JP2007057329A - Deterioration diagnosing method of ni-based hard metal by x-ray diffraction method and future lifetime evaluation method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a creep damage diagnosing or future lifetime estimating method especially for an Ni-based hard metal capable of grasping a state even in a region large in creep damage and capable of accurately grasping the whole damage tendency, and the creep damage diagnosing or future lifetime estimating apparatus. <P>SOLUTION: The creep damage diagnosing or future lifetime estimating apparatus is constituted of a revolving sample stand 2, an X-ray irradiator 1 for emitting monochromatic X rays, an X-ray sensor 3 for measuring the intensity of X rays of a diffraction spot, a sensor position adjustment device 4 for adjusting their arrangement, a data processor 5 for inputting the output of the X-ray sensor to specify the shape of a diffraction peak, a memory device 6 for storing the shape of the diffraction peak and the function of a creep life consumption rate and an arithmetic device 7 for estimating the creep life consumption rate and the future lifetime on the basis of the shape of the diffraction peak using the function to exhibit them. After the X-ray sensor 3 aims at a predetermined diffraction spot, the sample stand 2 is relatively revolved with respect to the X-ray irradiator to measure the shape of the target diffraction peak. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a diagnosis of deterioration due to creep damage of a nickel (Ni) base superalloy applied to a gas turbine rotor blade and the like, and a method for evaluating a remaining life.

  Ni-base superalloys, which have high creep rupture strength up to the highest temperature and are used for moving blades and stationary blades of jet engines and gas turbines, are also subject to creep damage due to exposure to high-temperature and high-stress environments. It reaches. Due to the necessity of equipment design and maintenance, there is a strong demand for diagnosis of the extent of creep damage and estimation of the remaining life from the degree of damage, and various damage diagnosis methods and remaining life estimation methods have been developed in various places.

A nickel-based superalloy has a structure in which cubic nickel-based intermetallic compounds (γ 'phase) are arranged in a three-dimensional order in a nickel solid solution matrix (γ phase) having a face-centered cubic lattice crystal structure. Have.
While the nickel-base superalloy is used in an actual machine operating environment where stress is applied for a long time at high temperature, coarsening and flattening occur due to the fusion of adjacent γ ′ phases.

Therefore, a structure observation method for estimating the remaining lifetime by observing the γ ′ phase with an electron microscope and evaluating the accumulated creep damage has been generalized.
However, in the structure observation method, the evaluation of creep damage is influenced by the observer's sense and is not quantitative, and the region that can be observed with an electron microscope is very narrow, so the whole state cannot be grasped. In addition, the shape change appearing in the aspect ratio of the γ 'phase is saturated in the region where the creep damage is small and the life is about 0.1 to 0.3, and the change is observed in the region where the damage is larger than that. Can not. Furthermore, since it is necessary to cut out a sample to observe with an electron microscope, it becomes a destructive inspection in which the target member cannot be reused as it is.

Further, as disclosed in Patent Document 1, a deterioration diagnosis / life expectancy estimation device using a SQUID (superconducting magnetic flux quantum interferometer) has been developed by paying attention to the fact that magnetic characteristics change as creep damage progresses. .
In the method disclosed in Patent Document 1, various magnetic characteristics such as initial magnetic susceptibility and remanent magnetization are obtained from a magnetization curve obtained by plotting the measurement result using an excitation coil and a SQUID susceptibility meter after completely demagnetizing the measurement object. And the extent of creep damage is estimated from these characteristics.
The disclosed method can in principle evaluate parts nondestructively. However, the actual part does not deteriorate evenly as a whole, but creep damage occurs remarkably in a very limited region, and then progresses to destruction. Therefore, when the entire object to be measured is excited, it is difficult to detect it by burying it in most of the magnetic property changes where deterioration is not a problem, even if there is significant local deterioration.
In this document, a method of locally exciting a portion where deterioration is predicted and creating a magnetization curve is proposed. However, the magnetization curve obtained by the SQUID susceptibility meter includes a magnetic coil and a region to be measured. Therefore, the technical problem to be solved remains to be applied to an actual part having a complicated shape.

Patent Document 2 discloses a nondestructive evaluation method for evaluating fatigue damage and remaining life using an X-ray diffraction peak.
Since the dislocation density varies depending on the location due to repetitive stress, the lattice constants also differ. Therefore, even if the adjacent X-ray diffraction peaks overlap to form one peak at the beginning, the repetitive stress is applied. In the meantime, the peak intensity imbalance increases and the asymmetry of the peak increases.
The evaluation method disclosed in Document 2 pays attention to the fact that the left-right asymmetry of the X-ray diffraction peak profile changes according to the number of repetitions of the cyclic stress, and in the light of the relationship between the two obtained in advance by experiment, It evaluates the degree of damage or remaining life.

However, in this method, the way in which the degree of asymmetry changes depending on the stress condition, and even if the degree of asymmetry is the same, if the stress level is different, the degree of fatigue damage and the remaining life are different, so the stress level needs to be known. In addition, it has been found that the utility of this method varies depending on the crystal properties, temperature, stress conditions, etc. of the material, and can be applied to various metal members such as aluminum, aluminum alloy, steel, copper, copper alloy, etc. It is unclear whether it can be applied to the nickel-base superalloy, which is the main target.
JP 2001-141700 A JP-A-11-344454

Therefore, the problem to be solved by the present invention is a non-destructive inspection in which it is possible to grasp the state even in an area where the remaining life is reduced and the creep damage is large, and the entire damage tendency is accurately grasped. It is an object of the present invention to provide a creep damage diagnosis or remaining life estimation method and apparatus capable of satisfying the requirements.
In particular, it is to provide a deterioration diagnosis or remaining life estimation method and apparatus for nickel-base superalloys.

  In order to solve the above-mentioned problems, the deterioration according to the present invention is used for a nickel-base superalloy in which nickel-base intermetallic compound precipitation phases (γ ′ phases) are consistently scattered in a nickel solid solution matrix (γ phase). The diagnostic method irradiates a sample of nickel-base superalloy with monochromatic X-rays to generate discrete diffraction spots, selects a predetermined diffraction spot among these diffraction spots, and selects a diffraction peak of the selected diffraction spot. The shape is measured, and the deterioration state of the nickel-base superalloy as a sample is diagnosed based on the fact that the coefficient concerning the dispersion of the diffraction peak corresponds to the deterioration of the nickel-base superalloy.

The predetermined diffraction spot is preferably a diffraction spot caused by ordered lattice diffraction of a nickel-based intermetallic compound (γ ′ phase), and is caused by a crystal plane represented by a Miller index (210) or (310). The diffracted light is advantageous in terms of diffracted light intensity.
The diffraction peak is obtained by measuring the sample stage on which the sample is placed with respect to the combination of the incident X-ray generator and the X-ray sensor in which the X-ray sensor is placed at a predetermined diffraction spot. be able to.
The dispersion coefficient of the diffraction peak can be represented by the half width of the diffraction peak. Further, the deterioration state can be obtained based on the creep life consumption rate. Furthermore, the remaining life of the nickel-base superalloy that is the subject can be calculated based on the deterioration diagnosis result obtained by the nickel-base superalloy deterioration diagnosis method.
Monochromatic X-rays may be emitted light.

In order to solve the above problems, a nickel-base superalloy deterioration diagnosis apparatus according to the present invention includes a sample stage for gripping and rotating a sample, and a monochromatic X-ray irradiation apparatus for irradiating the sample stage with monochromatic X-rays. The X-ray sensor for measuring the X-ray intensity of the generated discrete diffraction spot, the sensor position adjusting device for adjusting the arrangement of the X-ray irradiation device, the sample stage and the X-ray sensor, and the output of the X-ray sensor are input. The measurement data processing device for identifying the diffraction peak shape, the storage device for storing the function of the diffraction peak shape and the creep life consumption rate, and the creep life using the function stored in the storage device based on the specified diffraction peak shape It is an apparatus composed of an arithmetic unit that calculates the consumption rate or estimates and presents the remaining life of the nickel-base superalloy based on the creep life consumption rate.
In the nickel-base superalloy deterioration diagnosis device according to the present invention, after the X-ray sensor is aimed at the diffraction spot to be measured by the sensor position adjustment device, the sample stage is placed on the X-ray irradiation device and the X-ray sensor. The shape of the diffraction peak of the object is measured by relatively rotating.

In the nickel-base superalloy deterioration diagnosis apparatus of the present invention, the diffraction spot to be measured is a diffraction spot caused by a nickel-based intermetallic compound (γ ′ phase) crystal, and the shape of the diffraction peak depends on the half-value width of the diffraction peak. Typically, the deterioration state of the nickel-base superalloy is preferably obtained based on the creep life consumption rate.
Further, the monochromatic X-ray generator may be a synchrotron radiation generator.

Since creep damage accumulation is directly reflected in crystal changes, that is, changes in lattice constants and changes in crystal turbulence, the method of estimating creep damage from crystal changes is based on changes in the morphology of the γ 'phase. The fundamental change in material will be grasped from the observation method.
The nickel-base superalloy deterioration diagnosis / remaining life estimation method and apparatus according to the present invention is based on the fact that the diffraction peak obtained by the X-ray diffraction method includes information on the crystal lattice constant and the crystal disorder. Is selected, and the accumulation of creep damage is estimated from the looseness of the diffraction peak.

Quantifying the looseness of the diffraction peak by the half-value width of the peak, the half-value width corresponds well to the creep life consumption rate. Can be evaluated.
At this time, if a diffraction peak due to the nickel alloy crystal is selected, the linearity in the end of life region is good and the evaluation is easy. In particular, the characteristic in the diffraction spot due to the crystal plane represented by the Miller index (210) or (310) is suitable for the measurement of the lifetime consumption rate.

The half width of the diffraction peak measured by the θ rocking curve method reflects the polygonization within the crystal, that is, the disorder of the crystal, and in principle increases as the crystal is disturbed. Although the diffraction peak half-value width differs for each crystal surface even in the same superalloy, there is a crystal surface where the diffraction peak half-value width gradually increases in a region where the lifetime consumption rate is large. Once acquired, it is possible to accurately estimate the lifetime consumption rate based on the half width of the diffraction peak.
The θ rocking curve method used here fixes the angular relationship between the incident X-ray and the sensor that detects the diffracted light, and sets an axis that passes through the X-ray irradiation position and is perpendicular to the plane formed by the incident X-ray and the detection sensor. By oscillating the measurement object as the center, changing the incident angle of the incident X-ray to the measurement object, and plotting the obtained diffracted X-ray intensity against the oscillation angle of the measurement object is there.

  The deterioration diagnosis / remaining life estimation method and apparatus of the nickel-base superalloy of the present invention can capture changes until the latter half of creep damage by nondestructive analysis, and has a wider observation area than when using an electron microscope observation method, The state of the sample can be grasped more accurately.

Hereinafter, the present invention will be described in detail based on examples with reference to the drawings.
FIG. 1 is an initial structure diagram of a nickel-base superalloy, FIG. 2 is a photograph of the initial state of the nickel-base superalloy, FIG. 3 is a photograph after the creep of the nickel-base superalloy, and FIG. FIG. 5 is a flowchart showing an example of the procedure of a nickel base superalloy deterioration diagnosis method according to this embodiment, FIG. 6 is a graph showing diffraction peaks in the nickel metal phase, and FIG. 7 is nickel. 8 is a graph showing another diffraction peak in the metal phase, FIG. 8 is a graph showing a change in the diffraction peak related to the crystal plane of the nickel alloy phase, FIG. 9 is a graph showing a diffraction peak obtained by the θ rocking curve method, and FIG. It is a graph which shows the relationship between the lifetime consumption rate obtained by (theta) rocking curve method, and a diffraction peak half value width.

As shown in a conceptual diagram in FIG. 1, a nickel-base superalloy has a cubic nickel-base intermetallic compound precipitation phase portion (γ ′) in a nickel matrix (γ phase) having a face-centered cubic lattice type crystal structure. Phase) has a three-dimensional orderly organization.
The nickel-base superalloy initially has a structure in which cubic nickel-base intermetallic compound precipitation phases (γ ′ phases) as shown in FIG. 2 are three-dimensionally arranged, but under the actual operating environment of the gas turbine. During use, coarsening and flattening occur due to the fusion of adjacent γ ′ phases.

As described above, the accumulation of creep damage is directly reflected in the change of the crystal, and the diffraction peak obtained by the X-ray diffraction method includes information on the disorder of the crystal such as the crystal lattice constant, dislocation and surface defects. .
The broadening of the diffraction peak obtained by the θ rocking curve method is thought to reflect the curvature and polygonization of the crystal, that is, the damage given to the crystal, and in principle, as creep damage accumulates and the crystal is disturbed. growing.

The deterioration diagnosis method of the nickel-base superalloy according to the present embodiment evaluates the accumulated creep damage by observing the diffraction peak obtained by irradiating the sample of the Ni-base superalloy with X-rays, and increases the remaining life. It is something to be estimated.
In the method of this example, in order to facilitate the analysis, attention is paid to the diffraction peak formed by diffracting from the precipitation phase (γ ′ phase) among the X-ray diffraction peaks of the precipitation strengthened Ni-base superalloy.

FIG. 4 is a block diagram showing the configuration of the nickel-base superalloy deterioration diagnosis apparatus of this embodiment.
The nickel-base superalloy deterioration diagnosis device of this embodiment includes an X-ray irradiation device 1, a sample stage 2, an X-ray detection device 3, a sensor position adjustment device 4, a measurement data processing device 5, a function storage device 6, and an evaluation calculation device 7. The printer 8 is configured.

The X-ray irradiation apparatus 1 generates monochromatic X-rays and emits them toward a sample. It is preferable that the X-ray irradiation apparatus 1 supplies high-intensity, narrow-band X-rays by radiated light. It is also possible to use characteristic X-rays or a monochromatic filter.
The sample stage 2 has a function of adjusting the position of the measuring object 9 at the X-ray irradiation position and fixing it, and swinging it within an appropriate angle with respect to the X-ray incident axis. The swing motion is controlled by the sensor position adjusting device 4.

Incident X-rays emitted from the X-ray irradiation apparatus 1 are diffracted by the measurement object 9 to generate a plurality of diffraction spots in the rear space. The generation position of the diffraction spot is determined corresponding to the crystal plane existing on the measurement object 9.
The X-ray detection apparatus 3 is an apparatus that generates an electrical signal corresponding to the intensity of incident X-rays, and changes the position in a three-dimensional space while the X-ray incident axis always faces the direction of the measurement object 9. Can do.

The sensor position adjustment device 4 can adjust the angle of the incident axis of the X-ray detection device 3 with respect to the X-ray irradiation axis of the X-ray irradiation device 1 and can adjust the inclination of the sample stage 2. In addition, when the X-ray irradiation apparatus 1 cannot be moved easily by using synchrotron radiation for monochromatic X-rays, the position and orientation of the sample stage 2 and the X-ray detection apparatus 3 are adjusted by fixing the X-ray irradiation apparatus 1. You may make it do.
The measurement data processing device 5 inputs the position information of the sample stage 2 and the X-ray detection device 3 from the sensor position adjustment device 4, inputs the measurement output of the X-ray detection device 3, performs data processing, and performs diffraction at the diffraction spot Elucidate the state of the peak.

The function storage device 6 records a function representing the relationship between the diffraction peak and the creep life consumption rate, and supplies a necessary function as needed according to the request of the evaluation arithmetic device 7.
The evaluation calculation device 7 analyzes the diffraction peak to grasp the extent of the bottom of the diffraction peak, obtains the creep life consumption rate of the measurement object 9 using the function supplied from the function storage device 6, and further measures The remaining life of the object 9 is obtained.
The printer 8 outputs the evaluation result of the evaluation calculation device 7. Note that the evaluation result may be displayed on a display device such as a liquid crystal display device instead of or in addition to the printer 8.

FIG. 5 is a flowchart showing the procedure of the deterioration diagnosis method for the nickel-base superalloy of this embodiment.
A nickel-base superalloy, which is the object 9 to be measured, is set on the sample stage 2 (S01), and a monochromatic X-ray is irradiated to generate a diffraction spot (S02).
The nickel-base superalloy has a crystal grain size as large as 1 mm or more, while the X-ray irradiation area is small for high-precision measurement, for example, the X-ray beam size is about 0.4 mm square. Instead of a concentric circle (Debye-Scherrer ring) centered on the axis of the incident X-ray as obtained by a normal powder method, the diffraction spot is discrete on a concentric circle that should be a Debye-Scherrer ring. Generate automatically. The position of the diffraction spot changes for each set of samples and cannot be determined in advance.

Since the diffraction spot has a unique diffraction angle 2θ with respect to the crystal plane, when the diffraction angle is known, for example, the incident axis of the X-ray detection device 3 and the irradiation axis of the X-ray irradiation device 1 are the measurement object 9. The sensor output is monitored while rotating the X-ray detector 3 fixed around the X-ray irradiation apparatus 1 around the X-ray irradiation axis. By finding the output maximum value, a diffraction spot related to a certain crystal plane can be detected.
Note that when using high-intensity synchrotron radiation, the position of the diffraction spot can be relatively easily confirmed using an imaging plate.

The broadening of the bottom of the diffraction peak at the diffraction spot reflects the amount of defects introduced into the crystal. Each diffraction peak exhibits a broadening due to the accumulation of the respective creep damage, but particularly corresponds well to a change in the diffraction peak due to regular lattice diffraction of the nickel-based intermetallic compound (γ ′ phase).
In addition, when the diffraction angles of the diffraction peaks are close to each other, the diffraction peaks are observed to overlap each other, so that it is difficult to divide the diffraction peaks into the respective diffraction peaks, and the arbitration of the observer may be included in the separation process. Therefore, this method that evaluates the degree of deterioration from each peak shape cannot guarantee an accurate evaluation.

For example, as shown in FIGS. 6 and 7, the diffraction peaks associated with the crystal face of the Miller index (200) and (220) of MarM247, which is a kind of nickel-based superalloy and has high heat resistance, are shown in FIGS. 6 and 7, respectively. Since the γ ′ phase and the γ ′ phase of the nickel-based intermetallic compound precipitation phase are closely superposed, it is extremely difficult to accurately divide the diffraction peak and objectively evaluate each tailing state.
FIG. 6 is a graph illustrating a Miller index (200) plane diffraction peak in which MarM247 nickel solid solution (γ phase) and nickel-based intermetallic compound precipitation phase (γ ′ phase) appear close to each other, and FIG. Is a graph showing an example of a Miller index (220) plane diffraction peak in which peaks are similarly close.
For this reason, in order to correctly estimate the accumulation of creep damage, it is preferable to select a diffraction peak related to the γ ′ phase and sufficiently separated from other diffraction peaks.

FIG. 8 is a graph showing changes in the diffraction peak of the γ ′ phase in the vicinity of the diffraction angle of 45 ° with respect to the crystal face of the MarM247 Miller index (210). In (210) diffraction, it can be seen that only the peak of the nickel-based intermetallic compound precipitation phase (γ ′ phase) appears. Fig. 8 (a) shows the state before the creep test, Fig. 8 (b) shows the state during the creep test under a certain condition, and Fig. 8 (c) shows the case where the breakage occurs under the certain condition. Represents the state of diffraction peaks.
It can be seen that the tail of the diffraction peak is small before creep damage is accumulated, but the bottom of the peak is wide open at the diffraction peak of FIG.
Thus, the loosening of the diffraction peak corresponding to the disturbance of the γ ′ phase crystal can be observed by observing in the direction of change of the diffraction angle.

However, it can also be evaluated by observing the diffraction peak obtained by the θ rocking curve method in which the change of the sample posture with respect to the X-ray irradiation axis is detected and the output change is detected.
In the θ rocking curve method, the direction of the X-ray detector on which the diffracted X-rays are incident, that is, the diffraction angle 2θ with respect to the direction of the incident X-rays irradiating the subject is fixed, and then the subject is taken as the X-ray incident position as an axis. This is a method of measuring the spread at the diffraction peak by swinging. The same result can be obtained even when the X-ray generator X-ray axis and the X-ray detector incident direction fixed at the intersection angle of the diffraction angle 2θ are swung with the X-ray incident position with respect to the subject as the rotation axis. be able to.

FIG. 9 is a graph showing a diffraction peak obtained by the θ rocking curve method for the crystal plane of the Miller index (310). The horizontal axis represents the tilt angle of the sample stage 2 with respect to the X-ray axis, and the vertical axis represents the X-ray intensity at the diffraction spot.
The diffraction peak based on the change in diffraction angle is superimposed on the one related to the disturbance of the interplanar distance of the diffraction grating, whereas the diffraction peak based on the change in posture is only for crystals having a specific lattice spacing. It has been noticed that the increase in the half width is a reflection of the variation in the inclination of the crystal plane, and is considered more appropriate for evaluating the fusion state of the nickel-base superalloy.
One method for easily counting the spread of diffraction peaks is the half-value width (FWHM). The half-value width means the width of the peak at a position half the height of the peak. The larger the half width of the diffraction peak, the larger the peak spread and the greater the disorder of the crystal.

  FIG. 10 is a graph showing the relationship between the lifetime consumption rate and diffraction peak half-value width measured for a unidirectionally solidified material of MarM247, which is a Ni-based superalloy. The horizontal axis represents the lifetime consumption rate t / tr of the evaluated sample, and the vertical axis represents the diffraction peak half width (FWHM) of the crystal plane obtained by the θ rocking curve method. t represents the creep test time of the evaluation sample, and tr represents the rupture life obtained from the creep life data of the evaluation material.

As can be seen from FIG. 10, the diffraction peak half-value width varies from crystal plane to crystal plane, but there are some which gradually increase in the region where the lifetime consumption rate is large. It can be seen that the lifetime consumption rate can be estimated.
If conditions such as being sufficiently far from the adjacent diffraction peaks are added from these diffraction peaks, the diffraction peaks on the planes represented by Miller indices (210) and (310) related to the γ ′ phase are considered to be most appropriate. . The diffraction peaks of (210) and (310) have a monotonically increasing half-value width when the creep life consumption rate is about 0.2 to 1.0, so the degree of creep damage accumulation is evaluated. It is effective for.

Therefore, in the nickel base superalloy deterioration diagnosis method of this embodiment, a predetermined diffraction spot such as (210) is selected and the X-ray detector 3 is set (S03).
Next, the output of the X-ray sensor is collected by rotating the sample 9 relative to the monochromatic X-ray by the θ rocking curve method while monitoring the output of the X-ray detection device 3, and the measurement data processing device The shape of the diffraction peak is measured at 5 (S04).

The evaluation calculation device 7 obtains a peak dispersion coefficient from the obtained diffraction peak shape (S05). It is convenient to use the half width as the dispersion coefficient.
In addition, by applying a function or table representing the relationship between the half-value width and the creep life consumption rate obtained in advance and stored in the function storage device 6, the object is obtained from the previously obtained diffraction peak dispersion coefficient (half-value width). The creep life consumption rate of the material is calculated (S06).
Further, the remaining life as a material is estimated and calculated from the calculated creep life consumption rate and elapsed time (S07), and these results are printed out (S08).

  With the degradation diagnosis method and apparatus of the present invention, it is possible to evaluate the life consumption rate and remaining life of nickel-base superalloys used under high-temperature and long-time stress load conditions such as jet engines, which has been difficult in the past, by nondestructive means. Became.

It is an initial organization chart of a nickel base superalloy. It is a photograph of the initial state of a nickel base superalloy. It is the photograph after the creep of a nickel base superalloy. It is a block diagram which shows the structure of the deterioration diagnostic apparatus of the nickel base superalloy which concerns on one Example of this invention. It is a flowchart which shows the example of a procedure of the deterioration diagnostic method of the nickel base superalloy of a present Example. It is a graph showing the example of the (200) plane diffraction peak in a nickel base superalloy. It is a graph showing the example of the (220) plane diffraction peak in a nickel base superalloy. It is a graph which shows the (210) plane diffraction peak example of the nickel base superalloy in a present Example. It is a graph showing the diffraction peak obtained by the (theta) rocking curve method of the nickel base superalloy in a present Example. It is a graph which shows the relationship between the lifetime consumption rate obtained by (theta) rocking curve method, and a diffraction peak half value width.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 X-ray irradiation apparatus 2 Sample stand 3 X-ray detection apparatus 4 Sensor position adjustment apparatus 5 Measurement data processing apparatus 6 Function storage apparatus 7 Evaluation operation apparatus 8 Printer 9 Measurement object and sample

Claims (11)

A nickel-based superalloy sample in which nickel-base intermetallic compound precipitation phase (γ 'phase) is scattered in a consistent manner in a nickel solid solution matrix (γ phase) is irradiated with monochromatic X-rays to form discrete diffraction spots. A predetermined diffraction spot is selected from the diffraction spots, and the sample is rotated relative to the monochromatic X-ray with respect to the monochromatic X-ray with respect to the incident position of the monochromatic X-ray. Measuring the shape of the diffraction peak, calculating a coefficient for dispersion of the diffraction peak, and diagnosing the deterioration state of the nickel-base superalloy based on the fact that the coefficient corresponds to the deterioration of the nickel-base superalloy. Degradation diagnosis method for superalloys. 2. The method for diagnosing deterioration of a nickel-base superalloy according to claim 1, wherein the predetermined diffraction spot is a diffraction spot caused by regular lattice diffraction of the nickel-base intermetallic compound precipitation phase (γ ′ phase). . 2. The method for diagnosing deterioration of a nickel-base superalloy according to claim 1, wherein the predetermined diffraction spot is a diffraction spot caused by a crystal plane represented by a Miller index (210) or (310). The peak shape of the diffraction spot is an axis that fixes the angle relationship between the incident X-ray and the sensor that detects the diffracted light, passes through the irradiation position of the X-ray, and is perpendicular to the plane formed by the incident X-ray and the detection sensor. The incident angle of the incident X-ray to the measurement object is changed by oscillating the measurement object around the center, and the obtained diffracted X-ray intensity is plotted against the oscillation angle of the measurement object. 4. The method for diagnosing deterioration of a nickel-base superalloy according to claim 1, wherein the deterioration is measured by a θ rocking curve method. The method for diagnosing deterioration of a nickel-base superalloy according to any one of claims 1 to 4, wherein the dispersion coefficient of the diffraction peak is a half-value width of the diffraction peak. The deterioration diagnosis method for a nickel-base superalloy according to any one of claims 1 to 5, wherein the deterioration state is obtained based on a creep life consumption rate. A nickel base superalloy remaining life estimation method for estimating a remaining life of a nickel base superalloy based on a deterioration diagnosis result obtained by the nickel base superalloy deterioration diagnosis method according to any one of claims 1 to 6. The method for diagnosing deterioration of a nickel-base superalloy according to any one of claims 1 to 7, wherein the monochromatic X-ray is synchrotron radiation. A sample stage for gripping and rotating the sample, a monochromatic X-ray irradiation apparatus for irradiating the sample stage with monochromatic X-rays, an X-ray sensor for measuring the X-ray intensity of the generated discrete diffraction spots, and the X A sensor position adjusting device for adjusting the arrangement of the X-ray sensor, a measurement data processing device for specifying the shape of a diffraction peak by inputting the output of the X-ray sensor, a diffraction peak shape, A storage device for storing a function of a creep life consumption rate, and calculating a creep life consumption rate using the function based on the identified diffraction peak shape or of the nickel-base superalloy based on the creep life consumption rate And an arithmetic unit that estimates and presents the remaining life, and after the X-ray sensor is aimed at a diffraction spot to be measured, the sample stage is rotated relative to the X-ray irradiation device The Measuring the shape of the diffraction peaks of interest by Rukoto, deterioration diagnosis apparatus for nickel-base superalloys. The diffraction spot to be measured is a diffraction spot due to regular lattice diffraction of the nickel-based intermetallic compound precipitation phase (γ ′ phase), the shape of the diffraction peak is represented by the half-width of the diffraction peak, and the deterioration state is The deterioration diagnosis apparatus for nickel-base superalloys according to claim 9, wherein the deterioration diagnosis apparatus is obtained based on a creep life consumption rate. 11. The nickel-base superalloy deterioration diagnosis device according to claim 9, wherein the monochromatic X-ray irradiation device is a synchrotron radiation generator.