JP2006350168A - Liquid crystal device and manufacturing method therefor, and electronic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid crystal device which can maintain desirable holding characteristics, while suppressing pixel aperture rate drop, allowing display of high luminance and high image quality. <P>SOLUTION: The liquid crystal device of this invention has a common electrode 42 and pixel electrodes 48, arranged facing each other via an insulation film 51 on an element substrate 110, and TFD elements 43 electrically connected to pixel electrodes 48, and signal wiring 49 electrically connected with the TFD elements 43 on the insulation film 51. In this configuration, it drives the liquid crystal layer in the electrical fields formed between the pixel electrodes 48 and the common electrode 42. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a liquid crystal device, a manufacturing method thereof, and an electronic apparatus.

2. Description of the Related Art Conventionally, as an active matrix liquid crystal device, one using a two-terminal nonlinear element (TFD (Thin Film Diode) element) as a pixel switching element is known (see, for example, Patent Document 1).
JP 2004-93929 A

As a liquid crystal device using a TFD element, a TN (Twisted Nematic) type is generally used. However, with the recent increase in the definition of pixels, it is difficult to secure display retention characteristics. If a storage capacitor is provided in the pixel to eliminate the pixel aperture ratio, a bright display cannot be obtained.
The present invention has been made in view of the above-described problems of the prior art, and has a good holding characteristic while suppressing a decrease in the pixel aperture ratio, and enables a display with high luminance and high image quality. And a method for manufacturing the same.

In order to solve the above-described problems, the present invention provides a first substrate and a second substrate that are disposed to face each other with a liquid crystal layer interposed therebetween, a first electrode provided on the liquid crystal layer side of the first substrate, and a second electrode. And a liquid crystal device for driving the liquid crystal layer by an electric field generated between the first electrode and the second electrode, wherein the first electrode and the second electrode are arranged to face each other with an insulating film interposed therebetween And a non-linear element electrically connected to the second electrode and a signal wiring electrically connected to the nonlinear element are provided on the second electrode side of the insulating film. A liquid crystal device is provided.
That is, the liquid crystal device of the present invention is an active matrix type liquid crystal device having a non-linear element as a pixel switching element, and is provided with a first electrode and a second electrode facing each other through an insulating film on a first substrate, This is a liquid crystal device that employs a so-called FFS (Fringe Field Switching) system in which an electric field generated between these electrodes is applied to a liquid crystal layer and driven.
According to this configuration, since the first electrode and the second electrode are opposed to each other via the insulating film, an electric field that drives the liquid crystal layer when a voltage is applied between the first electrode and the second electrode. As a result of this, a capacitor is formed in the opposing region of the first electrode and the second electrode, and even after the voltage application to the electrode is stopped, the display can be favorably held by the charge accumulated in the capacitor. Therefore, in this configuration, since it is not necessary to separately provide a storage capacitor for holding voltage, it is possible to realize high display quality without reducing the pixel aperture ratio.

In the liquid crystal device according to the aspect of the invention, the first electrode may be provided on the first substrate side of the insulating film. The second electrode may be provided on the first substrate side of the insulating film.
That is, in the liquid crystal device of the present invention, the arrangement form of the first electrode and the second electrode (and the non-linear element connected thereto) sandwiching the insulating film is arbitrary, and high brightness is obtained in any configuration. High-quality display can be obtained. Among these configurations, if the second electrode is provided between the first substrate and the insulating film, the non-linear element electrically connected to the second electrode is covered with the insulating film. Therefore, the unevenness generated on the surface of the first substrate due to the nonlinear element can be relaxed, and there is an advantage that it is easy to ensure uniformity in the rubbing process of the alignment film.

  In the liquid crystal device according to the aspect of the invention, of the first electrode and the second electrode, an electrode provided on the opposite side of the insulating film from the first substrate is a plane in which the first electrode and the second electrode face each other. A configuration having a plurality of strip electrodes extending in the region is preferable. According to this configuration, a liquid crystal device that performs display by driving and controlling the liquid crystal disposed in the region between the strip electrodes can be obtained.

  In the liquid crystal device according to the aspect of the invention, the plurality of second electrodes are arranged and formed on the first substrate in a substantially matrix shape in plan view, and the first electrodes are formed across the plurality of the second electrodes. Preferably it is. That is, in the liquid crystal device according to the present invention, the second electrode electrically connected to the nonlinear element is an electrode provided for each pixel (dot), and the first electrode is a common electrode that spans a plurality of pixels. Is done.

  In the liquid crystal device according to the aspect of the invention, the first electrode may electrically connect a common electrode portion having a substantially rectangular shape in a plan view that includes the second electrode in a region facing the second electrode, and a plurality of the common electrode portions. It can also be set as the structure which has a connection wiring part to connect.

  In the liquid crystal device of the present invention, the connection wiring portion may be a metal wiring. By using the metal wiring, the loss of the voltage applied to the common electrode can be suppressed, and a display defect due to a signal delay or the like can be hardly caused.

  In the liquid crystal device according to the aspect of the invention, the nonlinear element provided between the first substrate and the insulating film and the first electrode provided on the insulating film are arranged to overlap in a plane. Preferably it is. By adopting such a configuration, it becomes possible to shield the electric field generated in the vicinity of the nonlinear element during the operation of the nonlinear electrode by the first electrode, and prevent alignment disorder of the liquid crystal in the formation area of the nonlinear element. The brightness and image quality of the device can be increased. When the first electrode is a light-shielding member, the aperture ratio can be increased by overlapping the non-linear element formation region, which is a similar light-shielding region, in a planar manner.

  In the liquid crystal device according to the aspect of the invention, it is preferable that the first electrode intersects the signal wiring in the connection wiring portion. According to this configuration, since the area of the region where the signal wiring and the first electrode intersect can be reduced, the generation of parasitic capacitance between the signal wiring and the first electrode can be suppressed, and crosstalk or the like occurs. Thus, a high-quality liquid crystal device can be obtained.

  In the liquid crystal device of the present invention, the non-linear element and the connection wiring portion made of the metal wiring may be arranged so as to overlap in a plane. According to this configuration, the non-linear element, which is a light-shielding component, and the connection wiring portion are arranged in the same plane region, so that the aperture ratio can be increased and a high-luminance display can be obtained.

  In the liquid crystal device according to the aspect of the invention, the insulating film is formed to have a different thickness depending on a part, and the film thickness of a part overlapping the nonlinear element in a plane is a film in a part overlapping the second electrode. It is preferable that the thickness is larger. According to this configuration, it is possible to satisfactorily shield the electric field generated in the vicinity of the nonlinear element, and to increase the capacitance between the first electrode and the second electrode, thereby improving the holding characteristics.

  The method of manufacturing a liquid crystal device according to the present invention includes a first substrate and a second substrate that are disposed to face each other with a liquid crystal layer interposed therebetween, and a first electrode and a second electrode that are provided on the liquid crystal layer side of the first substrate. A liquid crystal device manufacturing method for driving the liquid crystal layer by an electric field generated between the first electrode and the second electrode, the step of forming the first electrode on the first substrate; Forming an insulating film covering the first substrate; forming a non-linear element on the insulating film; and a signal wiring electrically connected to the non-linear element; and the first on the insulating film. And a step of forming the second electrode having a plurality of strip electrodes at positions opposed to the electrodes and electrically connected to the nonlinear element. According to this manufacturing method, an FFS-type liquid crystal device including a nonlinear element as a switching element can be easily manufactured.

  The method of manufacturing a liquid crystal device according to the present invention includes a first substrate and a second substrate that are disposed to face each other with a liquid crystal layer interposed therebetween, and a first electrode and a second electrode that are provided on the liquid crystal layer side of the first substrate. A liquid crystal device for driving the liquid crystal layer by an electric field generated between the first electrode and the second electrode, the non-linear element on the first substrate, and the non-linear element and the electric Forming an electrically connected signal wiring and the second electrode electrically connected to the nonlinear element, and an insulating film covering the nonlinear element, the signal wiring, and the second electrode And a step of forming the first electrode having a plurality of strip electrodes at a position facing the second electrode on the insulating film. According to this manufacturing method, an FFS-type liquid crystal device including a nonlinear element as a switching element can be easily manufactured. In addition, since the insulating film is formed so as to cover the non-linear element, the unevenness of the surface of the first substrate can be reduced, and the uniformity of the alignment film formed on the surface of the first substrate and the uniformity of the alignment process can be improved. Can do.

  In the method of manufacturing a liquid crystal device according to the present invention, in the step of forming the first electrode, a plurality of common electrode portions having a substantially rectangular shape in plan view are formed and the plurality of common electrode portions are electrically connected in one direction. The connection wiring portion is formed, and the signal wiring is formed at a position intersecting with the connection wiring portion. According to this manufacturing method, since the liquid crystal device having a configuration in which the connection wiring portion and the signal wiring intersect with each other can be obtained, it is possible to suppress the generation of parasitic capacitance between the first electrode and the signal wiring. A liquid crystal device that can effectively prevent problems such as crosstalk can be manufactured.

  In the method for manufacturing a liquid crystal device according to the present invention, the connection wiring portion may be formed of a metal material, and the connection wiring portion and the nonlinear element may be formed at a position overlapping in a plane. According to this configuration, even when the connection wiring portion is a low-resistance metal wiring, it is arranged so as to overlap the non-linear element made of a light-shielding member in a planar manner without reducing the aperture ratio of the pixel. The electrical characteristics of the first electrode can be enhanced.

  In the manufacturing method in which the nonlinear element is formed between the first substrate and the insulating film, in the step of forming the first electrode, the first electrode is formed at a position overlapping the nonlinear element in a plane. preferable. According to this manufacturing method, an electric field generated in the vicinity of the nonlinear element can be shielded by the first electrode. Further, when the first electrode is a light-shielding member, an advantage is obtained in that a decrease in the aperture ratio can be prevented by arranging the nonlinear element, which is a light-shielding member, and the first electrode so as to overlap in a plane.

  In the method for manufacturing a liquid crystal device according to the present invention, the insulating film covering the second electrode and the nonlinear element may be formed thick on the second electrode while the insulating film covering the second electrode is formed thick. According to this manufacturing method, in the vicinity of the nonlinear element, an electric field caused by the nonlinear element can be shielded to prevent alignment disorder of the liquid crystal, and in a region where the first electrode and the second electrode are opposed to each other, The display holding characteristics can be improved by increasing the capacitance between the electrodes.

  An electronic apparatus according to the present invention includes the liquid crystal device according to the present invention described above. According to this configuration, it is possible to provide an electronic device including a bright and high-quality display unit.

(First embodiment)
Hereinafter, a first embodiment according to the present invention will be described with reference to the drawings.
FIG. 1A is a plan view showing an embodiment of the liquid crystal device of the present invention, and FIG. 1B is a cross-sectional view of the main part of FIG. The liquid crystal device illustrated in FIG. 1 is an FFS (Fringe Field Switching) type, that is, a horizontal electric field type liquid crystal device.
In addition, in each figure, in order to make each layer and each member into a size that can be recognized on the drawing, the scale is varied for each layer and each member.

A conventional vertical drive type liquid crystal device controls the alignment of liquid crystal molecules by applying a drive electric field to a liquid crystal sandwiched between two substrates in a direction perpendicular to the substrate surface. On the other hand, in the lateral electric field type liquid crystal device, on the substrate side on which the electrode structure is formed, a driving electric field is generated in a direction substantially parallel to the substrate surface to control the alignment of liquid crystal molecules.
The liquid crystal device of this embodiment is a transmissive liquid crystal device that uses light from a backlight (not shown), and an active matrix system using a two-terminal nonlinear element, here a TFD (Thin Film Diode) element, as a switching element. belongs to.

  As shown in FIGS. 1A and 1B, in the liquid crystal device 100 of the present embodiment, a pair of element substrate (first substrate) 110 and counter substrate (second substrate) 120 are ultraviolet curable. The liquid crystal layer 50 is sealed and held in a region partitioned by the seal material 52. The sealing material 52 is formed in an annular shape (frame shape) closed within the substrate surface.

  On the inner surface side of the element substrate 110, dot element portions 40 including an electrode structure that generates an electric field that acts on the liquid crystal layer 50 are arranged in a matrix, and the color filter 22 is formed on the inner surface side of the counter substrate 120. Has been. An alignment film (not shown) is further formed on the inner surface side of the dot element portion 40 and the color filter 22. Note that a TFD element (thin film diode element, see FIG. 6) is connected to the dot element unit 40 as a switching element.

  1A, the outer dimension of the element substrate 110 is larger than that of the counter substrate 120, and the element substrate 110 protruding from one end (the lower side in FIG. 1) of the counter substrate 120 is larger. The peripheral edge is an overhang area 90. A first drive circuit 201 and a second drive circuit 202 for driving the dot element unit 40 formed on the element substrate 110 side are mounted on the overhang region 90. Each of the drive circuits 201 and 202 has an external connection terminal (not shown), and receives a display control signal and the like from an external device connected to the liquid crystal device 100.

  The image display area of the element substrate 110 constituting the liquid crystal device 100 has a cross-sectional configuration and a planar configuration as shown in FIG. In the image display area of the element substrate 110, as shown in FIG. 6B, a plurality of dot element portions 40 are arranged in a matrix in a plan view, and in FIG. The partial cross-section structure which follows the AA 'line in is shown. Each dot element portion 40, together with the liquid crystal layer 50, the color filter 22 on the counter substrate side, and the like constitute one dot that is the minimum display unit of the image display area, and the color (R ( One pixel is composed of three dots (dot element portion 40) that display red), G (green), and B (blue).

  Here, focusing on one dot element portion 40, as shown in FIG. 6B, the common electrode 42 extends in the horizontal direction in the figure, and the signal wiring 49 extends in the vertical direction in the figure that intersects with the common electrode 42. Exist. The common electrode 42 is a conductive film made of a transparent conductive material such as ITO (indium tin oxide). The common electrode 42 forms a strip having a width including the planar area of each dot, and spans a plurality of dots in the horizontal direction in the figure. Is formed. The signal wiring 49 is formed using a metal material such as chromium.

  A TFD element (nonlinear element) 43 is formed in the vicinity of the intersection region of the common electrode 42 and the signal wiring 49 in one dot. The TFD element 43 has an insulating film sandwiched between a lower electrode and an upper electrode. As shown in FIG. 6A, the lower electrode 44 and an element insulating film 46 covering the upper surface of the lower electrode 44, The TFD element 43 is configured by the signal wiring 49 and the connection electrode 47 provided so as to face the lower electrode 44 with the element insulating film 46 interposed therebetween. That is, the TFD element 43 according to the present embodiment is a so-called back-to-back TFD element in which two diodes are connected back to back. In this embodiment, the signal wiring 49 that partially overlaps the lower electrode 44 is used as the upper electrode of the TFD element 43 as it is. However, an upper electrode that is electrically connected to the signal wiring 49 is provided separately. Also good.

A pixel electrode 48 is electrically connected to a connection electrode 47 constituting one upper electrode of the TFD element 43. The pixel electrode 48 has a base end portion 48a that extends in the vertical direction in the figure at the end on the TFD element 43 side, and three strip electrode portions 48b that branch from the base end portion 48a and extend in the horizontal direction in the drawing. is doing. The pixel electrode 48 may be formed of a metal material such as chromium. However, if the pixel electrode 48 is formed using a transparent conductive material such as ITO, the dot aperture ratio can be increased. In this embodiment, the number of the strip-shaped electrode portions is three. However, the present invention is not limited to this, and it has a reverse “yo” shape with one end opened. It may be a letter shape.
6A, the common electrode 42 is formed on the substrate body 10A which is the base of the element substrate 110, and the insulating film made of a silicon nitride film or the like formed so as to cover the common electrode 42. A TFD element 43, a signal wiring 49, and a pixel electrode 48 are formed on 51.

In the liquid crystal device 100 of the present embodiment having the above configuration, when a scanning voltage waveform is applied to the common electrode 42 and a predetermined signal voltage waveform is applied to the signal wiring 49, the TFD element 43 is turned on and applied to the pixel electrode 48. A predetermined voltage is written, and the liquid crystal is driven by an electric field (lateral electric field) generated between the pixel electrode 48 and the common electrode 42. The electrodes to which the scanning voltage waveform and the signal voltage waveform are applied may be interchanged.
The pixel electrode 48 and the common electrode 42 are provided with the FFS-type electrode structure in which the common electrode 42 and the pixel electrode 48 are arranged so as to face each other in the substrate thickness direction with the insulating film 51 interposed therebetween. Since the capacitor having the insulating film 51 as a dielectric layer is formed in the regions facing each other, the charge between the electrodes can be well held without providing a separate holding capacitor in the dot, and the image quality is high definition. An indication can be obtained.
In particular, if a silicon nitride film having a large dielectric constant and hardly causing defects due to film formation is used as the insulating film 51, an insulating film having a high dielectric constant can be formed thinly, and the pixel electrode 48 and the common electrode 42 can be formed. The capacity formed between the two can be increased. As a result, a liquid crystal device having even better holding characteristics can be realized.
In addition, since it is not necessary to secure an area in which the storage capacitor is separately provided in the dot, the aperture ratio of the dot can be improved, and a high-luminance display can be obtained.

  Both the signal wiring 49 and the common electrode 42 can be used as a scanning line and a signal line. However, as described above, the signal wiring 49 made of a metal film is used for the scanning line and is made of ITO or the like having a relatively high sheet resistance. It is preferable to use the common electrode 42 as a signal line. By preventing the signal delay on the scanning side, it is possible to prevent the horizontal crosstalk that easily occurs in the TFD active matrix method, and to improve the display quality.

[Method of manufacturing liquid crystal device]
Next, a manufacturing method of the liquid crystal device 100 having the above-described configuration, particularly the element substrate 110 having an electrode structure characteristic in the present invention will be described with reference to FIGS. FIGS. 2A to 6A are cross-sectional configuration diagrams of one dot element unit 40, and FIGS. 2B to 6B are diagrams illustrating a planar region including a plurality of dot element units 40. is there. The drawings with the same figure number correspond to the same process, and the cross-sectional structure of (a) is the position along the line AA ′ of (b).

  First, as shown in FIGS. 2A and 2B, a substrate body 10A such as a glass substrate is prepared, and a common electrode 42 made of a transparent conductive material such as ITO is provided on the substrate body 10A by photolithography technology. Is used to form a pattern in a stripe shape in plan view.

  Next, as shown in FIGS. 3A and 3B, an insulating film 51 made of a silicon nitride film, a silicon oxide film, or the like is formed in a flat solid shape covering the common electrode 42. Next, as shown in FIGS. 4A and 4B, a lower electrode 44 having a substantially rectangular shape in plan view and an element insulating film 46 covering the lower electrode 44 are formed at predetermined positions in the plane region of the common electrode 42. In order to form the lower electrode 44 and the element insulating film 46, a wiring pattern made of tantalum having a shape in which, for example, the lower electrode 44 shown in FIG. Thereafter, the substrate body is immersed in the electrolytic solution to anodize the wiring pattern, thereby forming an anodic oxide film to be the element insulating film 46 on the surface of the wiring pattern. Then, the lower electrode 44 and the element insulating film 46 covering the lower electrode 44 can be formed by patterning the wiring pattern into a substantially rectangular shape in plan view shown in FIG.

Next, as shown in FIGS. 5A and 5B, a signal wiring 49 extending in the vertical direction in the drawing and a connection electrode 47 having a rectangular shape in plan view are formed by patterning a chromium film. To do. At this time, the signal wiring 49 and the connection electrode 47 are formed so as to partially overlap the existing lower electrode 44 (element insulating film 46) on the substrate.
Next, as shown in FIGS. 6A and 6B, a pixel electrode 48 having a substantially E shape in plan view made of a transparent conductive material such as ITO is patterned so as to partially overlap the connection electrode 47 in plan view. Further, an alignment film made of polyimide or silicon oxide (both not shown) is formed so as to cover the substrate body 10A.
The element substrate 110 can be manufactured through the above steps.

On the other hand, the detailed description of the manufacturing method of the counter substrate 120 is omitted, but as shown in FIG. 1B, the color filter 22 is formed on the substrate body 20A such as a glass substrate, and the color filter 22 is formed. Can be manufactured by forming an alignment film (not shown) covering the substrate.
Then, the completed element substrate 110 and the counter substrate 120 are bonded to each other through the sealing material 52, and the liquid crystal is sealed, whereby the liquid crystal device 100 of this embodiment can be obtained.

  In the case where the liquid crystal device 100 is a transflective liquid crystal device, light reflectivity made of aluminum, silver, or the like is provided between the common electrode 42 on the substrate body 10A side or between the common electrode 42 and the insulating film 51. A transflective liquid crystal device can be easily configured by providing a reflective layer made of a metal mirror or a dielectric mirror in which a plurality of dielectric films having different refractive indexes are laminated. In this case, since the reflective layer can be provided on the element substrate 110 side, and the element substrate 110 can be disposed on the back side as viewed from the observer, a light reflective member such as an electrode or metal wiring provided on the element substrate 110. It is possible to prevent external light from being incident on the light source and to prevent the visibility from being deteriorated due to irregular reflection of external light by these light reflective members.

  According to the manufacturing method of the liquid crystal device 100 of the present embodiment, the strip-shaped common electrode 42 that includes the plurality of dot element portions 40 is formed, and the pixel electrode 48 is formed thereon via the insulating film 51. Thus, an FFS-type electrode structure can be easily formed, and a high-quality liquid crystal device can be manufactured at a low cost with a simple process.

[Modification]
In the above embodiment, the configuration in which the strip-shaped common electrode 42 is formed on the substrate body 10A in a stripe shape in plan view has been described. However, the planar shape of the common electrode 42 is illustrated in FIGS. 7 and 8. The ones shown are also applicable. Hereinafter, a modification of the first embodiment will be described with reference to FIGS.
7 and 8 show the state in which the TFD element 43 and the pixel electrode 48 are removed from the dot element portion 40 on the upper left side of the drawing for easy understanding of the drawings. The display of components other than the common electrode is simplified.

<First Modification>
FIG. 7 is a diagram showing a partial planar structure of the element substrate 110 in the first modification of the present embodiment.
In the element substrate 110 shown in FIG. 7, a common electrode portion 42a having a substantially rectangular shape in plan view corresponding to each dot and a connection wiring portion 42b that electrically connects the common electrode portions 42a arranged in the horizontal direction in the drawing. A common electrode 42A is formed. And the signal wiring 49 and the common electrode 42A extending in the vertical direction in the figure intersect at the connection wiring part 42b.

In the liquid crystal device according to this modification, the common electrode 42A having the planar shape is provided, and the connection wiring portion 42b intersects with the signal wiring 49, thereby reducing the parasitic capacitance between the signal wiring 49 and the common electrode 42A. Thus, signal delay and crosstalk can be suppressed and high-quality display can be obtained. In addition, since parasitic capacitance is unlikely to occur, the thickness of the insulating film 51 provided between the common electrode 42 and the pixel electrode 48 can be reduced, whereby the holding between the pixel electrode 48 and the common electrode 42A is achieved. The capacity can be increased and the dot retention characteristics can be improved.
Further, the common electrode 42A according to the present example can be easily formed by changing the mask shape in the process of forming the common electrode 42 in the previous embodiment, which causes inconveniences such as an increase in man-hours and a decrease in yield in the manufacturing process. Nor.

<Second Modification>
Next, FIG. 8 is a diagram showing a partial planar structure of the element substrate 110 in the second modification.
The element substrate 110 shown in FIG. 8 is characterized in that it includes a common electrode 42B. The common electrode 42B includes a common electrode portion 42a having a substantially rectangular shape in plan view corresponding to each dot, and a connection wiring portion 42c that electrically connects the common electrode portions 42a arranged in the horizontal direction in the drawing. Yes. The connection wiring part 42c is a metal wiring extending across the plurality of common electrode parts 42a, and is formed using, for example, chromium.

  According to the common electrode 42B having the above-described configuration, the connection wiring portion 42c that conductively connects the plurality of common electrode portions 42a is a metal wiring, thereby preventing loss of voltage applied to the common electrode 42B and signal delay. Therefore, the structure is suitable for a high-definition liquid crystal device. Also in this example, the connection wiring part 42c and the signal wiring 49 are arranged so as to intersect with each other, and it is possible to prevent the occurrence of parasitic capacitance between the common electrode 42B and the signal wiring 49, and thus a high-quality liquid crystal device can be obtained. Can be realized.

Further, it is preferable that the connection wiring portion 42c, which is a metal wiring, and the TFD element 43 are arranged so as to overlap in a plane. With such a configuration, it is possible to increase the aperture ratio of dots compared to the case where the TFD element 43 and the connection wiring portion 42c, which are light shielding members, are both arranged apart from each other in a plane, and a bright display Can be obtained.
In the example shown in FIG. 8, the case where the connection wiring portion 42c is formed of one metal wiring has been described. However, the connection wiring portion 42c is installed between the common electrode portions 42a that are arranged apart from each other. It may be.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIGS.
The liquid crystal device of the present embodiment is a lateral electric field type TFD active matrix liquid crystal device, similar to the liquid crystal device 100 of the first embodiment, and the overall configuration is the same as that of the liquid crystal device 100 shown in FIG. The electrode structure on the substrate 110 is changed. Therefore, in FIG. 9 to FIG. 12, the same reference numerals are given to the components corresponding to the liquid crystal device 100 of the first embodiment, and detailed description thereof will be omitted.
FIGS. 9A to 12A are cross-sectional configuration diagrams of one dot element unit 40, and FIGS. 9B to 12B are diagrams showing a planar region including a plurality of dot element units 40. FIG. is there. The drawings with the same figure number correspond to the same process, and the cross-sectional structure of (a) is the position along the line AA ′ of (b).

  The element substrate 110 according to the liquid crystal device of this embodiment has a cross-sectional structure (a) and a planar structure (b) shown in FIG. As shown in FIG. 12A, on the substrate body 10A, the TFD element 43, the signal wiring 49 and the connection electrode 47 electrically connected to the TFD element 43, and the connection electrode 47 are electrically connected. A pixel electrode 58 is formed, and an insulating film 61 made of a silicon nitride film or the like is formed so as to cover the TFD element 43, the signal wiring 49, the connection electrode 47, and the pixel electrode 48. A common electrode 62 is formed on the insulating film 61 in a substantially comb-like shape in plan view and extending in the left-right direction in FIG.

  That is, contrary to the first embodiment, the pixel electrode 58 connected to the TFD element 43 is formed in a substantially rectangular shape in plan view, and the common electrode 62 formed across a plurality of dots. Are formed in a substantially comb-like shape in plan view to realize an FFS-type electrode structure. Even in such a configuration, as in the first embodiment, it is possible to obtain a bright and high-quality display with excellent display retention characteristics.

  In the present embodiment, as shown in FIG. 12B, the common electrode 62 formed on the upper layer side with respect to the pixel electrode 58 and the like is disposed so as to overlap the TFD element 43 in a plane. With such a configuration, an electric field generated in the vicinity of the element when the TFD element 43 is driven can be shielded by the common electrode 62, and liquid crystal alignment disorder due to the electric field can be prevented. In addition, when the common electrode 62 is formed using a metal material, the formation area of the TFD element 43 that does not contribute to the dot aperture ratio and the formation area of the common electrode 62 overlap in a plane, so that the aperture ratio is reduced. Can be suppressed.

  Further, since the surface of the element substrate 110 is planarized by the insulating film 61 formed so as to cover the TFD element 43 and the pixel electrode 58, the surface of the element substrate 110 according to the first embodiment is compared with the surface of the element substrate 110 according to the first embodiment. An element substrate having a smooth surface can be obtained, and the uniformity of the rubbing treatment of the polyimide alignment film and the uniformity of the shape of the inorganic alignment film can be enhanced. Thereby, a high-quality liquid crystal device can be manufactured with a high yield.

  In the liquid crystal device according to the present embodiment, the insulating film 61 may have a different thickness depending on the part. In this case, the film thickness is increased at a part corresponding to the region where the TFD element 43 is formed, and the pixel It is preferable to reduce the film thickness in a region where the electrode 58 and the common electrode 62 face each other. With this configuration, the electric field generated by the TFD element 43 can be shielded in the region where the TFD element 43 is formed, and the region where the pixel electrode 58 and the common electrode 62 are opposed is formed between the electrodes. The retention capacity can be improved by increasing the capacity.

[Method of manufacturing liquid crystal device]
Next, a manufacturing method of the liquid crystal device 100 having the above-described configuration, particularly the element substrate 110 having an electrode structure characteristic in the present invention will be described with reference to FIGS.
First, as shown in FIGS. 9A and 9B, a substrate body 10A such as a glass substrate is prepared, and a lower electrode 44 and an element insulating film 46 covering the substrate 44 are formed on the substrate body 10A. The formation method is the same as in the previous embodiment. Next, as shown in FIGS. 10A and 10B, by forming a pattern of a chromium film, a signal wiring 49 extending in the vertical direction in the drawing and a connection electrode 47 having a rectangular shape in plan view are formed. . At this time, the signal wiring 49 and the connection electrode 47 are formed so as to partially overlap the existing lower electrode 44 (element insulating film 46) on the substrate.
Thereafter, as shown in FIGS. 11A and 11B, a pixel electrode 58 having a substantially rectangular shape in plan view made of a transparent conductive material such as ITO is patterned so as to partially overlap with the connection electrode 47 in a plane. .

Then, as shown in FIGS. 12A and 12B, an insulating film 61 covering the TFD element 43, the pixel electrode 48, and the like is formed in a flat solid shape, and the insulating film 61 has a substantially comb-like shape in plan view. The common electrode 62 is patterned using a transparent conductive material such as ITO. Thereafter, an alignment film is formed on the substrate body 10A including the common electrode 62, and an alignment treatment is performed as necessary, whereby the element substrate 110 according to the present embodiment is obtained. The manufacturing method of the counter substrate 120 is also the same as in the first embodiment.
The element substrate 110 and the counter substrate 120 obtained through the above steps are bonded to each other through a sealing material 52, and the liquid crystal is sealed, whereby the liquid crystal device of this embodiment can be obtained.

(Electronics)
FIG. 13 is a perspective configuration diagram of a mobile phone which is an example of an electronic apparatus provided with a liquid crystal device according to the present invention in a display portion. The mobile phone 1300 uses the liquid crystal device of the present invention as a small-size display portion 1301. A plurality of operation buttons 1302, an earpiece 1303, and a mouthpiece 1304.

  The liquid crystal device of the above embodiment is not limited to the mobile phone, but an electronic book, a personal computer, a digital still camera, a liquid crystal television, a viewfinder type or a monitor direct-view type video tape recorder, a car navigation device, a pager, an electronic notebook, It can be suitably used as an image display means for devices such as calculators, word processors, workstations, videophones, POS terminals, touch panels, etc., and any electronic device can provide a bright high-quality display on its display unit It becomes.

1 is an overall configuration diagram of a liquid crystal device according to a first embodiment. The figure which shows the manufacturing process of a liquid crystal device equally. The figure which shows the manufacturing process of a liquid crystal device equally. The figure which shows the manufacturing process of a liquid crystal device equally. The figure which shows the manufacturing process of a liquid crystal device equally. The figure which shows the manufacturing process of a liquid crystal device equally. The figure which shows the principal part of the liquid crystal device which concerns on the modification of 1st Embodiment. The figure which shows the principal part of the liquid crystal device which concerns on 1st Embodiment. The figure which shows the manufacturing process of the liquid crystal device which concerns on 2nd Embodiment. The figure which shows the manufacturing process of the liquid crystal device which concerns on 2nd Embodiment. The figure which shows the manufacturing process of the liquid crystal device which concerns on 2nd Embodiment. The figure which shows the manufacturing process of the liquid crystal device which concerns on 2nd Embodiment. FIG. 11 is a perspective configuration diagram illustrating an example of an electronic device.

Explanation of symbols

  100 liquid crystal device, 110 element substrate (first substrate), 120 counter substrate (second substrate), 10A, 20A substrate body, 22 color filter, 40 dot element portion, 42, 62 common electrode (first electrode), 42a common Electrode part, 42b, 42c Connection wiring part, 43 TFD element (nonlinear element), 44 Lower electrode, 46 Element insulating film, 47 Connection electrode part, 48, 58 Pixel electrode (second electrode), 48a Base end part, 48b Band shape Electrode portion, 49 signal wiring, 50 liquid crystal layer, 51, 61 insulating film.

Claims (14)

A first substrate and a second substrate disposed opposite to each other with a liquid crystal layer interposed therebetween, and a first electrode and a second electrode provided on the liquid crystal layer side of the first substrate, and the first electrode and the second electrode A liquid crystal device that drives the liquid crystal layer by an electric field generated between two electrodes,
The first electrode and the second electrode are arranged to face each other with an insulating film interposed therebetween,
A non-linear element electrically connected to the second electrode and a signal wiring electrically connected to the nonlinear element are provided on the second electrode side of the insulating film. Liquid crystal device.   The liquid crystal device according to claim 1, wherein the first electrode is provided on the first substrate side of the insulating film.   The liquid crystal device according to claim 1, wherein the second electrode is provided on the first substrate side of the insulating film.   Among the first electrode and the second electrode, a plurality of electrodes provided on the opposite side of the insulating film from the first substrate extend in a planar region where the first electrode and the second electrode face each other. 4. The liquid crystal device according to claim 1, further comprising: a band-shaped electrode. A plurality of the second electrodes are arranged and formed in a substantially matrix shape in plan view on the first substrate,
5. The liquid crystal device according to claim 1, wherein the first electrode is formed across a plurality of the second electrodes. 6.   The first electrode has a substantially rectangular common electrode part including the second electrode in a region facing the second electrode, and a connection wiring part electrically connecting the plurality of common electrode parts. The liquid crystal device according to claim 5, wherein the liquid crystal device is provided.   The liquid crystal device according to claim 6, wherein the connection wiring portion is a metal wiring.   The non-linear element provided between the first substrate and the insulating film and the first electrode provided on the insulating film are arranged so as to overlap in a plane. Item 8. The liquid crystal device according to any one of Items 3 to 7.   9. The liquid crystal device according to claim 6, wherein the first electrode intersects the signal wiring in the connection wiring portion.   9. The liquid crystal device according to claim 8, wherein the nonlinear element and the connection wiring portion made of the metal wiring are arranged so as to overlap each other in a planar manner.   The insulating film is formed to have a different thickness depending on a portion, and the thickness of a portion overlapping the nonlinear element in a plane is larger than the thickness of a portion overlapping the second electrode in a plane. The liquid crystal device according to any one of claims 3 to 9. A first substrate and a second substrate disposed opposite to each other with a liquid crystal layer interposed therebetween, and a first electrode and a second electrode provided on the liquid crystal layer side of the first substrate, the first electrode and the second electrode A liquid crystal device manufacturing method for driving the liquid crystal layer by an electric field generated between two electrodes,
Forming the first electrode on the first substrate;
Forming an insulating film covering the first substrate;
Forming a nonlinear element on the insulating film and a signal wiring electrically connected to the nonlinear element;
Forming the second electrode having a plurality of strip-like electrodes at positions facing the first electrode on the insulating film and electrically connected to the nonlinear element;
A method for manufacturing a liquid crystal device, comprising: A first substrate and a second substrate disposed opposite to each other with a liquid crystal layer interposed therebetween, and a first electrode and a second electrode provided on the liquid crystal layer side of the first substrate, and the first electrode and the second electrode A liquid crystal device manufacturing method for driving the liquid crystal layer by an electric field generated between two electrodes,
Forming a non-linear element, a signal wiring electrically connected to the non-linear element, and the second electrode electrically connected to the non-linear element on the first substrate;
Forming an insulating film covering the nonlinear element, the signal wiring, and the second electrode;
Forming the first electrode having a plurality of strip-shaped electrodes at a position facing the second electrode on the insulating film;
A method for manufacturing a liquid crystal device, comprising:   An electronic apparatus comprising the liquid crystal device according to claim 1.

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