JP2006307255A5 - - Google Patents
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- JP2006307255A5 JP2006307255A5 JP2005128931A JP2005128931A JP2006307255A5 JP 2006307255 A5 JP2006307255 A5 JP 2006307255A5 JP 2005128931 A JP2005128931 A JP 2005128931A JP 2005128931 A JP2005128931 A JP 2005128931A JP 2006307255 A5 JP2006307255 A5 JP 2006307255A5
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- processing chamber
- supplying
- processing
- microwave
- rust
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Description
第２の発明として、被処理物を取出し自在に内装する処理室を備えると共に、前記処理室内を減圧する減圧手段、前記処理室内に少なくとも水素ガスを供給するガス供給手段、前記処理室内にマイクロ波電力を供給するマイクロ波供給手段からなるプラズマ発生手段を設け、プラズマ発生手段が発生する水素プラズマを被処理物に照射し、被処理物に付着している有機物をクリーニングする構成としたことを特徴とするマイクロ波を利用した錆落とし等の処理装置を提案する。
According to a second aspect of the present invention, there is provided a processing chamber in which an object to be processed is detachably provided, a decompression unit that decompresses the processing chamber, a gas supply unit that supplies at least hydrogen gas into the processing chamber, and a microwave in the processing chamber provided a plasma generating means comprising microwave supply means for supplying power, the plasma generating means hydrogen plasma generated by irradiating the object to be processed, and configured to clean the organic material adhering to the object to be processed We propose a processing device for rust removal, etc., using the characteristic microwave.
Claims (4)
前記処理室内を減圧する減圧手段、前記処理室内に少なくとも水素ガスを供給するガス供給手段、前記処理室内にマイクロ波電力を供給するマイクロ波供給手段からなるプラズマ発生手段を設け、
プラズマ発生手段が発生する水素プラズマを被処理物に照射し、被処理物の錆を還元する構成としたことを特徴とするマイクロ波を利用した錆落とし等の処理装置。 In addition to having a processing chamber that allows the workpiece to be removed,
A pressure reducing means for reducing the pressure in the processing chamber, a gas supplying means for supplying at least hydrogen gas into the processing chamber, and a plasma generating means comprising a microwave supplying means for supplying microwave power into the processing chamber,
A processing apparatus for removing rust and the like using microwaves, characterized in that the processing object is irradiated with hydrogen plasma generated by plasma generating means to reduce rust of the processing object.
前記処理室内を減圧する減圧手段、前記処理室内に少なくとも水素ガスを供給するガス供給手段、前記処理室内にマイクロ波電力を供給するマイクロ波供給手段からなるプラズマ発生手段を設け、
プラズマ発生手段が発生する水素プラズマを被処理物に照射し、被処理物に付着している有機物をクリーニングする構成としたことを特徴とするマイクロ波を利用した錆落とし等の処理装置。 In addition to having a processing chamber that allows the workpiece to be removed,
A pressure reducing means for reducing the pressure in the processing chamber, a gas supplying means for supplying at least hydrogen gas into the processing chamber, and a plasma generating means comprising a microwave supplying means for supplying microwave power into the processing chamber,
Hydrogen plasma plasma generating means generates and irradiates the object to be processed, the processing apparatus such as a dropped rust using microwaves, characterized in that a configuration in which clean the organic material adhering to the object to be processed.
前記処理室には開閉可能なドアを設け、ドアの閉成状態で前記減圧手段、ガス供給手段、マイクロ波供給手段を動作可能に移行させるコントローラを備えたことを特徴とするマイクロ波を利用した錆落とし等の処理装置。 In the processing apparatus described in claim 1 or 2,
The processing chamber is provided with an openable / closable door, and a microwave is used, which includes a controller that operably shifts the decompression means, the gas supply means, and the microwave supply means when the door is closed. Processing equipment such as rust removal.
被処理物を収納させる籠状体と、この籠状体を処理室内で回転させる駆動機構とを設け、
籠状体を回転させながら被処理物の錆及び／又は有機物を還元する構成としたことを特徴とするマイクロ波を利用した錆落とし等の処理装置。 In the processing apparatus according to claim 1 or 2,
Provided with a bowl-shaped body for storing the workpiece and a drive mechanism for rotating the bowl-shaped body in the processing chamber;
A processing apparatus for removing rust and the like using microwaves, which is configured to reduce rust and / or organic matter of an object to be processed while rotating a rod-like body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005128931A JP4702680B2 (en) | 2005-04-27 | 2005-04-27 | Processing equipment using microwaves |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005128931A JP4702680B2 (en) | 2005-04-27 | 2005-04-27 | Processing equipment using microwaves |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006307255A JP2006307255A (en) | 2006-11-09 |
| JP2006307255A5 true JP2006307255A5 (en) | 2008-05-29 |
| JP4702680B2 JP4702680B2 (en) | 2011-06-15 |
Family
ID=37474473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005128931A Active JP4702680B2 (en) | 2005-04-27 | 2005-04-27 | Processing equipment using microwaves |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4702680B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019230184A1 (en) * | 2018-05-29 | 2019-12-05 | 株式会社エスイー | Manufacturing apparatus and manufacturing method for treating raw material with microwave surface wave plasma and obtaining product different from raw material |
| JP2021188092A (en) | 2020-05-29 | 2021-12-13 | ウシオ電機株式会社 | Reduction treatment method |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8827933D0 (en) * | 1988-11-30 | 1989-01-05 | Plessey Co Plc | Improvements relating to soldering processes |
| JPH06226086A (en) * | 1993-01-28 | 1994-08-16 | Daido Steel Co Ltd | Plasma treating device |
| JPH06322163A (en) * | 1993-05-10 | 1994-11-22 | Daido Steel Co Ltd | Rotary barrel type plasma treating device |
| US5938854A (en) * | 1993-05-28 | 1999-08-17 | The University Of Tennessee Research Corporation | Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure |
| JP3213157B2 (en) * | 1994-02-17 | 2001-10-02 | 住友特殊金属株式会社 | Surface treatment method for Fe-BR-based magnet material |
| US6079426A (en) * | 1997-07-02 | 2000-06-27 | Applied Materials, Inc. | Method and apparatus for determining the endpoint in a plasma cleaning process |
| FR2775986B1 (en) * | 1998-03-10 | 2000-05-05 | Air Liquide | PROCESS AND INSTALLATION FOR SURFACE TREATMENT OF A METAL PART |
-
2005
- 2005-04-27 JP JP2005128931A patent/JP4702680B2/en active Active
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