JP2007055698A - Stacker crane - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suppress vibration transmitted to a substrate (wafer) stored inside a container (FOUP) and protect the substrate (wafer), even if inertial force received at the time of starting and braking is increased, when holding and carrying the container (FOUP) at high speed by a robot carrying the container (FOUP) in/out from a predetermined storage shelf by a stacker crane, inside a stocker of the container (FOUP) in which the substrate for semiconductor manufacturing (wafer) is stored so as to be insertable/detachable. <P>SOLUTION: In the stacker crane, a moving body 9 is traveled along a two-dimensional space facing shelves inside the stocker to carry the container (FOUP) 8 in/out from the predetermined shelf. The robot 7 is provided in the moving body 9. In conjunction with the state where an arm mechanism 7a of the robot 7 becomes a contracted-retreated form, predetermined portion of the container (FOUP) 8 is pressed by a lock member 15, and in conjunction with the state where the arm mechanism 7a of the robot 7 becomes an extended form, the lock member 15 is separated from the container (FOUP) 8 in a plan view. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

The present invention relates to a stocker having a plurality of shelves having alignment fitting means (such as a kinematic coupling mechanism) for an article (such as a FOUP) that removably accommodates a substrate (such as a wafer). Is a stacker crane equipped with a robot that can freely carry in or carry out an article from a shelf, and relates to a stable holding mechanism during article conveyance.

In recent years, it is necessary in a series of semiconductor manufacturing equipment (hereinafter referred to as stations) that perform various surface treatments (cleaning, film formation, resist, CVD, inspection, etc.) of wafers arranged along an in-process annular track in a clean room. In order to perform a proper process, the FOUP containing the wafer is often transported by using a cart (such as a cart for a suspended lifting / lowering transport device).
The FOUP containing the wafer that has undergone such surface treatment or at least a portion of the surface treatment is identified by the information attached to the tag, and subsequent necessary surface treatment is managed by the computer based on the tag information. Is done.

At this time, the time required for processing differs depending on the type of surface treatment at each station, and a stocker is provided for temporarily waiting the FOUP for reasons such as adjustment of the process time.
The stocker includes a large number of FOUP placement shelves and a stacker crane that carries FOUPs into or out of predetermined shelves.

Now, when the transported object, for example, FOUP is transported by the stacker crane that performs the cargo handling work in the stocker in this way, the FOUP placement hand portion of the robot provided on the lower surface of the FOUP and the movable base of the stacker crane. This surface is considered so that the relative position of each other does not change in the alignment fitting means such as a kinematic coupling mechanism.
By the way, as the FOUP cargo handling work efficiency in the stocker improves, the transport speed of the stacker crane is required to be increased. For this increase in the transport speed, sudden acceleration and sudden stop are natural. When stopped, the alignment fitting means receives a considerable inertial force.

Therefore, the FOUP as the object to be transported cannot maintain an appropriate positioning state on the FOUP placement hand portion of the robot in the alignment fitting means such as the kinematic coupling mechanism, and the FOUP is placed on the FOUP of the robot. There was a risk of falling from the hand.
As means for preventing such a FOUP fall accident, there is Patent Document 1 below.
This Patent Document 1 discloses the following first to third embodiments in order to prevent the FOUP from falling due to the inertial force received during conveyance by the stacker crane.

First, the first to third embodiments are
(1) In the stocker 51 shown in FIG. 14, a semiconductor substrate storage carrier (FOUP) 58 is accurately positioned and stored by the first kinematic coupling mechanism, and the front surface of the shelf group 52 arranged in an orderly manner. (2) The first arm portion 3 and the second arm portion 4 disclosed in FIGS. 1 to 13 are provided on the surface of the movable base 59. A robot composed of an arm mechanism and a hand unit 2, and the hand unit 2 can be adjusted so that it can move only in a direction perpendicular to a plane including the front surface of the carrier (FOUP) 10. The surface of the hand portion 2 and the bottom surface of the carrier 10 (corresponding to reference numeral 58 in FIG. 14) are mutually connected by a second kinematic coupling mechanism. It is based on the structure for restricting the relative position constant.

Based on the configurations (1) to (3),
First embodiment:
1 to 5, when the carrier 10 is taken out from the shelf top plate 63 by the transport arm 1, it is shown in FIG. 4 in plan view from the extended position of the hand unit 2 (state in FIG. 5 in plan view). The state moves to the retracted position (the state shown in FIG. 1 in plan view).
At this time, the carrier fall prevention means 5 is sequentially displaced in the state shown in FIGS. 5, 4, and 1 with the angular displacement of the first arm 3, and the member 5 d of the carrier fall prevention means 5 corresponds to the hand portion 2. In the extended position, the carrier 10 is not covered, and in the contracted position shown in FIGS. 2 and 3, a predetermined portion above the carrier is covered.
As a result, the carrier 10 positioned by the kinematic coupling mechanism on the hand portion 2 of the transport arm 1 is prevented from dropping due to the inertial force received at the initial and final stages of transport.

Second embodiment:
6 to 9, when the carrier 10 is taken out from the shelf top plate 63 by the transfer arm 20, the hand unit 2 is extended from the extended position (the state shown in FIG. 6 in plan view) to the retracted position (shown in plan view). 8 state).
At this time, in the extended position of the hand portion 2 shown in FIGS. 6 and 7, the protruding portion 14 a of the locking member 14 provided in the hand portion 2 is engaged from the opening of the holding groove portion 13 formed on the carrier 10 side. To do.
In this state, the pressed portion 14b of the locking member 14 is subjected to stress by the pin 12 provided on the first arm portion 3 in the process of moving the hand portion 2 shown in FIGS. 8 and 9 to the retracted position.
As a result, the locking member 14 is displaced, the tip end portion of the protruding portion 14a shifts to the concave portion 13a of the holding groove portion 13, and when stress is applied to the pressed portion 14b of the locking member 14 by the further pin 12, The spring 15 is compressed, and the engagement between the protrusion 14 a of the locking member 14 and the recess 13 a of the holding groove 13 is accurately maintained, and the carrier 10 is prevented from dropping from the hand portion 2.

Third embodiment:
10 to 13, when the carrier 10 is taken out from the shelf top plate 63 by the transport arm 30, the hand unit 2 is moved from the extended position (the state shown in FIG. 10 in plan view) to the retracted position (shown in plan view). 12 state).
At this time, in the extended position of the hand portion 2 shown in FIGS. 10 and 11, it is provided on the hand portion 2 side from the opening of the holding groove portion 17 formed on the carrier 10 side, and is integrated with the disc portion 18 b of the pulley 18. A locking portion 18a that rotates in the direction can be fitted.
Then, in the process of moving the hand portion 2 from the extended position to the retracted position, the pulley 18 rotates with the angular displacement of the first arm 3, and the locking portion 18 a is locked to the holding groove portion 13. Can be prevented from falling from the hand portion 2 of the hand.
JP 2002-265011 A

In general, many FOUPs that can be inserted and removed in a large number (for example, 24) are used for cleaning, CVD, and other various surface treatments on wafers as semiconductor manufacturing substrates. Then, it is transported along an in-process annular track or an inter-process annular track by an appropriate transport means such as a suspended lift transport device.
Then, a desired surface treatment is performed at various surface treatment stations arranged on the FOUP transport path (in particular, the in-process annular track).

In addition to these various surface treatment stations, FOUPs containing wafers that have not undergone any surface treatment, or stockers for storing FOUPs that have partially or wholly completed the necessary surface treatments are arranged at predetermined locations. ing.
By the way, along with the expansion of the field of semiconductor use and the increase in demand in each field, the surface treatment of the wafer is diversified, and the required number of wafers is steadily increasing.
Due to such a situation, the scale of the stocker is increased, the number of storage shelves for FOUP arranged along vertical and horizontal planes in the stocker is large, and the storage shelves in the stocker are accompanied with the increase in size of the wafer. The travel distance of the stacker crane that travels along a predetermined plane along the line increases, and at the same time, a quick FOUP transport is required.

Therefore, in order to more efficiently transport the FOUP by the stacker crane, high-speed transport of the stacker crane is required.
As described above, in high-speed transport of FOUP by a stacker crane, there is no room to receive an inertia force even in high-speed traveling in constant-speed traveling.
However, the acceleration of the stacker crane from the stopped state to the high speed traveling and the deceleration at the time of stopping from the high speed traveling need to be increased in order to improve the conveyance efficiency. The inertial force applied to the FOUP as the object to be conveyed during this acceleration / deceleration Becomes big.

This inertial force is generated between the support arm of the robot installed on the movable base and the article to be conveyed (FOUP), particularly at the start of descent of the movable base of the stacker crane, at the end of lift, and at the start or end of the left and right movements. The kinematic coupling mechanism exerts stress in the direction of disengagement.
When the positioning / fitting means (kinematic coupling mechanism) between the support arm of the robot and the article to be conveyed (FOUP) due to such stress is released, the article to be conveyed (FOUP) no longer slides on the support arm of the robot, It will fall. In some cases, the article to be conveyed (FOUP) may be scattered without sliding on the support arm of the robot.
Such a situation can be avoided by various means of Patent Document 1.

However, in the various means disclosed in Patent Document 1, the positioning / fitting means (kinematic coupling mechanism, etc.) between the article to be conveyed (FOUP) and the hand portion of the robot is disengaged by receiving a large inertial force. The robot hand and the article to be transported (FOUP) are tightly integrated so as to prevent vibration generated by the inertial force with respect to the article to be transported (FOUP). It is difficult.
When vibration is transmitted to the article to be conveyed (FOUP) in this way, a substrate such as a wafer accommodated in the article to be conveyed generates friction between the contact surface with the support member located in the article to be conveyed (FOUP). . This friction causes the wafer to wear and generate wear powder, and the wear powder adheres to the other surface of the wafer and causes pattern defects in processes such as photolithography. It may cause defective products.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a FOUP or other article that can accommodate a substrate such as a wafer in a detachable manner with respect to a predetermined storage shelf of a shelf group that is arranged in a row in order to store the article. In the hand part of the robot to be exchanged, in the extended form of the arm mechanism that drives the hand part, the robot hand part supports the article only by the kinematic coupling mechanism, and the retracted form of the arm mechanism that drives the hand part A means is provided for pressing a predetermined part of the article during the process of shifting to the above, and when the article is transported by a stacker crane, not only the article is prevented from falling from the hand part of the robot, but also the vibration caused by the inertial force received by the article is suppressed. And protecting stored items such as substrates in the article.

Means and effects for solving the problems

In order to solve the above-mentioned problem, a stacker crane according to claim 1 is attached to a plurality of component storage shelves arranged vertically and horizontally, a stacker crane, and an article transport movable body of the stacker crane, The robot includes a robot that exchanges articles, and the article support surface of the hand unit located at the tip of the arm mechanism of the robot and the shelf plate of the article storage shelf are provided with alignment fitting means with the articles, respectively. In the stocker, the shelf plate of the article storage shelf is formed with a notch portion in which the arm mechanism of the robot can move up and down in the extended form. When the robot arm mechanism is normally positioned and the robot arm mechanism is in the extended configuration, there is no portion overlapping the article in plan view. Has a pressing and supporting means acting on a predetermined location of the article in the process of changing the degenerate form of transportable in lanes, characterized in that the arm mechanism of the robot stacker crane transport is performed in a degraded form.

According to the invention of claim 1,
(1) Regarding a stacker crane that operates in a stocker for storing various articles having a large number of shelves, the robot set on the movable base receives the article to be conveyed and conveys it at high speed, particularly during start-up and braking. Even if the inertial force increases, the robot's hand part and the article can be maintained in a mutual positional relationship by a positioning fitting means such as a kinematic coupling mechanism, and the article is a predetermined part of the positioning fitting means and the article. Since it is pressed without play by the pressing support means acting on the place, vibration due to the inertial force can be suppressed.
(2) Since a predetermined portion of the article can be pressed in accordance with a change from the extended configuration of the arm mechanism to the retracted configuration, it is not necessary to provide a separate actuator, and wiring associated with the actuator is not required. The restriction of operation can be eliminated.
Etc. are obtained.

The stacker crane according to claim 2 is the stacker crane according to claim 1, wherein in the stocker, the article is a FOUP in which the semiconductor substrate is removably accommodated, and the predetermined place where the pressing support means acts is above the front of the FOUP. It is a part.
According to the second aspect of the present invention, the effect of the invention according to the first aspect of the cited reference is not limited to the above, and the vibration generated on the contact surface with the support member in the FOUP of the substrate detachably accommodated in the FOUP is particularly high. The generation of friction and wear powder due to this vibration can be greatly reduced, and the substrate can be prevented from being damaged and becoming defective with a considerable probability.

The stacker crane according to claim 3 is characterized in that, in the stacker crane according to claim 1 or 2, the pressing support means at a predetermined location of the article comprises the following components (A) to (G). .
(A) A pole erected at a predetermined position of a hand unit located at a tip of an arm mechanism of a robot. (B) In the arm mechanism, a predetermined arm of an arm that is connected to the hand unit and performs expansion and contraction driving of the hand unit. Structure (C) erected at a position (C) A bearing (D) provided to incline toward the upper part with respect to the structure (D) Clamp member (R) that is rotatably supported while maintaining an inclined state in the bearing E) A connecting member extending to a side portion of the clamp member (F) An engaging member for a predetermined portion of an article provided at a tip portion of the connecting member (G) The arm mechanism is engaged with the connecting member and the pole. When the engaging member is in an extended configuration, the clamping member is rotated so that the engaging member is separated from a predetermined portion of the article and does not overlap with the engaging member in the plan view. When the mechanism is in a retracted configuration that engages with the pawl, the movable member rotates in a direction that promotes the pressing force generated between the engaging member and a predetermined portion of the article as the coupling member and the pawl are engaged. Spring member that does not hinder

According to the invention according to claim 3, the effect of the invention according to claim 1 or 2 to be cited is originally
(1) A specific combination of a bearing and a spring member, and a latch attached to the end of the connecting member that does not have a movable member because the connecting member runs along a pole erected at a predetermined position of the hand portion. Since the member is swung down substantially perpendicularly to a predetermined portion of the article (FOUP), a gripping force of the article (FOUP) by the robot can be accurately obtained.
(2) Since the location where the connecting member is fixed in the clamp member substantially coincides with the location where the hand portion and the arm mechanism are connected in a plan view, it does not sway and the robot arm mechanism expands and contracts. The effect that there is no possibility of causing interference between the pole and the structure during the relative rotation between the hand portion and the arm mechanism is obtained.

The stacker crane according to claim 4 is characterized in that, in the stacker crane according to claim 1 or 2, the pressing support means at a predetermined location of the article comprises the following components (A) to (L). .
(A) A first structure erected at a predetermined position of the hand portion located at the tip of the arm mechanism of the robot. (B) A first structure that is rotatably supported in the vertical direction in the first structure. A shaft (C) A first pulley (D) fixed to the lower end portion of the first shaft (D) A screw forming body (E) provided at the upper end portion of the first shaft A clamp member (F) that moves up and down with the rotation of the first shaft (F) An engagement member (G) that is fixed to a predetermined location of an article that is fixed via a connecting member that extends to the article side of the clamp member. It is erected on the upper plane of the object, and engages with the connecting member to move the rotation range of the movable member.When the arm mechanism is in the retracted state, the engaging member faces a predetermined part of the article, and when the arm mechanism is in the extended state, The engagement member is restricted so that there is no place where the article and the engagement member overlap in plan view. A pair of poles (H) connected to the hand part, and a second structure (I) that is erected at a predetermined position of an arm that performs expansion and contraction driving of the hand part. A second shaft (J) supported in the vertical direction (J) fixed on the second shaft and engaged with the first pulley via a belt (K) on the second shaft A fixed gear (L) is a position that meshes with the previous gear in the hand portion, and is a tooth portion forming member that is positioned at least in a range where angular displacement between the hand portion of the robot and the arm is expected

According to the invention according to claim 4, the effect of the invention according to claim 1 or 2 to be cited is originally
The first axis automatically rotates in the process of changing the extension form and the contraction form of the arm mechanism of the robot, and along with the rotation of this axis, the screw forming body rotates, and the clamp member receives vertical movement control, Further, the operation range on the plane of the locking member is regulated by the pair of poles.
With this operation, the locking member accurately presses a predetermined position of the article when the arm mechanism is in the extended configuration, and does not overlap the article and the locking member in plan view when the arm mechanism is in the retracted configuration. Position change can be obtained.

The stacker crane according to claim 5 is characterized in that, in the stacker crane according to claim 1 or 2, the pressing support means at a predetermined location of the article comprises the following components (A) to (J). .
(A) A first structure erected at a predetermined position of the hand portion located at the tip of the arm mechanism of the robot (B) A pole erected at a predetermined position of the hand portion of the robot (C) The first clamp member (E) fixed to the upper end of the first shaft (D) pivotally supported so as to be able to slide in the vertical direction in the structure of (1) An engagement member (F) that is provided from a first clamp member via a connecting member in a direction orthogonal to the first axis, and that presses a predetermined portion of the article to be conveyed when the arm mechanism of the robot is in a retracted configuration. A second clamp member (G) fixed to the lower end of the first shaft (G) A spring member (H) exerting a restoring force in a direction to push up the second clamp member upward The second clamp member from the second clamp member A second axis (I) extending in a direction perpendicular to one axis A second structure (J) that is connected to the handle portion and is erected at a predetermined position of an arm that performs expansion and contraction driving of the hand portion. The second structure extends obliquely upward in the second structure and is parallel to each other in the vertical direction. When the robot arm mechanism is retracted with the engagement between the pole and the second shaft, the locking member is an article. When the robot arm mechanism is extended, the pair of guide members regulates the locking member so that it is separated from the article and does not overlap the locking member and the article in plan view.

According to the invention according to claim 5, the effect of the invention according to claim 1 or 2 to be cited is originally
The second shaft is automatically guided by the pair of guide members in the process of changing the extended form and the retracted form of the arm mechanism of the robot. When the arm mechanism is in the retracted form, the engagement operation between the pole and the second shaft is performed. As a result, the operating range on the top and bottom and the plane of the locking member is restricted.
With this operation, the locking member accurately presses a predetermined position of the article when the arm mechanism is in the extended configuration, and does not overlap the article and the locking member in plan view when the arm mechanism is in the retracted configuration. Position change can be obtained.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
First, the outline of the drawing will be described. FIG. 1 is a schematic perspective view showing the internal mechanism of the FOUP stocker. FIG. 2 is a retracted form of the robot arm mechanism supported by the movable base of the stacker crane operating in the stocker. FIG. 3 is an enlarged view of a main part of FIG. 2, FIG. 4 is a schematic plan view of the robot when the arm mechanism is in a contracted form, and FIG. 5 is a front view of the robot when the arm mechanism is in a contracted form. 6 is a schematic diagram of the right side of the robot when the arm mechanism is in a retracted configuration, FIG. 7 is a schematic diagram of the left side of the robot when the arm mechanism is in a contracted configuration, and FIG. 8 is an expanded configuration of the arm mechanism. FIG. 9 is a schematic front view of the robot when the arm mechanism is in the extended configuration, and FIG. 10 is a schematic diagram of the robot when the arm mechanism is in the extended configuration. It is a side schematic view.

FIG. 1 shows an outline of a stocker 1 installed in a clean room or the like. The stocker 1 includes a shelf group 2 in which a plurality of storage shelves 2a for storing articles (FOUP) 8 are arranged in the vertical and horizontal directions, and a stacker crane 3 for carrying articles in (FOUP) 8 to / from a predetermined storage rack 2a. is doing. The stacker crane 3 includes a movable base 9 that can run and move up and down along the shelf group 2, and a robot 7 that is provided on the movable base 9 and has an arm mechanism that can extend and retract toward the shelf group 2. The robot 7 holds the article (FOUP) 8 and carries it in and out of the storage shelf 2a. Further, the movable base 9 is connected to the shelf group 2 by a combination of operations of the traveling unit 5 traveling on the traveling rail 4 parallel to the shelf group 2 and the post unit 6 vertically provided on the traveling unit 5. Movement control is performed at an arbitrary position on the opposing plane.

Next, the principal mechanism of the present invention will be described with reference to FIGS. 2 to 10 as seen from various directions of different forms of the robot arm mechanism. In each figure, the robot 7 includes a first arm 7ax, a second arm 7ay, and a hand portion 7b that constitute an arm mechanism 7a.
Each one end of the first arm 7ax and the second arm 7ay constituting the arm mechanism 7a is rotatably connected, and the other end of the first arm 7ax is near the center of the movable base 9 in FIG. A predetermined position is pivotally connected. Then, the other end of the second arm 7ay is rotatably connected to a predetermined position in the base end portion 7bx of the hand portion 7b, and the article (FOUP) 8 is connected to the placement portion 7by of the article (FOUP) 8 as will be described later. The kinematic coupling means is positioned and placed accurately.

Note that the first arm 7ax, the second arm 7ay, and the hand portion 7b constituting the arm mechanism 7a as a component of the robot 7 are driven by a known means.
That is, with the control of the angle between the first arm 7ax and the second arm 7ay, the contracted form of the robot 7 shown in FIGS. 2 to 7 and the extended form of the robot 7 shown in FIGS. 8 to 10 are obtained. To be controlled.
At this time, the hand portion 7b is always in a constant direction (a direction orthogonal to the front surface of the shelf group 2 in FIG. 1) in any process, the change of the robot 7 from the contracted form to the extended form or the change in the opposite direction. ) Keep moving forward and backward.

Now, the stable holding mechanism means at the time of transporting the article (FOUP) 8 positioned by the kinematic coupling means on the placement part 7by of the article (FOUP) 8 in the hand part 7a of the robot 7 will be described as follows. is there.
2 to 10, reference numeral 11 denotes a pole, which is erected at a predetermined position (specifically, described later) of the hand portion 7 b of the robot 7. Reference numeral 12 denotes a structure which is erected at a predetermined position (specifically, described later) of the second arm 7ay connected to the hand portion 7b. Reference numeral 13 denotes a bearing, which includes a fixed member 13a and a movable member 13b that is rotatably supported with respect to the fixed member 13a. The fixed member 13a has a predetermined inclination angle (specifically, in the structure 12). Are supported).

A clamp member 14 is fixed to the movable member 13b of the bearing 13 and is rotatably supported while maintaining the predetermined inclination state. A locking member 15 is fixed to the clamp member 14 via a connecting member 16.
By the way, the fixed position of the structure 12 (the predetermined position), the fixed position of the pole 11 (the predetermined position), and the inclination angle of the bearing 13 (the predetermined angle) are related to each other between the connecting member 16 and the pole 11. The arm mechanism 7a is set so as to press the front central portion of the article (FOUP) 8 in plan view when the arm mechanism 7a shifts to the retracted form while maintaining the combined state.

A spring member 17 is provided between the support members extending from the structure 12 and the clamp member 14, and when the arm mechanism 7 a shifts to the extended form and the pole 11 and the connecting member 16 are separated, the locking member 15 is moved. It is biased to rotate upward. Accordingly, the locking member 15 is separated from the article (FOUP) 8, and when the arm mechanism 7a reaches the extended form, the locking member 15 and the article (FOUP) 8 are moved as shown in FIGS. Restricts the allowable rotation angle of the movable member 13b of the bearing 13 so that there is no overlapping portion in plan view.

When the article (FOUP) 8 is carried into the shelf 2ax of the storage shelf 2a by the operation of the hand portion 7a of the robot 7 or the article (FOUP) 8 placed on the shelf 2ax is taken out, the robot The seven hand portions 7b and the shelf board 2ax have three projections 18a to 18c and 19a to 19c for accurate positioning of the article (FOUP) 8, respectively.
As shown in FIG. 8, the bottom surface of the article (FOUP) 8 is formed with recesses that fit into the protrusions 18a to 18c and 19a to 19c, and the article (FOUP) 8 and The hand portion 7b of the robot 7, the article (FOUP) 8, and the shelf board 2ax constitute a kinematic coupling mechanism.

The operation of the configuration shown in FIGS. 1 to 10 will be described.
First, in a state in which the robot 7 installed on the movable base 9 of the stacker crane 3 does not support the article (FOUP) 8, the robot reaches the position of the predetermined storage shelf 2a, and is on the shelf 2ax of the storage shelf 2a. Next, a process of holding the article (FOUP) 8 and transferring it to another storage shelf 2a or a carry-out port of the article (FOUP) 8 (not shown) will be described.

First step:
As shown in FIG. 8, the arm mechanism 7a is in the extended form, and the hand portion 7b is positioned directly below the shelf board 2ax.
Second step:
A first kinematic coupling mechanism that raises the movable base 9 of the stacker crane 3 and includes protrusions 18a to 18c formed on the shelf board 2ax and a recess formed on the bottom surface of the article (FOUP) 8 facing the protrusion 18a to 18c. The fitting by the second kinematic coupling mechanism between the protrusions 19a to 19c formed on the hand portion 7b and the concave portion formed on the bottom surface of the article (FOUP) 8 facing the same is released. At the same time, the article (FOUP) 8 is accurately positioned and supported by the hand portion 7b.
In this step, since the engaging member 15 and the article (FOUP) 8 are configured so as not to overlap each other in plan view, there is no possibility that they interfere with each other.

Third step:
In the process in which the arm mechanism 7a transitions from the extended form to the retracted form, the pole 11 and the connecting member 16 are engaged as shown in FIG. 3, and the clamp member 14 moves the bearing 13 as the arm mechanism 7a further shrinks. The spring member 14 is rotated clockwise around the member 13b, the spring member 14 located at the left end of the clamp member 14 is extended, and the locking member 15 located at the right end of the clamp member 14 is positioned on the front center plane portion of the article (FOUP) 8. It leads to pressing.
Fourth step:
As the movable base 9 travels, the article (FOUP) 8 held by the robot 7 is transferred to a surface treatment station (not shown) or another predetermined storage shelf 2a.
On the other hand, an article (FOUP) 8 that is carried into the stocker 1 from an unillustrated article (FOUP) 8 entrance and is gripped by the robot 7 installed on the movable base 9 is placed on the shelf 2ax of the predetermined storage shelf 2a. When placing after positioning properly, the order of the first to fourth steps may be reversed.

  In addition, although the example using the kinematic coupling means in which the proper positioning means for the article (FOUP) placement part 7by of the robot hand part and the article (FOUP) is widely used has been described, this kinematic cup The positioning means is not limited to the ring means, and other positioning fitting means may be employed.

Next, a modified example having the same function as the above configuration will be described with reference to FIGS.
11 is a perspective view showing the peripheral mechanism of the robot 7 in the contracted form of the arm mechanism 7a, FIG. 12 is an enlarged view of the main part of FIG. 11, and FIG. 13 is a diagonal view showing the peripheral mechanism of the robot 7 in the extended form of the arm mechanism 7a. FIG. 14 is an enlarged view of the main part of FIG.
In addition, the same code | symbol is attached | subjected about the structure of the said FIGS. 1-10, and a duplication of the description is avoided.
11 to 14, reference numeral 21 denotes a first structure, which is erected at a predetermined position of the hand portion 7 b of the robot 7. Reference numeral 22 denotes a first shaft, which is rotatably supported by bearing members 21a and 21b arranged at a distance from each other in the vertical position of the structure 21 while maintaining a vertical direction.

  A first pulley 22 a is fixed to the lower portion of the first shaft 22. Reference numeral 22 b denotes a screw forming body, which is fixed to the upper portion of the first shaft 22 and is rotatably engaged with the clamp member 23. In this screwed state, the clamp member 23 is lowered when the arm mechanism 7a is shifted to the retracted form, and the clamp member 23 is raised when the arm mechanism 7a is shifted to the extended form. Reference numeral 24 denotes a locking member, which is fixed to the clamp member 23 via a connecting member 25. Reference numerals 26 a and 26 b denote a pair of poles, which are erected at predetermined positions on the planar member 21 c located above the first structure 21. This predetermined position means that when the pole 26a and the connecting member 25 are engaged, the bottom surface of the locking member 24 faces the center of the plane of the front surface of the article (FOUP) 8, and the pole 26b and the connecting member 25 Are engaged with each other, the bottom surface of the locking member 24 indicates a position away from the article (FOUP) 8 in plan view.

Reference numeral 27 denotes a second structure which is erected at a predetermined position of the second arm 7ay as a component of the arm mechanism 7a. Reference numeral 28 denotes a second shaft which is erected in the vertical direction with respect to the second structure 27 and is rotatably supported. A second pulley 28 a is fixed to the second shaft 28, and a power transmission function with the first pulley 22 a is obtained by a belt 29. Reference numeral 28b denotes a gear which is fixed to the second shaft 28. Reference numeral 30 denotes a tooth portion forming member, which is a position that meshes with a gear provided on the hand portion 7b side, and is an angle between at least the hand portion 7b of the robot 7 and the second arm 7ay connected to the hand portion 7b. It is located in the range where the displacement is expected.

The operation of the configuration disclosed in FIGS. 11 to 14 will be described.
First, when the arm mechanism 7a is in the extended configuration, as shown in FIGS. 13 and 14, the gear 28b is engaged with the left end portion in FIG. 14 in the tooth portion forming member 30, and the connecting member 25 is engaged with the pole 26b. is doing. At this time, the clamping member 23 is engaged with the tooth portion forming member 30 provided on the hand portion 7b of the robot 7 and the gear 28b in the process of changing from the retracted configuration of the arm mechanism 7a of the robot 7 to the extended configuration. The belt 29 is pushed upward by the power transmission function of the belt 29. Accordingly, since the locking member 24 is separated from the article (FOUP) 8 in a plan view, the article (FOUP) 8 is placed on the shelf 2ax (see FIG. 6) of the storage shelf 2a (see FIG. 1) in the stocker 1. Placement on the rack or unloading from the shelf 2ax is performed accurately.

Next, after placing the article (FOUP) 8 on the hand portion 7b of the robot 7 with proper positioning, the arm mechanism 7a meshes with the tooth portion forming member 30 as the arm mechanism 7a shifts to the retracted form. The position changes from the state of FIG. 14 to the state of FIG.
In this process, the first shaft 22 is rotated by the power transmission function of the belt 29. Accordingly, the connecting member 25 is rotated until it is engaged with the pole 26a, and at the same time or thereafter, the screw forming member 22b and the screw are screwed. The clamping member 23 to be combined is lowered and presses the central surface portion of the front surface portion of the article (FOUP) 8.
As a result, the article (FOUP) 8 is firmly held by the robot 7, vibrations transmitted to the article (FOUP) 8 due to the inertial force received during high-speed conveyance are suppressed, and a wafer stored in the article (FOUP) 8 or the like. Prevent damage to the board.

Next, a further modified example having an operation equivalent to that of the above configuration will be described with reference to FIGS. 15 is a perspective view showing the peripheral mechanism of the robot 7 in the contracted form of the arm mechanism 7a, FIG. 16 is an enlarged view of the main part of FIG. 15, and FIG. 17 is a diagonal view showing the peripheral mechanism of the robot 7 in the extended form of the arm mechanism 7a. 18 and 18 are enlarged views of the main part of FIG.
In addition, the same code | symbol is attached | subjected about the structure of the said FIG. 1-10, and a common component, and the duplication of the description is avoided.

15 to 18, reference numeral 41 denotes a first structure, and reference numeral 42 denotes a pole, which are erected at predetermined positions on the hand portion 7 b of the robot 7. Reference numeral 43 denotes a first shaft, which is rotatably supported by bearing members 41a and 41b provided in the first structure 41 and is slidably supported in the vertical direction. A first clamp member 44 is fixed to the upper end of the first shaft 43. Reference numeral 45 denotes a locking member, which is provided from the first clamp member 44 through a connecting member 46 in a direction orthogonal to the first shaft 43, and the article (FOUP) 8 when the arm mechanism 7a of the robot 7 is in the retracted configuration. Press the center flat part of the front side. Reference numeral 47 denotes a second clamp member, which is fixed to the lower end portion of the first shaft 43.

A spring member 48 exerts a restoring force in a direction in which the second clamp member 47 is pushed upward. A second shaft 49 extends from the second clamp member 47 in a direction perpendicular to the first shaft 43. Reference numeral 50 denotes a second structure, which is connected to the hand portion 7b of the robot 7 and is erected at a predetermined position of an arm 7ay that performs an expansion / contraction operation of the hand portion 7b. 51a and 51b are a pair of guide members, extending obliquely upward in the second structure 50, arranged parallel to each other in the vertical direction, and engaging the second shaft 49 at a mutual interval, When the arm mechanism 7a of the robot 7 is retracted with the engaging action of the pole 42 and the second shaft 49, the locking member 45 presses the central plane portion of the front portion of the article (FOUP) 8, and The arm mechanism 7a of the robot 7 is separated from the article (FOUP) 8 and is restricted so that there is no portion where the locking member 45 and the article (FOUP) 8 overlap in plan view.

The operation of the configuration disclosed in FIGS. 15 to 18 will be described.
First, when the arm mechanism 7a is in the extended configuration, the second shaft 49 and the guide member 51b are engaged as shown in FIGS. 17 and 18, and the arm mechanism 7a of the robot 7 is extended from the retracted configuration to the extended configuration. In the process of changing to, the locking member 45 rises as the second clamp member rises due to the restoring force of the spring member 48. At the same time that the locking member 45 is lifted, the locking member 45 is rotated clockwise in plan view due to the displacement of the engagement state between the shaft 49 and the guide member 51b. Accordingly, since the locking member 45 is separated from the article (FOUP) 8 in plan view, the article (FOUP) 8 is placed on the shelf 2a (see FIG. 6) of the storage shelf 2a (see FIG. 1) in the stocker 1. Placement on the rack or unloading from the shelf 2ax is performed accurately.

Next, after the article (FOUP) 8 is placed on the hand portion 7b of the robot 7 after being accurately positioned, the pole 42 and the second shaft 49 are engaged when the arm mechanism 7a shifts to the retracted form. In addition, in the process of further degeneration of the arm mechanism 7a, the state becomes as shown in FIG.
That is, when the second shaft 49 is engaged with the guide member 51a, the locking member 45 is rotated in the left direction in plan view, and is lowered together with the clamp member 47 against the restoring force of the spring member 48. (FOUP) The central surface portion of the front portion of 8 is pressed.
As a result, the article (FOUP) 8 is firmly held by the robot 7, vibrations transmitted to the article (FOUP) 8 due to the inertial force received during high-speed conveyance are suppressed, and a wafer stored in the article (FOUP) 8 or the like. Prevent damage to the board.

It is the isometric view schematic which displays the internal mechanism of the stocker for FOUP. It is a perspective view in case the arm mechanism of the robot supported by the movable base of the stacker crane which operates in a stocker is in a degenerated form. FIG. 3 is an enlarged view of a main part of FIG. 2. FIG. 3 is a schematic plan view of the robot when the arm mechanism is in a contracted form. It is a front schematic diagram of the robot when the arm mechanism is in a retracted form. It is a right side schematic diagram of a robot when an arm mechanism is in a contracted form. It is a left side schematic view of a robot when the arm mechanism is in a retracted form. It is a schematic plan view when the arm mechanism is in the extended configuration. It is a front schematic diagram of the robot when the arm mechanism is in the extended configuration. It is a right side schematic view of the robot when the arm mechanism is in the extended configuration. It is a perspective view which shows the periphery mechanism of the robot 7 in the degenerated form of the arm mechanism 7a in Example 1. FIG. It is a principal part enlarged view of FIG. It is a perspective view which shows the periphery mechanism of the robot 7 in the expansion | extension form of the arm mechanism 7a. It is a principal part enlarged view of FIG. It is a perspective view which shows the periphery mechanism of the robot 7 in the degenerated form of the arm mechanism 7a in Example 2. FIG. It is a principal part enlarged view of FIG. It is a perspective view which shows the periphery mechanism of the robot 7 in the expansion | extension form of the arm mechanism 7a. It is a principal part enlarged view of FIG.

Explanation of symbols

1 ... Stocker 2 ... Shelf group 2a ...・ ・ ・ ・ ・ ・ ・ ・ ・ Storage shelf 2ax ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ Shelf 3 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ Stacker Crane 7 ... Robot 7a ... Arm mechanism 7ax, 7ay ... ·········· Arm 7b ······································· Articles (FOUP)
9 ············································ Pole 12, 21, 27, 41, 50 ··· Structure Object 13 ......... Bearings 14, 23, 44, 47 ... ... Clamp members 15, 24, 45 ... ... Locking members 16, 25, 46 ... Connecting members 17, 48 ... Spring members 18a-18c, 19a-19c .... Projections 22, 28, 43, 49 ... Shafts 22a, 28a ... Pulley 22b ... ..... screw forming body 28b ..... gear 29 ..... belt 30 ... ... · Teeth forming members 51a, 51b ············ guide member

Claims (5)

A plurality of parts storage shelves arranged vertically and horizontally, a stacker crane, and a robot that is attached to the article transport movable body of the stacker crane and transfers articles between the article storage shelves, and an arm mechanism of the robot The article support surface of the hand portion located at the tip of the hand and the shelf board of the article storage shelf are provided with alignment fitting means for the articles, respectively, and the arm mechanism of the robot extends on the shelf board of the article storage shelf. In the stocker where the notch that can move up and down in the form is formed,
When the article is properly positioned by the alignment fitting means in the hand portion of the robot and the robot arm mechanism is in the extended form, there is no portion overlapping the article in plan view, and the arm mechanism is extended. It has a pressing support means that acts on a predetermined part of the article in the process of changing from a form to a contracted form that can be transported by a stacker crane, and the arm mechanism of the robot is transported in a retracted form. Stacker crane. 2. The stacker crane according to claim 1, wherein the article is a FOUP that removably accommodates a semiconductor substrate, and the predetermined portion where the pressing support means acts is an upper portion of the front surface of the FOUP. The stacker crane according to claim 1 or 2, wherein the pressing support means at predetermined locations of the article comprises the following components (A) to (G).
(A) A pole erected at a predetermined position of a hand unit located at a tip of an arm mechanism of a robot. (B) In the arm mechanism, a predetermined arm of an arm that is connected to the hand unit and performs expansion and contraction driving of the hand unit. Structure (C) erected at a position (C) A bearing (D) provided to incline toward the upper part with respect to the structure (D) Clamp member (R) that is rotatably supported while maintaining an inclined state in the bearing E) A connecting member extending to a side portion of the clamp member (F) An engaging member for a predetermined portion of an article provided at a tip portion of the connecting member (G) The arm mechanism is engaged with the connecting member and the pole. When the engaging member is in an extended configuration, the clamping member is rotated so that the engaging member is separated from a predetermined portion of the article and does not overlap with the engaging member in the plan view. When the mechanism is in a retracted configuration that engages with the pawl, the movable member rotates in a direction that promotes the pressing force generated between the engaging member and a predetermined portion of the article as the coupling member and the pawl are engaged. Spring member that does not hinder The stacker crane according to claim 1 or 2, wherein the pressing support means at a predetermined location of the article includes the following components (A) to (L).
(A) A first structure erected at a predetermined position of the hand portion located at the tip of the arm mechanism of the robot. (B) A first structure that is rotatably supported in the vertical direction in the first structure. A shaft (C) A first pulley (D) fixed to the lower end portion of the first shaft (D) A screw forming body (E) provided at the upper end portion of the first shaft A clamp member (F) that moves up and down with the rotation of the first shaft (F) An engagement member (G) that is fixed to a predetermined location of an article that is fixed via a connecting member that extends to the article side of the clamp member. It is erected on the upper plane of the object, and engages with the connecting member to move the rotation range of the movable member.When the arm mechanism is in the retracted state, the engaging member faces a predetermined part of the article, and when the arm mechanism is in the extended state, Restrict the engagement member from overlapping with the engagement member in plan view. A pair of poles (H) connected to the hand part, and a second structure (I) that is erected at a predetermined position of an arm that performs expansion and contraction driving of the hand part. A second shaft (J) that is freely supported and is supported in the vertical direction. A second pulley (K) that is fixed to the second shaft and engages with the first pulley via a belt. (L) A tooth portion forming member that is located at a position that meshes with a gear of the first stage in the hand portion and that is at least in a range where an angular displacement between the hand portion of the robot and the arm is expected. The stacker crane according to claim 1 or 2, wherein the pressing support means at predetermined locations of the article comprises the following components (A) to (J).
(A) A first structure erected at a predetermined position of the hand portion located at the tip of the arm mechanism of the robot (B) A pole erected at a predetermined position of the hand portion of the robot (C) The first clamp member (E) fixed to the upper end of the first shaft (D) pivotally supported so as to be able to slide in the vertical direction in the structure of (1) An engagement member (F) that is provided from a first clamp member via a connecting member in a direction orthogonal to the first axis, and that presses a predetermined portion of the article to be conveyed when the arm mechanism of the robot is in a retracted configuration. A second clamp member (G) fixed to the lower end of the first shaft (G) A spring member (H) exerting a restoring force in a direction to push up the second clamp member upward The second clamp member from the second clamp member A second axis (I) extending in a direction perpendicular to one axis A second structure (J) that is connected to the handle portion and is erected at a predetermined position of an arm that performs expansion and contraction driving of the hand portion. The second structure extends obliquely upward in the second structure and is parallel to each other in the vertical direction. When the robot arm mechanism is retracted with the engagement between the pole and the second shaft, the locking member is an article. When the robot arm mechanism is extended, the pair of guides regulates the locking member so that the locking member is separated from the article and does not overlap with the locking member in plan view. Element

Images