JP2006292503A - Method and device for flaw inspection - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for flaw inspection of a long body which enables a reduction in the load of a processing part for executing respective processings in the inspection of a flaw, and also to provide a device for flaw inspection. <P>SOLUTION: The flaw of an inspection target 1 is detected on the basis of the image data obtained by imaging the inspection target 1 in an imaging part 4 in an image processing circuit 5. The edge position of the inspection target 1 positioned in the width direction with respect to an imaging region is detected in an edge detection part 7 and the shift quantity of the detected edge position with a reference edge position, that is, meandering quantity is calculated in a meandering quantity calculating circuit 8. When the flaw of the inspection target 1 is detected in the image processing circuit 5, the coordinates based on the reference edge position are calculated with respect to the detected flaw in a flaw coordinates calculating circuit 6. A coordinates correcting circuit 9 corrects the calculated coordinates on the basis of the meandering quantity to output the corrected coordinates. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a defect inspection method and a defect inspection apparatus suitable for detecting a defect of a long body and obtaining a position coordinate of the defect. The long body is a long sheet-like film made of paper, resin, metal, or the like, or a film in which a resin or the like is applied and formed on the surface using this film as a support. An object that is very long compared to the length in the direction (width direction) orthogonal to.

  When manufacturing the long body as described above, it is necessary to inspect whether there is a defect while manufacturing the long body, or to check whether there is a defect after manufacturing the long body. There is. Defect inspection is performed by imaging a long body with an imaging device while continuously moving the long body in the longitudinal direction, performing image processing on the obtained image data, and determining the presence or absence of a defect based on the result If there is a defect, the position coordinates of the defect are obtained. The position coordinates of the defect are represented by the coordinates in the longitudinal direction from the inspection start position of the long body and the coordinates in the width direction from the end in the width direction of the long body.

  In the inspection of the long body as described above, so-called meandering is likely to occur in the width direction during traveling in the longitudinal direction. If the inspection is continued with the meandering being left unattended, an error occurs in the obtained position coordinates of the defect, and the exact position of the defect cannot be grasped.

  For example, Patent Document 1 discloses a defect inspection apparatus capable of performing an accurate inspection even when meandering occurs in a long body being conveyed. The defect inspection apparatus described in Patent Document 1 includes an image data input unit that converts density information for each pixel obtained by imaging a sheet-like inspection object into digital image data, and inputs the input image. Density integration means for adding density information of each pixel in the data in units of a plurality of imaging lines to obtain a density addition value, edge detection means for detecting the edge position of the inspection object from the obtained density addition value, and detection A deviation amount calculating means for obtaining a deviation amount between the detected edge position and a reference edge position previously detected without meandering, and a window correcting means for correcting the position of the inspection window based on the obtained deviation amount. Configured.

In the above apparatus, the amount of deviation between the edge position detected for each of the plurality of imaging lines and the reference position without meandering is calculated, and the inspection window position is corrected based on this amount of deviation. Therefore, the position of the inspection object that fluctuates in real time can be accurately followed, and the defect position can be accurately detected.
JP-A-8-145908

  In the apparatus described in Patent Document 1, since the inspection window position is always corrected based on the detected amount of deviation, the burden on a processing unit such as a microcomputer that executes each process in the inspection is increased. There is a problem that other processes are affected.

  The objective of this invention is providing the defect inspection method and defect inspection apparatus which can reduce the burden of the process part which performs each process in a defect inspection.

The invention according to claim 1 is a defect inspection method for detecting a defect of a long body continuously running in a longitudinal direction.
A defect inspection method characterized in that a meandering amount in the width direction of a long body at a defect detection site is obtained, and a coordinate in a lengthwise direction of a detected defect is corrected according to the meandering amount and output.

According to a third aspect of the present invention, there is provided a defect detection means for detecting a defect of a long body,
Meandering amount calculating means for calculating the amount of meandering in the width direction of the long body;
Based on the detection result of the defect detection means, defect coordinate calculation means for calculating defect coordinates when the amount of meandering of the elongated body is 0,
A defect inspection apparatus comprising: a coordinate correction unit that corrects and outputs the defect coordinates calculated by the defect coordinate calculation unit based on the meandering amount calculated by the meandering amount calculation unit.

  According to the present invention, only when a defect in the long body is detected, the calculated defect coordinates are corrected based on the meandering amount of the long body and the corrected coordinates are output. Since the coordinates are corrected only when a defect is detected in this way, the processing unit that executes each process in the defect inspection is compared with the case where the correction process is always performed based on the meandering amount obtained as in the prior art. The burden can be reduced. As a result, the influence on processes other than the correction process can be reduced, and defect detection can be performed quickly and accurately.

The invention according to claim 2 is characterized in that the meandering amount of the long body is obtained by detecting the edge position of the long body.
The invention according to claim 4 is characterized in that the meandering amount calculating means calculates the meandering amount in the width direction of the long body by detecting the edge position of the long body.

  According to the present invention, since the edge of the elongated body is used as a reference when calculating the meandering amount, it is not necessary to separately provide a reference index on the elongated body, so that the meandering amount is easily calculated. be able to.

  According to a fifth aspect of the present invention, the meandering amount calculation means includes an imaging unit that images a long body and outputs image data, and an image processing unit that detects an edge position of the long body based on the image data. It is characterized by having.

  According to the present invention, a long body is imaged by an imaging unit such as a line sensor camera, and an edge is detected based on, for example, density information of the obtained image data to calculate a meandering amount. Thus, for example, the meandering amount can be obtained with a simple configuration as compared with the case where the meandering amount of the edge is calculated using laser light or ultrasonic waves.

  The invention according to claim 6 is characterized in that the image processing unit is configured to detect a defect of a long body based on the image data, and the defect detection unit is also used as the meandering amount calculation unit. Yes.

  According to the present invention, since the edge position and the defect are detected based on the image data obtained by imaging with the imaging unit, it is not necessary to separately provide the meandering amount calculation unit and the defect detection unit, The configuration can be simplified.

According to a seventh aspect of the present invention, the imaging unit includes a line sensor in which a plurality of line sensor cameras for imaging a part of the long body are arranged at a predetermined interval along the width direction of the long body. A plurality of rows of camera rows are arranged at regular intervals along the longitudinal direction of the elongated body, and configured to image the entire width direction of the elongated body,
The image processing unit is configured by a plurality of edge detection units that detect edge positions positioned in the width direction of the elongated body with respect to the imaging part of the line sensor camera row for each line sensor camera row. It is said.

  When using a high-definition line sensor camera, due to restrictions on the installation space of the line sensor camera itself, a line sensor comprising a plurality of line sensor cameras arranged at regular intervals along the width direction of the long body A plurality of camera rows are arranged at regular intervals along the longitudinal direction of the long body. In the present invention, the meandering amount of the edge with respect to the imaging region of each line sensor camera row is calculated. When a defect is detected, the coordinates of the defect are corrected based on the meandering amount of the edge located in the width direction of the imaging region of the line sensor camera row to which the detected defect corresponds. Thereby, even when there is a difference in the meandering amount of the edge corresponding to the imaging part of each line sensor camera row, the coordinates of the defect can be obtained with high accuracy.

  According to the first or third aspect of the invention, only when the defect of the elongated body is detected, the coordinates of the detected defect are obtained, and the obtained coordinates are corrected based on the amount of meandering, thereby correcting the coordinates. Is output. Since the coordinates are corrected only when a defect is detected in this way, the processing unit that executes each process in the defect inspection is compared with the case where the correction process is always performed based on the meandering amount obtained as in the prior art. The burden can be reduced. As a result, the influence on processes other than the correction process can be reduced, and defect detection can be performed quickly and accurately.

  Further, according to the invention according to claim 2 or 4, since the edge of the elongated body is used as a reference when calculating the meandering amount, it is not necessary to separately provide a reference index on the elongated body. The amount of meandering can be easily calculated.

  According to the fifth aspect of the present invention, since the long body is imaged by an imaging unit such as a line sensor camera, the meandering amount is calculated by detecting the edge based on, for example, density information of the obtained image data. For example, the meandering amount can be obtained with a simple configuration as compared with the case where the meandering amount of the edge is calculated using laser light or ultrasonic waves.

  According to the invention of claim 6, since the edge position and the defect are detected based on the image data obtained by imaging with the imaging unit, the meandering amount calculation means and the defect detection means are separately provided. There is no need to provide it, and the configuration can be simplified.

  According to the seventh aspect of the present invention, the meandering amounts of the edges in the imaging regions of the plurality of line sensor camera rows are respectively calculated, and when a defect is detected, the coordinates of the defect correspond to the detected defect. Since correction is performed based on the meandering amount of the edge corresponding to the imaging part of the line sensor camera row, even if there is a difference in the meandering amount of the edge in the imaging part of each line sensor camera row, the coordinates of the defect are obtained with high accuracy. Can do.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a block diagram showing a schematic configuration of a defect inspection apparatus according to the first embodiment of the present invention. The defect inspection apparatus is an apparatus that inspects a defect of the inspection object 1 that is a long body continuously running in the longitudinal direction. The inspection object 1 is formed by applying a film 2 made of a resin or the like to the surface of a long sheet-like base material 3, and the defect inspection apparatus is an apparatus that detects the coordinates of defects of the film 2. Defects are foreign matter, craters (dents), scratches, etc. attached to the surface. The speed of continuous running of the long body is not particularly limited, but when an adhesive is applied as the film 2, it is generally about 0.1 m / min to 30 m / min.

The defect inspection apparatus includes an imaging unit 4, an image processing circuit 5, a defect coordinate calculation circuit 6, an edge detection unit 7, a meandering amount calculation circuit 8, and a coordinate correction circuit 9.
The imaging unit 4 is composed of a line sensor camera in which a plurality of pixels are arranged in a line. The inspection width of the inspection object 1 is set to a value equal to or larger than the sum of the necessary inspection width and the maximum meandering amount at the inspection position. The imaging range by the imaging unit 4 is set to a range in which the inspection width can be imaged along the width direction of the film 2. The imaging unit 4 outputs image data for each pixel obtained by imaging to the image processing circuit 5. In addition, it is preferable to make the meandering of the inspection object 1 as small as possible by using a meandering correction device or the like.

  The image processing circuit 5 converts image data for each pixel into gradation data, and detects the presence or absence of a defect based on the gradation data. Specifically, when the gradation data of a pixel is greater than or equal to a predetermined threshold value, the pixel is determined to be defective. The imaging unit 4 and the image processing circuit 5 correspond to defect detection means. A defect coordinate calculation circuit 6 that is a defect coordinate calculation means calculates a coordinate for the detected defect with the reference edge position of the inspection object 1 as the origin and outputs it to the coordinate correction circuit 9.

  The edge detection unit 7 includes a line sensor camera and an image processing unit. The imaging range of the line sensor camera is set to a predetermined range including the reference edge position. The predetermined range is set to a range in which the maximum meandering amount of the inspection object 1 is included. The line sensor camera outputs image data for each pixel obtained by imaging to the image processing unit. The image processing unit converts the image data into gradation data for each pixel, and detects an edge position based on the gradation data. Specifically, when the difference in gradation data between adjacent pixels is equal to or greater than a predetermined threshold, the pixel is determined as an edge. The meandering amount calculation circuit 8 calculates a deviation amount between the detected edge position and the reference edge position, that is, a meandering amount, and outputs it to the coordinate correction circuit 9.

  The coordinate correction circuit 9 serving as coordinate correction means corrects the coordinates based on the meandering amount calculated by the meandering amount calculation circuit 8 when the coordinates of the defect are input from the defect coordinate calculation circuit 6. Is output. The image processing circuit 5, the defect coordinate calculation circuit 6, the meandering amount calculation circuit 8, and the coordinate correction circuit 9 are constituted by a microcomputer.

  FIG. 2 is a flowchart for explaining the procedure of the inspection process in the defect inspection apparatus. The inspection object 1 is conveyed at a constant speed in the longitudinal direction. In step a <b> 1, the imaging unit 4 images the inspection object 1 and outputs image data for each pixel of one line to the image processing circuit 5. In step a2, the image processing circuit 5 converts the image data for each pixel of one line into gradation data and stores it in the frame memory. The frame memory is built in the image processing circuit 5.

  In step a3, it is determined whether gradation data for one frame is stored in the frame memory. One frame is, for example, 4000 lines. The number of lines in one frame is determined according to the size of the defect and the management standard of the inspection object 1. If it is determined that gradation data for one frame is not stored, the process returns to step a1. If it is determined that gradation data for one frame has been stored, the process proceeds to step a4.

  In step a4, the meandering amount calculation circuit 8 calculates a deviation amount between the edge position detected by the edge detection unit 7 and the reference edge position, that is, a meandering amount. For example, as shown in FIG. 3, a case is assumed where the gradation data of the pixels A <b> 1 to A <b> 10 is given from the edge detection unit 7. Among the pixels A1 to A10, the reference edge position is the pixel A6, and the direction toward the inside of the inspection object 1 is defined as a positive direction, and the direction toward the outside of the inspection object 1 is defined as a negative direction. When the pixel A3 is detected as an edge position, the meandering amount is −3x, where x is the length of one pixel.

  In subsequent step a5, the image processing circuit 5 determines the presence or absence of a defect, and if there is a defect, the defect coordinate calculation circuit 6 calculates the coordinates of the defect. For example, as shown in FIG. 4, a case is assumed where the gradation data of the pixels B <b> 1 to Bn is given from the imaging unit 4. Among the pixels B1 to Bn, since the pixels B6 to Bn-5 have the inspection width W, the gradation data of the pixels B1 to B5 and Bn-4 to Bn are discarded and the gradations of the pixels within the inspection width W are discarded. Use the data. For example, when the gradation data of the pixels Bi-1, Bi, Bi + 1 is equal to or greater than a predetermined threshold value, it is determined that the pixels Bi-1, Bi, Bi + 1 are defective. Since the length of each pixel is predetermined, coordinates from the reference edge position are predetermined for each pixel. Therefore, coordinates Ki-1, Ki, Ki + 1 corresponding to the pixels Bi-1, Bi, Bi + 1 are output. Note that the coordinates here are coordinates that are not corrected by the meandering amount.

  In step a6, it is determined whether or not a defect has been detected. If it is determined that no defect has been detected, the process returns to step a1. If it is determined that a defect has been detected, the process proceeds to step a7.

  In step a7, the coordinate correction circuit 9 corrects the calculated coordinates of the defect based on the meandering amount. For example, when the meandering amount is -3x, the calculated coordinates Ki-1, Ki, Ki + 1 are corrected to calculate corrected coordinates (Ki-1) + 3x, Ki + 3x, (Ki + 1) + 3x. In step a8, the corrected coordinates are output, and then the process returns to step a1.

  FIG. 5 is a schematic diagram for explaining a process of manufacturing the film 2 by applying the defect inspection apparatus. The long sheet-like substrate 3 is conveyed between the unwinding portion 11 and the winding portion 17 while being guided by the guide rollers 12a and 12b. The material of the film 2 is applied to the surface of the substrate 3 by the application head 13 between the unwinding part 11 and the guide roller 12a. Thereafter, the applied material of the film 2 is dried by a drying means such as hot air blowing in the drying zone 14. After passing through the drying zone 14, the defect inspection device 15 is used to detect a defect in the film 2, and then the film is wound by the winding unit 17.

  The film 2 manufactured in this way is often shipped after being slit (cut) with a predetermined width in the longitudinal direction in the subsequent steps as shown in FIG. At this time, the slit portions 2a, 2b, and 2c having the defect 20 are excluded as defective products. In order to eliminate defective products, it is necessary to obtain accurate coordinates with respect to the defect with the edge as the origin.

According to the above embodiment, the following effects can be obtained.
(1) In the above embodiment, only when the defect of the inspection object 1 is detected, the calculated defect coordinates are corrected based on the meandering amount, and the corrected coordinates are output. Since the coordinates are corrected only when a defect is detected in this way, the processing unit that executes each process in the defect inspection as compared with the case where the correction process is always performed based on the meandering amount obtained as in the prior art. The burden on a certain microcomputer can be reduced. As a result, the influence on processes other than the correction process can be reduced, and defect detection can be performed quickly and accurately.

  (2) In the above embodiment, since the edge of the inspection object 1 is used as a reference for calculating the amount of meandering, it is not necessary to separately provide a reference index on the inspection object 1, and therefore it is easy to meander. The amount can be calculated.

  (3) In the above embodiment, the object 1 is imaged by the imaging unit 4 such as a line sensor camera, and the edge is detected based on, for example, density data obtained by converting the obtained image data, and the amount of meandering is determined. Since the calculation is performed, the meandering amount can be obtained with a simple configuration as compared with the case where the meandering amount of the edge is calculated using, for example, laser light or ultrasonic waves.

  (4) In the above embodiment, since the defect coordinates based on the edge of the inspection object 1 can be obtained with high accuracy, the reliability of quality control in the subsequent process is improved, and unnecessary re-inspection is performed. It can be omitted. That is, in the subsequent process, when the inspection object 1 is slit in the longitudinal direction to obtain a product having a predetermined width, if the exact position from the edge can be detected for the defect, it is possible to accurately determine which slit portion has the defect. Can be sought. Conversely, if the exact position from the edge cannot be detected for the defect, not only the slit portions 2a, 2b, 2c (see FIG. 6) where the defect exists, but also the adjacent slit portion according to the detection accuracy, and further adjacent to it. The number of processes for re-inspecting the slits to be confirmed and checking for the presence or absence of defects will increase. In this embodiment, such an increase in extra steps can be prevented.

In addition, you may change the said embodiment as follows.
-You may detect the amount of meandering of an edge using a laser beam or an ultrasonic wave. When using a laser beam, the edge of the inspection object is arranged between the laser beam output unit and the light receiving unit so that a part of the laser beam is shielded. When the edge moves and the position where the laser beam is blocked changes, the amount of light received by the light receiving unit changes, and the amount of meandering of the edge is detected based on this amount of change. Moreover, when using an ultrasonic wave, it arrange | positions so that the edge of a to-be-tested object may interrupt | block a part of ultrasonic wave between an ultrasonic output part and a detection part. When the edge moves and the position where the ultrasonic wave is blocked changes, the detection amount at the detection unit changes, and the meandering amount of the edge is detected based on this change amount.

  In the above embodiment, when the meandering amount in the width direction of the inspection object 1 is calculated, the deviation amount between the edge position of the inspection object 1 and the reference edge position is calculated as the meandering amount. A deviation amount between the index position formed on the surface of the inspection object 1 and the reference index position may be calculated as a meandering amount. Further, although the coordinates of the defect are calculated using the position of the edge of the inspection object 1 as the origin, for example, the position of the index formed on the surface of the inspection object 1 may be calculated as the origin.

  In the above-described embodiment, the case where the film 2 is inspected for defects is described while the film 2 is manufactured. However, the same applies to the case where the film 2 is inspected for defects after the film 2 is manufactured. be able to.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 7 is a block diagram showing a schematic configuration of the second embodiment. In the second embodiment, the edge position and the defect are detected based on the image data obtained by imaging with the imaging unit 4. That is, the imaging unit 4 is configured by a line sensor camera having a number of pixels that can capture an area including the edge and the inspection width of the inspection object 1.

  The image processing circuit 5 converts image data for each pixel into gradation data, and detects the presence or absence of a defect based on the gradation data. Specifically, when the gradation data of a pixel is greater than or equal to a predetermined threshold value, the pixel is determined to be defective. Further, the image processing circuit 5 detects the edge position based on the gradation data. Specifically, when the difference in gradation data between adjacent pixels is equal to or greater than a predetermined threshold, the pixel is determined as an edge. Note that the processing contents of the meandering amount calculation circuit 8, the defect coordinate calculation circuit 6, and the coordinate correction circuit 9 are the same as those in the first embodiment, and a description thereof will be omitted.

Therefore, according to the second embodiment, the following effects can be obtained in addition to the effects described in the first embodiment.
(1) In the second embodiment, since the edge position and the defect are detected based on the image data obtained by imaging with the imaging unit 4, the configuration for detecting the edge position and the defect are detected. Therefore, it is not necessary to provide a separate configuration for the configuration, and the configuration can be simplified.

(Third embodiment)
Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 8 is a block diagram showing a schematic configuration of the third embodiment. In the third embodiment, a line sensor camera array in which two line sensor cameras 4a, 4b; 4c, 4d corresponding to high-resolution inspection are arranged at regular intervals along the width direction of the inspection object 1, Two rows are arranged at regular intervals along the longitudinal direction of the inspection object 1, and the imaging unit is configured to image the entire width direction of the inspection object 1. Further, the edge position and the defect are detected based on the image data obtained by imaging with one line sensor camera 4a constituting the imaging unit. That is, the line sensor camera 4 a is configured by a line sensor camera having a number of pixels that can capture an area including the edge of the inspection object 1. When arranging a plurality of line sensor camera rows composed of a plurality of line sensor cameras, the maximum meandering amount of the inspected object 1 is the line sensor camera between the line sensor camera rows in order to eliminate uninspected regions. It is necessary to configure the conveyance mechanism of the inspection object 1 so that the imaging ranges of the inspection objects are equal to or less than the overlap width.

  The image processing circuit 5a converts image data for each pixel of the connected line sensor camera 4a into gradation data, and detects the presence or absence of a defect based on the gradation data. Specifically, when the gradation data of a pixel is greater than or equal to a predetermined threshold value, the pixel is determined to be defective. Further, the image processing circuit 5a detects the edge position based on the gradation data. Specifically, when the difference in gradation data between adjacent pixels is equal to or greater than a predetermined threshold, the pixel is determined as an edge. The other image processing circuits 5b, 5c, and 5d convert the image data for each pixel of the connected line sensor cameras 4b, 4c, and 4d into gradation data, and determine whether there is a defect based on the gradation data. To detect.

  The defect coordinate calculation circuit 6 calculates the coordinates of the defects detected by the image processing circuits 5 a to 5 d with the reference edge position of the inspection object 1 as the origin and outputs the coordinates to the coordinate correction circuit 9. The meandering amount calculation circuit 8 calculates a deviation amount between the edge position detected by the image processing circuit 5 a and the reference edge position, that is, a meandering amount, and outputs it to the coordinate correction circuit 9. The processing content of the coordinate correction circuit 9 is the same as that in the first embodiment. Therefore, according to the third embodiment, the same effect as in the second embodiment can be obtained.

(Fourth embodiment)
Next, a fourth embodiment of the present invention will be described with reference to FIG. FIG. 9 is a block diagram showing a schematic configuration of the fourth embodiment. In the fourth embodiment, a line sensor camera array in which two line sensor cameras 4a, 4b; 4c, 4d corresponding to a high-resolution inspection are arranged at regular intervals along the width direction of the inspection object 1, Two rows are arranged at regular intervals along the longitudinal direction of the inspection object 1, and the imaging unit is configured to image the entire width direction of the inspection object 1. Further, edge detection units 7a and 7b are arranged corresponding to the respective line sensor camera rows, and the edge positions located in the width direction of the imaging portions of the corresponding line sensor camera rows are detected by the respective edge detection units 7a and 7b. Like to do.

  The image processing circuits 5a to 5d convert image data for each pixel into gradation data, and detect the presence / absence of a defect based on the gradation data. Specifically, when the gradation data of a pixel is greater than or equal to a predetermined threshold value, the pixel is determined to be defective. The defect coordinate calculation circuit 6a calculates the coordinates of the defect detected by the image processing circuits 5a and 5b with the reference edge position of the inspection object 1 as the origin, and outputs it to the coordinate correction circuit 9a. The defect coordinate calculation circuit 6b calculates the coordinates of the defects detected by the image processing circuits 5c and 5d with the reference edge position of the inspection object 1 as the origin, and outputs the coordinates to the coordinate correction circuit 9b.

  The meandering amount calculation circuit 8a calculates a deviation amount between the edge position detected by the edge detection unit 7a and the reference edge position, that is, a meandering amount, and outputs it to the coordinate correction circuit 9a. The meandering amount calculation circuit 8b calculates a deviation amount between the edge position detected by the edge detector 7b and the reference edge position, that is, a meandering amount, and outputs it to the coordinate correction circuit 9b.

  When the coordinates of the defect are input from the defect coordinate calculation circuit 6a, the coordinate correction circuit 9a corrects the coordinates based on the meandering amount calculated by the meandering amount calculation circuit 8a and outputs corrected coordinates. When the coordinates of the defect are input from the defect coordinate calculation circuit 6b, the coordinate correction circuit 9b corrects the coordinates based on the meandering amount calculated by the meandering amount calculation circuit 8b and outputs corrected coordinates.

Therefore, according to the fourth embodiment, in addition to the effects described in the second embodiment, the following effects can be obtained.
(1) In the fourth embodiment, the meandering amounts of the edges in the imaging regions of the plurality of line sensor camera rows are respectively calculated, and when a defect is detected, the coordinates of the defect are represented by the line sensor corresponding to the detected defect. Since correction is made based on the meandering amount of the edge corresponding to the imaging part of the camera row, even if there is a difference in the meandering amount of the edge corresponding to the imaging part of each line sensor camera row, the coordinates of the defect are obtained with high accuracy. Can do.

1 is a block diagram showing a schematic configuration of a defect inspection apparatus according to a first embodiment of the present invention. The flowchart for demonstrating the procedure of the inspection process in a defect inspection apparatus. The schematic diagram for demonstrating the procedure at the time of calculating the amount of meandering of an edge. The schematic diagram for demonstrating the procedure at the time of determining the presence or absence of a defect and calculating a coordinate. The schematic diagram for demonstrating the process of manufacturing the film 2. FIG. The top view of the film 2. FIG. The block diagram which shows the schematic structure of 2nd Embodiment. The block diagram which shows the schematic structure of 3rd Embodiment. The block diagram which shows the schematic structure of 4th Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Test object, 2 ... Film, 2a, 2b, 2c ... Slit part, 3 ... Base material, 4 ... Imaging part, 4a, 4b, 4c, 4d ... Line sensor camera, 5, 5a, 5b, 5c, 5d Image processing circuit 6, 6a, 6b Defect coordinate calculation circuit 7, 7a, 7b Edge detection unit 8, 8a, 8b Meander amount calculation circuit 9, 9a, 9b Coordinate correction circuit 15 Defect Inspection device, 20 ... defects, A1 to A10, B1 to Bn ... pixels, W ... inspection width.

Claims (7)

In a defect inspection method for detecting a defect of a long body continuously running in the longitudinal direction,
A defect inspection method, characterized in that a meandering amount in the width direction of a long body at a defect detection site is obtained, and the coordinates in the widthwise direction of a detected defect are corrected according to the meandering amount and output.   The defect inspection method according to claim 1, wherein the meandering amount of the long body is obtained by detecting an edge position of the long body. A defect detection means for detecting a defect in the elongated body;
Meandering amount calculating means for calculating the amount of meandering in the width direction of the long body;
Based on the detection result of the defect detection means, defect coordinate calculation means for calculating defect coordinates when the amount of meandering of the elongated body is 0,
A defect inspection apparatus comprising: a coordinate correction unit that corrects and outputs the defect coordinates calculated by the defect coordinate calculation unit based on the meandering amount calculated by the meandering amount calculation unit.   The defect inspection apparatus according to claim 3, wherein the meandering amount calculation unit calculates a meandering amount in the width direction of the long body by detecting an edge position of the long body.   The meandering amount calculation means includes: an imaging unit that images a long body and outputs image data; and an image processing unit that detects an edge position of the long body based on the image data. Item 5. The defect inspection apparatus according to Item 4.   The defect according to claim 5, wherein the image processing unit is configured to detect a defect of a long body based on the image data, and the defect detection unit is also used as the meandering amount calculation unit. Inspection device. The imaging unit includes a line sensor camera array in which a plurality of line sensor cameras for imaging a part of a long body are arranged at a predetermined interval along a width direction of the long body. Arranged in a plurality of rows at regular intervals along the longitudinal direction, and configured to image the entire width direction of the elongated body,
The image processing unit is configured by a plurality of edge detection units that detect edge positions positioned in the width direction of the elongated body with respect to the imaging part of the line sensor camera row for each line sensor camera row. The defect inspection apparatus according to claim 5.

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