JP2006512545A5 - - Google Patents

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Publication number
JP2006512545A5
JP2006512545A5 JP2004563495A JP2004563495A JP2006512545A5 JP 2006512545 A5 JP2006512545 A5 JP 2006512545A5 JP 2004563495 A JP2004563495 A JP 2004563495A JP 2004563495 A JP2004563495 A JP 2004563495A JP 2006512545 A5 JP2006512545 A5 JP 2006512545A5
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JP
Japan
Prior art keywords
fluid
channel
block
purge
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004563495A
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English (en)
Japanese (ja)
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JP2006512545A (ja
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Publication date
Priority claimed from US10/733,761 external-priority patent/US7195026B2/en
Application filed filed Critical
Publication of JP2006512545A publication Critical patent/JP2006512545A/ja
Publication of JP2006512545A5 publication Critical patent/JP2006512545A5/ja
Withdrawn legal-status Critical Current

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JP2004563495A 2002-12-27 2003-12-19 薬品配送システム中に高純度流体を配送するためのマイクロ電子機器システム Withdrawn JP2006512545A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US43673102P 2002-12-27 2002-12-27
US43673202P 2002-12-27 2002-12-27
US10/733,761 US7195026B2 (en) 2002-12-27 2003-12-12 Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
PCT/IB2003/006199 WO2004058425A2 (en) 2002-12-27 2003-12-19 Micro electromechanical systems for delivering high purity fluids in a chemical delivery system

Publications (2)

Publication Number Publication Date
JP2006512545A JP2006512545A (ja) 2006-04-13
JP2006512545A5 true JP2006512545A5 (US06582424-20030624-M00016.png) 2006-06-01

Family

ID=32686098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004563495A Withdrawn JP2006512545A (ja) 2002-12-27 2003-12-19 薬品配送システム中に高純度流体を配送するためのマイクロ電子機器システム

Country Status (5)

Country Link
US (2) US7195026B2 (US06582424-20030624-M00016.png)
EP (1) EP1578546A2 (US06582424-20030624-M00016.png)
JP (1) JP2006512545A (US06582424-20030624-M00016.png)
AU (1) AU2003288636A1 (US06582424-20030624-M00016.png)
WO (1) WO2004058425A2 (US06582424-20030624-M00016.png)

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US7780785B2 (en) * 2001-10-26 2010-08-24 Applied Materials, Inc. Gas delivery apparatus for atomic layer deposition
US7186385B2 (en) * 2002-07-17 2007-03-06 Applied Materials, Inc. Apparatus for providing gas to a processing chamber
US7437944B2 (en) * 2003-12-04 2008-10-21 Applied Materials, Inc. Method and apparatus for pressure and mix ratio control
US7273272B2 (en) * 2004-03-22 2007-09-25 Fuji Photo Film Co., Ltd. Liquid supply device and image forming apparatus
MY169584A (en) 2005-04-25 2019-04-22 Entegris Inc Liner-based liquid storage and dispensing system with empty detection capability
KR20110017462A (ko) 2005-06-06 2011-02-21 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 유체 저장 및 분배 시스템과 프로세스
US7464917B2 (en) * 2005-10-07 2008-12-16 Appiled Materials, Inc. Ampoule splash guard apparatus
US20070175392A1 (en) * 2006-01-27 2007-08-02 American Air Liquide, Inc. Multiple precursor dispensing apparatus
US8951478B2 (en) * 2006-03-30 2015-02-10 Applied Materials, Inc. Ampoule with a thermally conductive coating
US7562672B2 (en) * 2006-03-30 2009-07-21 Applied Materials, Inc. Chemical delivery apparatus for CVD or ALD
FR2919725B1 (fr) * 2007-08-02 2010-04-30 Air Liquide Dispositif de dilution d'un fluide
US20090090164A1 (en) * 2007-10-08 2009-04-09 Air Liquide Electronics U.S. Lp Method for volumetrically calibrating a liquid flow controller while maintaining the liquid in a closed system
US8191397B2 (en) * 2007-12-12 2012-06-05 Air Liquide Electronics U.S. Lp Methods for checking and calibrating concentration sensors in a semiconductor processing chamber
US10005082B2 (en) 2008-04-11 2018-06-26 Incyto Co., Ltd. Microfluidic circuit element comprising microfluidic channel with nano interstices and fabrication method thereof
KR100998535B1 (ko) * 2008-04-11 2010-12-07 인싸이토 주식회사 나노틈새를 가지는 미세유체 채널이 구비된 미세유체회로소자 및 이의 제조 방법
DE102008036269A1 (de) * 2008-08-04 2010-02-11 Ewe Ag Vorrichtung zum kontinuierlichen Mischen von ausgespeichertem Erdgas mit Sauerstoff zu einem Brenngas für eine Erwärmung des unter Druck stehenden Erdgases vor oder nach seiner Entspannung
US8146896B2 (en) * 2008-10-31 2012-04-03 Applied Materials, Inc. Chemical precursor ampoule for vapor deposition processes
US9137895B2 (en) * 2008-12-24 2015-09-15 Stmicroelectronics S.R.L. Micro-electro-mechanical systems (MEMS) and corresponding manufacturing process
JP5646196B2 (ja) * 2010-03-30 2014-12-24 武蔵エンジニアリング株式会社 吐出装置および液体分注装置並びに液体分注方法
EP2571696B1 (en) 2010-05-21 2019-08-07 Hewlett-Packard Development Company, L.P. Fluid ejection device with circulation pump
US8721061B2 (en) 2010-05-21 2014-05-13 Hewlett-Packard Development Company, L.P. Fluid ejection device with circulation pump
US9090084B2 (en) 2010-05-21 2015-07-28 Hewlett-Packard Development Company, L.P. Fluid ejection device including recirculation system
US10132303B2 (en) 2010-05-21 2018-11-20 Hewlett-Packard Development Company, L.P. Generating fluid flow in a fluidic network
US9963739B2 (en) 2010-05-21 2018-05-08 Hewlett-Packard Development Company, L.P. Polymerase chain reaction systems
JP5885548B2 (ja) * 2012-03-12 2016-03-15 株式会社神戸製鋼所 多流路機器の運転方法及び多流路機器
WO2015022176A1 (en) * 2013-08-12 2015-02-19 Koninklijke Philips N.V. Microfluidic device with valve

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