JP2006253039A5 - - Google Patents

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Publication number
JP2006253039A5
JP2006253039A5 JP2005070053A JP2005070053A JP2006253039A5 JP 2006253039 A5 JP2006253039 A5 JP 2006253039A5 JP 2005070053 A JP2005070053 A JP 2005070053A JP 2005070053 A JP2005070053 A JP 2005070053A JP 2006253039 A5 JP2006253039 A5 JP 2006253039A5
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JP
Japan
Prior art keywords
flexible body
contact
contact portion
substrate
micromachine switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005070053A
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English (en)
Japanese (ja)
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JP4643316B2 (ja
JP2006253039A (ja
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Publication date
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Priority to JP2005070053A priority Critical patent/JP4643316B2/ja
Priority claimed from JP2005070053A external-priority patent/JP4643316B2/ja
Publication of JP2006253039A publication Critical patent/JP2006253039A/ja
Publication of JP2006253039A5 publication Critical patent/JP2006253039A5/ja
Application granted granted Critical
Publication of JP4643316B2 publication Critical patent/JP4643316B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2005070053A 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法 Expired - Fee Related JP4643316B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005070053A JP4643316B2 (ja) 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005070053A JP4643316B2 (ja) 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法

Publications (3)

Publication Number Publication Date
JP2006253039A JP2006253039A (ja) 2006-09-21
JP2006253039A5 true JP2006253039A5 (de) 2008-04-24
JP4643316B2 JP4643316B2 (ja) 2011-03-02

Family

ID=37093281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005070053A Expired - Fee Related JP4643316B2 (ja) 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法

Country Status (1)

Country Link
JP (1) JP4643316B2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4919819B2 (ja) * 2007-01-24 2012-04-18 富士通株式会社 マイクロマシンデバイスの駆動制御方法および装置
JP5130291B2 (ja) * 2007-11-14 2013-01-30 パナソニック株式会社 電気機械素子およびそれを用いた電気機器
KR101092926B1 (ko) * 2009-05-21 2011-12-12 한국과학기술원 공진형 회전이동 구동기 및 이를 갖는 공진형 회전이동 구동 어레이
US7928333B2 (en) * 2009-08-14 2011-04-19 General Electric Company Switch structures

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI109155B (fi) * 2000-04-13 2002-05-31 Nokia Corp Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi
JP2004134370A (ja) * 2002-07-26 2004-04-30 Matsushita Electric Ind Co Ltd スイッチ

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