EP1636628A1 - Reflektiver raum-lichtmodulator mit hohem füllverhältnis mit verborgenem schwenkglied - Google Patents

Reflektiver raum-lichtmodulator mit hohem füllverhältnis mit verborgenem schwenkglied

Info

Publication number
EP1636628A1
EP1636628A1 EP04710674A EP04710674A EP1636628A1 EP 1636628 A1 EP1636628 A1 EP 1636628A1 EP 04710674 A EP04710674 A EP 04710674A EP 04710674 A EP04710674 A EP 04710674A EP 1636628 A1 EP1636628 A1 EP 1636628A1
Authority
EP
European Patent Office
Prior art keywords
mirror
micro
hinge
minor
mirror plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04710674A
Other languages
English (en)
French (fr)
Other versions
EP1636628A4 (de
Inventor
Shaoher X. Pan
Xiao Yang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miradia Inc
Original Assignee
Miradia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miradia Inc filed Critical Miradia Inc
Publication of EP1636628A1 publication Critical patent/EP1636628A1/de
Publication of EP1636628A4 publication Critical patent/EP1636628A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Definitions

  • SLMs Spatial light modulators
  • Reflective SLMs are devices that modulate incident light in a spatial pattern to reflect an image corresponding to an electrical or optical input. The incident light may be modulated in phase, intensity, polarization, or deflection direction.
  • a reflective SLM is typically comprised of an area or two-dimensional array of addressable picture elements (pixels) capable of reflecting incident light.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
EP04710674A 2003-06-02 2004-02-12 Reflektiver raum-lichtmodulator mit hohem füllverhältnis mit verborgenem schwenkglied Withdrawn EP1636628A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US47540403P 2003-06-02 2003-06-02
US61112103A 2003-06-30 2003-06-30
PCT/US2004/004279 WO2004109363A1 (en) 2003-06-02 2004-02-12 High fill ratio reflective spatial light modulator with hidden hinge

Publications (2)

Publication Number Publication Date
EP1636628A1 true EP1636628A1 (de) 2006-03-22
EP1636628A4 EP1636628A4 (de) 2009-04-15

Family

ID=33514052

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04710674A Withdrawn EP1636628A4 (de) 2003-06-02 2004-02-12 Reflektiver raum-lichtmodulator mit hohem füllverhältnis mit verborgenem schwenkglied

Country Status (5)

Country Link
EP (1) EP1636628A4 (de)
JP (1) JP2006526805A (de)
KR (1) KR20060014434A (de)
TW (2) TWI363882B (de)
WO (1) WO2004109363A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7483198B2 (en) 2003-02-12 2009-01-27 Texas Instruments Incorporated Micromirror device and method for making the same
US7113322B2 (en) 2004-06-23 2006-09-26 Reflectivity, Inc Micromirror having offset addressing electrode
US7119944B2 (en) 2004-08-25 2006-10-10 Reflectivity, Inc. Micromirror device and method for making the same
US7215459B2 (en) 2004-08-25 2007-05-08 Reflectivity, Inc. Micromirror devices with in-plane deformable hinge
US7019880B1 (en) 2004-08-25 2006-03-28 Reflectivity, Inc Micromirrors and hinge structures for micromirror arrays in projection displays
US7436572B2 (en) 2004-08-25 2008-10-14 Texas Instruments Incorporated Micromirrors and hinge structures for micromirror arrays in projection displays
US6980349B1 (en) 2004-08-25 2005-12-27 Reflectivity, Inc Micromirrors with novel mirror plates
JP5509912B2 (ja) * 2010-02-22 2014-06-04 株式会社ニコン 空間光変調器、照明装置、露光装置およびそれらの製造方法
US11109004B2 (en) 2018-07-31 2021-08-31 Texas Instruments Incorporated Display with increased pixel count
US11131796B2 (en) 2018-09-10 2021-09-28 Texas Instruments Incorporated Optical display with spatial light modulator
US20210111537A1 (en) * 2019-10-15 2021-04-15 Texas Instruments Incorporated Mems-based phase spatial light modulating architecture

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
EP0949527A1 (de) * 1998-04-10 1999-10-13 Samsung Electronics Co., Ltd. Mikrospiegel Vorrichtung für ein Bildanzeigesystem
US6369931B1 (en) * 1997-12-22 2002-04-09 Robert Bosch Gmbh Method for manufacturing a micromechanical device
US20020117728A1 (en) * 2000-08-03 2002-08-29 Brosnihhan Timothy J. Bonded wafer optical MEMS process
US20020122238A1 (en) * 2000-12-28 2002-09-05 Knipe Richard L. Capacitively coupled micromirror
US20030095318A1 (en) * 2001-11-21 2003-05-22 Dicarlo Anthony Yokeless hidden hinge digital micromirror device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5312513A (en) * 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6323982B1 (en) * 1998-05-22 2001-11-27 Texas Instruments Incorporated Yield superstructure for digital micromirror device
US6867897B2 (en) * 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
US6873450B2 (en) * 2000-08-11 2005-03-29 Reflectivity, Inc Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
US6856446B2 (en) * 2001-12-12 2005-02-15 Texas Instruments Incorporated Digital micromirror device having mirror-attached spring tips
US20040004753A1 (en) * 2002-06-19 2004-01-08 Pan Shaoher X. Architecture of a reflective spatial light modulator
US7009745B2 (en) * 2002-10-31 2006-03-07 Texas Instruments Incorporated Coating for optical MEMS devices
US6900922B2 (en) * 2003-02-24 2005-05-31 Exajoule, Llc Multi-tilt micromirror systems with concealed hinge structures
TW591778B (en) * 2003-03-18 2004-06-11 Advanced Semiconductor Eng Package structure for a microsystem

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US6369931B1 (en) * 1997-12-22 2002-04-09 Robert Bosch Gmbh Method for manufacturing a micromechanical device
EP0949527A1 (de) * 1998-04-10 1999-10-13 Samsung Electronics Co., Ltd. Mikrospiegel Vorrichtung für ein Bildanzeigesystem
US20020117728A1 (en) * 2000-08-03 2002-08-29 Brosnihhan Timothy J. Bonded wafer optical MEMS process
US20020122238A1 (en) * 2000-12-28 2002-09-05 Knipe Richard L. Capacitively coupled micromirror
US20030095318A1 (en) * 2001-11-21 2003-05-22 Dicarlo Anthony Yokeless hidden hinge digital micromirror device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2004109363A1 *

Also Published As

Publication number Publication date
TW200528752A (en) 2005-09-01
JP2006526805A (ja) 2006-11-24
TWI467231B (zh) 2015-01-01
TW201144860A (en) 2011-12-16
TWI363882B (en) 2012-05-11
KR20060014434A (ko) 2006-02-15
WO2004109363A1 (en) 2004-12-16
EP1636628A4 (de) 2009-04-15

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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RIN1 Information on inventor provided before grant (corrected)

Inventor name: YANG, XIAO

Inventor name: PAN, SHAOHER, X.

A4 Supplementary search report drawn up and despatched

Effective date: 20090317

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Effective date: 20090619

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Effective date: 20091030