JP2007014944A5 - - Google Patents

Claims (11)

A rotating support for holding the substrate;
The rotating support base provided the substrate and a counter which is held, a plurality of nozzles for discharging the solution into the substrate,
Coated cloth device; and a driving mechanism for moving each freely said plurality of nozzles. A rotating support for holding the substrate;
The rotating support base provided the substrate and a counter which is held, a plurality of nozzles for discharging the solution into the substrate,
A drive mechanism for freely moving each of the plurality of nozzles ;
A tank for storing the previous Symbol solution,
The tank is connected via a pipe, coated fabric device you; and a control unit for controlling the amount of solution to be discharged from the plurality of nozzles. A rotating support for holding the substrate;
Guide rails provided in a matrix so as to face the substrate held on the rotation support base,
A plurality of nozzles that are held by the guide rail and discharge the solution to the substrate;
The coating device, wherein the plurality of nozzles are freely movable along guide rails. A rotating support for holding the substrate;
A guide rail provided in a matrix in the substrate and a counter which is held on the rotating support base,
The held in the guide rail, a plurality of nozzles for discharging the solution into the substrate,
A tank for storing the solution ;
A controller connected to the tank via a pipe and controlling the amount of solution discharged from the plurality of nozzles;
Wherein the plurality of nozzles, the coating fabric device you characterized in that along the guide rails are each freely movable. 5. The coating apparatus according to claim 2, wherein the control unit is provided for each of the plurality of nozzles. 6. The coating apparatus according to claim 1, further comprising a drive mechanism that moves the rotation support base. The coating apparatus according to claim 1, wherein the plurality of nozzles are freely movable in a vertical direction with respect to the rotation support base. A rotating support for holding the substrate;
Guide rails provided in a matrix so as to face the substrate held on the rotation support table,
A coating method using a coating apparatus having a plurality of nozzles that are held by the guide rail and discharge a solution to the substrate,
A plurality of the nozzles are freely moved along the guide rails and arranged at predetermined positions,
Discharging the solution from the plurality of nozzles onto the substrate held on the rotating support base;
An application method comprising rotating the rotation support base. A rotating support for holding the substrate;
Guide rails provided in a matrix so as to face the substrate held on the rotation support table ,
The held in the guide rail, a plurality of nozzles for discharging the solution into the substrate,
A tank for storing the solution ;
The tank is connected via a pipe, I coated fabric method der using the coating cloth device that having a control unit for controlling the amount of solution to be discharged from the plurality of nozzles,
A plurality of the nozzles are freely moved along the guide rails and arranged at predetermined positions,
Discharging the solution from the plurality of nozzles onto the substrate held on the rotating support base ;
Coated cloth how to characterized by rotating the rotating support base. A rotating support for holding the substrate;
Guide rails provided in a matrix so as to face the substrate held on the rotation support table,
A coating method using a coating apparatus having a plurality of nozzles that are held by the guide rail and discharge a solution to the substrate,
The plurality of nozzles are freely moved along the guide rails, and are arranged at least at the four corner ends of the substrate,
Discharging the solution from the plurality of nozzles onto the substrate held on the rotating support base;
An application method comprising rotating the rotation support base. A rotating support for holding the substrate;
Guide rails provided in a matrix so as to face the substrate held on the rotation support table,
A plurality of nozzles that are held by the guide rail and that discharge the solution to the substrate;
A tank for storing the solution;
A coating method using a coating apparatus connected to the tank via a pipe and having a control unit for controlling the amount of solution discharged from the plurality of nozzles;
The plurality of nozzles are freely moved along the guide rails, and are arranged at least at the four corner ends of the substrate,
Discharging the solution from the plurality of nozzles onto the substrate held on the rotating support base;
An application method comprising rotating the rotation support base.