JP2007093032A - Sheet-shaped heat pipe and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheet-shaped heat pipe that does not block a gas flow channel even when it is bent, and having high sealing performance and high reliability. <P>SOLUTION: This sheet-shaped heat pipe 100 is composed of hydraulic fluid, a sheet-shaped partitioning plate 3 composed of a spacer 4 having a liquid flow channel 6 through which the hydraulic fluid passes, and the gas flow channel 5 through which vapor of the hydraulic fluid passes, and sealing portions 10A, 10B obtained by deforming a cylindrical sealing film 2 including the hydraulic fluid and the sheet-shaped partitioning plate 3 inside thereof, and having opening portions, into the sheet-shape, and sealing the opening portions at both ends of the sealing film 2, and the sealing film 2 has a layered structure of at least a metallic film 2B and resin films 2A, 2C, thus the sheet-shaped heat pipe 100 capable of reducing impairing of sealing performance can be achieved. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a sheet-like heat pipe that cools a heat generating portion and uses the electronic device such as an optical disk device or a notebook personal computer, and a manufacturing method thereof.

  2. Description of the Related Art In recent years, electronic devices for information communication and the like have been remarkably developed. Particularly, related devices such as personal computers have been improved in performance and miniaturized. For this reason, countermeasures against heat radiation are important due to an increase in heat generation due to higher performance and an increase in heat generation density due to miniaturization.

  Therefore, as a means for efficiently radiating heat in a limited space, a heat pipe having excellent heat conductivity is used to move the heat of the heat generating part to the heat radiating part provided in the electronic device to dissipate heat. Yes.

  As a heat pipe corresponding to the said objective, the sheet-like heat pipe as shown, for example in FIG. 15 is disclosed (for example, refer patent document 1).

  FIG. 15A is a perspective plan view of a conventional sheet-shaped heat pipe, and FIG. 15B is a cross-sectional view taken along line AA of FIG.

  As shown in FIG. 15, a conventional sheet-shaped heat pipe 300 includes a sheet-like container 304 made of an elongated film formed by bonding the outer peripheral ends 308 of two films 302 such as metal foils with a sealant layer 303. A hydraulic fluid (not shown) is enclosed in Furthermore, a plurality of gas flow paths 306 partitioned by a plurality of spacers 305, and liquid flow paths 307 for returning the working fluid using capillary action are formed on the upper and lower surfaces of each gas flow path 306.

  The sheet-like heat pipe 300 has an evaporating portion (not shown) at one end in the longitudinal direction as a heat generating portion of an electronic device, for example, and a condensing portion (not shown) at the other end as a heat radiating portion of the electronic device. It is used by mounting.

  Further, in the operation, first, the working fluid in the sheet-like heat pipe that is in contact with the heat generating portion of the electronic device is evaporated by heat to become steam. Further, the vapor passes through the gas flow path 306 in the sheet-like heat pipe 300 and is transmitted to the heat dissipating unit on the condensing unit side, and is condensed by being deprived of heat to become working fluid again. Then, the working fluid flows back to the evaporation section by capillary action through the liquid flow path 307 of the sheet-like heat pipe 300.

  That is, the sheet-like heat pipe 300 repeats the above operation to radiate the heat of the electronic device from the heat radiating portion and cool it.

  As described above, the conventional sheet-shaped heat pipe is thin, lightweight and flexible because the container is formed of a sheet-shaped film. For example, the heat generated from the central processing unit of a notebook personal computer is hinged. This is suitable for the case where heat is radiated from the heat radiating portion on the display side.

  On the other hand, in recent years, as an information recording medium, for example, an optical disc apparatus or the like has been required to have a large capacity and high speed recording. In order to realize this, the amount of heat generated from components such as a semiconductor laser, a high-frequency circuit module, and a driving coil constituting the optical pickup unit is increased. Therefore, it is necessary to cool the optical pickup unit in order to reduce the influence of heat on the semiconductor laser.

Further, the optical pickup unit moves over a wide range while frequently undergoing small bending deformation during driving. Therefore, in order to transmit the heat generated by the optical pickup unit to the heat radiating unit of the main body, there is a demand for durability corresponding to high-frequency bending deformation as well as flexibility corresponding to small bending deformation.
JP 2001-165854 A

  However, according to the sheet-like heat pipe as shown in Patent Document 1, the sheet-like container is formed by bonding two films such as a metal foil with a sealant layer. For this reason, when a sheet-like heat pipe is repeatedly subjected to stress by a small bending deformation, there is a problem in that the sealant layer is peeled or cracked at the outer peripheral end portion on the center line of the bending deformation and the sealing performance is deteriorated. It was.

  Moreover, when the film of the sheet-like container is formed of a resin material, there is a problem that it cannot withstand long-term use due to absorption of the working fluid and its vapor, and further dissipation to the outside due to permeation.

  The present invention has been made in order to solve the above-described problems. For example, an optical pickup unit of an optical disc apparatus can be used in a place that moves in a wide range while undergoing a small bending deformation with considerable frequency. An object of the present invention is to provide a highly reliable sheet-like heat pipe and a method for manufacturing the same, in which the sealing performance of the sheet-like container does not deteriorate.

  In order to solve the above-described problems, the sheet-like heat pipe of the present invention is a sheet comprising a working liquid, a spacer having a liquid flow path through which the working liquid passes and a gas flow path through which the vapor of the working liquid passes. A cylindrical sealing film having an opening containing a working partition plate and a working liquid and a sheet-like partition plate inside is formed into a sheet shape, and a sealing portion in which the openings at both ends of the sealing film are sealed The sealing film has at least a laminated structure of a metal film and a resin film.

  Thereby, since the longitudinal direction of a sheet-like heat pipe is sealed with the sealing film without a junction part, high sealing performance is securable. Further, even if the sheet-like heat pipe is used at a location that moves over a wide range while undergoing a small bending deformation with a considerable frequency, a reduction in sealing performance is small and a highly reliable sheet-like heat pipe can be obtained.

  In addition, the sheet-like heat pipe of the present invention includes a cylindrical partition plate including a working fluid, a liquid passage through which the working fluid passes, and a spacer having a gas passage through which the steam of the working fluid passes, a working fluid, A cylindrical sealing film having an opening including a cylindrical partition plate inside is deformed into a sheet shape, and includes sealing portions that seal the openings at both ends of the sealing film. It has at least a laminated structure of a metal film and a resin film.

  Thereby, since the longitudinal direction of the sheet-shaped heat pipe is sealed with a sealing film without a joint portion, high sealing performance can be ensured, and the sheet-shaped heat pipe with high heat conduction efficiency can be secured by the cylindrical partition plate. can get.

  Furthermore, the metal film of the sealing film may be provided on the partition plate side.

  Thereby, absorption of a hydraulic fluid etc. can be decreased.

  Furthermore, in the sealing part of the sealing film, the metal film of the sealing film may be larger than the partition plate and smaller than the resin film of the sealing film.

  Thereby, the sealing performance of the sealing part of a sealing film can be improved.

  Furthermore, you may provide the sealing layer which coat | covers a sealing part at least to a sealing film.

  Thereby, since the sealing part of a sealing film is not exposed outside, the fall of the sealing performance in a sealing part can be prevented.

  Furthermore, the sealing layer may consist of at least two layers of a metal film and a resin film.

  Thereby, the sealing performance of the sealing part of a sealing film can further be improved.

  Further, the resin film may be a thermosetting resin.

  As a result, a sheet-like heat pipe that is excellent in flexibility and heat resistance, and that does not deteriorate in sealing performance due to softening or deformation of the sealing film can be obtained even when used in a part having a large temperature change or a high temperature part of an electronic device.

  Further, the gas channel may be formed on the inner peripheral surface of the cylindrical partition plate by deforming the cylindrical partition plate into a sheet shape.

  Furthermore, you may roughen the internal peripheral surface of a cylindrical partition plate.

  As a result, a sheet-like heat pipe having high heat conduction efficiency can be obtained.

  Further, a sheet-like reinforcing member may be provided.

  Thus, when the sheet-like heat pipe is used in an electronic device and the sealing film is partially bent and deformed, it is possible to improve the prevention and durability of the sealing film by attaching a reinforcing member. it can.

  Further, in the method for manufacturing a sheet-like heat pipe of the present invention, at least a metal film and a resin film are laminated to form a cylindrical sealing film having an opening, and a gas channel and a liquid channel are formed. A step of encapsulating the sheet-like partition plate in the sealing film, a step of injecting the working fluid from the opening of the sealing film, and a step of joining the opening of the sealing film to form the sealing portion. Including.

  By this method, since the longitudinal direction of the sheet-like heat pipe enclosing the working fluid is sealed with a sealing film without a joint, a sheet-like heat pipe having excellent sealing performance can be produced efficiently and stably. Can do.

  Further, in the method for manufacturing a sheet-like heat pipe of the present invention, at least a metal film and a resin film are laminated to form a cylindrical sealing film having an opening, and a gas channel and a liquid channel are formed. A step of encapsulating a cylindrical partition plate in the sealing film, a step of injecting a working fluid from the opening of the sealing film, and a step of joining the opening of the sealing film to form the sealing portion. Including.

  By this method, a sheet-like heat pipe having excellent sealing performance and high heat conduction efficiency can be manufactured efficiently and stably.

  Furthermore, the process of forming the sealing layer which coat | covers a sealing part at least on a sealing film is included.

  By this method, a sheet-like heat pipe with further improved sealing performance can be produced.

  Furthermore, the process of roughening the internal peripheral surface of a cylindrical partition plate is included.

  By this method, a sheet-like heat pipe with further improved heat conduction efficiency can be manufactured.

  According to the present invention, even if it is used in a place that moves over a wide range while undergoing a small bending deformation at a considerable frequency, such as an optical pickup unit such as an optical disk device, the sealing performance is hardly deteriorated and reliability is reduced. There is a great effect that an excellent sheet heat pipe can be realized.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
FIG. 1A is a perspective plan view of a sheet-like heat pipe according to the first embodiment of the present invention, and FIG. 1B is a cross-sectional view taken along the line AA in FIG. (C) is the BB sectional drawing of Fig.1 (a).

  In FIG. 1, a sheet-like heat pipe 100 according to the first embodiment of the present invention has a saturated vapor pressure in a sealing film 2 having sealing portions 10 </ b> A and 10 </ b> B joined in a cylindrical shape. A sheet-like partition plate (hereinafter, referred to as “partition plate”) 3 is included together with a low working fluid (not shown).

  And as shown in FIG.1 (b), the sheet-like partition plate 3 has several gas flow paths 5 and each gas flow path along the longitudinal direction (refer Fig.1 (a)) of a sheet-like heat pipe. 5 has a spacer 4 provided with a liquid flow path 6 on the inner peripheral surface thereof.

  Here, as shown in FIG. 2 which is an enlarged perspective view of the main part of the liquid flow path 6, as the liquid flow path 6, for example, oxygen or the like on the inner peripheral surface of the gas flow path 5 of the spacer 4 made of aluminum, polyimide, or the like. By a surface treatment such as dry etching using plasma such as carbon tetrafluoride or wet etching using phosphoric acid or the like, fine protrusions 6A of about 100 μm or less, for example, are formed. By this protrusion 6A, the working fluid is refluxed to the evaporation portion by capillary action.

  The sealing film 2 has a laminated structure including a metal film 2B such as aluminum and resin films 2A and 2C such as polyimide.

  In addition, by deforming the cylindrical sealing film 2 into a sheet shape as shown in FIG. 1B, the joint portions 9 </ b> A and 9 </ b> B of the resin film 2 </ b> C outside the outer peripheral portion in the longitudinal direction of the partition plate 3. The folded portions 12A and 12B having no joint portion are formed. On the other hand, as shown in FIG. 1C, the opening of the cylindrical sealing film 2 is joined by the resin film 2C being fused by using, for example, heat or ultrasonic waves, and the sealing portion 10A. 10B are formed. In this case, it is preferable to form the length of the sealing portions 10A and 10B of the sealing film 2 longer in the longitudinal direction. Thereby, dissipation to the exterior through the resin film 2C of hydraulic fluid can be reduced.

  As shown in FIG. 1C, for example, one end of the sheet-like heat pipe 100 functions as the working liquid evaporation section 7 and the other end functions as the condensing section 8.

  Here, as the resin films 2A and 2C of the sealing film 2, a resin material such as polyethylene terephthalate is used in addition to polyimide. As the metal film 2B of the sealing film 2, a flexible metal material such as copper is used in addition to aluminum. As the hydraulic fluid, ethanol, water, chlorofluorocarbon or the like having a low saturated vapor pressure is used.

  As the spacer 4 of the partition plate 3, a flexible metal material such as aluminum or copper or a resin material such as polyimide or polyethylene terephthalate can be used.

  The depth of the gas flow path 5 may be arbitrary as long as it is equal to or higher than the height of the protrusion 6A, and is designed according to a desired cooling performance. For example, when the height of the protrusion 6A is 100 μm, the depth of the gas flow path 5 may be 100 μm or more.

  According to the first embodiment of the present invention, the cylindrical sealing film 2 having a laminated structure can be sealed in a state in which the longitudinal direction thereof has no joint portion, and thus, a sheet-like heat pipe excellent in sealing performance. Is obtained.

  That is, generally, the length in the longitudinal direction is relatively long with respect to the width of the sealing portion of the sheet-like heat pipe, and the probability of causing a reduction in sealing performance is very high. However, according to the first embodiment of the present invention, since it is possible to eliminate the exposure of the joint portion such as the sealing portion in the longitudinal direction, it is possible to greatly reduce the probability that the sealing performance is deteriorated.

  Further, even if this sheet-like heat pipe 100 is used in a location that moves in a wide range while undergoing bending deformation, such as an optical pickup portion of an optical disk device, for example, it is exposed to the outside in the longitudinal direction where it undergoes bending deformation. Since there are no joints to perform, there is no deterioration in durability due to sealing performance or peeling, and high reliability can be realized.

  In addition, you may form resin film 2A, 2C of the sealing film 2 with a thermosetting resin. Thereby, since the flexibility and heat resistance of the sheet-like heat pipe 100 are improved, the sealing performance due to softening or thermal deformation of the sealing film 2 is not deteriorated. Can be used.

  Below, the manufacturing method of the sheet-like heat pipe in the 1st Embodiment of this invention is demonstrated in detail using FIGS. 3-5.

  FIG. 3 is a process cross-sectional view illustrating the method for manufacturing the intermediate body of the sheet-like heat pipe in the first embodiment of the present invention.

  FIG. 4 is a cross-sectional view illustrating a method for injecting hydraulic fluid in the sheet-like heat pipe in the first embodiment of the present invention.

  FIG. 5 is a perspective plan view for explaining the manufacturing method of the sheet-like heat pipe in the first embodiment of the present invention.

  First, as shown in FIG. 3 (a), for example, a metal film 2B made of a metal material such as aluminum is applied to the entire outer surface of a cylindrical resin film 2C made of a resin material such as polyimide, for example, by vapor deposition or plating. For example, the film is formed to a thickness of about 1 μm to 10 μm. Furthermore, a resin material such as polyimide, for example, is formed on at least the entire outer surface of the metal film 2B to a thickness of, for example, about several μm by, for example, a spray method or a dipping method, and the cylindrical sealing film 2 is formed.

  The cylindrical metal film 2B may be immersed in, for example, liquid polyimide, and the resin films 2A and 2C may be simultaneously formed on both surfaces thereof. The metal film 2B and the resin film 2C may be formed on the entire inner surface of the resin film 2A. It goes without saying that may be formed.

  Next, as shown in FIG.3 (b), the sealing film 2 is mounted in the press metal mold | die 30, and the sealing film 2 is pressurized and heated from the arrow direction, and is processed into a sheet-like predetermined shape. .

  Next, as shown in FIG. 3C, the resin film 2C is fused on both sides of the space 32 containing the partition plate described below and the longitudinal direction thereof to form the joint portions 34A and 34B.

  Next, as shown in FIG. 3 (d), both end portions of the sealing film are inserted into the space 32 by inserting the partition plate 3 composed of the spacer 4 in which the gas flow path 5 and the liquid flow path 6 are formed. An intermediate body (hereinafter referred to as “intermediate body”) 36 of a sheet-like heat pipe having an opening (not shown) is formed.

  Next, as shown in FIG. 4, for example, one of the openings 40 </ b> A and 40 </ b> A of the intermediate body 36 is immersed in a working liquid 44 such as ethanol in a container 42, and the partition plate The hydraulic fluid 44 is injected into the three liquid flow paths. In this case, the working fluid 44 is injected into the liquid channel by capillary action. In this case, for example, the hydraulic fluid 44 may be injected by reducing the pressure of the other opening 40B. Thereby, the working fluid 44 can be injected into the liquid channel in a short time.

  Next, as shown in FIG. 5, the openings of the intermediate body 36 are fused and bonded using, for example, heat or ultrasonic waves to form the sealing portions 10A and 10B.

  And by the said process, the sheet-like heat pipe 100 which encloses a hydraulic fluid and a partition plate in a sealing film, and was airtightly sealed by the sealing part is produced.

  Alternatively, the sheet-like heat pipe 100 may be formed by sucking and injecting the working fluid into the liquid flow path of the partition plate in the reduced pressure atmosphere to join the openings 40A and 40B.

  According to the manufacturing method of the first embodiment of the present invention, a sheet-like heat pipe excellent in sealing performance such as hermetic sealing with a simple configuration is efficiently and stably manufactured using a cylindrical sealing film. be able to.

  Below, the modification of the sheet-like heat pipe in 1st Embodiment is demonstrated using FIG. 6 and FIG.

  6 (a) is a perspective plan view of Modification 1 of the sheet-like heat pipe in the first embodiment of the present invention, and FIG. 6 (b) is a cross-sectional view taken along line AA in FIG. 6 (a). FIG. 6C is a cross-sectional view taken along the line BB of FIG.

  Moreover, Fig.7 (a) is a perspective plan view of the modification 2 of the sheet-like heat pipe in the 1st Embodiment of this invention, FIG.7 (b) is AA of the same figure (a). FIG. 7C is a sectional view taken along line B-B in FIG.

  Each of the above modifications is different from the first embodiment in the structure of the sealing film composed of the laminated structure of the metal film and the resin film.

  First, as shown in FIG. 6, the sheet-like heat pipe 110 in Modification 1 has a two-layer structure in which the sealing film 2 is a resin film 2A and a metal film 2B, and the metal film 2B is provided on the partition plate 3 side. It is a thing.

  As a result, the absorption and permeation of the hydraulic fluid can be completely prevented by the metal film 2B provided on the partition plate 3 side by the resin film 2A. High sheet heat pipe can be realized.

  Moreover, since it becomes thinner, the sheet-like heat pipe excellent in heat conduction efficiency with a heat-emitting part, a heat radiating part, etc. is realizable.

  In this case, as shown in FIG. 6C, the openings of the sealing film 2 are sealed by fusion of the metal film 2B to form the sealing portions 10A and 10B. It is difficult to ensure complete sealing performance compared to fusion. This is because fusion of the metal film 2B generally has a high melting temperature, so that bubbles or the like are easily generated in the resin film 2A when the metal film 2B is fused. Therefore, in the case of the sheet-like heat pipe 110 of Modification 1, as described in the second embodiment of the present invention below, a sealing layer is provided on the sealing portions 10A and 10B, and the sealing film 2 It is preferable to hermetically seal the joint portion of the sealing portion.

  Therefore, as shown in FIG. 7, the sheet-like heat pipe 120 of Modification 2 is formed by forming the metal film 2D of the sealing film 2 smaller (shorter) in the longitudinal direction than the resin film 2A with respect to Modification 1, It is provided on the partition plate 3 side.

  As a result, the sealing portions 10A and 10B of the sealing film 2 are sealed mainly by the fusion of the resin film 2A, so that the fusion can be performed at a low temperature and the fusion interface of the resin film 2A is integrated. Therefore, it is possible to realize bonding with excellent sealing performance.

  Therefore, particularly in this case, the sealing layer may be constituted only by the resin film as described in the second embodiment of the present invention below, but the sealing layer is a laminated structure of the metal film and the resin film. Needless to say.

(Second Embodiment)
Below, the sheet-like heat pipe in the 2nd Embodiment of this invention is demonstrated using FIG.

  FIG. 8A is a perspective plan view of the sheet-like heat pipe 130 according to the second embodiment of the present invention, and FIG. 8B is a cross-sectional view taken along line AA of FIG. 8 (c) is a cross-sectional view taken along line BB in FIG. In FIG. 8, the same components as those in FIG.

  The sheet-like heat pipe 130 according to the second embodiment of the present invention is different from the first embodiment in that a sealing layer 74 that covers the sealing portions 10A and 10B of the sealing film 2 is provided. It is.

  In FIG. 8, the sheet-like heat pipe 130 according to the second embodiment of the present invention is cylindrical and has saturated steam in the sealing film 2 having the sealing portions 10A and 10B to which the openings are joined. A sheet-like partition plate 3 is included together with a low-pressure hydraulic fluid (not shown).

  And as shown in FIG.8 (b), the sheet-like partition plate 3 has several gas flow paths 5 and each gas flow path along the longitudinal direction (refer Fig.8 (a)) of a sheet-like heat pipe. 5 has a spacer 4 provided with a liquid flow path 6 on the inner peripheral surface thereof.

  The sealing film 2 has a laminated structure including a metal film 2B such as aluminum and resin films 2A and 2C such as polyimide.

  Note that the cylindrical sealing film 2 is deformed into a sheet shape as shown in FIG. 8B, so that the joint portions 9 </ b> A and 9 </ b> B of the resin film 2 </ b> C outside the outer peripheral portion in the longitudinal direction of the partition plate 3. The folded portions 12A and 12B having no joint portion are formed.

  On the other hand, as shown in FIG. 8C, the opening of the cylindrical sealing film 2 is joined by the resin film 2C being fused, for example, using heat or ultrasonic waves, and the sealing portion 10A, 10B is formed.

  Further, as shown in FIG. 8C, a sealing layer 74 is formed on the sealing portions 10A and 10B of the sealing film 2 so as to cover at least the end surfaces of the joint portions exposed at the sealing portions 10A and 10B. The Here, the sealing layer 74 has a laminated structure of a metal film 70 such as aluminum and a resin film 72 such as polyimide.

  The metal film 70 of the sealing layer 74 can be formed using, for example, a vapor deposition method or a plating method. The resin film 72 of the sealing layer 74 can be formed by, for example, a dipping method in liquid polyimide.

  Here, as the resin film 72 of the sealing layer 74, a resin material such as polyethylene terephthalate is used in addition to polyimide. As the metal film 70 of the sealing layer 74, a metal material such as copper is used in addition to aluminum.

  According to the second embodiment of the present invention, the end surface of the joint part exposed by the sealing part can be completely sealed with the sealing layer having a laminated structure, so that the sealing is further performed without reducing the flexibility. A sheet-like heat pipe with excellent performance can be obtained.

  Further, since the joint portion of the sealing portion is covered with the sealing layer, it is not necessary to prevent permeation of the hydraulic fluid from the interface of the joint portion by increasing the length in the longitudinal direction of the sealing portion. A sheet-like heat pipe having a short stop portion is obtained.

  Furthermore, since the thickness of the sheet-like heat pipe in the longitudinal direction can be made substantially uniform by the sealing layer, uniform contact with the heat generating part and the heat radiating part is easy, and the heat conduction efficiency can be improved.

  Note that the resin film 72 of the sealing layer 74 may be formed of a thermosetting resin, similarly to the resin films 2A and 2C of the sealing film. Thereby, since the heat resistance of the sheet-like heat pipe 130 is improved, the sealing performance does not deteriorate due to softening or thermal deformation of the sealing layer 74. it can.

  In addition, in the said 2nd Embodiment, although the sealing film 2 was demonstrated with the laminated structure which consists of 3 layers of resin film 2A, 2C and the metal film 2B, it is not restricted to this. For example, as shown in FIG. 9, a two-layer structure of a resin film 2A and a metal film 2B may be used, and the metal film 2B may be provided on the partition plate 3 side. As a result, it is possible to manufacture a sheet-like heat pipe 140 that is thinner and excellent in heat conduction efficiency, has little absorption and permeation of the hydraulic fluid, and hardly deteriorates the cooling characteristics.

  Below, the modification of the sheet-like heat pipe in the 2nd Embodiment of this invention is demonstrated using FIG.

  As shown in FIG. 10A, the sheet-like heat pipe 150 in the first modification of the second embodiment is formed on the entire outer surface of the sealing film 2 having a three-layer structure, for example, a metal film 70 and a resin film. The sealing layer 74 made of 72 is formed.

  Moreover, as shown in FIG.10 (b), the sheet-like heat pipe 160 in the modification 2 of 2nd Embodiment is the metal film 70, for example on the whole outer surface of the sealing film 2 which has a two-layer structure. A sealing layer 74 made of the resin film 72 is formed.

  By these, the sealing performance of the sheet-like heat pipes 150 and 160 can be further improved.

  In addition, since the sealing layer is formed on the entire outer surface of the sealing film, it is easier to form the sealing layer than when the sealing layer is partially formed. Can be produced.

(Third embodiment)
Below, the sheet-like heat pipe in the 3rd Embodiment of this invention is demonstrated using FIG.

  FIG. 11A is a perspective plan view of a sheet-like heat pipe 170 according to the third embodiment of the present invention. 11 (b) is a cross-sectional view taken along line AA of FIG. 11 (a), FIG. 11 (c) is an enlarged cross-sectional view of the main part of FIG. 11 (b), and FIG. It is BB sectional drawing of (a). In FIG. 11, the same components as those in FIG.

  The sheet-like heat pipe 170 according to the third embodiment of the present invention is different from the first embodiment in the configuration of the partition plate 80.

  That is, as shown in FIG. 11B, the partition plate 80 has a configuration in which a cylindrical spacer 81 is deformed into a sheet shape and the inner peripheral surface of the spacer 81 is brought into contact.

  A gas flow path 82 is provided in the longitudinal direction on, for example, the outer peripheral side of the spacer 81, and a rough surface having a protrusion 83 as shown in FIG. 2 is formed on the inner peripheral side. And as shown in FIG.11 (c), the liquid flow path 84 is formed in the clearance gap which the rough surface of the inner peripheral side of the partition plate 80 contacts.

  Thereby, since the partition plate 80 has the wide gas flow path 82 and the liquid flow path 84, the sheet-like heat pipe 170 excellent in the cooling characteristic is obtained.

  Below, the manufacturing method of the sheet-like heat pipe 170 in the 3rd Embodiment of this invention is demonstrated in detail using FIG.

  FIG. 12 is a process cross-sectional view illustrating a method for manufacturing a sheet-like heat pipe in the third embodiment of the present invention.

  First, as shown in FIG. 12A, a gas flow path 82 is provided along the longitudinal direction on the outer peripheral surface side of a cylindrical spacer 81 made of a flexible resin material inscribed in, for example, a cylindrical sealing film. A cylindrical partition plate 80 is produced by roughening the inner peripheral surface side to form, for example, protrusions. Here, the gas flow path 82 of the spacer 81 can be formed in an arbitrary shape and depth by, for example, molding or etching. Further, the protrusion and the like can be formed by a method similar to the method described in the first embodiment.

  Next, as shown in FIG. 12B, a cylindrical partition plate 80 is fitted inside the sealing film 2 formed by the same method as described in the second embodiment of the present invention. .

  Here, the sealing film 2 has a three-layer structure of the metal film 2B and the resin films 2A and 2C, and the partition plate 80 and the resin film 2C are in contact with each other.

  Next, as shown in FIG. 12 (c), the sealing film 2 fitted with the cylindrical partition plate 80 is placed on a press mold 86, and is pressed and heated from the direction of the arrow to form a predetermined sheet-like shape. To the shape of

  As a result, as shown in FIG. 12D, a sheet-like heat pipe intermediate 88 having openings (not shown) at both ends of the sealing film 2 fitted with the cylindrical partition plate 80 is formed. Is done.

  Next, as described with reference to FIG. 4 in the first embodiment of the present invention, one opening of the intermediate 88 is immersed in a working fluid such as ethanol in a container, The working fluid is injected into the liquid flow path 84 of the cylindrical partition plate 80. In this case, the hydraulic fluid may be injected into the liquid flow path by utilizing capillary action, for example, the other opening may be injected under reduced pressure. As a result, the working fluid can be injected in a short time.

  Next, as shown in FIG. 11D, the openings of the intermediate 88 are fused and joined using, for example, heat or ultrasonic waves to form the sealing portions 10A and 10B.

  And by the said process, the hydraulic fluid and the partition plate 80 are enclosed in the sealing film 2, and the sheet-like heat pipe 170 airtightly sealed by sealing part 10A, 10B is produced.

  Alternatively, the sheet 88 may be formed by sucking and injecting the working fluid into the liquid channel 84 of the partition plate 80 in the reduced pressure atmosphere to join the opening.

  According to the manufacturing method of the third embodiment of the present invention, a sheet-shaped heat pipe excellent in sealing performance such as hermetic sealing with a simple configuration is efficiently and stably manufactured using a cylindrical sealing film. be able to.

  Furthermore, since a wide gas flow path and liquid flow path are formed by the cylindrical partition plate, a sheet-like heat pipe having excellent heat dissipation characteristics can be obtained.

  In the third embodiment of the present invention, the cylindrical partition plate has been described. However, the present invention is not limited to this. As shown in FIG. 13, for example, a partition plate 90 formed of a flat spacer 81 in which a gas flow path 82 is formed on one surface and a projection or the like is formed on the other surface to roughen and form a liquid flow path. May be produced. And as shown with the dashed-dotted line in FIG. 13, the partition plate 80 can be wound cylindrically and it can fit in a sealing film, and a sheet-like heat pipe can be formed. In addition, the formation method of a gas flow path and a liquid flow path can be formed by the method similar to the method demonstrated in said each embodiment.

  According to this manufacturing method, a liquid channel or a gas channel can be formed in a flat spacer, so that a partition plate excellent in shape and position accuracy can be easily produced with high productivity.

(Fourth embodiment)
FIG. 14 is a diagram illustrating a state in which the sheet-like heat pipe according to the fourth embodiment of the present invention is mounted on an electronic device.

  The sheet-like heat pipe 180 according to the fourth embodiment of the present invention is provided with a reinforcing member 91 at least at a part thereof, and has a structure that prevents bending and breakage when the degree of bending is large.

  Further, portions of the metal film 92 in contact with the evaporation section 94 and the condensation section 95 at both ends of the sheet-like heat pipe 180 are exposed from the resin film 93 and connected to the heat generation section 96 and the heat dissipation section 97 of the electronic device to be used. Is different.

  That is, as shown in FIG. 14, the sheet-like heat pipe 180 is connected to a heat generating portion 96 that reciprocates in a direction indicated by an arrow 98, for example, and a fixed heat radiating portion 97. And the reinforcement member 91 formed, for example with the thin film is provided in at least one part of the outer periphery where the degree of bending of the sheet-like heat pipe 180 is large.

  Here, the reinforcing member 91 is formed, for example, by vapor deposition or sputtering of a metal thin film such as aluminum, copper, or chromium according to the required rigidity. In addition, although the metal thin film was demonstrated to the example as the reinforcement member 91 above, the structure of the laminated film which apply | coated polyimide with a large elasticity modulus and formed the metal thin film after that may be sufficient, and a polyimide film and other organic films are used. It is good also as a structure fixed through an contact bonding layer.

  Further, the example in which the metal film 92 of the sheet-like heat pipe 180 is exposed and connected to the heat generating part 96 and the heat radiating part 97 of the electronic device has been described.

  Thereby, the thermal conductivity between the electronic device and the sheet-like heat pipe 180 can be increased. However, it is not always necessary to expose and connect the metal film 92 of both the evaporation section 94 and the condensation section 95 of the sheet-like heat pipe 180, and only one of them may be exposed, or the metal film 92 is exposed. It does not have to be.

  According to the fourth embodiment of the present invention, by providing the reinforcing member 91, even if excessive deformation such as deformation occurs in the sheet-like heat pipe 180, the reinforcing member 91 prevents the bending and prevents damage. A sheet-like heat pipe 180 having excellent reliability can be obtained.

  Moreover, even if the sheet-like heat pipe 180 is attached to a place where the sheet heat pipe 180 is partially bent with a small bending radius, the internal partition plate can be prevented from being bent at an acute angle. Thereby, it can prevent that the gas flow path and liquid flow path of a partition plate are crushed or obstruct | occluded.

  Note that the size, shape, and mounting position of the reinforcing member 91 are determined depending on the conditions with the electronic device used.

  Further, it is not always necessary to apply the sheet-like reinforcing member 91 on the surface of the sheet-like heat pipe 180 described in the fourth embodiment and to expose and connect the metal film 92 at the same time. .

  Moreover, the sheet-like heat pipe 180 in the fourth embodiment can be similarly applied to the sheet-like heat pipe of each embodiment, and the same effect can be obtained.

  In addition, in each embodiment, although the case where the metal layer and the resin layer were one layer each as a sealing layer which covers the whole outer surface of a sheet-like container was described, it is not restricted to this. For example, a laminated film of a metal film and a resin film may be a plurality of layers, or only a resin film may be used as long as the resin film has low absorption and permeability with respect to the working fluid.

  Thereby, high airtightness can be ensured, and a highly reliable sheet-like heat pipe can be realized even in a place where the environmental conditions are severe.

  The sheet-like heat pipe of the present invention is thin, lightweight, highly flexible, and has high sealing performance. Therefore, it is useful for portable devices such as notebook computers and electronic devices such as optical pickups of optical disk devices having movable parts. It is.

(A) Perspective plan view of the sheet-like heat pipe in the first embodiment of the present invention (b) AA line sectional view of FIG. 1 (a) (c) BB line section of FIG. 1 (a) Figure The principal part expansion perspective view explaining the liquid flow path of the sheet-like heat pipe in the 1st Embodiment of this invention Process sectional drawing explaining the manufacturing method of the intermediate body of the sheet-like heat pipe in the 1st Embodiment of this invention Sectional drawing explaining the injection | pouring method of the hydraulic fluid of the sheet-like heat pipe in the 1st Embodiment of this invention The perspective top view explaining the manufacturing method of the sheet-like heat pipe in the 1st Embodiment of this invention (A) Perspective plan view of Modification 1 of the sheet-like heat pipe in the first embodiment of the present invention (b) AA line sectional view of FIG. 6 (a) (c) B of FIG. 6 (a) -B sectional view (A) Perspective plan view of Modification 2 of the sheet-like heat pipe in the first embodiment of the present invention (b) AA line sectional view of FIG. 7 (a) (c) B of FIG. 7 (a) -B sectional view (A) Perspective plan view of a sheet-like heat pipe according to the second embodiment of the present invention (b) AA line sectional view of FIG. 8 (a) (c) BB line cross section of FIG. 8 (a) Figure The figure explaining another example of the sealing film of the sheet-like heat pipe in the 2nd Embodiment of this invention. Sectional drawing explaining the modification of the sheet-like heat pipe in the 2nd Embodiment of this invention (A) Perspective plan view of a sheet-like heat pipe in the third embodiment of the present invention (b) AA line sectional view of FIG. 11 (a) (c) Main part enlarged sectional view of FIG. 11 (b) (D) BB sectional drawing of Fig.11 (a) Process sectional drawing explaining the manufacturing method of the sheet-like heat pipe in the 3rd Embodiment of this invention Sectional drawing explaining another example of the manufacturing method of the partition plate of the sheet-like heat pipe in the 3rd Embodiment of this invention. The figure explaining the state which mounted | wore the electronic device with the sheet-like heat pipe in the 4th Embodiment of this invention The figure explaining the conventional sheet-like heat pipe

Explanation of symbols

2 Sealing film 2A, 2C, 72, 93 Resin film 2B, 2D, 70, 92 Metal film 3, 80, 90 Partition plate 4, 81 Spacer 5, 82 Gas flow path 6, 84 Liquid flow path 6A, 83 Protrusion 7 , 94 Evaporating part 8, 95 Condensing part 9A, 9B, 34A, 34B Joining part 10A, 10B Sealing part 12A, 12B Folding part 30, 86 Press die 32 Space 36, 88 (Sheet heat pipe) intermediate 40A 40B Opening 42 Container 44 Hydraulic fluid 74 Sealing layer 91 Reinforcing member 96 Heat generating part 97 Heat radiating part 98 Arrow 100, 110, 120, 130, 140, 150, 160, 170, 180 Sheet-like heat pipe

Claims (14)

Hydraulic fluid,
A sheet-like partition plate comprising a liquid channel through which the hydraulic fluid passes and a spacer having a gas channel through which the vapor of the hydraulic fluid passes;
A cylindrical sealing film having an opening including therein the working liquid and the sheet-like partition plate is deformed into a sheet shape, and a sealing portion in which the opening at both ends of the sealing film is sealed Prepared,
The sheet-shaped heat pipe, wherein the sealing film has at least a laminated structure of a metal film and a resin film. Hydraulic fluid,
A cylindrical partition plate comprising a liquid channel through which the hydraulic fluid passes and a spacer having a gas channel through which the vapor of the hydraulic fluid passes;
A cylindrical sealing film having an opening including therein the hydraulic fluid and the cylindrical partition plate is deformed into a sheet shape, and a sealing portion is formed by sealing the opening at both ends of the sealing film. Prepared,
The sheet-shaped heat pipe, wherein the sealing film has at least a laminated structure of a metal film and a resin film. The sheet-like heat pipe according to claim 1 or 2, wherein the metal film of the sealing film is provided on the partition plate side. The sheet according to claim 3, wherein, in the sealing portion of the sealing film, the metal film of the sealing film is larger than the partition plate and smaller than the resin film of the sealing film. Heat pipe. The sheet-like heat pipe according to any one of claims 1 to 4, wherein a sealing layer that covers at least the sealing portion is provided on the sealing film. The sheet-like heat pipe according to claim 5, wherein the sealing layer includes at least two layers of a metal film and a resin film. The sheet-like heat pipe according to any one of claims 1, 2, and 6, wherein the resin film is a thermosetting resin. The sheet-like heat pipe according to claim 2, wherein the cylindrical partition plate is deformed into a sheet shape, and the gas flow path is formed on an inner peripheral surface of the cylindrical partition plate. The sheet-like heat pipe according to claim 8, wherein the inner peripheral surface of the cylindrical partition plate is roughened. The sheet-like heat pipe according to any one of claims 1 to 9, further comprising a sheet-like reinforcing member. Laminating at least a metal film and a resin film, and forming a cylindrical sealing film having an opening;
Including a sheet-like partition plate in which a gas channel and a liquid channel are formed in the sealing film;
Injecting a working fluid from the opening of the sealing film;
Bonding the opening of the sealing film to form a sealing portion;
The manufacturing method of the sheet-like heat pipe characterized by including. Laminating at least a metal film and a resin film, and forming a cylindrical sealing film having an opening;
A step of enclosing a cylindrical partition plate in which a gas channel and a liquid channel are formed in the sealing film;
Injecting a working fluid from the opening of the sealing film;
Bonding the opening of the sealing film to form a sealing portion;
The manufacturing method of the sheet-like heat pipe characterized by including. The method for producing a sheet-like heat pipe according to claim 11 or 12, further comprising a step of forming a sealing layer covering at least the sealing portion on the sealing film. The method for producing a sheet-like heat pipe according to claim 12, comprising a step of roughening an inner peripheral surface of the cylindrical partition plate.

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