JP2006237044A - Color filter substrate housing cassette - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate housing cassette preventing housed color filter substrates from being damaged and the generation of foreign matter in the inside of the housing cassette by preventing rubbing between a pattern forming surface and the inside of the housing cassette. <P>SOLUTION: Mound-shaped groove parts 11 each formed into a shape having a mound base-like inclined surface 51 from the top of the inside of a housing cassette 10 toward a bottom 23 of a side wall 22 side are provided on the side surface opposing a pattern forming surface 40 including a mark or the like formed on one surface of a substrate 20, and the color filter substrate 20 is placed on the parts 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a storage cassette for storing a glass substrate used in a manufacturing process of a glass substrate including a large photomask, a color filter, a PDP panel, an organic EL panel, a COG semiconductor, and the like, particularly a color filter substrate storage cassette.

  A plate-shaped glass substrate for precision parts such as a photomask, a color filter, and a PDP panel, which is one of electronic parts, is very strictly restricted and controlled against dust adhesion. Adhesion of dust has a significant impact on its performance, so care must be taken when handling it. For this reason, in this manufacturing process, it is placed in a plastic storage cassette, and the manufacturing process is transported or temporarily retained. At the time of each processing step, the glass substrate is taken out from the storage cassette, loaded into a processing apparatus, and immediately after the processing is completed, it is put into the original storage cassette. That is, the glass substrate is repeatedly taken out and put into the storage cassette, and is transported to a multi-process processing apparatus. At this time, due to rubbing or the like inside the glass substrate and the storage cassette, for example, in the contact portion, to the glass substrate of floating dust generated from scratches on the front and back surfaces of the glass substrate, for example, scratches on the formed pattern, or dust from the rubbing portion. This causes problems such as increased reattachment. In addition, the number of manufacturing processes tends to increase, which has become increasingly problematic.

  A glass substrate including a conventional color filter or the like (hereinafter referred to as a color filter substrate 20) is placed and placed in a substrate storage cassette 10 as shown in FIG. 4 and used for conveyance in the manufacturing process.

  The storage cassette for the color filter substrate will be described. The color filter substrate storage cassette 10 is box-shaped and has a fully opened shape on the front side, and its members are manufactured by a heat-molded product using a plastic resin mold, a processed product using an adhesive, or the like. Further, the material is a thermosetting plastic resin such as a foamable styrene resin, urethane, silicone, nylon or the like. The thermoplastic plastic resin is polyethylene or the like.

  4A to 4C are explanatory views of an example of a conventional storage cassette for a color filter substrate. In the conventional color filter substrate storage cassette 10, the groove parts 1 that support the color filter substrate 20 are fixed to the left and right side walls 22 at the same height on the left and right sides, and in order from the bottom 23 at regular intervals, for example, 6 mm intervals. Has been. In the color filter substrate storage cassette 10, the front side is fully opened, and the color filter substrate 20 is stored from the opening. That is, the color filter substrate storage cassette 10 puts the color filter substrate 20 horizontally on the groove part 1 from the front side of the drawing. Normally, the substrate storage cassette 10 stores 10 to 25 sheets of the color filter substrate 20.

  Next, this will be described in detail. FIG. 4A is a side cross-sectional view of the substrate storage cassette, and the groove component 1 is fixed to the same height on the left and right sides of the side wall 22. A state in which the color filter substrate 20 is loaded and placed on the groove component 1 is shown. The drawing is a partial enlarged view of a part.

  FIG. 4B is a top view of the substrate storage cassette 10. There is a groove part 1 fixed to the side walls 22 on both sides, a full open part 24 is shown on the lower side of the figure, and the color filter substrate 20 is put on the groove part 1 on both sides from the full open part side, and shows a state where it is placed. Yes. The groove component 1 and the color filter substrate 20 are in contact with each other, with the back surface of the color filter substrate 20 being in close contact with the surface of the groove component 1.

  FIG. 4C is a partially enlarged view of a broken line in FIG. 4A, and is a side sectional view in which the color filter substrate 20 is put on the groove parts 1 on both sides. The drawings are symmetrical, and one side is omitted. The groove part 1 is disposed inside the side wall 22, the upper groove part 1 is also disposed immediately above the groove part 1, and one color filter is provided in the space between the groove part 1 and the upper groove part 1. This is a substrate storage cassette in which the substrate 20 is stored. The color filter substrate 20 stored in the color filter substrate storage cassette is placed at a height position LL― in the drawing.

  Next, an operation procedure for storing the color filter substrate 20 in the color filter substrate storage cassette will be described. After placing the color filter substrate 20 placed at the loading / unloading position of the manufacturing process so as to crawl using a vacuum jig of a dedicated automatic transfer machine arm or a holding jig such as a contact claw (hereinafter referred to as a claw), a cassette After moving to the space between the groove part 1 to be placed and the groove part 1 above it, for example, the height of the upper surface of the claw is the height of the space between the groove part 1 and the groove part 1 above it. After fine adjustment to the same height position as HH ｀, move horizontally from the front side of the drawing parallel to the groove part 1 from the front side of the drawing to the back side of the drawing, temporarily stop at a predetermined position, and then lower the automatic arm claw downward , Put both ends of the color filter substrate 20 on the upper surfaces of the left and right groove parts 1 at the height position of LL, and lower the automatic arm claw to a height position near the lower surface of the groove parts 1 After the temporary stop, move horizontally from the back of the drawing to the near side, Moves from Preparative position to the closing ejection position, one color filter substrate 20 is housed.

  In FIG. 4 described above, there is a gap from the upper surface of the color filter substrate 20 to the lower surface of the groove component 1 directly above, and a space is formed. The space area is a minimum necessary space when the color filter substrate 20 is inserted. For example, when the vertical distance between the groove part 1 and the groove part 1 on the groove part 1 is 6 mm and the thickness of the color filter substrate 20 is 0.7 mm, the space becomes 5.3 mm, L−L ｀, The difference between the heights of H and H is 3 mm. Due to variations in the substrate, automatic arm position control accuracy, etc., when the substrate is stored, the color filter substrate 20 and the back surface of the groove component 1 may come into contact with each other, and the pattern of the color filter substrate may be rubbed. In addition, the device which fixes the color filter board | substrate 20 from upper direction is not given.

  The color filter substrate 20 will be described. The thickness of the color filter substrate 20 is gradually reduced to 0.7 mm, 0.5 mm, and recently 0.4 mm, and the weight of the substrate itself is reduced.

  The dimensional size of the color filter substrate 20 is being standardized by standardization. Usually, the substrate storage cassette 10 is limited to one kind of shape and dimension for each dimension size. In particular, the inner dimensions of the left and right side walls are strictly defined as the dimension size (in the width direction) of the color filter substrate 20. In recent years, the trend of increasing the size and size of the color filter substrate 20 has been accelerated, and the thickness and thickness of the color filter substrate 20 have been increasing. Due to the reduction in thickness and size, problems due to bending of the substrate have occurred. Since the weight is reduced, stabilization by its own weight cannot be expected.

  Normally, at the time of loading into the substrate storage cassette 10, the color filter substrate 20 is loaded with the pattern surface facing upward, and the back surface of the substrate is loaded in close contact with the upper surface of the groove component 1. That is, the color filter substrate is loaded and placed in the substrate storage cassette with the pattern surface facing upward.

The color filter substrate pattern will be described. The color filter substrate 20 is obtained by forming a color filter substrate pattern on one side of a transparent glass substrate. The pattern formation region is the entire central portion excluding the vicinity of the periphery of the end portion of the substrate. The surface of the pattern is soft and easily damaged. In recent years, the number of impositions of the color filter substrate 20 has increased due to an increase in the size of the substrate, the pattern formation area has expanded, and the pattern has been increasing to the immediate vicinity of the edge of the substrate.

  Usually, a color filter substrate pattern is formed by forming a multi-faceted color filter pattern and adding an alignment mark or the like necessary for the manufacturing process of the color filter substrate to the periphery thereof. On one side of the glass substrate, it is formed by a color filter pattern, a region for forming a mark or the like around the color filter pattern, and a pattern formation prohibition region. For this reason, in recent years, there is an increasing tendency that the pattern formation area including marks and the like is expanded and the pattern formation prohibition area becomes narrow. The periphery of the end portion of the color filter substrate 20, for example, the exposed portion of the substrate surface is narrowed, and the marks and the like arranged in the peripheral portion of the pattern formation region are close to the side end portion of the color filter substrate 20. When the color filter substrate is inserted, the front and back surfaces of the upper and lower groove parts rub against the marks. Due to the rubbing, the surface of the pattern that is soft and easily scratched has a problem of generating scratches and generating dust.

  In the case where the groove part and the pattern such as the mark rub against each other, there is a risk that the surface of the pattern such as the mark and the back surface of the groove part immediately above the part will rub, and the countermeasure is an important problem (see Patent Document 1). .

  The color filter substrate 20 is severely restricted from adhering foreign matter including the front and back sides or end portions of the substrate, and is washed before being put into the color filter substrate storage cassette 10. In addition, the color filter substrate storage cassette 10 must be cleaned immediately before use. In the storage cassette for the color filter substrate, it is important to maintain and store the color filter substrate in a highly clean state that does not generate dust in the box.

  As described above, in recent years, the color filter substrate 20 has been increased in size and the plate thickness has been reduced, so that the color filter substrate storage cassette 10 can be used in the color filter substrate manufacturing process or during temporary storage. The filter substrate 20 is not fixed on the groove component, and is repeatedly moved finely to cause chipping or breakage of the end due to contact or rubbing between the color filter substrate 20 and the inner wall surface of the box 10, particularly the groove component 1. It becomes a defective product. Dust generation due to the contact, rubbing, or the like, or chipping or breakage at the end is a problem.

  In addition, the trend of increasing the size and size of the color filter substrate 20 is accelerated, and the color filter substrate 20 is formed on the left and right groove parts 1 during the manufacturing process of the color filter substrate by reducing the thickness and increasing the size. Since they are not fixed in between, or due to vibration due to the bending of the substrate, quality deterioration such as scratches on the pattern portion, chipping or breakage of the substrate, or adhesion of foreign matter may occur.

The known literature is described below.
JP-A-7-300172

  SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-described drawbacks, and by providing a substrate storage cassette that prevents rubbing between the pattern forming surface of the color filter substrate and the inside of the storage cassette, the stored color It is an object of the present invention to provide a substrate storage cassette that does not damage the filter substrate and does not generate foreign matter in the storage cassette.

The invention according to claim 1 of the present invention is a rectangular groove component having a plurality of steps on the inner wall surfaces of the left and right side walls fixed on the bottom of a cassette for storing a glass substrate such as a color filter at equal intervals from the upper surface of the bottom. The color filter substrate on which the pattern including a mark or the like is formed on one surface between the groove component and the groove component immediately above the groove component is placed in the horizontal direction with the pattern formation surface as the upper surface. In the color filter substrate storage cassette, the groove component has a mountain shape from the top on the inside of the storage cassette to the bottom on the side wall on the side facing the pattern forming surface including the mark formed on one side of the substrate. A storage cassette for a color filter substrate, wherein the storage cassette is a chevron-shaped groove part formed in a shape with a skirt-like inclined surface.

  In the invention according to claim 2 of the present invention, the chevron-shaped groove component is provided with a chevron-shaped skirt-shaped inclined surface from the top to the bottom on one side of the glass substrate or the side facing the other side. 2. The color filter substrate storage cassette according to claim 1, wherein the storage cassette is formed in a shape.

  The invention according to claim 3 of the present invention is such that the chevron-shaped groove component has a side surface facing the pattern forming surface side on one side of the glass substrate, the top portion inside the storage cassette is an inclined surface, The bottom portion has a horizontal plane, and the boundary between the inclined plane and the horizontal plane formation area is a pattern outside the outermost edge of the pattern formation area including at least a mark or the like in the pattern formation area on the opposing glass substrate. 3. The color filter substrate storage cassette according to claim 1, wherein the storage cassette is formed at a position in contact with the formation prohibition region.

  By using the color filter substrate manufacturing process using the substrate storage cassette to which the chevron-shaped groove component of the present invention is fixed, the color filter substrate is placed on and mounted on the chevron-shaped groove component. Since the pattern surface of the board does not come into direct contact with the upper and lower chevron grooves, the pattern surface of the color filter board is greatly reduced in contact with the upper and lower chevron grooves and the pattern surface is not scratched. No foreign matter is generated.

  The mountain-shaped groove component of the present invention is fixed in the substrate storage cassette, and the color filter substrate is put on and mounted on the mountain-shaped groove component, so that the color filter substrate is manufactured by the upper and lower mountain-shaped groove components. There is provided a storage cassette for a color filter substrate that has less backlash during the conveyance of the process, or the contact surface between the pattern surface and the upper and lower chevron-shaped groove parts is greatly reduced to prevent rubbing, etc. There is an effect that it is possible to provide a color filter substrate in which the pattern surface is not damaged and the substrate is not chipped or broken during the transport of the manufacturing process using the storage cassette.

  FIG. 1A to FIG. 1C are explanatory views of an embodiment of a storage cassette for a color filter substrate according to an embodiment of the present invention.

  FIG. 1 shows an example of a color filter substrate storage cassette according to claim 1. The groove component has a shape in which an inclined surface 51 is formed on a side surface facing a pattern forming surface including a mark or the like formed on one surface on the substrate, and a parallel surface 52 is formed on the surface side facing the other surface on the substrate. This is a chevron-shaped groove component 11 to be attached.

  In FIG. 1A, a plurality of ridge-shaped groove parts 11 are fixed to inner wall surfaces of left and right side walls 22 fixed on the bottom 23 of the substrate storage cassette 10 at equal intervals from the upper surface of the bottom. The chevron-shaped groove part 11 has a top surface that is horizontal, a back surface that is an inclined surface, and a shape in which the inclination spreads in a mountain shape from the top to the bottom. In the substrate storage cassette 10 of the present invention, the color filter substrate 20 is placed horizontally between the angle groove component 11 and the angle groove component 11 directly above. The color filter substrate 20 is placed with the pattern formation surface side 40 as the upper surface and the back surfaces of both ends of the substrate in contact with the horizontal surface 52 of the upper surface of the chevron-shaped groove component 11, and the surface of the substrate is the pattern formation surface side. The inclined surface 51 on the back surface of the chevron-shaped groove part 11 is disposed so as to face the surfaces of both end portions of the pattern forming surface side 40.

  As shown in the figure, the color filter substrate 20 has a wider space with the angled groove part 11 due to the inclined surface 51 on the back surface of the angled groove part 11, and is rubbed even when being loaded into or taken out from the board storage cassette 10. Occurrence is greatly improved.

  FIG. 1B is a top view of the color filter substrate storage cassette according to the embodiment of the present invention.

  The figure shows a state in which there are angled groove parts 11 fixed to the side walls 22 on both sides, and the color filter substrate 20 is placed on and mounted on the angled groove parts 1 on both sides. The state in which the chevron-shaped groove component 1 and the color filter substrate 20 are in contact with each other is placed with the back end of the color filter substrate 20 in contact with the groove component 1. In the lower part of the figure, there is a fully open portion 24, and the color filter substrate 20 is inserted and removed from the opening.

  FIG.1 (c) is the elements on larger scale of the broken-line area | region in Fig.1 (a).

  FIG. 1C is a side cross-section in a state in which the color filter substrate 20 is placed on the horizontal surface 52 of the chevron-shaped groove component 11 of the present invention, and both end portions of the pattern forming surface side 40 of the color filter substrate 20 are This is a state facing the inclined surface 51 of the chevron-shaped groove part 11 of the present invention. Unlike the shape of the conventional groove component 1, the chevron-shaped groove component 11 of the present invention has a back surface formed with an inclined surface 51, the bottom shape is the same distance as the conventional shape, and the top shape is the same. Is a one-side mountain shape narrowed according to the inclination angle. Therefore, the arrangement pitch of the groove component 1 and the mountain-shaped groove component 11 is the same distance. In this example, when the arrangement pitch of the chevron-shaped groove parts 11 is the same as that of the groove parts 1, there is no change in the horizontal plane 52, but there is a great change in the inclined plane 51. To explain the change, when the color filter substrate 20 comes into contact with the back surface of the chevron-shaped groove part 11, the contact position with the inclined surface 51 of the back surface is the both ends of the substrate, and the mark on the pattern forming surface 40 Etc. 32 are not in direct contact.

  FIGS. 2A to 2C are explanatory views of an embodiment of a storage cassette for a color filter substrate according to an embodiment of the present invention.

  FIG. 2 shows an example of a color filter substrate storage cassette according to claim 2. The chevron-shaped groove component 11 has a shape in which an inclined surface 51 is provided on the surface side facing the pattern forming surface 40, and the chevron-shaped groove component 11 having a shape in which the inclined surface 51 is also provided on the surface side facing the one surface. is there.

  In FIG. 2A, a plurality of ridge-shaped groove parts 11 are fixed to the inner wall surfaces of the left and right side walls 22 fixed on the bottom 23 of the substrate storage cassette 10 at equal intervals from the bottom upper surface. The chevron-shaped groove part 11 has an inclined surface 51 on the upper surface and an inclined surface 51 on the back surface, and the inclination extends in a mountain shape from the top to the bottom. In the substrate storage cassette 10 of the present invention, the color filter substrate 20 is placed horizontally between the angle groove component 11 and the angle groove component 11 directly above. The color filter substrate 20 is placed with the pattern forming surface side 40 as the upper surface, and the back surfaces of both ends of the substrate are in contact with the inclined surface 51 of the upper surface of the chevron-shaped groove component 11, and the surface of the substrate is the pattern forming surface side 40. The inclined surface 51 on the back surface of the chevron-shaped groove part 11 is arranged so as to face the surfaces of both end portions of the pattern forming surface side 40.

  As shown in the figure, the color filter substrate 20 has a wide space with the chevron-shaped groove component 11 due to the inclined surfaces 51 on both the front and back surfaces of the chevron-shaped groove component 11, so that even when being loaded into or taken out from the substrate storage cassette 10. The occurrence of rubbing is greatly improved.

As shown in the figure, the color filter substrate 20 can have the same or narrow gap between the upper and lower chevron-shaped groove parts 11 at the bottom as in the prior art. The gap between the upper and lower chevron-shaped groove parts 11 is greatly widened at the top, and the occurrence of rubbing is greatly improved even when the substrate cassette 10 is inserted or removed.

  FIG. 2B is a top view of the color filter substrate storage cassette according to the embodiment of the present invention.

  The figure shows a state in which there are angled groove parts 11 fixed to the side walls 22 on both sides, and the color filter substrate 20 is placed on and mounted on the angled groove parts 1 on both sides. The chevron-shaped groove component 1 and the color filter substrate 20 are in contact with each other with the back end of the color filter substrate 20 in contact with the inclined surface 51. In the lower part of the figure, there is a fully open portion 24, and the color filter substrate 20 is inserted and removed from the opening.

  FIG.2 (c) is the elements on larger scale of the broken-line area | region in Fig.2 (a).

  FIG. 2C is a side cross-sectional view of the state in which the color filter substrate 20 is placed on the inclined surface 51 of the chevron-shaped groove component 11 of the present invention, and both end portions of the pattern forming surface side 40 of the color filter substrate 20 are This is a state facing the inclined surface 51 of the chevron-shaped groove part 11 of the present invention. Unlike the conventional groove part 1, the chevron-shaped groove part 11 of the present invention has a shape in which both front and back surfaces are formed with inclined surfaces 51. The bottom part has the same shape and the top part has the same top and bottom part. It is a double-sided mountain shape narrowed according to the inclination angle. Accordingly, the arrangement pitch of the groove component 1 and the mountain-shaped groove component 11 is the same. In this example, when the arrangement pitch of the chevron-shaped groove parts 11 is the same as that of the groove parts 1, there is a great change on the inclined surface 51. To explain the change, when the color filter substrate 20 is in contact with both the front and back surfaces of the chevron-shaped groove part 11, the first positions of contact with the inclined surfaces 51 on both the front and back surfaces are both ends of the substrate, The mark 32 on the pattern forming surface 40 is not in direct contact.

  FIG. 3 shows an example of the color filter substrate storage cassette according to the third aspect, which will be described in detail in the first embodiment. The chevron-shaped groove component 11 according to claim 3 has a shape in which an inclined surface 51 is provided on a surface facing the pattern forming surface 40 on the glass substrate, and the shape includes the inclined surface 51 at the top and the bottom thereof. It is a shape to which the parallel surface 52 is provided, and its boundary is a shape arranged at a position in contact with the pattern prohibition area outside the outermost edge of the pattern formation area including at least the mark or the like for pattern formation. This is a chevron-shaped groove component 11 having a shape in which a parallel surface 52 is provided on the side facing the direction (see FIG. 3).

  In addition, although the mountain-shaped groove part 11 of this invention is the same as the arrangement pitch of the conventional groove part 1, a shorter arrangement pitch is possible and it is important to optimize. In this example, the back surface of the chevron-shaped groove part 11 is limited to the inclined surface 51, the surface thereof is the horizontal surface 52 or the inclined surface 51, and the shapes of both the front and back surfaces may be the same or not. Furthermore, on both the front and back surfaces of the chevron-shaped groove part 11, it is possible to form the top part with the inclined surface 51 and the middle part to the bottom part with the horizontal surface 52, and it is important to optimize appropriately. In addition, the Example of the combination of the inclined surface 51 and the horizontal surface 52 is mentioned later.

  The substrate storage cassette 10 is manufactured by a thermoformed product using a plastic resin mold, a processed product using an adhesive, or the like. The material is an engineering resin, for example, the thermosetting plastic resin is polyimide, unsaturated polyester, epoxy, urethane, silicone, nylon or the like.

The thermoplastic plastic resin is polyethylene, polypropylene, polyethylene terephthalate, or the like.

  An embodiment of the color filter substrate storage cassette of the present invention will be described.

  FIGS. 3A to 3B are explanatory views for explaining the embodiment 1. FIG. 3A is a partially enlarged side section of the embodiment of the storage cassette for a color filter substrate, and FIG. It is the side cross section of the partial expansion of a color filter substrate, and the partial expansion plane of a reference figure.

  FIG. 3A is a partially enlarged side sectional view of an example of the color filter substrate storage cassette of the present invention. The substrate storage cassette 10 has a left side wall 22 on the bottom, and the chevron-shaped groove component 11 of the present invention is fixed to the side wall 22 at an interval of 6 mm in order from the bottom. The chevron-shaped groove part is 9 mm long. On the surface, the entire surface was formed by a horizontal surface 52. On the back side, a horizontal plane 52 was formed up to 4 mm from the bottom on the left side of the figure, and an inclined surface 51 was formed from the 4 mm to the top, and the top was formed in a shape that secured 2 mm. The bottom width is 6 mm and the top width is 2 mm. The arrangement pitch of the chevron-shaped groove parts 11 was 12 mm. That is, the bottom of the chevron-shaped groove part 11 is 6 mm, and the space between the chevron-shaped groove parts 11 is 6 mm at the bottom. For example, the chevron-shaped groove component 11 has a base (AC) of 6 mm, the chevron-shaped groove component 11 is fixed at an upper and lower interval of 6 mm, and when the color filter substrate 20 having a thickness of 0.5 mm is inserted into the space, Is 5.5 mm. Generally, when loading and unloading using an automatic desorption apparatus, the vertical movement distance for moving the substrate up and down is set to 3 mm. The distance between HH ｀ and LL ｀ in FIG. 3A was 3 mm. The chevron-shaped groove part 11 of the first embodiment used a perfluoroalkoxy (PFA) resin and a polypropylene resin.

  Next, the relationship between the inclined region 50 shown in FIG. 3A and the pattern formation region 30 including the mark of the color filter substrate will be described.

  First, the pattern formation region 30 including the marks on the color filter substrate will be described.

  In the color filter substrate of FIG. 3B, there are a pattern formation region 30 including a mark or the like in the center of the substrate and a pattern formation prohibition region 60 at both ends of the substrate on the outer periphery, and a pattern is formed in each formation region. ing. Marks 32 and the like are arranged on both ends of the substrate in the vicinity of the pattern formation prohibition region. That is, the pattern formation prohibition region 60 of the color filter substrate used in this embodiment is 4 mm from the end portion on the substrate side.

  In the shape of the chevron-shaped groove component 11 according to the present invention, the inclined region 50 is located inside 4 mm from the substrate side end. That is, in the first embodiment, the chevron is used to match the inner boundary line of the pattern formation prohibition region 60 of the color filter substrate 20 with the outer boundary line of the inclined region on the back surface of the chevron-shaped groove part 11. The shape dimensions of the groove part 11 were determined.

Using the color filter substrate storage cassette and 20 color filter substrates described above,
The storage operation of loading and unloading the color filter substrate 20 was carried out, and after the operation was completed, the occurrence of scratches and rubbing on the color filter substrate was observed. The storing operation was repeated 10 times with 20 sheets being stored. The color filter substrate storage cassette and the color filter substrate were cleaned according to the standard rules of the manufacturing process and then worked.

The loading operation is performed by using the arm of the automatic transfer machine, placing the first color filter substrate on the arm, and moving it to the height of the center of the space of the uppermost stage (20th stage) of the storage cassette 10 for the color filter board. After moving the arm in the horizontal direction, after temporarily stopping the position of the 20th stage, lowering it by 3 mm, placing it on the mountain groove part 11 of the 20th stage, and further lowering it by 3 mm, The arm is moved horizontally to the outside of the color filter substrate storage cassette 10, and then the second color filter substrate is again placed on the arm, and the next stage (19th stage) of the color filter substrate storage cassette 10 is placed. After moving to the height of the center of the space, the arm is moved in the horizontal direction, temporarily stopped at the position of the 19th step, dropped down by 3 mm, and placed on the 19th step mountain-shaped groove part 11, After 3mm lowering and pausing, And horizontally moving the over arm out of the color filter substrate accommodating cassette 10, hereinafter the same working operation of repeating performed, and turned to the color filter substrate 20 th.

  Next, in the take-out operation, the arm is moved to the center height of the mountain-shaped groove component 11 below the lowermost (first) stage in the color filter substrate storage cassette 10 by the reverse procedure of the above-described input operation, and then the arm is moved to the collar. Move horizontally into the filter substrate storage cassette 10 and lift it further by 3 mm. The 20th color filter substrate placed on the first ridge-shaped groove part 11 is scooped with an arm, temporarily stopped, and then lifted by 3 mm. After temporarily stopping at the center position of the first stage space, the arm is moved horizontally, the 20th color filter substrate on the arm is taken out of the storage cassette for the color filter substrate, and moved to a predetermined position. Then, the 20th color filter substrate is placed on the storage location from the arm. Thereafter, the same operation was repeated, and the first color filter substrate was taken out. The above operation was set as one cycle and repeated up to 10 cycles.

  After the storage operation was completed, the 20 color filter substrates were observed to have scratches on the pattern surface, chipping or breakage of the substrate. The observation method was visual recognition with a stereomicroscope, and the judgment criteria were implemented according to the standard rules of the manufacturing process. Further, the dust generation inside the color filter substrate storage cassette was visually confirmed by a jig, and the surface foreign matter of the color filter substrate was inspected by a foreign matter inspection machine.

  As a result, in the color filter substrate, it is not possible to confirm the occurrence of scratches on the pattern surface, chipping or breakage of the substrate. There was also no increase in foreign matter on the surface of the color filter substrate. Moreover, the dust generation inside the color filter substrate storage cassette was not visible. As described above, in Example 1, good results were confirmed.

BRIEF DESCRIPTION OF THE DRAWINGS It is a sectional side view of one Example of the storage cassette for color filter board | substrates of this invention, (a) is a general view, (b) is a top view, (c) is a partial expansion of a mountain-shaped groove | channel component. FIG. BRIEF DESCRIPTION OF THE DRAWINGS It is a sectional side view of one Example of the storage cassette for color filter board | substrates of this invention, (a) is a general view, (b) is a top view, (c) is a partial expansion of a mountain-shaped groove | channel component. FIG. BRIEF DESCRIPTION OF THE DRAWINGS It is drawing explaining Example 1 of the storage cassette for color filter substrates of this invention, (a) is a partial expanded side sectional view of a mountain-shaped groove part, (b) is a partially expanded side sectional view of a color filter substrate. FIG. It is a sectional side view of the conventional storage cassette for color filter substrates, (a) is an overall view, (b) is a top view, and (c) is a partially enlarged view of a groove component.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Groove component 10 ... Substrate storage cassette 11 ... Mountain-shaped groove component 20 ... Color filter substrate 22 ... Side wall 23 ... Bottom 24 ... Fully open part 30 ... Pattern formation area 31 including a mark etc. (Color filter) Pattern 32 ... Mark 40 ... Pattern forming surface side 50 ... Inclined region 51 ... Inclined surface 52 ... Horizontal surface 60 ... Pattern formation prohibition region

Claims (3)

  A plurality of rectangular groove parts are fixed to the inner wall surfaces of the left and right side walls fixed on the bottom of a cassette for storing a glass substrate such as a color filter at equal intervals from the upper surface of the bottom part. In the color filter substrate storage cassette, the color filter substrate is placed in a horizontal direction with the pattern forming surface of the color filter substrate having a pattern including a mark or the like formed on one side as an upper surface between the groove components. The part is formed in a shape that attaches a mountain-shaped skirt-like inclined surface from the top on the inside of the storage cassette to the bottom on the side wall side on the side facing the pattern forming surface including the mark formed on one side of the substrate. A storage cassette for a color filter substrate, which is a chevron-shaped groove component.   The chevron-shaped groove component is formed in a shape in which a chevron-shaped skirt-shaped inclined surface is formed from the top to the bottom on one side of the glass substrate or the side facing the other side. A storage cassette for a color filter substrate according to 1.   The chevron-shaped groove component has a shape in which the top of the inner side of the storage cassette is an inclined surface and the bottom of the side wall is a horizontal surface on the side facing the pattern forming surface on one side of the glass substrate. The boundary portion between the surface and horizontal plane formation region is formed at a position in contact with the pattern formation prohibition region outside the outermost end portion of the pattern formation region including at least the mark of the pattern formation region on the opposing glass substrate. 3. A storage cassette for a color filter substrate according to claim 1, wherein the storage cassette is for a color filter substrate.

Images