JP2007040743A5 - - Google Patents

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Publication number
JP2007040743A5
JP2007040743A5 JP2005222876A JP2005222876A JP2007040743A5 JP 2007040743 A5 JP2007040743 A5 JP 2007040743A5 JP 2005222876 A JP2005222876 A JP 2005222876A JP 2005222876 A JP2005222876 A JP 2005222876A JP 2007040743 A5 JP2007040743 A5 JP 2007040743A5
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JP
Japan
Prior art keywords
arm
arm portion
fulcrum
distal end
probe
Prior art date
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Application number
JP2005222876A
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English (en)
Japanese (ja)
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JP4704843B2 (ja
JP2007040743A (ja
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Publication date
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Priority to JP2005222876A priority Critical patent/JP4704843B2/ja
Priority claimed from JP2005222876A external-priority patent/JP4704843B2/ja
Publication of JP2007040743A publication Critical patent/JP2007040743A/ja
Publication of JP2007040743A5 publication Critical patent/JP2007040743A5/ja
Application granted granted Critical
Publication of JP4704843B2 publication Critical patent/JP4704843B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2005222876A 2005-08-01 2005-08-01 プローブ Expired - Lifetime JP4704843B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005222876A JP4704843B2 (ja) 2005-08-01 2005-08-01 プローブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005222876A JP4704843B2 (ja) 2005-08-01 2005-08-01 プローブ

Publications (3)

Publication Number Publication Date
JP2007040743A JP2007040743A (ja) 2007-02-15
JP2007040743A5 true JP2007040743A5 (enrdf_load_stackoverflow) 2008-09-18
JP4704843B2 JP4704843B2 (ja) 2011-06-22

Family

ID=37798885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005222876A Expired - Lifetime JP4704843B2 (ja) 2005-08-01 2005-08-01 プローブ

Country Status (1)

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JP (1) JP4704843B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100869046B1 (ko) 2007-02-09 2008-11-18 한국기계연구원 Ａｆｍ 프로브
JP2009236611A (ja) * 2008-03-26 2009-10-15 Sanyo Electric Co Ltd 半導体装置の製造方法
KR100984876B1 (ko) 2008-05-08 2010-10-04 한국기계연구원 가변강성 기능을 가진 수직형 미세 접촉 프로브
JP5185686B2 (ja) * 2008-05-13 2013-04-17 日本電子材料株式会社 プローブ、及びプローブの製造方法
JP6337633B2 (ja) * 2014-06-16 2018-06-06 オムロン株式会社 プローブピン
TWI783744B (zh) * 2021-10-22 2022-11-11 中華精測科技股份有限公司 懸臂式探針結構
CN220323468U (zh) * 2023-05-22 2024-01-09 黄种庆 一种测试针结构

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003232808A (ja) * 2002-02-08 2003-08-22 Nec Kyushu Ltd プローブカード

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