JP2007041406A5 - - Google Patents

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Publication number
JP2007041406A5
JP2007041406A5 JP2005227072A JP2005227072A JP2007041406A5 JP 2007041406 A5 JP2007041406 A5 JP 2007041406A5 JP 2005227072 A JP2005227072 A JP 2005227072A JP 2005227072 A JP2005227072 A JP 2005227072A JP 2007041406 A5 JP2007041406 A5 JP 2007041406A5
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JP
Japan
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JP2005227072A
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JP2007041406A (ja
JP4723945B2 (ja
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Priority to JP2005227072A priority Critical patent/JP4723945B2/ja
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Publication of JP2007041406A5 publication Critical patent/JP2007041406A5/ja
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JP2005227072A 2005-08-04 2005-08-04 原子間力顕微鏡微細加工装置を用いたマスク余剰欠陥除去方法 Active JP4723945B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005227072A JP4723945B2 (ja) 2005-08-04 2005-08-04 原子間力顕微鏡微細加工装置を用いたマスク余剰欠陥除去方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005227072A JP4723945B2 (ja) 2005-08-04 2005-08-04 原子間力顕微鏡微細加工装置を用いたマスク余剰欠陥除去方法

Publications (3)

Publication Number Publication Date
JP2007041406A JP2007041406A (ja) 2007-02-15
JP2007041406A5 true JP2007041406A5 (ja) 2010-10-21
JP4723945B2 JP4723945B2 (ja) 2011-07-13

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ID=37799435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005227072A Active JP4723945B2 (ja) 2005-08-04 2005-08-04 原子間力顕微鏡微細加工装置を用いたマスク余剰欠陥除去方法

Country Status (1)

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JP (1) JP4723945B2 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5080378B2 (ja) * 2008-06-18 2012-11-21 エスアイアイ・ナノテクノロジー株式会社 高さ制御性に優れた原子間力顕微鏡を用いた微細加工方法
JP5277222B2 (ja) * 2010-09-14 2013-08-28 株式会社日立製作所 走査プローブ顕微鏡及びそれを用いた表面形状計測方法
CN102236270B (zh) * 2011-07-29 2012-12-19 中国科学院光电技术研究所 一种适用于双工件台投影光刻机的检焦装置
US11915908B2 (en) 2021-10-14 2024-02-27 Carl Zeiss Smt Gmbh Method for measuring a sample and microscope implementing the method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10197540A (ja) * 1997-01-13 1998-07-31 Canon Inc 微小探針の製造方法及びプローブの製造方法
US6042738A (en) * 1997-04-16 2000-03-28 Micrion Corporation Pattern film repair using a focused particle beam system
JP2004233242A (ja) * 2003-01-31 2004-08-19 Jeol Ltd 走査プローブ顕微鏡
JP2004279539A (ja) * 2003-03-13 2004-10-07 Seiko Instruments Inc 荷電粒子マスク欠陥修正装置によるフォトマスク欠陥修正個所の二次処理方法
JP2004309604A (ja) * 2003-04-03 2004-11-04 Sii Nanotechnology Inc フォトマスクの欠陥修正方法
JP2005081527A (ja) * 2003-09-11 2005-03-31 Sii Nanotechnology Inc 原子間力顕微鏡を用いた微細加工方法
JP2005159287A (ja) * 2003-10-27 2005-06-16 Sii Nanotechnology Inc プローブを用いた微細加工方法とその装置
JP2006284435A (ja) * 2005-04-01 2006-10-19 Lasertec Corp プローブ保持装置及びそれを用いた測定装置、加工装置及び光学装置、並びに表面形状測定装置。

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