JP2006351568A - Method of manufacturing light emitting device mounting package - Google Patents

Method of manufacturing light emitting device mounting package Download PDF

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JP2006351568A
JP2006351568A JP2005171875A JP2005171875A JP2006351568A JP 2006351568 A JP2006351568 A JP 2006351568A JP 2005171875 A JP2005171875 A JP 2005171875A JP 2005171875 A JP2005171875 A JP 2005171875A JP 2006351568 A JP2006351568 A JP 2006351568A
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silver
light emitting
plating layer
discoloration
emitting element
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Ichiro Muraki
伊知郎 村木
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Sumitomo Metal SMI Electronics Device Inc
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Sumitomo Metal SMI Electronics Device Inc
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/831Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/83101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • H01L2224/922Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222Sequential connecting processes
    • H01L2224/92242Sequential connecting processes the first connecting process involving a layer connector
    • H01L2224/92247Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a silver-plated layer surface serving as a light reflecting surface from discoloring for a long term in a manufacturing method of a light emitting device mounting package. <P>SOLUTION: After a silver-plated layer 20 is formed on a peripheral face of a cavity 13 of a package body 11, a light emitting device 12 is mounted on a device mounting region 24 in the cavity 13 via a sheetlike preform 23, and the light emitting device 12 is soldered onto the device mounting region 24. Thereafter, an electrode of the device 12 and the pad 15 are connected via a bonding wire 14. Then, the package body 11 (at least an entire surface of the silver-plated layer 20) is soaked in a solution of a silver discoloration inhibitor to form a silver discoloration preventive coat 21 on the surface of the layer 20. Thereafter, the package body 11 is taken out from the solution of the inhibitor, washed in water and dried. Thus, the entire surface of the silver-plated layer 20 to serve as the light reflecting surface 22 is coated with the transparent and thin silver discoloration preventive coat 21. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、発光素子を実装するキャビティ内面に該発光素子の光を反射する光反射面を形成した発光素子搭載パッケージの製造方法に関する発明である。   The present invention relates to a method for manufacturing a light emitting element mounting package in which a light reflecting surface for reflecting light of the light emitting element is formed on an inner surface of a cavity for mounting the light emitting element.

例えば、特許文献1(特開2004−207672号公報)に記載された発光素子搭載パッケージは、図5に示すように、アルミナ基板1の上面側に形成されたキャビティ2内に発光素子3を搭載し、キャビティ2の周側面に、発光素子3の光を反射する光反射面4を形成した構成となっている。この場合、光反射面4には、タングステン及びモリブデンを含む下地メタライズ層5をアルミナ基板1と同時焼成し、この下地メタライズ層5上にニッケルめっき層6を介して銀めっき層7を形成し、この銀めっき層7の表面を光反射面4として用いるようにしている。ここで、光反射面4として銀めっき層7を用いる理由は、金属色が良好な白色で、入射光と反射光との間で光色の変化が生じないためである(段落[0032]参照)。   For example, in the light emitting element mounting package described in Patent Document 1 (Japanese Patent Laid-Open No. 2004-207672), the light emitting element 3 is mounted in the cavity 2 formed on the upper surface side of the alumina substrate 1 as shown in FIG. The light reflecting surface 4 that reflects the light of the light emitting element 3 is formed on the peripheral side surface of the cavity 2. In this case, a base metallized layer 5 containing tungsten and molybdenum is co-fired on the light reflecting surface 4 together with the alumina substrate 1, and a silver plated layer 7 is formed on the base metallized layer 5 via a nickel plated layer 6, The surface of the silver plating layer 7 is used as the light reflecting surface 4. Here, the reason why the silver plating layer 7 is used as the light reflecting surface 4 is that the metal color is white and the light color does not change between the incident light and the reflected light (see paragraph [0032]). ).

この発光素子搭載パッケージは、発光素子3を搭載したキャビティ2内に透明樹脂を充填して発光素子3と銀めっき層7を封止するようにしている(段落[0040]参照)。
特開2004−207672号公報(第1頁、第6頁等)
In this light emitting element mounting package, the cavity 2 in which the light emitting element 3 is mounted is filled with a transparent resin so as to seal the light emitting element 3 and the silver plating layer 7 (see paragraph [0040]).
JP-A-2004-207672 (first page, sixth page, etc.)

上述したように、光反射面4となる銀めっき層7は、発光素子3と共に透明樹脂で封止されているが、経年変化により銀めっき層7の表面が変色する傾向があった。この銀めっき層7の表面の変色は、硫化現象、酸化現象、塩化現象等、様々な現象によって起こされるものと考えられるが、主原因は、硫化現象によるものと思われる。本来、透明樹脂による銀めっき層7の封止が完全なものであれば、銀めっき層7表面の硫化現象が発生しないはずであるが、封止樹脂には若干のガス透過性があるため、封止樹脂を透過するガス中の硫黄成分によって銀めっき層7の表面が硫化したり、或は、封止樹脂に含まれる硫黄成分によって銀めっき層7の表面が硫化するものと推定される。この硫化現象により銀めっき層7の表面が変色すると、光反射率(光沢度)が低下するという不具合が発生する。   As described above, the silver plating layer 7 to be the light reflecting surface 4 is sealed with the transparent resin together with the light emitting element 3, but the surface of the silver plating layer 7 has a tendency to discolor due to secular change. The discoloration of the surface of the silver plating layer 7 is considered to be caused by various phenomena such as a sulfidation phenomenon, an oxidation phenomenon, and a chlorination phenomenon. The main cause is considered to be a sulfidation phenomenon. Originally, if the sealing of the silver plating layer 7 with a transparent resin is perfect, the sulfidation phenomenon on the surface of the silver plating layer 7 should not occur, but the sealing resin has some gas permeability, It is presumed that the surface of the silver plating layer 7 is sulfurized by the sulfur component in the gas that permeates the sealing resin, or the surface of the silver plating layer 7 is sulfurized by the sulfur component contained in the sealing resin. When the surface of the silver plating layer 7 changes color due to this sulfurization phenomenon, there arises a problem that the light reflectance (glossiness) is lowered.

この問題を解決するために、本出願人は、最近、特願2005−121068号の出願明細書に示すように、キャビティ周側面の光反射面を銀変色防止剤により銀変色防止処理する技術を研究しているが、この研究過程で、次のような新たな問題が判明した。   In order to solve this problem, the present applicant recently developed a technique for preventing silver discoloration treatment with a silver discoloration preventing agent on the light reflection surface on the side surface of the cavity, as shown in the application specification of Japanese Patent Application No. 2005-121068. I am researching, but in the course of this research, I found the following new problems.

発光素子搭載パッケージの製造工程に銀変色防止処理工程を追加する場合、図4に示す比較例のように、銀めっき工程終了後に、パッケージ本体(特許文献1ではアルミナ基板1)のキャビティ内面の光反射面となる銀めっき層の表面を銀変色防止剤により銀変色防止処理を行った後、パッケージ本体のキャビティ内に発光素子を実装することが考えられる。この際、発光素子の実装は、接着剤を用いて熱をかけないで行う場合もあるが、半田等で230℃程度の熱をかけて行う場合の方が多い。従って、発光素子を実装する前に、銀めっき層の表面を銀変色防止剤により銀変色防止処理すると、その後、発光素子の実装を半田等で230℃程度の熱をかけて行う際に、銀めっき層の表面の銀変色防止処理被膜が実装時の熱でほぼ焼失して、銀変色防止効果がほとんど無くなることが判明した。   When a silver discoloration prevention treatment process is added to the manufacturing process of the light emitting element mounting package, the light on the cavity inner surface of the package body (alumina substrate 1 in Patent Document 1) after the completion of the silver plating process, as in the comparative example shown in FIG. It is conceivable that the light-emitting element is mounted in the cavity of the package body after the surface of the silver plating layer serving as the reflective surface is subjected to silver discoloration prevention treatment with a silver discoloration inhibitor. At this time, the mounting of the light emitting element is sometimes performed without applying heat using an adhesive, but is more often performed by applying heat of about 230 ° C. with solder or the like. Accordingly, when the surface of the silver plating layer is subjected to silver discoloration prevention treatment with a silver discoloration preventing agent before mounting the light emitting element, the light emitting element is then mounted by applying heat of about 230 ° C. with solder or the like. It was found that the silver discoloration prevention treatment film on the surface of the plating layer was almost burned down by the heat during mounting, and the silver discoloration prevention effect was almost lost.

本発明はこのような事情を考慮してなされたものであり、従ってその目的は、光反射面となる銀めっき層表面の変色を長期間に亘って防止することができる発光素子搭載パッケージの製造方法を提供することにある。   The present invention has been made in view of such circumstances, and therefore the object of the present invention is to manufacture a light emitting element mounting package capable of preventing discoloration of the surface of the silver plating layer serving as a light reflecting surface over a long period of time. It is to provide a method.

上記目的を達成するために、本発明の発光素子搭載パッケージの製造方法は、パッケージ本体のキャビティ内面のうちの少なくとも光反射面を形成する部分に銀めっき層を形成する銀めっき工程と、前記パッケージ本体のキャビティ内に発光素子を実装する素子実装工程と、前記発光素子の実装後に前記光反射面となる前記銀めっき層の表面を銀変色防止剤により銀変色防止処理する銀変色防止処理工程とを含むことを特徴とするものである。この製造方法では、発光素子の実装後に銀めっき層の表面を銀変色防止剤により銀変色防止処理するため、発光素子の実装を230℃程度の熱をかけて行う場合でも、銀めっき層の表面の銀変色防止処理被膜が実装時の熱で焼失するという不具合は全く起こり得ず、銀変色防止処理による銀変色防止効果を長期間に亘って維持できて、光反射面となる銀めっき層表面の変色を長期間に亘って防止することができる。   In order to achieve the above object, a method of manufacturing a light emitting element mounting package according to the present invention includes: a silver plating step of forming a silver plating layer on at least a portion of a cavity inner surface of a package body where a light reflecting surface is formed; An element mounting step of mounting a light emitting element in the cavity of the main body, and a silver discoloration prevention processing step of performing silver discoloration prevention treatment on the surface of the silver plating layer which becomes the light reflecting surface after mounting of the light emitting element with a silver discoloration inhibitor; It is characterized by including. In this manufacturing method, since the surface of the silver plating layer is subjected to silver discoloration prevention treatment with a silver discoloration preventing agent after the light emitting element is mounted, the surface of the silver plating layer is used even when the light emitting element is mounted at a temperature of about 230 ° C. The silver discoloration prevention coating film of the silver plating layer surface that can maintain the silver discoloration prevention effect by the silver discoloration prevention treatment for a long period of time and can be used for a long time without being damaged by heat during mounting. Can be prevented over a long period of time.

更に、本発明は、銀変色防止処理工程において、前記発光素子が実装された前記パッケージ本体のうちの少なくとも前記光反射面となる前記銀めっき層の表面を銀変色防止剤の溶液に浸漬することで、該銀めっき層の表面を銀変色防止処理するようにすると良い。このようにすれば、浸漬という極めて簡単な方法で銀めっき層の表面を能率良く銀変色防止処理することができて、生産性・コスト性の要求も満たすことができる。   Furthermore, in the silver discoloration preventing treatment step, the present invention is to immerse at least the surface of the silver plating layer serving as the light reflecting surface of the package body on which the light emitting element is mounted in a silver discoloration preventing agent solution. Thus, the surface of the silver plating layer is preferably subjected to a silver discoloration prevention treatment. In this way, the surface of the silver plating layer can be efficiently processed to prevent silver discoloration by a very simple method of immersion, and the requirements for productivity and cost can be satisfied.

以下、本発明の一実施例を図面に基づいて説明する。
図1は、パッケージ本体11に発光素子12を搭載するためのキャビティ13を1個のみ形成した発光素子搭載パッケージの構成例である。このパッケージ本体11に発光素子12を搭載するためのキャビティ13を複数個形成しても良いことは言うまでもない。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a configuration example of a light emitting element mounting package in which only one cavity 13 for mounting the light emitting element 12 is formed in the package body 11. It goes without saying that a plurality of cavities 13 for mounting the light emitting elements 12 may be formed in the package body 11.

パッケージ本体11は、例えば複数のセラミック層11a〜11c(セラミックグリーンシート)を積層して焼成一体化した多層セラミック基板により構成され、その最上層のセラミック層11aに形成した貫通穴によってキャビティ13が形成されている。各セラミック層11a〜11cは、アルミナ、窒化アルミニウム等の1000℃以上で焼成する高温焼成セラミックで形成され、キャビティ13の周側面は、発光素子12の光を外側に向けて反射する光反射面22を形成するために、外側に向けて拡開するテーパ面状に形成されている。   The package body 11 is constituted by a multilayer ceramic substrate in which, for example, a plurality of ceramic layers 11a to 11c (ceramic green sheets) are laminated and fired and integrated, and a cavity 13 is formed by a through hole formed in the uppermost ceramic layer 11a. Has been. Each of the ceramic layers 11a to 11c is formed of a high-temperature fired ceramic such as alumina or aluminum nitride that is fired at 1000 ° C. or higher, and the peripheral side surface of the cavity 13 reflects the light of the light emitting element 12 toward the outside. Is formed in a tapered surface shape that expands outward.

キャビティ13の底面となる部分には、発光素子12を半田プリフォーム23により実装するための素子搭載部24と、発光素子12の電極をボンディングワイヤ14で接続するためのパッド15が形成され、各セラミック層11b,11cには、層間を電気的に接続するビア16と配線パターン17がタングステン、モリブデン等の高融点金属導体ペーストにより印刷焼成されている。   Formed on the bottom surface of the cavity 13 are an element mounting portion 24 for mounting the light emitting element 12 with a solder preform 23 and a pad 15 for connecting the electrode of the light emitting element 12 with a bonding wire 14. Vias 16 and wiring patterns 17 that electrically connect the layers are printed and fired on the ceramic layers 11b and 11c with a refractory metal conductor paste such as tungsten or molybdenum.

キャビティ13の周側面には、タングステン、モリブデン等の高融点金属よりなる下地メタライズ層18がパッケージ本体11と同時焼成され、この下地メタライズ層18の上に下地ニッケルめっき層19が形成され、この下地ニッケルめっき層19の上に銀めっき層20が形成され、この銀めっき層20の表面が光反射面22となっている。この場合、下地金属層は、下地メタライズ層18と下地ニッケルめっき層19の二層構造となっているが、下地ニッケルめっき層19を省略して、下地メタライズ層18上に銀めっき層20を直接形成するようにしても良い。   A base metallized layer 18 made of a refractory metal such as tungsten or molybdenum is simultaneously fired on the peripheral side surface of the cavity 13 together with the package body 11, and a base nickel plating layer 19 is formed on the base metallized layer 18. A silver plating layer 20 is formed on the nickel plating layer 19, and the surface of the silver plating layer 20 is a light reflecting surface 22. In this case, the base metal layer has a two-layer structure of the base metallized layer 18 and the base nickel plated layer 19, but the base nickel plated layer 19 is omitted and the silver plated layer 20 is directly formed on the base metallized layer 18. You may make it form.

この場合、下地ニッケルめっき層19の厚みは、銀めっき層20との接合強度を確保するために1〜8μmとすることが望ましい。また、銀めっき層20の厚みが薄すぎると、下地のニッケルが銀めっき層20表面に浸透して銀めっき層20表面(光反射面22)が変色するため、銀めっき層20の厚みは、2.5μm以上とすることが望ましい。また、銀めっき層20を光沢剤を添加した光沢銀めっきで形成しても良く、同様に、下地ニッケルめっき層19も光沢ニッケルめっきで形成しても良い。   In this case, the thickness of the underlying nickel plating layer 19 is desirably 1 to 8 μm in order to ensure the bonding strength with the silver plating layer 20. Further, if the thickness of the silver plating layer 20 is too thin, the underlying nickel penetrates the surface of the silver plating layer 20 and the surface of the silver plating layer 20 (light reflection surface 22) is discolored. It is desirable to be 2.5 μm or more. Further, the silver plating layer 20 may be formed by bright silver plating to which a brightening agent is added. Similarly, the base nickel plating layer 19 may be formed by bright nickel plating.

更に、銀めっき層20上には、発光素子12の実装後に銀変色防止剤による銀変色防止処理被膜21(有機被膜)が形成され、光反射面22となる銀めっき層20の表面全体が透明な薄い銀変色防止処理被膜21で被覆された構成となっている。この銀変色防止処理被膜21を形成する銀変色防止剤としては、例えば水溶系、溶剤系、イソプロピルアルコール系、脂肪族有機化合物系等の有機系のいずれかの銀変色防止剤を用いれば良い。   Further, on the silver plating layer 20, a silver discoloration prevention treatment film 21 (organic film) with a silver discoloration preventing agent is formed after the light emitting element 12 is mounted, and the entire surface of the silver plating layer 20 serving as the light reflection surface 22 is transparent. The thin silver discoloration prevention coating 21 is applied. As the silver discoloration preventing agent for forming the silver discoloration preventing treatment film 21, for example, any one of organic silver discoloration preventing agents such as water-based, solvent-based, isopropyl alcohol, and aliphatic organic compound may be used.

以上のように構成した発光素子搭載パッケージを製造する場合は、焼成前の各セラミック層11a〜11c(セラミックグリーンシート)に、それぞれ下地メタライズ層18、ビア16、配線パターン17、素子搭載部24、パッド15のいずれかをタングステン、モリブデン等の高融点金属の導体ペーストで印刷した後、各セラミック層11a〜11cを積層・圧着して一体化し、これを高温焼成セラミックの焼結温度で焼成する。これにより、パッケージ本体11と高融点金属(下地メタライズ層18、ビア16、配線パターン17、素子搭載部24、パッド15)を同時焼成する。   When manufacturing the light emitting element mounting package configured as described above, the ceramic layers 11a to 11c (ceramic green sheets) before firing are respectively provided with the base metallized layer 18, the via 16, the wiring pattern 17, the element mounting portion 24, After printing any one of the pads 15 with a conductive paste of a refractory metal such as tungsten or molybdenum, the ceramic layers 11a to 11c are laminated and pressure-bonded to be integrated and fired at the sintering temperature of the high-temperature fired ceramic. As a result, the package body 11 and the refractory metal (the base metallized layer 18, the via 16, the wiring pattern 17, the element mounting portion 24, and the pad 15) are simultaneously fired.

この後、ニッケルめっき工程に進み、ニッケルめっき液を用いて電解めっき法又は無電解めっき法によりキャビティ13の周側面の下地メタライズ層18上に下地ニッケルめっき層19を形成する。   Thereafter, the process proceeds to a nickel plating step, and a base nickel plating layer 19 is formed on the base metallization layer 18 on the peripheral side surface of the cavity 13 by electrolytic plating or electroless plating using a nickel plating solution.

この後、銀めっき工程に進み、銀めっき液を用いて、電解めっき法又は無電解めっき法によりキャビティ13の周側面の下地ニッケルめっき層19上に例えば2.5μm以上の厚みの銀めっき層20を形成する。この銀めっき層20の表面が光反射面22となる。   Thereafter, the process proceeds to a silver plating step, and a silver plating layer 20 having a thickness of, for example, 2.5 μm or more is formed on the underlying nickel plating layer 19 on the peripheral side surface of the cavity 13 by an electrolytic plating method or an electroless plating method using a silver plating solution. Form. The surface of the silver plating layer 20 becomes the light reflecting surface 22.

この銀めっき工程の終了後に、素子実装工程に進み、図2(a)、(b)に示すように、キャビティ13内の素子搭載部24上にシート状の半田プリフォーム23を挟んで発光素子12を載置し、この状態で、230℃程度の熱をかけて半田プリフォーム23を溶融し、発光素子12を素子搭載部24上に半田付けする。この後、図2(c)に示すように、発光素子12の電極とパッド15とをボンディングワイヤ14で接続する。   After completion of this silver plating process, the process proceeds to an element mounting process. As shown in FIGS. 2 (a) and 2 (b), a light emitting element having a sheet-like solder preform 23 sandwiched between the element mounting portion 24 in the cavity 13 is provided. In this state, heat of about 230 ° C. is applied to melt the solder preform 23, and the light emitting element 12 is soldered onto the element mounting portion 24. Thereafter, as shown in FIG. 2C, the electrode of the light emitting element 12 and the pad 15 are connected by the bonding wire 14.

この素子実装工程の終了後に、銀変色防止処理工程に進み、パッケージ本体11(少なくとも銀めっき層20の表面全体)を銀変色防止剤の溶液中に短時間(例えば30秒〜1分程度)浸漬させて銀めっき層20の表面に銀変色防止処理被膜21(有機被膜)を形成した後、当該パッケージ本体11を銀変色防止剤の溶液から取り出して、これを水洗して乾燥させる。これにより、光反射面22となる銀めっき層20の表面全体が透明な薄い銀変色防止処理被膜21で被覆される。   After the element mounting process, the process proceeds to a silver discoloration prevention treatment process, and the package body 11 (at least the entire surface of the silver plating layer 20) is immersed in a silver discoloration inhibitor solution for a short time (for example, about 30 seconds to 1 minute). After forming the silver discoloration prevention treatment film 21 (organic film) on the surface of the silver plating layer 20, the package body 11 is taken out from the solution of the silver discoloration prevention agent, washed with water and dried. As a result, the entire surface of the silver plating layer 20 to be the light reflecting surface 22 is covered with the transparent thin silver discoloration prevention coating 21.

この後、パッケージ本体11のキャビティ13内に透明樹脂を充填して発光素子12と光反射面22を封止するようにしても良い。   Thereafter, the light emitting element 12 and the light reflection surface 22 may be sealed by filling the cavity 13 of the package body 11 with a transparent resin.

前述したように、従来構造のものは、光反射面となる銀めっき層表面が銀変色防止処理被膜で被覆されていないため、使用期間が長くなるに従って銀めっき層表面が硫化現象等により変色し、光反射率(光沢度)が低下するのを避けられない。   As described above, in the conventional structure, the surface of the silver plating layer serving as the light reflecting surface is not covered with the silver discoloration prevention coating film, so the surface of the silver plating layer is discolored due to a sulfurization phenomenon or the like as the service period increases. It is inevitable that the light reflectance (glossiness) is lowered.

これに対して、本実施例では、パッケージ本体11のキャビティ13内に発光素子12を実装した後、光反射面22となる銀めっき層20の表面を銀変色防止剤により銀変色防止処理するようにしたので、銀めっき層20の表面を銀変色防止処理被膜21で被覆することができる。これにより、銀めっき層20の表面を銀変色防止処理被膜21によって変色環境(硫黄成分)から遮断することができて、銀めっき層20表面の変色を長期間に亘って防止することができる。   In contrast, in this embodiment, after the light emitting element 12 is mounted in the cavity 13 of the package body 11, the surface of the silver plating layer 20 that becomes the light reflecting surface 22 is subjected to silver discoloration prevention treatment with a silver discoloration inhibitor. Therefore, the surface of the silver plating layer 20 can be covered with the silver discoloration prevention treatment film 21. Thereby, the surface of the silver plating layer 20 can be shielded from the discoloration environment (sulfur component) by the silver discoloration prevention treatment coating 21, and the discoloration of the surface of the silver plating layer 20 can be prevented over a long period of time.

本発明者は、上述した実施例の製造方法(図3参照)で発光素子搭載パッケージのサンプルを作製して、銀変色防止処理被膜21を形成する銀変色防止剤の種類と銀めっき層20表面の変色防止効果との関係を考察する試験を行ったので、その試験結果を説明する。   The inventor produces a sample of a light emitting element mounting package by the manufacturing method of the above-described embodiment (see FIG. 3), and the type of silver discoloration preventing agent that forms the silver discoloration prevention treatment film 21 and the surface of the silver plating layer 20. Since the test which considers the relationship with the discoloration prevention effect of was performed, the test result is demonstrated.

この試験に用いた実施例サンプルは、パッケージ本体11を窒化アルミニウムで形成し、下地メタライズ層18をタングステンペーストの印刷・同時焼成で形成し、この下地メタライズ層18の上に下地ニッケルめっき層19を介して銀めっき層20を形成した後、パッケージ本体11のキャビティ13内に半田プリフォーム23を用いて230℃程度で加熱して発光素子12を実装し、この後、下記の表1に示す水溶系、イソプロピルアルコール系、脂肪族有機化合物系、溶剤系の銀変色防止剤を用いて、銀めっき層20の表面に銀変色防止処理被膜21を形成したものである。   In the example sample used in this test, the package body 11 is formed of aluminum nitride, the base metallized layer 18 is formed by printing and co-firing tungsten paste, and the base nickel plated layer 19 is formed on the base metallized layer 18. After forming the silver plating layer 20, the light emitting device 12 is mounted in the cavity 13 of the package body 11 by heating at about 230 ° C. using the solder preform 23, and then the water-soluble elements shown in Table 1 below are mounted. A silver discoloration prevention coating film 21 is formed on the surface of the silver plating layer 20 by using a silver discoloration preventive agent based on isopropyl alcohol, aliphatic organic compound or solvent.

銀変色防止処理被膜21の形成方法は、下記の表1に示す銀変色防止剤の溶液中に実施例サンプルを1分間浸漬して銀めっき層20の表面に銀変色防止処理被膜21を形成した後、当該実施例サンプルを銀変色防止剤の溶液から取り出し、これを1分間水洗した後、エアブローして実施例サンプルに付着した水滴を吹き飛ばした上で温風乾燥させる。比較のために、銀変色防止処理被膜21が無い従来例に相当するサンプルも作製した。   The silver discoloration prevention treatment film 21 was formed by immersing the example sample in the silver discoloration inhibitor solution shown in Table 1 below for 1 minute to form the silver discoloration prevention treatment film 21 on the surface of the silver plating layer 20. Thereafter, the example sample is taken out of the silver discoloration inhibitor solution, washed with water for 1 minute, air blown to blow off water droplets attached to the example sample, and then dried with warm air. For comparison, a sample corresponding to a conventional example without the silver discoloration prevention coating 21 was also produced.

Figure 2006351568
Figure 2006351568

実施例サンプルA−1、A−2、A−3は、それぞれ水溶系の銀変色防止剤(北池産業株式会社の商品名「AC−20」、「AC−70」、「AC−80」)を使用した。
実施例サンプルB−1は、イソプロピルアルコール系の銀変色防止剤(日本エレクトロプレイティング・エンクロージャーズ株式会社の商品名「シルバーキーパー」)を使用した。
Example Samples A-1, A-2, and A-3 are water-soluble silver discoloration inhibitors (trade names “AC-20”, “AC-70”, and “AC-80” of Kitaike Sangyo Co., Ltd.), respectively. It was used.
In Example Sample B-1, an isopropyl alcohol-based silver discoloration inhibitor (trade name “Silver Keeper” of Nippon Electroplating Enclosures Co., Ltd.) was used.

実施例サンプルC−1は、水溶系の銀変色防止剤(メルテックス株式会社の商品名「エンテックCU−56」)を使用した。
実施例サンプルD−1、D−2は、それぞれ脂肪族有機化合物系の銀変色防止剤(大和化成株式会社の商品名「ニューダインシルバー」、「ニューダインシルバー S−1」)を使用した。
In Example Sample C-1, a water-based silver discoloration inhibitor (trade name “ENTEC CU-56” from Meltex Co., Ltd.) was used.
In Example Samples D-1 and D-2, aliphatic organic compound-based silver discoloration inhibitors (trade names “New Dyne Silver” and “New Dyne Silver S-1” from Daiwa Kasei Co., Ltd.) were used.

実施例サンプルE−1は、溶剤系の銀変色防止剤(千代田ケミカル株式会社の商品名「B−1057」)を使用した。
実施例サンプルE−2は、イソプロピルアルコール系の銀変色防止剤(千代田ケミカル株式会社の商品名「B−1009NS」)を使用した。
In Example Sample E-1, a solvent-based silver discoloration inhibitor (trade name “B-1057” of Chiyoda Chemical Co., Ltd.) was used.
In Example Sample E-2, an isopropyl alcohol-based silver discoloration inhibitor (trade name “B-1009NS” of Chiyoda Chemical Co., Ltd.) was used.

従来例サンプルは、銀変色防止剤による表面処理は行わない。
これらのサンプルを用いて、硫化試験を次のようにして行った。
この硫化試験では、硫化現象による変色進行度合いを速めるために、1%硫化アンモニウム溶液入りのデシケータを用意し、上記各サンプルをそれぞれ1%硫化アンモニウム溶液に浸して放置し、経時的に変化する銀めっき層表面の変色レベル(変色度合い)を目視にて5段階で評価した。この硫化試験の結果を表1及び図3に示す。ここで、変色レベルの数値は、大きくなるほど変色度合いが大きいことを意味し、変色レベル=0は変色無し、変色レベル=1は僅かに変色、変色レベル=2は中程度の変色、変色レベル=3は強く変色、変色レベル=4は非常に強く変色(黒色化)を意味する。
The conventional sample is not subjected to surface treatment with a silver discoloration inhibitor.
Using these samples, the sulfuration test was conducted as follows.
In this sulfidation test, a desiccator containing 1% ammonium sulfide solution is prepared to accelerate the degree of color change due to the sulfidation phenomenon. The discoloration level (degree of discoloration) on the surface of the plating layer was visually evaluated in five stages. The results of this sulfidation test are shown in Table 1 and FIG. Here, the numerical value of the discoloration level means that the degree of discoloration increases as the value increases. Discoloration level = 0 indicates no discoloration, discoloration level = 1 slightly discoloration, discoloration level = 2 indicates medium discoloration, discoloration level = 3 means a strong color change, and a color change level = 4 means a very strong color change (blackening).

上記各実施例サンプルは、いずれも、銀めっき層20の表面に銀変色防止処理被膜21(有機被膜)を形成しているため、銀変色防止処理被膜21によって銀めっき層20の表面を変色環境から遮断することができて、銀変色防止処理被膜21が無い従来例サンプルでは得られない、銀めっき層20の表面の変色防止効果が得られる。   In each of the above examples, since the silver discoloration prevention treatment film 21 (organic film) is formed on the surface of the silver plating layer 20, the surface of the silver plating layer 20 is discolored by the silver discoloration prevention treatment film 21. Thus, the effect of preventing discoloration of the surface of the silver plating layer 20 is obtained, which cannot be obtained with the conventional sample without the silver discoloration prevention treatment film 21.

具体的には、実施例サンプルA−1、A−2、A−3は、S系脂肪酸化合物で銀めっき層20の表面に有機被膜(銀変色防止処理被膜21)を形成して、銀めっき層20の表面を空気中の硫化ガスから遮断し、銀めっき層20の表面の変色を防止する。   Specifically, Example Samples A-1, A-2, and A-3 are formed by forming an organic coating (silver discoloration prevention coating 21) on the surface of the silver plating layer 20 with an S-based fatty acid compound, and silver plating. The surface of the layer 20 is shielded from sulfide gas in the air, and discoloration of the surface of the silver plating layer 20 is prevented.

実施例サンプルB−1は、イソプロピルアルコール系の銀変色防止剤により、銀めっき層20の表面に有機キレート被膜(銀変色防止処理被膜21)を形成して、銀めっき層20の表面の変色を防止する。   In Example Sample B-1, an organic chelate film (silver discoloration prevention treatment film 21) is formed on the surface of the silver plating layer 20 with an isopropyl alcohol-based silver discoloration inhibitor to change the color of the surface of the silver plating layer 20. To prevent.

実施例サンプルC−1は、水溶系の銀変色防止剤により、銀めっき層20の表面に厚さ30オングストローム程度の有機被膜(銀変色防止処理被膜21)を形成して、銀めっき層20の表面の変色を防止する。   In Example Sample C-1, an organic film (silver discoloration prevention treatment film 21) having a thickness of about 30 angstroms was formed on the surface of the silver plating layer 20 with a water-based silver discoloration prevention agent. Prevent surface discoloration.

実施例サンプルD−1、D−2は、それぞれ脂肪族有機化合物系の銀変色防止剤により、銀めっき層20の表面に有機キレート被膜(銀変色防止処理被膜21)を形成して、銀めっき層20の表面の変色を防止する。   In Example Samples D-1 and D-2, an organic chelate coating (silver discoloration prevention coating 21) is formed on the surface of the silver plating layer 20 using an aliphatic organic compound-based silver discoloration inhibitor, and silver plating is performed. Prevent discoloration of the surface of the layer 20.

実施例サンプルE−1、E−2は、溶剤系、イソプロピルアルコール系の銀変色防止剤により銀めっき層20の表面に有機被膜(銀変色防止処理被膜21)を形成して、銀めっき層20の表面の変色を防止する。   In Example Samples E-1 and E-2, an organic coating (silver discoloration prevention coating 21) was formed on the surface of the silver plating layer 20 with a solvent-based, isopropyl alcohol-based silver discoloration inhibitor, and the silver plating layer 20 Prevent discoloration of the surface.

このらの実施例サンプルの中で、特に変色防止効果が大きいものは、有機キレート被膜を形成する脂肪族有機化合物系の銀変色防止剤を用いた実施例サンプルD−2、D−1とイソプロピルアルコール系の銀変色防止剤を用いた実施例サンプルB−1、E−2であった。従って、脂肪族有機化合物系又はイソプロピルアルコール系の銀変色防止剤を用いれば、銀めっき層20の表面に有機キレート被膜(銀変色防止処理被膜21)を形成して、銀めっき層20表面の変色防止効果を長期間に亘って安定して持続させることができるものと思われる。   Among these example samples, those having particularly great discoloration prevention effects are the example samples D-2, D-1 and isopropyl using an aliphatic organic compound-based silver discoloration inhibitor that forms an organic chelate film. It was Example Samples B-1 and E-2 using alcohol-based silver discoloration inhibitors. Therefore, when an aliphatic organic compound-based or isopropyl alcohol-based silver discoloration inhibitor is used, an organic chelate film (silver discoloration prevention film 21) is formed on the surface of the silver plating layer 20, and the discoloration of the surface of the silver plating layer 20 is achieved. It seems that the preventive effect can be stably maintained over a long period of time.

一方、水溶系や溶剤系の銀変色防止剤は、脂肪族有機化合物系又はイソプロピルアルコール系の銀変色防止剤と比べれば、全般的に変色防止効果が小さくなるが、水溶系の銀変色防止剤の中でも、A−2だけは、脂肪族有機化合物系やイソプロピルアルコール系の銀変色防止剤に近い変色防止効果が得られた。   On the other hand, water-based and solvent-based silver discoloration inhibitors generally have less discoloration prevention effects than aliphatic organic compound-based or isopropyl alcohol-based silver discoloration inhibitors, but water-based silver discoloration inhibitors. Among them, only A-2 was effective in preventing discoloration similar to that of an aliphatic organic compound-based or isopropyl alcohol-based silver discoloration preventing agent.

これに対して、従来例サンプルは、銀めっき層表面が銀変色防止処理被膜で被覆されていないため、実施例サンプルよりも短い時間で変色が進行する。   In contrast, in the conventional sample, the surface of the silver plating layer is not coated with the silver discoloration prevention treatment film, so that the discoloration proceeds in a shorter time than the example sample.

以上説明した本実施例によれば、発光素子12の実装後に、光反射面22となる銀めっき層20の表面を銀変色防止剤で表面処理して透明な薄い銀変色防止処理被膜21を形成するようにしたので、後述する比較例(図4参照)のように、発光素子の実装前に、銀めっき層の表面を銀変色防止剤により銀変色防止処理した後に発光素子の実装を行う場合とは異なり、発光素子12の実装を230℃程度の熱をかけて行う場合でも、銀めっき層20の表面の銀変色防止処理被膜21が実装時の熱で焼失するという不具合は全く起こり得ず、銀変色防止処理被膜21による銀変色防止効果を長期間に亘って維持できる。このため、キャビティ13を封止する樹脂にガス透過性があったり、封止樹脂に硫黄成分が含まれていたとしても、透過ガス中の硫黄成分や封止樹脂中の硫黄成分が銀めっき層21に触れることを銀変色防止処理被膜21によって防止することができ、硫化現象等による銀めっき層20表面の変色を長期間に亘って防止することができる。   According to the present embodiment described above, after the light emitting element 12 is mounted, the surface of the silver plating layer 20 to be the light reflecting surface 22 is surface-treated with the silver discoloration inhibitor to form a transparent thin silver discoloration prevention treatment film 21. In the case where the light emitting element is mounted after the surface of the silver plating layer is subjected to silver discoloration prevention treatment with a silver discoloration inhibitor before mounting the light emitting element, as in a comparative example (see FIG. 4) described later. Unlike the case where the light emitting element 12 is mounted by applying heat of about 230 ° C., the problem that the silver discoloration prevention coating film 21 on the surface of the silver plating layer 20 is burned out by heat during mounting cannot occur at all. Moreover, the silver discoloration prevention effect by the silver discoloration prevention treatment film 21 can be maintained over a long period of time. For this reason, even if the resin that seals the cavity 13 is gas permeable, or the sulfur component is contained in the sealing resin, the sulfur component in the permeate gas or the sulfur component in the sealing resin is a silver plating layer. Touching 21 can be prevented by the silver discoloration prevention treatment film 21, and discoloration of the surface of the silver plating layer 20 due to a sulfurization phenomenon or the like can be prevented over a long period of time.

しかも、本実施例では、パッケージ本体11のキャビティ13の周側面に下地メタライズ層18を同時焼成し、この下地メタライズ層18の上に下地ニッケルめっき層19を介して銀めっき層20を形成するようにしたので、パッケージ本体11(セラミック)と下地メタライズ層18と下地ニッケルめっき層19と銀めっき層20との間の接合強度が強くなり、パッケージ本体11に発光素子12を実装する工程や、これを透明樹脂で封止する工程等で、銀めっき層20に熱負荷が加わっても、銀めっき層20が剥離することを防止することができる利点もある。   Moreover, in this embodiment, the base metallized layer 18 is simultaneously fired on the peripheral side surface of the cavity 13 of the package body 11, and the silver plated layer 20 is formed on the base metallized layer 18 via the base nickel plated layer 19. Therefore, the bonding strength between the package body 11 (ceramic), the base metallized layer 18, the base nickel plating layer 19 and the silver plating layer 20 is increased, and the process of mounting the light emitting element 12 on the package body 11 or the like There is also an advantage that the silver plating layer 20 can be prevented from peeling off even when a thermal load is applied to the silver plating layer 20 in a process of sealing the surface with a transparent resin.

前述したように、発光素子搭載パッケージの製造工程に銀変色防止処理工程を追加する場合、図4に示す比較例のように、銀めっき工程終了後に、パッケージ本体のキャビティ内面の光反射面となる銀めっき層の表面を銀変色防止剤により銀変色防止処理を行った後、パッケージ本体のキャビティ内に発光素子を実装することが考えられる。この比較例についても、実施例(表1)と同じ銀変色防止剤を用いて、銀変色防止剤の種類と銀めっき層表面の変色防止効果との関係を考察する試験を行ったので、その試験結果を次の表2に示す。この比較例のサンプルは、発光素子の実装前に、銀変色防止処理を行った後、半田プリフォームを用いて230℃程度で加熱して発光素子を実装した点が、実施例のサンプルと異なる。   As described above, when the silver discoloration prevention treatment process is added to the manufacturing process of the light emitting element mounting package, after the completion of the silver plating process, as shown in the comparative example shown in FIG. It is conceivable that the surface of the silver plating layer is subjected to silver discoloration prevention treatment with a silver discoloration preventing agent, and then a light emitting element is mounted in the cavity of the package body. For this comparative example, using the same silver discoloration inhibitor as in the example (Table 1), a test was conducted to examine the relationship between the type of silver discoloration inhibitor and the discoloration prevention effect on the surface of the silver plating layer. The test results are shown in Table 2 below. The sample of this comparative example is different from the sample of the example in that after the silver discoloration prevention treatment was performed before mounting the light emitting element, the light emitting element was mounted by heating at about 230 ° C. using a solder preform. .

Figure 2006351568
Figure 2006351568

この試験結果から明らかなように、比較例では、銀変色防止処理を行った後に230℃程度で加熱して発光素子の実装を行うようにしたので、いずれの銀変色防止剤を用いても、銀めっき層の表面の銀変色防止処理被膜が実装時の熱でほぼ焼失して、銀変色防止効果がほとんど無くなることが判明した。従って、実装時の熱による銀変色防止処理被膜の焼失を避けるためには、発光素子の実装後に銀変色防止処理を行う必要がある。   As is clear from this test result, in the comparative example, after performing the silver discoloration prevention treatment, the light emitting element was mounted by heating at about 230 ° C., so any silver discoloration preventing agent was used. It was found that the silver discoloration prevention treatment film on the surface of the silver plating layer was almost burned away by heat during mounting, and the silver discoloration prevention effect was almost lost. Therefore, in order to avoid burning of the silver discoloration prevention treatment film due to heat at the time of mounting, it is necessary to perform a silver discoloration prevention treatment after the light emitting element is mounted.

尚、図1のパッケージ構成例では、キャビティ13内面のうちの周側面のみに光反射面22を形成したが、キャビティ13の底面に跨がって光反射面21を形成したり、キャビティ13の周側面の一部に光反射面22を形成しない部分があっても良い。   In the package configuration example of FIG. 1, the light reflecting surface 22 is formed only on the peripheral side surface of the inner surface of the cavity 13, but the light reflecting surface 21 is formed across the bottom surface of the cavity 13, There may be a portion where the light reflecting surface 22 is not formed on a part of the peripheral side surface.

また、キャビティ13内に発光素子12を実装する方法は、半田プリフォーム23を用いる方法に限定されず、例えば、クリーム半田を素子搭載部24に塗布して発光素子12を半田付けするようにしても良く、勿論、発光素子の実装を、接着剤を用いて熱をかけずに行うようにしても良い。   The method for mounting the light emitting element 12 in the cavity 13 is not limited to the method using the solder preform 23. For example, cream light solder is applied to the element mounting portion 24 and the light emitting element 12 is soldered. Of course, the light emitting element may be mounted without applying heat using an adhesive.

その他、本発明は、パッケージ本体を1000℃以下で焼成する低温焼成セラミックで形成した発光素子搭載用パッケージに適用することも可能である等、種々変形して実施できることは言うまでもない。   In addition, it goes without saying that the present invention can be implemented in various modifications, such as being applicable to a light emitting element mounting package formed of a low temperature fired ceramic in which the package body is fired at 1000 ° C. or lower.

本発明の一実施例における発光素子搭載用パッケージの構成例を示す縦断面図である。It is a longitudinal cross-sectional view which shows the structural example of the light emitting element mounting package in one Example of this invention. 実施例の素子実装工程の作業手順を説明する図である。It is a figure explaining the work procedure of the element mounting process of an Example. 実施例の製造方法の主要部の工程の順序を示す図である。It is a figure which shows the order of the process of the principal part of the manufacturing method of an Example. 比較例の製造方法の主要部の工程の順序を示す図である。It is a figure which shows the order of the process of the principal part of the manufacturing method of a comparative example. 従来の発光素子搭載用パッケージの構成を示す縦断面図である。It is a longitudinal cross-sectional view which shows the structure of the conventional light emitting element mounting package.

符号の説明Explanation of symbols

11…パッケージ本体、12…発光素子、13…キャビティ、18…下地メタライズ層、19…下地ニッケルめっき層、20…銀めっき層、21…銀変色防止処理被膜、22…光反射面、23…半田プリフォーム、24…素子搭載部   DESCRIPTION OF SYMBOLS 11 ... Package main body, 12 ... Light emitting element, 13 ... Cavity, 18 ... Base metallizing layer, 19 ... Base nickel plating layer, 20 ... Silver plating layer, 21 ... Silver discoloration prevention coating film, 22 ... Light reflection surface, 23 ... Solder Preform, 24 ... Element mounting part

Claims (2)

パッケージ本体のキャビティ内に発光素子を実装すると共に、該キャビティ内面に該発光素子の光を反射する光反射面を形成した発光素子搭載パッケージを製造する方法において、
前記パッケージ本体のキャビティ内面のうちの少なくとも前記光反射面を形成する部分に銀めっき層を形成する銀めっき工程と、
前記パッケージ本体のキャビティ内に前記発光素子を実装する素子実装工程と、
前記発光素子の実装後に前記光反射面となる前記銀めっき層の表面を銀変色防止剤により銀変色防止処理する銀変色防止処理工程と
を含むことを特徴とする発光素子搭載パッケージの製造方法。
In a method of manufacturing a light emitting element mounting package in which a light emitting element is mounted in a cavity of a package body and a light reflecting surface for reflecting light of the light emitting element is formed on the inner surface of the cavity.
A silver plating step of forming a silver plating layer on at least a portion of the cavity inner surface of the package body forming the light reflecting surface;
An element mounting step of mounting the light emitting element in the cavity of the package body;
And a silver discoloration prevention treatment step of performing silver discoloration prevention treatment on the surface of the silver plating layer that becomes the light reflecting surface after mounting of the light emitting element with a silver discoloration prevention agent.
前記銀変色防止処理工程において、前記発光素子が実装された前記パッケージ本体のうちの少なくとも前記光反射面となる前記銀めっき層の表面を銀変色防止剤の溶液に浸漬することで、該銀めっき層の表面を銀変色防止処理することを特徴とする請求項1に記載の発光素子搭載パッケージの製造方法。   In the silver discoloration prevention treatment step, at least the surface of the silver plating layer serving as the light reflecting surface of the package body on which the light emitting element is mounted is immersed in a solution of a silver discoloration inhibitor, The method of manufacturing a light emitting element mounting package according to claim 1, wherein the surface of the layer is subjected to silver discoloration prevention treatment.
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JP2008147511A (en) * 2006-12-12 2008-06-26 Stanley Electric Co Ltd Semiconductor light emitting device and its manufacturing method
JP2010166044A (en) * 2008-12-19 2010-07-29 Furukawa Electric Co Ltd:The Lead frame for optical semiconductor device, and method for manufacturing the same
JP2011100905A (en) * 2009-11-09 2011-05-19 Nichia Corp Light emitting device and method of manufacturing the same
JP2011122234A (en) * 2009-07-15 2011-06-23 Kyowa Densen Kk Plating structure and method for manufacturing electric material
JP2011216691A (en) * 2010-03-31 2011-10-27 Sanyo Electric Co Ltd Semiconductor device
JP2012094587A (en) * 2010-10-25 2012-05-17 Hitachi Chem Co Ltd Method for manufacturing optical semiconductor device and optical semiconductor device
JP2012251205A (en) * 2011-06-02 2012-12-20 Hitachi Chemical Co Ltd Surface treatment agent for silver and silver alloy, substrate with light reflecting film, and light emitting device
JP2012251204A (en) * 2011-06-02 2012-12-20 Hitachi Chemical Co Ltd Surface treatment agent for silver and silver alloy, substrate coated with light-reflective film, and light-emitting device

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JPH02298084A (en) * 1989-05-12 1990-12-10 Matsushita Electric Ind Co Ltd Sealing of light-emitting diode
JPH08146256A (en) * 1994-11-17 1996-06-07 Sumitomo Electric Ind Ltd Optical module
JPH0940890A (en) * 1995-07-11 1997-02-10 Delco Electron Corp Coating of especially circuit board and method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008147511A (en) * 2006-12-12 2008-06-26 Stanley Electric Co Ltd Semiconductor light emitting device and its manufacturing method
JP2010166044A (en) * 2008-12-19 2010-07-29 Furukawa Electric Co Ltd:The Lead frame for optical semiconductor device, and method for manufacturing the same
JP2011122234A (en) * 2009-07-15 2011-06-23 Kyowa Densen Kk Plating structure and method for manufacturing electric material
JP2011100905A (en) * 2009-11-09 2011-05-19 Nichia Corp Light emitting device and method of manufacturing the same
JP2011216691A (en) * 2010-03-31 2011-10-27 Sanyo Electric Co Ltd Semiconductor device
JP2012094587A (en) * 2010-10-25 2012-05-17 Hitachi Chem Co Ltd Method for manufacturing optical semiconductor device and optical semiconductor device
JP2012251205A (en) * 2011-06-02 2012-12-20 Hitachi Chemical Co Ltd Surface treatment agent for silver and silver alloy, substrate with light reflecting film, and light emitting device
JP2012251204A (en) * 2011-06-02 2012-12-20 Hitachi Chemical Co Ltd Surface treatment agent for silver and silver alloy, substrate coated with light-reflective film, and light-emitting device

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