TW201144860A - Method of operating a micro mirror array - Google Patents

Method of operating a micro mirror array

Info

Publication number
TW201144860A
TW201144860A TW100124813A TW100124813A TW201144860A TW 201144860 A TW201144860 A TW 201144860A TW 100124813 A TW100124813 A TW 100124813A TW 100124813 A TW100124813 A TW 100124813A TW 201144860 A TW201144860 A TW 201144860A
Authority
TW
Taiwan
Prior art keywords
mirror array
micro mirror
operating
hinge
mirror plate
Prior art date
Application number
TW100124813A
Other languages
Chinese (zh)
Other versions
TWI467231B (en
Inventor
Shaoher X Pan
Xiao Yang
Original Assignee
Miradia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miradia Inc filed Critical Miradia Inc
Publication of TW201144860A publication Critical patent/TW201144860A/en
Application granted granted Critical
Publication of TWI467231B publication Critical patent/TWI467231B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)

Abstract

A micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a hinge, a mirror plate and a reflective surface on the upper surface of the mirror plate, the reflective surface concealing the hinge and the mirror plate. The micro mirror array fabricated from a single material.
TW100124813A 2003-06-02 2004-06-02 Method of operating a micro mirror array TWI467231B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47540403P 2003-06-02 2003-06-02
US61112103A 2003-06-30 2003-06-30

Publications (2)

Publication Number Publication Date
TW201144860A true TW201144860A (en) 2011-12-16
TWI467231B TWI467231B (en) 2015-01-01

Family

ID=33514052

Family Applications (2)

Application Number Title Priority Date Filing Date
TW100124813A TWI467231B (en) 2003-06-02 2004-06-02 Method of operating a micro mirror array
TW93115857A TWI363882B (en) 2003-06-02 2004-06-02 High fill ratio reflective spatial light modulator with hidden hinge

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW93115857A TWI363882B (en) 2003-06-02 2004-06-02 High fill ratio reflective spatial light modulator with hidden hinge

Country Status (5)

Country Link
EP (1) EP1636628A4 (en)
JP (1) JP2006526805A (en)
KR (1) KR20060014434A (en)
TW (2) TWI467231B (en)
WO (1) WO2004109363A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7483198B2 (en) 2003-02-12 2009-01-27 Texas Instruments Incorporated Micromirror device and method for making the same
US7113322B2 (en) 2004-06-23 2006-09-26 Reflectivity, Inc Micromirror having offset addressing electrode
US7119944B2 (en) 2004-08-25 2006-10-10 Reflectivity, Inc. Micromirror device and method for making the same
US6980349B1 (en) 2004-08-25 2005-12-27 Reflectivity, Inc Micromirrors with novel mirror plates
US7215459B2 (en) 2004-08-25 2007-05-08 Reflectivity, Inc. Micromirror devices with in-plane deformable hinge
US7019880B1 (en) 2004-08-25 2006-03-28 Reflectivity, Inc Micromirrors and hinge structures for micromirror arrays in projection displays
US7436572B2 (en) 2004-08-25 2008-10-14 Texas Instruments Incorporated Micromirrors and hinge structures for micromirror arrays in projection displays
JP5509912B2 (en) * 2010-02-22 2014-06-04 株式会社ニコン Spatial light modulator, illumination device, exposure device, and manufacturing method thereof
US11109004B2 (en) 2018-07-31 2021-08-31 Texas Instruments Incorporated Display with increased pixel count
US11131796B2 (en) 2018-09-10 2021-09-28 Texas Instruments Incorporated Optical display with spatial light modulator
US20210111537A1 (en) * 2019-10-15 2021-04-15 Texas Instruments Incorporated Mems-based phase spatial light modulating architecture

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5312513A (en) * 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
DE19757197A1 (en) * 1997-12-22 1999-06-24 Bosch Gmbh Robert Manufacturing method for micromechanical device, esp. for resonant oscillating mirror device
KR100313851B1 (en) * 1998-04-10 2001-12-12 윤종용 Micromirror device for image display apparatus
US6323982B1 (en) * 1998-05-22 2001-11-27 Texas Instruments Incorporated Yield superstructure for digital micromirror device
US7083997B2 (en) * 2000-08-03 2006-08-01 Analog Devices, Inc. Bonded wafer optical MEMS process
US6867897B2 (en) * 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
US6873450B2 (en) * 2000-08-11 2005-03-29 Reflectivity, Inc Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
US6906850B2 (en) * 2000-12-28 2005-06-14 Texas Instruments Incorporated Capacitively coupled micromirror
EP1315016B1 (en) * 2001-11-21 2006-08-23 Texas Instruments Incorporated Yokeless hidden hinge digital micromirror device
US6856446B2 (en) * 2001-12-12 2005-02-15 Texas Instruments Incorporated Digital micromirror device having mirror-attached spring tips
US20040004753A1 (en) * 2002-06-19 2004-01-08 Pan Shaoher X. Architecture of a reflective spatial light modulator
US7009745B2 (en) * 2002-10-31 2006-03-07 Texas Instruments Incorporated Coating for optical MEMS devices
US6900922B2 (en) * 2003-02-24 2005-05-31 Exajoule, Llc Multi-tilt micromirror systems with concealed hinge structures
TW591778B (en) * 2003-03-18 2004-06-11 Advanced Semiconductor Eng Package structure for a microsystem

Also Published As

Publication number Publication date
KR20060014434A (en) 2006-02-15
WO2004109363A1 (en) 2004-12-16
EP1636628A4 (en) 2009-04-15
TWI363882B (en) 2012-05-11
TW200528752A (en) 2005-09-01
JP2006526805A (en) 2006-11-24
TWI467231B (en) 2015-01-01
EP1636628A1 (en) 2006-03-22

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees