JP2007027237A5 - - Google Patents

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Publication number
JP2007027237A5
JP2007027237A5 JP2005204090A JP2005204090A JP2007027237A5 JP 2007027237 A5 JP2007027237 A5 JP 2007027237A5 JP 2005204090 A JP2005204090 A JP 2005204090A JP 2005204090 A JP2005204090 A JP 2005204090A JP 2007027237 A5 JP2007027237 A5 JP 2007027237A5
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JP
Japan
Prior art keywords
light source
light
exposure apparatus
exposure
determination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005204090A
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English (en)
Japanese (ja)
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JP2007027237A (ja
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Publication date
Application filed filed Critical
Priority to JP2005204090A priority Critical patent/JP2007027237A/ja
Priority claimed from JP2005204090A external-priority patent/JP2007027237A/ja
Publication of JP2007027237A publication Critical patent/JP2007027237A/ja
Publication of JP2007027237A5 publication Critical patent/JP2007027237A5/ja
Pending legal-status Critical Current

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JP2005204090A 2005-07-13 2005-07-13 露光装置、光源装置及びデバイス製造方法 Pending JP2007027237A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005204090A JP2007027237A (ja) 2005-07-13 2005-07-13 露光装置、光源装置及びデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005204090A JP2007027237A (ja) 2005-07-13 2005-07-13 露光装置、光源装置及びデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2007027237A JP2007027237A (ja) 2007-02-01
JP2007027237A5 true JP2007027237A5 (enrdf_load_stackoverflow) 2008-08-28

Family

ID=37787652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005204090A Pending JP2007027237A (ja) 2005-07-13 2005-07-13 露光装置、光源装置及びデバイス製造方法

Country Status (1)

Country Link
JP (1) JP2007027237A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008107166A1 (de) 2007-03-07 2008-09-12 Carl Zeiss Smt Ag Verfahren zum reinigen einer euv-lithographievorrichtung, verfahren zur messung der restgasatmosphäre bzw. der kontamination sowie euv-lithographievorrichtung
JP2013179330A (ja) * 2013-04-25 2013-09-09 Gigaphoton Inc 極端紫外光源装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3433844B2 (ja) * 1994-08-10 2003-08-04 株式会社ニコン 露光装置用のフィルタ装置及び投影露光装置
JPH1187230A (ja) * 1997-09-01 1999-03-30 Canon Inc 露光装置およびデバイス製造方法
JP2000298200A (ja) * 1999-04-13 2000-10-24 Agency Of Ind Science & Technol レーザー励起型ｘ線源
JP2000346817A (ja) * 1999-06-07 2000-12-15 Nikon Corp 測定装置、照射装置および露光方法
JP3413131B2 (ja) * 1999-10-04 2003-06-03 キヤノン株式会社 光学装置及びデバイス製造方法
US6324256B1 (en) * 2000-08-23 2001-11-27 Trw Inc. Liquid sprays as the target for a laser-plasma extreme ultraviolet light source
DE10061248B4 (de) * 2000-12-09 2004-02-26 Carl Zeiss Verfahren und Vorrichtung zur In-situ-Dekontamination eines EUV-Lithographiegerätes
JP2004061177A (ja) * 2002-07-25 2004-02-26 Canon Inc 光学装置及び測定方法、半導体デバイスの製造方法
JP2004193468A (ja) * 2002-12-13 2004-07-08 Canon Inc 露光装置
EP1517184A1 (en) * 2003-09-18 2005-03-23 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method

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