JP4565546B2 - X-ray analysis method and X-ray analysis apparatus - Google Patents

Description

  The present invention relates to an X-ray analysis method and an X-ray analysis apparatus that analyze the structure of a substance using X-rays.

  An apparatus for analyzing the structure of a substance using X-rays, that is, an X-ray analysis apparatus has been widely known. As such an X-ray analysis apparatus, for example, a concentrated X-ray diffraction apparatus, a parallel beam X-ray analysis apparatus, and other various apparatuses are known. As such an X-ray analysis apparatus, there is conventionally known a method of displaying measured data as a one-dimensional image, that is, a linear image on the screen of an image display apparatus using a CRT (Cathode Ray Tube) or the like. . A method of displaying a two-dimensional image, that is, a planar image is also known (for example, see Patent Document 1). Recently, a method of displaying a three-dimensional image, that is, a stereoscopic image is also known.

  In an X-ray analysis method using such an X-ray analyzer, there is a method in which two or more types of data are measured from one sample or a plurality of samples, and the analysis is performed while comparing the data. Conventionally, in this analysis method, two or more obtained data are separately displayed as images on an image display device using a CRT (Cathode Ray Tube) or the like, and the operator compares and displays the images. It was done.

JP 2001-318063 A (6th page, FIG. 4)

  However, when the analysis is performed while comparing two or more pieces of data separately as described above, there is a problem that an accurate judgment cannot be made by a skilled person. In addition, when two or more data are displayed separately, data processing such as smoothing processing and background removal processing is independently performed for each data, and therefore, the two or more data are evenly distributed. I didn't know if the data was processed. If the data processing performed between two or more data is not equal, the reliability of the analysis performed by comparing two or more data after the data processing is reduced.

  The present invention has been made in view of the above problems, and an object thereof is to improve the reliability of analysis performed by comparing two or more data.

In order to achieve the above object, the X-ray analysis method according to the present invention obtains a plurality of types of X-ray measurement data under different measurement conditions and generates new information based on the plurality of types of X-ray measurement data. Data analysis processing is performed to generate three-dimensional image data on a common stereoscopic image coordinate corresponding to each of the plurality of types of X-ray measurement data and the new information , and display based on the three-dimensional image data A stereoscopic image corresponding to the X-ray measurement data is displayed on the screen of the means.
Considering the X-ray incident angle ω with respect to the sample, the X-ray detection angle 2θ with respect to the sample, and the like as the measurement conditions, it can be considered that the scanning regions of ω and 2θ are different from the different measurement conditions.

  According to the X-ray analysis method according to the present invention, two or more measurement data are generated as data on one common solid coordinate, and therefore, common data processing between the measurement data, for example, smoothing processing, Background removal processing or the like can be performed. Therefore, the reliability of analysis performed by comparing these measurement data is improved.

  Further, since two or more measurement data are generated as data on one common solid coordinate, common data analysis, for example, peak search, can be performed between these measurement data. Therefore, the reliability of comparison between two or more analyzed measurement data is improved.

  Furthermore, in the present embodiment, since a three-dimensional image is generated and displayed based on data analysis processing, for example, peak search processing, coordinate conversion, etc., it is very important for the operator to determine the measurement result. Can be displayed easily. For example, in a three-dimensional image, a plurality of profiles can be displayed in a three-dimensional manner by changing the viewpoint to various positions, so that a peak comparison between the profiles can be accurately performed. In addition, since the displayed profile is subjected to analysis processing such as peak search, the reliability of the data is very high.

By the way, as a method of processing two or more measurement data, a process of converting one measurement data into measurement conditions of other measurement data, that is, standardizing two or more measurement data, and then on one coordinate system There is a way to display. For example, now
(1) Data 1 in which the measurement angle step interval is 0.1 ° and the measurement range on the XY coordinate system is X = 1 to 2, Y = 0 to 1, and (2) the measurement angle step interval is 1. And data 2 in which the measurement range on the XY coordinate system is X = 3 to 5, Y = 2 to 4,
Is obtained,
(3) Based on the data 1 and data 2, the data 3 in which the step interval of the measurement angle is 0.1 ° and the measurement range on the XY coordinate system is X = 0 to 5 and Y = 0 to 4 May be obtained by calculation. In this case, the measurement data 3 obtained in (3) is standardized data.

  As described above, when a method of normalizing those measurement data to one condition is adopted as a method of combining two or more measurement data, the calculation process is required because the calculation process is required for normalization. There is a problem that it becomes troublesome. In addition, after standardization, two or more measurement data cannot be individually processed, so that such data can be individually displayed on a stereoscopic screen to perform a stereoscopic display with the viewpoint changed. Problems such as being unable to do so are also possible. On the other hand, according to the X-ray analysis method according to the present invention, two or more measurement data are individually calculated as three-dimensional image data on common solid coordinates without being standardized. Processing is very simple.

  Next, in the X-ray analysis method according to the present invention, the data analysis process is preferably a peak search process and / or a coordinate conversion process. In this way, a highly reliable and useful three-dimensional image, that is, a stereoscopic image can be obtained.

  The above peak search can be performed visually by an operator, but it is desirable to obtain it by calculation in order to improve the objectivity of analysis. Furthermore, it is desirable to display the result of the peak search by display means such as an image display device or a printer. Furthermore, it is desirable to indicate the peak position obtained by the peak search together with the three-dimensional image. In this way, the peak position of the peak waveform in the three-dimensional image can be easily and reliably recognized, and furthermore, comparison of peak positions in two or more measurement data can be clearly identified. Furthermore, the peak position can be more accurately compared by changing the viewing angle of the three-dimensional image with respect to two or more measurement data by changing the position of the viewpoint in the three-dimensional image. .

Next, in the X-ray analysis method according to the present invention, the plurality of types of X-ray measurement data include an X-ray incident angle ω to the sample, an X-ray detection angle 2θ emitted from the sample, and an X-ray emitted from the sample. It can be composed of a combination of strengths I. In this case, the different measurement conditions are
(1) Whether the range of the incident angle ω is different,
(2) Whether the range of the X-ray detection angle 2θ is different,
(3) Are both the X-ray incident angle ω and the X-ray detection angle 2θ different, or (4) Does the step interval when scanning the X-ray incident angle ω and the X-ray detection angle 2θ differ? ,
It can be any of the conditions of.
This analysis method is suitable for performing reciprocal lattice map measurement.

Next, in the X-ray analysis method according to the present invention, the plurality of types of X-ray measurement data include two types of X-ray incident angle ω to the sample, X-ray detection angle 2θ emitted from the sample, and two sample directions. The angle χ around the tilt axis of the sample, which is one of the azimuth angles, the angle φ around the in-plane rotation axis of the sample, which is one of the two azimuth angles that determine the orientation of the sample, and the X-rays emitted from the sample It can be composed of a combination of strengths I. In this case, the different measurement conditions are
(1) Whether the range of the incident angle ω is different,
(2) Whether the range of the X-ray detection angle 2θ is different,
(3) Whether both the X-ray incident angle ω and the X-ray detection angle 2θ are different,
(4) Step intervals when scanning the X-ray incident angle ω and the X-ray detection angle 2θ are different , or (5) an angle χ around the tilt axis or an angle φ around the in-plane rotation axis. Different or
Any of the conditions can be adopted.
This analysis method is suitable for performing reciprocal lattice map measurement.

Next, in the X-ray analysis method according to the present invention, the plurality of types of X-ray measurement data is a detection angle 2θ of X-rays emitted from the sample and one of two azimuth angles that determine the sample orientation. It is composed of a combination of an angle χ around the axis, an angle φ around the in-plane rotation axis of the sample, which is one of the two azimuth angles that determine the sample orientation, and an intensity I of the X-ray emitted from the sample. be able to. In this case, the different measurement conditions are
(1) Whether the range of the angle χ around the tilt axis is different,
(2) Whether the angle φ around the in-plane rotation axis is different,
(3) Both the angle χ around the tilt axis and the angle φ around the in-plane rotation axis are different,
(4) The step interval when scanning and moving the angle χ around the tilt axis and the angle φ around the in-plane rotation axis is different , or (5) the range of the X-ray detection angle 2θ is different ,
It can be any of the conditions of.
This analysis method is suitable for performing extreme point measurement.

  Next, in the X-ray analysis method according to the present invention, the plurality of types of X-ray measurement data are obtained with respect to a sample obtained by forming a thin film on a substrate, and with respect to the measurement data obtained for the substrate and the thin film. It is desirable that there are two types of measured data. This measurement is intended to obtain two measurement data under different measurement conditions for one sample formed by forming a thin film on a substrate.

  Widely known as this type of measurement include reciprocal lattice map measurement and pole measurement. In the reciprocal lattice map measurement, the ω angle, which is the rotation angle of the sample, and the 2θ angle, which is the angle for detecting the X-rays emitted from the sample, are scanned and associated with each other, and two-dimensional X-rays are measured during the scanning movement. It measures intensity data distribution. By displaying the distribution pattern of the X-ray intensity data obtained by this method, it is possible to analyze the change in the lattice spacing with respect to the sample orientation. In addition, by converting the obtained data into reciprocal space coordinates, performing a peak search, and calculating projection components in different directions, the components of the lattice constants in the respective directions can be compared.

  In addition, in the pole measurement, in general, 2θ which is a detector position is fixed, and only the sample is rotated in-plane (φ axis) and tilted (χ axis) to obtain two-dimensional X-ray intensity data. The distribution is measured. By displaying the distribution pattern of X-ray intensity data obtained by this method, the distribution form of a predetermined crystal lattice plane can be analyzed.

  In some extreme point measurements, a special goniometer is used. In this case, the sample is rotated by a biaxial operation of the ω axis and the in-plane rotation φ axis. Further, the detector position is determined by 2-axis operation of 2θ and χ. The control itself is performed by the above general method to output a signal, and the output data is displayed as a two-dimensional X-ray intensity distribution graphic.

Next, an X-ray analyzer according to the present invention includes: (A) an X-ray measuring apparatus that irradiates a sample with X-rays and detects X-rays emitted from the sample by X-ray detection means; and the X-ray measuring apparatus Data storage means for storing a plurality of measurement data obtained under different measurement conditions, display means for displaying an image, and new information based on the plurality of measurement data obtained under different measurement conditions. Data analysis means for generating, and image data generation means for generating three-dimensional image data for displaying a stereoscopic image on the display means, and an analysis result of the data analysis means is displayed by the image data generation means on the stereoscopic data. Displayed on the image, the image data generation means is a common corresponding to each of the plurality of measurement data obtained under the different measurement conditions and the new information generated by the data analysis means It generates a 3-dimensional image data on the three-dimensional image coordinates,
(B) The plurality of measurement data includes a combination of an incident angle ω of X-rays to the sample, a detection angle 2θ of X-rays emitted from the sample, and an intensity I of X-rays emitted from the sample,
The different measurement conditions are
(1) Whether the range of the incident angle ω is different,
(2) Whether the range of the X-ray detection angle 2θ is different,
(3) Both the X-ray incident angle ω and the X-ray detection angle 2θ are different, or
(4) Whether the step interval at the time of scanning and moving the X-ray incident angle ω and the X-ray detection angle 2θ is different data,
(C) The plurality of measurement data includes an X-ray incident angle ω to the sample, an X-ray detection angle 2θ from the sample, and one of two azimuth angles that determine the sample orientation. A combination of the angle χ, the angle φ around the in-plane rotation axis of the sample, which is one of the two azimuth angles that determine the sample orientation, and the intensity I of the X-ray emitted from the sample,
The different measurement conditions are
(1) Whether the range of the incident angle ω is different,
(2) Whether the range of the X-ray detection angle 2θ is different,
(3) Whether both the X-ray incident angle ω and the X-ray detection angle 2θ are different,
(4) Step intervals when scanning and moving the X-ray incident angle ω and the X-ray detection angle 2θ are different, or
(5) Whether the angle χ around the tilt axis or the angle φ around the in-plane rotation axis is different,
Or any of the data
(D) The plurality of measurement data includes an X-ray detection angle 2θ emitted from the sample, an angle χ around the tilt axis of the sample, which is one of two azimuth angles that determine the sample orientation, and two samples that determine the sample orientation It consists of a combination of the angle φ around the in-plane rotation axis of the sample, which is another azimuth angle, and the intensity I of the X-ray emitted from the sample,
The different measurement conditions are
(1) Whether the range of the angle χ around the tilt axis is different,
(2) Whether the angle φ around the in-plane rotation axis is different,
(3) Both the angle χ around the tilt axis and the angle φ around the in-plane rotation axis are different,
(4) The step interval when scanning and moving the angle χ around the tilt axis and the angle φ around the in-plane rotation axis is different, or
(5) Whether the range of the X-ray detection angle 2θ is different,
The data is any one of the following.

  According to the X-ray analysis apparatus according to the present invention, two or more measurement data are generated as data on one common three-dimensional coordinate, and therefore, common data processing between the measurement data, for example, smoothing processing, Background removal processing or the like can be performed. Therefore, the reliability of analysis performed by comparing these measurement data is improved.

  Further, since two or more measurement data are generated as data on one common solid coordinate, common data analysis, for example, peak search, can be performed between these measurement data. Therefore, the reliability of comparison between two or more analyzed measurement data is improved.

  Furthermore, in a three-dimensional image, a plurality of profiles can be displayed three-dimensionally by changing the viewpoint to various positions, so that peaks can be accurately compared between the profiles. In addition, since the displayed profile is subjected to analysis processing such as peak search, the reliability of the data is very high.

  Next, in the X-ray analysis apparatus according to the present invention, it is preferable that the data analysis unit performs a peak search process and / or a coordinate conversion process. If the measurement data after the peak search process and the coordinate conversion process are displayed as a stereoscopic image, highly reliable data can be displayed in an easy-to-view form.

  It should be noted that the calculation result of the peak search process is desirably displayed by display means such as an image display device or a printer. In that case, it is desirable to display the peak position obtained by the peak search process together with the three-dimensional image or the two-dimensional image as the measurement result. In this way, the peak position of the peak waveform in the three-dimensional image or the two-dimensional image can be easily and reliably recognized, and furthermore, comparison of peak positions in two or more measurement data can be clearly identified. Furthermore, the peak position can be more accurately compared by changing the viewing angle of the three-dimensional image with respect to two or more measurement data by changing the position of the viewpoint in the three-dimensional image. .

  According to the X-ray analysis method and the X-ray analysis apparatus according to the present invention, since two or more measurement data are generated as data on one common solid coordinate, common data processing between the measurement data, For example, smoothing processing, background removal processing, and the like can be performed. Therefore, the reliability of analysis performed by comparing these measurement data is improved.

  In addition, since two or more measurement data are generated as data on one common three-dimensional coordinate, common data analysis, for example, peak search processing and coordinate conversion processing can be performed between the measurement data. Therefore, the reliability of comparison between two or more analyzed measurement data is improved.

  Furthermore, since the 3D image data is generated based on the data after the data analysis process such as the peak search process is performed and the 3D image is displayed, it is very difficult for the operator to judge the measurement result. Easy display can be performed. For example, in a three-dimensional image, a plurality of profiles can be displayed in a three-dimensional manner by changing the viewpoint to various positions, so that a peak comparison between the profiles can be accurately performed. In addition, since the displayed profile is subjected to analysis processing such as peak search, the reliability of the data is very high.

Hereinafter, the present invention will be described based on an embodiment. First, a basic concept as a premise of the embodiment will be briefly described.
A crystal is a solid composed of atoms, in which the atoms are arranged in a three-dimensional space so that they repeat the same manner periodically. The crystal lattice is a framework formed by an arrangement of a plurality of atoms constituting the crystal. The points in the crystal lattice are lattice points. All grid points can be placed on a group of planes that are parallel to each other and equally spaced, and such planes are called grid planes. A plurality of lattice planes are arranged in parallel with each other in the crystal, and when the so-called Bragg diffraction condition is satisfied between the wavelength of the X-ray incident on the crystal and the interval between the plurality of lattice planes, the lattice planes are scattered. X-rays strengthen each other, and strong X-rays are emitted in a specific angular direction. This intense X-ray is diffracted X-ray. As described above, the concept of crystal lattice is important in considering the diffraction phenomenon.

  By the way, when considering the X-ray diffraction phenomenon, there are cases where it is based on the concept of a so-called reciprocal lattice, in addition to the above-described crystal lattice. This reciprocal lattice is a lattice specified by a reciprocal lattice basic vector having a fixed relationship with respect to the three basic vectors that determine the crystal lattice. A space specified by this reciprocal lattice is generally called a reciprocal lattice space. Measurements performed based on the idea of the reciprocal lattice space include reciprocal lattice map measurement and pole measurement.

  Assume that a virtual reciprocal lattice space Re is considered inside the sample as shown in FIGS. Here, the symbol “Y” indicates the sample surface normal. The above reciprocal lattice map measurement is considered to measure the X-ray intensity information in the cross section Se shown in FIG. Here, in the cross section Se, the angle around the Y axis of the reciprocal lattice space Re, that is, the in-plane rotation angle related to the sample is constant, and the X-ray incident angle ω and the X-ray detection angle 2θ are scanned, that is, scanned. It is a cross-section sometimes obtained. On the other hand, the above pole measurement is considered to measure X-ray intensity information on the curved surface Su shown in FIG. Here, the curved surface Su is a curved surface obtained when the X-ray incident angle ω and the X-ray detection angle 2θ of the reciprocal lattice space Re are constant and the sample is rotated in-plane around the Y axis.

(First embodiment)
Hereinafter, the case where the X-ray analysis method and the X-ray analysis apparatus according to the present invention are applied to reciprocal lattice map measurement will be described as an example. More specifically, a case where the epitaxy of a GaAs (gallium arsenide) thin film epitaxially grown on a Si (silicon) substrate is evaluated using a reciprocal lattice map measurement is illustrated. More specifically, a case where a reflection having a sufficient intensity when X-rays are incident on a sample at a low angle is searched for and a reciprocal lattice map measurement of 224 reflection is performed is illustrated. Here, the signal can be effectively extracted from the thin film by the roller that makes X-rays enter the sample at a low angle. Of course, the present invention is not limited to the embodiment.

  FIG. 1 shows an X-ray measuring apparatus 1 constituting a main part of an X-ray analyzer according to the present invention for performing a reciprocal lattice map measurement. In the present embodiment, the X-ray measurement apparatus 1 is configured using a parallel beam optical system. FIG. 2 is a block diagram showing the overall configuration of the X-ray analyzer according to the present invention.

  In FIG. 1, the X-ray measurement apparatus 1 includes an X-ray generation apparatus 4, a multilayer mirror 6, and a parallel beam forming apparatus 7 on the X-ray incident side of the sample S. Further, a beam adjusting device 8 and an X-ray counter 9 are provided on the X-ray emission side of the sample S. The X-ray generator 4 has a cathode or filament 2 and a rotating counter-cathode or rotating target 3 facing it. The rotation target 3 is formed in a cylindrical shape centered on the central axis X0, rotates around the axis X0 as indicated by an arrow A, and the cooling water flows into the inside thereof. This rotation and water flow cools the outer peripheral surface of the target 3, that is, the electron collision surface, that is, the X-ray emission surface.

  The filament 2 facing the rotating target 3 generates heat when energized and emits thermoelectrons. A high voltage, so-called tube voltage, is applied between the filament 2 and the target 3, and the thermoelectrons emitted from the filament 2 are accelerated by the tube voltage and collide with the peripheral surface of the target 3. The region where the electrons collide is the X-ray focal point. Part of the energy of the electrons colliding with the X-ray focal point is converted into X-rays, and the X-rays are emitted from the X-ray focal point to the outside. That is, this X-ray focal point functions as an X-ray source. The X-rays generated in this way have a wavelength corresponding to the material of the target 3, for example, Cu (copper).

  The surface of the target where the X-ray focal point is formed is heated to a high temperature by the collision of electrons, but this target is cooled by rotating in the direction of arrow A and passing water therethrough. Maintained. By generating X-rays while cooling the target 3, it is possible to apply a high tube voltage, and therefore X-rays with high intensity can be generated from the X-ray generator 4.

  X-rays generated and emitted from the X-ray generator 4 hit the multilayer mirror 6. The multilayer mirror 6 is formed by laminating a plurality of thin films on a substrate, and the X-rays reflected at the surface of the uppermost thin film and the interface between the thin films are focused on a narrow region. As a result, high-intensity X-rays can be formed.

  The parallel beam forming device 7 arranged on the downstream side of the multilayer mirror 6 is formed by two slits 11a and 11b arranged at intervals. These slits 11a and 11b form a parallel X-ray beam having a small cross-sectional diameter, and this parallel beam enters the sample S at an incident angle of ω. This incident angle ω is usually a low angle of 10 ° or less. The sample S is obtained by forming a GaAs thin film S1 on a Si substrate S0. If the X-ray analysis method of this embodiment is used, for example, it will be observed how the thin film S1 formed on the substrate S0 has changed from the original material, or the orientation of the thin film S1 is aligned. Can be observed.

X-rays incident on the sample S cause a diffraction phenomenon by the lattice plane of the thin film sample S1 and the lattice plane of the substrate S0. In the case of a crystalline substance, a diffraction signal is output from the detector only when the geometric conditions determined by all of the X-ray incident angle, sample in-plane orientation, and detector position satisfy the diffraction condition. The beam adjusting device 8 disposed on the downstream side of the sample S has two light receiving slits 12a and 12b. The X-rays emitted from the sample S are accurately taken into the X-ray counter 9 by the action of these slits 12a and 12b. In addition, the downstream slit 12 b prevents scattered rays from entering the X-ray counter 9. The X-ray counter 9 is configured by a detector that can detect X-rays in the form of dots, a so-called zero-dimensional X-ray detector. As such an X-ray detector, for example, a scintillation counter can be used. X-ray counter 9, when receiving the X-ray, and outputs a signal S _I that corresponds to the amount of accepted X-ray, the output signal S _I is fed to the controller 14 in FIG. 2.

  In FIG. 1, a sample S is supported by a sample table (not shown). A ω rotation device 13 is connected to the sample stage. When the ω rotating device 13 is operated, the sample stage rotates, and the sample S supported thereby rotates as indicated by an arrow B around the ω axis. The ω-axis is an axis that extends in the direction perpendicular to the paper surface of FIG. By the rotation of the sample S, the incident angle ω of the X-ray with respect to the sample S changes. The ω rotation device 13 includes, for example, a motor having a structure capable of controlling the rotation angle as a drive source. If a pulse motor is used as the motor, the X-ray incident angle ω can be detected based on a pulse signal supplied to the pulse motor. Further, a servo motor can be used as the motor, and an encoder can be attached to the output shaft of the motor, and the X-ray incident angle ω can be detected based on the output pulse signal of the encoder. The ω rotation device 13 outputs a signal Sω corresponding to the detected incident angle ω. The incident angle signal Sω is sent to the control device 14 in FIG.

In FIG. 1, the X-ray counter 9 is supported by a support base (not shown). A 2θ rotation device 16 is connected to the support base. When the 2θ rotation device 16 operates, the support base rotates as indicated by an arrow C around the ω axis. This rotation changes the angle 2θ of the X-ray counter 9 with respect to the X-ray optical axis. The 2θ rotation device 16 includes, for example, a motor having a structure capable of controlling the rotation angle as a drive source. If a pulse motor is used as the motor, the detection angle 2θ can be detected based on a pulse signal supplied to the pulse motor. It is also possible to use a servo motor as the motor, attach an encoder to the output shaft of the motor, and detect the detection angle 2θ based on the output pulse signal of the encoder. The 2θ rotation device 16 outputs a signal S _2θ corresponding to the detected detection angle 2θ. This detection angle signal S _2θ is sent to the control device 14 in FIG.

  In FIG. 2, the control device 14 is configured using a computer. Specifically, a CPU (Central Processing Unit) 17, a RAM (Random Access Memory) 18, a ROM (Read Only Memory) 19, a hard disk 21 as an external storage device, and a bus 22 connecting these devices are provided. Have. A data processing unit 23, a data analysis unit 24, and an image data generation unit 26 are connected to the bus 22. In addition, a video memory 27, a D / A converter 28, and an image display device 29 as a display unit are sequentially connected to the image data generation unit 26. This image display device is configured by a flat panel display such as a CRT display, a liquid crystal display, or the like. In addition, a printer 31 as a display unit and a keyboard 32 as an input device are connected to the bus 22.

  The hard disk 21 stores program software for performing X-ray analysis, and further includes a plurality of data files for storing a plurality of types of measurement data obtained by the X-ray measurement apparatus 1 of FIG. It is done. In FIG. 2, two files for storing two types of data, that is, a first file 33a and a second file 33b are shown.

  The data processing unit 23 uses the data obtained by the X-ray measuring apparatus 1, that is, the X-ray incidence angle ω incident on the sample S, the X-ray emission angle 2θ emitted from the sample S, and the individual emission angles 2θ. For each data of the intensity I of the X-rays emitted from S, processing for facilitating analysis, for example, smoothing processing, background removal processing, and the like are performed. The data processing unit 23 can be configured as a single circuit, or can be incorporated into a program in the hard disk 21 as software.

  The data analysis unit 24 takes in the data obtained by the X-ray measurement apparatus 1 directly or via the data processing unit 23 and performs a desired analysis. The analysis mentioned here refers to a process for creating new information based on measured data. As such an analysis process, for example, a process for obtaining a peak value of a peak waveform obtained when the obtained measurement data is displayed as a graph, a so-called peak search can be considered. Further, a process for performing coordinate transformation on the measured data can be considered. The data analysis unit 24 can be configured as a single circuit, or can be incorporated into a program in the hard disk 21 as software.

  As is well known, the image data generation unit 26 includes a three-dimensional processing unit and a two-dimensional processing unit, and the X-ray incident angle ω, the X-ray emission angle 2θ, and the X-ray intensity obtained by the X-ray measurement apparatus 1. Data processing for displaying each I data in a three-dimensional, two-dimensional and one-dimensional manner on the screen of the display device 29 is performed. The image data generation unit 26 can also be configured as a single circuit, or can be incorporated into a program in the hard disk 21 by software.

  The video memory 27 is a memory for storing color data of a plurality of pixels for one frame for each of R, G, and B, for example. The D / A converter 28 converts the digital color signal corresponding to each pixel stored in the video memory 27 into an analog signal suitable for driving the display device 29.

The image data generation unit 26 performs, for example, the following processing based on the input ω, 2θ, and I data.
(A) The shape of a three-dimensional model (that is, a three-dimensional object, that is, a three-dimensional object) in a three-dimensional coordinate space is defined by calculation using a polygon mesh having a polygon as a unit. Specifically, the coordinates of the vertices of the three-dimensional model, the boundary line, the parameters of the equation expressing the surface, and the like are defined.

  (B) The three-dimensional model data obtained above is an absolute coordinate based on a virtually set origin, and this is converted into a coordinate value on the screen space based on a given viewpoint position. replace. The screen space is a two-dimensional space, and in this step, three-dimensional image data is converted into two-dimensional image data.

  (C) R, G, B video signals are generated from the two-dimensional polygons obtained above. At this time, processing that does not display an invisible portion (that is, hidden surface processing) or the like is performed.

The operation of the X-ray analyzer having the above configuration will be described below.
The X-ray measurement apparatus 1 in FIG. 1 measures two types of measurement, ie, measurement focusing on the substrate S0 and measurement focusing on the thin film S1, with different resolution, that is, resolution. Specifically, in the measurement relating to the substrate S0, the measurement is performed while changing the detection angle 2θ at fine steps with high resolution, for example, an angle of 1/100 degrees, and changing the X-ray incident angle ω accordingly. On the other hand, in the measurement relating to the thin film S1, the measurement is performed while changing the detection angle 2θ at a rough step with a low resolution, for example, an angle of 1 degree, and changing the X-ray incident angle ω accordingly.

Also, the entire region of the X-ray incident angle ω and the X-ray detection angle 2θ is not scanned, but the first region (ω ₁ , 2θ _{1 to} ω ₂ , Measurement is performed in the range of 2θ ₂ ). The second region seems to come out peak waveform _{(ω 3, 2θ 3 ~ω 4} , 2θ 4) Measurement range of do is the thin film S1. As described above, the measurement for the substrate S0 and the measurement for the thin film S1 are performed under different measurement conditions, and are stored separately in different files 33a and 33b in FIG. If the scanning of ω and 2θ is not performed over the entire region but is performed by selecting the region considered necessary as described above, the measurement can be completed in a very short time.

  In setting the resolution, instead of adjusting the resolution according to the step angle, the resolution can be made to correspond to the change of the measurement object by changing the optical system. Specifically, the thin film S1 includes an optical system having a low resolution, such as an optical system including a slit, and the substrate S0 includes an optical system having a high resolution, such as a crystal monochromator. An optical system is used.

  When high resolution measurement is performed on the substrate S0, the X-ray incident angle data ω, the X-ray exit angle data 2θ, and the X-ray intensity data I detected by the X-ray counter 9 are obtained. These data are stored in the first file in the hard disk 21 of FIG. 2 as the first measurement result. Further, when measurement with a low resolution related to the thin film S <b> 1 is performed, the obtained data of ω, 2θ, and I are stored in the second file in the hard disk 21. Thus, a plurality of types of measurement data obtained under different measurement conditions are stored in different files.

  The CPU 17 uses the two types of data obtained under different measurement conditions, the ω, 2θ, and I data in the first file and the ω, 2θ, and I data in the second file as image data according to the program. The data is sent to the generation unit 26. The image data generation unit 26 performs three-dimensional image processing, two-dimensional image processing, and one-dimensional image processing based on each data of ω, 2θ, and I, and obtains the obtained image information in the video memory 27, D / A The image is displayed on the screen of the display device 29 through the converter 28.

  FIG. 3 shows an example of display contents displayed on one screen 34 in this way. In this screen display, symbol D is a three-dimensional image, symbol E is a two-dimensional image, and symbol F is a one-dimensional image. In the three-dimensional image D, the three axes of the ω axis, the 2θ axis, and the I axis are three-dimensionally displayed in the two-dimensional plane, and the ω, 2θ, I in the first file 33a in FIG. The data is plotted to display the first profile P1 in three dimensions, and the ω, 2θ, and I data in the second file 33b are plotted to display the second profile P2 in three dimensions.

  The surface of each profile is displayed in a color corresponding to the intensity of the X-ray intensity I. In this embodiment, the display color changes from “stronger” to “weaker”. It changes continuously as “red” → “yellow” → “green” → “blue”. The middle part of each color is displayed in a color that is a mixture of each color. Note that each of the first profile P1 and the second profile P2 is independently three-dimensionally image processed by the image data generation unit 26 of FIG. 2, and each viewpoint can be changed by changing the viewpoint position. It is displayed as a three-dimensional image as seen from the position. Therefore, for example, when the first profile P1 and the second profile P2 viewed from the direction of the arrow H are displayed as a three-dimensional image, the second profile P2 is hidden behind the first profile P1, as shown in FIG. The status is displayed. In this case, the portion where the first profile P1 and the second profile P2 overlap is preferentially displayed with the first profile P1 existing on the near side, and the second profile P2 existing on the far side is deleted.

  As described above, when two measurement data obtained under two different measurement conditions are displayed in three dimensions within a common three-dimensional coordinate, that is, a three-dimensional display, the two measurement data are individually displayed and observed. Compared to the measurement data, the measurement data can be compared easily and accurately. Specifically, the difference in X-ray intensity I can be visually discriminated from the difference in color display. Also, the difference in lattice constant can be determined from the difference in 2θ. Further, the difference in crystal orientation can be determined from the difference in ω.

  Next, in the two-dimensional image E in the screen 34 of FIG. 3, the first profile P1 and the second profile P2 are displayed on the two-dimensional coordinates of ω-2θ selected from the three-dimensional coordinates in the three-dimensional image D. . In this case, each profile also includes planar X-ray intensity information, and the display color changes from “red” to “yellow” to “green” as the X-ray intensity changes from strong to weak. → It changes continuously like “blue”.

  At this time, if there is an overlap in the measurement area of each profile, it is desirable to display the upper data in a translucent manner. In this way, not only can the upper data be visually observed, but the lower data can also be visually observed simultaneously.

  Next, in the one-dimensional image F, the first profile P1 is displayed by the line G on the two-dimensional coordinate of I-2θ in the three-dimensional image D. Of course, the second profile P2 can be displayed, and both P1 and P2 can be displayed simultaneously.

  As described above, according to the present embodiment, the data in the first file 33a and the data in the second file 33b in FIG. Since three-dimensional display is performed on one common three-dimensional coordinate in the screen 34, each measurement data can be observed easily and accurately. Further, by observing both the two-dimensional display displayed in the two-dimensional image E and the one-dimensional display displayed in the one-dimensional image F, a more accurate observation can be performed.

  In the above description, the two-dimensional coordinate of ω-2θ is taken in the two-dimensional image E, but the two-dimensional coordinate of I-2θ can be taken instead of or in addition to this. In the above description, the two-dimensional coordinates of I-2θ are taken in the one-dimensional image F, but instead of or in addition to this, the two-dimensional coordinates of ω-2θ and the two-dimensional coordinates of ω-I. You can also take

  The above description is for the case where the two types of measurement data stored in the first file 33a and the second file 33b in FIG. 2 are directly displayed and processed without being processed. In addition to this, in the present embodiment, a more useful display can be performed using the data processing unit 23 and the data analysis unit 24 of FIG. This will be described below.

  FIG. 5A and FIG. 5B are displays relating to measurement data before data processing. 5A and 5B are the same two-dimensional displays as the two-dimensional image E in FIG. 3, and FIG. 5A shows the display on the I-2θ coordinate, and FIG. The display on the −2θ coordinate is shown. As shown in the figure, when the measurement data before data processing is displayed as it is, the display surface of two-dimensional display, that is, flat display is displayed in a very rough state. In this situation, it is difficult to see the display and peak search is difficult.

  The data processing unit 23 in FIG. 2 performs data processing on the measurement data stored in the first file 33a and the second file 33b. Data processing is processing that does not create any new information from the obtained measurement data, but simply adds some processing to the measurement data. As such data processing, for example, smoothing processing can be performed. This smoothing process is a process for smoothing the surface state of the rough measurement data shown in FIG. If three-dimensional data processing and two-dimensional data processing are performed by the image data generation unit 26 after performing this processing, a profile display with a smooth surface is obtained as shown in FIGS. 6 (a) and 6 (b). can get.

The smoothing process can be performed, for example, by combining a Gaussian function and measured intensity data by convolution integration. That is,
The measured intensity data is I (ω, 2θ), and the Gaussian function is G (ω, 2θ) = exp (− (ω / W ₀ ) ² − (2θ / W ₁ ) ² ) / πW ₀ W ₁
Then, the smoothed data I ′ (ω, 2θ) is
I ′ (ω, 2θ) = Σ _{ω ′} Σ _{2θ ′} G (ω−ω ′, 2θ−2θ ′) I (ω ′, 2θ ′)
Obtained by. Here, W ₀ and W ₁ are quantities representing the degree of smoothing, and the larger these values, the smoother. The operator changes these quantities to obtain the desired smoothed data.

  In addition, the data processing unit 23 may perform background removal processing as data processing on the measurement data stored in the first file 33a and the second file 33b or the data after being subjected to the smoothing processing. it can. This background removal processing is to display only necessary data in an easy-to-read manner by removing information below a certain level with respect to the coarse measurement data shown in FIG. 5 or the data after smoothing processing shown in FIG. Process. If this processing is performed, as shown in FIGS. 7A and 7B, the portion where the X-ray intensity I is equal to or smaller than a predetermined value is erased, and the first profile P1 and the second profile P2 become easy to see.

  The background process is a process of estimating the intensity of a region other than the peak and removing it from the data, for example. Specifically, first, the background function B (ω, 2θ) is set as a polynomial function, and the polynomial function is determined by fitting with data. Then, the function value is subtracted from the measured data. In the fitting, it is desirable to recognize the data belonging to the peak and not use it. In general, since the peak is data protruding from the background, it can be recognized that the peak is significantly larger than the background function.

  Next, the data analysis unit 24 of FIG. 2 performs data such as smoothing processing, background removal processing, etc. on the measurement data stored in the first file 33a and the second file 33b, or by the data processing unit 23. Peak search processing as analysis processing is performed on the data after processing. This peak search process is a process for calculating the tip of the peak waveform appearing in the X-ray measurement figure, that is, the peak position by calculation. This calculation process can be performed on the measurement data itself shown in FIG. 5, but the reliability is improved when the calculation process is performed on the data after completion of the data processing as shown in FIG.

In the peak search process, for example, the following process is performed. That is, since the peak is larger than the surrounding points, such a point is detected first, and if it is significantly larger, it is set as the peak. The fact that the magnitude is significant means that the integrated intensity I _{P of the} peak is sufficiently larger than the error σ (I _P ).

  The 1-dimensional, 2-dimensional, and 3-dimensional image data is generated by the image data generation unit 26 in FIG. 2 for the data after such peak search processing, and an image display is performed based on these image data. A one-dimensional image F, a two-dimensional image E, and a three-dimensional image H as shown in FIG. 3 are displayed on the screen of the device 29. Since each image displayed at this time is based on the image data after being subjected to the peak search process, the accuracy of the peak position in each image F, E, H is very high and can be clearly displayed. In order to clearly show the peak position, the program can be configured to display the peak position in dots. Here, the dot display is to display in a dot shape. Specifically, “x” mark, “+” mark, “o” mark, “re” mark, etc. Can be displayed.

  FIG. 8 shows a peak search process performed by the data analysis unit 24 on the data after the smoothing process or background removal process by the data processing unit 23 in FIG. A state in which a “+” mark is displayed on the X-ray measurement figure which is a one-dimensional image is shown. FIG. 9 shows a state in which the coordinates of the peak position obtained by the calculation are displayed on the screen of the display device 29 in a table format. If both the X-ray measurement figure and the peak position mark are simultaneously displayed as shown in FIG. 8, the determination becomes very easy. Further, by referring to the table of FIG. 9 at the same time, a very accurate judgment can be made. Note that the peak position display indicated by “+” as shown in FIG. 8 can also be displayed on the two-dimensional image E and the three-dimensional image H shown in FIG.

  In the case where a plurality of measurement data have regions that overlap each other, and when the peak search process is performed on these measurement data, a plurality of tables shown in FIG. 9 are displayed corresponding to each data. By referring to this table for the “+” mark on the screen, it is possible to determine which data peak position is in the overlapping area.

  Next, the data analysis unit 24 in FIG. 2 performs coordinate conversion processing as necessary. Hereinafter, the coordinate conversion process will be described. As described above, as shown in FIG. 10A, the reciprocal lattice map measurement is based on the X-ray intensity information in the section Se where the angle around the Y axis of the reciprocal space Re, that is, the in-plane rotation angle related to the sample is constant. Measure. If the measurement surface Se is to be measured in the region indicated by reference numeral A0 in FIG. 11, the X-ray incident angle ω and the X-ray detection angle 2θ in FIG. It is decided by.

Then, by such measurement, for example, a two-dimensional image E in FIG. 3 is obtained and used for analysis. For the analysis in the reciprocal lattice map of today, not only in such an analysis process, in FIG. 11 (omega, 2 [Theta]) measurement areas A0 specified by the coordinates defined by the transverse axis Q _H and vertical Q _N Further analysis is performed by converting the coordinate system to a reciprocal lattice coordinate system.

  The data analysis unit 24 in FIG. 2 can perform such coordinate conversion processing. When the coordinate conversion is performed, the two-dimensional image E in FIG. 3 is converted into a display as shown in FIG. In this display, for example, whether the peak positions of the peak waveform P1 and the peak waveform P2 are on the vertical line L0 or deviated from the vertical line has a significant meaning as a measurement result.

  As described above, according to the present embodiment, measurements under different measurement conditions for obtaining the profile P1 and the profile P2 in FIG. 3 are performed separately. These data were finally connected on one screen and displayed on one coordinate system such as one-dimensional coordinate, two-dimensional coordinate, or three-dimensional coordinate. As a result, since two or more pieces of data can be compared on one coordinate system, the reliability of analysis can be improved.

  In addition, measurement is not performed over all measurement conditions, but only the necessary area is measured, and the results obtained are connected by image processing and displayed on one screen. Can be shortened.

  In addition, since the measurement result displayed by the three-dimensional image, that is, the stereoscopic image, is obtained after analysis processing, for example, peak search, coordinate conversion, etc., the measurement result is very easy for the operator to see. .

(Modification)
In the above embodiment, the sample S is a material obtained by epitaxially growing the GaAs thin film S ₁ on the Si substrate S ₀ . However, the sample is not limited to this type, and other types of substances can be used as the sample S. For example, it can be a simple substance of Si substrate, a simple substance of thin film S1, or a simple substance or a laminate of any substance whose structure is desired to be known.

Further, the sample S may be a plurality of substances having different manufacturing conditions even though they are the same type of substance. For example, when the material made by epitaxial growth of a GaAs thin film S ₁ on the Si substrate S ₀ and the sample S, the temperature at the time of production, the pressure and the like during production changes, that different material physical properties are produced Can be considered. In this case, a plurality of substances having different physical properties can be used as the sample S, even if they are of the same type.

  In the above embodiments, the environment in which the sample is placed during the analysis, that is, the atmosphere, is considered to be in a certain condition. However, when the environment around the sample changes during analysis, different measurement data can be obtained in each environment. In this case, the environmental change may be, for example, a temperature change, a gas atmosphere change, or the like.

(Second Embodiment)
FIG. 13 shows an X-ray measurement apparatus for carrying out another embodiment of the X-ray analysis method according to the present invention. Since many parts of the X-ray measuring apparatus 41 shown here are the same as those of the X-ray measuring apparatus 1 shown in FIG. 1, the same components are denoted by the same reference numerals and the description thereof is omitted. Further, the reciprocal lattice map measurement for the sample S by the X-ray measurement apparatus 41 is the same as in the embodiment of FIG. Further, as the control device for controlling the operation of the X-ray measurement device 41, the control device 14 shown in FIG. 2 can be used.

  Hereinafter, the difference between the X-ray measurement apparatus 41 and the X-ray measurement apparatus 1 of FIG. 1 will be described. First, consider the ω axis, χ (chi) axis, and φ axis for the sample S. The ω-axis is an axis extending in the direction perpendicular to the paper surface of FIG. 13 so as to intersect the X-ray optical axis. The χ axis is an axis that intersects the ω axis through the surface of the sample S. The φ axis is an axis that intersects both the ω axis and the χ axis. The sample S is supported by a φ axis rotation system (not shown) that rotates the sample S around the φ axis. This φ axis rotation system is supported by a χ axis rotation system (not shown) that rotates the sample S around the χ axis. The χ axis rotation system is supported by a ω axis rotation system (not shown) that rotates the sample S around the ω axis.

  The X-ray measurement device 41 includes a ω rotation device 42, a χ rotation device 43, and a φ rotation device 44. The ω rotating device 42 rotates the sample S around the ω axis by driving the ω rotating system. Thereby, the incident angle ω of the X-ray with respect to the sample S is changed. Further, the χ rotation device 43 rotates the sample S around the χ axis by driving the above χ rotation system. The rotation around the χ axis is performed to change the angle χ around the tilt axis of the sample, which is one of two azimuth angles that determine the orientation of the sample. Further, the φ rotating device 44 rotates the sample S around the φ axis by driving the φ rotating system. The rotation around the φ axis is performed to change the angle φ around the in-plane rotation axis of the sample, which is one of the two azimuth angles that determine the sample's orientation.

When X-ray analysis is performed using the X-ray measuring apparatus 41 having the above-described configuration, the tilt angle χ around the χ axis with respect to the sample S is changed, or the in-plane rotation angle φ around the Φ axis with respect to the sample S is changed. In addition, the reciprocal lattice map measurement by the scanning of (ω, 2θ) described in relation to FIG. 1 can be performed. Accordingly, more effective data can be obtained when analyzing the sample S. In FIG. 2, the X-ray measuring apparatus 41 X-ray incident angle signal S _omega, in addition to the X-ray detection angle signal S _{2 [Theta]} and X-ray intensity signal S _I, signal and in-plane rotation angle indicates a tilt angle chi phi Is sent to the control device 14.

(Third embodiment)
Next, the case where the X-ray analysis method and the X-ray analysis apparatus according to the present invention are applied to pole measurement will be described as an example. As already described with reference to FIG. 10B, the pole measurement is performed when the X-ray incident angle ω and the X-ray detection angle 2θ of the reciprocal lattice space Re are constant and the sample is rotated in-plane around the Y axis. It is considered that X-ray intensity information on the obtained curved surface Su is measured.

FIG. 14 shows an X-ray measuring apparatus 51 of the X-ray analyzer according to the present invention for performing pole measurement. As a control device for controlling the operation of the X-ray measurement device 51, the control device 14 shown in FIG. 2 can be used. Since the mechanism itself of the X-ray measuring apparatus 51 is the same as that of the X-ray measuring apparatus 41 shown in FIG. 13, the same components are denoted by the same reference numerals, and the description of these mechanisms itself is omitted. Incidentally, in FIG. 2, X-ray measuring device 51, the X-ray incident angle signal S _omega, in addition to the X-ray detection angle signal S _{2 [Theta]} and X-ray intensity signal S _I, signal and in-plane rotation angle indicates a tilt angle χ A signal indicating φ is sent to the control device 14. In addition, the sample S used for the measurement in the present embodiment is not a sample having a laminated structure in which a thin film is laminated on a substrate as shown in FIG. 13, but a single substance. In the present embodiment, the distribution of crystals in the sample S is measured by the X-ray measurement device 51.

  In this embodiment, the X-ray intensity is measured by the X-ray counter 9 while changing the tilt angle χ and the in-plane rotation angle φ while maintaining the X-ray incident angle ω and the X-ray detection angle 2θ constant. Specifically, (1) (near χ = 0 °, φ = 0 ° to 360 °), (2) (near χ = 30 °, φ = 0 ° to 360 °), and (3) (χ = Three types of measurements are performed under three different measurement conditions (near 90 °, φ = 0 ° to 360 °).

  As a result of the above measurement, for example, a display as shown in FIG. 15 is obtained on the screen 34 of the display. In the figure, symbol F is a one-dimensional image, symbol E is a two-dimensional image, and symbol D is a three-dimensional image. In the three-dimensional image D, the coordinates provided in the circumferential direction are φ-axis coordinates, the coordinates provided in the radial direction are χ-axis coordinates, and the coordinates provided in the height direction of the perspective view are I-axis coordinates. It is. The φ-axis coordinates are coordinates for plotting the in-plane rotation angle φ in FIG. The χ-axis coordinates are coordinates for plotting the tilt angle χ in FIG. The I-axis coordinates are coordinates for plotting the X-ray intensity I detected by the X-ray counter 9 in FIG.

  In this embodiment, (1) (near χ = 0 °, φ = 0 ° to 360 °), (2) (near χ = 30 °, φ = 0 ° to 360 °), and (3) (χ = Three types of measurements are performed under three different measurement conditions (near 90 °, φ = 0 ° to 360 °). In the three-dimensional image D of FIG. 15, the outermost profile P1 shows the measurement result obtained under the measurement condition (1). The intermediate profile P2 shows the measurement result obtained under the above measurement condition (2). Further, the profile P3 at the center shows the measurement result obtained under the measurement condition (3).

  In the three-dimensional image D, the X-ray intensity information I is displayed in different colors. Specifically, the colors are classified in the order of “blue” → “green” → “yellow” → “red” from a position having a low intensity I to a position having a high intensity I, and the intermediate portion is indicated by a mixed color of each color. The two-dimensional image E corresponds to a planar image when the three-dimensional image D is viewed from above. Also in the two-dimensional image E, the difference in the X-ray intensity I is displayed by color coding. For example, the colors are classified in the order of “blue” → “green” → “yellow” → “red” from a position having a low intensity I to a position having a high intensity I, and the middle portion is indicated by a mixed color of each color. The one-dimensional image F corresponds to a profile obtained by cutting the three-dimensional image D along a vertical section. In the one-dimensional image F, the horizontal axis is the χ axis (tilt angle), and the vertical axis is I (X-ray intensity).

  In the present embodiment, measurement is not performed over all angles with respect to the ω axis, χ axis, and φ axis in FIG. 14, but measurement is performed only in the above three ranges (1), (2), and (3). The measurement data is combined as one image data composed of one-dimensional image data, two-dimensional image data, and three-dimensional image data by the image data generation unit 26 of FIG. 2, and the one image data is combined as shown in FIG. The information is displayed in one screen 34. For this reason, the data in the required area can be obtained without shortage, and the measurement time can be remarkably shortened compared with the case where measurement is performed over all the areas of ω, χ, and φ.

  As described above, according to the present embodiment, measurements under different measurement conditions for obtaining the profile P1, the profile P2, and the profile P3 in FIG. They are connected on the screen and displayed on one coordinate system such as one-dimensional coordinates F, two-dimensional coordinates E, or three-dimensional coordinates D. As a result, since two or more data can be compared on one coordinate system, the reliability of the analysis is improved.

  In addition, measurement is not performed over all measurement conditions, but only the necessary area is measured, and the results obtained are connected by image processing and displayed on one screen. Can be shortened.

  In addition, since the measurement result displayed by the three-dimensional image D, that is, the stereoscopic image is after analysis processing, for example, peak search, coordinate conversion, etc., the measurement result is very easy for the operator to see. Yes.

(Modification)
In the above embodiment, extreme point measurement was performed on one type of sample S. However, it is also possible to perform pole measurement on two or more types of samples to obtain measurement data, and display these plural types of measurement data together in one screen.

  Further, the sample S may be a plurality of substances having different manufacturing conditions even though they are the same type of substance. For example, in the case where one kind of substance is used as the sample S, it is conceivable that substances having different physical properties are produced when the temperature at the time of production of the substance, the pressure at the time of production, and the like change. In this case, a plurality of substances having different physical properties can be used as the sample S, even if they are of the same type.

  In the above embodiments, the environment in which the sample is placed during the analysis, that is, the atmosphere, is considered to be in a certain condition. However, when the environment around the sample changes during analysis, different measurement data can be obtained in each environment. In this case, the environmental change may be, for example, a temperature change, a gas atmosphere change, or the like.

(Other embodiments)
The present invention has been described with reference to the preferred embodiments. However, the present invention is not limited to the embodiments, and various modifications can be made within the scope of the invention described in the claims.

  For example, in the above embodiments, the present invention is applied to the measurement using the parallel beam method, but the present invention can also be applied to the X-ray measurement using the concentrated method.

  In the embodiment of FIG. 3, two types of data are obtained by changing the measurement conditions for one sample. In the embodiment of FIG. 15, three types of data are obtained by changing measurement conditions for one sample. Further, data processing and data analysis were performed on these data. However, four or more types of data to be measured may be used. In addition, the present invention can be applied when two or more types of data are obtained from two or more samples instead of one sample.

  The X-ray analysis method and the X-ray analysis apparatus according to the present invention are preferably used when a substance is analyzed nondestructively. Moreover, it is suitably used when it is necessary to compare a plurality of types of data obtained from one or a plurality of substances.

It is a figure which shows an example of the X-ray measuring apparatus used with the X-ray analyzer which concerns on this invention. 1 is a block diagram showing an embodiment of an X-ray analysis apparatus according to the present invention. It is a figure which shows an example of the image displayed on the screen of the display apparatus used with the apparatus of FIG. It is a figure which shows the modification of a part of display shown in FIG. It is a figure which shows a part of display shown in FIG. 3, Comprising: It is a figure which shows the example which displayed the measured data as it is. It is a figure which shows a part of display shown in FIG. 3, Comprising: It is a figure which shows the example which performed the smoothing process to the measured data, and was displayed. It is a figure which shows a part of display shown in FIG. 3, Comprising: It is a figure which shows the example which performed the background removal process and displayed on the measured data. FIG. 4 is a diagram showing a part of the display shown in FIG. 3, and is a diagram showing an example of a state in which a result after peak search is instructed. It is an example of the image displayed on the screen of a display apparatus, Comprising: It is a figure which shows the state which displayed the result of the peak search in tabular form. It is a figure which shows the example of an X-ray-analysis method typically, Comprising: (a) shows reciprocal lattice map measurement, (b) shows pole measurement. It is a figure which shows typically the measuring method of a reciprocal lattice map measurement. It is a graph which shows an example of a coordinate transformation process. It is a figure which shows other embodiment of the X-ray measuring apparatus used with the analyzer which concerns on this invention. It is a figure which shows other embodiment of the X-ray measuring apparatus used with the analyzer which concerns on this invention. It is a figure which shows the state which displayed on the screen the result of the measurement performed using the X-ray measuring apparatus of FIG.

Explanation of symbols

1. 1. X-ray measuring device, 2. filament, Rotating target,
4). X-ray generator, 6. 6. Multilayer film mirror Parallel beam forming device,
8). 8. Beam adjusting device X-ray counters 11a, 11b. slit,
12a, 12b. Light receiving slit, 14. Control device, 21. hard disk,
22. Bus, 26. Image data generation unit, 29. Image display device,
31. Printer, 32. Keyboard 33a, 33b. File, 34. screen,
D. 3D image, E.E. Two-dimensional image; A one-dimensional image; line,
P1, P2. Profile, S. Sample, S0. Substrate, S1. Thin film

Claims (9)

Obtain multiple types of X-ray measurement data under different measurement conditions,
Perform data analysis processing to generate new information based on these multiple types of X-ray measurement data,
Generating three-dimensional image data on common stereoscopic image coordinates corresponding to each of the plurality of types of X-ray measurement data and the new information;
Based on the three-dimensional image data, a stereoscopic image corresponding to the X-ray measurement data and the new information is displayed on the screen of the display means ,
The plurality of types of X-ray measurement data includes a combination of an X-ray incident angle ω to the sample, an X-ray detection angle 2θ emitted from the sample, and an X-ray intensity I emitted from the sample,
The different measurement conditions are
(1) Whether the range of the incident angle ω is different,
(2) Whether the range of the X-ray detection angle 2θ is different,
(3) Both the X-ray incident angle ω and the X-ray detection angle 2θ are different, or
(4) Whether the step interval when scanning and moving the X-ray incident angle ω and the X-ray detection angle 2θ is different,
An X-ray analysis method characterized by being any one of the data . Obtain multiple types of X-ray measurement data under different measurement conditions,
Perform data analysis processing to generate new information based on these multiple types of X-ray measurement data,
Generating three-dimensional image data on common stereoscopic image coordinates corresponding to each of the plurality of types of X-ray measurement data and the new information;
Based on the three-dimensional image data, a stereoscopic image corresponding to the X-ray measurement data and the new information is displayed on the screen of the display means,
The plurality of types of X-ray measurement data includes an X-ray incident angle ω to the sample, an X-ray detection angle 2θ from the sample, and one of two azimuth angles that determine the sample orientation. A combination of the angle χ, the angle φ around the in-plane rotation axis of the sample, which is one of the two azimuth angles that determine the sample orientation, and the intensity I of the X-ray emitted from the sample,
The different measurement conditions are
(1) Whether the range of the incident angle ω is different,
(2) Whether the range of the X-ray detection angle 2θ is different,
(3) Whether both the X-ray incident angle ω and the X-ray detection angle 2θ are different,
(4) Step intervals when scanning and moving the X-ray incident angle ω and the X-ray detection angle 2θ are different, or
(5) Whether the angle χ around the tilt axis or the angle φ around the in-plane rotation axis is different,
An X-ray analysis method characterized by being any one of the data . Obtain multiple types of X-ray measurement data under different measurement conditions,
Perform data analysis processing to generate new information based on these multiple types of X-ray measurement data,
Generating three-dimensional image data on common stereoscopic image coordinates corresponding to each of the plurality of types of X-ray measurement data and the new information;
Based on the three-dimensional image data, a stereoscopic image corresponding to the X-ray measurement data and the new information is displayed on the screen of the display means,
The plurality of types of X-ray measurement data include an X-ray detection angle 2θ emitted from the sample, an angle χ around the tilt axis of the sample, which is one of two azimuth angles that determine the sample orientation, and two samples that determine the sample orientation. It consists of a combination of the angle φ around the in-plane rotation axis of the sample, which is another azimuth angle, and the intensity I of the X-ray emitted from the sample,
The different measurement conditions are
(1) Whether the range of the angle χ around the tilt axis is different,
(2) Whether the angle φ around the in-plane rotation axis is different,
(3) Both the angle χ around the tilt axis and the angle φ around the in-plane rotation axis are different,
(4) The step interval when scanning and moving the angle χ around the tilt axis and the angle φ around the in-plane rotation axis is different, or
(5) Whether the range of the X-ray detection angle 2θ is different,
An X-ray analysis method characterized by being any one of the data . The X-ray analysis method according to any one of claims 1 to 3 , wherein the data analysis process is a peak search process and / or a coordinate conversion process. The X-ray analysis method according to any one of claims 1 to 4 , wherein two-dimensional image data is generated in addition to the three-dimensional image data, and the three-dimensional image data is displayed on a screen of the display means. An X-ray analysis method characterized by displaying a corresponding stereoscopic image and displaying a two-dimensional image corresponding to the two-dimensional image data. 6. The X-ray analysis method according to claim 5 , wherein display indicating the peak value obtained by the peak search process is performed on the stereoscopic image or the two-dimensional image. The X-ray analysis method according to any one of claims 1 to 6 , wherein the plurality of types of X-ray measurement data are obtained with respect to a sample obtained by forming a thin film on a substrate. An X-ray analysis method characterized in that there are two types of measurement data and measurement data obtained for the thin film. (A) an X-ray measurement apparatus that irradiates a sample with X-rays and detects X-rays emitted from the sample by an X-ray detection unit;
Data storage means for storing a plurality of measurement data obtained under different measurement conditions depending on the X-ray measurement apparatus;
Display means for displaying an image;
Data analysis means for generating new information based on a plurality of measurement data obtained under different measurement conditions;
Image data generating means for generating three-dimensional image data for displaying a stereoscopic image on the display means;
The analysis result of the data analysis means is displayed on the stereoscopic image by the image data generation means,
The image data generation means includes a plurality of measurement data obtained under the different measurement conditions and three-dimensional image data on a common stereoscopic image coordinate corresponding to each of new information generated by the data analysis means. It generates a,
(B) The plurality of measurement data includes a combination of an incident angle ω of X-rays to the sample, a detection angle 2θ of X-rays emitted from the sample, and an intensity I of X-rays emitted from the sample,
The different measurement conditions are
(1) Whether the range of the incident angle ω is different,
(2) Whether the range of the X-ray detection angle 2θ is different,
(3) Both the X-ray incident angle ω and the X-ray detection angle 2θ are different, or
(4) Whether the step interval when scanning and moving the X-ray incident angle ω and the X-ray detection angle 2θ is different,
Or any of the data
(C) The plurality of measurement data includes an X-ray incident angle ω to the sample, an X-ray detection angle 2θ from the sample, and one of two azimuth angles that determine the sample orientation. A combination of the angle χ, the angle φ around the in-plane rotation axis of the sample, which is one of the two azimuth angles that determine the sample orientation, and the intensity I of the X-ray emitted from the sample,
The different measurement conditions are
(1) Whether the range of the incident angle ω is different,
(2) Whether the range of the X-ray detection angle 2θ is different,
(3) Whether both the X-ray incident angle ω and the X-ray detection angle 2θ are different,
(4) Step intervals when scanning and moving the X-ray incident angle ω and the X-ray detection angle 2θ are different, or
(5) Whether the angle χ around the tilt axis or the angle φ around the in-plane rotation axis is different,
Or any of the data
(D) The plurality of measurement data includes the detection angle 2θ of X-rays emitted from the sample, the angle χ around the tilt axis of the sample, which is one of the two azimuth angles that determine the sample orientation, and the two that determine the sample orientation It consists of a combination of the angle φ around the in-plane rotation axis of the sample, which is another azimuth angle, and the intensity I of the X-ray emitted from the sample,
The different measurement conditions are
(1) Whether the range of the angle χ around the tilt axis is different,
(2) Whether the angle φ around the in-plane rotation axis is different,
(3) Both the angle χ around the tilt axis and the angle φ around the in-plane rotation axis are different,
(4) The step interval when scanning and moving the angle χ around the tilt axis and the angle φ around the in-plane rotation axis is different, or
(5) Whether the range of the X-ray detection angle 2θ is different,
Is one of the data
(E) An X-ray analyzer characterized by that. 9. The X-ray analysis apparatus according to claim 8 , wherein the data analysis means performs a peak search process and / or a coordinate conversion process.

Images