JP2006526805A - 隠れヒンジを備えた高充填率反射型空間光変調器の作製 - Google Patents

隠れヒンジを備えた高充填率反射型空間光変調器の作製 Download PDF

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Publication number
JP2006526805A
JP2006526805A JP2006508734A JP2006508734A JP2006526805A JP 2006526805 A JP2006526805 A JP 2006526805A JP 2006508734 A JP2006508734 A JP 2006508734A JP 2006508734 A JP2006508734 A JP 2006508734A JP 2006526805 A JP2006526805 A JP 2006526805A
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JP
Japan
Prior art keywords
mirror plate
micromirror
hinge
array
mirror
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Pending
Application number
JP2006508734A
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English (en)
Japanese (ja)
Inventor
パン、ショアー、エックス
ヤン、シャオ
Original Assignee
ミラディア インク
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Application filed by ミラディア インク filed Critical ミラディア インク
Publication of JP2006526805A publication Critical patent/JP2006526805A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
JP2006508734A 2003-06-02 2004-02-12 隠れヒンジを備えた高充填率反射型空間光変調器の作製 Pending JP2006526805A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US47540403P 2003-06-02 2003-06-02
US61112103A 2003-06-30 2003-06-30
PCT/US2004/004279 WO2004109363A1 (en) 2003-06-02 2004-02-12 High fill ratio reflective spatial light modulator with hidden hinge

Publications (1)

Publication Number Publication Date
JP2006526805A true JP2006526805A (ja) 2006-11-24

Family

ID=33514052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006508734A Pending JP2006526805A (ja) 2003-06-02 2004-02-12 隠れヒンジを備えた高充填率反射型空間光変調器の作製

Country Status (5)

Country Link
EP (1) EP1636628A4 (de)
JP (1) JP2006526805A (de)
KR (1) KR20060014434A (de)
TW (2) TWI467231B (de)
WO (1) WO2004109363A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011170299A (ja) * 2010-02-22 2011-09-01 Nikon Corp 空間光変調器、照明装置、露光装置およびそれらの製造方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7483198B2 (en) 2003-02-12 2009-01-27 Texas Instruments Incorporated Micromirror device and method for making the same
US7113322B2 (en) 2004-06-23 2006-09-26 Reflectivity, Inc Micromirror having offset addressing electrode
US7119944B2 (en) 2004-08-25 2006-10-10 Reflectivity, Inc. Micromirror device and method for making the same
US6980349B1 (en) 2004-08-25 2005-12-27 Reflectivity, Inc Micromirrors with novel mirror plates
US7215459B2 (en) 2004-08-25 2007-05-08 Reflectivity, Inc. Micromirror devices with in-plane deformable hinge
US7019880B1 (en) 2004-08-25 2006-03-28 Reflectivity, Inc Micromirrors and hinge structures for micromirror arrays in projection displays
US7436572B2 (en) 2004-08-25 2008-10-14 Texas Instruments Incorporated Micromirrors and hinge structures for micromirror arrays in projection displays
US11109004B2 (en) 2018-07-31 2021-08-31 Texas Instruments Incorporated Display with increased pixel count
US11131796B2 (en) 2018-09-10 2021-09-28 Texas Instruments Incorporated Optical display with spatial light modulator
US20210111537A1 (en) * 2019-10-15 2021-04-15 Texas Instruments Incorporated Mems-based phase spatial light modulating architecture

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09101467A (ja) * 1995-05-31 1997-04-15 Texas Instr Inc <Ti> 空間光変調器
JPH11344680A (ja) * 1998-04-10 1999-12-14 Samsung Electronics Co Ltd 画像表示装置用マイクロミラ―デバイス
JP2001513223A (ja) * 1997-12-22 2001-08-28 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング マイクロメカニカル式の装置のための製造方法
US6323982B1 (en) * 1998-05-22 2001-11-27 Texas Instruments Incorporated Yield superstructure for digital micromirror device
US20020117728A1 (en) * 2000-08-03 2002-08-29 Brosnihhan Timothy J. Bonded wafer optical MEMS process
US20020122238A1 (en) * 2000-12-28 2002-09-05 Knipe Richard L. Capacitively coupled micromirror
US20030095318A1 (en) * 2001-11-21 2003-05-22 Dicarlo Anthony Yokeless hidden hinge digital micromirror device
US20030117686A1 (en) * 2001-12-12 2003-06-26 Dicarlo Anthony Digital micromirror device having mirror-attached spring tips
US20040136044A1 (en) * 2002-10-31 2004-07-15 Miller Seth A. Coating for optical MEMS devices
US20040184133A1 (en) * 2003-03-18 2004-09-23 Tao Su Microsystem package structure
US20050041277A1 (en) * 1995-06-19 2005-02-24 Huibers Andrew G. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
JP2005529377A (ja) * 2002-06-19 2005-09-29 ミラディア インク 反射型空間光変調器の構造
JP2006517688A (ja) * 2003-02-12 2006-07-27 リフレクティヴィティー， インク． 投写型ディスプレイにおけるマイクロミラーアレイ用のマイクロミラーおよび非対角上ヒンジ構造
JP2006518882A (ja) * 2003-02-24 2006-08-17 エクサジュール リミテッド ライアビリティ カンパニー 隠されたヒンジ構造を備えるマルチチルト型マイクロミラーシステム
JP2007521509A (ja) * 2003-07-03 2007-08-02 リフレクティヴィティー， インク． 静電界を用いてマイクロミラーの結合を高めるための機構を備えたマイクロミラー

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5312513A (en) * 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09101467A (ja) * 1995-05-31 1997-04-15 Texas Instr Inc <Ti> 空間光変調器
US20050041277A1 (en) * 1995-06-19 2005-02-24 Huibers Andrew G. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
JP2001513223A (ja) * 1997-12-22 2001-08-28 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング マイクロメカニカル式の装置のための製造方法
JPH11344680A (ja) * 1998-04-10 1999-12-14 Samsung Electronics Co Ltd 画像表示装置用マイクロミラ―デバイス
US6323982B1 (en) * 1998-05-22 2001-11-27 Texas Instruments Incorporated Yield superstructure for digital micromirror device
US20020117728A1 (en) * 2000-08-03 2002-08-29 Brosnihhan Timothy J. Bonded wafer optical MEMS process
US20020122238A1 (en) * 2000-12-28 2002-09-05 Knipe Richard L. Capacitively coupled micromirror
US20030095318A1 (en) * 2001-11-21 2003-05-22 Dicarlo Anthony Yokeless hidden hinge digital micromirror device
US20030117686A1 (en) * 2001-12-12 2003-06-26 Dicarlo Anthony Digital micromirror device having mirror-attached spring tips
JP2005529377A (ja) * 2002-06-19 2005-09-29 ミラディア インク 反射型空間光変調器の構造
US20040136044A1 (en) * 2002-10-31 2004-07-15 Miller Seth A. Coating for optical MEMS devices
JP2006517688A (ja) * 2003-02-12 2006-07-27 リフレクティヴィティー， インク． 投写型ディスプレイにおけるマイクロミラーアレイ用のマイクロミラーおよび非対角上ヒンジ構造
JP2006518882A (ja) * 2003-02-24 2006-08-17 エクサジュール リミテッド ライアビリティ カンパニー 隠されたヒンジ構造を備えるマルチチルト型マイクロミラーシステム
US20040184133A1 (en) * 2003-03-18 2004-09-23 Tao Su Microsystem package structure
JP2007521509A (ja) * 2003-07-03 2007-08-02 リフレクティヴィティー， インク． 静電界を用いてマイクロミラーの結合を高めるための機構を備えたマイクロミラー

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011170299A (ja) * 2010-02-22 2011-09-01 Nikon Corp 空間光変調器、照明装置、露光装置およびそれらの製造方法

Also Published As

Publication number Publication date
KR20060014434A (ko) 2006-02-15
WO2004109363A1 (en) 2004-12-16
EP1636628A4 (de) 2009-04-15
TWI363882B (en) 2012-05-11
TW200528752A (en) 2005-09-01
TW201144860A (en) 2011-12-16
TWI467231B (zh) 2015-01-01
EP1636628A1 (de) 2006-03-22

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