JP2007067485A5 - - Google Patents

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Publication number
JP2007067485A5
JP2007067485A5 JP2005247278A JP2005247278A JP2007067485A5 JP 2007067485 A5 JP2007067485 A5 JP 2007067485A5 JP 2005247278 A JP2005247278 A JP 2005247278A JP 2005247278 A JP2005247278 A JP 2005247278A JP 2007067485 A5 JP2007067485 A5 JP 2007067485A5
Authority
JP
Japan
Prior art keywords
layer
thin film
piezoelectric
acoustic
film vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005247278A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007067485A (ja
JP4678261B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005247278A priority Critical patent/JP4678261B2/ja
Priority claimed from JP2005247278A external-priority patent/JP4678261B2/ja
Publication of JP2007067485A publication Critical patent/JP2007067485A/ja
Publication of JP2007067485A5 publication Critical patent/JP2007067485A5/ja
Application granted granted Critical
Publication of JP4678261B2 publication Critical patent/JP4678261B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005247278A 2005-08-29 2005-08-29 圧電薄膜振動子 Expired - Fee Related JP4678261B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005247278A JP4678261B2 (ja) 2005-08-29 2005-08-29 圧電薄膜振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005247278A JP4678261B2 (ja) 2005-08-29 2005-08-29 圧電薄膜振動子

Publications (3)

Publication Number Publication Date
JP2007067485A JP2007067485A (ja) 2007-03-15
JP2007067485A5 true JP2007067485A5 (enExample) 2008-10-16
JP4678261B2 JP4678261B2 (ja) 2011-04-27

Family

ID=37929242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005247278A Expired - Fee Related JP4678261B2 (ja) 2005-08-29 2005-08-29 圧電薄膜振動子

Country Status (1)

Country Link
JP (1) JP4678261B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009028027A1 (ja) 2007-08-24 2009-03-05 Fujitsu Limited 圧電薄膜共振子、それを用いたフィルタ、そのフィルタを用いたデュプレクサおよびそのフィルタまたはそのデュプレクサを用いた通信機
CN101785183A (zh) * 2007-11-21 2010-07-21 富士通株式会社 滤波器、使用该滤波器的双工器及使用该双工器的通信机
JP2021136675A (ja) * 2020-02-28 2021-09-13 学校法人早稲田大学 圧電素子

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001156582A (ja) * 1999-11-30 2001-06-08 Kyocera Corp 圧電共振子
JP2001156583A (ja) * 1999-11-30 2001-06-08 Kyocera Corp 圧電共振子
DE10045090A1 (de) * 2000-09-12 2002-03-28 Infineon Technologies Ag Akustischer Resonator
JP4478910B2 (ja) * 2001-05-11 2010-06-09 宇部興産株式会社 圧電薄膜共振子
JP2004221622A (ja) * 2002-01-08 2004-08-05 Murata Mfg Co Ltd 圧電共振子、圧電フィルタ、デュプレクサ、通信装置および圧電共振子の製造方法
JP3953921B2 (ja) * 2002-09-10 2007-08-08 日本プレーテック株式会社 ダイヤモンドｑｃｍの作製方法及びそのダイヤモンドｑｃｍ

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