JP2006253039A5 - - Google Patents

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Publication number
JP2006253039A5
JP2006253039A5 JP2005070053A JP2005070053A JP2006253039A5 JP 2006253039 A5 JP2006253039 A5 JP 2006253039A5 JP 2005070053 A JP2005070053 A JP 2005070053A JP 2005070053 A JP2005070053 A JP 2005070053A JP 2006253039 A5 JP2006253039 A5 JP 2006253039A5
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JP
Japan
Prior art keywords
flexible body
contact
contact portion
substrate
micromachine switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005070053A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006253039A (ja
JP4643316B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005070053A priority Critical patent/JP4643316B2/ja
Priority claimed from JP2005070053A external-priority patent/JP4643316B2/ja
Publication of JP2006253039A publication Critical patent/JP2006253039A/ja
Publication of JP2006253039A5 publication Critical patent/JP2006253039A5/ja
Application granted granted Critical
Publication of JP4643316B2 publication Critical patent/JP4643316B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2005070053A 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法 Expired - Fee Related JP4643316B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005070053A JP4643316B2 (ja) 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005070053A JP4643316B2 (ja) 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法

Publications (3)

Publication Number Publication Date
JP2006253039A JP2006253039A (ja) 2006-09-21
JP2006253039A5 true JP2006253039A5 (fr) 2008-04-24
JP4643316B2 JP4643316B2 (ja) 2011-03-02

Family

ID=37093281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005070053A Expired - Fee Related JP4643316B2 (ja) 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法

Country Status (1)

Country Link
JP (1) JP4643316B2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4919819B2 (ja) * 2007-01-24 2012-04-18 富士通株式会社 マイクロマシンデバイスの駆動制御方法および装置
WO2009063627A1 (fr) * 2007-11-14 2009-05-22 Panasonic Corporation Dispositif électromécanique et équipement électrique utilisant celui-ci
KR101092926B1 (ko) * 2009-05-21 2011-12-12 한국과학기술원 공진형 회전이동 구동기 및 이를 갖는 공진형 회전이동 구동 어레이
US7928333B2 (en) * 2009-08-14 2011-04-19 General Electric Company Switch structures

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI109155B (fi) * 2000-04-13 2002-05-31 Nokia Corp Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi
JP2004134370A (ja) * 2002-07-26 2004-04-30 Matsushita Electric Ind Co Ltd スイッチ

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