JP2007008750A - Gas pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a gas pump having an increased gas flow capable of being substantially and effectively treated by solid electrolytic cylindrical bodies with proper diameters. <P>SOLUTION: A plurality of circular solid electrolytic cylindrical bodies 10a, 10b having different diameters are concentrically combined so as to make respective center lines almost horizontal and form a double cylindrical structure, and hollow caps are put on at both ends of the cylindrical bodies, respectively. A ring-shaped heater 40 is installed concentrically around the solid electrolytic cylindrical body 10b with a larger diameter. The two pieces solid electrolytic cylindrical bodies, inner and outer, 10a, 10b, have electrodes at both faces, inner and outer, respectively. A gas G1 to be treated is flown in an axial direction in a primary flow path Ma between the solid electrolytic cylindrical bodies 10a, 10b. In secondary spaces Na, Nb, viz. the inner space of the inner solid electrolytic cylindrical body 10a and the outer space of the outer solid electrolytic cylindrical body 10b, a secondary gas G2 based on the treatment of the gas G1 to be treated is flown in an axial direction. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a solid electrolyte gas pump such as an oxygen pump or a hydrogen pump using an ion conductive solid electrolyte cylindrical body.

  The ion conductive solid electrolyte can transmit ions at a high temperature. Utilizing this phenomenon, it has been put to practical use in fuel cells, measurement of gas analysis, separation of gas mixtures and the like. When used as an oxygen pump, it is utilized that oxygen ions move through the oxygen ion conductive electrolyte from the cathode side to the anode where oxygen is generated under the potential gradient generated by reduction of oxygen and the like. ing.

  FIG. 19 shows an outline of equipment such as a sample growing apparatus using the oxygen pump, and FIG. 20 shows an outline of the oxygen pump.

In FIG. 19, reference numeral 1 denotes an oxygen partial pressure control device, through which an inert gas is supplied from a gas cylinder (not shown) through a valve 2. Usually, the oxygen partial pressure in the inert gas is about 10 ⁻⁴ atm. The oxygen partial pressure control device 1 controls a mass flow controller (MFC) 3 that controls the flow rate of the inert gas that has passed through the valve 2 to a set value, and controls the inert gas that has passed through the mass flow controller 3 to a target oxygen partial pressure. A possible electrochemical oxygen pump 4 and a supply gas oxygen sensor 5 for monitoring the oxygen partial pressure of the inert gas controlled by the oxygen pump 4 and supplying it to the next process (device) such as a sample growing device Have.

  The oxygen partial pressure control device 1 compares an oxygen partial pressure setting unit 6 for setting a desired oxygen partial pressure value and a monitor value by the oxygen sensor 5 with a set value by the oxygen partial pressure setting unit 6 and sends it out from the oxygen pump 4. An oxygen partial pressure control unit 7 that controls the oxygen partial pressure of the inert gas to be a predetermined value and an oxygen partial pressure display unit 8 that displays a monitor value by the oxygen sensor 5 are provided.

In the electrochemical oxygen pump 4 of FIG. 20, electrodes 4b and 4c made of platinum are formed on both inner and outer surfaces of a solid electrolyte cylindrical body 4a having oxide ion conductivity. The solid electrolyte cylindrical body 4a is, for example, a zirconia solid electrolyte, and is heated to about 700 ° C. by a heater (not shown). An inert gas is supplied in the axial direction from one opening of the solid electrolyte cylindrical body 4a toward the other opening. The inert gas is, for example, Ar + O ₂ (10 ⁻⁴ atm). A DC voltage of a DC power source E is applied between the inner and outer electrodes 4b and 4c. When a positive electrode is applied to the outer electrode 4c and a negative electrode is applied to the inner electrode 4b to flow a current I, oxygen molecules (O ₂ ) in the inert gas flowing through the solid electrolyte cylindrical body 4a are solid. It is electrically reduced by the electrolyte to be ionized (O ²⁻ ), and is released again as oxygen molecules (O ₂ ) through the solid electrolyte to the outside of the solid electrolyte cylindrical body 4a. Oxygen molecules released to the outside of the solid electrolyte cylindrical body 4a are exhausted together with an auxiliary gas such as air. The inert gas of Ar + O ₂ (10 ⁻⁴ atm) supplied to the solid electrolyte cylindrical body 4 a becomes a processed gas whose oxygen molecules are reduced and controlled to the target oxygen partial pressure, and is used in the next process (apparatus). Be fed.

The oxygen pump 4 shown in FIG. 20 can also perform a pump operation by applying a DC voltage having the opposite polarity between the electrodes 4b and 4c on the inner and outer surfaces of the solid electrolyte cylindrical body 4a. That is, when a negative electrode is applied to the outer electrode 4c and a positive electrode is applied to the inner electrode 4b, oxygen molecules (O ₂ ) in a gas such as air flowing along the outer surface of the solid electrolyte cylindrical body 4a are solid. It is electrically reduced by the electrolyte to be ionized (O ²⁻ ), and is released again as oxygen molecules (O ₂ ) through the solid electrolyte into the solid electrolyte cylindrical body 4a. In this case, the oxygen partial pressure of the inert gas flowing inside the solid electrolyte cylindrical body 4a is increased and fed to the outside.

  If a gas whose oxygen partial pressure is controlled by such an oxygen pump is supplied, crystal growth, alloying, heat treatment, semiconductor manufacturing process, etc. can be performed in an atmosphere such as an inert gas whose oxygen partial pressure is controlled.

  A gas pump for flowing a gas to be processed that receives a pumping action such as an inert gas in the axial direction through the inside of a solid electrolyte cylindrical body of an ionic conductor is a single circular pipe-shaped solid electrolyte like the oxygen pump of FIG. Use a cylindrical body. A gas to be treated is caused to flow in the axial direction in the internal space of the single solid electrolyte cylindrical body, and an ion conductive pumping action is performed inside and outside the solid electrolyte partition wall while flowing through the solid electrolyte cylindrical body. The gas flow rate that can be processed by such a gas pump is proportional to the contact area between the gas to be processed and the outer surface of the solid electrolyte cylindrical body. Therefore, in order to increase the gas flow rate, it is necessary to increase the contact area between the gas to be processed and the outer surface of the solid electrolyte cylindrical body.

  To that end, it is conceivable to lengthen the solid electrolyte cylindrical body or increase the pipe diameter. In order to effectively use the oxygen ion conductive solid electrolyte, it is necessary to reduce the resistance value of the oxygen pump as much as possible and increase the oxygen permeation ability of the oxygen pump. The resistance value of the oxygen pump is affected by the shape (surface area and thickness) of the solid electrolyte, the electrode film, the lead terminal, and the like. Among these, the shape of the solid electrolyte has a large surface area, and the resistance value decreases as the thickness decreases. That is, when considering a cylindrical body, a shape having a large diameter and length and a small thickness is preferable. However, in view of the ease of manufacturing the solid electrolyte cylindrical body and the strength of the solid electrolyte cylindrical body used in a heated and high temperature holding state, there are limits to the diameter, length, and thickness. In addition, as the pipe diameter increases, the ion conduction reaction of the gas to be processed flowing through the center of the solid electrolyte cylindrical body decreases rapidly, and as a result, the gas to be processed flowing through the center passes through without reaction. In addition, control accuracy such as oxygen partial pressure decreases. For this reason, there is a limit to simply increasing the pipe diameter of the solid electrolyte cylindrical body. Therefore, there is a limit in increasing the contact area between the gas to be treated and the solid electrolyte cylindrical body by the above method. For this reason, the gas flow rate that can be processed substantially effectively by the gas pump is limited, and the application of supplying gas with controlled oxygen partial pressure is limited.

  An object of the present invention is to provide a gas pump having an increased gas flow rate that can be processed substantially effectively with a solid electrolyte cylindrical body having an appropriate diameter.

  In order to achieve the above object, the present invention provides a plurality of solid electrolyte cylinders having concentric and multiple electrodes, each having electrodes on both the inner and outer surfaces and having different diameters, and the plurality of solid electrolyte cylinders. A structure having a DC power source that applies voltages having different polarities to the electrodes on both the inner and outer surfaces, and a heating device disposed around the outermost (maximum diameter) solid electrolyte cylinder of the plurality of solid electrolyte cylinders Features. As the heating device, a common ring heater that uniformly heats a plurality of solid electrolyte cylindrical bodies can be applied.

  Here, as the solid electrolyte cylindrical body, a YSZ (yttrium-stabilized zirconia) zirconia-based oxide ion conductor or a proton conductor solid electrolyte can be applied. The former gas pump using a zirconia solid electrolyte cylindrical body is a so-called oxygen pump. The gas pump using the solid electrolyte cylindrical body of the latter proton conductor is a so-called hydrogen pump and can be applied to a fuel cell manufacturing apparatus or the like. In addition, although a plurality of solid electrolyte cylindrical bodies are desirably circular pipes having different inner diameters in terms of strength and quality, elliptical pipes and polygonal pipes can also be applied depending on applications. A net-like electrode such as platinum is formed on both the inner and outer surfaces of each of the plurality of solid electrolyte cylindrical bodies having different diameters. A DC voltage having a different polarity is applied to the outer surface side electrode and the inner surface side electrode of one solid electrolyte cylindrical body to perform an ion conductive pumping action. Also, a plurality of solid electrolyte cylindrical bodies are concentrically arranged in a multiple manner, and a cylindrical space is formed between the inner and outer solid electrolyte cylindrical bodies adjacent to each other in a concentric manner. The gas is flowed in the axial direction of the solid electrolyte cylindrical body. The gas used here is a gas to be processed for pump operation that is subjected to oxygen partial pressure control, etc., and a secondary gas based on the processing of the gas to be processed (exhaust gas including oxygen molecules generated by processing the gas to be processed) Or high oxygen partial pressure atmospheric gas provided to the gas to be processed for the processing of the gas to be processed). These gases flow in a space formed between a plurality of solid electrolyte cylindrical bodies arranged concentrically and multiply, or a flow path formed between the outer periphery of the solid electrolyte cylindrical body having the maximum diameter and the heating device.

  In the present invention, in the cylindrical space between the plurality of solid electrolyte cylindrical bodies, the odd-numbered space counted from the internal space of the solid electrolyte cylindrical body having the smallest diameter is treated based on the processing of the gas to be pumped. The secondary gas flows in the axial direction of the solid electrolyte cylindrical body, and the remaining even-numbered space is defined as the primary flow path separated from the secondary flow path. In addition to flowing in the axial direction of the body, a voltage having different polarities can be applied to the surface of the solid electrolyte cylindrical body in contact with the primary flow path and the surface of the solid electrolyte cylindrical body in contact with the secondary flow path.

  Further, in the present invention, in the cylindrical space between the plurality of solid electrolyte cylindrical bodies, the odd-numbered space counted from the internal space of the solid electrolyte cylindrical body having the smallest diameter is treated gas to be pumped as the solid electrolyte. As a primary flow path that flows in the direction of the cylindrical body axis, and the remaining even-numbered space as a secondary flow path that is separated from the primary flow path, a secondary gas based on the processing of the gas to be processed is passed through the secondary flow path. In addition, it is possible to adopt a structure in which voltages having different polarities are applied to the surface of the solid electrolyte cylindrical body in contact with the primary flow path and the surface of the solid electrolyte cylindrical body in contact with the secondary flow path.

  Here, the primary flow path and the secondary flow path are alternately arranged in multiple. A plurality of solid electrolyte cylinders having the same length and different diameters are concentrically arranged in multiple layers, and hollow caps are fitted to both ends of each solid electrolyte cylinder, and the primary flow is achieved with these caps. The paths can be communicated with each other, and the secondary flow paths can be communicated with each other. When the plurality of solid electrolyte cylindrical bodies are arranged in a horizontal specification with the center line thereof being horizontal, caps are fitted to the left and right ends of each solid electrolyte cylindrical body. When the plurality of solid electrolyte cylindrical bodies are arranged in a vertical orientation with the center line thereof being vertical, caps are fitted to the upper and lower ends of each solid electrolyte cylindrical body. By using these caps, a plurality of primary flow paths are connected in series so that the gas to be treated flows continuously to each primary flow path, or a plurality of primary flow paths are connected in parallel to each primary flow path. The gas to be treated can flow in the same direction. Similarly, a plurality of secondary flow paths can be communicated in series or in parallel.

  Further, in the present invention, in the cylindrical space between the plurality of solid electrolyte cylindrical bodies, a flow path partitioning cylinder that divides this space into an inner space and an outer space is disposed concentrically with the solid electrolyte cylindrical body. One of the divided inner space and outer space is used as a primary flow path for flowing the gas to be pumped in the axial direction of the solid electrolyte cylindrical body, and the other is a secondary flow for flowing a secondary gas based on the processing of the gas to be processed. In addition to the flow path, it is possible to adopt a structure in which voltages having different polarities are applied to the solid electrolyte cylindrical body surface in contact with the primary flow path and the solid electrolyte cylindrical body surface in contact with the secondary flow path.

  The channel partition cylinder here is a heat-resistant cylinder that is different from the solid electrolyte cylindrical body (non-electrolyte). For example, when two solid electrolyte cylinders having different diameters are used, one channel partition cylinder is arranged between the two pairs of solid electrolyte cylinders. In addition, when three solid electrolyte cylinders having a diameter different from large, medium, and small are used, a single channel partition cylinder is arranged between the small and medium diameter solid electrolyte cylinders, and the medium diameter and the large Another single channel partition cylinder is also arranged in the middle of the solid electrolyte cylindrical body having a diameter. A space between adjacent solid electrolyte cylindrical bodies is divided into an inner space and an outer space by a flow path partitioning cylinder, and the outer space is used as a primary flow path for flowing a gas to be processed, and the inner space is supplied with a secondary gas. It can be a next flow path. If a non-electrolyte channel partition cylinder is selected from a material that is harder than the solid electrolyte cylinder, a plurality of solid electrolyte cylinders can be reinforced.

  In the present invention, the cylindrical primary flow paths and the secondary flow paths are alternately arranged in multiples, and the primary flow paths adjacent in the radial direction are connected in series, and one of the adjacent primary flow paths is connected. Gas to be treated can be returned in the opposite direction by 180 ° and allowed to flow into the other. In addition, the cylindrical primary flow paths and the secondary flow paths are alternately arranged in multiple layers, the primary flow paths adjacent in the radial direction are connected in parallel, and the processing gas flows in both primary flow paths in the same direction. Can do.

  Further, in the present invention, the solid electrolyte cylindrical unit composed of a plurality of solid electrolyte cylindrical bodies arranged concentrically and in a concentric manner in a vertically placed specification in which each center line is substantially vertical, etc. A plurality of the solid electrolyte cylindrical body units may be heated by a ring-shaped heating device that is disposed at intervals and surrounds the plurality of solid electrolyte cylindrical body units. In this case, a heat storage member that stores heat by being heated by the heating device can be disposed in a space surrounded by the plurality of solid electrolyte cylindrical units.

  By flowing the gas to be processed into each of the plurality of solid electrolyte cylindrical units arranged concentrically in this way, the contact area between the gas to be processed and the solid electrolyte cylindrical body is increased, and the pump processing is performed. The amount of gas increases. In addition, a ring-shaped heating device equidistant to a plurality of solid electrolyte cylindrical units uniformly heats each solid electrolyte cylindrical unit, and the temperature difference between the units is reduced. This eliminates the difference in oxygen permeation ability of the solid electrolyte cylindrical unit. Furthermore, each solid electrolyte tubular body unit whose center line is arranged substantially vertically is heated from the outside by a heating device, and from the inside by a heat storage member, so that the solid electrolyte tubular body of each unit is circumferentially Thus, the temperature difference can be reduced and the heating can be performed uniformly, and the control accuracy of the gas to be processed flowing inside each unit can be increased. Thereby, the processing of the same gas to be processed is performed in a plurality of solid electrolyte cylindrical units without individual differences, and control accuracy such as oxygen partial pressure can be improved.

  In the present invention, each of the plurality of solid electrolyte cylindrical bodies can be composed of an oxide ion conductor. This oxide ion conductor solid electrolyte cylinder is operated by a pump that moves oxygen molecules in the gas to be treated to the secondary gas under the condition of being heated at a predetermined temperature, or oxygen molecules in the secondary gas. An oxygen pump that performs a stable operation by performing a reverse pump operation to move to the gas to be processed is configured.

  According to the gas pump of the present invention, the gas to be treated is caused to flow between the plurality of concentrically arranged solid electrolyte cylinders to conduct ions through the partition walls of the solid electrolyte cylinder. Ion permeation is performed from two surfaces approaching in the flow path (primary flow path), the contact area between the gas to be processed and the solid electrolyte cylindrical body can be increased, and the amount of gas to be pumped can be increased. An excellent effect can be achieved. Further, the contact area between the gas to be processed and the solid electrolyte cylindrical body can also be increased by passing the gas to be processed through each of the plurality of solid electrolyte cylindrical units arranged concentrically. The amount of gas to be pumped can be increased. The increased gas volume that can be processed by the gas pump is advantageous in that large-capacity large-capacity facilities with large throughput can be applied to manufacturing facilities such as material generation equipment that uses extremely low oxygen partial pressure gas and heat treatment equipment that uses high oxygen partial pressure gas. There is.

  Hereinafter, an outline of various embodiments will be described with reference to FIGS. 1A to 1C and FIGS. 2A and 2B, and various specific examples will be described with reference to FIGS.

  In FIG. 1A, two circular solid electrolyte cylindrical bodies 10a and 10b having substantially the same length and different diameters are assembled concentrically with their respective centerlines being substantially horizontal, A heavy cylinder structure is formed. Around the outermost large-diameter solid electrolyte cylindrical body 10b, a ring heater 40 as a heating device is disposed concentrically. The inner and outer two solid electrolyte cylindrical bodies 10a and 10b each have net-like electrodes (not shown) made of platinum on both the inner and outer surfaces. A DC voltage having a different polarity is applied from the DC power source E to both the inner and outer electrodes. The cylindrical space between the inner and outer solid electrolyte cylinders 10a and 10b is the primary flow path Ma through which the gas G1 to be treated flows, and the inner space of the small-diameter inner solid electrolyte cylinder 10a and the large-diameter outer solid. The external space of the electrolyte cylindrical body 10b is secondary spaces Na and Nb through which the secondary gas G2 flows. The gas to be treated G1 and the secondary gas G2 flow in the solid electrolyte cylindrical body axial direction as indicated by solid line arrows and broken line arrows in FIG. Specific examples in which the gas pump of FIG. 1A is applied to an oxygen pump are shown in FIGS. 3 and 4 and will be described in detail later.

  In FIG. 1 (B), four circular solid electrolyte cylindrical bodies 10a to 10d having substantially the same length and different diameters are assembled concentrically to form a horizontally mounted quadruple cylinder structure. A ring heater 40 is concentrically disposed around the solid electrolyte cylindrical body 10d having the maximum diameter. Each of the four solid electrolyte cylindrical bodies 10a to 10d has electrodes (not shown) on both inner and outer surfaces. The inner space of the solid electrolyte cylindrical body 10a with the smallest diameter, the cylindrical space between the solid electrolyte cylindrical bodies 10b and 10c with the second and third smallest diameters from the smallest diameter, and the solid electrolyte cylindrical body with the largest diameter The external space 10d is secondary flow paths Na, Nb, and Nc through which the secondary gas G2 flows. The cylindrical spaces between the adjacent solid electrolyte cylindrical bodies 10a and 10b and the cylindrical spaces between the adjacent solid electrolyte cylindrical bodies 10c and 10d are primary flow paths Ma and Mb through which the gas to be processed G1 flows. . The two primary flow paths Ma and Mb are connected to the opening at the right end in series in FIG. 1B, and the gas to be treated G1 flowing to the right in the inner primary flow path Ma in FIG. It returns 180 ° and enters the outer primary flow path Mb, and flows to the left in FIG. 1 (B). Specific examples in which the gas pump of FIG. 1B is applied to an oxygen pump are shown in FIGS.

  In FIG. 1C, a quadruple cylinder is configured by four circular solid electrolyte cylindrical bodies 10a to 10d similar to FIG. 1B, and primary flow paths Ma and Mb similar to FIG. And secondary spaces Na, Nb, and Nc. A ring heater 40 is concentrically disposed around the solid electrolyte cylindrical body 10d having the maximum diameter. In the case of the gas pump of FIG. 1C, the two primary flow paths Ma and Mb are connected in parallel at the left end opening in FIG. 1C, and the gas G1 to be treated is simultaneously supplied to the primary flow paths Ma and Mb. Inflow and flow in the same direction.

  In FIG. 2 (A), three circular solid electrolyte cylindrical bodies 10a to 10c having substantially the same length and different diameters from large, medium, and small are assembled concentrically to form a horizontal cylinder triple cylinder structure. . A ring heater 40 is concentrically disposed around the solid electrolyte cylindrical body 10c having the maximum diameter. Each of the three solid electrolyte cylindrical bodies 10a to 10c has electrodes on both inner and outer surfaces. The internal space of the solid electrolyte cylindrical body 10a having the minimum diameter and the cylindrical spaces of the solid electrolyte cylindrical bodies 10b and 10c having the medium diameter and the maximum diameter are the primary flow paths Ma and Mb through which the gas to be processed G1 flows. The cylindrical space between the solid electrolyte cylinders 10a and 10b having the minimum diameter and the medium diameter and the external space of the solid electrolyte cylinder 10c having the maximum diameter are the secondary flow paths Na and Nb through which the secondary gas G2 flows. . The two primary flow paths Ma and Mb are connected in series at the right end opening in FIG. 2A, and the gas to be processed G1 flowing to the right in the inner primary flow path Ma in FIG. 2A is 180. ° Return to enter the outer primary flow path Mb and flow leftward in FIG.

  FIG. 2B shows a horizontally installed triple-cylinder structure in which a channel partition structure 20a having the same size and shape is arranged instead of the medium-diameter solid electrolyte cylindrical body 10b shown in FIG. is doing. The flow partition cylinder 20a is a non-solid electrolyte cylinder, and divides the space between the inner and outer two solid electrolyte cylinders 10a and 10b into a cylindrical inner space and an outer space. In this case, the primary flow paths Ma and Mb in which the gas G1 flows in the internal space of the small diameter solid electrolyte cylindrical body 10a and the cylindrical space between the flow path partitioning structure 20a and the large diameter solid electrolyte cylindrical body 10b. It is. The cylindrical space between the small-diameter solid electrolyte cylindrical body 10a and the channel partition structure 20a and the external space of the large-diameter solid electrolyte cylindrical body 10b are the secondary flow paths Na and Nb through which the secondary gas G2 flows. . The two primary flow paths Ma, Mb are connected in series at the right end opening in FIG. 2B, and the gas G1 to be treated that flows to the right in the inner primary flow path Ma in FIG. 2B is 180. ° Return to enter the outer primary flow path Mb and flow to the left in FIG. 2 (B). Specific examples in which the gas pump of FIG. 2B is applied to an oxygen pump are shown in FIGS. An application example of FIG. 2B is shown in FIGS. Specific examples of these will be described later.

  Next, a specific example in which the gas pump of FIG. 1A is applied to an oxygen pump will be described with reference to FIGS. This oxygen pump is fitted with hollow heat-resistant caps 31 and 32 at both ends of a double cylinder structure. The internal space of the inner solid electrolyte cylindrical body 10a and the space between the outer solid electrolyte cylindrical body 10b and the heater 40 are secondary flow paths Na and Nb through which the secondary gas G2 flows in the axial direction and are adjacent inside and outside. A space between the solid electrolyte cylindrical bodies 10a and 10b is a primary flow path Ma through which the gas to be processed G1 flows in the axial direction. In FIG. 3, a gas inlet channel 35 is formed in the left cap 31 to feed the gas G1 to be processed from the outside to the primary channel Ma. In FIG. 3, the processed gas is exhausted from the primary channel Ma to the right cap 32. A gas outlet channel 35 ′ is formed. Further, an exhaust port 36 for exhausting the secondary gas G2 from the secondary flow path Na is formed at the center of each of the left and right caps 31 and 32.

The inner and outer two solid electrolyte cylindrical bodies 10a and 10b respectively form net-like electrodes (+ and-symbols in the drawing) made of platinum on both the inner and outer surfaces. A DC voltage is applied to this electrode from a DC power source (not shown). In FIG. 3, a negative voltage is applied to the outer electrode of the inner solid electrolyte cylindrical body 10a, a positive voltage is applied to the inner electrode, and a positive voltage is applied to the outer electrode of the outer solid electrolyte cylindrical body 10b. A negative voltage is applied to the inner electrode. The electrodes on both the inside and outside are indicated by + and-symbols in FIG. Such display of + and − on the electrode is the same in other embodiments shown in FIG. The gas to be processed G1 is a gas to be processed (primary gas) of Ar + O ₂ (10 ⁻⁴ atm) in FIG. The secondary gas G2 is a gas based on the treatment of the inert gas described with reference to FIG. In other words, oxygen molecules (O ₂ ) in the inert gas are electrically reduced and ionized (O ²⁻ ) by the solid electrolyte, and are released again outside the solid electrolyte as oxygen molecules (O ₂ ) through the solid electrolyte. A mixed gas of oxygen molecules (O ₂ ) and air as a carrier gas.

The operation of the oxygen pump in FIG. 3 will be described. The heater 40 is energized to heat the inner and outer solid electrolyte cylindrical bodies 10a, 10b to about 700 ° C., and the heating temperature is maintained. A direct current voltage is applied to the inner and outer electrodes of each solid electrolyte cylindrical body 10a, 10b, and the gas G1 to be treated is caused to flow through the cap 31 to the primary flow path Ma. A part of oxygen molecules (O ₂ ) in the gas flowing along the outer surface of the inner solid electrolyte cylindrical body 10a and the inner surface of the outer solid electrolyte cylindrical body 10b while the gas to be treated G1 flows through the primary flow path Ma is solid. It is electrically reduced by the electrolyte to be ionized (O ²⁻ ), and is ionically conducted through the solid electrolyte cylindrical bodies 10a and 10b to be discharged into the secondary flow paths Na and Nb. While the gas to be treated G1 passes through the primary flow path Ma, the oxygen partial pressure decreases to the target value and is exhausted from the primary flow path Ma through the cap 32 as a processed gas.

  In the case of the oxygen pump of FIG. 3, the gas to be treated G1 flowing through the primary flow path Ma is in contact with the outer surface of the inner solid electrolyte cylindrical body 10a and the inner surface of the outer solid electrolyte cylindrical body 10b. In both cases, the pumping operation by the ionization reaction of oxygen molecules is performed simultaneously. Since the primary flow path Ma is cylindrical and has a small radial width, the gas to be treated G1 flows near the outer surface of the inner solid electrolyte cylindrical body 10a and the inner surface of the outer solid electrolyte cylindrical body 10b. The ionization reaction of molecules is performed efficiently.

The oxygen pump shown in FIG. 3 performs the pump operation for increasing the oxygen partial pressure as follows when the gas to be treated G1 has an extremely low oxygen partial pressure. The gas to be treated G1 is flowed in the same manner as described above with the polarity of the DC voltage applied to the electrodes on both inner surfaces of the solid electrolyte cylinders 10a and 10b adjacent inside and outside being reversed. While the processing gas G1 flows through the primary flow path Ma, oxygen molecules (O ₂ ) in the gases of the secondary flow paths Na and Nb are ionized (O ²⁻ ), and the solid electrolyte tubular bodies 10a and 10b are turned on. Ion conduction causes oxygen molecules (O ₂ ) to be released into the primary channel Ma, and the oxygen partial pressure of the gas to be processed G1 flowing through the primary channel Ma increases. The treated gas whose oxygen partial pressure is controlled in the primary flow path Ma is exhausted from the gas outlet 35 ′. The pump operation for increasing the oxygen partial pressure is performed in the same manner in other oxygen pumps shown in FIG.

  Next, referring to the cross-sectional view of FIG. 5 and the exploded perspective view of FIG. 6, a specific example in which the gas pump of FIG. 1B is applied to an oxygen pump will be described. This oxygen pump includes a quadruple cylinder structure in which four circular solid electrolyte cylinders 10a to 10d having different diameters are assembled concentrically, and caps 31 and 32 are fitted on both ends. A ring heater 40 is installed around the solid electrolyte cylinder 10d having the maximum diameter. A cylindrical space between adjacent solid electrolyte cylindrical bodies 10a and 10b and a cylindrical space between other adjacent solid electrolyte cylindrical bodies 10c and 10d are primary flow paths Ma and Mb. Both the flow paths Ma and Mb are connected in series with the right end opening in FIG. 5 being connected in series by a return flow path Mg. Further, the internal space of the solid electrolyte cylindrical body 10a having the smallest diameter, the cylindrical space between the adjacent solid electrolyte cylindrical bodies 10b and 10c, and the external space of the solid electrolyte cylindrical body 10d having the maximum diameter are secondary flow paths. Na, Nb, and Nc.

  In the oxygen pump of FIG. 5, the gas G1 to be processed flows through the primary flow path Ma, and an ionization reaction of oxygen molecules is performed in both solid electrolyte cylindrical bodies 10a and 10b. Further, it passes through the return channel Mg and flows into another primary channel Mb, and the ionization reaction of oxygen molecules is performed in both solid electrolyte cylindrical bodies 10c, 10d, and finally the oxygen partial pressure of the target value is obtained. Exhausted. The oxygen pump of FIG. 5 has a larger contact area between the gas and the solid electrolyte than the oxygen pump of FIG. 3, and the amount of gas that can be processed increases accordingly.

  A specific example in which the gas pump of FIG. 2B is applied to an oxygen pump will be described with reference to FIGS.

  The inner and outer two solid electrolyte cylinders 10a and 10b are adjacent to each other via one flow path partition cylinder 20a. A space between two solid electrolyte cylindrical bodies 10a and 10b adjacent inside and outside is divided into a cylindrical inner space and an outer space by one flow path partitioning cylinder 20a. The two solid electrolyte cylindrical bodies 10a and 10b and the single circular flow channel partitioning cylinder 20a have the same length, and heat resistance is provided at both open ends of the triple cylinder structure in which these are concentrically assembled. The caps 31 and 32 are fitted. The left and right caps 31 and 32 fix the solid electrolyte cylindrical bodies 10a and 10b and the flow path partitioning cylinder 20a concentrically. A common ring heater 40 is installed around the outermost solid electrolyte cylindrical body 10b having the maximum diameter. A cylindrical space serving as a gas flow path is formed between the heater 40 and the outer solid electrolyte cylindrical body 10b.

  The inner space of the minimum inner diameter solid electrolyte cylindrical body 10a and the space between the flow path partitioning cylindrical body 20a and the outer solid electrolyte cylindrical body 10b are the primary flow paths Ma and Mb. In FIG. 7, the return flow channel Mg formed inside the right cap 32 connects the inner and outer primary flow channels Ma and Mb in series and communicates in series. The gas G1 to be treated is fed from the gas inlet 33 formed at the center of the left cap 31 in FIG. 7 to the primary flow path Ma inside the inner solid electrolyte cylindrical body 10a. In FIG. Flowing. This gas to be treated G1 flows out from the gas outlet formed at the center of the inner surface of the right cap 32 to the return channel Mg, flows radially through the return channel Mg vertically and horizontally, and flows into the outer solid electrolyte cylindrical body 10b and the channel partition cylinder. It flows into the primary flow path Mb between the bodies 20a. The gas to be processed G1 flowing into the primary flow path Mb flows in the left axial direction in FIG. 7 and is exhausted as a processed gas from the gas outlet 34 formed in the peripheral portion of the left cap 31. While the gas to be processed G1 flows through the primary flow paths Ma, b, ion conduction by oxygen ion reduction is performed. The direction in which the gas to be treated G1 flows through the primary flow path Ma (right direction in FIG. 7) and the direction in which the gas G1 flows through the primary flow path Mc (left direction in FIG. 7) are 180 degrees opposite, and gas flows through the intermediate return flow path Mg. The flow is returned 180 degrees at the shortest distance. This returning gas flow path is a portion where ion conduction is not performed, but by making this portion the shortest distance, a decrease in the efficiency of ion conduction as a whole oxygen pump is suppressed.

  The secondary space in which the cylindrical space between the inner solid electrolyte cylindrical body 10a and the flow path partitioning cylinder 20a and the outer space between the outer solid electrolyte cylindrical body 10b and the heater 40 exhaust the secondary gas G2. Path Na, Nb. In the left and right caps 31 and 32, gas inlets and outlets 35 and 36 communicating with the secondary channel Na are formed. Both ends of the secondary flow path Nb are opened and communicated with gas inlets 35 and 36 corresponding to the respective ends.

The operation of the oxygen pump in FIG. 7 is performed in the same manner as the oxygen pump in FIGS. The heater 40 is energized to heat the solid electrolyte cylinders 10a and 10b to about 700 ° C., and the heating temperature is maintained. A DC voltage is applied to the inner and outer electrodes of each solid electrolyte cylindrical body 10a, 10b, the gas to be treated G1 is caused to flow through the primary flow path Ma, and the gas is returned through the return flow path Mg to flow into the primary flow path Mb. While the gas to be treated G1 flows through the primary flow path Ma, a part of oxygen molecules (O ₂ ) in the gas is electrically reduced and ionized (O ²⁻ ) by the solid electrolyte, and the solid electrolyte cylindrical body 10a. Are ion-conducted and discharged to the secondary flow path Na. The oxygen partial pressure decreases while the gas to be treated G1 passes through the primary flow path Ma, and returns from the primary flow path Ma to the next primary flow path Mb and flows in. While the gas to be treated G1 flows through the primary flow path Mb, an ionization reaction is further performed and discharged from the outer solid electrolyte cylindrical body 10b to the secondary flow path Nb. In this way, the oxygen partial pressure control of the gas to be processed G1 is performed in a two-stage manner, and the gas is exhausted from the primary flow path Mb as the final processed gas.

  Also in the case of the oxygen pump of FIG. 7, the primary flow path Ma provided in the axial direction in the inner diameter solid electrolyte tubular body 10a having the smallest diameter is a small-diameter circular hole, and the hole central portion and the solid electrolyte tubular body 10a. The distance from the inner surface is short, and the ionization reaction of oxygen molecules is performed efficiently. Further, the primary flow path Mb provided in the axial direction in the outermost solid electrolyte cylindrical body 10b having the maximum diameter is a large-diameter circular hole, and the central portion of this hole is occupied by the flow path partitioning cylinder 20a. . Therefore, the maximum distance between the gas to be treated G1 flowing through the primary flow path Mb and the inner surface of the solid electrolyte cylindrical body 10b is sufficiently short, and the ionization reaction of oxygen molecules is efficiently performed also in the primary flow path Mb. If the lengths of the solid electrolyte cylindrical bodies 10a and 10b adjacent inside and outside are the same as those in FIG. 20, the gas G1 to be treated contacts the outer surface of the inner solid electrolyte cylindrical body 10a, and further, the outer solid electrolyte cylinders. Since it contacts the inner surface of the body 10b, the contact area between the gas and the solid electrolyte increases as compared with FIG. As a result, it is possible to increase the flow rate of the gas to be processed G1 and increase the flow rate of gas processed by the oxygen pump.

  In the oxygen pump of FIG. 7, the gas G1 to be treated is returned from the inner primary flow path Ma through the return flow path Mg and flows to the outer primary flow path Mc, but can also flow in the reverse direction. That is, the gas G1 to be treated can be fed to the outer primary flow path Mb and flowed in the axial direction, and returned to the primary flow path Ma through the return flow path Mg to be exhausted.

  Another embodiment to which the oxygen pump of FIG. 7 is applied will be described with reference to FIGS. 11 and 12. The oxygen pump of FIG. 11 corresponds to the oxygen pump of FIG. 7 with one solid electrolyte cylinder and one channel partition cylinder added. The oxygen pump of FIG. 11 has three circular solid electrolyte cylindrical bodies 10a, 10b, and 10c having different diameters in three stages of large, medium, and small as shown in FIG. A quintuple cylinder structure is provided in which the partition cylinders 20a and 20b are axially horizontal and assembled concentrically. In this case, a single channel partition cylinder 20a is installed between the minimum diameter solid electrolyte cylinder 10a and the medium diameter solid electrolyte cylinder 10b, and the medium diameter solid electrolyte cylinder 10b and the maximum diameter One channel partition cylinder 20b is installed in the middle of the solid electrolyte cylinder 10c.

  The internal space of the solid electrolyte cylindrical body 10a having the minimum diameter becomes the primary flow path Ma that allows the gas to be processed G1 to flow in the axial direction. A space between the medium-diameter solid electrolyte cylindrical body 10b and the flow path partitioning cylinder body 20a becomes a primary flow path Mb communicated in series with the primary flow path Ma and the return flow path Mg. A space between the medium-diameter solid electrolyte cylindrical body 10b and the flow path partitioning cylindrical body 20b becomes a primary flow path Mc connected in series by the primary flow path Mb and the return flow path Mh. The space between the solid electrolyte cylindrical body 10a having the minimum diameter and the flow path partitioning cylinder 20a becomes the secondary flow path Na that exhausts the secondary gas G2 in the axial direction. The space between the medium-diameter solid electrolyte cylindrical body 10b and the channel partitioning cylinder 20b and the external space of the maximum-diameter solid electrolyte cylindrical body 10c flow secondary gas G2 in the axial direction and exhaust the secondary gas. The flow paths become Nb and Nc.

  The pump operation for oxygen partial pressure control of the oxygen pump in FIG. 11 is performed in the same manner as the oxygen pump in FIG. In the case of the oxygen pump of FIG. 11, the gas G1 to be treated flows along the inner and outer surfaces of the three solid electrolyte cylindrical bodies 10a to 10c, so that the effective contact area between the gas and the solid electrolyte is further increased. This increases the amount of gas that can be processed.

  Each of the above-described embodiments is a laterally-positioned oxygen pump in which the center line of the solid electrolyte cylindrical body is horizontal. Next, a specific example of a vertically installed oxygen pump in which the center line of the solid electrolyte cylindrical body is substantially vertical will be described with reference to FIGS.

  The oxygen pump shown in FIGS. 13 and 14 corresponds to a vertical installation of the oxygen pump shown in FIG. That is, two circular solid electrolyte cylindrical bodies 10a and 10b having different diameters are concentrically combined, and the center lines of the solid electrolyte cylindrical bodies 10a and 10b are arranged substantially vertically. The lower ends of two vertically disposed solid electrolyte cylinders 10a and 10b are connected to a hollow lower cap 12, and the upper ends of the solid electrolyte cylinders 10a and 10b are connected to a hollow upper cap 13. Is done. A ring heater 40 is installed around the large-diameter solid electrolyte cylindrical body 10b.

  In a state where the solid electrolyte cylindrical bodies 10 a and 10 b are heated to about 700 ° C. by the heater 40, the gas G <b> 1 to be processed is fed to the flow path hole 14 in the lower cap 12. A primary flow path Ma, which is a cylindrical space between the flow path hole 14 of the lower cap 12 and each of the solid electrolyte cylindrical bodies 10a and 10b, communicates, and the gas to be processed fed from the outside to the flow path hole 14 G1 flows into the primary passage Ma and rises. While the gas to be treated G1 moves up the vertical primary flow path Ma, an ionization reaction of oxygen molecules is performed, and the treated gas enters the hollow upper cap 13 and is finally exhausted. Also, oxygen molecules released into the secondary flow path Na, which is the internal space of the solid electrolyte cylindrical body 10a, and the secondary flow path Nb, which is the external space of the solid electrolyte cylindrical body 10b, are the surrounding carrier gas (air). It is exhausted with. Similarly to the oxygen pump of FIG. 3, the oxygen pump of FIG. 13 increases the contact area between the gas and the solid electrolyte, and the amount of gas to be processed increases. In the case of the oxygen pump of FIG. 13, the cylindrical primary flow path Ma in which the gas to be processed G1 rises has no temperature difference in the circumferential direction, and the difference in oxygen transmission capacity in the circumferential direction is eliminated, so that the gas to be processed G1 flows as a primary flow. The oxygen partial pressure is uniformly controlled over the entire circumference of the path Ma. As a result, it is possible to improve the control accuracy of the oxygen partial pressure. The effect obtained by reducing the circumferential temperature difference in the cylindrical primary flow path is the same in the oxygen pumps of FIGS. 15 and 16.

  The oxygen pump shown in FIGS. 15 and 16 is an application of the oxygen pump shown in FIG. The oxygen pump of FIG. 15 uses a plurality of circular solid electrolyte cylindrical units 10 'that are unitized by concentrically combining two circular solid electrolyte cylindrical bodies 10a and 10b having different diameters. A plurality of solid electrolyte cylinders 10 ′ having the same size are placed on concentric circles at equal intervals with each central axis being vertical. The lower ends of a plurality of circular solid electrolyte cylindrical units 10 ′ vertically arranged are connected to a hollow lower cap 12, and the upper ends of each solid electrolyte cylindrical unit 10 ′ are connected to a hollow upper cap 13. Is done. A heat storage member such as a dummy pipe 15 is installed in a space surrounded by a plurality of solid electrolyte cylindrical units 10 ′ on concentric circles. The upper and lower ends of the dummy pipe 15 are fixed to the caps 12 and 13. A ring-shaped heater 40 is installed around a plurality of concentric solid electrolyte cylinder units 10 '.

  In the case of the oxygen pump of FIG. 15, the primary flow in which the cylindrical space between the inner solid electrolyte cylindrical body 10a and the outer solid electrolyte cylindrical body 10b of each of the plurality of solid electrolyte cylindrical units 10 ′ flows the gas G1 to be processed. The path Mp, and the space between the internal space of the inner solid electrolyte cylindrical body 10a and each solid electrolyte cylindrical body unit 10 'is the secondary flow path Np. Each solid electrolyte cylindrical body unit 10 ′ is placed vertically with the lower cap 12 facing down, and heated by the heater 40 from the surroundings. Since each solid electrolyte cylindrical unit 10 'is equidistant from the heater 40, it is heated uniformly with less heating spots. Further, the dummy pipe 15 in the internal space surrounded by each solid electrolyte cylindrical unit 10 ′ is also heated by the heater 40. The solid electrolyte cylindrical unit 10 ′ around the dummy pipe 15 is heated by the heat storage of the dummy pipe 15. That is, since each of the plurality of solid electrolyte tubular units 107 is heated from both inside and outside, it is heated uniformly with a small temperature difference in the circumferential direction, and the heating efficiency is improved. Can be suppressed.

  In a state where each solid electrolyte cylindrical body unit 10 ′ is heated to about 700 ° C., the gas G <b> 1 to be processed is fed to the flow path hole 14 of the lower cap 12. The flow path hole 14 and the primary flow path Mp of each solid electrolyte cylindrical body unit 10 ′ are communicated with each other, and the gas to be processed G1 fed from the outside to the lower cap 12 is supplied to each solid electrolyte cylindrical body unit 10 ′. Into the primary passage Mp at substantially the same amount and rise. While the gas to be treated G1 moves up the vertical primary flow path Mp, the ionization reaction of oxygen molecules is uniformly performed in the circumferential direction, and the control accuracy of the oxygen partial pressure can be increased. Finally, the treated gas enters the hollow upper cap 13 and is exhausted. In addition, oxygen molecules released into the secondary flow path Np, which is the external space of each solid electrolyte cylindrical unit 10 ', are exhausted together with the surrounding carrier gas (air). Since the gas to be processed G1 fed to the lower cap 12 passes through the plurality of solid electrolyte cylindrical units 10 ′, the contact area between the gas and the solid electrolyte increases, and the amount of gas to be processed increases. .

  Although the solid electrolyte cylindrical unit 10 ′ of the oxygen pump shown in FIG. 15 is a double cylindrical structure, it may be a double or more multiple cylindrical structure, or only a single solid electrolyte cylindrical body. Structures that are not unitized are also possible. Specific examples thereof are shown in FIGS.

  The oxygen pump shown in FIG. 17 and FIG. 18 is an application of the oxygen pump of FIG. 13, and a plurality of circular solid electrolyte cylinders 11 having the same diameter and the same length are arranged concentrically with their central axes vertical. It is installed in. The lower ends of the plurality of circular solid electrolyte cylinders 11 vertically arranged vertically are connected to the hollow lower cap 12, and the upper ends are connected to the hollow upper cap 13. A dummy pipe 15 as a heat storage member is installed in a space surrounded by a plurality of solid electrolyte cylindrical bodies 11 on concentric circles. The upper and lower ends of the dummy pipe 15 are fixed to the caps 12 and 13. A ring heater 40 is installed around the plurality of concentric solid electrolyte cylinders 11.

  In the case of the oxygen pump of FIG. 17, the internal space of each of the plurality of solid electrolyte cylindrical bodies 11 is a primary flow path Mp through which the gas to be processed G1 flows, and the space between the solid electrolyte cylindrical bodies 11 is a secondary flow path. Np. Each solid electrolyte cylindrical body 11 is placed vertically with the lower cap 12 facing down, and heated by the heater 40 from the surroundings. Since each solid electrolyte cylindrical body 11 is equidistant from the heater 40, it is heated uniformly with less heating spots, and the dummy pipe 15 is also heated by the heater 40. Each solid electrolyte cylindrical body 11 around the dummy pipe 15 is heated by the heat storage of the dummy pipe 15. Also in this case, since each of the plurality of solid electrolyte cylindrical bodies 11 is heated from both inside and outside, the heating efficiency is improved and the power consumption of the heater 40 can be suppressed.

  In a state where each solid electrolyte cylindrical body 11 is heated to about 700 ° C., the gas G1 to be treated is fed to the flow path hole 14 of the lower cap 12. The flow path hole 14 and the primary flow path Mp of each solid electrolyte cylindrical body 11 communicate with each other, and the gas G1 to be treated fed from the outside to the lower cap 12 flows into the primary passage Mp of each solid electrolyte cylindrical body 11. At the same time, it flows in almost the same amount and rises. While the gas to be processed G1 moves up the vertical primary flow path Mp, an ionization reaction of oxygen molecules is performed, and the processed gas enters the hollow upper cap 13 and is finally exhausted. Further, oxygen molecules released into the secondary flow path Np, which is the external space of each solid electrolyte cylindrical body 11, are exhausted together with the surrounding carrier gas. Since the gas to be processed G1 fed to the lower cap 12 passes through the plurality of solid electrolyte cylindrical bodies 11, the contact area between the gas and the solid electrolyte increases, and the amount of gas to be processed increases. In addition, since the plurality of solid electrolyte cylindrical bodies 11 are uniformly heated and the difference in oxygen permeability between solids is eliminated, the control accuracy of the oxygen partial pressure can be improved.

  The gas pump of the present invention is not limited to the above-described embodiment, and various changes can be made without departing from the scope of the claims.

(A)-(C) are sectional drawings for demonstrating various embodiment of a gas pump (oxygen pump). (A) (B) is sectional drawing for demonstrating other embodiment. It is sectional drawing which shows the specific example of the gas pump of FIG. 1 (A). It is sectional drawing which follows the T1-T1 line | wire of FIG. It is sectional drawing which shows the outline | summary of the gas pump which shows other embodiment. It is a disassembled perspective view of the principal part of the gas pump of FIG. It is sectional drawing which shows the outline | summary of the gas pump which shows other embodiment. It is sectional drawing which follows the T2-T2 line | wire of FIG. It is a left view of the principal part of the gas pump of FIG. It is sectional drawing which follows the T3-T3 line | wire of FIG. It is sectional drawing which shows the outline | summary of the gas pump which shows other embodiment. It is a disassembled perspective view of the principal part of the gas pump of FIG. It is a side view including the partial cross section which shows the outline | summary of the gas pump which shows other embodiment. It is sectional drawing which follows the T4-T4 line | wire of FIG. It is a side view including the partial cross section which shows the outline | summary of the gas pump which shows other embodiment. It is sectional drawing which follows the T5-T5 line | wire of FIG. It is a side view including the partial cross section which shows the outline | summary of the gas pump which shows other embodiment. It is sectional drawing which follows the T6-T6 line | wire of FIG. It is a block diagram of the installation using an oxygen pump. It is sectional drawing which shows the outline | summary of an oxygen pump.

Explanation of symbols

10a to 10d Solid electrolyte cylindrical body 10 'Solid electrolyte cylindrical body unit 11 Solid electrolyte cylindrical body 12 Lower cap 13 Upper cap 15 Dummy pipe 20a, 20b Channel partition cylindrical body 31 Cap 32 Cap 40 Heating device, ring-shaped heater G1 Gas to be treated G2 Secondary gas E DC power source +,-Electrode M Primary flow path N Secondary flow path

Claims (11)

A plurality of concentrically arranged, each having electrodes on both the inner and outer surfaces, a plurality of solid electrolyte cylindrical bodies having different diameters;
A direct current power source that applies voltages having different polarities to the electrodes on both the inner and outer surfaces of each of the plurality of solid electrolyte cylindrical bodies;
A heating device disposed around the outermost solid electrolyte tubular body;
A gas pump comprising:   In the cylindrical space between the plurality of solid electrolyte cylinders, an odd-numbered space counted from the internal space of the solid electrolyte cylinder with the smallest diameter is a solid secondary gas based on the processing of the gas to be pumped. As a secondary flow path that flows in the axial direction of the electrolyte cylindrical body, and the remaining even-numbered space as a primary flow path that is separated from the secondary flow path, the gas to be treated is supplied to the primary flow path as a solid electrolyte cylindrical body. The voltage having different polarities is applied to the surface of the solid electrolyte cylindrical body in contact with the primary flow path and the surface of the solid electrolyte cylindrical body in contact with the secondary flow path while flowing in the axial direction. Gas pump.   In the cylindrical space between the plurality of solid electrolyte cylindrical bodies, the odd-numbered space counted from the internal space of the solid electrolyte cylindrical body with the smallest diameter is the target gas to be pumped in the axial direction of the solid electrolyte cylindrical body. As a primary flow path to flow, the remaining even-numbered space as a secondary flow path that is separated from the primary flow path, a secondary gas based on the processing of the gas to be processed is flowed to the secondary flow path, and the primary flow 2. The gas pump according to claim 1, wherein voltages having different polarities are applied to the surface of the solid electrolyte cylindrical body in contact with the flow path and the surface of the solid electrolyte cylindrical body in contact with the secondary flow path.   In the cylindrical space between the plurality of solid electrolyte cylindrical bodies, a flow path partitioning cylinder that divides this space into an inner space and an outer space is disposed concentrically with the solid electrolyte cylindrical body, and is divided. One of the inner space and the outer space is used as a primary flow path for flowing the gas to be pumped in the direction of the solid electrolyte cylindrical body, and the other is a secondary flow path for flowing a secondary gas based on the processing of the gas to be processed. The gas pump according to claim 1, wherein voltages having different polarities are applied to the surface of the solid electrolyte cylindrical body in contact with the primary flow path and the surface of the solid electrolyte cylindrical body in contact with the secondary flow path.   The primary flow path and the secondary flow path are alternately arranged in multiple layers, the primary flow paths that are adjacent in the radial direction are connected in series, and the gas to be processed flowing out from one of the adjacent primary flow paths is opposed. The gas pump according to any one of claims 2 to 4, wherein the gas pump is returned in the direction and allowed to flow into the other.   The primary flow paths and the secondary flow paths are alternately arranged in multiple layers, and the primary flow paths adjacent in the radial direction are connected in parallel so that the processing gas flows through the adjacent primary flow paths in the same direction. The gas pump according to any one of claims 2 to 4, wherein the gas pump is configured as described above.   The gas pump according to any one of claims 1 to 6, wherein the plurality of solid electrolyte cylindrical bodies are arranged in multiples in a vertically placed specification in which each center line is substantially vertical.   The gas pump according to claim 7, wherein a hollow cap having a flow path hole communicating with the primary flow path is fitted to lower end portions of the plurality of solid electrolyte cylindrical bodies.   A plurality of solid electrolyte cylinder units composed of the plurality of solid electrolyte cylinders arranged concentrically and in a plurality are arranged at equal intervals on concentric circles in a vertically placed specification in which each center line is substantially vertical. The gas pump according to claim 7 or 8, wherein each solid electrolyte cylindrical body unit is heated by a ring-shaped heating device surrounding the plurality of solid electrolyte cylindrical body units.   The gas pump according to claim 9, wherein a heat storage member that stores heat by being heated by the heating device is disposed in a space surrounded by the plurality of solid electrolyte cylindrical units.   The gas pump according to any one of claims 1 to 10, wherein the solid electrolyte cylindrical body is an oxide ion conductor.

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