JP2007077015A - カーボンナノチューブの成長装置及びカーボンナノチューブの成長方法 - Google Patents
カーボンナノチューブの成長装置及びカーボンナノチューブの成長方法 Download PDFInfo
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 93
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 74
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 74
- 238000000034 method Methods 0.000 title abstract description 12
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 19
- 238000005229 chemical vapour deposition Methods 0.000 claims description 11
- 239000000126 substance Substances 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000001947 vapour-phase growth Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 28
- 239000003054 catalyst Substances 0.000 description 8
- 239000012159 carrier gas Substances 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- IUHFWCGCSVTMPG-UHFFFAOYSA-N [C].[C] Chemical compound [C].[C] IUHFWCGCSVTMPG-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000001241 arc-discharge method Methods 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
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- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
- D01F9/133—Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
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- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00162—Controlling or regulating processes controlling the pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00164—Controlling or regulating processes controlling the flow
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
- Y10S977/742—Carbon nanotubes, CNTs
- Y10S977/743—Carbon nanotubes, CNTs having specified tube end structure, e.g. close-ended shell or open-ended tube
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/842—Manufacture, treatment, or detection of nanostructure for carbon nanotubes or fullerenes
- Y10S977/843—Gas phase catalytic growth, i.e. chemical vapor deposition
Abstract
【解決手段】本発明に係るカーボンナノチューブの成長装置は、ガス入口及びガス出口を備える反応装置と、吸気口及び排気口を備え、前記ガス出口に連通される排気装置と、を含む。また、本発明に係るカーボンナノチューブの成長方法は、前記反応装置にカーボンを含むガスを導入させて、化学気相堆積法でカーボンナノチューブを成長させる段階と、所定のスピードにより前記反応装置の反応容器の内部圧力を連続的に低減させる段階と、前記反応容器に先端が異なるカーボンナノチューブを成長させる段階と、を含む。
【選択図】図1
Description
図1を参照すると、カーボンナノチューブの成長装置100は、反応装置102と、排気装置106と、気流制御装置104と、を含む。
図2を参照すると、前記カーボンナノチューブの成長装置100を利用してカーボンナノチューブを成長させる工程は、次の段階を含む。
圧力が1atmである条件で、反応装置102の反応容器1022にカーボンナノチューブを成長させる場合において、圧力低減のスピードが例えば0.8atm/minである低速度に設定され、即ち、0.8atm/minのスピードで前記反応容器1022の内部圧力を連続的に低減させる。従って、前記反応容器1022に導入されるカーボンを含むガスの圧力は、前記圧力低減のスピードである0.8atm/minにより低減され、カーボンナノチューブの先端は第一構成のように形成される。図3及び図4は、透過型電子顕微鏡(Transmission Electron Microscope,TEM)を利用して、前記第一構成が形成されるカーボンナノチューブの先端を、異なる倍率で観察した写真である。図3及び図4に示すように、前記カーボンナノチューブの先端は閉口型であり、Z字形に曲がり、直径が変化されるように構成される。なお、図3におけるスケールバーは50nmであり、図4におけるスケールバーは100nmである。
圧力が1atmである条件で、前記反応装置102の前記反応容器1022にカーボンナノチューブを成長させる場合において、圧力低減のスピードが例えば1.6atm/minである中速度に設定され、即ち、1.6atm/minのスピードで前記反応容器1022の内部圧力を連続的に低減させる。従って、前記反応容器1022に導入されるカーボンを含むガスの圧力は、前記圧力低減のスピードである1.6atm/minにより低減され、カーボンナノチューブの先端は第二構成のように形成される。図5、図6及び図7は、透過型電子顕微鏡を利用して、前記第二構成が形成されるカーボンナノチューブの先端を、異なる倍率で観察した写真である。図5乃至図7に示すように、前記カーボンナノチューブの先端は閉口型であり、円錐形に形成される。なお、図5におけるスケールバーは200nmであり、図6及び図7におけるスケールバーは5nmである。
圧力が1atmである条件で、前記反応装置102の前記反応容器1022にカーボンナノチューブを成長させる場合において、圧力低減のスピードが例えば4.8atm/minである高速度に設定され、即ち、4.8atm/minのスピードで前記反応容器1022の内部圧力を連続的に低減させる。従って、前記反応容器1022に導入されるカーボンを含むガスの圧力は、前記圧力低減のスピードである4.8atm/minにより低減され、カーボンナノチューブの先端は第三構成のように形成される。図8、図9及び図10は、透過型電子顕微鏡を利用して、前記第三構成が形成されるカーボンナノチューブの先端を、異なる倍率で観察した写真である。図8乃至図10に示すように、前記カーボンナノチューブの先端は開口型である。なお、図8におけるスケールバーは100nmであり、図6及び図7におけるスケールバーは10nmである。
102 反応装置
1022 反応容器
1024 ガス出口
1026 ガス入口
104 気流制御装置
106 排気装置
1062 吸気口
1064 排気口
Claims (4)
- ガス入口及びガス出口を備える反応装置と、
吸気口及び排気口を備え、前記ガス出口に連通される排気装置と、
を含むことを特徴とするカーボンナノチューブの成長装置。 - 前記反応装置の前記ガス出口と前記排気装置の前記吸気口との間に気流制御装置を設置することを特徴とする、請求項1に記載のカーボンナノチューブの成長装置。
- 前記気流制御装置は、ニードル弁であることを特徴とする、請求項1に記載のカーボンナノチューブの成長装置。
- 前記反応装置にカーボンを含むガスを導入させて、化学気相堆積法でカーボンナノチューブを成長させる段階と、
所定のスピードにより前記反応装置の反応容器の内部圧力を連続的に低減させる段階と、
前記反応容器に先端が異なるカーボンナノチューブを成長させる段階と、を含むことを特徴とするカーボンナノチューブの成長方法。
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Cited By (2)
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JP2009184871A (ja) * | 2008-02-06 | 2009-08-20 | Muroran Institute Of Technology | カーボンナノチューブの製造方法 |
JP2012508159A (ja) * | 2008-11-18 | 2012-04-05 | ユニバーシティ サインス マレーシア | カーボンナノチューブ(carbonnanotubes,CNTs)を生成するプロセス |
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US20090117026A1 (en) * | 2007-10-01 | 2009-05-07 | Denso Corporation | Method for manufacturing carbon nano-tube |
US9174847B2 (en) | 2008-05-01 | 2015-11-03 | Honda Motor Co., Ltd. | Synthesis of high quality carbon single-walled nanotubes |
US8753578B1 (en) * | 2009-02-04 | 2014-06-17 | Jefferson Science Associates, Llc | Apparatus for the production of boron nitride nanotubes |
US8529124B2 (en) * | 2009-06-03 | 2013-09-10 | California Institute Of Technology | Methods for gas sensing with single-walled carbon nanotubes |
US9506194B2 (en) | 2012-09-04 | 2016-11-29 | Ocv Intellectual Capital, Llc | Dispersion of carbon enhanced reinforcement fibers in aqueous or non-aqueous media |
CN104788952B (zh) * | 2014-01-22 | 2017-04-26 | 清华大学 | 碳纳米管复合结构的制备方法 |
EP3272811B1 (en) * | 2015-02-27 | 2020-11-11 | Zeon Corporation | Silicone rubber composition and vulcanized object |
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US5167630A (en) * | 1991-09-26 | 1992-12-01 | Paul Kamaljit S | Blood vessel cannulation device |
IL114739A (en) * | 1995-07-26 | 2005-06-19 | Porat Michael | System for prevention of blood spurts from blood vessels during removal of needle |
US6074364A (en) * | 1996-04-18 | 2000-06-13 | Paul; Kamaljit Singh | Blood vessel cannulation device |
JP2000256856A (ja) | 1999-03-11 | 2000-09-19 | Tokyo Electron Ltd | 処理装置及び処理装置用真空排気システム及び減圧cvd装置及び減圧cvd装置用真空排気システム及びトラップ装置 |
US20020172767A1 (en) * | 2001-04-05 | 2002-11-21 | Leonid Grigorian | Chemical vapor deposition growth of single-wall carbon nanotubes |
CN1286716C (zh) * | 2003-03-19 | 2006-11-29 | 清华大学 | 一种生长碳纳米管的方法 |
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Cited By (2)
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JP2009184871A (ja) * | 2008-02-06 | 2009-08-20 | Muroran Institute Of Technology | カーボンナノチューブの製造方法 |
JP2012508159A (ja) * | 2008-11-18 | 2012-04-05 | ユニバーシティ サインス マレーシア | カーボンナノチューブ(carbonnanotubes,CNTs)を生成するプロセス |
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US20070110660A1 (en) | 2007-05-17 |
JP4486074B2 (ja) | 2010-06-23 |
US7585484B2 (en) | 2009-09-08 |
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