JP2006253312A5 - - Google Patents

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Publication number
JP2006253312A5
JP2006253312A5 JP2005065828A JP2005065828A JP2006253312A5 JP 2006253312 A5 JP2006253312 A5 JP 2006253312A5 JP 2005065828 A JP2005065828 A JP 2005065828A JP 2005065828 A JP2005065828 A JP 2005065828A JP 2006253312 A5 JP2006253312 A5 JP 2006253312A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005065828A
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JP2006253312A (ja
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Application filed filed Critical
Priority to JP2005065828A priority Critical patent/JP2006253312A/ja
Priority claimed from JP2005065828A external-priority patent/JP2006253312A/ja
Publication of JP2006253312A publication Critical patent/JP2006253312A/ja
Publication of JP2006253312A5 publication Critical patent/JP2006253312A5/ja
Pending legal-status Critical Current

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JP2005065828A 2005-03-09 2005-03-09 プラズマ処理装置 Pending JP2006253312A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005065828A JP2006253312A (ja) 2005-03-09 2005-03-09 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005065828A JP2006253312A (ja) 2005-03-09 2005-03-09 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JP2006253312A JP2006253312A (ja) 2006-09-21
JP2006253312A5 true JP2006253312A5 (ja) 2008-04-17

Family

ID=37093487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005065828A Pending JP2006253312A (ja) 2005-03-09 2005-03-09 プラズマ処理装置

Country Status (1)

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JP (1) JP2006253312A (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5121476B2 (ja) * 2008-01-29 2013-01-16 株式会社アルバック 真空処理装置
JP6100564B2 (ja) * 2013-01-24 2017-03-22 東京エレクトロン株式会社 基板処理装置及び載置台
JP6566686B2 (ja) * 2015-03-31 2019-08-28 三菱重工機械システム株式会社 容器に成膜する装置
KR102155579B1 (ko) * 2019-01-30 2020-09-14 공주대학교 산학협력단 마이크로파를 이용한 가열장치
JP7278175B2 (ja) * 2019-08-23 2023-05-19 東京エレクトロン株式会社 基板処理装置、基板処理装置の製造方法及びメンテナンス方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2897168B2 (ja) * 1990-06-14 1999-05-31 アネルバ株式会社 真空容器のマイクロ波導入用窓
US6357385B1 (en) * 1997-01-29 2002-03-19 Tadahiro Ohmi Plasma device
JP4260322B2 (ja) * 2000-01-04 2009-04-30 シャープ株式会社 プラズマプロセス装置

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