JP2006307255A5 - - Google Patents

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Publication number
JP2006307255A5
JP2006307255A5 JP2005128931A JP2005128931A JP2006307255A5 JP 2006307255 A5 JP2006307255 A5 JP 2006307255A5 JP 2005128931 A JP2005128931 A JP 2005128931A JP 2005128931 A JP2005128931 A JP 2005128931A JP 2006307255 A5 JP2006307255 A5 JP 2006307255A5
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JP
Japan
Prior art keywords
processing chamber
supplying
processing
microwave
rust
Prior art date
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Granted
Application number
JP2005128931A
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English (en)
Japanese (ja)
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JP2006307255A (ja
JP4702680B2 (ja
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Priority to JP2005128931A priority Critical patent/JP4702680B2/ja
Priority claimed from JP2005128931A external-priority patent/JP4702680B2/ja
Publication of JP2006307255A publication Critical patent/JP2006307255A/ja
Publication of JP2006307255A5 publication Critical patent/JP2006307255A5/ja
Application granted granted Critical
Publication of JP4702680B2 publication Critical patent/JP4702680B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2005128931A 2005-04-27 2005-04-27 マイクロ波を利用した処理装置 Active JP4702680B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005128931A JP4702680B2 (ja) 2005-04-27 2005-04-27 マイクロ波を利用した処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005128931A JP4702680B2 (ja) 2005-04-27 2005-04-27 マイクロ波を利用した処理装置

Publications (3)

Publication Number Publication Date
JP2006307255A JP2006307255A (ja) 2006-11-09
JP2006307255A5 true JP2006307255A5 (xx) 2008-05-29
JP4702680B2 JP4702680B2 (ja) 2011-06-15

Family

ID=37474473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005128931A Active JP4702680B2 (ja) 2005-04-27 2005-04-27 マイクロ波を利用した処理装置

Country Status (1)

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JP (1) JP4702680B2 (xx)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019230184A1 (ja) * 2018-05-29 2019-12-05 株式会社エスイー 原料をマイクロ波表面波プラズマで処理して原料と異なる生成物を得る製造装置及び製造方法
JP2021188092A (ja) 2020-05-29 2021-12-13 ウシオ電機株式会社 還元処理方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8827933D0 (en) * 1988-11-30 1989-01-05 Plessey Co Plc Improvements relating to soldering processes
JPH06226086A (ja) * 1993-01-28 1994-08-16 Daido Steel Co Ltd プラズマ処理装置
JPH06322163A (ja) * 1993-05-10 1994-11-22 Daido Steel Co Ltd 回転バレル式プラズマ処理装置
US5938854A (en) * 1993-05-28 1999-08-17 The University Of Tennessee Research Corporation Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
JP3213157B2 (ja) * 1994-02-17 2001-10-02 住友特殊金属株式会社 Ｆｅ−Ｂ−Ｒ系磁石素材の表面処理方法
US6079426A (en) * 1997-07-02 2000-06-27 Applied Materials, Inc. Method and apparatus for determining the endpoint in a plasma cleaning process
FR2775986B1 (fr) * 1998-03-10 2000-05-05 Air Liquide Procede et installation de traitement de surface d'une piece metallique

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