃の測定環境で、所謂pサイドアップで基板側を下に、銀ペーストあるいは共晶系の合金を接合用金属材料として用い、例えばTO18缶として知られている金属ステムに実装して被験サンプルとし、これをそのまま積分球の中に挿入し、全発光強度を計測する標準的な計測システムにて全発光出力として測定する。
The light emission output of the GaN-based LED preferably has an external quantum efficiency of 5% or more, more preferably 7% or more when a drive current of 30 (A / cm 2 ) per unit light emitting area is injected in a bare chip state. .
As described in the evaluation of the amount of change in chromaticity, the light emission output is obtained by applying a silver paste or eutectic alloy with the substrate side down in a so-called p-side-up measurement environment at an ambient temperature of 15 ° C. to 35 ° C. Used as a metal material for bonding, for example, mounted on a metal stem known as a TO18 can and used as a test sample, which is inserted into an integrating sphere as it is, and measured with a standard measurement system that measures the total emission intensity. Measured as luminescence output.

この全発光出力から下記の計算式により外部量子効率は計測できる。素子の形状、実装方式によって発光出力は大きく異なるが、ここでは上記の評価方法を標準のベアチップ状態での測定方法とする。
外部量子効率ηeは、ηe=PO/(IF・Eg)によって算出される。
O〔W〕は全発光出力、IF〔A〕は通電量である。Eg〔eV〕は発光ピーク波長λp〔μm〕をエネルギー値に換算した値であり、Eg=1.2398/λpで算出される。
The external quantum efficiency can be measured from the total light emission output by the following formula. The light emission output varies greatly depending on the shape of the element and the mounting method, but here the above evaluation method is the measurement method in a standard bare chip state.
The external quantum efficiency η e is calculated by η e = P O / ( IF · E g ).
P O [W] is the total light emission output, and I F [A] is the energization amount. E g [eV] is a value obtained by converting the emission peak wavelength λ p [μm] into an energy value, and is calculated by E g = 1.2398 / λ p .

本発明では、GaN系LEDの外部量子効率として、5%以上、特に好ましい値として7%以上を推奨する。
例えば、図3に示す素子構造において、素子外形を(350μm×350μm)〜(5mm×5mm)程度の方形とした場合、発光面積は7×10-4cm2〜0.24cm2程度となる。この中から、例えば、発光面積7.2×10-4cm2、発光ピーク波長380nmのLED素子を用いた場合では、20mA通電時に3.3mW(外部量子効率5%)以上の発光出力であることが好ましく、4.6mW(外部量子効率7%)以上がより好ましい。
In the present invention, it is recommended that the external quantum efficiency of the GaN-based LED is 5% or more, and a particularly preferable value is 7% or more.
For example, in the device structure shown in FIG. 3, when the element outline and (350μm × 350μm) ~ (5mm × 5mm) of about rectangular, the light emitting area becomes 7 × 10 -4 cm 2 ~0.24cm 2 about. Among these, for example, when an LED element having an emission area of 7.2 × 10 −4 cm 2 and an emission peak wavelength of 380 nm is used, the emission output is 3.3 mW (external quantum efficiency 5%) or more when energized with 20 mA. It is preferably 4.6 mW (external quantum efficiency 7%) or more.

GaN系LEDの発光出力、外部量子効率を上記のように限定することによって、従来の発光装置よりも、LEDの温度上昇が抑制される。そのために、該LED自体の発光波長の変化も抑制されて、波長面での各蛍光体の変換効率の変化も少なくなる。また、それと同時に、加熱による蛍光体の温度上昇が軽減されて、各蛍光体の変換効率の変化も少なくなる。これらが、色調変化の抑制に寄与する。   By limiting the light emission output and the external quantum efficiency of the GaN-based LED as described above, the temperature rise of the LED is suppressed as compared with the conventional light emitting device. Therefore, the change in the emission wavelength of the LED itself is also suppressed, and the change in the conversion efficiency of each phosphor on the wavelength plane is reduced. At the same time, the temperature rise of the phosphor due to heating is reduced, and the change in conversion efficiency of each phosphor is also reduced. These contribute to suppression of color tone change.

上記の発光ピーク波長、発光出力、外部量子効率の条件を満たすGaN系LEDとしては、図3に示すように、InGaN系材料からなる発光層を含んで構成された発光部13を有するものが挙げられる。
発光部は、例えば(n型クラッド層/量子井戸構造/p型クラッド層)など、電流注入によって光を発生し得るようにp型層とn型層とを有して構成され、発光に係る層(発光層)を持つ。発光層は、量子井戸構造における井戸層である。好ましい発光部の構造としては、単一量子井戸(SQW)構造、多重量子井戸(MQW)構造、またはダブルヘテロ(DH)構造が挙げられ、なかでもMQW構造が、高出力、高効率の点で特に好ましい。
As shown in FIG. 3, the GaN-based LED that satisfies the conditions of the emission peak wavelength, the light emission output, and the external quantum efficiency includes a light-emitting portion 13 that includes a light-emitting layer made of an InGaN-based material. It is done.
The light-emitting portion is configured to have a p-type layer and an n-type layer so that light can be generated by current injection, such as (n-type clad layer / quantum well structure / p-type clad layer). It has a layer (light emitting layer). The light emitting layer is a well layer in a quantum well structure. As a preferable structure of the light emitting portion, a single quantum well (SQW) structure, a multiple quantum well (MQW) structure, or a double hetero (DH) structure can be cited. Among them, the MQW structure has a high output and high efficiency. Particularly preferred.

図3(a)に示す素子構造例では、サファイア基板10上に、GaN系低温成長バッファ層10bを介して、順に、n型コンタクト層11、発光部13(n型クラッド層12/MQW/p型クラッド層14)、p型コンタクト層15が気相成長によって積層され、各コンタクト層に、n−電極P1、p−電極P2が設けられている。
また、図3(b)では、さらに、サファイア基板の上面に、後述のLEPS法を実施するための凹凸Sが加えられている。
In the example of the element structure shown in FIG. 3A, an n-type contact layer 11 and a light emitting portion 13 (n-type cladding layer 12 / MQW / p) are sequentially formed on a sapphire substrate 10 via a GaN-based low-temperature growth buffer layer 10b. Type cladding layer 14) and p-type contact layer 15 are deposited by vapor phase growth, and an n-electrode P1 and a p-electrode P2 are provided in each contact layer.
Moreover, in FIG.3 (b), the unevenness | corrugation S for implementing the below-mentioned LEPS method is further added to the upper surface of a sapphire substrate.

発光層の材料として用いるInGaN系とは、上記したGaN系のなかでも、In組成、Ga組成を必須に含む化合物半導体であって、InAGa1-AN(0<A<1)で示されるものの他、これにさらにAl組成が加えられたものであってもよい。InAGa1-ANの組成は、上記発光ピーク波長が得られるように決定すればよいが、InAGa1-AN(0.005≦A≦0.22、このときの発光波長360nm〜430nm)は、出力が大きく好ましい材料である。 The InGaN-based material used as the material of the light emitting layer is a compound semiconductor that essentially includes an In composition and a Ga composition among the GaN-based materials described above, and is represented by In A Ga 1-A N (0 <A <1). In addition to those described above, an Al composition may be further added thereto. The composition of In A Ga 1 -A N may be determined so as to obtain the above emission peak wavelength, but In A Ga 1 -A N (0.005 ≦ A ≦ 0.22, emission wavelength at this time is 360 nm) (˜430 nm) is a preferable material having a large output.

以上のことから、発光ピーク波長が360nm〜430nmとなるように決定されたInAGa1-ANを井戸層とするMQW構造のLED(InGaN紫外LED)が、当該発光装置には最も好ましいLEDである。さらに、InAGa1-ANを井戸層とするMQW構造のなかでも、InAGa1-AN井戸層とGaN障壁層とからなるMQW構造は、高出力、高効率が得られる構造である。 In view of the above, an MQW-structured LED (InGaN UV LED) having a well layer of In A Ga 1-A N whose emission peak wavelength is determined to be 360 nm to 430 nm is the most preferable LED for the light emitting device. It is. Furthermore, among the MQW structures using In A Ga 1-A N as a well layer, the MQW structure consisting of an In A Ga 1-A N well layer and a GaN barrier layer is a structure that provides high output and high efficiency. is there.

当該発光装置の出力光には、色調の変化を抑制するために、蛍光体からの蛍光を用いることが基本である。しかし、GaN系LEDから主発光以外にフォトルミネッセンス光(PL光)をも発する構成とし、そのPL光を上記蛍光と共に出力させて、蛍光のバランスを補正してもよい。そのようなPL光を発生させるには、GaN系LEDの素子構造内に、主発光を受けて目的のPL光を発するように組成を決定したGaN系結晶層を加えればよい。   In order to suppress a change in color tone, the light emitted from the light emitting device is basically based on fluorescence from a phosphor. However, the GaN-based LED may be configured to emit photoluminescence light (PL light) in addition to the main light emission, and the PL light may be output together with the fluorescence to correct the fluorescence balance. In order to generate such PL light, a GaN-based crystal layer whose composition is determined so as to emit main PL light and emit target PL light may be added to the element structure of the GaN-based LED.

本発明による発光装置は、GaN系発光素子としてGaN系LDを用いることも可能である。その場合は、該LDの条件として、発光ピーク波長360nm〜430nm、外部量子効率10%以上のものを用いる。また、LDを用いる場合には、該LDのレーザ出力を、発振閾値電流通電時のレーザ出力から該レーザ出力の10倍のレーザ出力まで変化させたときに、出力光の色度の変化量が、x−y色度図上において0.05以内となるものが本発明による発光装置である。   The light emitting device according to the present invention can also use a GaN LD as the GaN light emitting element. In that case, as the conditions for the LD, those having an emission peak wavelength of 360 nm to 430 nm and an external quantum efficiency of 10% or more are used. Further, in the case of using an LD, when the laser output of the LD is changed from the laser output when the oscillation threshold current is energized to the laser output 10 times the laser output, the amount of change in chromaticity of the output light is changed. What is within 0.05 on the xy chromaticity diagram is the light emitting device according to the present invention.

GaN発光素子を形成するためのGaN系結晶層の成長方法としては、HVPE法、MOVPE法、MBE法などが挙げられる。厚膜を作製する場合はHVPE法が好ましいが、薄膜を形成する場合はMOVPE法やMBE法が好ましい。   Examples of the growth method of the GaN crystal layer for forming the GaN light emitting device include HVPE method, MOVPE method, MBE method and the like. The HVPE method is preferable when forming a thick film, but the MOVPE method or MBE method is preferable when forming a thin film.

GaN系発光素子の素子構造のべースとして用いられる結晶基板は、GaN系結晶が成長可能なものであればよい。好ましい結晶基板としては、例えば、サファイア(C面、A面、R面)、SiC(6H、4H、3C)、GaN、AlN、Si、スピネル、ZnO、GaAs、NGOなどが挙げられる。また、これらの結晶を表層として有する基材であってもよい。なお、基板の面方位は特に限定されなく、更にジャスト基板でも良いしオフ角を付与した基板であっても良い。   The crystal substrate used as the base of the element structure of the GaN-based light-emitting element may be any substrate that can grow GaN-based crystals. Preferable crystal substrates include, for example, sapphire (C plane, A plane, R plane), SiC (6H, 4H, 3C), GaN, AlN, Si, spinel, ZnO, GaAs, NGO, and the like. Moreover, the base material which has these crystals as a surface layer may be sufficient. The plane orientation of the substrate is not particularly limited, and may be a just substrate or a substrate with an off angle.

結晶基板上にGaN系結晶層からなる素子構造を成長させるに際しては、必要に応じてバッファ層を介在させてよい。好ましいバッファ層としては、GaN、AlN、InNなどによるGaN系低温成長バッファ層が挙げられる。   When growing an element structure made of a GaN-based crystal layer on a crystal substrate, a buffer layer may be interposed as necessary. As a preferable buffer layer, a GaN-based low-temperature growth buffer layer made of GaN, AlN, InN, or the like can be given.

GaN系発光素子のさらなる高出力化・高効率化のために、結晶基板上に成長するGaN系結晶層の転位密度を低減させる構造を適宜導入してよい。転位密度低減のための構造としては、例えば次のものが挙げられる。
(い)従来公知の選択成長法(ELO法)を実施し得るように、結晶基板上にマスク層(SiO2などが用いられる)をストライプパターンなどとして形成した構造。
(ろ)GaN系結晶がラテラル成長やファセット成長をし得るように、結晶基板上に、ドット状、ストライプ状の凹凸加工を施した構造。
これらの構造とバッファ層とは、適宜組合せてよい。
In order to further increase the output and efficiency of the GaN-based light emitting device, a structure for reducing the dislocation density of the GaN-based crystal layer grown on the crystal substrate may be introduced as appropriate. Examples of the structure for reducing the dislocation density include the following.
(Ii) A structure in which a mask layer (SiO 2 or the like is used) is formed as a stripe pattern on a crystal substrate so that a conventionally known selective growth method (ELO method) can be performed.
(B) A structure in which dots and stripes are formed on the crystal substrate so that the GaN-based crystal can be laterally grown or faceted.
These structures and the buffer layer may be appropriately combined.

上記転位密度低減のための構造のなかでも、上記(ろ)は、マスク層を用いない好ましい構造であって、GaN系LEDのさらなる高出力化・高効率化に寄与し、より好ましい発光装置を得ることができる。以下、上記(ろ)の転位密度低減化構造について説明する。   Among the structures for reducing the dislocation density, the above (b) is a preferable structure that does not use a mask layer, and contributes to higher output and higher efficiency of the GaN-based LED. Obtainable. Hereinafter, the dislocation density reducing structure (b) will be described.

結晶基板に対する凹凸の加工方法としては、例えば、通常のフォトリソグラフイ技術を用いて、目的の凹凸の態様に応じてパターン化し、RIE技術等を使ってエッチング加工を施して目的の凹凸を得る方法などが例示される。   As a method for processing irregularities on a crystal substrate, for example, a method for obtaining desired irregularities by patterning according to a desired irregularity mode using an ordinary photolithographic technique and performing etching using an RIE technique or the like Etc. are exemplified.

凹凸の配置パターンは、ドット状の凹部(または凸部)が配列されたパターン、直線状または曲線状の凹溝(または凸尾根)が一定間隔・不定の間隔で配列された、ストライプ状や同心状のパターンなどが挙げられる。凸尾根が格子状に交差したパターンは、ドット状(角穴状)の凹部が規則的に配列されたパターンとみることができる。また、凹凸の断面形状は、矩形(台形を含む)波状、三角波状、サインカーブ状などが挙げられる。   Convex and concave arrangement patterns include a pattern in which dot-shaped concave portions (or convex portions) are arranged, a linear or curved concave groove (or convex ridge) arranged in a regular or indefinite interval, and stripes or concentric Pattern. A pattern in which convex ridges intersect in a lattice shape can be regarded as a pattern in which dot-shaped (square hole-shaped) concave portions are regularly arranged. In addition, examples of the cross-sectional shape of the unevenness include a rectangular (including trapezoidal) wave shape, a triangular wave shape, a sine curve shape, and the like.

これら種々の凹凸態様の中でも、直線状の凹溝(または凸尾根)が一定間隔で配列された、ストライプ状の凹凸パターン(断面矩形波状)は、その作製工程を簡略化できると共に、パターンの作製が容易であり好ましい。   Among these various concavo-convex forms, a striped concavo-convex pattern (rectangular cross-sectional shape) in which linear grooves (or convex ridges) are arranged at regular intervals can simplify the manufacturing process and produce the pattern. Is easy and preferable.

ストライプの長手方向を、これを埋め込んで成長するGaN系結晶にとって〈1−100〉方向とした場合、図4(a)に示すように、凸部の上部から成長を開始したGaN系結晶11aは、横方向に高速成長し、図4(b)に示すように、凹部を空洞として残した状態でGaN系結晶層11bとなりやすい。このような〈1−100〉方向の凹凸を用いた手法は、LEPS法(Lateral Epitaxy on the Patterned Substrate)とも呼ばれる。ただし、ファセット面が形成されやすい成長条件を選ぶ事により、下記の〈11−20〉方向の場合と同様の効果を得ることができる。   When the longitudinal direction of the stripe is set to the <1-100> direction for a GaN-based crystal that is embedded and grown, as shown in FIG. 4B, the GaN-based crystal layer 11b tends to be formed in a state where the recess remains as a cavity, as shown in FIG. 4B. Such a method using unevenness in the <1-100> direction is also called a LEPS method (Lateral Epitaxy on the Patterned Substrate). However, the same effect as in the <11-20> direction described below can be obtained by selecting growth conditions in which facet surfaces are easily formed.

一方、ストライプの長手方向を、成長するGaN系結晶にとって〈11−20〉方向とした場合、横方向成長が抑制され、{1−101}面などの斜めファセットが形成され易くなり、図5(a)に示すように、先ず、断面三角形を呈した稜線状の結晶11aに成長し、図5(b)に示すように、凹部に空洞を残さずGaN系結晶層11bとなりやすい。この結果、基板側からC軸方向に伝搬した転位がこのファセット面で横方向に曲げられ、上方に伝搬し難くなり、低転位密度領域を形成できる点で特に好ましい。このような〈11−20〉方向の凹凸を用いた手法は、上記LEPS法に対して、ファセットLEPS法とも呼ぶことができる。   On the other hand, when the longitudinal direction of the stripe is set to the <11-20> direction for the growing GaN-based crystal, the lateral growth is suppressed, and an oblique facet such as a {1-101} plane is easily formed. As shown in a), first, the crystal grows into a ridge-line crystal 11a having a triangular cross section, and as shown in FIG. 5B, it tends to become a GaN-based crystal layer 11b without leaving a cavity in the recess. As a result, the dislocation propagated in the C-axis direction from the substrate side is bent in the lateral direction at the facet surface, and is difficult to propagate upward, which is particularly preferable in that a low dislocation density region can be formed. Such a method using unevenness in the <11-20> direction can also be referred to as a facet LEPS method in contrast to the LEPS method.

凹凸の断面を図6に示すような矩形波状とする場合の好ましい寸法は次のとおりである。凹溝の幅W1は、1μm〜20μm、特に2μm〜20μmが好ましい。凸部の幅W2は、1μm〜20μm、特に1μm〜10μmが好ましい。凹凸の振幅(凹溝の深さ)dは、0.2μm以上の深さがあれば良い。これらの寸法やそこから計算されるピッチ等は、他の断面形状の凹凸においても同様である。   The preferred dimensions when the concavo-convex cross section has a rectangular wave shape as shown in FIG. 6 are as follows. The width W1 of the concave groove is preferably 1 μm to 20 μm, particularly preferably 2 μm to 20 μm. The width W2 of the convex portion is preferably 1 μm to 20 μm, particularly preferably 1 μm to 10 μm. The amplitude of the unevenness (the depth of the groove) d should be 0.2 μm or more. These dimensions, the pitches calculated from the dimensions, and the like are the same for the unevenness of other cross-sectional shapes.

上記のような転位密度低減化の構造に加えて、発光層で発生した光をより多く外部に取り出すための種々の構造(電極構造、反射層構造、上下を逆に実装し得るフリップチップ構造など)などを適宜設けることが好ましい。   In addition to the above-mentioned structure for reducing dislocation density, various structures for taking out more light generated in the light emitting layer (electrode structure, reflective layer structure, flip chip structure that can be mounted upside down, etc.) Etc.) are preferably provided as appropriate.

当該発光装置の出力光となる蛍光は、可視光であればよく、励起光源であるGaN系LEDの発光ピーク波長(450nm以下、360nm〜430nm)から800nmまでの波長範囲内に、発光強度のピークを1つ以上有する光であればよい。なかでも、照明用途として白色光は有用であり、しかも、良好な演色性であるためには、赤色光、緑色光、青色光からなる3原色光を必須に含んで作り出される白色光(RGB白色光ともいう)であることが好ましい。   The fluorescence used as the output light of the light emitting device may be visible light, and the emission intensity peak is within the wavelength range from the emission peak wavelength (450 nm or less, 360 nm to 430 nm) to 800 nm of the GaN-based LED that is the excitation light source. It is sufficient that the light has one or more. Among them, white light is useful for lighting applications, and in order to have good color rendering properties, white light (RGB white color) that is produced by including three primary colors consisting of red light, green light, and blue light are essential. (Also referred to as light).

蛍光体には、励起光源であるGaN系LEDによって励起され、上記可視光を発する材料を用いればよい。
白色光を発生させ得る蛍光体(赤色蛍光体、緑色蛍光体、及び青色蛍光体の混合物からなる白色蛍光体)としては、公知の材料を用いてよいが、色調変化の少ない発光装置を構成するための好ましい白色蛍光体としては、赤色蛍光体として、〔Ln22S:Eu(Ln=Y,La,Gd,Lu,Sc)〕、及び〔(Zna,Cd1-a)S:Ag,Cl、(0.5>a>0.2)〕から選ばれる1種類以上の蛍光体を含み、緑色蛍光体として、〔(Zna,Cd1-a)S:Cu,Al、(1≧a>0.6)〕、〔(Zna,Cd1-a)S:Au,Al、(1≧a>0.6)〕、〔(Zna,Cd1-a)S:Ag,Cl、(1≧a>0.6)〕、及び〔(Ba,Sr)MgAl1017:Eu,Mn〕から選ばれる1種類以上の蛍光体を含み、青色蛍光体として、〔(Sr,Ca,Ba,Mg)10(PO46Cl2:Eu〕および〔(Ba,Sr)MgAl1017:Eu,Mn〕を含むものが挙げられる。
A material that emits visible light when excited by a GaN-based LED that is an excitation light source may be used as the phosphor.
As a phosphor capable of generating white light (a white phosphor composed of a mixture of a red phosphor, a green phosphor, and a blue phosphor), a known material may be used, but a light emitting device with little color tone change is configured. Preferred white phosphors for this purpose include red phosphors such as [Ln 2 O 2 S: Eu (Ln = Y, La, Gd, Lu, Sc)] and [(Zn a , Cd 1-a ) S: One or more phosphors selected from Ag, Cl, (0.5>a> 0.2)], and as a green phosphor, [(Zn a , Cd 1-a ) S: Cu, Al, (1 ≧ a> 0.6)], [(Zn a , Cd 1-a ) S: Au, Al, (1 ≧ a> 0.6)], [(Zn a , Cd 1-a ) S: Ag, Cl, ( 1 ≧ a> 0.6)], and [(Ba, Sr) MgAl 10 O 17: Eu, comprise one or more phosphors selected from Mn], as a blue phosphor, [(Sr Ca, Ba, Mg) 10 ( PO 4) 6 Cl 2: Eu ] and [(Ba, Sr) MgAl 10 O 17: Eu, include those containing Mn].

上記した蛍光体の材料は、蛍光を発する物質そのものであって、実際に蛍光体として当該発光素子と組み合わせて発光装置を構成する場合には、塗布可能な蛍光塗料や、組立て可能な蛍光体部品などとするのが好ましい態様である。そのために、該蛍光体の材料に対して、種々の基材との混ぜ合わせ、化合、基板への担持、固化など、種々の加工を施してもよい。発光素子と蛍光体とを組み合わせて1つの発光装置とするための結合方法、結合構造自体は、公知技術を参照してもよい。   The phosphor material described above is a substance that emits fluorescence. When a light-emitting device is actually combined with the light-emitting element as a phosphor, an applicable fluorescent paint or a phosphor component that can be assembled is used. It is a preferable aspect to make it. For this purpose, the phosphor material may be subjected to various processes such as mixing with various base materials, compounding, loading on a substrate, and solidification. For a bonding method and a bonding structure itself for combining a light emitting element and a phosphor to form one light emitting device, known techniques may be referred to.

当該発光装置の用途は限定されず、信号機、表示装置、電飾などであってもよいが、色調の変化が抑制された特徴が最も顕著となるのは、RGB白色光を出力光として当該発光装置を構成し、これを複数集合させた照明装置である。   The use of the light-emitting device is not limited, and may be a traffic light, a display device, an electrical decoration, etc., but the feature that the change in color tone is suppressed is most remarkable when the light emission is RGB white light as output light. This is an illumination device that constitutes a device and is a collection of a plurality of such devices.

InGaN紫外LED、白色蛍光体を用い、色調の変化が抑制された白色LEDを実際に製作した。
InGaN紫外LEDの主な仕様は次のとおりである。
発光ピーク波長:380nm。
発光部の構造:In0.03Ga0.97N井戸層/GaN障壁層を6ペア積層したMQW構造。
転位密度低減化の手法:ファセットLEPS法。
ベアチップの外形:350μm×350μm方形。
実装方式:フリップチップ
ベアチップ状態での発光出力:通電電流20mAにおいて7.8mW(樹脂モールドして12.5mW)。
Using an InGaN ultraviolet LED and a white phosphor, a white LED in which a change in color tone was suppressed was actually manufactured.
The main specifications of the InGaN ultraviolet LED are as follows.
Emission peak wavelength: 380 nm.
Structure of light emitting part: MQW structure in which 6 pairs of In 0.03 Ga 0.97 N well layer / GaN barrier layer are stacked.
Dislocation density reduction method: facet LEPS method.
Bare chip outline: 350 μm × 350 μm square.
Mounting method: Flip chip Light emission output in bare chip state: 7.8 mW (12.5 mW by resin molding) at a current of 20 mA.

(InGaN紫外LEDの製作)
C面サファイア基板上にフォトレジストによるストライプ状のパターニングを行い、RIE装置で1.5μmの深さまで断面方形となるようエッチングし、表面がストライプ状パターンの凹凸となった基板を得た。
該パターンの仕様は、凸部幅3μm、周期6μm、ストライプの長手方向は、基板上に成長するGaN系結晶にとって〈11−20〉方向とした。
(Production of InGaN UV LED)
Striping patterning with a photoresist was performed on a C-plane sapphire substrate, and etching was performed with a RIE apparatus so as to have a square cross section up to a depth of 1.5 μm, thereby obtaining a substrate having a striped pattern on the surface.
The specifications of the pattern were a convex part width of 3 μm, a period of 6 μm, and the longitudinal direction of the stripes in the <11-20> direction for the GaN-based crystal grown on the substrate.

フォトレジストを除去後、通常の横型常圧の有機金属気相成長装置(MOVPE)に基板を装着し、窒素ガス主成分雰囲気下で1100℃まで昇温し、サーマルクリーニングを行った。温度を500℃まで下げ、III族原料としてトリメチルガリウム(以下TMG)を、N原料としてアンモニアを流し、厚さ30nmのGaN低温成長バッファ層を成長させた。   After removing the photoresist, the substrate was mounted on a normal horizontal atmospheric pressure metalorganic vapor phase epitaxy (MOVPE), and the temperature was raised to 1100 ° C. in a nitrogen gas main component atmosphere to perform thermal cleaning. The temperature was lowered to 500 ° C., trimethylgallium (hereinafter referred to as TMG) was flown as a group III raw material, and ammonia was flowed as an N raw material to grow a GaN low temperature growth buffer layer having a thickness of 30 nm.

続いて温度を1000℃に昇温し、原料(TMG、アンモニア)、ドーパント(シラン)を流し、n型GaN層(コンタクト層)を成長させた。このときのGaN層の成長は、Tadatomoらによって開示された文献Jpn. J. Appl. Phys. 40 ・〔2001〕・L583. に示すように、凸部の上面、凹部の底面から、断面山形でファセット面を含む尾根状の結晶として発生した後、凹部内に空洞を形成することなく、全体を埋め込む成長であった。   Subsequently, the temperature was raised to 1000 ° C., a raw material (TMG, ammonia) and a dopant (silane) were passed, and an n-type GaN layer (contact layer) was grown. The growth of the GaN layer at this time has a mountain-shaped cross section from the top surface of the convex portion and the bottom surface of the concave portion as shown in the document Jpn. J. Appl. Phys. 40 (2001) L583 disclosed by Tadatomo et al. After generating as a ridge-like crystal including a facet plane, the growth was embedded without forming a cavity in the recess.

ファセット構造を経由して平坦なGaN埋め込み層を成長し、続いて、n型AlGaNクラッド層、InGaN発光層(MQW構造)、p型AlGaNクラッド層、p型GaNコンタクト層を順に形成し、発光波長380nmの紫外LED用エピ基板とし、さらに、n型コンタクト層を表出させるためのエッチング加工、電極形成、350μm×350μmのチップへと素子分離を行い、ベアチップ状態のInGaN紫外LEDを得た。   A flat GaN buried layer is grown via the facet structure, and then an n-type AlGaN cladding layer, an InGaN light emitting layer (MQW structure), a p-type AlGaN cladding layer, and a p-type GaN contact layer are formed in this order, and the emission wavelength Using an epitaxial substrate for an ultraviolet LED of 380 nm, etching processing for exposing an n-type contact layer, electrode formation, and element separation into a 350 μm × 350 μm chip were performed to obtain a bare-chip InGaN ultraviolet LED.

Si基板を使ってサブマウント用の台座上に、サファイア基板側を上面に、所謂フリップチップ型実装を行った。該紫外LEDの搭載されたSiサブマウントをリードフレームのカップ内に固着した。この状態のLEDチップの全発光出力を積分球で測定した所、20mA通電時で7.8mWを観測した。尚、このままエポキシ樹脂でモールドしたLEDランプで同様の測定を行い、全発光出力12.5mWを観測した。この発光素子の発光面積は7.18×10-4cm2であった。
この発光効率は、単位発光面積当たりの電流量27.9(A/cm2)における外部量子効率12%に相当する。
尚、この発光素子は、少なくとも50mAの通電にも発光出力が飽和することなく、通電量に比例した発光出力が得られた。
A so-called flip chip mounting was performed on a submount pedestal using a Si substrate with the sapphire substrate side as the upper surface. The Si submount on which the ultraviolet LED was mounted was fixed in the lead frame cup. When the total light emission output of the LED chip in this state was measured with an integrating sphere, 7.8 mW was observed when 20 mA was applied. The same measurement was performed with an LED lamp molded with an epoxy resin as it was, and a total light emission output of 12.5 mW was observed. The light emitting area of this light emitting device was 7.18 × 10 −4 cm 2 .
This luminous efficiency corresponds to an external quantum efficiency of 12% at a current amount of 27.9 (A / cm 2 ) per unit luminous area.
The light emitting element did not saturate the light emission output even when energized at least 50 mA, and a light emission output proportional to the energization amount was obtained.

(白色蛍光体の調製)
青色蛍光体の材料として、BaMgAl1017:Eu,Mnを主成分とする蛍光体を用い、緑〜黄色光を出力する蛍光体の材料として、Y2SiO5:Ceと、Tb(Y、Gd)Al512:(Ce、Tb)とを主成分とする蛍光体を用い、赤色光を出力する蛍光体の材料として、Ln22S:Eu(Ln=Y、La、Gd、Lu、Sc)を主成分とする蛍光体を用いた。
これら各色の蛍光体を配合し、熱硬化型シリコン系樹脂に分散させて、白色蛍光体とした。
(Preparation of white phosphor)
A phosphor mainly composed of BaMgAl 10 O 17 : Eu, Mn is used as a blue phosphor material, and Y 2 SiO 5 : Ce and Tb (Y, Gd) A phosphor mainly composed of Al 5 O 12 : (Ce, Tb), and as a phosphor material that outputs red light, Ln 2 O 2 S: Eu (Ln = Y, La, Gd, A phosphor mainly composed of Lu and Sc) was used.
These phosphors of each color were blended and dispersed in a thermosetting silicone resin to obtain a white phosphor.

(発光装置の組立て)
フリップチップ実装された紫外LEDを覆うように、上記の白色蛍光体を塗布した。該蛍光体の塗布厚さは約100μmである。該厚みは、白色蛍光体の含有量に依存してその最適値は変化する。シリコン樹脂が十分固化してから、エポキシ樹脂を使って砲弾型のモールドを行い、本発明の発光装置(白色LEDランプ)に仕上げた。
(Assembly of light emitting device)
The white phosphor was applied so as to cover the ultraviolet LED mounted on the flip chip. The coating thickness of the phosphor is about 100 μm. The optimum value of the thickness varies depending on the content of the white phosphor. After the silicon resin was sufficiently solidified, a bullet-shaped mold was performed using an epoxy resin to finish the light emitting device (white LED lamp) of the present invention.

(評価)
得られた発光装置に対して、LEDの駆動電流量を0.072mAから50mAまで変化(単位発光面積当たり0.1(A/cm2)から70(A/cm2)までの変化に相当)させたときの出力光の色度は、図2に示すように、x−y色度図の色度座標上で、点m1(x=0.3、y=0.34)から点m2(x=0.28、y=0.32)まで変化した。
このときの2点間の変化量Δmは、約0.028であり、本発明による色調変化の規定を満たすものであった。
(Evaluation)
With respect to the obtained light emitting device, the LED driving current amount is changed from 0.072 mA to 50 mA (corresponding to a change from 0.1 (A / cm 2 ) to 70 (A / cm 2 ) per unit light emitting area). As shown in FIG. 2, the chromaticity of the output light when it is generated is from the point m1 (x = 0.3, y = 0.34) to the point m2 (on the chromaticity coordinates of the xy chromaticity diagram. x = 0.28, y = 0.32).
The amount of change Δm between the two points at this time is about 0.028, which satisfies the regulation of the color tone change according to the present invention.

本発明の発光装置の構成を示す模式図である。ハッチングは、領域を区別する目的で施している。他の図も同様である。It is a schematic diagram which shows the structure of the light-emitting device of this invention. Hatching is performed for the purpose of distinguishing the areas. The same applies to the other figures. 本発明において、出力光の色度の変化量を規定するx−y色度図である。In this invention, it is an xy chromaticity diagram which prescribes | regulates the variation | change_quantity of chromaticity of output light. 本発明の発光装置の構成に用いられるGaN系LEDの素子構造の一例を示す図である。It is a figure which shows an example of the element structure of GaN-type LED used for the structure of the light-emitting device of this invention. GaN系LEDを構成するGaN系結晶層の転位密度を低減させるために、結晶基板に設けられる凹凸構造、およびGaN系結晶の成長の様子を示す模式図である。同図の例では、凹凸は、紙面に垂直に延びる凹溝・凸稜によるストライプ状のパターンであって、該紙面に垂直な方向が、成長するGaN系結晶の〈1−100〉方向である。FIG. 3 is a schematic diagram showing a concavo-convex structure provided on a crystal substrate and a growth state of a GaN-based crystal in order to reduce the dislocation density of a GaN-based crystal layer constituting the GaN-based LED. In the example of the figure, the unevenness is a striped pattern with grooves and convex ridges extending perpendicularly to the paper surface, and the direction perpendicular to the paper surface is the <1-100> direction of the growing GaN-based crystal. . 図4と同様に、GaN系LEDを構成するGaN系結晶層の転位密度を低減させるために、結晶基板に設けられる凹凸構造、およびGaN系結晶の成長の様子を示す模式図である。同図の例では、凹溝・凸稜の長手方向(紙面に垂直な方向)が、成長するGaN系結晶の〈11−20〉方向である。FIG. 5 is a schematic diagram showing the concavo-convex structure provided on the crystal substrate and the growth of the GaN-based crystal in order to reduce the dislocation density of the GaN-based crystal layer constituting the GaN-based LED, as in FIG. 4. In the example of the figure, the longitudinal direction (direction perpendicular to the paper surface) of the grooves / ridges is the <11-20> direction of the growing GaN-based crystal. 結晶基板上面に設けられる凹凸の寸法を示すための図である。It is a figure for showing the dimension of the unevenness | corrugation provided in a crystal substrate upper surface.

符号の説明Explanation of symbols

1 GaN系発光ダイオード
2 蛍光体
L1 発光ダイオードからの光
L2 蛍光(=出力光)






1 GaN-based light emitting diode 2 phosphor L1 light from light emitting diode L2 fluorescence (= output light)






Claims (10)

GaN系発光素子と、該発光素子から発せられる光で励起され可視光を発する蛍光体とが組み合され、該蛍光を出力光とする発光装置であって、
前記GaN系発光素子はGaN系発光ダイオードであり、該発光ダイオードに注入される駆動電流量を、単位発光面積当たり0.1(A/cm2)から70.0(A/cm2)まで変化させたときに、
出力光の色度の変化量が、x−y色度図上において0.05以内であることを特徴とする発光装置。
A GaN-based light-emitting element and a phosphor that emits visible light when excited by light emitted from the light-emitting element, and a light-emitting device that uses the fluorescence as output light,
The GaN-based light emitting device is a GaN-based light emitting diode, and the amount of driving current injected into the light emitting diode is changed from 0.1 (A / cm 2 ) to 70.0 (A / cm 2 ) per unit light emitting area. When letting
A light emitting device characterized in that the amount of change in chromaticity of output light is within 0.05 on the xy chromaticity diagram.
上記GaN系発光ダイオードが、InGaN系材料からなる発光層を含んで構成された発光部を有するものであって、該発光部の構造は、単一量子井戸構造、多重量子井戸構造、またはダブルヘテロ構造であり、発光ピーク波長は430nm以下であり、ベアチップ状態において単位発光面積当たり30(A/cm2)の駆動電流を注入した時に5%以上の外部量子効率を有するものである、請求項1記載の発光装置。 The GaN-based light emitting diode has a light-emitting portion configured to include a light-emitting layer made of an InGaN-based material, and the light-emitting portion has a single quantum well structure, a multiple quantum well structure, or a double heterostructure. The structure has an emission peak wavelength of 430 nm or less and an external quantum efficiency of 5% or more when a drive current of 30 (A / cm 2 ) per unit emission area is injected in a bare chip state. The light-emitting device of description. 上記GaN系発光ダイオードが、主発光と共に、それとは異なる波長のフォトルミネッセンス光を発するように構成されており、該フォトルミネッセンス光が上記蛍光と共に出力されるものである、請求項1記載の発光装置。   2. The light emitting device according to claim 1, wherein the GaN-based light emitting diode is configured to emit photoluminescence light having a wavelength different from that of the main light emission, and the photoluminescence light is output together with the fluorescence. . GaN系発光素子と、該発光素子から発せられる光で励起され可視光を発する蛍光体とが組み合され、該蛍光を出力光とする発光装置であって、
前記GaN系発光素子は、発光ピーク波長360nm〜430nm、全発光エネルギーの外部量子効率が10%以上のGaN系半導体レーザであり、該半導体レーザのレーザ出力を発振閾値電流通電時のレーザ出力から該レーザ出力の10倍のレーザ出力まで変化させたときに、
出力光の色度の変化量が、x−y色度図上において0.05以内であることを特徴とする発光装置。
A GaN-based light-emitting element and a phosphor that emits visible light when excited by light emitted from the light-emitting element, and a light-emitting device that uses the fluorescence as output light,
The GaN-based light emitting element is a GaN-based semiconductor laser having an emission peak wavelength of 360 nm to 430 nm and an external quantum efficiency of 10% or more of the total emission energy, and the laser output of the semiconductor laser is calculated from the laser output when the oscillation threshold current is applied. When changing the laser output to 10 times the laser output,
A light emitting device characterized in that the amount of change in chromaticity of output light is within 0.05 on the xy chromaticity diagram.
上記GaN系発光素子の発光部が、InAGa1-AN(0<A≦1)井戸層とGaN系障壁層とからなる多重量子井戸構造であって、発光ピーク波長が360nm〜430nmとなるようにInAGa1-AN井戸層の組成比Aが決定されている、請求項1〜4のいずれかに記載の発光装置。 Emitting portion of the GaN-based light emitting device is a multiple quantum well structure composed of In A Ga 1-A N ( 0 <A ≦ 1) well layer and a GaN-based barrier layer, and the emission peak wavelength 360nm~430nm The light-emitting device according to claim 1, wherein the composition ratio A of the In A Ga 1-A N well layer is determined. 上記GaN系発光素子の素子構造が、表面に凹凸が加工された結晶基板上に、GaN系半導体からなる低温バッファ層を介してまたは直接的に、GaN系結晶層が該凹凸を覆ってラテラル成長またはファセット成長しており、該GaN系結晶の上に発光部が形成された構造を有するものである、請求項1〜5のいずれかに記載の発光装置。   The element structure of the GaN-based light-emitting element is laterally grown on a crystal substrate having a concavo-convex processed surface through a low-temperature buffer layer made of a GaN-based semiconductor or directly over the GaN-based crystal layer. The light-emitting device according to claim 1, wherein the light-emitting device has facet growth and has a structure in which a light-emitting portion is formed on the GaN-based crystal. 上記可視光が、上記発光ダイオードから発せられる光の波長から波長800nmまでの波長範囲内に、発光強度のピークを1つ以上有する光である、請求項1〜6のいずれかに記載の発光装置。   The light emitting device according to any one of claims 1 to 6, wherein the visible light is light having one or more peaks of light emission intensity within a wavelength range from a wavelength of light emitted from the light emitting diode to a wavelength of 800 nm. . 上記可視光が、赤色光、緑色光、青色光からなる3原色光を含んでなる白色光である、請求項7記載の発光装置。   The light-emitting device according to claim 7, wherein the visible light is white light including three primary color lights including red light, green light, and blue light. 上記蛍光体が、赤色蛍光体、緑色蛍光体、及び青色蛍光体の混合物からなる白色蛍光体であって、
前記赤色蛍光体が、〔Ln22S:Eu(Ln=Y,La,Gd,Lu,Sc)〕、及び〔(Zna,Cd1-a)S:Ag,Cl、(0.5>a>0.2)〕から選ばれる1種類以上の蛍光体を含むものであり、
前記緑色蛍光体が、〔(Zna,Cd1-a)S:Cu,Al、(1≧a>0.6)〕、〔(Zna,Cd1-a)S:Au,Al、(1≧a>0.6)〕、〔(Zna,Cd1-a)S:Ag,Cl、(1≧a>0.6)〕、及び〔(Ba,Sr)MgAl1017:Eu,Mn〕から選ばれる1種類以上の蛍光体を含むものであり、
前記青色蛍光体が、〔(Sr,Ca,Ba,Mg)10(PO46Cl2:Eu〕と、〔(Ba,Sr)MgAl1017:Eu,Mn〕とを含むものである、請求項1〜8のいずれかに記載の発光装置。
The phosphor is a white phosphor composed of a mixture of a red phosphor, a green phosphor, and a blue phosphor,
The red phosphors are [Ln 2 O 2 S: Eu (Ln = Y, La, Gd, Lu, Sc)] and [(Zn a , Cd 1-a ) S: Ag, Cl, (0.5> a > 0.2)] including one or more kinds of phosphors selected from
The green phosphor is [(Zn a , Cd 1-a ) S: Cu, Al, (1 ≧ a> 0.6)], [(Zn a , Cd 1-a ) S: Au, Al, ( 1 ≧ a> 0.6)], [(Zn a , Cd 1−a ) S: Ag, Cl, (1 ≧ a> 0.6)], and [(Ba, Sr) MgAl 10 O 17 : Eu , Mn] containing at least one phosphor selected from
The blue phosphor includes [(Sr, Ca, Ba, Mg) 10 (PO 4 ) 6 Cl 2 : Eu] and [(Ba, Sr) MgAl 10 O 17 : Eu, Mn], Item 9. The light emitting device according to any one of Items 1 to 8.
請求項1〜9のいずれかに記載の発光装置が複数集合した構成を有する照明装置。















The illuminating device which has the structure which the light-emitting device in any one of Claims 1-9 gathered.















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