JP2006512545A5 - - Google Patents
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- Publication number
- JP2006512545A5 JP2006512545A5 JP2004563495A JP2004563495A JP2006512545A5 JP 2006512545 A5 JP2006512545 A5 JP 2006512545A5 JP 2004563495 A JP2004563495 A JP 2004563495A JP 2004563495 A JP2004563495 A JP 2004563495A JP 2006512545 A5 JP2006512545 A5 JP 2006512545A5
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- channel
- block
- purge
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012530 fluid Substances 0.000 claims 565
- 238000000034 method Methods 0.000 claims 255
- 238000010926 purge Methods 0.000 claims 193
- 238000004891 communication Methods 0.000 claims 111
- 238000009826 distribution Methods 0.000 claims 36
- 239000004065 semiconductor Substances 0.000 claims 35
- 229910052710 silicon Inorganic materials 0.000 claims 9
- 239000010703 silicon Substances 0.000 claims 9
- 238000011144 upstream manufacturing Methods 0.000 claims 7
- 238000002955 isolation Methods 0.000 claims 5
- 230000000704 physical effect Effects 0.000 claims 5
- 238000004140 cleaning Methods 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 2
- 238000003825 pressing Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 238000003860 storage Methods 0.000 claims 1
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US43673102P | 2002-12-27 | 2002-12-27 | |
US43673202P | 2002-12-27 | 2002-12-27 | |
US10/733,761 US7195026B2 (en) | 2002-12-27 | 2003-12-12 | Micro electromechanical systems for delivering high purity fluids in a chemical delivery system |
PCT/IB2003/006199 WO2004058425A2 (en) | 2002-12-27 | 2003-12-19 | Micro electromechanical systems for delivering high purity fluids in a chemical delivery system |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006512545A JP2006512545A (ja) | 2006-04-13 |
JP2006512545A5 true JP2006512545A5 (US06582424-20030624-M00016.png) | 2006-06-01 |
Family
ID=32686098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004563495A Withdrawn JP2006512545A (ja) | 2002-12-27 | 2003-12-19 | 薬品配送システム中に高純度流体を配送するためのマイクロ電子機器システム |
Country Status (5)
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7061595B2 (en) * | 2000-08-02 | 2006-06-13 | Honeywell International Inc. | Miniaturized flow controller with closed loop regulation |
US7780785B2 (en) * | 2001-10-26 | 2010-08-24 | Applied Materials, Inc. | Gas delivery apparatus for atomic layer deposition |
US7186385B2 (en) * | 2002-07-17 | 2007-03-06 | Applied Materials, Inc. | Apparatus for providing gas to a processing chamber |
US7437944B2 (en) * | 2003-12-04 | 2008-10-21 | Applied Materials, Inc. | Method and apparatus for pressure and mix ratio control |
US7273272B2 (en) * | 2004-03-22 | 2007-09-25 | Fuji Photo Film Co., Ltd. | Liquid supply device and image forming apparatus |
MY169584A (en) | 2005-04-25 | 2019-04-22 | Entegris Inc | Liner-based liquid storage and dispensing system with empty detection capability |
KR20110017462A (ko) | 2005-06-06 | 2011-02-21 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 유체 저장 및 분배 시스템과 프로세스 |
US7464917B2 (en) * | 2005-10-07 | 2008-12-16 | Appiled Materials, Inc. | Ampoule splash guard apparatus |
US20070175392A1 (en) * | 2006-01-27 | 2007-08-02 | American Air Liquide, Inc. | Multiple precursor dispensing apparatus |
US8951478B2 (en) * | 2006-03-30 | 2015-02-10 | Applied Materials, Inc. | Ampoule with a thermally conductive coating |
US7562672B2 (en) * | 2006-03-30 | 2009-07-21 | Applied Materials, Inc. | Chemical delivery apparatus for CVD or ALD |
FR2919725B1 (fr) * | 2007-08-02 | 2010-04-30 | Air Liquide | Dispositif de dilution d'un fluide |
US20090090164A1 (en) * | 2007-10-08 | 2009-04-09 | Air Liquide Electronics U.S. Lp | Method for volumetrically calibrating a liquid flow controller while maintaining the liquid in a closed system |
US8191397B2 (en) * | 2007-12-12 | 2012-06-05 | Air Liquide Electronics U.S. Lp | Methods for checking and calibrating concentration sensors in a semiconductor processing chamber |
US10005082B2 (en) | 2008-04-11 | 2018-06-26 | Incyto Co., Ltd. | Microfluidic circuit element comprising microfluidic channel with nano interstices and fabrication method thereof |
KR100998535B1 (ko) * | 2008-04-11 | 2010-12-07 | 인싸이토 주식회사 | 나노틈새를 가지는 미세유체 채널이 구비된 미세유체회로소자 및 이의 제조 방법 |
DE102008036269A1 (de) * | 2008-08-04 | 2010-02-11 | Ewe Ag | Vorrichtung zum kontinuierlichen Mischen von ausgespeichertem Erdgas mit Sauerstoff zu einem Brenngas für eine Erwärmung des unter Druck stehenden Erdgases vor oder nach seiner Entspannung |
US8146896B2 (en) * | 2008-10-31 | 2012-04-03 | Applied Materials, Inc. | Chemical precursor ampoule for vapor deposition processes |
US9137895B2 (en) * | 2008-12-24 | 2015-09-15 | Stmicroelectronics S.R.L. | Micro-electro-mechanical systems (MEMS) and corresponding manufacturing process |
JP5646196B2 (ja) * | 2010-03-30 | 2014-12-24 | 武蔵エンジニアリング株式会社 | 吐出装置および液体分注装置並びに液体分注方法 |
EP2571696B1 (en) | 2010-05-21 | 2019-08-07 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with circulation pump |
US8721061B2 (en) | 2010-05-21 | 2014-05-13 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with circulation pump |
US9090084B2 (en) | 2010-05-21 | 2015-07-28 | Hewlett-Packard Development Company, L.P. | Fluid ejection device including recirculation system |
US10132303B2 (en) | 2010-05-21 | 2018-11-20 | Hewlett-Packard Development Company, L.P. | Generating fluid flow in a fluidic network |
US9963739B2 (en) | 2010-05-21 | 2018-05-08 | Hewlett-Packard Development Company, L.P. | Polymerase chain reaction systems |
JP5885548B2 (ja) * | 2012-03-12 | 2016-03-15 | 株式会社神戸製鋼所 | 多流路機器の運転方法及び多流路機器 |
WO2015022176A1 (en) * | 2013-08-12 | 2015-02-19 | Koninklijke Philips N.V. | Microfluidic device with valve |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3725010A (en) | 1971-08-23 | 1973-04-03 | Beckman Instruments Inc | Apparatus for automatically performing chemical processes |
DE2142956C3 (de) | 1971-08-27 | 1974-10-31 | Bp Benzin Und Petroleum Ag, 2000 Hamburg | Steuereinrichtung für eine Verdrängerpumpe oder Verdrängungsmesskammer |
US4821997A (en) * | 1986-09-24 | 1989-04-18 | The Board Of Trustees Of The Leland Stanford Junior University | Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator |
US5069419A (en) * | 1989-06-23 | 1991-12-03 | Ic Sensors Inc. | Semiconductor microactuator |
DE4221089A1 (de) * | 1992-06-26 | 1994-01-05 | Bosch Gmbh Robert | Mikroventil |
US5333381A (en) * | 1992-10-21 | 1994-08-02 | Paul J. Gelardi | Wrap cutter |
US5325880A (en) * | 1993-04-19 | 1994-07-05 | Tini Alloy Company | Shape memory alloy film actuated microvalve |
US5465766A (en) * | 1993-04-28 | 1995-11-14 | Advanced Delivery & Chemical Systems, Inc. | Chemical refill system for high purity chemicals |
US5417235A (en) | 1993-07-28 | 1995-05-23 | Regents Of The University Of Michigan | Integrated microvalve structures with monolithic microflow controller |
US5529279A (en) * | 1994-08-24 | 1996-06-25 | Hewlett-Packard Company | Thermal isolation structures for microactuators |
US5542821A (en) | 1995-06-28 | 1996-08-06 | Basf Corporation | Plate-type diaphragm pump and method of use |
US6168948B1 (en) | 1995-06-29 | 2001-01-02 | Affymetrix, Inc. | Miniaturized genetic analysis systems and methods |
DE19637878C2 (de) | 1996-09-17 | 1998-08-06 | Fraunhofer Ges Forschung | Mikroventil mit vorgespannter Ventilklappenstruktur |
US5865417A (en) * | 1996-09-27 | 1999-02-02 | Redwood Microsystems, Inc. | Integrated electrically operable normally closed valve |
US6082185A (en) | 1997-07-25 | 2000-07-04 | Research International, Inc. | Disposable fluidic circuit cards |
US6627157B1 (en) | 1999-03-04 | 2003-09-30 | Ut-Battelle, Llc | Dual manifold system and method for fluid transfer |
JP3579763B2 (ja) * | 1999-07-01 | 2004-10-20 | 日本酸素株式会社 | ガス供給装置及び方法 |
US6423536B1 (en) | 1999-08-02 | 2002-07-23 | Molecular Dynamics, Inc. | Low volume chemical and biochemical reaction system |
US6264064B1 (en) * | 1999-10-14 | 2001-07-24 | Air Products And Chemicals, Inc. | Chemical delivery system with ultrasonic fluid sensors |
WO2001093998A2 (en) | 2000-06-03 | 2001-12-13 | Symyx Technologies, Inc. | Parallel semicontinuous or continuous reactors |
US6590267B1 (en) * | 2000-09-14 | 2003-07-08 | Mcnc | Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
WO2002033268A2 (en) * | 2000-10-18 | 2002-04-25 | Research Foundation Of State University Of New York | Microvalve |
AU2002241818A1 (en) | 2001-01-10 | 2002-07-24 | Memorial Sloan-Kettering Cancer Center | System and process for microfluidics-based automated chemistry |
US7318912B2 (en) | 2001-06-07 | 2008-01-15 | Nanostream, Inc. | Microfluidic systems and methods for combining discrete fluid volumes |
US6766260B2 (en) * | 2002-01-04 | 2004-07-20 | Mks Instruments, Inc. | Mass flow ratio system and method |
US7051749B2 (en) * | 2003-11-24 | 2006-05-30 | Advanced Technology Materials, Inc. | Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications |
-
2003
- 2003-12-12 US US10/733,761 patent/US7195026B2/en not_active Expired - Fee Related
- 2003-12-19 WO PCT/IB2003/006199 patent/WO2004058425A2/en active Application Filing
- 2003-12-19 JP JP2004563495A patent/JP2006512545A/ja not_active Withdrawn
- 2003-12-19 AU AU2003288636A patent/AU2003288636A1/en not_active Abandoned
- 2003-12-19 EP EP03780478A patent/EP1578546A2/en not_active Withdrawn
-
2007
- 2007-02-20 US US11/676,744 patent/US20070151616A1/en not_active Abandoned
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