JP2006337747A - Processing device and method for optical member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a processing device for an optical member and a processing method therefor by which a high-quality metallic coating film can easily be formed through a simple and easy processing. <P>SOLUTION: The metallic coating film 11 is formed on a rod type optical member 10 to which centering processing is performed and then cleaning is performed. The rod type optical member 10 on which the metallic coating film 11 is formed is cut, ground/polished so as to form the optical member 1 where the metallic film coating 11 is formed. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an optical member in which a metal film is formed on a peripheral wall of, for example, a lens, and more particularly to a processing apparatus and a processing method thereof.

  In general, as a processing method for manufacturing an optical member having a metal film formed on the outer peripheral surface of a lens or the like, first, after cutting the rod-shaped optical member, grinding and polishing so that the cut surface becomes substantially parallel. By applying and centering, an optical member having a desired outer diameter is formed.

  As a method for forming a metal film on such an optical member, for example, a plurality of optical members are stacked on a non-deposition surface and mounted on a thin film deposition apparatus, and the metal film is simultaneously formed on a plurality of outer peripheral surfaces. A film is formed (see, for example, Patent Document 1). That is, the thin film vapor deposition apparatus is provided with a vacuum vapor deposition tank, and a vapor deposition source is provided in the vacuum vapor deposition tank, and a spherical dome corresponding to the vapor deposition source is rotatable via a motor gear mechanism. Provided. The spherical dome is provided with a work holding mechanism that can rotate freely in correspondence with the vapor deposition source. The work holding mechanism has a lens, which is a vapor deposition object, mounted on the vapor deposition source with the vapor deposition surface facing the vapor deposition source. Is done.

When a metal film is to be formed into a film, when the spherical dome in the vacuum vapor deposition tank is driven to rotate via the motor gear mechanism, the work holding mechanism is rotated in conjunction with it and attached to the work holding mechanism. The deposited surface of the deposited object is rotated in a state of facing the deposition source, and a deposited thin film that is a metal film is formed on the deposited surface of the deposited object.
JP-A-7-138756

  However, in the optical member on which the metal film is formed, the rod-shaped optical member is cut, ground and polished to form an optical member, and a plurality of the optical members are stacked to form a thin film stack. Since a metal film is formed on a plurality of optical members and attached to a heavy apparatus, the outer diameters of the plurality of optical members are slightly different within the dimensional tolerance, so that all the plurality of optical members are thinned. It is difficult to mount the stacking device in parallel to the stacking device, and the mounting adjustment work is very troublesome, and the metal coating may protrude onto the optical surface.

  In addition, such a situation becomes a serious problem because the processing accuracy when cutting, grinding, and polishing the optical member from the rod-shaped optical member is lowered particularly when processing a minute optical member. ing.

  The present invention has been made in view of the above circumstances, and has realized a simple and easy processing, and an optical member processing apparatus capable of easily forming a high-quality metal film and its An object is to provide a processing method.

  According to the present invention, a film forming means for forming a metal film on the outer periphery of a rod-shaped optical member that has undergone a cleaning process, and a plurality of rod-shaped optical members having the metal film formed thereon are arranged in parallel and cut. An optical member processing apparatus comprising: a cutting means for forming a plurality of optical pieces; and a grinding / polishing means for grinding and polishing the plurality of optical pieces formed by cutting with the cutting means to form an optical member. Configured.

  According to the above configuration, the optical film on which the metal film is formed by forming the metal film on the rod-shaped optical member, cutting, grinding and polishing the rod-shaped optical member on which the metal film is formed. By forming the member, the outer diameter processing of the optical member is reduced, and the handleability can be improved when forming the metal film.

  Accordingly, it is possible to simplify the cutting, grinding and polishing processing, and to easily form a high-quality metal film.

  In this invention, the rod-shaped optical member is subjected to a cleaning process to form a metal film, and the rod-shaped optical member formed with the metal film is cut, ground, and polished to form an optical member. The processing method of the optical member was comprised including the processing step.

  According to the above configuration, the metal film is formed on the rod-shaped optical member in the metal film forming step, and the rod-shaped optical member on which the metal film is formed is cut, ground and polished in the processing step. By forming the optical member with the metal coating film formed thereon, the outer diameter processing of the optical member is reduced, and the handleability can be improved when forming the metal coating film.

  Accordingly, it is possible to simplify the cutting, grinding and polishing processing, and to easily form a high-quality metal film.

  According to the present invention, it is possible to provide an optical member processing apparatus and a processing method thereof capable of easily forming a high-quality metal film while realizing simple and easy processing.

  Hereinafter, an optical member processing apparatus and a processing method thereof according to embodiments of the present invention will be described in detail with reference to the drawings.

  In one embodiment of the present invention, first, in the film forming step, a rod-shaped optical member 10 that has been centered and cleaned in a desired shape, for example, the cylindrical shape shown in FIG. As shown in FIG. 12, a metal film 11 is formed on the outer peripheral surface of the film. Next, in the processing step, the rod-shaped optical member 10 on which the metal film 11 is formed is cut into a predetermined width by a cutting means, followed by grinding / polishing processing by a grinding / polishing means, The optical member 1 (refer FIG. 3) which formed the metal film 11 in the outer peripheral surface except the optical surface 1a is formed by performing a washing process.

  That is, the coating film forming means is provided with a vapor deposition source 8 in a vacuum vapor deposition tank 9 as shown in FIG. 4, for example, and a spherical dome 7 is rotatably disposed opposite to the vapor deposition source 8. The spherical dome is engaged with a gear drive mechanism 6 in which gears 6a and 6b are gear-coupled so as to be able to transmit rotational force. When the rotational force is transmitted via the motor 5, the gear drive mechanism 6 The spherical dome 7 is rotated against the vapor deposition source 8.

  The spherical dome 7 is provided with a plurality of work holding mechanisms 4 disposed to face the vapor deposition source 8 with a predetermined interval. In this work holding mechanism 4, a frame body 41 is arranged on the spherical dome 7 as shown in FIG. 5, and a pair of clamping members 42 and 43 that clamp the rod-shaped optical member 10 are contacted and separated to the frame body 41. They are freely arranged opposite to each other.

  The pair of sandwiching members 42 and 43 has a proximal end portion of one sandwiching member 42 supported rotatably on the spherical dome 7 via a bearing 44, and a proximal end portion of the other sandwiching member 43 is a rotating shaft portion 45. It is inserted so as to be freely movable in the axial direction with respect to an insertion recess 451 provided at one end of the. A spring member 46 is engaged between the one end portion of the rotating shaft portion 45 and the other holding member 43 so as to apply a biasing force to the other holding member 43 in one direction. Thus, when the rod-like optical member 10 is clamped against the biasing force of the spring member 46 between the pair of clamping members 42 and 43, the rod holding member 4 is biased by the biasing force of the spring member 46. The optical member 10 is positioned and held facing the vapor deposition source 8.

  An intermediate portion of the rotation shaft portion 45 is rotatably supported by the frame body 41 via a bearing 44, and a drive gear 47 is fitted to the other end portion. The drive gear 47 is engaged with a gear 9 a that is rotatably arranged in the vacuum vapor deposition tank 9. When the spherical dome 7 is rotationally driven via the motor 5 and the gear drive mechanism 6, the drive gear 47 is driven. Is driven to rotate, and the pair of clamping members 42 and 43 are driven to rotate.

  As a result, the rod-shaped optical member 10 held in a state where the biasing force of the spring member 46 is applied between the pair of holding members 42 and 43 is rotationally driven to face the vapor deposition source 8 and vapor deposition is performed on the outer peripheral surface thereof. A vapor deposition material from the source 8 is deposited to form a metal film 11.

  In the processing step, the rod-shaped optical member 10 on which the metal coating 11 is formed is first alternately arranged in such a manner that a plurality of the rod-shaped optical members 10 are sandwiched between fixing glass yarns 21 on a pedestal glass yarn 20 as shown in FIG. These are positioned and arranged on the pedestal glass goat 20 by bonding and fixing them to the pedestal glass goat 20 with the thermoplastic adhesive 22. At this time, the rod-shaped optical member 10 and the glass goat 21 are positioned with a squareness and parallelism with respect to the pedestal glass goat 20 using the positioning goats 23.

  Next, the pedestal glass yatoy 20 is positioned and attached using a positioning pin 25 on a metal pedestal 24 constituting cutting means as shown in FIG. 7, and a cutting grindstone 26 is used as shown in FIG. The optical piece 101 is formed by cutting the rod-shaped optical member 10 arranged side by side on the base 24 into a predetermined width.

  Then, as shown in FIG. 9, a plurality of optical pieces 101 are placed on the grinding / polishing holding plate 27 constituting the grinding / polishing means with the surface on which the metal coating 11 is not formed facing upward. The thermoplastic adhesive 22 (see FIG. 10 and FIG. 9 is not shown for convenience of illustration) in a state where a plurality of rows are placed with a predetermined interval and the rows are sandwiched by the fixing glass yatoi 21. ). Here, in the optical piece 101, the surface on which the metal film 11 is not formed is polished by surface grinding using a grinding / polishing machine (not shown) and processed into a desired shape (see FIG. 3). ) Is formed. Thereafter, the optical member 1 having the metal film 11 formed on the outer peripheral surface is peeled off from the grinding / polishing holding plate 27 and cleaned, and the processing is completed.

  The pedestal glass goat 20 and the fixing glass goat 21 are made of a material such as a white plate or a blue plate that can be cut by being cut during processing.

  As described above, the processing apparatus for the optical member forms the metal film 11 on the rod-shaped optical member 10 that has been subjected to centering and cleaned, and the rod on which the metal film 11 is formed. The optical member 1 having the metal film 11 formed thereon is formed by cutting, grinding, and polishing the shaped optical member 10.

  According to this, the outer diameter processing of the optical member 1 having a small diameter as in the prior art is reduced, and the handling property at the time of forming the metal film can be improved, thereby simplifying the cutting, grinding and polishing processing. In addition, it is possible to easily form a high-quality metal film.

  Specifically, after the rod-shaped optical member 10 is cut, ground and polished, the outer diameter processing of the minute optical member 1 is eliminated, so that the workability can be reduced and a rapid processing can be realized. Is done.

  In addition, since the rod-shaped optical member 10 is subjected to the film forming process of the metal coating 11, it is possible to easily attach and mount the workpiece to the workpiece forming mechanism 4 for forming the coating. In addition, it is possible to improve the handleability of the metal film 11 and to prevent the metal film 11 from being attached to the optical surface 101 by performing cutting, grinding and polishing after the film forming process. In addition, a high-quality film forming process for the metal coating 11 can be reliably realized.

  In the above embodiment, a case has been described where the disk-shaped optical member 1 is processed and formed from the columnar rod-shaped optical member 10. However, the present invention is not limited to this, and other configurations are illustrated in FIGS. The procedure shown in FIG. 17 can be applied to the formation of the D-shaped optical member 2 as shown in FIG. 18, and the same effect is expected. However, in the description of FIGS. 10 to 17, the same parts as those in FIGS. 1 to 9 are denoted by the same reference numerals, and detailed description thereof is omitted.

  In this embodiment, as shown in FIG. 10, the plurality of centered rod-shaped optical members 10 are juxtaposed in a state where they are sandwiched by a fixing glass yato 21 on a grinding / polishing holding plate 27 and heated. The flat portion 10a is formed in the axial direction of each outer peripheral surface using a processing apparatus (not shown) by bonding and fixing with the plastic adhesive 22 (see FIG. 11). Thereafter, the rod-shaped optical member 10 is subjected to a cleaning process by removing the adhesion, thereby forming the rod-shaped optical member 10 having the flat surface portion 10a. Here, this rod-shaped optical member 10 is attached to the work holding mechanism 4 shown in FIG. 12 which constitutes the same film forming means as in the above embodiment, and the metal film 11 is formed on the outer peripheral surface thereof ( (See FIG. 13).

  Next, in the processing step, the rod-shaped optical member 10 having the flat surface portion 10a on which the metal coating 11 is formed is first processed into a plurality of flat surface portions 10a as shown in FIG. They are alternately arranged in parallel in a state of being sandwiched by fixing glass goats 21 on 20, and these are bonded and fixed to the glass goat 20 for pedestal with the thermoplastic adhesive 22, so that they are positioned and arranged on the pedestal glass goat 20. At this time, the rod-shaped optical member 10 and the fixing glass goat 21 are positioned with a squareness and parallelism with respect to the pedestal glass goat 20 using the positioning goats 25.

  Next, the pedestal glass yatoy 20 is positioned and attached using a positioning pin 25 on a metal pedestal 24 constituting cutting means as shown in FIG. 15, and a cutting grindstone 26 as shown in FIG. The rod-shaped optical member 10 arranged side by side on the pedestal 24 is cut into a predetermined width to form a D-shaped optical piece 101a.

  Then, as shown in FIG. 17, a plurality of optical pieces 101a are placed on the grinding / polishing holding plate 27 constituting the grinding / polishing means with the surface on which the metal coating 11 is not formed facing upward. The thermoplastic adhesive 22 (see FIG. 10 and FIG. 17 is not shown for convenience of illustration) in a state where a plurality of rows are placed with a predetermined interval and the rows are sandwiched between the fixing glass yarns 21. Are fixed using adhesive.

  Here, the optical piece 101a is obtained by polishing the surface on which the metal film 11 is not formed by surface grinding using a grinding / polishing machine (not shown), and having the D-shaped optical surface 2a. Is formed. Thereafter, the D-type optical member 2 having the metal film 11 formed on the outer peripheral surface is peeled off from the grinding / polishing holding plate 27 and cleaned, and the processing is completed.

  According to this embodiment, since the optical member 2 has a D shape, it is possible to easily and easily attach and arrange each processing apparatus at the time of cutting, grinding and polishing, thereby improving handling operability. Can be realized.

  In the above-described embodiment, the case where the present invention is applied to the disk-shaped optical member 1 and the D-shaped optical member 2 has been described. However, the present invention is not limited to this, and the crescent cross-sectional shape, oval shape, polyhedral shape, etc. The present invention can be applied to the processing of optical members having various cross-sectional shapes, and the same effect is expected in any case.

  Further, in the above-described embodiment, the case where the metal film 11 is formed using the vacuum deposition structure as the film forming means is described. However, the present invention is not limited to this structure, and other film forming methods are adopted. It is possible and the same effect is expected.

  Therefore, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention in the implementation stage. Further, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements.

  For example, even if some constituent requirements are deleted from all the constituent requirements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and the effect described in the effect of the invention can be obtained. In such a case, a configuration in which this configuration requirement is deleted can be extracted as an invention.

  In addition, according to the above-described embodiment, the present invention can also obtain the following configuration.

(Appendix 1)
A film forming means for forming a metal film on the outer periphery of the rod-shaped optical member that has been centered and cleaned;
A cutting means for arranging a plurality of rod-shaped optical members on which the metal film is formed side by side and cutting to form a plurality of optical pieces;
Grinding / polishing a plurality of optical pieces formed by cutting with the cutting means to form an optical member;
An apparatus for processing an optical member, comprising:

(Appendix 2)
The apparatus for processing an optical member according to appendix 1, wherein the rod-shaped optical member is centered before forming a metal film.

(Appendix 3)
3. The optical member processing apparatus according to appendix 1 or 2, wherein the rod-shaped optical member is subjected to outer diameter processing into a D-shaped cross section, and then the metal coating is formed.

(Appendix 4)
A film forming step of performing a cleaning process on the centered rod-shaped optical member and forming a metal film;
A processing step of forming an optical member by cutting, grinding, and polishing the rod-shaped optical member on which the metal film is formed, and
The processing method of the optical member characterized by comprising.

(Appendix 5)
The apparatus for processing an optical member according to appendix 4, wherein the rod-shaped optical member is centered before forming a metal film.

(Appendix 6)
6. The optical member processing apparatus according to appendix 4 or 5, wherein the rod-shaped optical member is processed to have an outer diameter in a D-shaped cross section, and then the metal film is formed.

It is the perspective view which showed the external appearance of the rod-shaped optical member used for the processing apparatus of the optical member which concerns on one embodiment of this invention, and its processing method. It is the perspective view which showed the state which formed the metal film into the rod-shaped optical member of FIG. It is the perspective view which showed the optical member processed and molded by the processing apparatus of the optical member which concerns on one embodiment of this invention, and its processing method. It is the block diagram which took out and showed the film formation means which forms a metal film in the rod-shaped optical member of FIG. It is sectional drawing which expanded and showed the workpiece | work holding mechanism of FIG. It is the figure which showed the pre-processing for cut-processing the rod-shaped optical member which formed the metal film of FIG. It is the figure which showed the state which attached to the metal pedestal of the cutting | disconnection means the glass goat for pedestals which clamped and arranged the rod-shaped optical member in FIG. It is the figure which showed the state which has cut | disconnected the rod-shaped optical member with which the metal base of FIG. 7 was mounted | worn with the cutting | disconnection means. It is the figure which showed the state which grinds and polishes the optical piece formed by cut | disconnecting a rod-shaped optical member in FIG. It is the figure which showed the planar processing means which processes a plane part to the rod-shaped optical member by the processing apparatus of the optical member which concerns on other embodiment of this invention, and its processing method. It is the perspective view which showed the rod-shaped optical member which gave the plane process in FIG. do it It is sectional drawing which took out and showed the workpiece | work holding | maintenance mechanism of the film formation means which forms a metal film in the rod-shaped optical member of the processing apparatus of the optical member which concerns on other embodiment of this invention, and its processing method. It is the perspective view which showed the state which formed the metal film into the rod-shaped optical member with the film formation means of FIG. It is the figure which showed the pre-processing for cut | disconnecting the rod-shaped optical member which formed the metal film in FIG. It is the figure which showed the state which attached to the metal pedestal of the cutting | disconnection means the glass yato for pedestals which clamped and arrange | positioned the rod-shaped optical member in FIG. It is the figure which showed the state which has cut | disconnected the rod-shaped optical member with which the metal base of FIG. 15 was mounted | worn with the cutting | disconnection means. It is the figure which showed the state which grinds and polishes the optical piece formed by cut | disconnecting a rod-shaped optical member in FIG. FIG. 18 is a perspective view showing a D-shaped optical member formed by grinding and polishing in FIG. 17.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,2 ... Optical member, 1a, 2a ... Optical surface, 4 ... Work holding | maintenance mechanism, 41 ... Frame, 42, 43 ... Holding member, 44 ... Bearing, 45 ... Rotating shaft part, 451 ... Insertion recessed part, 46 ... Spring member, 47 ... drive gear, 5 ... motor, 6 ... gear drive mechanism, 6a, 6b ... gear, 7 ... spherical dome, 8 ... vapor deposition source, 9 ... vacuum deposition tank, 10 ... rod-shaped optical member, 101, 101a DESCRIPTION OF SYMBOLS ... Optical piece, 10a ... Plane part, 11 ... Metal coating, 20 ... Glass goat for base, 21 ... Glass goat for fixing, 22 ... Thermoplastic adhesive, 23 ... Positioning goat, 24 ... Metal base, 25 ... Positioning pin, 26 ... Cutting wheel, 27 ... grinding / polishing holding plate.

Claims (6)

A film forming means for forming a metal film on the outer periphery of the rod-shaped optical member subjected to the cleaning treatment;
A cutting means for arranging a plurality of rod-shaped optical members on which the metal film is formed side by side and cutting to form a plurality of optical pieces;
Grinding / polishing a plurality of optical pieces formed by cutting with the cutting means to form an optical member;
An apparatus for processing an optical member, comprising:   2. The optical member processing apparatus according to claim 1, wherein the rod-shaped optical member is centered before forming a metal film.   The optical member processing apparatus according to claim 1 or 2, wherein the rod-shaped optical member is formed with the metal film after the outer diameter is processed into a D-shaped cross section. A film forming step of performing a cleaning process on the rod-shaped optical member and forming a metal film;
A processing step of forming an optical member by cutting, grinding, and polishing the rod-shaped optical member on which the metal film is formed, and
The processing method of the optical member characterized by comprising.   5. The optical member processing apparatus according to claim 4, wherein the rod-shaped optical member is centered before forming a metal film.   6. The processing apparatus for an optical member according to claim 4, wherein the rod-shaped optical member has an outer diameter processed into a D-shaped cross section, and then the metal film is formed.

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