JP2006253312A5 - - Google Patents
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- JP2006253312A5 JP2006253312A5 JP2005065828A JP2005065828A JP2006253312A5 JP 2006253312 A5 JP2006253312 A5 JP 2006253312A5 JP 2005065828 A JP2005065828 A JP 2005065828A JP 2005065828 A JP2005065828 A JP 2005065828A JP 2006253312 A5 JP2006253312 A5 JP 2006253312A5
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- JP
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005065828A JP2006253312A (ja) | 2005-03-09 | 2005-03-09 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005065828A JP2006253312A (ja) | 2005-03-09 | 2005-03-09 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006253312A JP2006253312A (ja) | 2006-09-21 |
| JP2006253312A5 true JP2006253312A5 (enExample) | 2008-04-17 |
Family
ID=37093487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005065828A Pending JP2006253312A (ja) | 2005-03-09 | 2005-03-09 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006253312A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5121476B2 (ja) * | 2008-01-29 | 2013-01-16 | 株式会社アルバック | 真空処理装置 |
| JP6100564B2 (ja) * | 2013-01-24 | 2017-03-22 | 東京エレクトロン株式会社 | 基板処理装置及び載置台 |
| JP6566686B2 (ja) * | 2015-03-31 | 2019-08-28 | 三菱重工機械システム株式会社 | 容器に成膜する装置 |
| KR102155579B1 (ko) * | 2019-01-30 | 2020-09-14 | 공주대학교 산학협력단 | 마이크로파를 이용한 가열장치 |
| JP7278175B2 (ja) * | 2019-08-23 | 2023-05-19 | 東京エレクトロン株式会社 | 基板処理装置、基板処理装置の製造方法及びメンテナンス方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2897168B2 (ja) * | 1990-06-14 | 1999-05-31 | アネルバ株式会社 | 真空容器のマイクロ波導入用窓 |
| US6357385B1 (en) * | 1997-01-29 | 2002-03-19 | Tadahiro Ohmi | Plasma device |
| JP4260322B2 (ja) * | 2000-01-04 | 2009-04-30 | シャープ株式会社 | プラズマプロセス装置 |
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2005
- 2005-03-09 JP JP2005065828A patent/JP2006253312A/ja active Pending