JP2007117934A - Bolt tightening langevin-type oscillator - Google Patents

Bolt tightening langevin-type oscillator Download PDF

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JP2007117934A
JP2007117934A JP2005315935A JP2005315935A JP2007117934A JP 2007117934 A JP2007117934 A JP 2007117934A JP 2005315935 A JP2005315935 A JP 2005315935A JP 2005315935 A JP2005315935 A JP 2005315935A JP 2007117934 A JP2007117934 A JP 2007117934A
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metal plate
surface portion
amplitude
bolt
langevin type
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JP4827170B2 (en
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Toshiyuki Sugawara
稔幸 菅原
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Tokin Corp
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NEC Tokin Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a bolt-tightening Langevin type oscillator providing an amplitude large enough to generate cavitation even in a high frequency. <P>SOLUTION: The bolt-tightening Langevin type oscillator is composed by setting a total thickness formed by thicknesses of first and second metal plates 7, 8 and piezoelectric elements 3 to be one wavelength, by forming the second metal plate 8 as two plate-like state facing large and small plates, holding the piezoelectric elements 3 so that the first metal plate 7 and the larger face of the second metal plate 8 come into contact with each other, and fastening the central part with a bolt 6. By this configuration, an enlarged amplitude is transmitted to a third metal plate 9 set to a half wavelength, to provide a high amplitude of a high frequency having 3/2 wavelength as a whole. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、強力超音波応用の振動系に用いられる圧電素子に関し、特に高周波超音波洗浄機に好適なボルト締めランジュバン型振動子に関するものである。   The present invention relates to a piezoelectric element used in a vibration system for high-power ultrasonic applications, and more particularly to a bolt-clamped Langevin type vibrator suitable for a high-frequency ultrasonic cleaner.

現在、超音波洗浄機には、超音波を発生させる駆動源として、圧電素子が使用されている。中でも、機械加工後の製品の洗浄に使用される工業用の超音波洗浄機には、大きな超音波出力が得られるという理由から、ボルト締めランジュバン型振動子と呼ばれる強力超音波発生用の振動子が使用されている。   Currently, a piezoelectric element is used as a driving source for generating ultrasonic waves in an ultrasonic cleaning machine. Above all, industrial ultrasonic cleaners used for cleaning products after machining have a strong ultrasonic wave generator called bolt-clamped Langevin type vibrator because of the large ultrasonic output. Is used.

図1は、ボルト締めランジュバン型振動子の一例を示す側面図である。一般的なボルト締めランジュバン型振動子1は、電極板2の両側に、貫通孔を中心に有する円板状の一対の圧電素子3を配置し、さらにその両側に圧電素子3と同じ直径を有する円板状の金属板4及び金属板5を配置して、中心部でボルト6によって一体結合した構造をしている。   FIG. 1 is a side view showing an example of a bolted Langevin type vibrator. A general bolted Langevin type vibrator 1 has a pair of disk-shaped piezoelectric elements 3 having a through hole at the center on both sides of an electrode plate 2, and has the same diameter as the piezoelectric element 3 on both sides thereof. A disk-shaped metal plate 4 and a metal plate 5 are arranged and integrally connected by a bolt 6 at the center.

図2は、ボルト締めランジュバン型振動子の振動特性を示すグラフである。横軸は、図1で示したボルト締めランジュバン型振動子1の中心を0、長手方向の長さを2Lとしたときに、右端面までの距離を+L、左端面までの距離を−Lとし、ボルト締めランジュバン型振動子1の長手方向に対する中心からの距離を示している。縦軸は、ボルト締めランジュバン型振動子1を共振周波数で駆動したときに長手方向に生じる振幅を示し、図1で示したボルト締めランジュバン型振動子1の中心から右方向への振幅を+(プラス)、左方向への振幅を−(マイナス)として示している。   FIG. 2 is a graph showing the vibration characteristics of a bolted Langevin type vibrator. The horizontal axis represents the distance to the right end face as + L and the distance to the left end face as -L when the center of the bolted Langevin type vibrator 1 shown in FIG. 1 is 0 and the length in the longitudinal direction is 2L. The distance from the center with respect to the longitudinal direction of the bolted Langevin type vibrator 1 is shown. The vertical axis indicates the amplitude generated in the longitudinal direction when the bolted Langevin type vibrator 1 is driven at the resonance frequency, and the amplitude in the right direction from the center of the bolted Langevin type vibrator 1 shown in FIG. Plus), the amplitude in the left direction is shown as-(minus).

図2に示したαは、ある電圧で駆動した時の最大振幅値を示す。ここで、図1に示すボルト締めランジュバン型振動子1の右端面の振幅のみに着目すると、振幅は電圧に比例し、共振周波数で時間と共に変わる電圧値と振幅の変化は同期するので、図2に示すグラフの横軸を時間Tに置き換え、+Lを+Tに、−Lを−Tとしたグラフとまったく同じ軌跡となる。このとき、時間2Tは共振周波数の半波長であり、ボルト締めランジュバン型振動子の全長2Lは、共振周波数の半波長となっていることが解る。   Α shown in FIG. 2 indicates a maximum amplitude value when driven by a certain voltage. Here, when attention is paid only to the amplitude of the right end face of the bolted Langevin type vibrator 1 shown in FIG. 1, the amplitude is proportional to the voltage, and the voltage value changing with time at the resonance frequency is synchronized with the change in amplitude. The horizontal axis of the graph is replaced with time T, and the trajectory is exactly the same as the graph in which + L is + T and -L is -T. At this time, time 2T is a half wavelength of the resonance frequency, and it can be seen that the total length 2L of the bolted Langevin type vibrator is a half wavelength of the resonance frequency.

工業用の超音波洗浄機に使用されるボルト締めランジュバン型振動子は、キャビテーションの発生が容易な共振低周波数が20kHz〜50kHzのものが一般的に使用されているが、近年、より洗浄度を向上させるため、共振周波数が50kHz〜200kHzの高周波のボルト締めランジュバン型振動子も使用されるようになった。   Bolt-clamped Langevin type vibrators used in industrial ultrasonic cleaners are generally used with a resonance low frequency of 20 kHz to 50 kHz that is easy to generate cavitation. In order to improve, a high-frequency bolted Langevin type vibrator having a resonance frequency of 50 kHz to 200 kHz has also been used.

この高周波のボルト締めランジュバン型振動子は、通常、全長を短くすることで、高周波化を図る手法が用いられる。例えば、50kHzで40mmの全長があるボルト締めランジュバン型振動子において、これを100kHz前後の共振周波数とする場合には、その全長を約20mmと短くする。   This high-frequency bolt-tightened Langevin type vibrator usually uses a technique for increasing the frequency by shortening the entire length. For example, in a bolt-clamped Langevin type vibrator having a total length of 40 mm at 50 kHz, when the resonance frequency is about 100 kHz, the total length is shortened to about 20 mm.

しかし、この場合、圧電素子と金属板をボルトで一体結合させることが難しくなるだけでなく、圧電素子の厚さも薄くする必要が出てくる。そのため、電気的な入力も制限され、高出力が得られないという問題点があった。この問題の解決策としては、全長を半波長ではなく、1.5波長となるような設計をして、全長を半波長で設計したときの3倍の長さとすることで解決する提案がなされている。このようなボルト締めランジュバン型振動子は特許文献1に開示されている。   However, in this case, not only is it difficult to integrally couple the piezoelectric element and the metal plate with a bolt, but it is also necessary to reduce the thickness of the piezoelectric element. For this reason, there is a problem in that electrical input is also limited and high output cannot be obtained. As a solution to this problem, a proposal has been made to solve the problem by designing the total length to be 1.5 wavelengths, not half-wave, and to make the total length three times longer than the half-wave design. ing. Such a bolt-clamped Langevin type vibrator is disclosed in Patent Document 1.

特開平6−254493号公報JP-A-6-254493

図3は、超音波洗浄機における、キャビテーションを発生させるための音波強度と周波数の関係を示すグラフである。横軸に周波数(Hz)、縦軸にキャビテーション発生に必要な最低音波強度(W/cm2)を示している。また、グラフ中には、媒体となる水が、脱気水の場合と飽和水の場合の二水準について示してある。グラフからも解るように、周波数が高くなるほど、キャビテーション発生に必要な最低音波強度は大きくなり、通常使用される20kHz〜50kHz時に比べ、50kHz〜200kHz時では数倍の最低音波強度が必要となることが解る。 FIG. 3 is a graph showing the relationship between the sound intensity and the frequency for generating cavitation in the ultrasonic cleaner. The horizontal axis indicates the frequency (Hz), and the vertical axis indicates the minimum sound intensity (W / cm 2 ) necessary for cavitation generation. Further, the graph shows two levels of water as the medium, deaerated water and saturated water. As can be seen from the graph, the higher the frequency, the higher the minimum sound wave intensity required for cavitation generation, and a minimum sound wave intensity of several times is required at 50 kHz to 200 kHz compared to the normally used 20 kHz to 50 kHz. I understand.

しかしながら、従来の50kHz〜200kHzの共振周波数を持つボルト締めランジュバン型振動子においては、全長を1.5波長としても、同じ電気的入力で得られる振幅は20kHz〜50kHzの共振周波数を持つボルト締めランジュバン型振動子とあまり変わらず、前述した様に高周波でキャビテーションを得るための最低音波強度が得られないという問題点がある。   However, in a conventional bolted Langevin type vibrator having a resonance frequency of 50 kHz to 200 kHz, even if the total length is 1.5 wavelengths, the amplitude obtained with the same electrical input is a bolted Langevin resonator having a resonance frequency of 20 kHz to 50 kHz. There is a problem that the minimum sound intensity for obtaining cavitation at a high frequency cannot be obtained as described above.

従って、本発明は、上記従来技術の問題点を解決することを課題とする。具体的には、高周波においてもキャビテーションが発生するに足る大振幅が得られるボルト締めランジュバン型振動子を提供することを課題とする。   Therefore, an object of the present invention is to solve the above-mentioned problems of the prior art. Specifically, an object of the present invention is to provide a bolted Langevin type vibrator capable of obtaining a large amplitude sufficient to cause cavitation even at high frequencies.

本発明は、前記課題を解決するために、以下の手段を採用した。即ち、本発明は、第一及び第二の金属板の厚さと圧電素子の厚さとで成す全厚さを1波長とし、第二の金属板で振幅を拡大することにより、第三の金属板より高周波においても大振幅が得られることをその要旨とする。   The present invention employs the following means in order to solve the above problems. That is, according to the present invention, the total thickness formed by the thicknesses of the first and second metal plates and the thickness of the piezoelectric element is set to one wavelength, and the amplitude is increased by the second metal plate. The gist is that a large amplitude can be obtained even at higher frequencies.

本発明によれば、第一の金属板と第二の金属板と第三の金属板と圧電素子とボルトとからなるボルト締めランジュバン型振動子であって、該第一の金属板は上面部と底面部と側面部とからなり、上面部或いは底面部の中央部に雌螺子を有し、該第二の金属板は上面部と底面部と側面部とからなり、上面部或いは底面部の中央部に雌螺子を有し、且つ該第二の金属板の底面部の面積は上面部より大きく、該圧電素子は、上面部と底面部と側面部とからなる板状で、1以上とし、前記第一の金属板の上面部と前記第二の金属板の底面部に当接して挟持され、且つ上面部から底面部へ貫通する孔を中央部に有し、該ボルトは、該圧電素子の該孔を通り、前記第一の金属板の雌螺子と前記第二の金属板の雌螺子に螺合し、前記第一の金属板と前記第二の金属板とを締結し、第三の金属板は、上面部と底面部と側面部とからなり、の該第三の金属板の底面部が前記第二の金属板の上面部に当接し、前記第一の金属板の厚さと前記第二の金属板の厚さと前記全圧電素子の厚さとの和が成す寸法を1波長とし、且つ、第三の金属板の厚さ寸法を半波長の正整数倍としたことを特徴とするボルト締めランジュバン型振動子が得られる。   According to the present invention, there is provided a bolted Langevin type vibrator comprising a first metal plate, a second metal plate, a third metal plate, a piezoelectric element and a bolt, the first metal plate being an upper surface portion. And a bottom surface portion and a side surface portion, and has a female screw at the top surface portion or the central portion of the bottom surface portion, and the second metal plate is composed of the top surface portion, the bottom surface portion, and the side surface portion. There is a female screw in the center, and the area of the bottom surface of the second metal plate is larger than that of the top surface, and the piezoelectric element is a plate composed of a top surface, a bottom surface, and a side surface, and is 1 or more. The first metal plate is in contact with and sandwiched between the top surface of the first metal plate and the bottom surface of the second metal plate, and has a hole penetrating from the top surface to the bottom surface. The first metal plate and the second metal plate are threaded into the female screw of the first metal plate and the female screw of the second metal plate through the hole of the element. Fastening the metal plate, the third metal plate is composed of an upper surface portion, a bottom surface portion and a side surface portion, the bottom surface portion of the third metal plate abuts on the upper surface portion of the second metal plate, The dimension formed by the sum of the thickness of the first metal plate, the thickness of the second metal plate, and the thickness of all the piezoelectric elements is one wavelength, and the thickness dimension of the third metal plate is a half wavelength. A bolted Langevin type vibrator characterized by being a positive integer multiple is obtained.

第一及び第二の金属板の厚さと全圧電素子の厚さとが成す全厚さが1波長と成るように設定し、また、前記第二の金属板の底面部の面積を上面部の面積より大きい板状とし、第一の金属ブロックと前記第二の金属ブロックの底面部が当接するように前記圧電素子を挟み、中央部を前記ボルトで締結することでボルト締めランジュバン型振動子を構成することにより、半波長に設定された前記第三の金属ブロックには拡大された振幅が伝達し、全体として1.5波長となる高周波での高振幅が得られる。また第三の金属ブロックは半波長の正整数倍としても良い。   The total thickness formed by the thicknesses of the first and second metal plates and the thickness of all the piezoelectric elements is set to one wavelength, and the area of the bottom surface of the second metal plate is the area of the top surface. A larger plate shape, sandwiching the piezoelectric element so that the bottom surface of the first metal block and the second metal block are in contact, and fastening the central part with the bolt constitutes a bolted Langevin type vibrator By doing so, an enlarged amplitude is transmitted to the third metal block set to a half wavelength, and a high amplitude at a high frequency of 1.5 wavelengths as a whole is obtained. The third metal block may be a positive integer multiple of a half wavelength.

前記第一の金属板及び前記圧電素子の外形は同じ直径を有する円板とするのが望ましいが、前記第一の金属板は前記圧電素子の外周が内接する多角形またはそれよりも大きな面を有する矩形板でもよい。また、前記第二の金属板の底面部は前記圧電素子外形と同じ直径の円形を成し、上面部に向かって縮径する構造、或いは円錐台の形状が好ましいが、前記圧電素子外径が内接する多角形又はそれよりも大きい面積の底面を有する多角錐台の形状としても良い。さらに、前記第二の金属板において、上面部と底面部を結ぶ稜線は曲線とすることが好ましいが直線または直線と曲線を組み合わせた稜線を成しても良い。   The outer shapes of the first metal plate and the piezoelectric element are preferably discs having the same diameter. However, the first metal plate has a polygon or a larger surface on which the outer periphery of the piezoelectric element is inscribed. It may be a rectangular plate. Further, the bottom surface of the second metal plate has a circular shape with the same diameter as the outer shape of the piezoelectric element, and preferably has a structure in which the diameter decreases toward the upper surface or a truncated cone shape. It is good also as the shape of the polygon frustum which has the bottom face of the polygon which inscribed or a larger area than it. Furthermore, in the second metal plate, the ridge line connecting the upper surface portion and the bottom surface portion is preferably a curve, but may be a straight line or a ridge line that is a combination of a straight line and a curve.

また、本発明によれば、前記第二の金属板と前記第三の金属板とが一体成型されてなることを特徴とするボルト締めランジュバン型振動子が得られる。前記第二の金属板と前記第三の金属板は、ボルトによる締結や接着、溶接等により機械的に結合しても良いが、単一の材料からの切削加工や鋳造等により一体成型しても良い。   According to the present invention, there is obtained a bolted Langevin type vibrator characterized in that the second metal plate and the third metal plate are integrally molded. The second metal plate and the third metal plate may be mechanically coupled by fastening, bonding, welding, or the like using bolts, but may be integrally formed by cutting or casting from a single material. Also good.

また本発明によれば、前記第三の金属板の側面部に周回する凹部を有することを特徴とするボルト締めランジュバン型振動子が得られる。   In addition, according to the present invention, there is obtained a bolted Langevin type vibrator having a concave portion that circulates in a side surface portion of the third metal plate.

本発明では、前記第三の金属板は前気記圧電素子と同じ外径を有する円板とすることが望ましい。さらに、前記第二の金属板と接合する面に対向する側の面は振動放射面となり、前記第三の金属板の側面部に周回する凹部を設けることにより、放射面全体の振動分布を均一にすることが可能となる。   In the present invention, it is desirable that the third metal plate is a disk having the same outer diameter as that of the piezoelectric element. Furthermore, the surface on the side facing the surface to be joined to the second metal plate is a vibration radiation surface, and by providing a concave portion around the side surface portion of the third metal plate, the vibration distribution of the entire radiation surface is made uniform. It becomes possible to.

さらに本発明によれば、前記圧電素子が2以上であって、該圧電素子に挟持される第四の金属板を有することを特徴とするボルト締めランジュバン型振動子が得られる。駆動電圧を低くするために圧電素子の厚さを薄くした場合に、圧電素子の厚さを薄くした分を圧電素子の数を増やして耐パワー強度を補完する必要がある。この際、圧電素子間に第四の金属板を入れることで周波数の調整や振動モードの制御を行うことができる。   Furthermore, according to the present invention, there can be obtained a bolted Langevin type vibrator characterized in that there are two or more piezoelectric elements and a fourth metal plate is sandwiched between the piezoelectric elements. When the thickness of the piezoelectric element is reduced in order to reduce the drive voltage, it is necessary to increase the number of piezoelectric elements corresponding to the reduced thickness of the piezoelectric element to supplement the power resistance strength. At this time, it is possible to adjust the frequency and control the vibration mode by inserting a fourth metal plate between the piezoelectric elements.

前記の如く、本発明によれば、高周波においてもキャビテーションが発生するに足る大振幅が得られるボルト締めランジュバン型振動子の提供が可能となる。   As described above, according to the present invention, it is possible to provide a bolted Langevin type vibrator capable of obtaining a large amplitude sufficient to cause cavitation even at high frequencies.

以下、本発明の実施の形態について図面を参照しながら詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

図4は、実施例1を示す側面図である。図4において斜線部は断面を示している。本実施例1では、第一の金属板7と第二の金属板8と第三の金属板9と二枚の圧電素子3とボルト6と電極板2を用いて、図4に示す様なボルト締めランジュバン型振動子とした。   FIG. 4 is a side view showing the first embodiment. In FIG. 4, the hatched portion indicates a cross section. In the first embodiment, the first metal plate 7, the second metal plate 8, the third metal plate 9, the two piezoelectric elements 3, the bolt 6, and the electrode plate 2 are used as shown in FIG. A bolted Langevin type vibrator was used.

第一の金属板7と第二の金属板8と第三の金属板9はアルミ合金を使用した。第一の金属板7は直径が35mmで厚さが10mmの円板で、円板中心部を貫通する様にM10(ISO規格)の雌螺子を付した。第二の金属板8は直径が35mmで厚さが5mmの円板部分と直径が35mmから23mmに次第に小さくなる厚さが15mmのホーン状の部分とからなり、中心部には直径が35mmの面から深さ15mmの雌螺子を付した。第三の金属板9は、直径が35mmで、厚さが23mmの円板とし、第三の金属板9と第二の金属板8とは単一のアルミ合金材を切削加工した一体成型体とした。   The first metal plate 7, the second metal plate 8, and the third metal plate 9 were made of an aluminum alloy. The first metal plate 7 is a disc having a diameter of 35 mm and a thickness of 10 mm, and an M10 (ISO standard) female screw is attached so as to penetrate the center of the disc. The second metal plate 8 is composed of a disc portion having a diameter of 35 mm and a thickness of 5 mm, and a horn-shaped portion having a thickness of 15 mm that gradually decreases from 35 mm to 23 mm. The central portion has a diameter of 35 mm. A female screw having a depth of 15 mm from the surface was attached. The third metal plate 9 is a disc having a diameter of 35 mm and a thickness of 23 mm, and the third metal plate 9 and the second metal plate 8 are integrally molded bodies obtained by cutting a single aluminum alloy material. It was.

圧電素子3は、ジルコン酸チタン酸鉛系の圧電セラミックスを使用した。形状を外径が35mm、内径が15mmで厚さが5mmの環形状としたものを2枚使用し、この2枚の圧電素子3を同じ極性面を向かい合わせ、間に電極板2を挟むように配置した。さらに、前記圧電素子3の電極板2と接していない2面の内、一方の面は第一の金属板7と当接する様に配置し、他方の面は第二の金属板8の直径が35mmとなる面と当接する様に配置した。そして、前記雌螺子にボルト6を螺合し、第一の金属板7と第二の金属板8とを締結した。第二の金属板8には第三の金属板9が一体となっており、この状態でボルト締めランジュバン型振動子とした。   As the piezoelectric element 3, lead zirconate titanate-based piezoelectric ceramics was used. Two pieces with an outer diameter of 35 mm, an inner diameter of 15 mm, and a thickness of 5 mm are used, and the two piezoelectric elements 3 face each other with the same polar face, and the electrode plate 2 is sandwiched between them. Arranged. Further, one of the two surfaces of the piezoelectric element 3 not in contact with the electrode plate 2 is disposed so as to contact the first metal plate 7, and the other surface has a diameter of the second metal plate 8. It arrange | positioned so that it may contact | abut on the surface used as 35 mm. Then, a bolt 6 was screwed into the female screw, and the first metal plate 7 and the second metal plate 8 were fastened. A third metal plate 9 is integrated with the second metal plate 8, and in this state, a bolted Langevin type vibrator is formed.

ここで、第一の金属板7と2枚の圧電素子3と第二の金属板8とが成す厚さ(図4に示すAからDまでの寸法)は共振周波数における1波長の長さとし、第三の金属板9の厚さ(図4に示すDからEまでの寸法)は共振周波数における半波長の長さとなるように、それぞれに使用する材料の持つ音速から厚さを設計、調整すれば良く、上記寸法に限定されるものではない。   Here, the thickness (the dimension from A to D shown in FIG. 4) formed by the first metal plate 7, the two piezoelectric elements 3, and the second metal plate 8 is a length of one wavelength at the resonance frequency. The thickness of the third metal plate 9 (dimensions from D to E shown in FIG. 4) is half the wavelength at the resonance frequency, and the thickness is designed and adjusted from the sound speed of the material used for each. The dimensions are not limited to the above.

図5は、実施例1の振動特性を示すグラフである。このグラフは、縦軸は振幅を示し、横軸は図4で示した長手方向に対する位置を示し、本実施例1によるボルト締めランジュバン型振動子の長手方向に対する各位置での振幅を示している。また、グラフには、図4に示した振動輻射面11が長手方向に対して、左方向の振幅が最大となった時の振幅の値を縦軸の−(マイナス)で表示し、その時の各位置での振幅を示している。従って、縦軸の+(プラス)の表示は長手方向に対して、右方向の振幅であることを示す。   FIG. 5 is a graph showing the vibration characteristics of Example 1. In this graph, the vertical axis indicates amplitude, the horizontal axis indicates the position in the longitudinal direction shown in FIG. 4, and the amplitude at each position in the longitudinal direction of the bolted Langevin type vibrator according to the first embodiment. . Further, in the graph, the value of the amplitude when the vibration radiation surface 11 shown in FIG. 4 has the maximum amplitude in the left direction with respect to the longitudinal direction is indicated by − (minus) on the vertical axis. The amplitude at each position is shown. Accordingly, the display of + (plus) on the vertical axis indicates that the amplitude is in the right direction with respect to the longitudinal direction.

図5に示した実施例1の振動特性からは、グラフのCからDの領域、つまり第二の金属板8の部分で振幅の絶対値がβ1からγ1に増幅されていることが解る。そして、そのγ1の値がほぼそのままEの点である図4に示す振動輻射面11での振幅となって現れている。この振幅の増幅は第二の金属板8に、対向する面積が違う大小二つの面を持たせたことにより実現したものである。また、グラフのAからDの領域で1波長、DからEの領域で半波長となっていることが解る。   From the vibration characteristics of Example 1 shown in FIG. 5, it can be seen that the absolute value of the amplitude is amplified from β1 to γ1 in the region C to D of the graph, that is, the second metal plate 8 portion. The value of γ1 appears as the amplitude at the vibration radiation surface 11 shown in FIG. The amplification of the amplitude is realized by providing the second metal plate 8 with two large and small surfaces having different areas facing each other. Further, it can be seen that the wavelength is A wavelength in the region A to D, and the half wavelength is in the region D to E.

実施例1においては、周波数100kHzの100Vppの電圧を印加した際に、γ1=1.5μmの振幅が得られた。これは、従来得られていた振幅の1.5〜2倍の振幅に相当する値である。従って、超音波洗浄に際し、高周波においてもキャビテーションが発生するに足る大振幅が得られた。   In Example 1, when a voltage of 100 Vpp with a frequency of 100 kHz was applied, an amplitude of γ1 = 1.5 μm was obtained. This is a value corresponding to 1.5 to 2 times the amplitude obtained conventionally. Therefore, a large amplitude sufficient to cause cavitation even at high frequencies was obtained during ultrasonic cleaning.

図6は、実施例2を示す側面図である。基本的な構成は実施例1と同様であるが、実施例2においては、圧電素子3を厚さ4mmとして4枚使用することで、実施例1よりも圧電素子3の総体積を増やし、入力電力が増やせる構造とした。そのために、2枚の圧電素子3を同じ極性面を向かい合わせ、間に電極板2を挟むように配置したものを2組作り、外径が35mm、内径が15mmで厚さが3mmの環形状を成すアルミ合金製の第四の金属板10を挟むように、それぞれを配置し、実施1と同様に圧電素子3の電極板2と接していない2面の内、一方の面は第一の金属板7と当接する様に配置し、他方の面は第二の金属板8の直径が35mmとなる面と当接するように配置した。そして、雌螺子にボルト6を螺合し、第一の金属板7と第二の金属板8とを締結した。   FIG. 6 is a side view showing the second embodiment. The basic configuration is the same as that of the first embodiment, but in the second embodiment, by using four piezoelectric elements 3 having a thickness of 4 mm, the total volume of the piezoelectric elements 3 is increased compared to the first embodiment, and the input is performed. It has a structure that can increase electric power. For this purpose, two sets of two piezoelectric elements 3 with the same polar face facing each other and an electrode plate 2 sandwiched between them are made into an annular shape having an outer diameter of 35 mm, an inner diameter of 15 mm, and a thickness of 3 mm. Are arranged so as to sandwich the fourth metal plate 10 made of an aluminum alloy, and one of the two surfaces not in contact with the electrode plate 2 of the piezoelectric element 3 is the first one as in the first embodiment. It arrange | positioned so that it might contact | abut with the metal plate 7, and it arrange | positioned so that the other surface might contact | abut the surface where the diameter of the 2nd metal plate 8 is set to 35 mm. Then, the bolt 6 was screwed into the female screw, and the first metal plate 7 and the second metal plate 8 were fastened.

ここで、圧電素子3の厚さの合計が増した分と第四の金属板10が増えた分を相殺するように、第一の金属板7と第二の金属板8の厚さを薄くした。また、第三の金属板の側面部の中央部の全周に幅5mmで深さ3.5mmの凹部12を設けた。   Here, the thicknesses of the first metal plate 7 and the second metal plate 8 are reduced so as to offset the increase in the total thickness of the piezoelectric elements 3 and the increase in the fourth metal plate 10. did. Moreover, the recessed part 12 of width 5mm and depth 3.5mm was provided in the perimeter of the center part of the side part of a 3rd metal plate.

図7は、実施例2の振動特性を示すグラフである。このグラフは、図5と同様に縦軸は振幅を示し、横軸は図6で示した長手方向に対する位置を示し、実施例2によるボルト締めランジュバン型振動子の長手方向に対する各位置での振幅を示している。また、グラフには、図6に示した振動輻射面11が長手方向に対して、左方向の振幅が最大となった時のその振幅の値を縦軸の−(マイナス)で表示し、その時の各位置での振幅を示している。従って、縦軸の+(プラス)の表示は長手方向に対して、右方向の振幅であることを示す。   FIG. 7 is a graph showing the vibration characteristics of Example 2. In this graph, the vertical axis indicates the amplitude as in FIG. 5, the horizontal axis indicates the position in the longitudinal direction shown in FIG. 6, and the amplitude at each position in the longitudinal direction of the bolted Langevin type vibrator according to the second embodiment. Is shown. Further, in the graph, when the vibration radiation surface 11 shown in FIG. 6 has the maximum amplitude in the left direction with respect to the longitudinal direction, the value of the amplitude is indicated by − (minus) on the vertical axis, and at that time The amplitude at each position is shown. Accordingly, the display of + (plus) on the vertical axis indicates that the amplitude is in the right direction with respect to the longitudinal direction.

図7に示した実施例2の振動特性からは、実施例1と同様に、グラフのCからDの領域、つまり第二の金属板8の部分で振幅の絶対値がβ2からγ2に増幅されていることが解る。そして、そのγ2の値がほぼそのままEの点である図6に示す振動輻射面11での振幅となって現れている。この振幅の増幅も実施例1と同様に、第二の金属板8に、対向する面積が違う大小二つの面を持たせたことにより実現したものである。   From the vibration characteristics of Example 2 shown in FIG. 7, as in Example 1, the absolute value of the amplitude is amplified from β2 to γ2 in the region C to D of the graph, that is, the second metal plate 8 part. I understand that The value of γ2 appears as the amplitude on the vibration radiation surface 11 shown in FIG. Similar to the first embodiment, this amplitude amplification is also realized by providing the second metal plate 8 with two large and small surfaces with different facing areas.

実施例1においては、周波数100kHzの100Vppの電圧を印加した際に、γ2=1.3μmの振幅が得られた。これは、実施例1に比べ、やや小さな値となっている。これは、圧電素子3及び第四の金属板が増えたために振動の伝達の効率が低下し、ロスが増えた事によるものである。   In Example 1, when a voltage of 100 Vpp with a frequency of 100 kHz was applied, an amplitude of γ2 = 1.3 μm was obtained. This is a slightly smaller value than that of the first embodiment. This is due to an increase in loss due to a decrease in vibration transmission efficiency due to an increase in the piezoelectric element 3 and the fourth metal plate.

図8は、振動輻射面の振動分布を示す図である。図6に示したFからGまでの振動輻射面11における振幅の分布を示している。点線は実施例1における振動分布19を示し、実線は実施例2における振動分布20を示している。この図からも解るように、実施例2による振動分布20は、実施例1における振動分布19に比べ、広い領域で振幅が均等となっている。これは、前記第三の金属板に設けた凹溝の効果により、振動の伝達が均一化された結果によるものである。   FIG. 8 is a diagram showing the vibration distribution on the vibration radiation surface. The amplitude distribution in the vibration radiation surface 11 from F to G shown in FIG. 6 is shown. The dotted line indicates the vibration distribution 19 in the first embodiment, and the solid line indicates the vibration distribution 20 in the second embodiment. As can be seen from this figure, the vibration distribution 20 according to the second embodiment has a uniform amplitude over a wide region as compared with the vibration distribution 19 according to the first embodiment. This is because the transmission of vibration is made uniform by the effect of the concave groove provided in the third metal plate.

従って、実施例2においても、実施例1に比べ振幅は小さくなったものの振動輻射面11における振動の分布は均等となり、やはり、超音波洗浄に際し、高周波においてもキャビテーションが発生するに足る大振幅が得られた。   Therefore, in the second embodiment, although the amplitude is smaller than that in the first embodiment, the vibration distribution on the vibration radiation surface 11 is uniform, and a large amplitude sufficient to cause cavitation at high frequency is also obtained during ultrasonic cleaning. Obtained.

尚、実施例1及び実施例2においては、第一の金属板と第二の金属板と第三の金属板とは円板としたが、角板を使用しても同様の効果が得られる。また使用する材料もアルミ合金に限らずステンレスやチタン等その他の金属でも良い。   In Example 1 and Example 2, the first metal plate, the second metal plate, and the third metal plate are discs, but the same effect can be obtained even if square plates are used. . The material to be used is not limited to an aluminum alloy, but may be other metals such as stainless steel and titanium.

本発明によるボルト締めランジュバン型振動子は、高周波用の超音波洗浄機のみならず、大出力、大振幅を必要とする超音波加工機や超音波を利用する医療機等にも利用できる。   The bolted Langevin type vibrator according to the present invention can be used not only for an ultrasonic cleaning machine for high frequency but also for an ultrasonic processing machine that requires high output and large amplitude, a medical machine using ultrasonic waves, and the like.

ボルト締めランジュバン型振動子の一例を示す側面図。The side view which shows an example of a bolt fastening Langevin type vibrator. ボルト締めランジュバン型振動子の振動特性を示すグラフ。The graph which shows the vibration characteristic of a bolted Langevin type vibrator. 超音波洗浄機における、キャビテーションを発生させるための音波強度と周波数の関係を示すグラフ。The graph which shows the relationship between the sound wave intensity and frequency for generating cavitation in an ultrasonic cleaner. 実施例1を示す側面図。FIG. 3 is a side view showing Example 1; 実施例1の振動特性を示すグラフ。3 is a graph showing vibration characteristics of Example 1. 実施例2を示す側面図。FIG. 6 is a side view showing Example 2. 実施例2の振動特性を示すグラフ。6 is a graph showing the vibration characteristics of Example 2. 振動輻射面の振動分布を示す図。The figure which shows the vibration distribution of a vibration radiation surface.

符号の説明Explanation of symbols

1 ボルト締めランジュバン型振動子
2 電極板
3 圧電素子
4,5 金属板
6 ボルト
7 第一の金属板
8 第二の金属板
9 第三の金属板
10 第四の金属板
11 振動輻射面
12 凹部
19,20 振動分布
DESCRIPTION OF SYMBOLS 1 Bolt tightening Langevin type vibrator 2 Electrode plate 3 Piezoelectric element 4, 5 Metal plate 6 Bolt 7 First metal plate 8 Second metal plate 9 Third metal plate 10 Fourth metal plate 11 Vibration radiation surface 12 Concavity 19, 20 Vibration distribution

Claims (4)

第一の金属板と第二の金属板と第三の金属板と圧電素子とボルトとからなるボルト締めランジュバン型振動子であって、該第一の金属板は上面部と底面部と側面部とからなり、上面部或いは底面部の中央部に雌螺子を有し、該第二の金属板は上面部と底面部と側面部とからなり、上面部或いは底面部の中央部に雌螺子を有し、且つ該第二の金属板の底面部の面積は上面部より大きく、該圧電素子は、上面部と底面部と側面部とからなる板状で、1以上とし、前記第一の金属板の上面部と前記第二の金属板の底面部に当接して挟持され、且つ上面部から底面部へ貫通する孔を中央部に有し、該ボルトは、該圧電素子の該孔を通り、前記第一の金属板の雌螺子と前記第二の金属板の雌螺子に螺合し、前記第一の金属板と前記第二の金属板とを締結し、第三の金属板は、上面部と底面部と側面部とからなり、の該第三の金属板の底面部が前記第二の金属板の上面部に当接し、前記第一の金属板の厚さと前記第二の金属板の厚さと前記全圧電素子の厚さとの和が成す寸法を1波長とし、且つ、第三の金属板の厚さ寸法を半波長の正整数倍としたことを特徴とするボルト締めランジュバン型振動子。   A bolt-clamped Langevin type vibrator composed of a first metal plate, a second metal plate, a third metal plate, a piezoelectric element and a bolt, wherein the first metal plate has an upper surface portion, a bottom surface portion, and a side surface portion. And the second metal plate is composed of an upper surface portion, a bottom surface portion, and a side surface portion, and the upper surface portion or the central portion of the bottom surface portion is provided with a female screw. And the area of the bottom surface portion of the second metal plate is larger than that of the top surface portion, and the piezoelectric element is a plate shape composed of a top surface portion, a bottom surface portion, and a side surface portion, and is 1 or more. There is a hole in the central portion that is in contact with and sandwiched between the upper surface portion of the plate and the bottom surface portion of the second metal plate, and penetrates from the upper surface portion to the bottom surface portion, and the bolt passes through the hole of the piezoelectric element. , Screwed into the female screw of the first metal plate and the female screw of the second metal plate, and fastened with the first metal plate and the second metal plate The third metal plate includes an upper surface portion, a bottom surface portion, and a side surface portion, and the bottom surface portion of the third metal plate abuts on the upper surface portion of the second metal plate, and the first metal plate And the thickness of the second metal plate plus the thickness of all the piezoelectric elements is one wavelength, and the thickness of the third metal plate is a positive integer multiple of a half wavelength. Bolt-tightened Langevin type vibrator characterized by 前記第二の金属板と前記第三の金属板とが一体成型されてなることを特徴とする請求項1に記載のボルト締めランジュバン型振動子。   2. The bolted Langevin type vibrator according to claim 1, wherein the second metal plate and the third metal plate are integrally molded. 3. 前記第三の金属板の側面部に周回する凹部を有することを特徴とする請求項1及び請求項2のいずれかに記載のボルト締めランジュバン型振動子。   3. The bolted Langevin type vibrator according to claim 1, further comprising a concave portion that circulates in a side surface portion of the third metal plate. 前記圧電素子が2以上であって、該圧電素子に挟持される第四の金属板を有することを特徴とする請求項1乃至請求項3のいずれか1項に記載のボルト締めランジュバン型振動子。   4. The bolt-clamped Langevin type vibrator according to claim 1, wherein the piezoelectric element has two or more and has a fourth metal plate sandwiched between the piezoelectric elements. 5. .
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009071439A (en) * 2007-09-11 2009-04-02 Ngk Spark Plug Co Ltd Ultrasonic transducer and method of producing the same
CN102909169A (en) * 2011-08-03 2013-02-06 财团法人工业技术研究院 Through hole sonotrode and ultrasonic device with same
KR20150124005A (en) * 2014-04-25 2015-11-05 한국기계연구원 BLT vibrator for ultrasonic milling machine
WO2020154227A1 (en) * 2019-01-23 2020-07-30 California Institute Of Technology Multi-stack piezo actuator
WO2023162861A1 (en) * 2022-02-22 2023-08-31 学校法人日本大学 Ultrasonic projection device

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6276399A (en) * 1985-09-28 1987-04-08 Sadayuki Ueha High-frequency langevin type vibrator
JPS62196000A (en) * 1986-02-21 1987-08-29 Sadayuki Ueha Langevin type transducer for high frequency
JPS62258598A (en) * 1986-05-02 1987-11-11 Nec Corp Underwater ultrasonic transducer
JPH02203972A (en) * 1989-01-31 1990-08-13 Taga Electric Co Ltd Ultrasonic wave vibrator
JPH03239401A (en) * 1990-02-15 1991-10-25 Nippon Electric Ind Co Ltd Ultrasonic exciting device
JPH0461675A (en) * 1990-06-27 1992-02-27 Nec Corp Suspension mechanism and loading/unloading mechanism for magnetic head
JPH04338268A (en) * 1991-05-13 1992-11-25 Taga Electric Co Ltd Ultrasonic vibrator
JPH06254493A (en) * 1993-03-03 1994-09-13 Ngk Spark Plug Co Ltd Langevin type ultrasonic vibrator
JP2001239405A (en) * 2000-02-24 2001-09-04 Fuji Kogyo Kk Torsional oscillation device for ultrasonic machining

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6276399A (en) * 1985-09-28 1987-04-08 Sadayuki Ueha High-frequency langevin type vibrator
JPS62196000A (en) * 1986-02-21 1987-08-29 Sadayuki Ueha Langevin type transducer for high frequency
JPS62258598A (en) * 1986-05-02 1987-11-11 Nec Corp Underwater ultrasonic transducer
JPH02203972A (en) * 1989-01-31 1990-08-13 Taga Electric Co Ltd Ultrasonic wave vibrator
JPH03239401A (en) * 1990-02-15 1991-10-25 Nippon Electric Ind Co Ltd Ultrasonic exciting device
JPH0461675A (en) * 1990-06-27 1992-02-27 Nec Corp Suspension mechanism and loading/unloading mechanism for magnetic head
JPH04338268A (en) * 1991-05-13 1992-11-25 Taga Electric Co Ltd Ultrasonic vibrator
JPH06254493A (en) * 1993-03-03 1994-09-13 Ngk Spark Plug Co Ltd Langevin type ultrasonic vibrator
JP2001239405A (en) * 2000-02-24 2001-09-04 Fuji Kogyo Kk Torsional oscillation device for ultrasonic machining

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009071439A (en) * 2007-09-11 2009-04-02 Ngk Spark Plug Co Ltd Ultrasonic transducer and method of producing the same
CN102909169A (en) * 2011-08-03 2013-02-06 财团法人工业技术研究院 Through hole sonotrode and ultrasonic device with same
KR20150124005A (en) * 2014-04-25 2015-11-05 한국기계연구원 BLT vibrator for ultrasonic milling machine
KR101632206B1 (en) * 2014-04-25 2016-06-24 한국기계연구원 BLT vibrator for ultrasonic milling machine
WO2020154227A1 (en) * 2019-01-23 2020-07-30 California Institute Of Technology Multi-stack piezo actuator
US11557711B2 (en) 2019-01-23 2023-01-17 California Institute Of Technology Multi-stack piezo actuator
WO2023162861A1 (en) * 2022-02-22 2023-08-31 学校法人日本大学 Ultrasonic projection device

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