JP2007108044A - Element for vibrating gyroscope, and vibrating gyroscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an element for a vibrating gyroscope, and a vibrating gyroscope which are easy to evaluate and mount or the like, have good productivity, have small output drift, are not likely to be affected by vibration from an external, can obtain stable outputs, are solid to an impact from the external, can detect biaxial rotational angular velocities, and are inexpensive. <P>SOLUTION: A structure for supporting additional mass parts 4a, 4b, 4c, 4d, which can be vibrated by a penetration groove 19, by a beam part 2, a first arm part 3c, and second arms 3a, 3b is formed on a simple body of flat plates 8, and is functioned as an excitation part and detection part, and supports by its frame body 1. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a vibration gyro element and a vibration gyro used as an angular velocity sensor, and more particularly to a vibration gyro element suitable for a gyroscope used in an automobile navigation system, attitude control device, camera-integrated VTR camera shake prevention device, and the like. And a vibrating gyroscope.

  A vibrating gyroscope is an angular velocity sensor that utilizes a dynamic phenomenon in which when a rotational angular velocity is applied to an object having a velocity, a Coriolis force is generated in the object itself in a direction perpendicular to the velocity direction.

  A vibration gyro can excite mechanical vibration (hereinafter referred to as a drive mode) by applying an electrical signal, and mechanical vibration in a direction orthogonal to the drive vibration (hereinafter referred to as a detection mode). The center of the axis parallel to the intersection of the vibration surface of the drive mode and the vibration surface of the detection mode with the drive mode excited in advance. When the rotational angular velocity is given, a detection mode is generated by the action of the aforementioned Coriolis force, and can be detected as an output voltage. Since the detected output voltage is proportional to the magnitude of the drive mode and the rotational angular velocity, the magnitude of the rotational angular velocity can be obtained from the magnitude of the output voltage when the magnitude of the drive mode is constant.

  In recent years, as with other electronic components, vibration gyroscopes are rapidly being reduced in size and price. In addition, for example, an anti-shake device or the like generally requires detection of a biaxial rotational angular velocity, and therefore, in most cases, two products that can detect a uniaxial rotational angular velocity are used. Under such circumstances, as one approach to reducing the size and cost of a vibrating gyroscope, studies have been made to enable detection of a biaxial rotational angular velocity within one product. In such a configuration, it is possible to share common parts such as a circuit and an external input / output terminal as compared with the case where a single-axis product is produced separately, thereby achieving a reduction in size and price. In addition, studies on mounting on mobile devices such as mobile phones have begun, and more shock resistance and higher stability are required than ever.

  FIG. 1 is a perspective view showing a conventional vibrating gyro element. In FIG. 1, the vibrator 111 is composed of a square plate-like vibrating body 112 made of a constant elastic metal material such as an elimba, and a piezoelectric element 113 disposed at the center of the main surface of the vibrating body 112. A plurality of divided electrodes 116 are arranged on the surface of the piezoelectric element 113. In the vibrating body 112, four vibrating bodies 111a, 111b, 111c, and 111d are formed by four notches 121, 122, 123, and 124 from the center of each side to the center point.

  The vibrator 111 vibrates in an axially symmetric mode with the node axis N1 and the node axis N2 as axes, and is supported and fixed near the intersection of the node axis N1 and the node axis N2. The angular velocity is detected by using a mode that vibrates in the plane of the vibrator 111, and two angular velocities perpendicular to each other in the plane can be detected. Such a vibration gyro is disclosed in Patent Document 1.

Japanese Patent No. 3206551

  However, in the above-described conventional vibratory gyro element, it is necessary to provide a support portion at the center of the vibrator so that the outer periphery of the vibrator can vibrate freely. There is a problem that the characteristics of the vibrator cannot be evaluated unless it is later.

  Also, it is difficult to mount the support at the center, and even when adjusting the frequency or balance of the vibrator, it is necessary to create a special jig and support and fix the vibrator only at the center to suspend it. Therefore, there is a problem that productivity is lowered.

  Furthermore, when supporting and fixing the vicinity of the node in the center, the area that can be supported and fixed is very small, and it is very difficult to support without disturbing the vibration. It is easily affected and the output becomes unstable. In addition, since the support is at one point, there is a problem that when an impact is applied from the outside, the impact force is concentrated on the one point and is easily broken.

  Therefore, an object of the present invention is to solve the above-mentioned problems of the prior art. Specifically, it is easy to evaluate and mount, has good productivity, has low output drift, is not easily affected by external vibrations, can provide stable output, is robust against external impacts, and It is an object of the present invention to provide an inexpensive vibration gyro element and vibration gyro capable of detecting a biaxial rotation angular velocity.

  The present invention employs the following means in order to solve the above problems. That is, the present invention forms a structure that supports a vibrating additional mass part composed of a plate-like body with a beam and an arm, thereby functioning as an excitation part and a detection part and supporting a frame body. The gist.

  According to the present invention, there is provided a vibration gyro element comprising a plate-like body, a frame body, a beam portion having both ends supported by the frame body, and one or more first elements formed intersecting the beam portion. 1 arm portion, one or more second arm portions formed extending from the first arm portion, and one or more additional mass portions supported by the second arm portion. A vibrating gyro element characterized by the above can be obtained.

  According to the present invention, the frame, the beam portion, the first arm portion, the second arm portion, and the additional mass portion are arranged in the same plane. A vibration gyro element is obtained.

  According to the invention, the beam portion, the first arm portion, the second arm portion, and the additional mass portion are disposed inside the frame body. An element is obtained.

  Further, according to the present invention, the beam portion extends at an equal distance from the central portion of the frame body, and the first arm portion passes through the central portion of the beam portion and is orthogonal and from the central portion. The vibrating gyro element is characterized in that four or more of the additional mass portions are arranged so as to be line-symmetric with respect to each of the beam portion and the first arm portion. can get.

  In addition, according to the present invention, an electric signal input drive electrode portion and a vibration detection detection electrode portion are provided on the surface of the beam portion, the first arm portion, or the second arm portion. A first vibration mode in which the adjacent additional mass portions vibrate in mutually opposite phases and vibrate outward in the same plane, the first vibration mode and the vibration direction are orthogonal, and the vibration directions are mutually A vibration gyro element having a second vibration mode and a third vibration mode orthogonal to each other, wherein the frame serves as a node for all of the first to third vibration modes is obtained. .

  An element for a vibrating gyroscope according to the present invention is formed of a plate-like body. For example, a flat plate is provided with a through hole, and a frame, a beam portion, a first arm portion, and a second arm portion are provided on the same plane of the flat plate. And an additional mass part. The frame supports both ends of the beam section, the beam section supports the first arm section at the center of the beam section, and the first arm section supports the second arm section at the end of the first arm section. The second arm unit is configured to support the additional mass unit at the end of the second arm unit, and the additional mass unit is allowed to vibrate.

  The frame is preferably circular or rectangular, but the outer shape is not particularly limited. The beam section is preferably in the form of a straight belt, but is not limited to a straight line as long as it has objectivity, and a plurality of beam parts having objectivity with respect to the center point may be used without passing through the center point. It is desirable that the first arm portion has a straight belt shape and is orthogonal to the beam portion, but the first arm portion is not limited to a straight line as long as it has objectivity.

  Further, the first arm portion may have a plurality of properties with respect to the center point without passing through the center point. It is desirable that the second arm portion has a straight belt shape and is orthogonal to the beam portion. However, the second arm portion is not limited to being linear or orthogonal as long as it has objectivity. The second arm portion is preferably an end portion of the first arm portion. However, the second arm portion is not limited to the end portion as long as it has a property other than the central portion. The additional mass portion is preferably a circular shape or a rectangular shape, but is not limited thereto. The above structure can be formed by making a groove penetrating a single plate.

  In addition, by inputting an electric signal to the electric electrode input drive electrode unit included in the first arm unit, the additional mass unit is vibrated, and the vibration detection detection electrode unit included in the second arm unit By detecting the output signal, the biaxial rotational angular acceleration can be detected.

  In the present invention, it is possible to perform vibration characteristic inspection, frequency adjustment, and balance adjustment without cutting out the vibrators one by one. In addition, inspection and adjustment can be easily performed, the yield of the post-process can be improved, and the productivity becomes very high. Furthermore, the detection axis of the present invention that can detect the rotational angular velocity of the two axes in the plane of the vibration gyro element can be mounted on the substrate as it is when used in a general digital still camera or the like, so that the mounting becomes easy. .

  In addition, because it is possible to detect the rotational angular velocity of two axes with one vibrator, by sharing common parts such as circuits and external terminals, it is smaller and lower than using two single-axis products. Cost can be reduced. Further, in the vibrator manufacturing process, it is easy to inspect the characteristics of the vibratory gyro element even when a plurality of vibrators are simultaneously formed on the wafer and the outer edges are connected to each other.

  Further, the additional mass portion arranged with good symmetry vibrates in a drive mode with good symmetry. Therefore, the vibration in the drive mode is difficult to leak to the outside, and the vibration and displacement in the drive mode existing in the frame body are small.

  Further, according to the present invention, there is obtained a vibrating gyro element in which the plate-like body is a single material made of a piezoelectric body or a piezoelectric single crystal. The vibration gyro element of the present invention has a planar structure, and can be easily formed by increasing the productivity by punching a square piezoelectric plate or piezoelectric single crystal plate. Furthermore, by using a high binding material such as lithium niobate, a vibration gyro element having a high SN ratio can be provided.

  In addition, according to the present invention, there is obtained a vibrating gyro element in which the plate-like body has a laminated structure in which one or more materials are laminated in the thickness direction. The plate-like body may not be a single material, but may have a laminated structure in which the same or different materials are stacked in multiple layers in the thickness direction.

  In addition, according to the present invention, there can be obtained a vibration gyro element characterized in that the frame body is supported in at least two places. The vibration of the driving mode existing in the frame of the vibration gyro element having the structure according to the present invention is slight. Therefore, the frame body of the vibration gyro element can be supported, good support characteristics are obtained, output drift is reduced, mounting is easy, and productivity is increased. In addition, by supporting the entire circumference of the frame of the vibration gyro element, the impact force is dispersed even if an impact is applied, so that a highly reliable vibration gyro element that is resistant to external impact and has high stability is provided. Can be provided.

  Furthermore, according to the present invention, the frame has at least one frame that is coupled at at least two places and surrounds the outer periphery of the frame, and one of the frames is supported at at least two places. An element for a vibrating gyroscope can be obtained.

  By providing and supporting the frame part on the outer side of the flat frame body, it is possible to confine the vibration in the drive mode inside, better support characteristics are obtained, output drift is reduced, and stable It is possible to provide a vibration gyro element capable of obtaining an output.

  In addition, according to the present invention, there is provided a vibration gyro using the vibration gyro element, wherein the first vibration mode driving means and a rotational angular velocity having a longitudinal axis of the beam portion as a rotation axis. And a vibration gyro comprising detection means for detecting a change in the second vibration mode and the third vibration mode due to a Coriolis force generated by a rotational angular velocity with the longitudinal direction of the first arm portion as a rotation axis. can get.

  According to the present invention, using the vibration gyro element, a drive means for inputting an electric signal to the drive electrode section for electric signal input, and a detection means for detecting a signal output from the detection electrode section for vibration detection By providing the device, a device capable of detecting biaxial rotational angular acceleration is obtained.

  As described above, according to the present invention, it is possible to provide a vibration gyro element that is easy to evaluate, mount, and the like and has good productivity, and has a small output drift and is not easily affected by external vibration. It is possible to provide a vibration gyro element and a vibration gyro capable of obtaining an output.

  Furthermore, according to the present invention, it is possible to provide an inexpensive vibration gyro element and vibration gyro that are robust against external impacts and that can detect a biaxial rotational angular velocity.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 2 is a top view showing the vibration gyro element according to the first embodiment of the present invention. By forming a through-groove 19 in a 0.2 mm thick flat plate 8 made of a piezoelectric single crystal of lithium niobate having a square shape with a side of 3 mm, a frame is formed on the same plane of one piezoelectric single crystal plate. The body 1, the beam part 2 in the central part longitudinal direction, the first arm part 3c in the central part lateral direction, two second arm parts 3a, 3b at both ends of the first arm part 3c, and the second A total of four additional mass portions 4a, 4b, 4c, and 4d were formed at both ends of the arm portion.

  In the first embodiment, the left and right sides are symmetrical with respect to the center line 20 of the beam portion 2, and the top and bottom are also symmetrical with respect to the center line 21 of the first arm portion 3c. Further, drive electrode portions 5a and 5b and reference potential electrode portions 7a and 7b are formed on the surface of the first arm portion 3c, and detection electrode portions 6a and 6b are formed on the surface of the second arm portions 3a and 3b. , 6c, 6d and reference potential electrode portions 7c, 7d, 7e, 7f. In each of the electrode portions, electrodes were formed of gold with chromium as a base.

  Here, the operation principle of the vibration gyro according to the first embodiment will be described. 3 to 6 are diagrams illustrating vibration modes of the vibration gyro element according to the first embodiment. FIG. 3 shows a non-operating state, FIG. 4 shows the X mode, FIG. 5 shows the Y mode, and FIG. 6 shows the Z mode. 3 to 6, FIG. 3 (a) is a perspective view, FIG. 3 (b) is a top view, FIG. 3 (c) is a side view, FIG. 4 (a) is a perspective view, and FIG. Is a top view, FIG. 4 (c) is a side view, FIG. 5 (a) is a perspective view, FIG. 5 (b) is a top view, FIG. 5 (c) is a side view, and FIG. 6 (b) is a top view and FIG. 6 (c) is a side view.

  In the X mode shown in FIG. 4, the additional mass portions 4a and 4d and the additional mass portions 4b and 4c vibrate in opposite phases with respect to the X-axis direction. In the Y mode shown in FIG. 5, the additional mass units 4a and 4d and the additional mass units 4b and 4c vibrate in opposite phases with respect to the Y-axis direction. In the Z mode shown in FIG. 6, the additional mass portions 4b and 4c vibrate in opposite phases with respect to the Z-axis direction.

  For example, when a rotational angular velocity is applied around the Z axis while the X mode is excited, the Y mode is generated due to the influence of Coriolis forces acting on the four additional mass portions. Similarly, when a rotational angular velocity is applied around the Y axis while the X mode is excited, the Z mode is generated. At this time, if the vibration speed of the X mode is constant, the magnitudes of the generated Y mode and Z mode amplitudes are proportional to the applied rotation angular velocity, and if these vibrations are extracted electrically, the rotation is performed. Functions as an angular velocity sensor. That is, the X-mode is excited by inputting an electric signal to the drive electrode portions 5a and 5b formed in the first arm portion shown in FIG. 2, and the detection electrode portions 6a and 6b formed in the second arm portion. By detecting the charges generated in 6c and 6d, vibrations in the Y mode and the Z mode can be detected.

  The arrangement of the electrode portions was determined by analyzing the distribution of charges generated on the surfaces of the first arm portion and the second arm portion in each vibration mode. FIG. 7 is a schematic diagram showing the distribution of charges. 7A is a schematic diagram showing the charge distribution in the X mode, FIG. 7B is a schematic diagram showing the charge distribution in the Y mode, and FIG. 7C is the charge distribution in the Z mode. It is a schematic diagram shown. In FIG. 7, “+” and “−” indicate the polarities of the generated charges, and the ellipse indicates the range. This charge distribution varies depending on the selected material, and if it is an anisotropic material, it exhibits various distributions depending on the crystal orientation.

  FIG. 8 is a diagram showing crystal orientations in Example 1. As shown in FIG. 8, the piezoelectric single crystal flat plate 8 made of lithium niobate used in Example 1 is formed from an X-cut base plate having a thickness of 0.2 mm, and the Y axis of the piezoelectric single crystal and the beam portion 2. 7 is cut out so that the angle formed with the center line 20 in the longitudinal direction is 50 degrees, and the distribution of charges generated on the surface in each mode is as shown in FIG. In consideration of this charge distribution, as shown in FIG. 2, drive electrode portions 5a and 5b for exciting X-mode vibration and reference potential electrode portions 7a and 7b are arranged on the surface of the arm 3c.

  Similarly, the detection electrodes 6a, 6b, 6c, 6d for detecting vibrations in the Y mode and the Z mode and the reference potential electrodes 7c, 7d, 7e, 7f, 7g, 7h was placed. The detection electrode portions 6a, 6b, 6c, and 6d generate Y-mode and Z-mode charges, but the generated charges have different polarities. It is possible to distinguish the generated charge due to.

  The driving mode of the vibrating gyro element according to the first embodiment is set to the X mode, the first arm portion 3c shown in FIG. 2 performs torsional vibration, and the second arm portion 3a and the second arm portion 3b are the first mode. A rotational motion is performed about the arm 3c. As a result, the additional mass portions 4a and 4d and the additional mass portions 4b and 4c vibrate in the out-of-plane direction with opposite phases. The vicinity of the nodal point of the torsional vibration of the first arm portion 3c is connected to the frame of the flat plate 8 by the beam portion. For this reason, it is difficult for the vibration in the driving mode to be transmitted to the frame, and the vibration in the driving mode existing in the frame is reduced.

  Therefore, since the frame 1 of the flat plate 8 with less vibration in the drive mode can be supported, stable support characteristics can be obtained without hindering the vibration in the drive mode. And a sensor output is stabilized and an output drift is also reduced. Further, since the entire circumference of the frame body 1 can be supported, even if an impact is applied to the flat plate 8, the force can be dispersed and a structure having high impact resistance can be obtained. Furthermore, since it is possible to detect the rotational angular velocities of two orthogonal axes in the plane of the flat plate 8, common parts such as a drive circuit, a detection circuit, and an external terminal can be shared. In addition, since the frame body 1 of the flat plate 8 can be supported and fixed, mounting is easy and productivity is increased.

  In the manufacturing process, even when a plurality of vibrating gyro elements are simultaneously formed on a piezoelectric single crystal wafer and the frames 1 are joined together, it is easy to inspect the characteristics. Inspection of vibration characteristics, frequency adjustment, and balance adjustment can be performed without cutting out the vibration gyro elements one by one, which can be easily inspected and adjusted, and the yield of subsequent processes can be improved.

  In Example 1, a piezoelectric single crystal plate of lithium niobate is used, but a useful vibrating gyroscope can also be configured by lithium tantalate, quartz, langasite, zinc oxide, PZT, piezoelectric thin film, and the like. .

  FIG. 9 is a top view showing an element for a vibration gyro according to a second embodiment of the present invention. In the second embodiment, in addition to the vibrating gyro element according to the first embodiment, double frames 17a and 17b are further provided to realize a more stable support structure. The basic operation principle and electrode configuration are the same as those in the first embodiment. In the first embodiment, there is slight vibration in the frame 1. Therefore, the connection portions 18a and 18b are provided near the node point of the frame 1 and connected to the frame 17a, and the connection portions 18c and 18d are provided near the node point of the frame 17a to be connected to the frame 17b. As a result, the vibration existing in the frame 17b is further reduced as compared with the frame 1, the vibration is less likely to leak to the outside, and the vibration from the outside is less likely to enter, thereby further reducing the output drift. .

  FIG. 10 is a block diagram illustrating a vibration gyro according to a third embodiment of the present invention. In the third embodiment, the vibration gyro element 22 according to the first embodiment is used, and the current detection circuit 9, the phase shift circuits 10a and 10b, and the AGC circuit 11 (auto gain control circuit) are used as driving means. As means, it has a differential circuit 13, an adder circuit 14, synchronous detection circuits 15a and 15b, filter circuits 16a and 16b, and a reference potential circuit for setting an operation reference potential of each circuit.

  In the third embodiment, in order to drive the drive electrode portions 5a and 5b at the frequency of the X mode, the output of the AGC circuit 11 for keeping the drive state constant is connected to the drive electrode portions 5a and 5b, and the current detection circuit 9 is connected to the reference potential electrode portions 7a and 7b. Due to the virtual ground effect of the current detection circuit 9, the potentials of the reference potential electrodes 7a and 7b are fixed to the reference potential, and a drive voltage is applied between the drive electrodes 5a and 5b and the reference potential electrodes 7a and 7b. Is possible.

  The drive current flowing in the drive electrode portions 5a and 5b is detected by the current detection circuit 9, the phase is adjusted by the phase shift circuit 10a, the amplitude is adjusted by the AGC circuit 11, and is applied to the drive electrode portions 5a and 5b again. This closed loop enables self-excited oscillation at the X-mode resonance frequency. At the same time, the output of the AGC circuit 11 passes through the phase shift circuit 10b and is input as a reference signal for the synchronous detection circuits 15a and 15b. When an angular velocity around the Z axis is applied in a state where the X mode is self-excited, vibration in the Y mode occurs. The electric charge shown in FIG. 7B is generated by the vibration in the Y mode.

  Accordingly, charges having opposite phases are generated in the detection electrode portions 6a and 6d and the detection electrode portions 6b and 6c. This opposite phase signal can be detected by the differential circuit 13, and can be extracted as an electrical signal proportional to the angular velocity around the Z axis by the synchronous detection circuit 15a and the filter circuit 16a. Similarly, when an angular velocity around the Y axis is applied, vibration in the Z mode occurs. Electric charges as shown in FIG. 7C are generated by the vibration of the Z mode. Therefore, charges having the same phase are generated in the detection electrodes 6a to 6d.

  This signal can be detected by the adder circuit 14, and can be extracted as an electrical signal proportional to the angular velocity around the Y axis by the synchronous detection circuit 15b and the filter circuit 16b. Further, the generated charge due to the Y mode is canceled by the adding circuit 14, and the generated charge due to the Z mode is canceled by the differential circuit 13. Therefore, the output of the filter circuit 16a is an output proportional to the angular velocity only around the Z axis, and the output of the filter circuit 16b is an output proportional to the rotational angular velocity only around the Y axis. That is, the vibrating gyroscope according to the third embodiment functions as an angular velocity sensor that can detect the angular velocities of the Y axis and the Z axis.

  The above embodiment is a vibration gyro element using piezoelectricity, or a vibration gyro. However, part or all of the driving and detection methods may be performed using a transducer using electromagnetic induction or an electrostatic force, or between electrodes. You may replace with the displacement detection by a capacity | capacitance change.

  In Example 4, instead of the 0.2 mm thick flat plate made of the lithium niobate piezoelectric single crystal used in Example 1, a 0.1 mm thick silicon single crystal and a 0.1 mm thick lithium niobate were used. A material obtained by laminating piezoelectric single crystals in the thickness direction was used, and the structure shown in FIG. In Example 4 as well, the same effect as in Example 1 is obtained, and the workability of the silicon single crystal plate portion is better than that of the lithium niobate piezoelectric single crystal plate portion. became.

  As described above, according to the present invention, it is easy to evaluate and mount, has good productivity, has low output drift, is not easily affected by external vibration, and can provide stable output. However, it is possible to provide an inexpensive vibration gyro element and vibration gyro that are robust and capable of detecting the biaxial rotation angular velocity.

The perspective view which shows the element for conventional vibration gyroscopes. 1 is a top view showing a vibration gyro element in Example 1 of the present invention. FIG. FIG. 3 is a diagram illustrating a vibration mode of the vibration gyro element according to the first embodiment. FIG. 3A is a perspective view. FIG. 3B is a top view. FIG. 3C is a side view. FIG. 3 is a diagram illustrating a vibration mode of the vibration gyro element according to the first embodiment. FIG. 4A is a perspective view. FIG. 4B is a top view. FIG. 4C is a side view. FIG. 3 is a diagram illustrating a vibration mode of the vibration gyro element according to the first embodiment. FIG. 5A is a perspective view. FIG. 5B is a top view. FIG. 5C is a side view. FIG. 3 is a diagram illustrating a vibration mode of the vibration gyro element according to the first embodiment. FIG. 6A is a perspective view. FIG. 6B is a top view. FIG. 6C is a side view. The schematic diagram which shows distribution of an electric charge. FIG. 7A is a schematic diagram showing the charge distribution in the X mode. FIG. 7B is a schematic diagram showing the charge distribution in the Y mode. FIG. 7C is a schematic diagram showing the charge distribution in the Z mode. FIG. 3 shows crystal orientation in Example 1. The top view which shows the element for vibration gyroscopes in Example 2 of this invention. The block diagram which shows the vibration gyro in Example 3 of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Frame 2 Beam part 3a, 3b 2nd arm part 3c 1st arm part 4a, 4b, 4c, 4d Additional mass part 5a, 5b Drive electrode part 6a, 6b, 6c, 6d Detection electrode part 7a, 7b, 7c, 7d, 7e, 7f, 7g, 7h Reference potential electrode section 8 Flat plate 9 Current detection circuit 10a, 10b Phase shift circuit 11 AGC circuit 12 Reference potential circuit 13 Differential circuit 14 Addition circuit
15a, 15b Synchronous detection circuit 16a, 16b Filter circuit 17a, 17b Frame 18a, 18b, 18c, 18d Connection part 19 Through groove 20, 21 Center line 22 Vibrating gyro element 111 Vibrator 111a, 111b, 111c, 111d, 112 Vibrating body 113 Piezoelectric element 116 Electrodes 121, 122, 123, 124 Notch N1, N2 Node axis

Claims (10)

  An element for a vibrating gyroscope made of a plate-like body, a frame, a beam portion supported at both ends by the frame, and one or more first arm portions formed to intersect the beam portion; A vibrating gyroscope comprising one or more second arm portions formed extending from the first arm portion and one or more additional mass portions supported by the second arm portion. Element.   2. The vibrating gyroscope according to claim 1, wherein the frame, the beam portion, the first arm portion, the second arm portion, and the additional mass portion are arranged in the same plane. Element.   The said beam part, the said 1st arm part, the said 2nd arm part, and the said additional mass part are arrange | positioned inside the said frame, Either of Claim 1 or Claim 2 characterized by the above-mentioned. The element for vibration gyro as described.   The beam portion extends at an equal distance from the center portion of the frame body, and the first arm portion extends orthogonally through the center portion of the beam portion and at an equal distance from the center portion. 4 or more mass parts are arrange | positioned so that it may become line-symmetric with respect to each of the said beam part and said 1st arm part, The any one of Claim 1 thru | or 3 characterized by the above-mentioned. The element for vibration gyro as described.   The surface of the beam portion, the first arm portion, or the second arm portion has a drive electrode portion for electric signal input and a detection electrode portion for vibration detection, and the additional mass portions adjacent to each other are A first vibration mode that vibrates in opposite phases and vibrates outward in the same plane, a second vibration mode and a third vibration mode in which the first vibration mode and the vibration direction are orthogonal, and the vibration directions are orthogonal to each other. 5. The vibration gyro according to claim 1, wherein the frame body is a node for all of the first to third vibration modes. Element.   6. The vibration gyro element according to claim 1, wherein the plate-like body is a single material made of a piezoelectric body or a piezoelectric single crystal.   The vibration gyro element according to any one of claims 1 to 5, wherein the plate-like body has a laminated structure in which one or more materials are laminated in a thickness direction.   The vibration gyro element according to any one of claims 1 to 6, wherein the frame body is supported at least at two or more locations.   It has at least 1 or more frames which couple | bond together at at least 2 places of the said frame, and surrounds the outer periphery of the said frame, and supports one of these frames at at least 2 or more places. The vibration gyro element according to any one of claims 1 to 7.   9. A vibration gyro using the vibration gyro element according to claim 1, wherein the first vibration mode driving means and the longitudinal axis of the beam portion are set as rotation axes. And detecting means for detecting changes in the second and third vibration modes due to the Coriolis force generated by the rotation angular velocity and the rotation angular velocity having the longitudinal direction of the first arm as the rotation axis. A vibrating gyroscope.

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